CN113448136A - Integrated optical phased array based on vortex rotation - Google Patents
Integrated optical phased array based on vortex rotation Download PDFInfo
- Publication number
- CN113448136A CN113448136A CN202110842379.0A CN202110842379A CN113448136A CN 113448136 A CN113448136 A CN 113448136A CN 202110842379 A CN202110842379 A CN 202110842379A CN 113448136 A CN113448136 A CN 113448136A
- Authority
- CN
- China
- Prior art keywords
- micro
- ring
- grating
- vortex rotation
- waveguide
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/29—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the position or the direction of light beams, i.e. deflection
- G02F1/292—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the position or the direction of light beams, i.e. deflection by controlled diffraction or phased-array beam steering
Landscapes
- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Optical Integrated Circuits (AREA)
- Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
Abstract
The invention discloses an integrated optical phased array based on vortex rotation, which comprises a plurality of concentric plane vortex rotation micro-ring emitters integrated on a plurality of sheets, wherein the concentric plane vortex rotation micro-ring emitters integrated on the plurality of sheets are connected through an optical beam splitter, each plane vortex rotation micro-ring emitter comprises a lower layer straight waveguide, a phase shifter, an upper layer micro-ring waveguide with a grating and a metal micro-heater, the phase shifter is arranged on the lower layer straight waveguide, and the metal micro-heater is arranged on the micro-ring waveguide with the grating. By using the invention, 360-degree full-plane beam scanning can be realized. The integrated optical phased array based on vortex rotation can be widely applied to the field of optical phased arrays.
Description
Technical Field
The invention relates to the field of optical phased arrays, in particular to an integrated optical phased array based on vortex rotation.
Background
An optical phased array is a promising beam shaping method, and the emergence direction of a main lobe of a beam can be controlled by adjusting the phase of each emergent wave. The method has the advantages of low cost, small chip size, high resolution, high precision, high response speed and the like. The scanning range of the existing optical phased array is only dozens of degrees, and even in an edge emergent scheme, the scanning angle still cannot exceed 180 degrees due to the limitation of the geometric shape.
Disclosure of Invention
In order to solve the above technical problems, an object of the present invention is to provide an integrated optical phased array based on vortex rotation, which can realize 360-degree full-plane beam scanning.
The first technical scheme adopted by the invention is as follows: an integrated optical phased array based on vortex rotation, comprising a plurality of on-chip integrated concentric planar vortex rotation micro-ring emitters, wherein the plurality of on-chip integrated concentric planar vortex rotation micro-ring emitters are connected through an optical beam splitter, the planar vortex rotation micro-ring emitters comprise a lower layer straight waveguide, a phase shifter, an upper layer grating micro-ring waveguide and a metal micro-heater, the phase shifter is arranged on the lower layer straight waveguide, and the metal micro-heater is arranged on the grating micro-ring waveguide, wherein:
the planar vortex optical micro-ring transmitter couples a light field incident into the lower layer straight waveguide into the upper layer micro-ring waveguide with the grating, and emits planar vortex rotation from the side wall of the upper layer micro-ring waveguide with the grating;
a phase shifter for adjusting the magnitude of the initial phase;
and the metal micro heater is used for changing the temperature of the upper-layer micro-ring waveguide with the grating so as to change the refractive index of the upper-layer micro-ring waveguide with the grating, so that each upper-layer micro-ring waveguide with the grating has a common resonant frequency.
Further, the upper surface of the upper-layer micro-ring waveguide with the grating is provided with a shallow etching circular grating, the diameter of the shallow etching circular grating is 200nm, and the depth of the shallow etching circular grating is 350 nm.
Further, the lower layer straight waveguide is made of silicon, the thickness is 220nm, and the width is 500 nm.
Further, the phase shifter is arranged 2500nm above the lower layer straight waveguide, and the phase shifter is made of nichrome with the length of 1mm, the width of 1000nm and the thickness of 100 nm.
Furthermore, the upper layer micro-ring waveguide with the grating adopts Si3N4The prepared film has a thickness of 500nm and a width of 1200 nm.
Furthermore, the interval between the metal micro heater and the upper layer micro-ring waveguide with the grating is 1500 nm.
Furthermore, the micro heater is positioned right above the upper layer micro-ring waveguide with the grating and is made of nichrome with the width of 2000nm and the thickness of 100 nm.
Further, the total outgoing light field of the N planar vortex optical micro-ring emitters can be expressed as:
in the above formula, E0Is the same amplitude of each planar vortex rotation, and Δ l represents the difference in the order of each vortex rotation, ψmThe method is characterized in that an additional initial phase of each vortex rotation on an emergent surface of an optical phased array is adopted, m is a positive integer and represents the serial number of a micro-ring emitter, j represents an imaginary unit, and N represents the number of the micro-ring emitters. To make the optical phased array main lobe emergent at a certain angle
In this way, the total light intensity in the direction is required to be maximum, i.e. the phase ψ modulated by the phase modulator corresponding to each micro-ring transmittermSatisfy the requirement of
In this case the light field is
The total amplitude in the direction is: e ═ NE0At this time, the optical phased array main lobe edge
And is emitted out in the direction.
In addition, a second technical scheme can be adopted, and the difference is that the lower layer straight waveguide is made of silicon, the upper layer micro-ring waveguide with the grating is made of silicon, and the lower layer straight waveguide and the upper layer micro-ring waveguide with the grating are bonded together through two SOI (silicon on insulator) pieces.
The invention has the beneficial effects that: according to the invention, through adjusting the phase shifters on the straight waveguides, the additional phases of the emergent vortex optical rotations of different micro-ring transmitters are controlled, so that coherent superposition of an optical phased array is realized at a specific angle, a series of plane vortex optical rotations are generated through a plurality of micro-ring waveguides with gratings, and plane vortex light with the same frequency is superposed, so that 360-degree full-plane beam scanning can be realized.
Drawings
FIG. 1 is a schematic diagram of an integrated optical phased array based on vortex rotation according to the present invention;
FIG. 2 is a schematic diagram of a planar vortex optical micro-ring emitter in accordance with an embodiment of the present invention;
reference numerals: 1. a lower straight waveguide; 2. a phase shifter; 3. a metal micro-heater; 4. the upper layer is provided with a grating micro-ring waveguide; 5. an optical beam splitter.
Detailed Description
The invention is described in further detail below with reference to the figures and the specific embodiments. The numbers in the following embodiments are provided for convenience of illustration only, the order between the numbers is not limited, and the execution order in the embodiments can be adapted according to the understanding of those skilled in the art.
Referring to fig. 1 and 2, the present invention provides an integrated optical phased array based on vortex rotation, including a plurality of concentric planar vortex rotation micro-ring emitters integrated on a chip, the concentric planar vortex rotation micro-ring emitters integrated on the chip are connected by an optical beam splitter, the planar vortex rotation micro-ring emitter includes a lower layer straight waveguide, a phase shifter, an upper layer micro-ring waveguide with a grating, and a metal micro-heater, the phase shifter is disposed on the lower layer straight waveguide, the metal micro-heater is disposed on the micro-ring waveguide with the grating, wherein:
the planar vortex optical micro-ring transmitter couples a light field incident into the lower layer straight waveguide into the upper layer micro-ring waveguide with the grating, and emits planar vortex rotation from the side wall of the upper layer micro-ring waveguide with the grating;
a phase shifter for adjusting the magnitude of the initial phase;
and the metal micro heater is used for changing the temperature of the upper-layer micro-ring waveguide with the grating so as to change the refractive index of the upper-layer micro-ring waveguide with the grating, so that each upper-layer micro-ring waveguide with the grating has a common resonant frequency.
In particular toPlanar vortex rotation (PSOAM) is a novel vortex beam with the phase distribution characteristic of a conventional vortex optical field, but propagating radially, PSOAM can be expressed simply as
E is the amplitude of the optical field, j is the unit of imaginary number, l is the order of the vortex rotation,
is the angular coordinate and psi is the initial phase of the light field. For a PSOAM micro-ring transmitter, the order l of the vortex rotation satisfies the relation l ═ m-n, where m is the number of optical cycles in the micro-ring and n is the number of gratings on the micro-ring. The number m of optical periods is determined by the radius R of the microring, the wavelength λ of the light and the effective refractive index neffDetermining that the relation 2 pi n is satisfiedeffR ═ m λ. Through reasonable setting micro-ring radius R and grating number n, can change the topological charge value l of certain resonant wavelength's PSOAM, can adjust the size of initial phase psi through the phase modulator in the straight waveguide of lower floor, can adjust the resonant frequency lambda of every micro-ring through the metal micro heater of micro-ring waveguide top.
A plurality of plane vortex light generators produce the unequal plane vortex light field of a series of topological charge values l, and through coherent stack, total electric field distribution does:
by controlling the amplitude E of each PSOAMiOrder liThe required narrow light beams can be obtained through superposition; by controlling the additional phase psi of each beamiThe superimposed narrow beams can be made to appear at different angles, achieving 360 degree azimuthal scanning.
If the amplitude of the vortex light field emitted by each PSOAM emitter is the same as E0And the order difference is constant and is delta l, the total light field can be simplified as follows:
the sum term of the above formula influences the total light fieldThe relative intensity of the distribution is equivalent to the PSOAM coherent superposition of a plurality of unit amplitudes, so that the total amplitude of the optical field is the maximum at the same phase, and the total amplitude at other positions is far smaller than that at the same phase. By reasonably adjusting the initial phase psi of each PSOAMiAll the PSOAM phases can be made the same at some or several target locations. At this time, the number of positions with the same phase is exactly equal to the order difference Δ l, and the positions are uniformly distributed, so that the number of main lobes emitting the total light field is equal to the order difference Δ l, and each main lobe is emitted at an equal angular interval. Therefore, to realize simultaneous emission at multiple angles, only the order difference of the emergent vortex optical rotation of each planar vortex light emitter needs to be controlled. The emergent direction of the main lobe is determined by the initial phase psi of each PSOAMiIt was decided that the main lobe of the total optical field could be rotated 360 degrees in-plane, i.e. by adjusting the phase shifters in the underlying straight waveguides.
Further as a preferred embodiment, the upper surface of the upper-layer micro-ring waveguide with the grating is provided with a shallow etching circular grating, the diameter of the shallow etching circular grating is 200nm, and the depth of the shallow etching circular grating is 350 nm.
Further as a preferred embodiment, the lower straight waveguide is made of silicon, and has a thickness of 220nm and a width of 500 nm.
Further as a preferred embodiment, the phase shifter is placed 2500nm above the lower straight waveguide, and the phase shifter is made of nichrome with a length of 1mm, a width of 1000nm, and a thickness of 100 nm.
Further as a preferred embodiment, the upper layer micro-ring waveguide with grating adopts Si3N4The prepared film has a thickness of 500nm and a width of 1200 nm.
Further as a preferred embodiment, the metal micro heater is spaced from the upper layer micro ring waveguide with the grating by 1500 nm.
Further as a preferred embodiment, the micro heater is positioned right above the upper layer micro-ring waveguide with the grating and is made of nichrome with the width of 2000nm and the thickness of 100 nm.
The phased array consists of a series of PSOAM transmitters, each Si of which is3N4The micro-ring waveguides are all concentric and pass through the micro metal heater above the micro-ringThe thermal heater acts to cause each microring to have a common resonant frequency, which is the operating frequency of the device. Si3N4The microring radii are 40.18, 60.53, 84.87, 107.22 μm, respectively, and the grating numbers are 269, 418, 567, 716, respectively, under the parameters, each microring generates PSOAM light with the order l 1, 2, 3, 4, respectively, at the wavelength of 1550 μm.
The main lobe direction of the PSOAM light superposition emergent narrow light beams is adjustable, and the additional initial phases of the phase modulators on the straight waveguides are adjusted, so that the additional phases of the emergent eddy optical rotations of different micro-ring emitters are controlled, and the optical phased array realizes coherent superposition at a specific angle. The optical phased array can realize 360-degree full-plane constant-amplitude scanning, and the total emergent light fields of the N PSOAM transmitters can be expressed as follows:
in the above formula, E0Is the same amplitude of each planar vortex rotation, and Δ l represents the difference in the order of each vortex rotation, ψmThe additional initial phase of each eddy rotation at the emergent surface of the optical phased array is to make the main lobe of the optical phased array emergent at a certain angle
The above. The total light intensity in the direction is required to be maximum, i.e. the phase psi modulated by the phase modulator corresponding to each micro-ring generatormSatisfy the requirement of
In this case the light field is
The total amplitude in the direction is: e ═ NE0When the optical phased array is along
And is emitted out in the direction.
While the preferred embodiments of the present invention have been illustrated and described, it will be understood by those skilled in the art that various changes in form and details may be made therein without departing from the spirit and scope of the invention as defined by the appended claims.
Claims (8)
1. An integrated optical phased array based on vortex rotation, which is characterized by comprising a plurality of concentric planar vortex rotation micro-ring emitters integrated on a plurality of chips, wherein the concentric planar vortex rotation micro-ring emitters integrated on the plurality of chips are connected through an optical beam splitter, each planar vortex rotation micro-ring emitter comprises a lower layer straight waveguide, a phase shifter, an upper layer grating micro-ring waveguide and a metal micro-heater, the phase shifter is arranged on the lower layer straight waveguide, and the metal micro-heater is arranged on the grating micro-ring waveguide, wherein:
the planar vortex optical micro-ring transmitter couples a light field incident into the lower layer straight waveguide into the upper layer micro-ring waveguide with the grating, and emits planar vortex rotation from the side wall of the upper layer micro-ring waveguide with the grating;
a phase shifter for adjusting the magnitude of the initial phase;
and the metal micro heater is used for changing the temperature of the upper-layer micro-ring waveguide with the grating so as to change the refractive index of the upper-layer micro-ring waveguide with the grating, so that each upper-layer micro-ring waveguide with the grating has a common resonant frequency.
2. The integrated optical phased array based on vortex rotation according to claim 1, wherein the upper layer micro ring waveguide with grating is provided with a shallow etched circular grating on the upper surface, and the shallow etched circular grating has a diameter of 200nm and a depth of 350 nm.
3. The integrated optical phased array based on vortex rotation according to claim 2, wherein the lower straight waveguide is made of silicon, and has a thickness of 220nm and a width of 500 nm.
4. The integrated optical phased array based on vortex rotation according to claim 3, wherein the phase shifter is placed 2500nm above the lower straight waveguide, and the phase shifter is made of nichrome with a length of 1mm, a width of 1000nm and a thickness of 100 nm.
5. The integrated optical phased array based on vortex rotation according to claim 4, wherein the upper layer micro ring waveguide with grating is made of Si3N4The prepared film has a thickness of 500nm and a width of 1200 nm.
6. The integrated optical phased array based on vortex rotation according to claim 5, wherein the metal micro-heaters are spaced from the upper grating micro-ring waveguide by 1500 nm.
7. The integrated optical phased array based on vortex rotation according to claim 6, wherein the micro heater is located right above the upper layer micro ring waveguide with grating and is made of nichrome with width of 2000nm and thickness of 100 nm.
8. The integrated optical phased array based on vortex rotation as claimed in claim 7, wherein the total light field emitted from the N planar vortex rotation micro-ring emitters can be expressed as:
in the above formula, E0The amplitude of each plane vortex rotation is equal, l represents the order of the plane vortex rotation, Deltal represents the order difference of the plane vortex rotation of each order,
indicating angular coordinate, ψmAnd the additional initial phase of each eddy optical rotation at the emergent surface of the optical phased array is shown, m is a positive integer and represents the serial number of the micro-ring emitters, j represents an imaginary unit, and N represents the number of the micro-ring emitters.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110842379.0A CN113448136B (en) | 2021-07-26 | 2021-07-26 | Integrated optical phased array based on vortex rotation |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110842379.0A CN113448136B (en) | 2021-07-26 | 2021-07-26 | Integrated optical phased array based on vortex rotation |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN113448136A true CN113448136A (en) | 2021-09-28 |
| CN113448136B CN113448136B (en) | 2022-11-22 |
Family
ID=77817184
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202110842379.0A Active CN113448136B (en) | 2021-07-26 | 2021-07-26 | Integrated optical phased array based on vortex rotation |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN113448136B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114295203A (en) * | 2022-01-11 | 2022-04-08 | 四川大学 | Vortex intensity measuring device and method for vortex light beam |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CA1305249C (en) * | 1988-04-29 | 1992-07-14 | Lotfollah Shafai | Scanning antenna |
| CN101261223A (en) * | 2008-04-15 | 2008-09-10 | 浙江大学 | Optical micro-ring resonant transducer based on narrow slit wave-guide and its manufacture method |
| CN103944064A (en) * | 2014-04-28 | 2014-07-23 | 浙江大学 | Reflection cavity mirror structure for high-speed Q modulation and wavelength tunable type waveguide laser |
| CN104764531A (en) * | 2015-03-13 | 2015-07-08 | 深圳先进技术研究院 | Integrated infrared thermal sensor and manufacturing method thereof and imaging system and imaging method |
| CN109683239A (en) * | 2019-01-23 | 2019-04-26 | 上海交通大学 | Vector vortex beams radiator and its application in photon integrated chip |
| CN111175904A (en) * | 2020-02-19 | 2020-05-19 | 中山大学 | Adjustable Fano resonance integrated device and preparation method thereof |
| US20200209666A1 (en) * | 2018-08-07 | 2020-07-02 | UltResFP, LLC | Method for electronically configurable variable aperture and grating |
-
2021
- 2021-07-26 CN CN202110842379.0A patent/CN113448136B/en active Active
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CA1305249C (en) * | 1988-04-29 | 1992-07-14 | Lotfollah Shafai | Scanning antenna |
| CN101261223A (en) * | 2008-04-15 | 2008-09-10 | 浙江大学 | Optical micro-ring resonant transducer based on narrow slit wave-guide and its manufacture method |
| CN103944064A (en) * | 2014-04-28 | 2014-07-23 | 浙江大学 | Reflection cavity mirror structure for high-speed Q modulation and wavelength tunable type waveguide laser |
| CN104764531A (en) * | 2015-03-13 | 2015-07-08 | 深圳先进技术研究院 | Integrated infrared thermal sensor and manufacturing method thereof and imaging system and imaging method |
| US20200209666A1 (en) * | 2018-08-07 | 2020-07-02 | UltResFP, LLC | Method for electronically configurable variable aperture and grating |
| CN109683239A (en) * | 2019-01-23 | 2019-04-26 | 上海交通大学 | Vector vortex beams radiator and its application in photon integrated chip |
| CN111175904A (en) * | 2020-02-19 | 2020-05-19 | 中山大学 | Adjustable Fano resonance integrated device and preparation method thereof |
Non-Patent Citations (1)
| Title |
|---|
| WEIFENG ZHANG ETC.: "Optically tunable Fanoresonance in a gratingbased Fabry-Perot cavity-coupled microring resonator on a silicon chip", 《OPTICS LETTERS》 * |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114295203A (en) * | 2022-01-11 | 2022-04-08 | 四川大学 | Vortex intensity measuring device and method for vortex light beam |
Also Published As
| Publication number | Publication date |
|---|---|
| CN113448136B (en) | 2022-11-22 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US11604397B2 (en) | Phase front shaping in one and two-dimensional optical phased arrays | |
| US9104086B1 (en) | Method and apparatus of wide-angle optical beamsteering from a nanoantenna phased array | |
| US9081252B2 (en) | Integrated two-dimensional planar optical phased array | |
| US10732483B2 (en) | Nanophotonic radiator using grid structure for application to photonic phased-array antenna | |
| CN113448136B (en) | Integrated optical phased array based on vortex rotation | |
| EP1883995B1 (en) | Variable inclination array antenna | |
| CN108227334B (en) | Optical phased array | |
| US20230152453A1 (en) | Optical phased array device for lidar sensor | |
| US20220155419A1 (en) | Optical phase array antenna based on optical waveguide having double grating structure and lidar including the same | |
| CN111221197A (en) | Super-surface silicon-based liquid crystal composite spatial light modulator | |
| US5796881A (en) | Lightweight antenna and method for the utilization thereof | |
| CN108761954B (en) | Two-dimensional optical phased array grating lobe elimination and phase modulation method | |
| US6717753B2 (en) | Optical element and method for manufacturing same | |
| US20030053790A1 (en) | Photonic crystal and optical waveguide elements | |
| US20230350216A1 (en) | Optical device | |
| CN111585035B (en) | Dynamically-adjusted super surface, manufacturing method thereof and electromagnetic wave regulation and control method | |
| US11245471B2 (en) | Photonics adaptive beam forming with a polar lattice comprising optical phased array receiving elements to receive the steered optical beam from optical phased array transmitting elements positioned in a circular path | |
| CN112965155B (en) | Reflective super lens based on three-dimensional microstructure and preparation method thereof | |
| CN113363727B (en) | Terahertz wave beam scanning-polarization composite regulation and control device and antenna | |
| CN115701552A (en) | Optical fiber array connector and method for manufacturing super-structure surface lens | |
| CN110927856B (en) | Liquid crystal optical vortex demultiplexer and manufacturing method thereof | |
| JP4201506B2 (en) | Laser processing method and processing machine | |
| Srivastava et al. | Photonic-technique-based highly steerable beamforming system incorporating a prism of super Gaussian apodized tunable chirped fiber Bragg grating for X-band applications | |
| KR102223750B1 (en) | Array Antenna Capable of Varying the Phase of Light | |
| JP7159763B2 (en) | Optical device and laser radar device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |