CN113443820A - Material rack, reaction kettle and device for quartz glass hydrogen permeation process - Google Patents
Material rack, reaction kettle and device for quartz glass hydrogen permeation process Download PDFInfo
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- CN113443820A CN113443820A CN202110752142.3A CN202110752142A CN113443820A CN 113443820 A CN113443820 A CN 113443820A CN 202110752142 A CN202110752142 A CN 202110752142A CN 113443820 A CN113443820 A CN 113443820A
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B20/00—Processes specially adapted for the production of quartz or fused silica articles, not otherwise provided for
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C23/00—Other surface treatment of glass not in the form of fibres or filaments
- C03C23/0095—Solution impregnating; Solution doping; Molecular stuffing, e.g. of porous glass
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Abstract
The invention provides a material rack, a reaction kettle and a device for a quartz glass hydrogen permeation process, and relates to the field of production of photoetching-level fused quartz glass materials. The material rack comprises a cylindrical shell, wherein a supporting piece of a rod-shaped structure connected with the shell is arranged in the shell, and a plurality of air inlets are uniformly distributed in the shell; the reaction kettle comprises a closed containing cavity, wherein a heating component for heating is arranged in the closed containing cavity, and a material rack is arranged in the closed containing cavity; the device comprises a reaction kettle, a vacuum system for vacuumizing the reaction kettle, an inflation system for inflating nitrogen or hydrogen into the reaction kettle, and a hydrogen combustion system for discharging and combusting the hydrogen in the reaction kettle, wherein the quartz glass finishes a hydrogen infiltration process on a support piece.
Description
Technical Field
The invention relates to the field of production of photoetching-grade fused quartz glass materials, in particular to a material rack, a reaction kettle and a device for a quartz glass hydrogen permeation process.
Background
With the rapid development of the microelectronics industry, modern semiconductor integrated circuits tend to have very high integration densities. With this trend, photolithography processes used to manufacture semiconductor devices use exposure energy sources of shorter wavelengths. The exposure optical system is an important component of the photoetching machine, a large number of deep ultraviolet optical elements are used in the exposure system, and fused quartz glass is used in the deep ultraviolet photoetching system due to the advantages of high transmittance, weak birefringence effect, good physical and chemical stability and the like in a deep ultraviolet waveband. In accordance with the progress toward energy sources of shorter glass and toward lenses of higher NA, optical parts of synthetic quartz glass in exposure tools such as lenses, windows, prisms, and photomasks are required to have higher precision, and in particular, synthetic quartz glass for photomasks used for the main purpose having ArF excimer lasers must satisfy a number of conditions including high and uniform ultraviolet transmittance, sustainability and uniformity of transmittance during long-term irradiation of excimer laser, and the like.
When synthetic quartz glass is irradiated with excimer laser light for a long time, the material generates one absorption band centered at a wavelength of 214nm and another absorption band centered at a wavelength of 260nm, resulting in a decrease in transmittance. In synthetic quartz glass, hydrogen molecules play a role in repairing such defects. In order to exert a significant repairing effect, the concentration of hydrogen molecules must exceed a certain range, and therefore, it is necessary to raise the concentration of hydrogen molecules in the synthetic quartz glass and to adjust the concentration to be uniform. Such defects can be repaired by a hydrogen permeation treatment by placing the glass in a heating furnace having a hydrogen atmosphere and standing for a long time in a high temperature (400-.
At present, the hydrogen permeation treatment of quartz glass mainly has the following two technical problems:
the hydrogen concentration of different positions on the surface of the quartz glass is uneven: the bottom surface of the quartz glass is in contact with the carrying surface, so that the concentration of the top surface of the quartz glass is obviously higher than that of the bottom surface, and the non-uniform hydrogen concentration can induce micro-cracks of the glass to appear, so that the extreme reduction of the transmissivity is caused, and the problem of exposure performance is caused.
Hydrogen gas at high temperature and high pressure has a certain risk: the hydrogen belongs to flammable and explosive gas, and in the quartz glass hydrogen permeation process, the hydrogen can be subjected to catastrophic explosion at high temperature and high pressure.
Disclosure of Invention
The invention aims to develop a material rack, a reaction kettle and a device for a quartz glass hydrogen permeation process, which are used for increasing the uniformity of the integral hydrogenation effect of quartz glass.
The invention is realized by the following technical scheme:
a work or material rest for quartz glass hydrogen permeation technology includes:
the shell is cylindrical;
the air inlets are uniformly distributed on the shell;
the supporting piece is of a rod-shaped structure and is arranged in the shell;
wherein the support is connected with the housing, and quartz glass is placed on the support.
Optionally, the material rack further comprises a reinforcing rib, and the reinforcing rib is arranged on the shell to reinforce the structural strength and the structural stability of the shell.
Optionally, the supporting member is connected with the reinforcing rib, and the reinforcing rib provides a stress point for the supporting member for load reuse.
Optionally, the support member comprises at least two support rods, and the ends of the support rods are connected with the reinforcing ribs.
Optionally, the reinforcing rib is provided with a plurality of supporting holes matched with the supporting rod, and the end part of the supporting rod is inserted into the supporting holes to realize detachable connection of the supporting piece and the reinforcing rib.
A reaction kettle for quartz glass hydrogen infiltration process comprises:
sealing the cavity;
the heating component is arranged in the closed cavity and used for heating;
and a material rest for a quartz glass hydrogen permeation process is arranged in the closed cavity, and the quartz glass is subjected to the hydrogen permeation process on the material rest.
Optionally, the closed cavity comprises a furnace body and a furnace cover covering the furnace body, staggered tooth flanges which are matched with each other are correspondingly arranged at the covering positions of the furnace cover and the furnace body, staggered teeth which are circularly arranged are respectively arranged on the staggered tooth flanges, and the staggered teeth on the staggered tooth flanges are arranged in a staggered manner.
Optionally, the reaction kettle further comprises a locking ring for locking the two staggered-tooth flanges, and the locking ring is controlled to be opened, closed and loosened by hydraulic pressure.
An apparatus for use in a quartz glass hydriding process, comprising:
a reaction kettle for a quartz glass hydrogen permeation process;
the vacuum system is used for vacuumizing the reaction kettle;
the gas charging system is used for charging nitrogen or hydrogen into the reaction kettle;
the hydrogen combustion system is used for discharging and combusting hydrogen in the reaction kettle;
wherein, the quartz glass completes the hydrogen permeation process in the material rack in the reaction kettle.
Optionally, the hydrogen combustion system comprises:
the pressure monitor is arranged in the closed containing cavity;
the hydrogen discharge pipeline is communicated with the closed cavity;
the air release valve is arranged on the hydrogen exhaust pipeline;
the hydrogen detector is arranged on the hydrogen discharge pipeline;
the igniter is arranged on the hydrogen discharge pipeline;
the pressure monitor is matched with the air release valve, hydrogen is discharged when the pressure of hydrogen in the closed accommodating cavity is too high, the hydrogen detector is matched with the igniter, and the igniter ignites to ignite the hydrogen when the hydrogen is in the hydrogen discharge pipeline.
The invention has the beneficial effects that:
the shell of the material rack is cylindrical, the air inlets are uniformly distributed in the shell, hydrogen entering the material rack is uniformly distributed in the material rack, the support frame is rod-shaped, the hydrogen concentration of the bottom surface and the hydrogen concentration of the top surface of the quartz glass are uniform, and the quartz glass is arranged in layers by arranging the support frame vertically in the shell, so that the uniformity of the integral hydrogenation effect of the quartz glass is improved. The furnace body and the furnace cover are connected by adopting a staggered-tooth flange, and the staggered-tooth flange is locked by a locking ring under hydraulic control, so that the sealed containing cavity is ensured to be locked safely, and the operation is convenient and fast while the safety is high; the hydrogen combustion system can discharge and combust excessive hydrogen with overpressure in the closed cavity and hydrogen left after the hydrogen infiltration process is finished, thereby improving the safety of the device in operation.
Drawings
In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present application, and for those skilled in the art, other drawings can be obtained according to the drawings without creative efforts.
FIG. 1 is a block diagram of the present invention;
FIG. 2 is a view of the structure of the rack;
FIG. 3 is a view of the structure of the housing;
FIG. 4 is a block diagram of a hydrogen combustion system;
FIG. 5 is a structure diagram of a furnace cover and a staggered tooth flange on the furnace body.
Detailed Description
In the following, only certain exemplary embodiments are briefly described. As those skilled in the art can appreciate, the described embodiments may be modified in various different ways, without departing from the spirit or scope of the invention. Accordingly, the drawings and description are to be regarded as illustrative in nature, and not as restrictive.
In the description of the present invention, it is to be understood that the terms "central," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," "counterclockwise," "axial," "radial," "circumferential," and the like are used in the orientations and positional relationships indicated in the drawings for convenience in describing the present invention, and are not intended to indicate or imply that the referenced devices or elements must have a particular orientation, be constructed and operated in a particular orientation, and are therefore not to be considered limiting of the present invention.
Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the invention "a plurality" means two or more unless specifically limited otherwise.
In the present invention, unless otherwise specifically stated or limited, the terms "mounted," "connected," and "fixed" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral part; the connection can be mechanical connection, electrical connection or communication; either directly or indirectly through intervening media, either internally or in any other relationship. The specific meaning of the above terms in the creation of the present invention can be understood according to specific situations by those of ordinary skill in the art.
Embodiments of the present invention will be described in detail below with reference to the accompanying drawings.
As shown in fig. 1 to 5, the invention discloses a material rack, a reaction kettle and a device for a quartz glass hydrogen infiltration process, which comprise a closed cavity, a vacuum system 5, an inflation system 6, a hydrogen combustion system 8, a water cooling system 9 and an electric control system 11. The closed cavity is used for accommodating quartz glass and providing a high-temperature closed environment for the quartz glass; the vacuum system 5 is used for vacuumizing the closed cavity; the gas charging system 6 is used for charging nitrogen or hydrogen into the closed cavity; the hydrogen combustion system 8 is used for discharging and combusting redundant hydrogen in the closed cavity; the water cooling system 9 takes away heat borne by metal components in high-temperature areas such as the shell of the closed cavity, the electrode and the like; the electronic control system 11 controls the operation of the device according to the set parameters.
The closed cavity comprises a furnace body 1, the furnace body 1 is of a vertical double-layer water cooling structure, and cooling water is introduced into an interlayer between the inner layer and the outer layer. The lower part of the furnace body 1 is charged and discharged, the lower part of the furnace body 1 is correspondingly provided with a furnace cover 7 which can be covered at the bottom of the furnace body 1, and staggered-tooth flanges which are matched with each other are correspondingly arranged on the furnace cover 7 and the covered part at the bottom of the furnace body 1. One of the staggered-tooth flanges can slide into the inner side of the other staggered-tooth flange, a plurality of first staggered teeth 13 which are arranged at equal intervals are arranged on the outer circumference of the staggered-tooth flange positioned on the inner side, a plurality of second staggered teeth 14 which are arranged at equal intervals are arranged on the inner circumference of the staggered-tooth flange positioned on the outer side, the second staggered teeth 14 and the first staggered teeth 13 are arranged in a staggered manner, and after the two staggered-tooth flanges are connected, the first staggered teeth 13 slide into the space between two adjacent second staggered teeth 14. The lower part of the furnace cover 7 is provided with a screw rod rotating and lifting mechanism 12 for driving the furnace cover to lift, the lower part of the furnace body 1 is also provided with a locking ring sleeved outside the two staggered tooth flanges, and the locking ring is controlled to open, close and tighten by hydraulic pressure.
The screw rod rotating and lifting mechanism 12 drives the furnace cover 7 to enable the staggered-tooth flange of the furnace cover 7 and the staggered-tooth flange of the furnace body 1 to be aligned and screwed, and the locking ring enables the two staggered-tooth flanges to be locked through hydraulic control. The furnace body 1 and the furnace cover 7 are connected by adopting staggered-tooth flanges, and the staggered-tooth flanges are locked by a locking ring controlled by hydraulic pressure, so that the safety locking of the closed containing cavity is ensured, and the operation is convenient and fast while the safety is high.
The furnace body 1 is internally provided with a material rack body 10, the material rack body 10 comprises a cylindrical shell 101, and a plurality of air inlets 104 are uniformly distributed on the shell 101. At least three reinforcing ribs 102 are arranged on the shell 101, the reinforcing ribs 102 are vertically arranged, and the plurality of reinforcing ribs 102 are uniformly arranged around the axis of the shell 101 at equal intervals. The reinforcing rib 102 is provided with a plurality of support holes 103, and the plurality of support holes 103 are provided at equal intervals in the longitudinal direction of the reinforcing rib 102.
A supporting frame with a rod-shaped structure is arranged in the shell 101, the supporting frame is connected with the reinforcing ribs 102, the quartz glass is placed on the supporting frame, and the contact area between the supporting frame with the rod-shaped structure and the quartz glass is small. The support frame is composed of a plurality of support rods 105 with the same number as the reinforcing ribs 102, one ends of the plurality of support rods 105 are respectively horizontally inserted into the support holes 103 on the plurality of reinforcing ribs 102 at the same horizontal position, and the other ends are positioned on the axis of the casing 101 and are mutually connected.
The reinforcing ribs 102 enhance the structural strength and structural stability of the housing 101 and provide stress points for a support frame for carrying loads. The reinforcing ribs 102 are detachably connected with the supporting frames through the matching of the supporting holes 103 and the ends of the supporting rods 105, so that the arrangement condition of the supporting frames in the shell 101 can be quickly adjusted to change the number of the supporting frames, the relative height between the supporting frames and the like. A plurality of supporting frames can be arranged to realize layered placement of the quartz glass, so that the quartz glass on each layer is uniformly contacted with hydrogen. The housing 101 is cylindrical, and the gas inlet holes 104 formed in the housing 101 are uniformly arranged to uniformly distribute the hydrogen gas introduced into the housing 101.
And the heating component 2 and the temperature measuring component 4 are arranged on the closed cavity, the heating component 2 is used for heating the inside of the closed cavity, and the temperature measuring component 4 is used for monitoring the temperature of the closed cavity.
Heating element 2 is including locating heating element and heat screen 3 in furnace body 1, and heating element encircles the periphery setting of work or material rest body 10 in furnace body 1, and heating element evenly sets up and the segmentation is connected, and heating element adopts high temperature nichrome material. The heat shield 3 is arranged outside the heating element and used for maintaining the uniformity of the temperature field in the furnace body 1 and protecting the external structure of the furnace body 1 from being damaged by high temperature. The heat shield 3 is composed of two layers of molybdenum and four layers of stainless steel.
The temperature measuring component 4 comprises a thermocouple arranged in the furnace body 1, wherein the inner side and the outer side of the heat shield 3 are respectively provided with the thermocouple, and the thermocouple adopts a Pt type or K type thermocouple. The thermocouple monitors the temperature of the furnace body 1, and when the temperature is too high, the electric control system 11 cuts off the power supply of the heating assembly 2 in time, so that the safety of the device is ensured.
The vacuum system 5 comprises two vacuum pumps, a vacuum pipeline is arranged between the vacuum pumps and the furnace body 1, a metal corrugated pipe is adopted at the communication position of the vacuum pipeline and the vacuum pumps, the metal corrugated pipe can effectively block vibration generated by the operation of the vacuum pumps, and a vacuum gauge, a vacuum pressure gauge, a vacuum baffle valve, a vacuum filter and the like are further arranged on the vacuum pipeline. The vacuum measurement adopts a composite vacuum gauge, and the vacuum pump is a roots pump and a slide valve pump.
The inflation system 6 comprises a plurality of high-pressure hydrogen gas storage bottles and a plurality of high-pressure nitrogen gas storage bottles, and the hydrogen supercharger carries out secondary pressurization on hydrogen and then stores the high-pressure hydrogen in the high-pressure hydrogen gas storage bottles. The high-pressure hydrogen gas storage cylinder and the high-pressure nitrogen gas storage cylinder are communicated with the furnace body 1 through pipelines, and corresponding valves are correspondingly arranged on the pipelines. A hydrogen detector 84 is arranged in a gas holder for placing the high-pressure hydrogen storage bottle, the hydrogen detector 84 is connected with the electric control system 11 through a line, and hydrogen leakage is prevented through the hydrogen detector 84.
Before the hydrogen is filled into the furnace body 1, the nitrogen is filled into the furnace body 1 to be emptied and discharged. After the hydrogen permeation process is finished, the nitrogen is filled into the furnace body 1 to realize hydrogen discharge so that the glass can be safely rotated out of the furnace body 1.
The hydrogen combustion system 8 includes a pressure monitor 81 provided in the furnace body 1, and the pressure monitor 81 is used for monitoring the pressure of hydrogen in the furnace body 1. The furnace body 1 is provided with a hydrogen discharge pipeline, the hydrogen discharge pipeline is sequentially provided with a vent valve 82, an anti-backfire valve 83, a hydrogen detector 84 and an igniter 85, and the igniter 85 is a double-ignition system.
The air release valve 82 is matched with the pressure monitor 81, and when the pressure monitor 81 monitors that the pressure of the hydrogen in the furnace body 1 is overhigh, the air release valve 82 acts to discharge redundant hydrogen through the hydrogen discharge pipeline. The hydrogen detector 84 is matched with the igniter 85, and after the hydrogen detector 84 on the hydrogen exhaust pipeline detects hydrogen, the igniter 85 acts to ignite the hydrogen output from the tail end of the hydrogen exhaust pipeline so as to combust the hydrogen. After the hydrogen permeation process is finished, the equipment starts to automatically control and cool, and when the temperature is reduced to 80 ℃, hydrogen is discharged into the hydrogen discharge pipeline and is ignited by the igniter 85. The hydrogen combustion system 8 discharges redundant hydrogen and residual hydrogen in the closed cavity in time for combustion, and the operation safety of the device is improved.
The water cooling system 9 comprises a cooling water pipeline, a water inlet distributor, a backwater water collector, a water channel filter, a valve, an electric contact pressure gauge, an electric contact water temperature gauge, a flow sensor and the like. The cooling water pipeline conveys cooling water into metal components in the interlayer, the electrode and other high-temperature areas of the furnace body 1, takes away heat, and provides cooling water for the vacuum pump.
The electric control system 11 is used for controlling the work of the electric elements, and the power supply of the electric control system 11 adopts silicon controlled rectifier voltage regulation control.
The shell 101 of the material rack body 10 is cylindrical, the air inlets 104 are uniformly distributed in the shell 101, hydrogen entering the material rack body 10 is uniformly distributed in the material rack body 10, the support frame is rod-shaped, the hydrogen concentration of the bottom surface and the hydrogen concentration of the top surface of quartz glass are uniform, the quartz glass is arranged in the shell 101 in a layered mode, and the uniformity of the integral hydrogenation effect of the quartz glass is improved. The furnace body 1 and the furnace cover 7 are connected by adopting staggered-tooth flanges, and the staggered-tooth flanges are locked by a locking ring controlled by hydraulic pressure, so that the sealed containing cavity is ensured to be locked safely, and the operation is convenient and fast while the safety is high; the hydrogen combustion system 8 can discharge and combust excessive hydrogen with overpressure in the closed cavity and hydrogen left after the hydrogen infiltration process is finished, thereby improving the safety of the device in operation.
The above embodiments are only preferred embodiments of the present invention, and are not intended to limit the technical solutions of the present invention, so long as the technical solutions can be realized on the basis of the above embodiments without creative efforts, which should be considered to fall within the protection scope of the patent of the present invention.
Claims (10)
1. A work or material rest for quartz glass hydrogen permeation technology, characterized by includes:
the shell is cylindrical;
the air inlets are uniformly distributed on the shell;
the supporting piece is of a rod-shaped structure and is arranged in the shell;
wherein the support is connected with the housing, and quartz glass is placed on the support.
2. The stack for a quartz glass hydrogen infiltration process of claim 1, further comprising a stiffener disposed on the housing.
3. The stack for a quartz glass hydriding process of claim 2, wherein the support is coupled to the stiffener.
4. The rack for the quartz glass hydrogen infiltration process of claim 3, wherein the support member comprises at least two support rods, and the end parts of the support rods are connected with the reinforcing ribs.
5. The rack for the hydrogen infiltration process of quartz glass according to claim 4, wherein the reinforcing ribs are provided with a plurality of supporting holes matched with the supporting rods, and the end parts of the supporting rods are inserted into the supporting holes to realize the detachable connection of the supporting pieces and the reinforcing ribs.
6. A reation kettle for quartz glass hydrogen permeation technology, characterized by including:
sealing the cavity;
the heating component is arranged in the closed cavity and used for heating;
the material rack for the quartz glass hydrogen permeation process is characterized in that the material rack for the quartz glass hydrogen permeation process is arranged in the closed cavity, and the material rack is as claimed in any one of claims 1-5.
7. The reaction kettle for the hydrogen infiltration process of quartz glass according to claim 6, wherein the closed cavity comprises a furnace body and a furnace cover covering the furnace body, the furnace cover and the covering part of the furnace body are correspondingly provided with staggered teeth flanges which are mutually matched, the two staggered teeth flanges are respectively provided with staggered teeth which are circularly arranged, and the staggered teeth on the two staggered teeth flanges are arranged in a staggered manner.
8. The reaction kettle for the quartz glass hydrogen permeation process according to claim 7, further comprising a locking ring for locking the two staggered-tooth flanges, wherein the locking ring is opened, closed and loosened under the hydraulic control.
9. The device for quartz glass hydrogen infiltration process is characterized by comprising the following steps:
the reaction kettle for the quartz glass hydrogen infiltration process of claim 6;
the vacuum system is used for vacuumizing the reaction kettle;
the gas charging system is used for charging nitrogen or hydrogen into the reaction kettle;
the hydrogen combustion system is used for discharging and combusting hydrogen in the reaction kettle;
wherein, the quartz glass completes the hydrogen permeation process in the material rack in the reaction kettle.
10. The apparatus for quartz glass hydrogen infiltration process of claim 9, wherein the hydrogen combustion system comprises:
the pressure monitor is arranged in the closed containing cavity;
the hydrogen discharge pipeline is communicated with the closed cavity;
the air release valve is arranged on the hydrogen exhaust pipeline;
the hydrogen detector is arranged on the hydrogen discharge pipeline;
the igniter is arranged on the hydrogen discharge pipeline;
the pressure monitor is matched with the air release valve, hydrogen is discharged when the pressure of hydrogen in the closed accommodating cavity is too high, the hydrogen detector is matched with the igniter, and the igniter ignites to ignite the hydrogen when the hydrogen is in the hydrogen discharge pipeline.
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| Application Number | Priority Date | Filing Date | Title |
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| CN202110752142.3A CN113443820A (en) | 2021-07-03 | 2021-07-03 | Material rack, reaction kettle and device for quartz glass hydrogen permeation process |
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| CN202110752142.3A CN113443820A (en) | 2021-07-03 | 2021-07-03 | Material rack, reaction kettle and device for quartz glass hydrogen permeation process |
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| US20080025886A1 (en) * | 2006-07-28 | 2008-01-31 | Chlorine Engineers Corp., Ltd. | Hydrogen combustion system |
| WO2017059745A1 (en) * | 2015-10-10 | 2017-04-13 | 青岛理工大学 | Large-area micro-nano patterning apparatus and method |
| CN111446190A (en) * | 2020-05-14 | 2020-07-24 | 南京集芯光电技术研究院有限公司 | Oxidizing gas homogenizing cover capable of uniformly feeding air |
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