CN113463044A - Equipment for binding target material in vacuum - Google Patents
Equipment for binding target material in vacuum Download PDFInfo
- Publication number
- CN113463044A CN113463044A CN202110647624.2A CN202110647624A CN113463044A CN 113463044 A CN113463044 A CN 113463044A CN 202110647624 A CN202110647624 A CN 202110647624A CN 113463044 A CN113463044 A CN 113463044A
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- CN
- China
- Prior art keywords
- vacuum
- box body
- product
- lifting
- air pipe
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
- C23C14/3414—Metallurgical or chemical aspects of target preparation, e.g. casting, powder metallurgy
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22D—CASTING OF METALS; CASTING OF OTHER SUBSTANCES BY THE SAME PROCESSES OR DEVICES
- B22D19/00—Casting in, on, or around objects which form part of the product
- B22D19/04—Casting in, on, or around objects which form part of the product for joining parts
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22D—CASTING OF METALS; CASTING OF OTHER SUBSTANCES BY THE SAME PROCESSES OR DEVICES
- B22D45/00—Equipment for casting, not otherwise provided for
Abstract
The invention provides equipment for binding a target material in vacuum.A switching cabin door is lifted through a lifting cylinder, a limiting block is lifted through a lifting motor, and a sliding block is driven to move on a transverse sliding groove through a pushing cylinder, so that a product is lifted by a lifting hook and is brought into or taken out of a box body; a placing groove is formed to place a product in the box body, and the positioning block is rotated by rotating the spiral positioning rod, so that the product in the placing groove is positioned; a lifting motor is arranged to drive a limiting block to press downwards, so that a product is secondarily positioned; the positioning block is controlled by the threaded positioning rod to limit according to the diameter of a product, and the lifting cylinder is adopted to drive the limiting block to limit for the second time according to the height of the product, so that the product is effectively prevented from shaking in the production process; and parts such as a transverse sliding groove, a pushing cylinder, a lifting hook and the like are adopted to greatly improve the convenience and labor efficiency of feeding and discharging, and the production quality and accuracy are also greatly improved.
Description
Technical Field
The invention relates to the field of target material production equipment, in particular to equipment for binding a target material in vacuum.
Background
The rotary target material is formed by binding a target cylinder on a titanium tube by using metal indium, and because the melting point of indium is 156.5 ℃, a normal-pressure heating holding furnace is mostly used at present, and the binding temperature is maintained. However, in the process, because indium is exposed in the air and continuously oxidized, if indium oxide impurities cannot be timely and effectively removed, the binding and bonding rate is continuously difficult to improve, and meanwhile, the operation method is often complicated and low in efficiency.
Chinese patent document CN211036079U discloses a vacuum extractor for binding rotary target material, which is used to extract vacuum from the enclosed space formed between the rotary target material and the back tube during binding process; however, the above patent does not consider the problem of inconvenient feeding and discharging caused by over-high product quality; and the positioning of the product is also carried out in the form of grooves, and the diameter problem of the product is not considered.
Disclosure of Invention
Aiming at the problems, the invention provides equipment for binding the target material in vacuum.A lifting cylinder is used for lifting a switch cabin door, a lifting motor is used for lifting a limiting block, and a pushing cylinder is used for driving a sliding block to move on a transverse sliding chute, so that a lifting hook lifts a product and brings the product into or out of a box body; a placing groove is formed to place a product in the box body, and the positioning block is rotated by rotating the spiral positioning rod, so that the product in the placing groove is positioned; a lifting motor is arranged to drive a limiting block to press downwards, so that a product is secondarily positioned; the positioning block is controlled by the threaded positioning rod to limit according to the diameter of a product, and the lifting cylinder is adopted to drive the limiting block to limit for the second time according to the height of the product, so that the product is effectively prevented from shaking in the production process; and parts such as a transverse sliding groove, a pushing cylinder, a lifting hook and the like are adopted to greatly improve the convenience and labor efficiency of feeding and discharging, and the production quality and accuracy are also greatly improved.
In order to solve the problems, the invention provides equipment for binding a target material in vacuum, which comprises a box body, wherein a vacuumizing mechanism is arranged at the right end of the box body, and a heating layer is paved on the inner wall of the box body;
the top of the box body is provided with a switch cabin door, a transverse sliding groove is arranged above the switch cabin door, the lower end of the transverse sliding groove is provided with a sliding block, the sliding block is connected with a pushing cylinder arranged on the left side wall of the transverse sliding groove, the lower end of the sliding block is provided with a lifting cylinder connected with the switch cabin door, two sides of the lifting cylinder are provided with lifting motors, the lifting motors penetrate through the switch cabin door to be connected with limiting blocks arranged at the lower end of the lifting cylinder, and the lower surfaces of the limiting blocks are provided with lifting hooks;
the lower surface of box is provided with places the recess, and it has the locating piece to place to distribute on the lateral wall of recess, and the locating piece passes the box and is connected with the screw thread locating lever.
The further improvement lies in that: the limiting block is of a half-moon shape, the right side of the limiting block is connected with a material filling mechanism through a telescopic rod, and the cross section of the limiting block combined with the material filling mechanism is circular.
The further improvement lies in that: the material filling mechanism comprises a material storage box, a heater is arranged at the left end of the bottom of the material storage box, a material filling pipe is arranged at the lower end of the middle of the material storage box, and an automatic switch valve is arranged on the material filling pipe.
The further improvement lies in that: the vacuumizing mechanism comprises a vacuum mechanical pump connected with a vacuum air pipe, a vacuum gauge is arranged on the vacuum air pipe, and a switch valve is arranged on the vacuum air pipe between the vacuum gauge and the vacuum mechanical pump.
The further improvement lies in that: the bottom surface of the box body is provided with a vent, the vent is connected with a cooling pump through a cooling air pipe, a pull-out type opening and closing door is arranged on the cooling air pipe, and filter layers are distributed in the cooling air pipe.
The further improvement lies in that: an observation window made of high-temperature-resistant glass is arranged on the outer wall of the box body.
The invention has the beneficial effects that: the opening and closing cabin door is lifted through the lifting cylinder, the limiting block is lifted through the lifting motor, and the sliding block is driven to move on the transverse sliding groove through the pushing cylinder, so that the product is lifted by the lifting hook and is brought into or out of the box body; a placing groove is formed to place a product in the box body, and the positioning block is rotated by rotating the spiral positioning rod, so that the product in the placing groove is positioned; a lifting motor is arranged to drive a limiting block to press downwards, so that a product is secondarily positioned; after the vacuum is finished, the vacuum mechanical pump is controlled by a switch valve to vacuumize the air in the box body through a vacuum air pipe, and a vacuum gauge is used for collecting data; a heater and a heating layer are arranged to respectively heat and warm the material storage box and the box body; the telescopic rod is arranged to adjust the position of the material storage box, so that the material filling pipe can accurately face to the material filling port, and the automatic switch valve is arranged to open; a cooling pump is arranged to bring cooled air into the box body through a cooling air pipe and a vent, a switch door is arranged to be closed during working, and a filter layer is arranged to ensure the cleanliness of the air entering the box body; arranging an observation window to observe the work in the box body in real time; the invention greatly improves the convenience and the manual efficiency of loading and unloading, and the production quality and the accuracy are also greatly improved.
Drawings
Fig. 1 is an overall structural view of the present invention.
FIG. 2 is a cross-sectional structure view of the limiting block and the material storage box of the invention.
Wherein: 1-box body, 2-heating layer, 3-switch cabin door, 4-transverse sliding chute, 5-slide block, 6-pushing cylinder, 7-lifting cylinder, 8-lifting motor, 9-limiting block, 10-lifting hook, 11-placing groove, 12-positioning block, 13-threaded positioning rod, 14-telescopic rod, 15-storage box, 16-warmer, 17-filling pipe, 18-automatic switch valve, 19-vacuum air pipe, 20-vacuum mechanical pump, 21-vacuum gauge, 22-switch valve, 23-air vent, 24-cooling air pipe, 25-cooling pump, 26-switch valve, 27-filtering layer and 28-observation window.
Detailed Description
For the purpose of enhancing understanding of the present invention, the present invention will be further described in detail with reference to the following examples, which are provided for illustration only and are not to be construed as limiting the scope of the present invention.
As shown in fig. 1 and 2, the present embodiment provides a device for vacuum binding of a target, including a box 1, a vacuum pumping mechanism is disposed at the right end of the box 1, and a heating layer 2 is laid on the inner wall of the box 1; the top of the box body 1 is provided with a switch cabin door 3, a transverse sliding chute 4 is arranged above the switch cabin door 3, the lower end of the transverse sliding chute 4 is provided with a sliding block 5, the sliding block 5 is connected with a pushing cylinder 6 arranged on the left side wall of the transverse sliding chute 4, the lower end of the sliding block 5 is provided with a lifting cylinder 7 connected with the switch cabin door 3, two sides of the lifting cylinder 7 are provided with lifting motors 8, each lifting motor 8 penetrates through the switch cabin door 3 to be connected with a limiting block 9 arranged at the lower end of the corresponding lifting cylinder 7, and the lower surface of each limiting block 9 is provided with a hoisting hook 10;
the lower surface of box 1 is provided with places recess 11, and it has locating piece 12 to place the lateral wall of recess 11 and distribute, and locating piece 12 passes box 1 and is connected with screw thread locating lever 13. The limiting block 9 is of a half-moon shape, the right side of the limiting block 9 is connected with a material filling mechanism through a telescopic rod 14, and the cross section of the limiting block 9 combined with the material filling mechanism is circular. The material filling mechanism comprises a material storage box 15, a heater 16 is arranged at the left end of the bottom of the material storage box 15, a material filling pipe 17 is arranged at the lower end of the middle of the material storage box 15, and an automatic switch valve 18 is arranged on the material filling pipe 17. The vacuumizing mechanism comprises a vacuum mechanical pump 20 connected with a vacuum air pipe 19, a vacuum gauge 21 is arranged on the vacuum air pipe 19, and a switch valve 22 is arranged on the vacuum air pipe 19 between the vacuum gauge 21 and the vacuum mechanical pump 20. The bottom surface of the box body 1 is provided with a vent 23, the vent 23 is connected with a cooling pump 25 through a cooling air pipe 24, the cooling air pipe 24 is provided with a pull-type switch door 26, and a filtering layer is distributed in the cooling air pipe 24. 27. The outer wall of the box body 1 is provided with an observation window 28 made of high temperature resistant glass.
The implementation manner of the embodiment: the switch cabin door 3 is lifted through the lifting cylinder 7, the limiting block 9 is lifted to the top point through the lifting motor 8, and the sliding block 5 is driven to move on the transverse sliding groove 4 through the pushing cylinder 6, so that a lifted product is brought into or out of the box body 1 by the lifting hook 10; products in the box body 1 are placed in the placing groove 11, the positioning block 12 is controlled by the threaded positioning rod 13 to limit the position according to the diameter of the products, the lifting motor 8 descends the limiting block 9 to limit the height of the products, and the lifting cylinder 7 descends the switch cabin door 3 to seal the box body 1; after the completion, the switch valve 22 is opened, so that the vacuum mechanical pump 20 vacuumizes the air in the box body 1 through the vacuum air pipe 19, and the vacuum gauge 21 is used for data collection; the heating layer 2 heats the box body 1, the heater 16 heats materials, and when the products are heated, the telescopic rod 14 controls the material storage box 15 to move, so that the material filling pipe 17 is aligned with the material filling port, and then the automatic switch valve 18 is opened to discharge the materials from the material filling pipe 17 for material filling; after the filling is finished, cooling air is brought into the box body 1 by the cooling pump 25 through the cooling air pipe 24 and the ventilation opening 23, so that the temperature in the box body 1 is cooled in an accelerated manner, the opening and closing door 26 is closed when the box body 1 works, and the filter layer 27 ensures the cleanliness of the air cooled in the box body 1; the observation window 28 is arranged to observe the work in the box body 1 in real time, thereby preventing errors; the invention greatly improves the convenience and the manual efficiency of loading and unloading, and the production quality and the accuracy are also greatly improved.
Claims (6)
1. The utility model provides an equipment of target is bound in vacuum, includes box (1), and the right-hand member of box (1) is provided with evacuation mechanism, and the inner wall upper berth of box (1) is equipped with zone of heating (2), its characterized in that:
the top of the box body (1) is provided with a switch cabin door (3), a transverse sliding groove (4) is arranged above the switch cabin door (3), the lower end of the transverse sliding groove (4) is provided with a sliding block (5), the sliding block (5) is connected with a pushing cylinder (6) arranged on the left side wall of the transverse sliding groove (4), the lower end of the sliding block (5) is provided with a lifting cylinder (7) connected with the switch cabin door (3), two sides of the lifting cylinder (7) are provided with lifting motors (8), the lifting motors (8) penetrate through the switch cabin door (3) and are connected with limiting blocks (9) arranged at the lower end, and the lower surfaces of the limiting blocks (9) are provided with lifting hooks (10);
the lower surface of the box body (1) is provided with a placing groove (11), positioning blocks (12) are distributed on the side wall of the placing groove (11), and the positioning blocks (12) penetrate through the box body (1) and are connected with threaded positioning rods (13).
2. The apparatus of claim 1, wherein: the limiting block (9) is of a half-moon shape, the right side of the limiting block (9) is connected with a material filling mechanism through a telescopic rod (14), and the cross section of the limiting block (9) combined with the material filling mechanism is circular.
3. The apparatus of claim 2, wherein: the material filling mechanism comprises a material storage box (15), a heater (16) is arranged at the left end of the bottom of the material storage box (15), a material filling pipe (17) is arranged at the lower end of the middle of the material storage box (15), and an automatic switch valve (18) is arranged on the material filling pipe (17).
4. The apparatus of claim 1, wherein: the vacuumizing mechanism comprises a vacuum mechanical pump (20) connected with a vacuum air pipe (19), a vacuum gauge (21) is arranged on the vacuum air pipe (19), and a switch valve (22) is arranged on the vacuum air pipe (19) between the vacuum gauge (21) and the vacuum mechanical pump (20).
5. The apparatus of claim 1, wherein: the bottom surface of the box body (1) is provided with a vent (23), the vent (23) is connected with a cooling pump (25) through a cooling air pipe (24), the cooling air pipe (24) is provided with a pull-type opening and closing door (26), and a filtering layer (27) is distributed in the cooling air pipe (24).
6. The apparatus of claim 1, wherein: an observation window (28) made of high-temperature-resistant glass is arranged on the outer wall of the box body (1).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110647624.2A CN113463044B (en) | 2021-06-10 | 2021-06-10 | Equipment for binding target material in vacuum |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110647624.2A CN113463044B (en) | 2021-06-10 | 2021-06-10 | Equipment for binding target material in vacuum |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN113463044A true CN113463044A (en) | 2021-10-01 |
| CN113463044B CN113463044B (en) | 2023-02-03 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202110647624.2A Active CN113463044B (en) | 2021-06-10 | 2021-06-10 | Equipment for binding target material in vacuum |
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| Country | Link |
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| CN (1) | CN113463044B (en) |
Citations (13)
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| RU2007148905A (en) * | 2005-06-10 | 2009-06-27 | Эпплайд Матириалз, Инк. (Us) | ADAPTABLE FIXATION OF CYLINDRICAL MAGNETRONS |
| CN102699894A (en) * | 2012-02-01 | 2012-10-03 | 昆山华恒焊接股份有限公司 | Transfer robot system |
| KR20140129677A (en) * | 2013-04-30 | 2014-11-07 | 한순석 | Rotary for sputtering target assembly manufactured by the bonding method for rotary sputtering target assembly and bonding method thereof |
| CN110373647A (en) * | 2019-08-21 | 2019-10-25 | 东莞市欧莱溅射靶材有限公司 | A kind of long tube rotary target binding method |
| CN209664529U (en) * | 2019-03-07 | 2019-11-22 | 东曹(上海)电子材料有限公司 | A kind of welding tooling of sputtering target material |
| CN110804726A (en) * | 2019-10-25 | 2020-02-18 | 广西晶联光电材料有限责任公司 | Binding method of rotary target material |
| CN210506501U (en) * | 2019-08-21 | 2020-05-12 | 东莞市欧莱溅射靶材有限公司 | Equipment is bound to rotatory target of ITO |
| CN210560716U (en) * | 2019-09-29 | 2020-05-19 | 深圳恒泰克科技有限公司 | Rotatory target binding device |
| CN111304605A (en) * | 2020-03-09 | 2020-06-19 | 东莞市欧莱溅射靶材有限公司 | ITO (indium tin oxide) rotary target binding method |
| CN211406299U (en) * | 2020-03-09 | 2020-09-01 | 东莞市欧莱溅射靶材有限公司 | Heating device for be used for rotatory target to bind |
| CN211444694U (en) * | 2019-12-23 | 2020-09-08 | 东莞市欧莱溅射靶材有限公司 | Mobile hoisting device for target processing |
| CN212863873U (en) * | 2020-08-10 | 2021-04-02 | 株洲火炬安泰新材料有限公司 | Hoisting transfer device for producing large ITO target |
| CN112746251A (en) * | 2019-10-30 | 2021-05-04 | 广西晶联光电材料有限责任公司 | Vacuumizing device for binding rotary target and rotary target binding method adopting vacuumizing device |
-
2021
- 2021-06-10 CN CN202110647624.2A patent/CN113463044B/en active Active
Patent Citations (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| RU2007148905A (en) * | 2005-06-10 | 2009-06-27 | Эпплайд Матириалз, Инк. (Us) | ADAPTABLE FIXATION OF CYLINDRICAL MAGNETRONS |
| CN102699894A (en) * | 2012-02-01 | 2012-10-03 | 昆山华恒焊接股份有限公司 | Transfer robot system |
| KR20140129677A (en) * | 2013-04-30 | 2014-11-07 | 한순석 | Rotary for sputtering target assembly manufactured by the bonding method for rotary sputtering target assembly and bonding method thereof |
| CN209664529U (en) * | 2019-03-07 | 2019-11-22 | 东曹(上海)电子材料有限公司 | A kind of welding tooling of sputtering target material |
| CN210506501U (en) * | 2019-08-21 | 2020-05-12 | 东莞市欧莱溅射靶材有限公司 | Equipment is bound to rotatory target of ITO |
| CN110373647A (en) * | 2019-08-21 | 2019-10-25 | 东莞市欧莱溅射靶材有限公司 | A kind of long tube rotary target binding method |
| CN210560716U (en) * | 2019-09-29 | 2020-05-19 | 深圳恒泰克科技有限公司 | Rotatory target binding device |
| CN110804726A (en) * | 2019-10-25 | 2020-02-18 | 广西晶联光电材料有限责任公司 | Binding method of rotary target material |
| CN112746251A (en) * | 2019-10-30 | 2021-05-04 | 广西晶联光电材料有限责任公司 | Vacuumizing device for binding rotary target and rotary target binding method adopting vacuumizing device |
| CN211444694U (en) * | 2019-12-23 | 2020-09-08 | 东莞市欧莱溅射靶材有限公司 | Mobile hoisting device for target processing |
| CN111304605A (en) * | 2020-03-09 | 2020-06-19 | 东莞市欧莱溅射靶材有限公司 | ITO (indium tin oxide) rotary target binding method |
| CN211406299U (en) * | 2020-03-09 | 2020-09-01 | 东莞市欧莱溅射靶材有限公司 | Heating device for be used for rotatory target to bind |
| CN212863873U (en) * | 2020-08-10 | 2021-04-02 | 株洲火炬安泰新材料有限公司 | Hoisting transfer device for producing large ITO target |
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|---|---|
| CN113463044B (en) | 2023-02-03 |
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