CN113452227A

CN113452227A - Vacuum pump and rotary drive structure

Info

Publication number: CN113452227A
Application number: CN202010231173.XA
Authority: CN
Inventors: 顾崇诚
Original assignee: Xinqiang Ningbo Semiconductor Equipment Manufacturing Co ltd
Current assignee: Xinqiang Ningbo Semiconductor Equipment Manufacturing Co ltd
Priority date: 2020-03-27
Filing date: 2020-03-27
Publication date: 2021-09-28

Abstract

The invention discloses a rotary driving structure applied to a vacuum pump. The rotary driving structure comprises a groove body, a plurality of magnetic columns, two magnetic rotary columns and a plurality of electromagnetic coils. The channel body includes a plurality of inner side wall surfaces that present a flat surface. The two magnetic rotating columns are positioned in the groove body and are respectively pivoted with the two rotors. Each magnetic column comprises a first connecting end, a second connecting end, a first side edge and a second side edge, wherein the magnetic columns are arranged in a dispersed mode and are connected with the inner side wall surfaces of the groove body through the first connecting ends, and the second connecting ends surround the two magnetic rotating columns. Each electromagnetic coil is disposed separately on each first side and each second side and is close to the slot.

Description

Vacuum pump and rotary drive structure

Technical Field

The present invention relates to a vacuum pump and a rotary driving structure, and more particularly, to a vacuum pump and a rotary driving structure for driving a rotor of the pump to rotate by uniform magnetic lines of force.

Background

The vacuum pump is a pump for discharging gas from the container to form a negative pressure in the container. A typical vacuum pump has twelve magnetic columns, a pair of magnetic rotating shafts, and a pair of rotors. Twelve magnetic columns surround the pair of magnetic rotating shafts, and the magnetic rotating shafts are driven to synchronously and reversely rotate by magnetic force. When the pair of magnetic rotating shafts synchronously and reversely rotate, the rotors are driven to synchronously and reversely rotate together so as to discharge gas.

However, the magnetic lines of force formed by the twelve magnetic columns are not uniform and have sparse density, so that the magnetic rotating shaft sometimes cannot rotate smoothly. Therefore, it is necessary to provide a new vacuum pump to solve the above problems.

Disclosure of Invention

The main object of the present invention is to provide a rotary driving structure for driving a rotor of a pump to rotate by uniform magnetic lines.

To achieve the above object, the present invention provides a rotary driving structure for a vacuum pump, which includes two rotors. The rotary driving structure comprises a groove body, a plurality of magnetic columns, two magnetic rotary columns and a plurality of electromagnetic coils. The channel body includes a plurality of inner side wall surfaces that present a flat surface. The two magnetic rotating columns are positioned in the groove body and are respectively pivoted with the two rotors. Each magnetic column comprises a first connecting end, a second connecting end, a first side edge and a second side edge, wherein the magnetic columns are arranged in a dispersed mode and are connected with the inner side wall surfaces of the groove body through the first connecting ends, and the second connecting ends surround the two magnetic rotating columns. The electromagnetic coils are distributed on the first side edges and the second side edges and are close to the groove body.

According to an embodiment of the present invention, each of the two magnetic spin columns includes a main body and a plurality of magnetic members, and each of the magnetic members is disposed in the main body in a dispersed manner.

According to an embodiment of the present invention, each of the magnetic rotating columns further includes a rotating shaft disposed in the main body, and the magnetic members are distributed around the rotating shaft at 90 degrees intervals with the rotating shaft as a center.

According to an embodiment of the present invention, any two adjacent magnetic members have opposite magnetic poles.

According to an embodiment of the present invention, at least one of the inner sidewall surfaces includes an extending pillar, wherein at least one of the plurality of magnetic pillars is connected to the extending pillar.

According to an embodiment of the present invention, the electromagnetic coils are disposed separately on the first side and the second side and abut against the inner side wall surfaces.

According to an embodiment of the present invention, the number of the plurality of magnetic pillars is 24, twelve of the magnetic pillars are radially arranged with one of the two magnetic rotating pillars as a center, and the second connection ends of the twelve magnetic pillars form a rotating region with one of the two magnetic rotating pillars.

Another objective of the present invention is to provide a vacuum pump that drives the rotor of the pump to rotate by uniform magnetic lines.

To achieve the above object, the vacuum pump of the present invention comprises two rotors and a rotary drive structure as described above.

By means of the structure design of the vacuum pump and the rotary driving structure, magnetic lines of force with high density and uniform distribution can be generated, so that the two magnetic rotary columns can rotate more smoothly to drive the two rotors to rotate smoothly to stably extract gas.

Drawings

FIG. 1 is a schematic view of a vacuum pump according to an embodiment of the present invention.

Fig. 2 is a schematic diagram of a rotational driving structure according to an embodiment of the present invention.

Fig. 3 is a partial schematic view of a rotary drive configuration of an embodiment of the present invention.

Reference numerals

Rotary drive structure 1

Trough body 10

Inner

side wall surfaces

11, 11a

An extended column 111

Magnetic column 20

First connection end 22

Second connection end 23

First side 24

Second side 25

Rotating zone 26

Magnetic rotary column 30

Main body 31

Magnetic members 32, 32a

Rotating shaft 33

Electromagnetic coil 40

Vacuum pump 200

Rotor 210

Direction of rotation A, B

Detailed Description

In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings used in the description of the embodiments will be briefly introduced below. It is obvious that the drawings in the following description are only examples or embodiments of the application, from which the application can also be applied to other similar scenarios without inventive effort for a person skilled in the art. Unless otherwise apparent from the context, or otherwise indicated, like reference numbers in the figures refer to the same structure or operation.

As used in this application and the appended claims, the terms "a," "an," "the," and/or "the" are not intended to be inclusive in the singular, but rather are intended to be inclusive in the plural unless the context clearly dictates otherwise. In general, the terms "comprises" and "comprising" merely indicate that steps and elements are included which are explicitly identified, that the steps and elements do not form an exclusive list, and that a method or apparatus may include other steps or elements.

The relative arrangement of the components and steps, the numerical expressions, and numerical values set forth in these embodiments do not limit the scope of the present application unless specifically stated otherwise. Meanwhile, it should be understood that the sizes of the respective portions shown in the drawings are not drawn in an actual proportional relationship for the convenience of description. Techniques, methods, and apparatus known to those of ordinary skill in the relevant art may not be discussed in detail but are intended to be part of the specification where appropriate. In all examples shown and discussed herein, any particular value should be construed as merely illustrative, and not limiting. Thus, other examples of the exemplary embodiments may have different values. It should be noted that: like reference numbers and letters refer to like items in the following figures, and thus, once an item is defined in one figure, further discussion thereof is not required in subsequent figures.

In the description of the present application, it is to be understood that the orientation or positional relationship indicated by the directional terms such as "front, rear, upper, lower, left, right", "lateral, vertical, horizontal" and "top, bottom", etc., are generally based on the orientation or positional relationship shown in the drawings, and are used for convenience of description and simplicity of description only, and in the case of not making a reverse description, these directional terms do not indicate and imply that the device or element being referred to must have a particular orientation or be constructed and operated in a particular orientation, and therefore, should not be considered as limiting the scope of the present application; the terms "inner and outer" refer to the inner and outer relative to the profile of the respective component itself.

Spatially relative terms, such as "above … …," "above … …," "above … …," "above," and the like, may be used herein for ease of description to describe one device or feature's spatial relationship to another device or feature as illustrated in the figures. It will be understood that the spatially relative terms are intended to encompass different orientations of the device in use or operation in addition to the orientation depicted in the figures. For example, if a device in the figures is turned over, devices described as "above" or "on" other devices or configurations would then be oriented "below" or "under" the other devices or configurations. Thus, the exemplary term "above … …" can include both an orientation of "above … …" and "below … …". The device may be otherwise variously oriented (rotated 90 degrees or at other orientations) and the spatially relative descriptors used herein interpreted accordingly.

It should be noted that the terms "first", "second", and the like are used to define the components, and are only used for convenience of distinguishing the corresponding components, and the terms have no special meanings unless otherwise stated, and therefore, the scope of protection of the present application is not to be construed as being limited. Further, although the terms used in the present application are selected from publicly known and used terms, some of the terms mentioned in the specification of the present application may be selected by the applicant at his or her discretion, the detailed meanings of which are described in relevant parts of the description herein. Further, it is required that the present application is understood not only by the actual terms used but also by the meaning of each term lying within.

Referring to fig. 1 to 3, a rotation driving structure according to an embodiment of the invention is described. FIG. 1 is a schematic view of a vacuum pump according to an embodiment of the present invention; FIG. 2 is a schematic diagram of a rotational drive configuration of an embodiment of the present invention; fig. 3 is a partial schematic view of a rotary drive configuration of an embodiment of the present invention.

As shown in fig. 1 to 3, in an embodiment of the present invention, a vacuum pump 200 is used to pump gas from a container (not shown). The vacuum pump 200 comprises two rotors 210 and a rotary drive structure 1. The rotation driving structure 1 can generate uniform magnetic lines to drive the two rotors 210 of the vacuum pump 200 to rotate smoothly. The rotary driving structure 1 includes a tank 10, twenty-four magnetic poles 20, two magnetic rotary poles 30, and a plurality of electromagnetic coils 40.

In an embodiment of the present invention, the tank body 10 is a metal holding tank, twenty-four magnetic columns 20 are disposed in the tank body 10, an inner wall of the tank body 10 is divided into eight inner side wall surfaces 11, 11a, and the eight inner side wall surfaces 11, 11a are flat surfaces; the flat metal

inner side walls

11 and 11a help the wire in the tank body 10 to be uniformly distributed. Of the eight

inner side walls

11, 11a, two inner side walls 11a respectively include an extending column 111, the extending column 111 of each wall 11a extends toward the opposite wall 11a, and the extending column 111 is used to arrange a part of the magnetic columns 20, so that the arrangement of twenty-four magnetic columns 20 is radial. However, the number of the inner side wall surfaces 11, 11a is not limited to eight, and may be changed according to design requirements.

In an embodiment of the present invention, twenty-four magnetic columns 20 are disposed in the tank 10, and the magnetic columns 20 have magnetic force, and the magnetic force of the magnetic columns 20 can generate magnetic force lines to rotate the magnetic rotary column 30. Each magnetic pole 20 includes a first connecting end 22, a second connecting end 23, a first side 24 and a second side 25. Twenty-four magnetic columns 20 are disposed in a distributed manner and connected to the eight inner sidewall surfaces 11, 11a via first connection ends 22, wherein the four magnetic columns 20 are connected to two extension columns 111, and each extension column 111 and the connected magnetic column 20 are in a Y-shape. The second connection end 23 surrounds the two magnetic rotary columns 30. Among the twenty-four magnetic columns 20, twelve magnetic columns 20 are radially arranged with one of the two magnetic rotation columns 30 as a center and form one rotation region 26, and the other twelve magnetic columns 20 are radially arranged with the other of the two magnetic rotation columns 30 as a center and form the other rotation region 26; since twenty-four magnetic columns 20 are densely disposed in the tank body 10 and surround the two rotation regions 26, magnetic lines of force having high density and uniform distribution can be generated.

In one embodiment of the present invention, the two magnetic rotation columns 30 are both cylinders and are located in the two rotation regions 26, respectively. Each magnetic rotary column 30 includes a main body 31, four magnetic members 32, 32a, and a rotating shaft 33. The body 31 is of annular configuration. The four magnetic members 32, 32a are dispersedly disposed on the main body 31, and are disposed around the rotating shaft 33 at 90 degrees intervals with the rotating shaft 33 as a center; the magnetic member 32 is, for example, an N-pole magnet, and the magnetic member 32a is, for example, an S-pole magnet. The magnetic members 32 of the N-pole magnet and the magnetic members 32a of the S-pole magnet are staggered so that any two adjacent magnetic members 32, 32a have opposite magnetic poles. The rotation shaft 33 is provided in the main body 31. The rotating shafts 33 of the two magnetic rotating columns 30 are respectively pivoted with the two rotors 210. Magnetic lines of force generated by the magnetic forces of the twenty-four magnetic columns 20 drive the magnetic members 32, 32a of the two magnetic rotating columns 30 to rotate, so that the two magnetic rotating columns 30 rotate along the rotating direction A, B respectively; the rotation direction a is counterclockwise and the rotation direction B is clockwise. When the two magnetic rotation columns 30 rotate along the rotation direction A, B, the two rotors 210 are driven to rotate along the rotation direction A, B. However, the number of the magnetic members 32, 32a is not limited to four, and may be changed according to design requirements, for example, six or eight.

In an embodiment of the present invention, the plurality of electromagnetic coils 40 are copper coils, and the plurality of electromagnetic coils 40 are respectively connected to twenty-four magnetic poles 20 in a surrounding manner, and are dispersedly disposed on each first side 24 and each second side 25 and abut against the inner side wall surfaces 11, 11a of the tank body 10; the electromagnetic coils 40 can be energized with current to generate an electromagnetic effect, so as to further cooperate with the surrounding magnetic columns 20 to generate stronger magnetic lines of force or weaken the magnetic lines of force; therefore, the magnetic rotary column 30 can start or stop rotating or the rotation speed of the magnetic rotary column 30 can be adjusted by the enhanced or weakened magnetic force lines, so as to further control whether the rotor 210 starts to rotate and the rotation speed.

In an embodiment of the present invention, when a user wants to use the vacuum pump 200 to pump gas in a specific container, the user may apply current to the plurality of electromagnetic coils 40 to generate an electromagnetic effect, and the electromagnetic effect of the electromagnetic coils 40 may cooperate with the surrounding magnetic pillar 20 to generate stronger magnetic lines of force; the strong magnetic force lines drive the magnetic members 32, 32a of the two magnetic rotating columns 30 to rotate, so that the two magnetic rotating columns 30 rotate along the rotating direction A, B respectively. When the two magnetic rotary columns 30 rotate along the rotation direction A, B, the two rotors 210 are driven to rotate along the rotation direction A, B, and the two rotors 210 rotate to discharge the gas in the specific container. In addition, since the twenty-four magnetic poles 20 densely surround the two rotation regions 26, magnetic lines of force with high density and uniform distribution can be generated, and the two magnetic rotation poles 30 can rotate more smoothly.

By means of the structural design of the vacuum pump, magnetic lines of force with high density and uniform distribution can be generated, so that the two magnetic rotating columns can rotate more smoothly, and the two rotors are driven to rotate smoothly to stably extract gas.

The present invention shows features different from the prior art in terms of the purpose, means and effect. It should be noted that the above-mentioned embodiments are merely examples for convenience of description, and the scope of the present invention is not limited to the above-mentioned embodiments, but only by the claims.

Claims

1. A rotary drive structure for a vacuum pump including two rotors, the rotary drive structure comprising:

a tank body including a plurality of inner side wall surfaces which present flat surfaces;

two magnetic rotary columns located in the slot and pivoted to the two rotors respectively;

each magnetic column comprises a first connecting end, a second connecting end, a first side edge and a second side edge, wherein the magnetic columns are arranged in a dispersed manner and are connected with the inner side wall surfaces of the groove body through the first connecting end, and the second connecting end surrounds the two magnetic rotating columns; and

and the electromagnetic coils are respectively arranged on the first side edge and the second side edge in a dispersed manner and are abutted against the groove body.

2. The rotary drive configuration as claimed in claim 1, wherein the two magnetic rotary columns each comprise a body and a plurality of magnetic members, each of the magnetic members being disposed separately on the body.

3. The rotary driving structure as claimed in claim 2, wherein each magnetic rotary column further comprises a rotating shaft disposed in the main body, and each magnetic member is disposed around the rotating shaft at 90 ° intervals around the rotating shaft.

4. A rotary drive configuration as claimed in claim 3, wherein any two adjacent magnetic elements have opposite magnetic poles.

5. The rotary drive structure as claimed in claim 4, wherein at least one of the inner sidewall surfaces comprises an extension column, wherein at least one of the plurality of magnetic columns is connected to the extension column.

6. The rotary drive configuration of claim 5, wherein each of the electromagnetic coils is disposed separately on each of the first side and the second side and abuts against each of the inner side walls.

7. The structure of claim 1, wherein the number of the plurality of magnetic pillars is 24, twelve of the magnetic pillars are radially arranged around one of the two magnetic pillars, and the second connection ends of the twelve magnetic pillars form a rotation region around one of the two magnetic pillars.

8. A vacuum pump comprising two rotors, wherein the vacuum pump comprises a rotary drive arrangement as claimed in any one of claims 1 to 7.