CN113433620B - Reconfigurable tunable optical filter - Google Patents

Reconfigurable tunable optical filter Download PDF

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Publication number
CN113433620B
CN113433620B CN202110984747.5A CN202110984747A CN113433620B CN 113433620 B CN113433620 B CN 113433620B CN 202110984747 A CN202110984747 A CN 202110984747A CN 113433620 B CN113433620 B CN 113433620B
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optical
waveguide
optical waveguide
unit group
switch unit
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CN113433620A (en
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王皓岩
李苗
叶雨农
刘杰
李嵬
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CETC Information Science Research Institute
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CETC Information Science Research Institute
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    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24Coupling light guides
    • G02B6/26Optical coupling means
    • G02B6/28Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals
    • G02B6/293Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24Coupling light guides
    • G02B6/26Optical coupling means
    • G02B6/28Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals
    • G02B6/293Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means
    • G02B6/29379Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means characterised by the function or use of the complete device
    • G02B6/29395Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means characterised by the function or use of the complete device configurable, e.g. tunable or reconfigurable
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24Coupling light guides
    • G02B6/26Optical coupling means
    • G02B6/35Optical coupling means having switching means
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24Coupling light guides
    • G02B6/26Optical coupling means
    • G02B6/35Optical coupling means having switching means
    • G02B6/354Switching arrangements, i.e. number of input/output ports and interconnection types

Abstract

The application discloses a reconfigurable tunable optical filter, which is used for solving the problems that the existing optical filter is complex in structure and difficult to tune due to multiple filtering indexes. The optical filter comprises an input optical waveguide for inputting a broadband optical signal to be processed; the first optical switch unit group is connected with the input optical waveguide, comprises a plurality of stages of optical switches and is used for determining a coupling path of a broadband optical signal by selecting the switching state of the optical switches; the first annular optical waveguide is connected with the first optical switch unit group and used for transmitting broadband optical signals; the second optical switch unit group is connected with the first annular optical waveguide, comprises a plurality of stages of optical switches and is used for determining a coupling path of the broadband optical signal from the first annular optical waveguide by selecting the switching state of the optical switches; the second annular optical waveguide is connected with the second optical switch unit group and used for transmitting broadband optical signals; and the output optical waveguide is connected with the second optical switch unit group and used for outputting the processed broadband optical signal.

Description

Reconfigurable tunable optical filter
Technical Field
The application relates to the technical field of optical fiber communication, in particular to a reconfigurable tunable optical filter.
Background
As a leading-edge technology in the field of communications, optical communication technology is regarded as a key point for developing high-speed broadband networks by more and more countries.
In the operation of a high-speed bandwidth network, the use of the reconfigurable optical add-drop multiplexer brings convenience for developing more services and reduces the operation cost. In order to reach the standard of an ideal reconfigurable optical network, the reconfigurable optical add-drop multiplexer is required to have the characteristics of reconfiguration, flexibility and tunability. The optical method and the optical element used by the optical filter in the reconfigurable optical add-drop multiplexer can realize the filtering function of optical signals.
Compared with the traditional electronic technology, the optical element has the characteristics of flexibility and wide bandwidth, and can directly filter the microwave signal with high frequency bandwidth. The optical filter based on integrated photonics is convenient for large-scale integration, and meanwhile, a mature semiconductor process processing platform is utilized, so that large-scale low-cost mass production can be realized.
At present, the common reconfigurable, flexible and tunable optical filter usually adopts structures such as arrayed waveguide grating and Mach-Zehnder, but the structures have the problems of large loss, large volume, high cost, poor stability, difficult adjustment and control and the like. The optical filter based on the traditional single micro-ring resonator structure only has specific filtering performance, and can not realize the flexible tunable function aiming at the filtering indexes such as insertion loss, full width at half maximum, extinction ratio and the like. The optical filter based on a plurality of micro-ring resonator structures is provided with a plurality of cascaded coupling areas, and the problems of complex structure, difficulty in tuning and the like often exist.
Disclosure of Invention
The embodiment of the application provides a reconfigurable tunable optical filter, which is used for solving the problems that the existing optical filter is complex in structure and is not easy to tune due to multiple filtering indexes.
The reconfigurable tunable optical filter provided by the embodiment of the application comprises:
the input optical waveguide is used for inputting a broadband optical signal to be processed;
the first optical switch unit group is connected with the input optical waveguide, comprises a plurality of stages of optical switches and is used for determining a coupling path of the broadband optical signal by selecting the switching state of the optical switches;
the first annular optical waveguide is connected with the first optical switch unit group and used for transmitting the broadband optical signal;
the second optical switch unit group is connected with the first annular optical waveguide and comprises a plurality of stages of optical switches for determining a coupling path of a broadband optical signal from the first annular optical waveguide by selecting the switching state of the optical switches;
the second annular optical waveguide is connected with the second optical switch unit group and used for transmitting the broadband optical signal;
and the output optical waveguide is connected with the second optical switch unit group and used for outputting the processed broadband optical signal.
In one example, the switching states of the optical switch include a cross state, a through state; the optical switch comprises a first input end, a second input end, a first output end and a second output end; when the optical switch is in a through state, the first input end is communicated with the first output end, and the second input end is communicated with the second output end; when the optical switch is in a cross state, the first input end is communicated with the second output end, and the second input end is communicated with the first output end.
In one example, the first optical switch unit group, the first ring optical waveguide, the second optical switch unit group, and the second ring optical waveguide form a ring resonator, and the ring resonator resonates light, which is coupled into the corresponding optical waveguide, of the broadband optical signal by reciprocal transmission.
In one example, the first optical switch unit group and the second optical switch unit group are specifically configured to control the coupling region corresponding to the ring-shaped resonant cavity by selecting a switching state of a specific optical switch.
In one example, when the ring resonator determines that the wavelength of the broadband optical signal meets the resonance condition according to a preset resonance condition, the broadband optical signal is coupled from one side optical waveguide of a currently transmitted optical switch to the other side optical waveguide.
In one example, the optical switches of the first optical switch unit group include first upper optical waveguides and first lower optical waveguides, the first upper optical waveguides of the optical switches of the respective stages are connected in sequence, and the first lower optical waveguides are connected in sequence; a first upper optical waveguide of a first-stage optical switch in the first optical switch unit group, which is close to the input optical waveguide, is connected to the input optical waveguide, and a first lower optical waveguide of the first-stage optical switch is connected to the second annular optical waveguide; and a first lower side optical waveguide of the last stage optical switch far away from the input optical waveguide in the first optical switch unit group is connected with the first annular optical waveguide.
In one example, the optical switches of the second optical switch unit group include second upper side optical waveguides and second lower side optical waveguides, the second upper side optical waveguides of the optical switches of the respective stages are connected in sequence, and the second lower side optical waveguides are connected in sequence; a second upper optical waveguide of the first-stage optical switch in the second optical switch unit group, which is far away from the output optical waveguide, is connected with the first annular optical waveguide; and a second lower optical waveguide of a last stage optical switch in the second optical switch unit group, which is close to the output optical waveguide, is connected with the output optical waveguide, and a second upper optical waveguide of the last stage optical switch is connected with the second annular optical waveguide.
In one example, the first upper optical waveguide and the first lower optical waveguide are parallel to each other, and the second upper optical waveguide and the second lower optical waveguide are parallel to each other.
In one example, the waveguide spacing and the coupling region length of the adjacent optical switches in the first optical switch unit group are different, but the waveguide width and the waveguide thickness are the same.
In one example, the first annular optical waveguide and the second annular optical waveguide change refractive index through a thermo-optic effect or an electro-optic effect to achieve tunable center wavelength of the optical filter.
The reconfigurable tunable optical filter provided by the embodiment of the application at least comprises the following beneficial effects: on the basis of an add-drop ring resonator structure, two groups of independent optical switch unit groups with characteristics are nested and fused, and ring resonant cavities formed by the optical switch unit groups can be positioned in different coupling areas through selection of switching states of optical switches in the optical switch unit groups, so that reconfigurable multiple filtering characteristics of an optical filter are realized. Meanwhile, the filtering curve generated by the filter can be flexibly tunable by the two groups of optical switch unit groups, so that the filtering characteristics such as insertion loss, full width at half maximum, extinction ratio and the like can be realized. In addition, the central wavelength of the filtering spectrum line can be tuned by controlling the refractive index of the ring-shaped resonant cavity. The optical filter also has the characteristics of small loss, compact volume and high stability, the coupling area is independent and adjustable, the optical filter is easy to adjust and control, the requirements of the technical field of optical fiber communication on high-performance reconfigurable, flexible and tunable optical filters can be met, and the optical filter is convenient to directly apply to the construction of devices and modules for optical communication.
Drawings
The accompanying drawings, which are included to provide a further understanding of the application and are incorporated in and constitute a part of this application, illustrate embodiment(s) of the application and together with the description serve to explain the application and not to limit the application. In the drawings:
fig. 1 is a schematic structural diagram of a reconfigurable tunable optical filter provided in an embodiment of the present application;
fig. 2(a) is a schematic diagram of a through state in a switching state of an optical switch provided in an embodiment of the present application;
fig. 2(b) is a schematic diagram of a cross state in a switching state of an optical switch provided in an embodiment of the present application;
fig. 3 is a diagram of a filter spectrum of a reconfigurable tunable optical filter provided by an embodiment of the present application;
reference numerals
100 an input optical waveguide is provided and,
200 first optical switch cell group, 1 first stage optical switch of first optical switch cell group, 210 first upper side optical waveguide, 211 first input terminal, 212 first output terminal, 220 first lower side optical waveguide, 221 second input terminal, 222 second output terminal,
300 a first ring-shaped optical waveguide,
400 second optical switch cell group, 2 first order optical switches of the second optical switch cell group, 410 second upper optical waveguide, 420 second lower optical waveguide,
500 a second ring-shaped optical waveguide,
600 output optical waveguide.
Detailed Description
In order to make the objects, technical solutions and advantages of the present application more apparent, the technical solutions of the present application will be described in detail and completely with reference to the following specific embodiments of the present application and the accompanying drawings. It should be apparent that the described embodiments are only some of the embodiments of the present application, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present application.
Fig. 1 is a schematic structural diagram of a reconfigurable and tunable optical filter provided in an embodiment of the present application, and specifically includes an input optical waveguide 100, a first optical switch unit group 200, a first ring optical waveguide 300, a second optical switch unit group 400, a second ring optical waveguide 500, and an output optical waveguide 600. In which an optical waveguide is a dielectric device for guiding light waves to propagate therein, and the optical filter includes optical waveguides of different shapes, such as a ring shape and a linear shape.
Specifically, the input optical waveguide 100 is used to input a broadband optical signal to be processed, so as to perform filtering processing; the first optical switch unit group 200 is connected to the input optical waveguide 100, and includes several stages of optical switches, which are used to transmit broadband optical signals and determine a coupling path of the broadband optical signals by selecting a switching state of the optical switches; the first ring-shaped optical waveguide 300 is connected to the first optical switch unit group 200, and is used for transmitting a broadband optical signal; the second optical switch unit group 400 is connected to the first ring optical waveguide 300, and includes several stages of optical switches, which are used to transmit broadband optical signals and determine the coupling path of the broadband optical signals from the first ring optical waveguide 300 by selecting the switching state of the optical switches; the second ring optical waveguide 500 is connected to the second optical switch unit group 400, and is configured to transmit a broadband optical signal; the output optical waveguide 600 is connected to the second optical switch unit group 400, and is configured to output the processed broadband optical signal, so as to implement the filtering function of the optical filter.
The two groups of optical switch unit groups are arranged, and the switching state of the optical switch is selected to control the coupling area in the optical filter, so that the multiple filtering characteristics of the optical filter are realized. And, through the flexible choice of the photoswitch, can realize the flexible tunable of filtering characteristic such as insertion loss, full width at half maximum, extinction ratio. The first optical switch unit group and the second optical switch unit group are independent switch units, and independent switching state control of the optical switches can be realized by independently tuning the specific optical switches, so that the central wavelength can be adjusted.
In one embodiment, as shown in fig. 1, the first optical switch unit group 200 may include n stages of optical switches (i.e., each dashed line shown in parentheses in fig. 1) respectively as the first stage optical switch and the last stage (i.e., the nth stage) of the second stage optical switch … … along the direction in which the broadband optical signal is input and transmitted.
The first-stage optical switch 1 of the first optical switch unit group includes a first upper optical waveguide 210 and a first lower optical waveguide 220 (the other optical switches at different stages have the same structure in the same way), the first upper optical waveguides of the optical switches at different stages are connected in sequence, and the first lower optical waveguides are connected in sequence. Wherein, the first upper side optical waveguide and the first lower side optical waveguide are both straight waveguides.
The first-stage optical switch 1 of the first optical switch unit group close to the input optical waveguide 100 is used as an input optical switch, the first upper optical waveguide 210 of which is connected to the input optical waveguide 100, and the first lower optical waveguide 220 of which is connected to the second annular optical waveguide 500. The last stage of optical switch in the first optical switch unit group 200, which is far away from the input optical waveguide 100, serves as an output optical switch, and the first lower optical waveguide thereof is connected to the first ring-shaped optical waveguide 300.
It should be noted that the input optical switch and the output optical switch are used to control the passing or blocking of the broadband optical signal between the input end and the output end.
In one embodiment, as shown in fig. 1, in the direction in which the broadband optical signal is input from the first ring optical waveguide 300 and transmitted, the second optical switch unit group 400 may include m stages of optical switches (i.e., each of the dotted frames shown in parentheses in fig. 1) respectively, which are the first stage optical switch and the last stage (i.e., the m-th stage) of the second stage optical switch … ….
The first-stage optical switch 2 of the second optical switch unit group includes a second upper optical waveguide 410 and a second lower optical waveguide 420 (the other optical switches at different stages have the same structure in the same manner), the second upper optical waveguides of the optical switches at different stages are connected in sequence, and the second lower optical waveguides are connected in sequence. Wherein the second upper optical waveguide and the second lower optical waveguide are both straight waveguides.
The first stage optical switch in the second optical switch unit group 400 far from the output optical waveguide 600 serves as an input optical switch, and the second upper optical waveguide 410 is connected to the first ring-shaped optical waveguide 300. The last stage of optical switch in the second optical switch unit group 400 close to the output optical waveguide 600 is used as an output optical switch, the second lower optical waveguide thereof is connected to the output optical waveguide 600 to switch the optical signal to the output optical waveguide 600, and the second upper optical waveguide of the last stage of optical switch is connected to the second ring optical waveguide 500.
As can be seen, the first lower optical waveguide, the first ring optical waveguide, and the second upper optical waveguide, and the second ring optical waveguide of each stage of optical switch in the first optical switch unit group and the second optical switch unit group are structurally formed in a ring shape.
In one embodiment, as shown in fig. 2(a) and 2(b), each optical switch includes a first input terminal 211, a second input terminal 221, a first output terminal 212, and a second output terminal 222. In the optical switch unit group, except the first-stage optical switch, the first input ends of other optical switches are respectively connected with the first output end of the first-stage optical switch, and the second input ends are respectively connected with the second output end of the first-stage optical switch. During the transmission of the broadband optical signal, the broadband optical signal is transmitted from the input end to the output end of the optical switch.
The switching states of the optical switch include a through state and a cross state.
Fig. 2(a) shows a through state in the switching state of the optical switch, and as shown in fig. 2(a), when the optical switch is in the through state, the first input terminal 211 is communicated with the first output terminal 212, and the second input terminal 221 is communicated with the second output terminal 222. That is, if a broadband optical signal is input from the first input terminal 211, it is output from the first output terminal 212.
Fig. 2(b) shows a cross state in the switching state of the optical switch, and as shown in fig. 2(b), when the optical switch is in the cross state, the first input terminal 211 is communicated with the second output terminal 222, and the second input terminal 221 is communicated with the first output terminal 212. That is, if a broadband optical signal is input from the first input terminal 211, it is output from the second output terminal 222.
As can be seen from fig. 1, 2(a), and 2(b), the first optical switch unit group 200 couples the broadband optical signal into the first ring optical waveguide 300 through a specific optical switch by selecting the switching state of the specific optical switch as the cross state, and the second optical switch unit group 400 couples the broadband optical signal into the second ring optical waveguide 500 through the specific optical switch by selecting the switching state of the specific optical switch as the cross state, so as to form a reciprocal transmission of the broadband optical signal around the ring structure.
In one embodiment, as shown in fig. 1, the first optical switch cell group 200, the first ring optical waveguide 300, the second optical switch cell group 400, and the second ring optical waveguide 500 form a closed ring resonance region by a ring structure to form a ring resonator. In the transmission process of the broadband optical signal, the ring-shaped resonant cavity can enable the broadband optical signal to be coupled to the light in the corresponding optical waveguide to resonate through reciprocating transmission.
The broadband optical signal within the passband coupled in by the input optical waveguide 100 propagates clockwise along the closed ring resonator, which has periodic download lines at the resonant wavelength, the shape of which is shown in fig. 3.
In one embodiment, the first optical switch unit group 200 is specifically configured to determine that the optical signal is transmitted from the designated optical switch to and from the designated optical switch by selecting the switching state of the designated optical switch, so as to control the coupling region corresponding to the ring resonator.
Specifically, the ring resonator has an intrinsic resonant frequency, and determines whether the wavelength of the currently transmitted broadband optical signal satisfies a resonance condition according to a preset resonance condition of the micro-ring. If the wavelength transmitted in the incident signal cannot satisfy the resonance condition of the micro-ring, the light wave continues to propagate along the direction of the input straight waveguide. When the wavelength of the broadband optical signal meets the resonance condition, the micro-ring can play a role of communication, and the broadband optical signal is coupled into the optical waveguide on the other side from the optical waveguide on one side of the currently transmitted optical switch.
In one embodiment, the first upper optical waveguide and the first lower optical waveguide of the first optical switch unit group are identical, and the upper optical waveguide and the lower optical waveguide of each optical switch of the coupling region are parallel to each other. Similarly, the second optical switch unit group has the same structure, and is not repeated in this application.
In one embodiment, the geometrical parameters of the optical switches in the first optical switch element group affect the characteristics of the optical filter. For example, the coupling efficiency between the input optical waveguide and the ring optical waveguide is affected by the difference between the waveguide spacing and the coupling region length of the adjacent parallel optical waveguides, so that the characteristics of the final output filter spectrum, such as insertion loss, full width at half maximum, extinction ratio, etc., are changed. Therefore, the waveguide spacing and the coupling region length of the adjacent optical switches in the first optical switch unit group can be set to be different, but the waveguide width and the waveguide thickness are the same, so that the broadband optical signals can obtain filter curves with different filter characteristics after passing through different optical switches.
Similarly, the second optical switch unit group has the same property, and is not described in detail in this application.
In one embodiment, the first and second ring optical waveguides 300 and 500 change their refractive indexes by thermo-optic effect or electro-optic effect, so that the center wavelength of the optical filter can be tunable.
In one embodiment, the number of optical switches included in the first optical switch unit group (i.e., n) and the number of optical switches included in the second optical switch unit group (i.e., m) may be the same or different.
In one embodiment, the filter may be configured with a 2 × 2 optical switch based on a filtering curve of a spectral line at a download end of an add-drop micro-ring resonator, typically a periodically arranged micro-ring resonator, so as to implement a flexibly tunable optical filter.
In one embodiment, the input optical waveguide, the first ring optical waveguide, the second ring optical waveguide, and the output optical waveguide may be fabricated by semiconductor processes on a lithium niobate, silicon dioxide, indium phosphide, gallium arsenide platform.
The embodiments in the present application are described in a progressive manner, and the same and similar parts among the embodiments can be referred to each other, and each embodiment focuses on the differences from the other embodiments. In particular, as for the apparatus embodiment, since it is substantially similar to the method embodiment, the description is relatively simple, and for the relevant points, reference may be made to the partial description of the method embodiment.
It should also be noted that the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising an … …" does not exclude the presence of other like elements in a process, method, article, or apparatus that comprises the element.
The above description is only an example of the present application and is not intended to limit the present application. Various modifications and changes may occur to those skilled in the art. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present application should be included in the scope of the claims of the present application.

Claims (9)

1. A reconfigurable tunable multiple optical filter, comprising:
the input optical waveguide is used for inputting a broadband optical signal to be processed;
the first optical switch unit group is connected with the input optical waveguide, comprises a plurality of stages of optical switches and is used for determining a coupling path of the broadband optical signal by selecting the switching state of the optical switches;
the first annular optical waveguide is connected with the first optical switch unit group and used for transmitting the broadband optical signal;
the second optical switch unit group is connected with the first annular optical waveguide and comprises a plurality of stages of optical switches for determining a coupling path of a broadband optical signal from the first annular optical waveguide by selecting the switching state of the optical switches;
the second annular optical waveguide is connected with the second optical switch unit group and used for transmitting the broadband optical signal;
the output optical waveguide is connected with the second optical switch unit group and used for outputting the processed broadband optical signal;
the first optical switch unit group, the first annular optical waveguide, the second optical switch unit group and the second annular optical waveguide form an annular resonant cavity, and the annular resonant cavity enables light coupled to the corresponding optical waveguide by the broadband optical signal to resonate through reciprocating transmission.
2. The multiple optical filter of claim 1, wherein the switching states of the optical switch include a cross state, a through state; the optical switch comprises a first input end, a second input end, a first output end and a second output end;
when the optical switch is in a through state, the first input end is communicated with the first output end, and the second input end is communicated with the second output end;
when the optical switch is in a cross state, the first input end is communicated with the second output end, and the second input end is communicated with the first output end.
3. The multiple optical filter according to claim 1, wherein the first optical switch unit group and the second optical switch unit group are specifically configured to control the coupling region corresponding to the ring resonator by selecting a switching state of a specific optical switch.
4. The multiple optical filter of claim 1, wherein the ring resonator couples the broadband optical signal from one optical waveguide to another optical waveguide of a currently transmitting optical switch when the ring resonator determines that the wavelength of the broadband optical signal satisfies the resonance condition according to a preset resonance condition.
5. The multiple optical filter according to claim 1, wherein the optical switches of the first optical switch unit group include first upper optical waveguides and first lower optical waveguides, the first upper optical waveguides of the optical switches of the respective stages are connected in sequence, and the first lower optical waveguides are connected in sequence;
a first upper optical waveguide of a first-stage optical switch in the first optical switch unit group, which is close to the input optical waveguide, is connected to the input optical waveguide, and a first lower optical waveguide of the first-stage optical switch is connected to the second annular optical waveguide;
and a first lower side optical waveguide of the last stage optical switch far away from the input optical waveguide in the first optical switch unit group is connected with the first annular optical waveguide.
6. The multi-optical filter according to claim 5, wherein the optical switches of the second optical switch unit group include second upper optical waveguides and second lower optical waveguides, the second upper optical waveguides of the optical switches of the respective stages are connected in sequence, and the second lower optical waveguides are connected in sequence;
a second upper optical waveguide of the first-stage optical switch in the second optical switch unit group, which is far away from the output optical waveguide, is connected with the first annular optical waveguide;
and a second lower optical waveguide of a last stage optical switch in the second optical switch unit group, which is close to the output optical waveguide, is connected with the output optical waveguide, and a second upper optical waveguide of the last stage optical switch is connected with the second annular optical waveguide.
7. The multiple optical filter of claim 6, wherein the first upper optical waveguide and the first lower optical waveguide are parallel to each other, and the second upper optical waveguide and the second lower optical waveguide are parallel to each other.
8. The multiple optical filter according to claim 1, wherein the waveguide spacing and the coupling region length of the adjacent optical switches in the first optical switch unit group are different, but the waveguide width and the waveguide thickness are the same.
9. The multiple optical filter of claim 1, wherein the first and second annular optical waveguides change refractive index via a thermo-optic or electro-optic effect to achieve center wavelength tunability of the optical filter.
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CN111025465A (en) * 2019-12-25 2020-04-17 中国科学院半导体研究所 Free spectral range tunable optical filter
CN113031163A (en) * 2021-03-15 2021-06-25 中国科学院半导体研究所 Optical filter structure and optical filter
CN112799174A (en) * 2021-04-06 2021-05-14 中国电子科技集团公司信息科学研究院 Tunable optical filter

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