CN113448011B - Design method and device of athermal AWG - Google Patents
Design method and device of athermal AWG Download PDFInfo
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- CN113448011B CN113448011B CN202110728218.9A CN202110728218A CN113448011B CN 113448011 B CN113448011 B CN 113448011B CN 202110728218 A CN202110728218 A CN 202110728218A CN 113448011 B CN113448011 B CN 113448011B
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/12007—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer
- G02B6/12009—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer comprising arrayed waveguide grating [AWG] devices, i.e. with a phased array of waveguides
- G02B6/12026—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer comprising arrayed waveguide grating [AWG] devices, i.e. with a phased array of waveguides characterised by means for reducing the temperature dependence
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/12007—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer
- G02B6/12009—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer comprising arrayed waveguide grating [AWG] devices, i.e. with a phased array of waveguides
Abstract
The invention relates to the technical field of optical communication, and provides a design method and a device of a heatless AWG. The device comprises an input waveguide 1, an input coupler 2, a transmission waveguide array 3, an output coupler 4, a wavelength compensation lens 5 and an output waveguide array 6 which are sequentially coupled with each other, wherein input light enters a light inlet surface 5-1 of the wavelength compensation lens 5 after the wavelength division demultiplexing of the input light is completed and the input light is emitted from an output curved surface 4-1 of the output coupler 4; a preset number of lens curved surface arrays are arranged on the light emitting surface 5-2 of the wavelength compensation lens 5; under the condition that light paths of light with the same wavelength deviate at different temperatures, the light still irradiates the same lens curved surface on the light-emitting surface 5-2 of the wavelength compensation lens 5 to be converged and then is emitted into the corresponding output waveguide. The invention solves the temperature dependence problem, and the related reliability and stability problem of the optical waveguide integrated device based on the PLC technology.
Description
[ technical field ] A method for producing a semiconductor device
The invention relates to the technical field of optical communication, in particular to a design method and a device of athermal AWG.
[ background of the invention ]
DWDM technology is an important means for expanding the communication capacity of optical fibers, and AWG (dense wavelength division multiplexing/demultiplexing) has a large number of channels, small volume, high integration and low single-channel price, and is widely applied to backbone networks, transmission networks and access networks.
The central wavelength of the AWG band is very sensitive to temperature, and in order to keep the wavelength stable, the AWG chip is heated to a certain temperature of 68-85 ℃ (higher than the use temperature, only heating is needed) by using a heating method for the thermal AWG, so that the AWG can keep the constant passband wavelength in the whole working temperature range (-5-65 ℃). The athermal AWG gets rid of the electric requirement and can realize the wavelength stabilization.
The existing athermal AWG has three ways to stabilize the wavelength:
the first method comprises the following steps: the input slab waveguide is cut off, the input slab waveguide is fixed on the metal adjusting block, one end of the metal adjusting block is fixed, the input slab waveguide is translated by utilizing the expansion and contraction effect of metal, and the length of the metal adjusting block is adjusted, so that the wavelength change caused by the metal expansion and contraction translation input slab waveguide is offset with the wavelength change of the AWG along with the temperature, and the basic stability of the AWG wavelength in a wide temperature range (-5-65 ℃) is realized.
And the second method comprises the following steps: the input slab waveguide is cut off, the input slab waveguide is rotated by utilizing the expansion and contraction effect of the metal, the length of the metal adjusting block is adjusted, and the wavelength change caused by the rotation of the input slab waveguide by the expansion and contraction of the metal is offset with the wavelength change of the AWG along with the temperature, so that the basic stability of the AWG wavelength in a wide temperature range (-5-65 ℃) is realized.
And the third is that: and adding a negative temperature coefficient refractive index material into the AWG grating region, and adjusting the size of the negative temperature coefficient refractive index material to make the wavelength change of the AWG silicon dioxide waveguide along with the temperature offset with the wavelength change of the negative temperature coefficient refractive index material waveguide along with the temperature, so that the AWG wavelength is basically stable in a wide temperature range (minus 5-65 ℃).
In the three implementation methods, the first two methods need to cut off the input slab waveguide, and the last implementation method needs to add the negative temperature coefficient refractive index material into the AWG grating region, so that the structure is complex and the technical difficulty is high.
Such as patents CN107490823A and CN201510216683, which both use multi-rod drives, and different rods act in different temperature ranges, so as to generate different compensation amounts in different temperature ranges, for example, a larger drive in a high temperature range, an overcompensation in a temperature-wavelength curve, a smaller drive in a low temperature range, and an undercompensation in a temperature-wavelength curve, so as to realize a smaller drift amount of the wavelength in the whole temperature range. However, in this structure, whether the rod acts in different temperature ranges mainly depends on contact and non-contact of the structure, so the processing and assembly of the structure are required to have higher precision, usually required to be in the order of submicron, and these factors increase the difficulty in processing and assembling parts of these schemes.
In view of the above, overcoming the drawbacks of the prior art is an urgent problem in the art.
[ summary of the invention ]
The technical problem to be solved by the embodiment of the invention is that in the existing lancing technology, the chip needs to be cut off, which has higher requirements on the position of the lancing and the blade, and meanwhile, the transmission loss of the chip can be increased. The filling material is compensated, and the chip is required to be grooved, so that the requirements on the etching process are high, and the requirement on the filling consistency of the material is also high. The prior art has great influence on the transmission loss of a chip and has complex process.
In a first aspect, the present invention provides an athermal AWG device, comprising an input waveguide 1, an input coupler 2, a transmission waveguide array 3, an output coupler 4, a wavelength compensation lens 5, and an output waveguide array 6, which are sequentially coupled to each other, specifically:
the input light is subjected to wavelength division demultiplexing, and is emitted from an output curved surface 4-1 of the output coupler 4 and then enters a light inlet surface 5-1 of the wavelength compensation lens 5;
a preset number of lens curved surface arrays are arranged on the light emitting surface 5-2 of the wavelength compensation lens 5; under the condition that light paths of light with the same wavelength deviate at different temperatures, the light still irradiates the same lens curved surface on the light-emitting surface 5-2 of the wavelength compensation lens 5 to be converged and then is emitted to a specified output waveguide in the corresponding output waveguide array 6.
Preferably, the output curved surface 4-1 of the output coupler 4 is parallel to the light inlet surface 5-1 of the wavelength compensation lens 5, and the gap is smaller than the preset threshold.
Preferably, the preset threshold is 20+5um。
Preferably, the optical path and the curved surface remain perpendicular when the light exits the curved output surface 4-1 of the output coupler 4.
Preferably, the wavelength compensation lens 5 is made of the same material as the waveguide core layer of the transmission waveguide array 3, such as doped silicon dioxide, polymer material, silicon nitride, etc.
Preferably, the number of waveguide fiber cores in the transmission waveguide array 3 is obtained by comprehensively calculating the number of position switching occurring in the waveguide fiber cores of each wavelength optical signal at different temperatures according to the number of the wavelength optical signals to be transmitted and the number of the wavelength optical signals at different temperatures.
In a second aspect, the invention provides a design method of an athermal AWG, which builds the AWG in sequence according to the sequence of an input waveguide 1, an input coupler 2, a transmission waveguide array 3 and an output coupler 4, and the method comprises the following steps:
inputting a test optical signal into an input waveguide 1, wherein the test optical signal is formed by combining a preset number of wavelengths;
adjusting the AWG to work at one or more corresponding temperatures according to one or more preset temperatures, and respectively collecting photon signals of output ports of the output coupler 4;
according to the position switching of the optical signals of the output ports of the output coupler 4 at each temperature, the size and the distribution position of the lens curved surface in the lens curved surface array on the light-emitting surface 5-2 in the wavelength compensation lens 5 are determined, so that the same photon signals with the position switching at different temperatures can be irradiated to the same lens curved surface on the light-emitting surface 5-2.
Preferably, after the respective wavelength compensation lenses 5 are manufactured, the method further includes:
an output curved surface 4-1 of the output coupler is parallel to a light inlet surface 5-1 of the wavelength compensation lens, and the gap is smaller than a preset threshold value;
and output waveguides are arranged in the light-emitting surface 5-2 of the wavelength compensation lens 5 corresponding to the curved surface of the lens, and the output waveguides jointly form an output waveguide array 6.
Preferably, the determining the size and the distribution position of the lens curved surface in the lens curved surface array located on 5-2 of the light emitting surface in the wavelength compensation lens 5 specifically includes:
determining the size and the distribution position of the lens curved surface in the lens curved surface array positioned on the light-emitting surface 5-2 in the wavelength compensation lens 5, and designing the length of the wavelength compensation lens 5 according to the size and the distribution position of the lens, so that the light-emitting surface 5-2 of the wavelength compensation lens 5 can accommodate the lower lens curved surfaces.
Preferably, the wavelength compensation lens 5 is made of the same material as the waveguide core layer.
The invention provides a method for manufacturing athermal AWG, which is characterized in that a lens structure is added in front of an output waveguide array, so that light in an output sector area is coupled into the lens structure, light path drift caused at a certain temperature can be converged at an output surface of the lens and coupled into an output transmission waveguide array, and the temperature dependence of a PLC optical waveguide device is compensated. The problem of the temperature dependence of the PLC technology-based optical waveguide integrated device, and the problems of the related reliability and stability are solved.
[ description of the drawings ]
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the drawings without creative efforts.
Fig. 1 is a diagram of the overall design of a chip without a thermal AWG according to an embodiment of the present invention;
FIG. 2 is a detailed view of a compensation lens and an output waveguide array provided by an embodiment of the present invention;
FIG. 3 is a diagram of optical paths of light rays entering a compensation lens from an output coupler and then being coupled into an output waveguide array at different temperatures according to an embodiment of the present invention;
fig. 4 is a schematic flow chart of a design method of an athermal AWG according to an embodiment of the present invention;
FIG. 5 is a schematic diagram of the effect of the conventional 1 × 4 athermal AWG;
FIG. 6 is a schematic diagram of a specific embodiment of a 1 × 4 athermal AWG;
wherein: 1, an input waveguide; 2, an input coupler; 3, transmitting the waveguide array; 4, an output coupler; 4-1, an output curved surface of the output coupler; 5, a wavelength compensation lens; 5-1, the light inlet surface of the wavelength compensation lens; 5-2, a light-emitting surface of the wavelength compensation lens; 6, an output waveguide array; 6-1, coupler of output waveguide array and wavelength compensation lens.
[ detailed description ] embodiments
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention is described in further detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.
In the description of the present invention, the terms "inner", "outer", "longitudinal", "lateral", "upper", "lower", "top", "bottom", and the like indicate orientations or positional relationships based on those shown in the drawings, and are for convenience only to describe the present invention without requiring the present invention to be necessarily constructed and operated in a specific orientation, and thus should not be construed as limiting the present invention.
In addition, the technical features involved in the embodiments of the present invention described below may be combined with each other as long as they do not conflict with each other.
Example 1:
an embodiment of the present invention provides an athermal AWG device, as shown in fig. 1, fig. 2, and fig. 3, which includes an input waveguide 1, an input coupler 2, a transmission waveguide array 3, an output coupler 4, a wavelength compensation lens 5, and an output waveguide array 6, which are sequentially coupled to each other, specifically:
the input light is subjected to wavelength division demultiplexing, and is emitted from an output curved surface 4-1 of the output coupler 4 and then enters a light inlet surface 5-1 of the wavelength compensation lens 5;
a preset number of lens curved surface arrays are arranged on the light emitting surface 5-2 of the wavelength compensation lens 5; under the condition that light paths of light with the same wavelength deviate at different temperatures, the light still irradiates the same lens curved surface on the light-emitting surface 5-2 of the wavelength compensation lens 5 to be converged and then is emitted to a specified output waveguide in the corresponding output waveguide array 6.
The invention provides a method for manufacturing athermal AWG, which is characterized in that a lens structure is added in front of an output waveguide, so that light in an output sector area is coupled into the lens structure, light path drift caused at a certain temperature can be converged at an output surface of the lens and coupled into an output transmission waveguide array, and the temperature dependence of a PLC optical waveguide device is compensated. The temperature-dependent problem, the related reliability and stability problems of the optical waveguide integrated device based on the PLC technology are solved.
In the implementation process of the embodiment of the invention, the output curved surface 4-1 of the output coupler 4 is parallel to the light inlet surface 5-1 of the wavelength compensation lens 5, and the gap is smaller than the preset threshold value. Typically, the predetermined threshold is 20+5um。
The material of the wavelength compensation lens 5 is the same as the material of the waveguide core layer of the transmission waveguide array 3. The material comprises: doped silicon dioxide, silicon nitride or a polymeric material.
Example 2:
the embodiment of the present invention further provides a design method of an athermal AWG, which sequentially constructs the AWG according to the order of the input waveguide 1, the input coupler 2, the transmission waveguide array 3, and the output coupler 4, and as shown in fig. 4, the method includes:
in step 201, a test optical signal is input into the input waveguide 1, wherein the test optical signal is formed by combining a preset number of wavelengths.
In step 202, the AWG is adjusted to operate at one or more preset temperatures according to the preset one or more preset temperatures, and photon signals of the output ports of the output coupler 4 are respectively collected.
In step 203, according to the position switching of the optical signal at each output port of the output coupler 4 at each temperature, the size and the distribution position of the lens curved surface in the lens curved surface array located on the light-emitting surface 5-2 in the wavelength compensation lens 5 are determined, so that the same photon signal with the position switching at different temperatures can be irradiated to the same lens curved surface on the light-emitting surface 5-2.
Taking fig. 6 as an example, the output optical signal 7-1, the output optical signal 7-2 and the output optical signal 7-3 correspond to output states of the same wavelength at different temperatures on the output coupler 4, and they are effectively carried by the same lens curved surface located on the light exit surface 5-2 in the wavelength compensation lens 5.
Taking fig. 3 as an example, one of the output waveguide fibers is opposite to a lens curved surface, that is, a lens structure etched and formed in the light-emitting surface 5-2 of the wavelength compensation lens 5.
The invention provides a method for manufacturing athermal AWG, which is characterized in that a lens structure is added in front of an output waveguide, so that light in an output sector area is coupled into the lens structure, light path drift caused at a certain temperature can be converged at an output surface of the lens and coupled into an output transmission waveguide array, and the temperature dependence of a PLC optical waveguide device is compensated. The temperature-dependent problem, the related reliability and stability problems of the optical waveguide integrated device based on the PLC technology are solved.
With the embodiment of the present invention, as a more complete implementation scenario, after the corresponding wavelength compensation lens 5 is manufactured, the method further includes:
an output curved surface 4-1 of the output coupler is parallel to a light inlet surface 5-1 of the wavelength compensation lens, and the gap is smaller than a preset threshold value;
and output waveguides are arranged in the light-emitting surface 5-2 of the wavelength compensation lens 5 corresponding to the curved surface of the lens, and the output waveguides jointly form an output waveguide array 6.
As shown in fig. 6, although the output optical signal 7-1, the output optical signal 7-2, and the output optical signal 7-3 are shown in a horizontal state, in an actual situation, there may be a certain angle between the corresponding output optical signals due to factors such as processing accuracy or material uniformity, and at this time, the determining the size and the distribution position of the lens curved surface in the lens curved surface array located on the light exit surface 5-2 in the wavelength compensation lens 5 specifically includes:
determining the size and the distribution position of the lens curved surface in the lens curved surface array positioned on the light-emitting surface 5-2 in the wavelength compensation lens 5, and designing the length of the wavelength compensation lens 5 according to the size and the distribution position of the lens, so that the light-emitting surface 5-2 of the wavelength compensation lens 5 can accommodate the lower lens curved surfaces.
In order to further improve the design accuracy of the wavelength compensation lens 5, that is, the wavelength compensation lens 5 designed according to the theoretically calculated parameters can perfectly meet the structural requirements of the embodiment of the present invention, there is a preferred implementation scheme in combination with the embodiment of the present invention, and the material of the wavelength compensation lens 5 is the same as the material of the waveguide core layer of the transmission waveguide array 3. For example: the material comprises: doped silicon dioxide, silicon nitride or a polymeric material.
Example 3:
the technical solution in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention. It is to be understood that the described embodiments are merely exemplary of the invention, and not restrictive of the full scope of the invention.
As shown in fig. 1, a design method of an athermal AWG includes an input waveguide 1, an input coupler 2, a transmission waveguide array 3, an output coupler 4, a wavelength compensation lens 5, and an output waveguide array 6.
Specifically, as shown in fig. 3, when the ambient temperature changes, the output wavelength shifts on the curved output surface 4-1 of the output coupler. In the embodiment of the invention, when one wavelength drifts in a temperature range, the output curved surface 4-1 of the output coupler cannot be coincided with the output position of another wavelength. In the implementation process, as long as the output curved surface 4-1 of the corresponding output coupler 4 is ensured to be wide enough, it can be ensured that when the above-mentioned one wavelength drifts in the temperature range, the output curved surface 4-1 of the output coupler does not coincide with the output position of another wavelength.
In the embodiment of the invention, the output curved surface 4-1 of the output coupler is parallel to and infinitely close to the light inlet surface 5-1 of the wavelength compensation lens. According to the design principle of the output coupler 4, when light exits from the curved output surface 4-1 of the output coupler, the optical path and the curved surface are kept perpendicular. The light exits from the output curved surface 4-1 of the output coupler and enters the light inlet surface 5-1 of the wavelength compensation lens almost perpendicularly. The light-emitting surface 5-2 of the wavelength compensation lens is composed of numerous small lens curved surfaces, and light with the same wavelength is converged at the same small lens curved surface of the light-emitting surface 5-2 of the wavelength compensation lens at different temperatures and then emitted into the corresponding output waveguide. Fig. 2 shows a specific light emitting surface 5-2 of the wavelength compensation lens. The specific optical path diagram can be seen in fig. 3. In the embodiment of the present invention, preferably, the material of the wavelength compensation lens 5 is the same as the material of the waveguide core layer, so that the uniformity of transmission skew can be achieved, thereby improving the calculation accuracy of the size and the position of each lens surface on the corresponding wavelength compensation lens 5.
Because the waveguide material has certain deformation under the influence of temperature, light with the same wavelength at different temperatures is converged through the light-emitting surface 5-2 of the wavelength compensation lens. When light exits from the light-emitting surface 5-2 of the wavelength compensation lens, the light path is deflected and coupled into the output waveguide array 6 through the coupler 6-1 of the wavelength compensation lens.
The design mode of the chip realizes the self-stabilization performance of AWG (arrayed waveguide grating) athermal wavelength in a wide temperature region, and has low processing difficulty and simpler structure. Similarly, the output coupler 4 and the wavelength compensation lens 5 may be designed as a single body according to the design.
For reference, the material of the wavelength compensation lens is not limited to the material used in the embodiment, and the related design parameters can be optimized according to different requirements.
Example 4:
the embodiments of the present invention continue with the technical solutions described in embodiments 1 to 3, and further according to the design requirements of the transmission waveguide array in a certain example scenario, an AWG chip of 1 × 4 is described as a specific embodiment.
As shown in fig. 5, in the present embodiment, an in-and-out AWG chip is used as a specific description, and there are 6 or more output end waveguides of the AWG chip in fig. 5 (the specific number setting manner can refer to the related descriptions in embodiment 1 and embodiment 2, which are not described herein again). In the environment of 25 deg.C, the light enters from the input end of AWG chip and is split, and the light with different wavelengths is output from different output channels. In the present embodiment, λ 1 passes through the second output of the output waveguide in an environment of 20 ℃. And when the ambient temperature is 60 ℃, the lambda 1 passes through the third output of the output waveguide. λ 1 passes through the first output of the output waveguide when the ambient temperature is-20 ℃. In practical applications, within a preset working environment temperature range, light with a wavelength λ 1 needs to be externally represented as an output channel (i.e., corresponding to the same output channel in the output waveguide array 6).
In a common solution, a large-area temperature control circuit is bonded to the bottom of the chip to ensure that the chip can stably work at a fixed temperature without being affected by external temperature. The other is to compensate the wavelength position drift caused by the external temperature by cutting the slot or filling media with different expansion coefficients. In the embodiment of the present invention, as can be seen from fig. 6, 7-1 is the λ 1 optical path output at an ambient temperature of-20 ℃, 7-2 is the λ 1 optical path output at an ambient temperature of 50 ℃, and 7-3 is the λ 1 optical path output at an ambient temperature of 60 ℃. When the ambient temperature is changed at-20-60 ℃, the position of the output light lambda 1 is moved between 7-1 and 7-3. In the embodiment of the invention, after the wavelength compensation lens 5 is introduced, the output light of 7-1 to 7-3 is converged by the lens surface 5-3 in the wavelength compensation lens 5 and is coupled into the CH2 channel of the output waveguide array 6, so that the light of λ 1 is output through the CH2 channel at different ambient temperatures.
The above description is only for the purpose of illustrating the preferred embodiments of the present invention and is not to be construed as limiting the invention, and any modifications, equivalents and improvements made within the spirit and principle of the present invention are intended to be included within the scope of the present invention.
Claims (10)
1. An athermal AWG device, comprising an input waveguide (1), an input coupler (2), a transmission waveguide array (3), an output coupler (4), a wavelength compensation lens (5), and an output waveguide array (6) sequentially coupled to each other, in particular:
the input light is subjected to wavelength division demultiplexing and is emitted from an output curved surface (4-1) of the output coupler (4), and then enters a light inlet surface (5-1) of the wavelength compensation lens (5);
a preset number of lens curved surface arrays are arranged on the light emitting surface (5-2) of the wavelength compensation lens (5); under the condition that light paths of light with the same wavelength deviate at different temperatures, the light still irradiates the same lens curved surface on the light emitting surface (5-2) of the wavelength compensation lens (5) to be converged and then is emitted to a specified output waveguide in the corresponding output waveguide array (6).
2. The athermal AWG device of claim 1, wherein the curved output surface (4-1) of the output coupler (4) and the entrance surface (5-1) of the wavelength compensation lens (5) are parallel and the gap is less than a predetermined threshold.
3. The athermal AWG device of claim 2, wherein the predetermined threshold is 20+5um。
4. The athermal AWG device of claim 1, wherein the optical path and the curved output surface remain perpendicular when light exits the curved output surface (4-1) of the output coupler (4).
5. The athermal AWG device of claim 1, wherein the wavelength compensation lens (5) is made of the same material as the waveguide core material of the transmission waveguide array (3).
6. The athermal AWG device of claim 5, wherein the material comprises:
doped silicon dioxide, silicon nitride or a polymeric material.
7. A design method of athermal AWG is characterized in that AWG is built according to the sequence of an input waveguide (1), an input coupler (2), a transmission waveguide array (3) and an output coupler (4), and the method comprises the following steps:
inputting a test optical signal into an input waveguide (1), wherein the test optical signal is formed by combining a preset number of wavelengths;
adjusting the AWG to work in one or more corresponding temperatures according to one or more preset temperatures, and respectively collecting photon signals of output ports of the output coupler (4);
according to the position switching of the optical signals of the output ports of the output coupler (4) at each temperature, the size and the distribution position of the lens curved surface in the lens curved surface array on the light-emitting surface (5-2) in the wavelength compensation lens (5) are determined, so that the same photon signals with the position switching at different temperatures can be irradiated to the same lens curved surface on the light-emitting surface (5-2).
8. The method of designing athermal AWGs, according to claim 7, wherein after fabrication of the corresponding wavelength compensation lens (5), the method further comprises:
an output curved surface (4-1) of the output coupler is parallel to a light inlet surface (5-1) of the wavelength compensation lens, and the gap is smaller than a preset threshold value;
and output waveguides are arranged in the light-emitting surface (5-2) of the wavelength compensation lens (5) corresponding to the curved surface of the lens, and the output waveguides jointly form an output waveguide array (6).
9. The method of designing an athermal AWG according to claim 7, wherein the determining the size and the distribution position of the lens curves in the lens curve array on the light exit surface (5-2) in the wavelength compensation lens (5) comprises:
the method comprises the steps of determining the size and the distribution position of a lens curved surface in a lens curved surface array on a light-emitting surface (5-2) in a wavelength compensation lens (5), and designing the length of the wavelength compensation lens (5) according to the size and the distribution position of the lens curved surface, so that the light-emitting surface (5-2) of the wavelength compensation lens (5) can accommodate all lens curved surfaces.
10. The design method of athermal AWG of claim 7, wherein the wavelength compensation lens (5) is made of the same material as the waveguide core layer.
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