CN113437169A - Flexible film photovoltaic roll-to-roll CSD spraying coating device - Google Patents
Flexible film photovoltaic roll-to-roll CSD spraying coating device Download PDFInfo
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- CN113437169A CN113437169A CN202110727110.8A CN202110727110A CN113437169A CN 113437169 A CN113437169 A CN 113437169A CN 202110727110 A CN202110727110 A CN 202110727110A CN 113437169 A CN113437169 A CN 113437169A
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- 238000000576 coating method Methods 0.000 title claims abstract description 103
- 239000011248 coating agent Substances 0.000 title claims abstract description 100
- 238000005507 spraying Methods 0.000 title claims abstract description 18
- 239000010409 thin film Substances 0.000 claims abstract description 14
- 238000004804 winding Methods 0.000 claims abstract description 6
- 239000007921 spray Substances 0.000 claims abstract description 5
- 239000000463 material Substances 0.000 claims description 55
- 239000010408 film Substances 0.000 claims description 33
- 238000005406 washing Methods 0.000 claims description 23
- 239000007888 film coating Substances 0.000 claims description 19
- 238000009501 film coating Methods 0.000 claims description 19
- 238000003825 pressing Methods 0.000 claims description 18
- 238000005096 rolling process Methods 0.000 claims description 11
- 238000001035 drying Methods 0.000 claims description 8
- 238000010438 heat treatment Methods 0.000 claims description 3
- 229910001220 stainless steel Inorganic materials 0.000 abstract description 4
- 239000010935 stainless steel Substances 0.000 abstract description 4
- 238000009776 industrial production Methods 0.000 abstract 1
- 239000000758 substrate Substances 0.000 description 12
- 238000000224 chemical solution deposition Methods 0.000 description 8
- 238000004519 manufacturing process Methods 0.000 description 4
- 238000000151 deposition Methods 0.000 description 3
- 230000008021 deposition Effects 0.000 description 3
- 238000000034 method Methods 0.000 description 2
- 241000251468 Actinopterygii Species 0.000 description 1
- 238000005054 agglomeration Methods 0.000 description 1
- 230000002776 aggregation Effects 0.000 description 1
- 239000011247 coating layer Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 230000035484 reaction time Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F19/00—Integrated devices, or assemblies of multiple devices, comprising at least one photovoltaic cell covered by group H10F10/00, e.g. photovoltaic modules
- H10F19/30—Integrated devices, or assemblies of multiple devices, comprising at least one photovoltaic cell covered by group H10F10/00, e.g. photovoltaic modules comprising thin-film photovoltaic cells
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/02—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F71/00—Manufacture or treatment of devices covered by this subclass
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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- Chemical & Material Sciences (AREA)
- Physics & Mathematics (AREA)
- Thermal Sciences (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Spray Control Apparatus (AREA)
Abstract
本发明涉及一种柔性薄膜光伏卷对卷CSD喷淋镀膜装置，解决镀膜溶液在平整输送的不锈钢基底卷材表面容易从两侧流失，导致镀膜不均匀的问题。本装置包括放卷轴、收卷轴以及若干输送辊，放卷轴输出镀膜卷材依次经过各输送辊后至收卷轴收卷，放卷轴之后设置镀膜段，所述镀膜段前端上方设置镀膜溶液喷淋嘴，镀膜段两侧设置若干将镀膜卷材侧边向上托举的侧托，在侧托内侧设有若干压轮。本发明镀膜卷材在镀膜段形成一个中间低、两侧高的托举维持结构，确保镀膜溶液维持在镀膜卷材的表面沉积时溶液液面高度一致，同时镀膜两侧不会形成反向倒流，保证镀膜卷材横向镀膜的均匀性，实现纵向镀膜的连续性，可以实现卷对卷CSD喷淋镀膜的产业化生产需求。
The invention relates to a flexible thin-film photovoltaic roll-to-roll CSD spray coating device, which solves the problem that the coating solution is easily lost from both sides on the surface of the stainless steel base coil conveyed flatly, resulting in uneven coating. The device includes an unwinding shaft, a winding shaft and a number of conveying rollers. The coating coil output from the unwinding shaft passes through the conveying rollers in turn and is wound on the winding shaft. After the unwinding shaft, a coating section is arranged, and a coating solution spray nozzle is arranged above the front end of the coating section. , a number of side supports are arranged on both sides of the coating section to lift the sides of the coating coil upward, and a number of pressure rollers are arranged on the inner side of the side supports. The coating coil of the present invention forms a support structure with a low middle and high two sides in the coating section, so as to ensure that the coating solution is maintained at the same height when the surface of the coating coil is deposited, and at the same time, reverse reverse flow will not be formed on both sides of the coating , to ensure the uniformity of the lateral coating of the coated coil, to achieve the continuity of the longitudinal coating, and to meet the industrial production requirements of roll-to-roll CSD spray coating.
Description
Technical Field
The invention belongs to the field of solar cell production, relates to a production and processing equipment device of a flexible thin film solar cell, and particularly relates to a flexible thin film photovoltaic roll-to-roll CSD spray coating device.
Background
The flexible solar cell is formed by forming a solar photovoltaic material coating layer on a flexible windable substrate. In order to improve the production efficiency, the flexible solar cell is generally produced continuously by using a continuous stainless steel substrate which is conveyed roll to roll. In the field of thin film photovoltaics, CSD (chemical solution deposition method for preparing thin films) is a widely used substrate coating process, and can realize efficient and large-scale mass production. The traditional CSD is used in a coating process of an ultrathin stainless steel substrate or a glass substrate, in the chemical water bath deposition coating process, the surface of the substrate is flat due to the fact that the substrate is pulled under the tension of a roller shaft, when a reaction solution is sprayed onto the surface of the substrate from a nozzle, the solution easily flows out of two sides of the substrate and cannot be accumulated on the surface of the substrate for reaction, and the deposition reaction time is about 5 minutes, so that the coating cannot be effectively guaranteed, particularly when the solution amount on the surface of the substrate is insufficient, local solution agglomeration and local solution loss are easily caused, and the uniformity and the film forming quality of the coating are easily damaged.
Disclosure of Invention
The invention aims to solve the problem that the solution is easy to run off from two sides on the surface of a stainless steel substrate coiled material conveyed flatly due to the gravity of the solution at the edge in the CSD spray coating process of the ultrathin flexible film photovoltaic roll-to-roll so as to cause the liquid level of the coating transverse solution to be inconsistent and cause the integral coating to be uneven.
The technical scheme adopted by the invention for solving the technical problems is as follows: the utility model provides a flexible film photovoltaic volume to volume CSD sprays coating device, is including putting spool, rolling axle and a plurality of conveying roller, puts spool output coating film coiled material to rolling axle rolling after each conveying roller in proper order, its characterized in that: set up the coating section after unreeling the axle, coating section front end top sets up coating solution and sprays the mouth, and coating section both sides set up a plurality of side that upwards lift the coating coiled material side and hold in the palm, hold in the palm the inboard at the side and be equipped with a plurality of pinch rollers of pressing the coating coiled material upper surface. One of the conveying rollers between the unwinding shaft and the winding shaft is a tensioning roller. The front of coating film coiled material is the coating film face, reverse side coiling contact conveying roller, coating film section coating film coiled material upper surface is the front, this device is in the coating film section, utilize the side to hold in the palm the both sides limit of coating film coiled material upwards and hold up, and utilize the pinch roller to hold down the coating film coiled material inboard in the side, keep the level in the middle of making the coating film coiled material form, the retaining structure of both sides perk, can keep coating film solution at the upper surface of coating film coiled material, avoid running off from both sides from coating film solution, through the receipts unwinding speed of control coating film coiled material, can guarantee the transit time of coating film section, it is long when guaranteeing the coating film, make the coating film on coating film coiled material surface even, ensure the coating film quality.
Preferably, conveying rollers are respectively arranged at the front end and the rear end of the film coating section, and the upper surfaces of the conveying rollers at the front end and the rear end of the film coating section are higher than the lower side edge of the pressing wheel. The coating coiled material forms a sinking groove type after entering the coating section, and the coating solution is prevented from running off from the front end and the rear end.
Preferably, the bottom of the film coating section is provided with a plurality of carrier rollers for supporting the bottom surface of the film coating coiled material, and a heating block is arranged between adjacent carrier rollers. The support roller ensures that the bottom surface of the coating coiled material is conveyed smoothly.
Preferably, the side supports and the pressing wheels are arranged in a one-to-one correspondence mode, the side supports are installed on the adjusting seat, the top end of the adjusting seat is provided with a swing arm, the pressing wheels are erected at one end of the swing arm, the other end of the swing arm is provided with a balancing weight, an elongated slot capable of being adjusted transversely relative to the adjusting seat is formed in the swing arm, and the top end of the adjusting seat is rotatably connected with the elongated slot of the swing arm through a swing pin shaft. The pinch roller passes through the swing arm and supports, and the setting of the swing arm other end is the balancing weight, and the fulcrum of swing arm is adjustable, through above-mentioned adjustable lever structure, can adjust the pressure of pinch roller, has both guaranteed that the pinch roller has sufficient pressure to flatten the coating film coiled material, avoids the too big coating film coiled material surface fish tail that causes of pressure again.
Preferably, the bottom of the adjusting seat is provided with a sliding block which can slide and adjust along the conveying direction of the coating section. The adjusting seat can be adjusted from front to back, and after the position of the swing arm of the pressing wheel is adjusted, the position of the pressing wheel and the position of the carrier roller are ensured to correspond to each other through adjusting the position of the adjusting seat, so that the surface of the coated coiled material is ensured to be smooth.
Preferably, an extension shaft which is inwardly protruded is arranged between the pressing wheel and the end part of the swing arm.
Preferably, the side support is a truncated cone which can rotate around the axis, and the conical surface of the side support is a bearing surface for supporting the film-coated coil. The side support and the coating coiled material can also be rolling support instead of sliding support, so that the damage to the coating coiled material is reduced.
Preferably, the coating sections are horizontally arranged.
Preferably, the film coating surface of the film coating coiled material is the front surface, a film coating section, a washing section and a drying section are sequentially arranged between the unwinding shaft and the winding shaft, the front surface of the film coating coiled material in the film coating section is conveyed upwards in the forward direction, the front surface of the film coating coiled material at the front end of the washing section is vertically conveyed downwards, the front surface of the film coating coiled material at the rear end of the washing section is conveyed downwards in the reverse direction, and the front surface of the film coating coiled material in the drying section is conveyed downwards in the reverse direction.
Preferably, the front end of the washing section is provided with washing nozzles on the front surface of the film-coated coiled material, and the rear end of the washing section is provided with washing nozzles on the front surface and the back surface of the film-coated coiled material.
The invention ensures that the coating solution can be kept on the surface of the coating coiled material for deposition for a sufficient time by forming a holding structure with low middle and high two sides at the coating section through the side support and the pressing wheel, ensures the coating uniformity of the coating coiled material and ensures the coating quality.
Drawings
The invention is further described below with reference to the accompanying drawings.
FIG. 1 is a schematic diagram of an embodiment of the present invention.
Figure 2 is a schematic view of the support structure for the side pads and puck of the present invention.
Figure 3 is a schematic view of the picking support structure of the pinch roller and swing arm of the present invention.
FIG. 4 is a schematic cross-sectional view of a coated web of coated segments of the present invention.
In the figure: 1. unreeling shaft, 2, reeling shaft, 3, conveying roller, 4, tensioning roller, 5, coating section, 6, washing section, 7, washing section front end, 8, washing section rear end, 9, drying section, 10, coating solution spraying nozzle, 11, washing nozzle, 12, adjusting seat, 13, side support, 14, swing arm, 15, elongated slot, 16, swing pin shaft, 17, pinch roller, 18, balancing weight, 19, extension shaft, 20, carrier roller, 21, coating coiled material.
Detailed Description
The invention is further illustrated by the following specific examples in conjunction with the accompanying drawings.
Example (b): a flexible film photovoltaic roll-to-roll CSD spray coating device, as shown in figure 1. This device is including unreeling axle 1, rolling axle 2 and a plurality of conveying roller 3, unreels axle output coating film coiled material and to the rolling axle rolling behind each conveying roller in proper order, and wherein a conveying roller that is close to the rolling axle is tensioning roller 4. The coating surface of the coating coiled material 21 is the front surface, a coating section 5, a washing section 6 and a drying section 9 are sequentially arranged between the unreeling shaft 1 and the reeling shaft 2, the coating coiled material of the coating section 5 is conveyed upwards in the front direction, the coating section 5 is horizontally arranged, and a coating solution spraying nozzle 10 is arranged above the front end of the coating section 5. The front face of the coated coiled material at the front end 7 of the washing section is vertical and is conveyed downwards, the front face of the coated coiled material at the rear end 8 of the washing section is conveyed downwards in a reverse mode, the front face of the coated coiled material at the front end 7 of the washing section is provided with a washing nozzle 11, and the front face and the rear face of the coated coiled material at the rear end 8 of the washing section are provided with washing nozzles 11. And the drying section 9 conveys the coated coiled material in a reverse way with the front surface facing downwards.
As shown in fig. 1 and 4, 16 carrier rollers 20 are arranged on the bottom surface of the coating section, and a heating block is arranged between adjacent carrier rollers. Except two carrier rollers 20 which are closest to two ends, two ends of the other 14 carrier rollers are respectively and correspondingly provided with a side support 13 and a pinch roller 17, and 28 groups of side supports and pinch rollers are arranged. As shown in fig. 4, the side holder 13 is a truncated cone shape and can rotate around the central axis, the conical surface of the side holder 13 is used for lifting up two side edges of the film-coated coiled material 21, and the pressing wheel 17 is arranged at the inner side of the side holder and is used for flattening the inner side of the side edge of the film-coated coiled material 21. The press wheel 17 and idler 20 are preferably aligned one above the other. Conveying rollers 3 are respectively arranged at the front end and the rear end of the coating section 5, the upper surfaces of the conveying rollers 3 at the front end and the rear end of the coating section are higher than the lower side edge of the pinch roller 17, so that the front end, the rear end, the left side edge and the right side edge of a coating coiled material 21 of the coating section 5 are higher than the middle part, and a sinking groove capable of holding a coating solution is formed.
The side supports 13 and the pressing wheels 17 are correspondingly arranged in groups one by one, as shown in fig. 2 and 3, the side supports 13 are installed on an adjusting seat 12, a swing arm 14 is arranged at the top end of the adjusting seat 12, the pressing wheels 17 are erected at one end of the swing arm, a balancing weight 18 is arranged at the other end of the swing arm, a long groove 15 which can be transversely adjusted relative to the adjusting seat is formed in the swing arm 14, and the top end of the adjusting seat is rotatably connected with the long groove of the swing arm through a swing pin shaft 16. The swing arm can swing and can transversely adjust the supporting point, and the downward pressure of the pinch roller 17 is adjusted through the lever action. The bottom of the adjusting seat 12 is provided with a sliding block which can be adjusted in a sliding manner along the conveying direction of the film coating section, so that the position of the swing arm can be adjusted while the transverse position of the swing arm is changed, and the corresponding relation between the pressing wheel and the carrier roller is maintained. An extension shaft 19 which is inwardly protruded is arranged between the pressing wheel 17 and the end part of the swing arm 14 to ensure that the pressing wheel is inwardly protruded. The distance between the side support and the pinch roller is kept to be 2-5mm, so that the coated coiled material is prevented from being damaged by clamping.
The distance between the pinch roller 17 and the side edge of the coating coiled material 21 is kept between 10 and 20mm, the winding and unwinding speed is adjusted, the passing time of the coating coiled material in a coating section is ensured to be more than 5 minutes, the coating effect is ensured, and after coating is finished, the surface of the coating coiled material is cleaned, cooled and dried and then wound.
Claims (10)
1. The utility model provides a flexible film photovoltaic volume to volume CSD sprays coating device, is including putting spool, rolling axle and a plurality of conveying roller, puts spool output coating film coiled material to rolling axle rolling after each conveying roller in proper order, its characterized in that: set up the coating section after unreeling the axle, coating section front end top sets up coating solution and sprays the mouth, and coating section both sides set up a plurality of side that upwards lift the coating coiled material side and hold in the palm, hold in the palm the inboard at the side and be equipped with a plurality of pinch rollers of pressing the coating coiled material upper surface.
2. The flexible thin film photovoltaic roll-to-roll CSD spray coating device according to claim 1, wherein: conveying rollers are respectively arranged at the front end and the rear end of the film coating section, and the upper surfaces of the conveying rollers at the front end and the rear end of the film coating section are higher than the lower side edge of the pressing wheel.
3. The flexible thin film photovoltaic roll-to-roll CSD spray coating device of claim 1 or 2, wherein: and a plurality of carrier rollers for supporting the bottom surface of the coating coiled material are arranged at the bottom of the coating section, and a heating block is arranged between every two adjacent carrier rollers.
4. The flexible thin film photovoltaic roll-to-roll CSD spray coating device of claim 1 or 2, wherein: the side supports and the pressing wheels are arranged in a one-to-one correspondence mode, the side supports are installed on the adjusting seat, the top end of the adjusting seat is provided with a swing arm, one end of the swing arm is provided with the pressing wheels in an erected mode, the other end of the swing arm is provided with a balancing weight, the swing arm is provided with a long groove capable of being adjusted transversely relative to the adjusting seat, and the top end of the adjusting seat is rotatably connected with the long groove of the swing arm through a swing pin shaft.
5. The flexible thin film photovoltaic roll-to-roll CSD spray coating device according to claim 4, wherein: the bottom of the adjusting seat is provided with a sliding block which can slide and adjust along the conveying direction of the film coating section.
6. The flexible thin film photovoltaic roll-to-roll CSD spray coating device according to claim 4, wherein: an extension shaft which is inwardly raised is arranged between the pinch roller and the end part of the swing arm.
7. The flexible thin film photovoltaic roll-to-roll CSD spray coating device of claim 1 or 2, wherein: the side support is a cone frustum capable of rotating around an axis, and the conical surface of the side support is a bearing surface for lifting the coated coiled material.
8. The flexible thin film photovoltaic roll-to-roll CSD spray coating device of claim 1 or 2, wherein: the film coating section is horizontally arranged.
9. The flexible thin film photovoltaic roll-to-roll CSD spray coating device of claim 1 or 2, wherein: the coating section, the washing section, the drying section and the drying section are sequentially arranged between the unwinding shaft and the winding shaft, the front surface of the coating section is conveyed upwards in the forward direction, the front surface of the front-end coating coiled material is conveyed downwards in the vertical direction, the front surface of the rear-end coating coiled material is conveyed downwards in the reverse direction, and the front surface of the drying section is conveyed downwards in the reverse direction.
10. The flexible thin film photovoltaic roll-to-roll CSD spray coating device of claim 9, wherein: the front side of the film-coating coiled material is provided with a washing nozzle at the front end of the washing section, and the front side and the back side of the film-coating coiled material are provided with washing nozzles at the back end of the washing section.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110727110.8A CN113437169B (en) | 2021-06-29 | 2021-06-29 | Flexible film photovoltaic roll-to-roll CSD spraying coating device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110727110.8A CN113437169B (en) | 2021-06-29 | 2021-06-29 | Flexible film photovoltaic roll-to-roll CSD spraying coating device |
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| Publication Number | Publication Date |
|---|---|
| CN113437169A true CN113437169A (en) | 2021-09-24 |
| CN113437169B CN113437169B (en) | 2022-11-01 |
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| CN202110727110.8A Active CN113437169B (en) | 2021-06-29 | 2021-06-29 | Flexible film photovoltaic roll-to-roll CSD spraying coating device |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115863476A (en) * | 2022-11-28 | 2023-03-28 | 尚越光电科技股份有限公司 | Reel-to-reel chemical spraying deposition equipment for buffer layer of copper indium gallium selenide solar cell |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20140099750A1 (en) * | 2008-03-05 | 2014-04-10 | Global Solar Energy, Inc. | Solution containment during buffer layer deposition |
| CN108666392A (en) * | 2018-06-14 | 2018-10-16 | 浙江尚越新能源开发有限公司 | Copper indium gallium selenide chemical water bath deposition CSD overall equipment |
| CN208284492U (en) * | 2018-06-14 | 2018-12-25 | 浙江尚越新能源开发有限公司 | Copper indium gallium selenide chemical thought CSD integral device |
-
2021
- 2021-06-29 CN CN202110727110.8A patent/CN113437169B/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20140099750A1 (en) * | 2008-03-05 | 2014-04-10 | Global Solar Energy, Inc. | Solution containment during buffer layer deposition |
| CN108666392A (en) * | 2018-06-14 | 2018-10-16 | 浙江尚越新能源开发有限公司 | Copper indium gallium selenide chemical water bath deposition CSD overall equipment |
| CN208284492U (en) * | 2018-06-14 | 2018-12-25 | 浙江尚越新能源开发有限公司 | Copper indium gallium selenide chemical thought CSD integral device |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115863476A (en) * | 2022-11-28 | 2023-03-28 | 尚越光电科技股份有限公司 | Reel-to-reel chemical spraying deposition equipment for buffer layer of copper indium gallium selenide solar cell |
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| Publication number | Publication date |
|---|---|
| CN113437169B (en) | 2022-11-01 |
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