CN113457894B - Plugging joint for photoresist nozzle - Google Patents
Plugging joint for photoresist nozzle Download PDFInfo
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- CN113457894B CN113457894B CN202110596139.7A CN202110596139A CN113457894B CN 113457894 B CN113457894 B CN 113457894B CN 202110596139 A CN202110596139 A CN 202110596139A CN 113457894 B CN113457894 B CN 113457894B
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- nozzle
- flow channel
- plugging
- hole
- seat
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B15/00—Details of spraying plant or spraying apparatus not otherwise provided for; Accessories
- B05B15/50—Arrangements for cleaning; Arrangements for preventing deposits, drying-out or blockage; Arrangements for detecting improper discharge caused by the presence of foreign matter
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
- B05C5/02—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/16—Coating processes; Apparatus therefor
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- General Physics & Mathematics (AREA)
- Coating Apparatus (AREA)
- Nozzles (AREA)
Abstract
The invention discloses a plugging connector for a photoresist nozzle. The plugging connector comprises a plugging seat and a plugging mechanism arranged on the plugging seat and used for plugging the nozzle opening part, wherein a first counter bore for mounting the nozzle is formed in the plugging seat; the plugging mechanism comprises a mounting seat, a plug, a first elastic part and a cover plate; the mounting seat is arranged on the plugging seat; a through hole in sealing fit with the plug is formed in the bottom of the first counter bore; the plug is mounted in the through hole; a second counter bore for mounting the elastic part and communicating with the through hole is formed in the mounting seat; the cover plate is fixedly arranged in the second counter bore; the elastic part is arranged between the plug and the cover plate; when the nozzle is plugged, the first counter bore is matched with the nozzle, and the plug is propped against the end surface of the nozzle through the elastic part, so that the nozzle opening part is sealed. The nozzle opening part is plugged through the plugging mechanism, so that pollution and photoresist waste caused by leakage of photoresist in the nozzle are avoided, and the plugging connector further has the effects of air isolation and pressure relief.
Description
Technical Field
The invention belongs to the field of semiconductor production equipment, and particularly relates to a plugging joint for a photoresist nozzle.
Background
The photoresist is mainly used for manufacturing semiconductor devices, and the photoresist reacts after contacting with air for a certain time to generate a photoresist crystallization phenomenon. After the photoresist spraying is finished, in order to prevent the photoresist at the nozzle opening from contacting with air and generating crystallization to block the nozzle opening, and influence subsequent spraying, at present, the photoresist at the nozzle opening is sucked back into the nozzle, so that the nozzle opening is prevented from being blocked by photoresist crystals, but the method still can lead the photoresist to contact with the air, and part of the photoresist reacts with the air to generate photoresist crystals.
Disclosure of Invention
In view of the above, an object of the present invention is to provide a plugging connector for a photoresist nozzle, which can plug the nozzle opening.
In order to achieve the purpose, the invention provides the following technical scheme:
the invention relates to a plugging joint for a photoresist nozzle, which comprises a plugging seat and a plugging mechanism, wherein the plugging seat is arranged on the plugging seat and is used for plugging the mouth part of the nozzle;
the plugging mechanism comprises a mounting seat, a plug, a first elastic piece and a cover plate, wherein a first counter bore used for mounting the mounting seat is formed in the plugging seat;
when the nozzle is plugged, the first through hole is matched with the nozzle, and the plug is abutted against the end face of the nozzle through the elastic piece, so that the mouth of the nozzle is sealed.
Furthermore, the plugging mechanism further comprises a guide assembly, the guide assembly comprises a first guide part and a second guide part, the first guide part is fixedly arranged on the plugging head, the second guide part is fixedly arranged on the cover plate and sleeved outside the first guide part, and the first guide part can move in the second guide part in a reciprocating mode along the axial direction of the first guide part.
Furthermore, a flow channel for flowing of a dilution solvent is arranged in the plugging seat, the flow channel comprises a first flow channel, a second flow channel and a third flow channel, the second flow channel is arranged in the first through hole, the first flow channel is arranged at one end of the opening of the first counter bore, and the third flow channel is arranged at one end of the bottom of the second counter bore, so that the dilution solvent flows into the second flow channel from the first flow channel to dilute and clean the photoresist at the opening of the nozzle, and then flows out from the third flow channel.
Further, a pipeline is arranged on the plugging seat, the first flow channel is arranged in the pipeline, a switch valve for opening and closing the first flow channel is arranged on the pipeline, and a one-way valve is arranged in the third flow channel.
Furthermore, the second through hole is a conical hole, and the side surface of the plug is a conical surface matched with the conical hole;
the plugging mechanism further comprises a locking assembly for fixing the plug in the through hole.
Further, the locking assembly comprises a pressing piece, a second elastic piece, a first limiting piece and a second limiting piece, a mounting hole for mounting the pressing piece is formed in the cover plate, the pressing piece is mounted in the mounting hole, the elastic piece is arranged between the pressing piece and the first guide piece, the first limiting piece and the second limiting piece are sequentially arranged in the mounting hole along the axial direction of the mounting hole, and a limiting part is arranged on the low pressing piece;
when the limiting part is matched with the second limiting part, the pressing part is separated from the first guide part, and the first guide part can move along the axial direction of the first guide part.
Further, the first limiting part is a plurality of first bosses uniformly distributed along the circumferential direction of the mounting hole, a gap for a limiting part to pass through is formed between the first bosses, the limiting part is a limiting table uniformly distributed along the circumferential direction of the mounting hole, and the second limiting part is an annular boss;
when the limiting part is matched with the first boss, the pressing part compresses the elastic part to tightly press against the first guide part, the pressing part is rotated, and after the limiting platform is aligned with the gap, the pressing part moves away from the first guide part under the action of the elastic force of the second elastic part and is limited by the annular boss.
Further, the second elastic part is a spring, and the spring is sleeved on the abutting part and abuts against the space between the limiting part and the first guide part.
Further, the second flow channel is a spiral groove formed in the side face of the first through hole.
Further, the plugging seat is in threaded connection with the nozzle through a pipe.
The invention discloses a plugging joint for a photoresist nozzle, which has the beneficial effects that:
according to the plugging connector for the photoresist nozzle, the nozzle opening is plugged by the plugging mechanism, so that the photoresist in the nozzle is prevented from leaking to cause pollution and waste of the photoresist, the cost is saved, air is isolated, the photoresist at the nozzle opening is prevented from contacting with the air to crystallize and block the nozzle opening, and the pressure relief effect is achieved, so that the working reliability is improved.
Additional advantages, objects, and features of the invention will be set forth in the description which follows and in part will become apparent to those having ordinary skill in the art upon examination of the following or may be learned from practice of the invention. The objectives and other advantages of the invention will be realized and attained by the structure particularly pointed out in the written description and claims thereof.
Drawings
In order to make the purpose, technical scheme and beneficial effect of the invention more clear, the invention provides the following drawings for explanation:
FIG. 1 is a schematic structural diagram of a plugging joint for a photoresist nozzle according to the present invention;
FIG. 2 is an isometric view of a block-off fitting for a photoresist nozzle of the present invention;
figure 3 is an isometric view of a press of the present invention;
fig. 4 is a schematic structural view of the pressing member pressing against the first guide member according to the present invention;
fig. 5 is a schematic structural view of the pressing member of the present invention disengaged from the first guide member;
FIG. 6 is an enlarged view taken at I in FIG. 4;
fig. 7 is an enlarged view of point ii in fig. 5.
Detailed Description
As shown in fig. 1 to 7, the plugging joint for a photoresist nozzle of the present invention comprises a plugging base 1 and a plugging mechanism disposed on the plugging base 1 for plugging a nozzle opening; the plugging seat 1 is used for being connected with a nozzle in a matched mode, and plugging the mouth of the nozzle through the plugging mechanism, so that the photoresist in the nozzle is prevented from leaking outwards to cause pollution and photoresist waste, the effect of isolating air is achieved, and the phenomenon that the photoresist at the mouth of the nozzle is contacted with the air to be crystallized and block the mouth of the nozzle is avoided.
The nozzle plugging device is characterized in that a first through hole 1a for installing a nozzle is formed in the plugging seat 1, the plugging mechanism comprises an installation seat 2, a plug 3, a first elastic part 5 and a cover plate 6, a first counter bore 1b for installing the installation seat 2 is formed in the plugging seat 1, the installation seat 2 is installed in the first counter bore 1b, a second through hole 2a hermetically matched with and communicated with the first through hole 1a is formed in the installation seat 2, the plug 3 is installed in the second through hole 2a, a second counter bore 2b communicated with the second through hole 2a and used for installing the first elastic part 5 is formed in the installation seat 2, the cover plate 6 is fixedly arranged in the second counter bore 2b, and the first elastic part is arranged between the plug 3 and the cover plate 6.
After the nozzle 7 finishes spraying the photoresist, the mouth part of the nozzle 7 is blocked by the blocking device: the first through hole 1a is sleeved on the nozzle 7 and fixedly connected to the nozzle 7, part of air in the first through hole 1a is compressed by the nozzle 1 so as to press the plug 3, and the air is discharged from the second through hole 2a, after the air in the first through hole 1a is discharged, the plug 3 tightly presses the mouth of the nozzle 7 under the action of the first elastic piece 5, so that the mouth of the nozzle is plugged, and the air is isolated. When the pressure in the nozzle 7 is too large, the photoresist can be abutted against the pressure relief effect of the plug 3, so that the photoresist flows into the second counter bore 2b, the photoresist is prevented from flowing out to pollute the environment, the nozzle is protected, and the nozzle is prevented from being damaged due to the too large pressure in the nozzle.
The second through-hole 2a can be the bell mouth, end cap 3 for with bell mouth matched with toper end cap, through toper end cap and bell mouth matched with sealed (face seal), the still arc hole of second through-hole 2a, end cap 3 for with arc hole matched with toper end cap, through toper end cap and arc hole matched with sealed (facial features cooperation), or adopt other modes of matched with sealing, can select according to concrete demand. The fixed connection between shutoff seat and the nozzle can adopt threaded connection, joint or other detachable fixed connection, can select according to specific demands.
The first elastic member 5 may be a spring, a rubber pad or other members with elastic function, and may be selected according to specific requirements.
In this embodiment, the plugging mechanism further includes a guiding assembly, the guiding assembly includes a first guiding element 41 and a second guiding element 42, the first guiding element 41 is fixedly disposed on the plug 3, so that the first guiding element 41 moves along with the plug 3, the second guiding element 42 is provided with a guiding hole for the first guiding element 41 to pass through, the second guiding element 42 is fixedly disposed on the cover plate 6 and externally sleeved on the first guiding element 41, and the first guiding element 41 can reciprocate in the guiding hole 42a of the second guiding element 42 along the axial direction thereof; in the plug moving process, the guide assembly is used for guiding, so that the plug moving reliability can be improved, and the risk of inconvenience and untight caused by dislocation is avoided.
The first guide member 41 is provided with a boss along the axial direction of the first counter bore, the guide bore is internally provided with a groove matched with the boss, and the boss is installed in the groove, so that the first guide member cannot rotate along the circumferential direction of the first counter bore (the boss and the groove are not shown in the figure, but understanding is not affected), and the moving reliability of the plug is further improved.
The first elastic element 5 is a spring, and the spring is sleeved outside the second guiding element 42 and abuts against between the cover plate 6 and the plug 3 along the axial direction of the spring.
In this embodiment, a flow channel 11 for flowing a dilution solvent (the dilution solvent is used for diluting photoresist) is arranged in the blocking seat 1, the flow channel 11 includes a first flow channel 11a, a second flow channel 11b and a third flow channel 11c, the second flow channel 11b is arranged in the first through hole 1a, the first flow channel 11a is arranged at one end of the mouth of the first through hole 1a, and the third flow channel 11c is arranged at one end of the bottom of the first through hole 1a, so that the dilution solvent flows into the second flow channel 11b from the first flow channel 11a to dilute and clean the residual photoresist outside the mouth of the nozzle, and then flows out through the third flow channel 11 c; after the plug 3 is in contact with and sealed with the nozzle opening, a small amount of residual photoresist is inevitably left on the outer side of the nozzle opening, and the diluting solvent is guided to the outer side of the nozzle opening through the channel 11 to dilute and then carry out the residual photoresist, so that the photoresist is prevented from being crystallized and solidified.
In this embodiment, the blocking seat 1 is provided with a pipeline 8, the first flow passage 11a is provided in the pipeline 8, the pipeline 8 is provided with an on-off valve 9 for opening and closing the first flow passage 11a, and the third flow passage 11c is provided with a check valve 10.
After the plug 3 finishes plugging the nozzle opening, the inlet end of the pipeline 8 is connected with a container filled with a diluting solvent, so that the diluting solvent enters the second flow channel 11b from the first flow channel 11a, dilutes residual photoresist on the outer side of the nozzle opening and is discharged from the third flow channel 11 c; after the diluent solvent in the flow channel 11 is discharged, the inlet end of the pipeline 8 is connected to a vacuum pump to pump out the air in the flow channel 11, because the check valve 10 can only be communicated from the second flow channel 11b to the third flow channel 11c, when the air in the flow channel 11 is pumped, the check valve 10 plays a role of isolating the third flow channel 11c from the outside air, after the air is pumped out, the switch valve 9 is closed, and the mouth part of the nozzle is in an airless state, so that the air is further isolated.
In this embodiment, the second through hole 2a is a tapered hole, and the side surface of the plug 3 and the tapered surface matched with the tapered hole are arranged by adopting the structure, so that the plug has the advantage of convenience in manufacturing under the effect of matching and sealing.
The plugging mechanism further comprises a locking assembly for fixing the plug into the through hole, and the plug is fixed through the locking assembly before the diluting solvent is introduced, so that the risk of leakage caused by the fact that the diluting solvent pushes the plug is avoided.
In this embodiment, the locking assembly includes a pressing member 13, a second elastic member 12, a first limiting member 61, and a second limiting member 62, the cover plate 6 is provided with a mounting hole 6a for mounting the pressing member 13, the mounting hole 6a is communicated with the guide hole 42a, the pressing member 13 is mounted in the mounting hole 6a, the low pressing member 13 can axially move back and forth along the mounting hole, the second elastic member is disposed between the pressing member 13 and the first guiding member 41, the first limiting member 61 and the second limiting member 62 are sequentially and fixedly disposed in the mounting hole 6a along the mounting hole, and the pressing member 13 is provided with a limiting portion 13 a.
When the plug 3 needs to be fixed, the pressing part 13 moves to one side of the first guide part 41 along the axial direction of the first counter bore to compress the second elastic part 12 and abut against the first guide part 41, and is matched with the first limiting part 61 through the limiting part 13a, and is limited by the first limiting part 61, so that the pressing part 13 abuts against the first guide part 41 and cannot be loosened; after the diluent solvent is no longer required to be introduced, the limiting portion 13a is separated from the first limiting member 61, under the elastic force action of the second elastic member 12, the pressing member 13 moves towards the side away from the first guide member 41 along the axial direction of the mounting hole, so that the pressing member 13 is separated from the first guide member 41, and when the limiting portion 13a is matched with the second limiting member 62, the pressing member 13 is limited by the second limiting member 62, so that the pressing member 13 cannot be separated from the mounting hole 6 a.
In this embodiment, the first limiting part 61 is a plurality of first bosses uniformly distributed along the circumferential direction of the mounting hole, a gap for the limiting part to pass through is provided between each of the first bosses, the limiting part 13a is a limiting table uniformly distributed along the circumferential direction of the mounting hole, and the second limiting part is an annular boss.
By pushing the pressing part 13 to move towards one side of the first guide part, after the limiting table passes through the gap, the pressing part 13 is rotated, so that the limiting table is matched with the first boss and limited by the first boss, and at the moment, the pressing part 13 compresses the second elastic part 12 to tightly press against the first guide part 41 (as shown in fig. 4 and 6); when the pressing of the first guide 41 needs to be released, the pressing member 13 is rotated to align the limiting table with the gap, and then the pressing member 13 moves to the side away from the first guide and is limited by the annular boss under the action of the elastic force of the second elastic member 12 (as shown in fig. 5 and 7).
In this embodiment, the second elastic element 12 is a spring, and the spring 12 is sleeved on the pressing element 13 and tightly pressed between the pressing element and the first guiding element 41; the spring is adopted, so that the device has the advantages of simple structure and low cost.
In this embodiment, the second flow channel 11b is a spiral groove formed in the side surface of the first through hole, and the spiral groove can reduce the impact force of the diluent solvent, thereby improving the working reliability of the device.
In this embodiment, the plugging seat 1 is connected with the nozzle 7 through a pipe thread, and the pipe thread is adopted, so that not only can firm connection be achieved, but also the advantage of sealing the second counter bore is achieved.
Finally, it is noted that the above-mentioned preferred embodiments illustrate rather than limit the invention, and that, while the invention has been described in detail with reference to the above-mentioned preferred embodiments, it will be understood by those skilled in the art that various changes in form and detail may be made therein without departing from the scope of the invention as defined by the appended claims.
Claims (5)
1. A shutoff connects for photoresist nozzle which characterized in that: comprises a plugging seat and a plugging mechanism which is arranged on the plugging seat and is used for plugging the mouth part of the nozzle; the plugging mechanism comprises a mounting seat, a plug, a first elastic piece and a cover plate, wherein a first counter bore used for mounting the mounting seat is formed in the plugging seat; when the nozzle is plugged, the first through hole is matched with the nozzle, the plug is abutted against the end face of the nozzle through the elastic piece, so that the mouth of the nozzle is sealed, the plugging mechanism further comprises a guide assembly, the guide assembly comprises a first guide piece and a second guide piece, the first guide piece is fixedly arranged on the plug, the second guide piece is fixedly arranged on the cover plate and sleeved outside the first guide piece, the first guide piece can axially reciprocate in the second guide piece, a flow channel for flowing a diluting solvent is arranged in the plugging seat, the flow channel comprises a first flow channel, a second flow channel and a third flow channel, the second flow channel is arranged in the first through hole, the first flow channel is arranged at one end of the mouth of the first through hole, and the third flow channel is arranged at one end of the bottom of the first through hole, so that the diluting solvent flows into the second flow channel from the first flow channel to dilute and clean the photoresist at the mouth of the nozzle, then the water flows out of the blocking seat through a third flow channel, a pipeline is arranged on the blocking seat, the first flow channel is arranged in the pipeline, a switch valve for opening and closing the first flow channel is arranged on the pipeline, a one-way valve is arranged in the third flow channel, the second through hole is a conical hole, and the side surface of the plug is a conical surface matched with the conical hole; the plugging mechanism further comprises a locking assembly for fixing the plug into the through hole, the locking assembly comprises a pressing part, a second elastic part, a first limiting part and a second limiting part, a mounting hole for mounting the pressing part is formed in the cover plate, the pressing part is mounted in the mounting hole, the elastic part is arranged between the pressing part and the first guiding part, the first limiting part and the second limiting part are sequentially arranged in the mounting hole along the axial direction of the mounting hole, and a limiting part is arranged on the pressing part; when the limiting part is matched with the second limiting part, the pressing part is separated from the first guide part, and the first guide part can move along the axial direction of the first guide part.
2. The sealing joint for a photoresist nozzle of claim 1, wherein: the first limiting part is a plurality of first bosses uniformly distributed along the circumferential direction of the mounting hole, gaps for the limiting part to pass through are formed between the first bosses, the limiting part is a limiting table uniformly distributed along the circumferential direction of the mounting hole, and the second limiting part is an annular boss;
when the limiting part is matched with the first boss, the pressing part compresses the elastic part to tightly press against the first guide part, the pressing part is rotated, and after the limiting table is aligned with the gap, the pressing part moves away from the first guide part and is limited by the annular boss under the action of the elastic force of the second elastic part.
3. The block joint for a photoresist nozzle of claim 2 wherein: the second elastic piece is a spring, and the spring is sleeved on the pressing piece and tightly pressed between the limiting part and the first guide piece.
4. The sealing joint for a photoresist nozzle of claim 1, wherein: the second flow passage is a spiral groove formed in the side face of the first through hole.
5. The block joint for a photoresist nozzle of claim 1 wherein: the plugging seat is connected with the nozzle through pipe threads.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110596139.7A CN113457894B (en) | 2021-05-30 | 2021-05-30 | Plugging joint for photoresist nozzle |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110596139.7A CN113457894B (en) | 2021-05-30 | 2021-05-30 | Plugging joint for photoresist nozzle |
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| Publication Number | Publication Date |
|---|---|
| CN113457894A CN113457894A (en) | 2021-10-01 |
| CN113457894B true CN113457894B (en) | 2022-07-15 |
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| CN202110596139.7A Active CN113457894B (en) | 2021-05-30 | 2021-05-30 | Plugging joint for photoresist nozzle |
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Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN114308566B (en) * | 2022-03-17 | 2022-05-31 | 江苏高凯精密流体技术股份有限公司 | A spiral material feeding unit in variable clearance for carrying granule glue |
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| CN211624227U (en) * | 2019-06-26 | 2020-10-02 | 江苏航运职业技术学院 | Bellows type control valve |
| CN211802072U (en) * | 2020-01-18 | 2020-10-30 | 苏州星航注胶科技有限公司 | CNC multifunctional glue injection workstation |
| CN212681582U (en) * | 2020-06-20 | 2021-03-12 | 滁州市合派门业有限公司 | Micro-foaming forming and filling equipment for wood-plastic door plate |
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| CN113457894A (en) | 2021-10-01 |
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Effective date of registration: 20220623 Address after: 064100 Xinxing Electronic Industrial Park, Yutian County, Tangshan City, Hebei Province Applicant after: TANGSHAN GUOXIN JINGYUAN ELECTRONICS Co.,Ltd. Address before: 402260 No. 600 Yingbin street, Xihu Town, Jiangjin District, Chongqing Applicant before: Zhou Hong |
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