CN113448164A - Negative photosensitive resin composition and use thereof - Google Patents

Negative photosensitive resin composition and use thereof Download PDF

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Publication number
CN113448164A
CN113448164A CN202010226580.1A CN202010226580A CN113448164A CN 113448164 A CN113448164 A CN 113448164A CN 202010226580 A CN202010226580 A CN 202010226580A CN 113448164 A CN113448164 A CN 113448164A
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China
Prior art keywords
resin composition
photosensitive resin
acrylic
negative
acid
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CN202010226580.1A
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Chinese (zh)
Inventor
周俊钦
宋志鸿
蓝大钧
张志毅
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Everlight Chemical Industrial Corp
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Everlight Chemical Industrial Corp
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Priority to CN202010226580.1A priority Critical patent/CN113448164A/en
Publication of CN113448164A publication Critical patent/CN113448164A/en
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    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/027Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/038Macromolecular compounds which are rendered insoluble or differentially wettable

Abstract

A negative photosensitive resin composition comprising: (A)0.1 to 10 weight percent of an acrylic monomer or oligomer; (B)0.2 to 30 weight percent of an acrylic resin; (C)0.1 to 5 weight percent of a photoinitiator; (D)0.01 to 1 weight percent of a hot acid initiator; (E)0.1 to 5 weight percent of an epoxy monomer; and (F) the balance of an organic solvent; wherein, the content of the acrylic monomer or oligomer accounts for 25 to 45 percent of the weight sum of the acrylic monomer or oligomer and the acrylic resin. The invention also relates to the application of the negative photosensitive resin composition in a roll-to-roll process.

Description

Negative photosensitive resin composition and use thereof
Technical Field
The invention relates to a negative photosensitive resin composition and application thereof, in particular to a negative photosensitive resin composition for roll-to-roll process and application thereof.
Background
The base material used in the conventional electronic device (e.g., a display device, a touch device, or a touch display device) is glass, and is not flexible, and is not suitable for an electronic device with a curved surface design or a folding function. Therefore, there have been attempts to replace glass with flexible substrates (e.g., films). However, the photoresist used in the past for the glass process has the following disadvantages.
First, flexible substrates (e.g., films) often cannot withstand high temperature processing, with an upper temperature limit of less than 140 ℃. However, when the conventional photoresist material used in the glass process is used, if the baking temperature is lowered below 140 ℃, the reaction temperature is insufficient, which results in poor reliability.
In addition, when a flexible substrate (e.g., a film) is used in a roll-to-roll process, the cost of mass production can be significantly reduced. However, when the existing photoresist material capable of being cured at low temperature is used, although the photoresist material can react at a temperature below 140 ℃ and meet the reliability requirement, the photoresist material has the problem of stickiness after soft baking, and cannot be rolled up, so that the photoresist material is not suitable for roll-to-roll process.
In view of the above, there is a need to develop an optical-sensitive resin composition that can improve the above problems for roll-to-roll processes.
Disclosure of Invention
The main object of the present invention is to provide a negative photosensitive resin composition, which can form a film having non-stick property and can be applied to roll-to-roll processes.
The negative photosensitive resin composition of the present invention comprises: (A)0.1 to 10 weight percent of an acrylic monomer or oligomer; (B)0.2 to 30 weight percent of an acrylic resin; (C)0.1 to 5 weight percent of a photoinitiator; (D)0.01 to 1 weight percent of a hot acid initiator; (E)0.1 to 5 weight percent of an epoxy monomer; and (F) the balance of an organic solvent; wherein, the content of the acrylic monomer or oligomer accounts for 25 to 45 percent of the weight sum of the acrylic monomer or oligomer and the acrylic resin.
In the negative photosensitive resin composition of the present invention, the ratio of the content of the acrylic monomer or oligomer to the sum of the weight of the acrylic monomer or oligomer and the weight of the acrylic resin is controlled, so that the formed film has the developing property and the non-stick property. Therefore, when the negative photosensitive resin composition of the invention is coated on a flexible substrate, the composition can be applied to a roll-to-roll process to prepare an insulating layer or a protective layer of a flexible electronic device (e.g., a display device, a touch display device, etc.).
In the negative photosensitive resin composition of the present invention, the content of the acrylic monomer or oligomer is 25% to 45% of the sum of the weight of the acrylic monomer or oligomer and the weight of the acrylic resin, i.e., < 25% < A)/(A) + (B) < 45%. When the ratio is too low, there is a problem that the development is impossible or poor; when the ratio is too high, there is a problem that the film is sticky after soft baking or easily comes off after development. In one embodiment of the present invention, the acrylic monomer or oligomer is present in an amount of 25% to 33% by weight of the sum of the acrylic monomer or oligomer and the acrylic resin, i.e., < 25% < A)/(A) + (B) < 33%.
In the negative photosensitive resin composition of the present invention, (a) the acrylic monomer or oligomer may be an acrylic monomer, an acrylic oligomer, or a combination thereof. Wherein the acrylic oligomer may contain 2 to 10 acrylic monomers.
In the negative photosensitive resin composition of the present invention, (B) the acrylic resin may include an epoxy group-containing monomer. In one embodiment of the present invention, the acrylic resin may be formed from tricyclo [5, 2, 1, 02, 6] dec-8-yl methacrylate (TCDMA), methacrylic acid (MAA), Styrene (Styrene), methacrylic acid, 7-oxabicyclo [4.1.0] hept-3-ylmethyl ester (CYCLOMER M-100), and tetrahydrofuryl methyl methacrylate (THFMA). More specifically, the acrylic resin may be polymerized from tricyclo [5, 2, 1, 02, 6] decan-8-yl methacrylate, methacrylic acid, styrene, CYCLOMER M-100, and tetrahydrofurfuryl methacrylate. In addition, the molecular weight of the acrylic resin may be between 10,000 g/mole and 20,000 g/mole.
In the negative photosensitive resin composition of the present invention, (D) the hot acid initiator is an initiator which generates an acid upon heating. Wherein the reaction temperature of the hot acid initiator may be 50 ℃ to 150 ℃ or 80 ℃ to 150 ℃. In the present invention, the thermal acid initiator may be a cationic thermal acid initiator. In addition, the acid formed after heating of the hot acid initiator can have an acid dissociation constant (pKa) of less than or equal to-20 and greater than or equal to-30, i.e., -30. ltoreq. pKa.ltoreq.20; or less than-20 and greater than or equal to-30, i.e., -30. ltoreq. pKa < -20. In one embodiment of the invention, the hot acid is initiatedThe acid radical of the agent is SbF 6-or B (C)6F5)-(ii) a The invention is not limited thereto.
In the negative photosensitive resin composition of the present invention, the type of the (E) epoxy monomer is not particularly limited as long as it is a monomer containing an epoxy group. In one embodiment of the present invention, the epoxy monomer may include Bis (3, 4-epoxycyclohexylmethyl) adipate (Bis (3, 4-epoxypropylmethyl) adipate), 3-Glycidoxypropyltrimethoxysilane (3-Glycidoxypropyltrimethoxysilane), or a combination thereof; the invention is not limited thereto.
In addition to the negative photosensitive resin composition, the present invention also provides the use of the negative photosensitive resin composition for a roll-to-roll process. In particular, the negative photosensitive resin composition of the present invention can be coated on a flexible substrate and cured at a low temperature to form an insulating layer or a protective layer. The negative photosensitive resin composition of the invention has the characteristic of non-sticky surface after low-temperature curing and baking, and can be used in roll-to-roll process and stored in a roll.
In the present invention, the flexible substrate can be a flexible substrate or a film. In addition, the material of the flexible substrate may include Polycarbonate (PC), Polyimide (PI), polypropylene (PP), polyethylene terephthalate (PET), or other plastic or polymer material; the invention is not limited thereto. Further, in the present invention, the low temperature may be 140 ℃ or less, for example: 80 ℃ to 140 ℃ or 120 ℃ to 140 ℃.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention is further described in detail with reference to the following embodiments.
The following description of the embodiments of the present invention is provided by way of specific examples, and other advantages and effects of the present invention will be readily apparent to those skilled in the art from the disclosure herein. The invention is capable of other and different embodiments and its several details are capable of modification in various other respects, all without departing from the spirit and scope of the present invention.
In this context, unless otherwise specified, the term "or" and/or "feature" means the presence of a, either alone or in combination with B; the features A and B or AND, respectively, refer to the presence of both A and B; the terms "including", "comprising", "having" and "containing" mean including but not limited to.
In addition, a value can be the first value, the second value, or another value between the first value and the second value if the value is between the first value and the second value.
Further, as used herein, a value "about" is intended to include within + -10% of the value, and particularly within + -5% of the value. The amounts given herein are approximate amounts, i.e., the meaning of "about" may still be implied without specifically stating "about".
The present invention will be further specifically described with reference to examples, but these examples are not intended to limit the scope of the present invention. In the following preparations, examples and comparative examples, temperatures are given in degrees centigrade and parts and percentages are by weight, unless otherwise indicated. Parts by weight relate to parts by volume as kilograms relate to liters.
Examples and comparative examples
In the following examples and comparative examples of the present invention, the acrylic monomer or oligomer used was M-400(CAS No.: 29570-58-9), which has the following structure (A-1):
Figure BDA0002426785130000041
the acrylic resin (B-1) used in the following examples and comparative examples of the present invention was synthesized in the following manner.
In a flask equipped with a condenser and a stirrer, 4 parts by weight of thermal radical initiator 2, 2' -Azobisisobutyl (AIBN), 282 parts by weight of solvent Methylethyldiglycol (MEDG), followed by 46 parts by weight of tricyclo [5, 2, 1, 02, 6] decan-8-yl methacrylate (TCDMA), 21 parts by weight of Methacrylic acid (MAA), 3 parts by weight of Styrene (Styrene), 40 parts by weight of Methacrylic acid, 7-oxabicyclo [4.1.0] hept-3-yl Methyl ester (Methacrylic acid, 7-oxobicyclo [4.1.0] hept-3-yl Methyl ester, CYCLOMM-100, manufactured by Daicel Industries, Ltd.), 12 parts by weight of tetrahydrofuran Methyl methacrylate (tetrahydrofuran Methyl methacrylate, THF) was charged, and rapidly replaced with nitrogen at 65 ℃ for half an hour after stirring, subsequently, the temperature was raised to 75 ℃ for 2 and a half hours to obtain a resin copolymer solution (B-1) having a solid content of 31.8% by weight and an average molecular weight (Mw) of 11000.
In the following examples and comparative examples of the present invention, the photoinitiator used was: i-907(CAS No. 71686-10-5), which has the structure shown in the following formula (C-1); and ITX (CAS No. 5495-84-1) having the structure represented by the following formula (C-2):
Figure BDA0002426785130000051
in the examples and comparative examples of the present invention described below, the structures of the thermal acid initiators used, and the dissociation constants (pKa) of the acids and acid groups formed are shown in table 1 below.
TABLE 1
Figure BDA0002426785130000052
In the following examples and comparative examples of the present invention, the epoxy monomers used were: bis (3, 4-epoxycyclohexylmethyl) adipate (DM 4128E, CAS No.: 3130-19-6) having the following structure (E-1); and 3-Glycidoxypropyltrimethoxysilane (3-Glycidoxypropyltrimethoxysilane) (A-187, CAS No.: 2530-83-8) having the following structure (E-2):
Figure BDA0002426785130000061
in the following examples and comparative examples of the present invention, the organic solvent (F-1) used was ethyl 1-Methoxy-2-propylacetate (1-Methoxy-2-propyl acetate, PGMEA) (CAS No.: 108-65-6).
The above acrylic monomer or oligomer, acrylic resin, photoinitiator, thermal acid initiator, epoxy monomer and organic solvent were formulated into negative photosensitive resin compositions of examples 1 to 9 and comparative examples 1 to 5 according to the formulation shown in table 4 below.
Test example
Firstly, a substrate is prepared, wherein an ITO film is formed on the surface of the substrate, and the surface of the substrate is cleaned by deionized water and acetone. Then, the negative photosensitive resin compositions prepared in examples 1 to 9 and comparative examples 1 to 5 were uniformly coated on the substrate by spin coating. Then, soft-baked at 80 ℃ for 5 minutes, and directly applied to a high-pressure mercury lamp (exposure energy: 100 mJ/cm) using a photomask2) Exposing the negative photosensitive resin composition coated on the surface of the substrate. Next, development was performed with 1% ENPD 23 for 100 seconds. Hard baking was carried out at 140 ℃ for 30 minutes. Finally, obtaining a required sample, wherein the thickness of the sample is 1.5-2.0 μm.
Adhesion test
The samples obtained after soft baking were subjected to a tack test. The scoring criteria are shown in table 2 below.
TABLE 2
Figure BDA0002426785130000062
Test for etching resistance
The sample prepared by the process is treated by aqua regia or aluminic acid (40 ℃ for 160 seconds), the test piece is cleaned by ultrapure water and dried, then the stripping agent N-300(60 ℃ for 135 seconds) is treated, and then the test piece is cleaned by ultrapure water and dried, and then the Baige test is carried out. The evaluation criteria of the etching resistance test are shown in the following table 3.
TABLE 3
Figure BDA0002426785130000071
TABLE 4
Figure BDA0002426785130000072
Figure BDA0002426785130000081
As shown in the results of table 4, when the ratio of the content of the acrylic monomer or oligomer to the sum of the weights of the acrylic monomer or oligomer and the acrylic resin (i.e., (a)/(a) + (B)) is 20% (comparative example 1), the negative photosensitive resin composition is poor in developability. When the ratio exceeds 45% (comparative examples 2 to 5), the formed film tends to be sticky. However, when the ratio is controlled in the range of 25% to 45% (examples 1 to 9), the negative photosensitive resin composition has excellent anti-tackiness in addition to good developability. Therefore, the negative photosensitive resin composition of the present invention can be effectively applied to a roll-to-roll process.
The above-mentioned embodiments are intended to illustrate the objects, technical solutions and advantages of the present invention in further detail, and it should be understood that the above-mentioned embodiments are only exemplary embodiments of the present invention and are not intended to limit the present invention, and any modifications, equivalents, improvements and the like made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims (11)

1. A negative photosensitive resin composition comprising:
(A)0.1 to 10 weight percent of an acrylic monomer or oligomer;
(B)0.2 to 30 weight percent of an acrylic resin;
(C)0.1 to 5 weight percent of a photoinitiator;
(D)0.01 to 1 weight percent of a hot acid initiator;
(E)0.1 to 5 weight percent of an epoxy monomer; and
the balance of organic solvent;
wherein, the content of the acrylic monomer or oligomer accounts for 25 to 45 percent of the weight sum of the acrylic monomer or oligomer and the acrylic resin.
2. The negative-type photosensitive resin composition of claim 1, wherein the thermal acid initiator is a cationic thermal acid initiator.
3. The negative-type photosensitive resin composition of claim 1, wherein an acid dissociation constant of an acid formed by heating the hot acid initiator is less than or equal to-20 and greater than or equal to-30.
4. The negative-type photosensitive resin composition of claim 3, wherein an acid formed by heating the hot acid initiator has an acid dissociation constant of less than-20 and greater than or equal to-30.
5. The negative-type photosensitive resin composition according to claim 1, wherein the acid group of the thermal acid initiator is SbF6 -Or B (C)6F5)-
6. The negative photosensitive resin composition of claim 1, wherein the acrylic monomer or oligomer is present in an amount of 25% to 33% based on the sum of the weight of the acrylic monomer or oligomer and the weight of the acrylic resin.
7. The negative photosensitive resin composition of claim 1, wherein the acrylic resin has a molecular weight of between 10,000 g/mol and 20,000 g/mol.
8. The negative photosensitive resin composition of claim 1, wherein the acrylic resin comprises an epoxy-containing monomer.
9. The negative photosensitive resin composition of claim 1, wherein the acrylic resin is formed of tricyclo [5, 2, 1, 02, 6] dec-8-yl methacrylate (TCDMA), methacrylic acid (MAA), Styrene (Styrene), methacrylic acid, 7-oxabicyclo [4.1.0] hept-3-ylmethyl ester (CYCLOMER M-100), and tetrahydrofurmethyl methacrylate (THFMA).
10. The negative photosensitive resin composition of claim 1, wherein the epoxy monomer comprises bis (3, 4-epoxycyclohexylmethyl) adipate, 3-glycidoxypropyltrimethoxysilane, or a combination thereof.
11. Use of the negative-type photosensitive resin composition according to any one of claims 1 to 10 for a roll-to-roll process.
CN202010226580.1A 2020-03-26 2020-03-26 Negative photosensitive resin composition and use thereof Pending CN113448164A (en)

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