CN113447485A - Optical detection method - Google Patents
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- CN113447485A CN113447485A CN202010223303.5A CN202010223303A CN113447485A CN 113447485 A CN113447485 A CN 113447485A CN 202010223303 A CN202010223303 A CN 202010223303A CN 113447485 A CN113447485 A CN 113447485A
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- 230000003287 optical effect Effects 0.000 title claims abstract description 35
- 238000001514 detection method Methods 0.000 title claims description 25
- 238000005286 illumination Methods 0.000 claims abstract description 63
- 230000007547 defect Effects 0.000 claims abstract description 25
- 238000000034 method Methods 0.000 claims abstract description 18
- 238000007689 inspection Methods 0.000 claims abstract description 17
- 230000002194 synthesizing effect Effects 0.000 claims abstract description 3
- 239000013598 vector Substances 0.000 claims description 9
- 239000011521 glass Substances 0.000 claims description 5
- 239000000919 ceramic Substances 0.000 claims description 3
- 239000002184 metal Substances 0.000 claims description 3
- 239000002245 particle Substances 0.000 abstract description 11
- 239000000428 dust Substances 0.000 description 2
- 239000000284 extract Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 230000001681 protective effect Effects 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000002708 enhancing effect Effects 0.000 description 1
- 230000003203 everyday effect Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8806—Specially adapted optical and illumination features
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8806—Specially adapted optical and illumination features
- G01N2021/8822—Dark field detection
- G01N2021/8825—Separate detection of dark field and bright field
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
- G01N2021/8887—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges based on image processing techniques
Abstract
An optical inspection method comprising: respectively projecting bright field illumination and dark field illumination on the surface of the object to be measured at different time points by two light sources; capturing images of the surface of the object to be detected through an image capturing unit so as to respectively obtain corresponding bright field images and dark field images; synthesizing the bright-field image and the dark-field image into a combined image according to a formula W1P 1+ W2P 2-P3 by a processing unit, wherein W1 and W2 are a bright-field weight and a dark-field weight respectively, and P1, P2 and P3 are pixel values of the bright-field image, the dark-field image and the combined image at the same position respectively; performing image identification on the combined image through the processing unit to judge whether the object to be detected has defects; thereby, it is possible to prevent the particles on the surface from being erroneously determined as flaws in the surface.
Description
Technical Field
The present invention relates to a detection method, and more particularly, to an optical detection method for avoiding misjudging particles on a surface.
Background
An Automatic Optical Inspection (AOI) method is applied to a manufacturing process of an object to be tested, such as a protective glass of a smart phone, to detect whether there is a defect in the object to be tested. The automatic optical detection method is implemented by a processing unit, an image capturing unit and a light source. The processing unit controls the light source to project light to the object to be tested, controls the image capturing unit to capture an image containing the object to be tested, and further performs image recognition on the image so as to judge the object to be tested as a defective product when the defect is judged to exist in the object to be tested. However, the existing automatic optical inspection method often determines the particles on the surface of the object to be inspected, such as dust, as flaws in the object to be inspected, which results in erroneous determination. That is, particles on the surface of the object can be removed by the subsequent cleaning step, and should not be determined as a defect in the object, and thus it is a problem to be solved.
Disclosure of Invention
The object of the present invention is to provide an optical detection method that avoids misjudging particles on a surface.
Thus, the present invention provides an optical inspection method, which is suitable for an object to be inspected, an image capturing unit, two light sources, and a processing unit, wherein the object to be inspected comprises a planar surface, and the method comprises the following steps: the optical detection method comprises steps (a) to (d).
In step (a), two kinds of light field illumination are respectively projected on the surface of the object to be measured through the light source at different time points, wherein the light field illumination is bright field illumination and dark field illumination respectively.
In step (b), capturing images of the surface of the object to be measured by the image capturing unit under the bright field illumination and the dark field illumination respectively, so as to obtain a bright field image and a dark field image respectively.
In step (c), the processing unit synthesizes the bright-field image and the dark-field image into a combined image according to a formula W1 × P1+ W2 × P2 — P3, where W1 and W2 are a bright-field weight and a dark-field weight, respectively, both of which are greater than 0 and less than 1, and P1, P2, and P3 are pixel values of the bright-field image, the dark-field image, and the combined image at the same position, respectively.
And (d) performing image identification on the combined image through the processing unit to judge whether the object to be detected has defects.
In some implementation forms, the two light sources are a bright field light source corresponding to the bright field illumination and a dark field light source corresponding to the dark field illumination, respectively, in step (a), an included angle between a shooting direction of the image capturing unit and a normal vector of the surface of the object to be measured is a shooting included angle, an included angle between an irradiation direction of the bright field light source and the normal vector of the surface of the object to be measured is a bright field included angle, an included angle between an irradiation direction of the dark field light source and the normal vector of the surface of the object to be measured is a dark field included angle, the shooting included angle is greater than zero, and the dark field included angle is greater than the bright field included angle.
In some embodiments, the photographing angle is equal to 10 degrees, the bright field angle is equal to 10 degrees, the dark field angle is equal to 45 degrees, an angle between the photographing direction of the image capturing unit and the illuminating direction of the bright field light source is equal to 20 degrees, and an angle between the photographing direction of the image capturing unit and the illuminating direction of the dark field light source is equal to 55 degrees.
In other aspects, wherein in step (c), the dark field weight is less than the bright field weight.
In some aspects, wherein in step (c), the dark field weight is equal to 0.2 and the bright field weight is equal to 0.8.
In other embodiments, in step (c), the pixel value is a gray-scale luminance value of the pixel.
In other embodiments, the surface of the object can reflect light, and the object is made of glass, metal, or ceramic.
Therefore, the present invention provides another optical inspection method, which is suitable for inspecting whether an object to be inspected has defects, and is characterized in that: the optical detection method comprises steps (a) to (d).
In the step (a), two kinds of light field illumination are respectively projected to the surface of the object to be measured through different light sources, wherein the light field illumination is bright field illumination and dark field illumination respectively.
In step (b), capturing images of the surface of the object to be measured by a camera under the bright field illumination and the dark field illumination respectively to obtain a bright field image and a dark field image respectively.
In step (c), the bright field image and the dark field image are combined into a combined image by taking different weights respectively.
And (d) performing image identification on the combined image to judge whether the object to be detected has defects.
Therefore, the present invention provides another optical inspection method, which is suitable for inspecting whether an object to be inspected has defects, and is characterized in that: the optical detection method comprises steps (a) to (d).
In the step (a), two light field illuminations are respectively projected on the surface of the object to be measured by the light source at different shooting included angles, wherein the light field illuminations are bright field illuminations and dark field illuminations.
In step (b), capturing images of the surface of the object to be measured by a camera under the bright field illumination and the dark field illumination respectively to obtain a bright field image and a dark field image respectively.
In step (c), the bright field image and the dark field image are combined into a combined image by taking different weights respectively.
And (d) performing image identification on the combined image to judge whether the object to be detected has defects.
Therefore, the present invention provides another optical inspection method, which is suitable for inspecting whether an object to be inspected has defects, and is characterized in that: the optical detection method comprises steps (a) to (d).
In the step (a), two kinds of light field illumination are respectively projected on the surface of the object to be detected through a light source, wherein the light field illumination is bright field illumination and dark field illumination.
In step (b), capturing images of the surface of the object to be measured by a camera under the bright field illumination and the dark field illumination respectively to obtain a bright field image and a dark field image respectively.
In step (c), different weights are respectively taken for the bright field image and the dark field image to synthesize a combined image, and the weight taken for the dark field image is smaller than the weight taken for the bright field image.
And (d) performing image identification on the combined image to judge whether the object to be detected has defects.
The invention has the beneficial effects that: and synthesizing the combined image by the processing unit according to the formula W1P 1+ W2P 2P 3, so that when the processing unit identifies the combined image, the particles on the surface of the object to be detected cannot be misjudged, and the problem in the prior art is solved.
Drawings
FIG. 1 is a schematic view illustrating a detection system and an object to be detected to which the optical detection method of the present invention is applied;
FIG. 2 is a flow chart illustrating one embodiment of the optical detection method of the present invention;
FIG. 3 is a schematic view for assisting FIG. 1 in illustrating an aspect of a dark field light source of the embodiment; and
fig. 4 is a schematic diagram, which is an auxiliary view of fig. 1 illustrating a bright-field light source of this embodiment.
Detailed Description
The present invention will be described in detail below with reference to the accompanying drawings and examples.
Before the present invention is described in detail, it should be noted that like elements are represented by like numerals throughout the following description.
Referring to fig. 1 and 2, an embodiment of the optical detection method of the present invention is suitable for a detection system and an object 9 to be detected. The inspection system comprises an image capturing unit 2, a bright field light source 31, a dark field light source 32, a processing unit 1, a carrying platform 81, and a track 82. The device under test 9 includes a planar surface 91, the surface 91 is capable of reflecting light, in this embodiment, the device under test 9 is, for example, a protective glass of a smart phone, that is, the material of the device under test 9 is glass, and in other embodiments, the material of the device under test 9 may also be metal or ceramic.
The inspection system is used to inspect each DUT 9 for defects during the manufacturing process. The processing unit 1 is, for example, a computer host or an arithmetic device (such as a processor or a microcontroller), and is electrically connected to the two light sources to control whether the two light sources project light, and is also electrically connected to the image capturing unit 2 to control whether the image is captured. The carrying platform 81 is used for placing the object 9 to be tested and moves on the track 82 from left to right, for example. In the embodiment, the image capturing unit 2 is a line-scan camera (Multi-line camera), and when the carrying platform 81 carries the object 9 to be measured and moves from left to right, one-line images of the surface 91 of the object 9 are captured successively and combined to form a complete image of the surface 91 of the object 9. In other embodiments, the image capturing unit 2 may be a surface scanning camera, such as a general camera.
The optical detection method includes steps S1-S4.
In step S1, the processing unit 1 controls the bright field light source 31 and the dark field light source 32 to project a bright field illumination and a dark field illumination onto the surface 91 of the object 9 at different time points. In more detail, an included angle between a shooting direction of the image capturing unit 2 and a normal vector of the surface 91 of the object 9 is a shooting included angle a 1. An included angle between an irradiation direction of the bright-field light source 31 and a normal vector of the surface 91 of the object 9 to be measured is a bright-field included angle B1. An included angle between an illumination direction of dark field light source 32 and a normal vector of surface 91 of object to be measured 9 is a dark field included angle B2. The shooting angle a1 is greater than zero, the dark field angle B2 is greater than the bright field angle B1, and the angle between the shooting direction of the image capturing unit 2 and the illumination direction of the bright field light source 31 is equal to the shooting angle a1 plus the bright field angle B1.
In the present embodiment, the capturing angle a1 is equal to 10 degrees, the bright field angle B1 is equal to 10 degrees, the dark field angle B2 is equal to 45 degrees, the capturing direction of the image capturing unit 2 and the illuminating direction of the bright field light source 31 are equal to 20 degrees, and the capturing direction of the image capturing unit 2 and the illuminating direction of the dark field light source 32 are equal to 55 degrees. In addition, in the present embodiment, the inspection system includes two light sources, i.e. the bright field light source 31 and the dark field light source 32, but in other embodiments, the inspection system may include only one light source, and the position of the single light source is moved to generate the bright field illumination and the dark field illumination.
Brightfield lighting refers to a type of Partial bright field lighting, or Directional lighting, and is one of the most commonly used visual lighting techniques, and is the most familiar and used everyday lighting, including daylight. This type of illumination differs from Full bright field lighting in that it is directional, typically emanating from a point source, and, due to its directional nature, is an ideal choice for generating contrast and enhancing topographical details. Dark field lighting (Dark field lighting) is a lighting system that illuminates light incident on the surface of an object at small angles that are reflected from imperfections in the surface of the object and nearby objects, such as automobile headlights.
Referring to fig. 3 and 4, fig. 3 and 4 illustrate two modes of the dark field light source 32 and the bright field light source 31 illuminating the object 9, respectively, wherein the object 9 includes a defect 92, such as a crack, and a particle 93, such as dust, is also on the surface 91 of the object 9. When dark field light source 32 and bright field light source 31 illuminate particle 93 and defect 92, respectively, a shadow 96 is formed on surface 91 by partial region 95 of particle 93, and shadow 94 is formed on surface 91 by defect 92.
In step S2, the processing unit 1 controls the image capturing unit 2 to capture an image of the surface 91 of the object 9 under bright field illumination and dark field illumination respectively, so as to obtain a bright field image and a dark field image respectively. The following are to be added: in the present embodiment, since the image capturing unit 2 is a line scanning camera, the processing unit 1 controls the dark field light source 32 to emit light and controls the bright field light source 31 not to emit light, and controls the image capturing unit 2 to capture an odd-numbered line image at the same time, then controls the bright field light source 31 to emit light and controls the dark field light source 32 not to emit light, and controls the image capturing unit 2 to capture an even-numbered line image at the same time, so as to alternately control in turn to obtain a captured image including a plurality of odd-numbered line images and a plurality of even-numbered line images. The processing unit 1 extracts and combines all the odd-numbered line images of the captured images into a dark-field image, and extracts and combines all the even-numbered line images of the captured images into a bright-field image.
In step S3, the processing unit 1 synthesizes the bright-field image and the dark-field image into a combined image according to the formula W1 × P1+ W2 × P2 — P3, where W1 and W2 are a bright-field weight and a dark-field weight, respectively. The bright field weight and the dark field weight are both greater than 0 and less than 1, and the dark field weight is less than the bright field weight. P1, P2, and P3 are the pixel values of the bright field image, the dark field image, and the combined image at the same position, respectively, i.e. the gray scale luminance values of the pixels at the same position. In the present embodiment, the dark field weight is equal to 0.2 and the bright field weight is equal to 0.8, but in other embodiments, the disclosure is not limited thereto.
In step S4, the processing unit 1 performs image recognition on the combined image to determine whether there is a defect in the object 9. For example, the image recognition technique adopted by the processing unit 1 for the combined image is the same as the prior art, but since the combined image is synthesized by the bright-field image and the dark-field image through the bright-field weight and the dark-field weight, the same image recognition technique can obtain the correct determination result, i.e., the correct determination of the existence of the defect in the object 9 and the neglect of the existence of the particles on the surface 91 of the object 9. In addition, it is to be specifically noted that: the surface 91 of the object 9 may be formed with holes, such as through holes corresponding to the positions of the receiver of the smart phone, and the through holes can still be correctly image-recognized by the processing unit 1 in the combined image.
In summary, the bright field light source 31 and the dark field light source 32 illuminate at different time points, so that the image capturing unit 2 obtains the corresponding bright field image and dark field image, and then the processing unit 1 synthesizes a combined image according to the formula W1 × P1+ W2 × P2 — P3, so that when the combined image is subjected to image recognition, the particles on the surface 91 of the object 9 are not erroneously determined as defects in the object 9, and therefore the object of the present invention can be achieved.
However, the above description is only an example of the present invention, and the scope of the present invention should not be limited thereby, and all the simple equivalent changes and modifications made according to the contents of the claims and the patent specification of the present invention are still within the scope covered by the present invention.
Claims (10)
1. An optical detection method is suitable for an object to be detected, an image acquisition unit, two light sources and a processing unit, wherein the object to be detected comprises a planar surface, and the optical detection method is characterized in that: the optical detection method comprises the following steps:
(a) projecting two kinds of light field illumination on the surface of the object to be measured respectively at different time points through the light source, wherein the light field illumination is bright field illumination and dark field illumination respectively;
(b) capturing images of the surface of the object to be measured by the image capturing unit under the conditions of the bright field illumination and the dark field illumination respectively so as to obtain a bright field image and a dark field image respectively;
(c) synthesizing the bright-field image and the dark-field image into a combined image according to a formula W1P 1+ W2P 2-P3 by the processing unit, wherein W1 and W2 are a bright-field weight and a dark-field weight respectively, the bright-field weight and the dark-field weight are both greater than 0 and less than 1, and P1, P2 and P3 are pixel values of the bright-field image, the dark-field image and the combined image at the same position respectively; and
(d) and performing image identification on the combined image through the processing unit to judge whether the object to be detected has defects.
2. The optical inspection method according to claim 1, wherein the two light sources are a bright-field light source corresponding to the bright-field illumination and a dark-field light source corresponding to the dark-field illumination, respectively, and the method further comprises: in step (a), an included angle between a shooting direction of the image capturing unit and a normal vector of the surface of the object to be detected is a shooting included angle, an irradiation direction of the bright field light source and the included angle between the normal vectors of the surface of the object to be detected are bright field included angles, an irradiation direction of the dark field light source and the included angle between the normal vectors of the surface of the object to be detected are dark field included angles, the shooting included angle is larger than zero, the dark field included angle is larger than the bright field included angle, and the included angle between the shooting direction of the image capturing unit and the irradiation direction of the bright field light source is equal to the shooting included angle plus the bright field included angle.
3. The optical inspection method of claim 2, wherein: the shooting included angle equals 10 degrees, the bright field included angle equals 10 degrees, the dark field included angle equals 45 degrees, just the image acquisition unit the shooting direction with the bright field light source shine the included angle between the direction and equals 20 degrees, the image acquisition unit the shooting direction with the dark field light source shine the included angle between the direction and equals 55 degrees.
4. The optical inspection method of claim 2, wherein: in step (c), the dark field weight is less than the bright field weight.
5. The optical inspection method of claim 4, wherein: in step (c), the dark-field weight is equal to 0.2 and the bright-field weight is equal to 0.8.
6. The optical inspection method of claim 1, wherein: in step (c), the pixel value is a gray-scale luminance value of the pixel.
7. The optical inspection method of claim 1, wherein: the surface of the object to be measured can reflect light, and the object to be measured is made of glass, metal or ceramic.
8. An optical detection method is suitable for detecting whether an object to be detected has defects, and is characterized in that: the optical detection method comprises the following steps:
(a) projecting two kinds of light field illumination on the surface of the object to be measured through different light sources respectively, wherein the light field illumination is bright field illumination and dark field illumination respectively;
(b) capturing images of the surface of the object to be measured by a camera under the conditions of the bright field illumination and the dark field illumination respectively so as to obtain a bright field image and a dark field image respectively;
(c) respectively taking different weights for the bright field image and the dark field image to synthesize a combined image; and
(d) and performing image identification on the combined image to judge whether the object to be detected has defects.
9. An optical detection method is suitable for detecting whether an object to be detected has defects, and is characterized in that: the optical detection method comprises the following steps:
(a) projecting two kinds of light field illumination respectively by different shooting included angles on the surface of the object to be measured through a light source, wherein the light field illumination is bright field illumination and dark field illumination respectively;
(b) capturing images of the surface of the object to be measured by a camera under the conditions of the bright field illumination and the dark field illumination respectively so as to obtain a bright field image and a dark field image respectively;
(c) respectively taking different weights for the bright field image and the dark field image to synthesize a combined image; and
(d) and performing image identification on the combined image to judge whether the object to be detected has defects.
10. An optical detection method is suitable for detecting whether an object to be detected has defects, and is characterized in that: the optical detection method comprises the following steps:
(a) projecting two kinds of light field illumination on the surface of the object to be measured through a light source respectively, wherein the light field illumination is bright field illumination and dark field illumination respectively;
(b) capturing images of the surface of the object to be measured by a camera under the conditions of the bright field illumination and the dark field illumination respectively so as to obtain a bright field image and a dark field image respectively;
(c) respectively taking different weights for the bright field image and the dark field image to synthesize a combined image, wherein the weight taken by the dark field image is smaller than the weight taken by the bright field image; and
(d) and performing image identification on the combined image to judge whether the object to be detected has defects.
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