CN113433093A - High-sensitivity humidity sensor based on micro-nano optical fiber multi-ring resonator - Google Patents
High-sensitivity humidity sensor based on micro-nano optical fiber multi-ring resonator Download PDFInfo
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- 239000013307 optical fiber Substances 0.000 title claims abstract description 60
- 239000011543 agarose gel Substances 0.000 claims abstract description 10
- 239000000835 fiber Substances 0.000 claims description 25
- 238000003466 welding Methods 0.000 claims description 16
- 238000001228 spectrum Methods 0.000 claims description 10
- 238000010438 heat treatment Methods 0.000 claims description 5
- 239000002121 nanofiber Substances 0.000 claims description 5
- 239000000523 sample Substances 0.000 claims description 4
- 239000000919 ceramic Substances 0.000 claims description 3
- 238000006073 displacement reaction Methods 0.000 claims description 3
- 239000011521 glass Substances 0.000 claims description 3
- 238000009210 therapy by ultrasound Methods 0.000 claims description 3
- 239000003292 glue Substances 0.000 claims 1
- 230000000694 effects Effects 0.000 abstract description 12
- 230000035945 sensitivity Effects 0.000 abstract description 12
- 230000004044 response Effects 0.000 abstract description 10
- 238000005259 measurement Methods 0.000 abstract description 6
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- 235000013305 food Nutrition 0.000 abstract description 4
- 238000012545 processing Methods 0.000 abstract description 4
- 238000010276 construction Methods 0.000 abstract description 2
- 230000008859 change Effects 0.000 description 5
- 238000012544 monitoring process Methods 0.000 description 3
- 230000003595 spectral effect Effects 0.000 description 3
- 238000001069 Raman spectroscopy Methods 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 2
- 238000005260 corrosion Methods 0.000 description 2
- 230000007797 corrosion Effects 0.000 description 2
- 230000008878 coupling Effects 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
- 238000005859 coupling reaction Methods 0.000 description 2
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- 238000000034 method Methods 0.000 description 2
- 230000000737 periodic effect Effects 0.000 description 2
- 239000002861 polymer material Substances 0.000 description 2
- 108010010803 Gelatin Proteins 0.000 description 1
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- 239000002360 explosive Substances 0.000 description 1
- 238000007306 functionalization reaction Methods 0.000 description 1
- 239000008273 gelatin Substances 0.000 description 1
- 229920000159 gelatin Polymers 0.000 description 1
- 235000019322 gelatine Nutrition 0.000 description 1
- 235000011852 gelatine desserts Nutrition 0.000 description 1
- 230000036541 health Effects 0.000 description 1
- 230000036039 immunity Effects 0.000 description 1
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- 239000000463 material Substances 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 239000003658 microfiber Substances 0.000 description 1
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- 238000000411 transmission spectrum Methods 0.000 description 1
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- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/41—Refractivity; Phase-affecting properties, e.g. optical path length
- G01N21/45—Refractivity; Phase-affecting properties, e.g. optical path length using interferometric methods; using Schlieren methods
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/255—Splicing of light guides, e.g. by fusion or bonding
- G02B6/2551—Splicing of light guides, e.g. by fusion or bonding using thermal methods, e.g. fusion welding by arc discharge, laser beam, plasma torch
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Abstract
The invention provides a high-sensitivity humidity sensor based on a micro-nano optical fiber multi-ring resonator. The invention consists of the following parts: 1. and (5) preparing a micro-nano optical fiber multi-ring resonator. 2. The construction of the optical path of the high-sensitivity humidity sensor is realized. The invention has the advantages of simple preparation, high performance, low loss and low cost, prepares the humidity sensor by utilizing vernier effect and the humidity sensitivity characteristic of agarose gel, has high sensitivity, quick response and larger measurement range, and can be used in various fields needing to measure dynamic humidity, such as chemical production, food processing and the like.
Description
Technical Field
The invention relates to a high-sensitivity humidity sensor based on a micro-nano optical fiber multi-ring resonator, which has the humidity sensitivity of 2.442 nm/% RH (RH is relative humidity unit) in a high humidity environment, has the rapid response time of 102ms and a larger measurement range (60-90% RH), and is very suitable for measuring the environmental humidity change in the fields of chemical production and the like.
Background
Relative Humidity (RH) is one of physical quantities most closely related to the environment and human, and sensors for measuring and monitoring relative humidity are widely used in the fields of industry, agriculture, biomedicine, and the like. Most of traditional humidity sensors are electronic humidity sensors, have the advantages of simple principle, high measuring accuracy, low cost and the like, but have high requirements on the cleanliness of the environment, poor corrosion resistance and are not suitable for some special occasions such as strong electromagnetic fields or flammable and explosive occasions. Therefore, an optical fiber humidity sensor with the advantages of low cost, small size, corrosion resistance, electromagnetic interference resistance and the like is rapidly developed.
The sensing probe of the optical fiber humidity sensor is formed by an optical fiber and a humidity-sensitive polymer material together, when an optical signal is transmitted in the optical fiber, the change of the temperature, the humidity and the like of a measuring environment can cause the change of the refractive index of the humidity-sensitive polymer material, thereby influencing the intensity of transmitted light and realizing humidity sensing. In recent years, many integrated optical fiber humidity sensors have been widely studied due to their sensitive response to small changes in refractive index and immunity to electromagnetic interference, and the micro-nano optical fiber sensor is one of them. The micro/nanofiber (MNF) is a waveguide with the diameter close to or smaller than the wavelength of transmitted light, is prepared by a physical stretching method, and has the advantages of smooth surface, good diameter uniformity, high mechanical property, strong optical field constraint, strong evanescent field and the like. The MNF sensor has good compatibility with other photoelectric devices and small volume, and gradually becomes an emerging sensing platform. To date, a number of MNF-based humidity measurement structures have been proposed, including Sagnac interferometers, mach-zehnder interferometers, Fabry-Perot interferometers, and the like. Although the humidity sensor based on the interferometer has a simple structure, the interference spectrum is difficult to demodulate and the sensitivity is not high. In order to improve the sensitivity, researchers have also done a lot of work, including coating moisture-sensitive membranes on the MNF surface to achieve material functionalization. However, the micro-nano fiber humidity sensor cannot achieve high sensitivity in a large measurement range at present.
By utilizing the characteristics of simple operation, evanescent wave coupling and the like of the micro-nano optical fiber, researchers successfully develop various resonant cavities based on the micro-nano optical fiber at present. The resonant cavity structure can be roughly divided into three types: a ring-type resonant cavity, a ring-type resonant cavity and a roll-type resonant cavity. Because the coupling region of the ring-shaped structure is maintained by interaction force, the ring-shaped structure is easily interfered by external environment, and the structure is not stable enough, Tong et al increase the friction force between micro-nano optical fibers by winding the micro-nano optical fibers, and form a ring-shaped resonant cavity with a more stable structure. The size of the ring-shaped resonant cavity can be changed by pulling one end of the micro-nano optical fiber, and the ring-shaped resonant cavity can stably work on the surface of a substrate with low refractive index or in liquid. At present, a micro-nano optical fiber ring sensor based on a ring-shaped resonant cavity already realizes sensing of physical quantities such as temperature, current, humidity and the like, and the sensitivity of measured humidity is usually in the picometer order on the basis of a single ring-shaped resonant cavity. More complex micro-nano optical fiber multi-ring resonators based on multi-ring resonant cavities are gradually appeared and are under study, the characteristics and the application of the multi-ring resonators are focused on optical communication, and the application of the multi-ring resonators in the aspect of sensing is still few. Xu et al propose a vernier effect-based cascaded micro-nano optical fiber ring resonator, which is composed of two cascaded ring-shaped resonant cavities and can be applied to refractive index sensing.
The vernier effect is a very useful technique to improve the sensing performance of the optical fiber sensor. In general, the vernier effect can be observed with two measuring scales with slightly different periods, one of which is fixed. The spectral amplification of the vernier effect allows small changes in the refractive index to result in large shifts in the cascade transmission spectrum. The existing optical fiber sensing structure with vernier effect usually consists of two cascaded units, such as two cascaded Mach-Zehnder interferometers, two cascaded Fabry-Perot interferometers, two cascaded micro-ring resonators and the like. One of the cells serves as a sensing cell and the other serves as a reference cell. The vernier effect of these structures is achieved by superimposing two different comb spectra of the sensing and reference cells. However, in these sensing structures, the reference cell is directly cascaded with the sensing cell. Therefore, the reference unit cannot be completely isolated from the measured object, which will disturb the detection result.
Disclosure of Invention
The invention aims to provide a high-sensitivity humidity sensor based on a micro-nano optical fiber multi-ring resonator, which utilizes vernier effect, has the advantages of strong mechanical stability, low loss and easiness in preparation, and can be applied to the fields of health monitoring, biochemistry, food and other fields related to daily life in the future.
The purpose of the invention is realized as follows:
1. preparing a micro-nano optical fiber multi-ring resonator:
the single mode fiber is heated to the working temperature (about 1300 ℃) by utilizing a ceramic micro-electric couple heater, then the single mode fiber is heated to the molten state and drawn into the micro-nano fiber, the diameter of the cone waist is 2.7 mu m, and the length is 10 mm. After a micro-nano optical fiber is prepared, the left end of the micro-nano optical fiber is fixed on an optical fiber displacement three-dimensional platform, and the right end of the micro-nano optical fiber rotates 180 degrees along the axis anticlockwise so as to ensure that the optical fiber keeps a straight shape and does not intersect. Moving the right portion of the fiber to the left, the tapered portions will intersect due to internal stresses. One of the intersecting pigtails is threaded into a loop generated by the intersection by using a probe to form a multi-loop structure consisting of a single-loop resonator and a curved Mach-Zehnder interferometer.
2. Implementation of the humidity sensor:
the manufactured micro-nano optical fiber multi-ring resonator is horizontally arranged on the MgF with low refractive index2Low-refractive index uv gel (refractive index of about 1.34) was dropped on the glass (about 1.37) except for the mach-zehnder interferometer arms, including the end of the tapered fiber, and cured with an ultraviolet lamp. Preparing 1% agarose gel solution, uniformly performing ultrasonic treatment, heating, dripping the agarose gel solution onto the Mach-Zehnder interference arm by using an injector, and airing at room temperature until a uniform film is formed. And welding the tail fiber at one side of the prepared humidity sensor with a white light source by using an optical fiber welding machine, and welding the tail fiber at the other side of the prepared humidity sensor with a spectrometer by using the optical fiber welding machine. The white light source is turned on to measure its output spectrum. The prepared humidity sensor presents an output spectrum with obvious periodic envelopes, which indicate that vernier effect is generated.
3. Measuring humidity:
keeping the light path of the measured output spectrum unchanged, and putting the prepared humidity sensor into a temperature and humidity control box. The temperature was constant at 25 ℃ and the initial relative humidity was 60%. The change in spectral transmission at different relative humidities was measured.
4. Measuring response time:
and fusing the tail fiber at one side of the humidity sensor with the Raman fiber laser by using an optical fiber welding machine, and fusing the tail fiber at the other side of the humidity sensor with the oscilloscope by using the optical fiber welding machine. The sensor was placed in a clear plastic box, where the humidity was maintained at 65% by the humidifier. When the initial strength measured by the oscilloscope is stable, the cover of the plastic box is quickly opened, the humidity in the box is quickly reduced to be consistent with the indoor humidity, and the measured response time is 102 ms.
Compared with the prior art, the invention has the beneficial effects that:
according to the invention, on the basis of the multi-ring resonant cavity with vernier effect, agarose gel is coated on an optical fiber to form a film, and by virtue of the moisture-sensitive characteristic of the agarose gel, the prepared humidity sensor has the advantages of simple structure, easiness in preparation, low cost and the like, obtains high sensitivity (2.442 nm/% RH), quick response time (102ms) and a larger measurement range (60-90% RH), and can be applied to the fields of food processing, chemical production and the like.
The preparation method is simple, can be operated by naked eyes, and does not need to use a microscope; the manufacturing raw materials (optical fiber and gelatin) are easy to obtain, safe, environment-friendly, anti-electromagnetic interference and low in price, and the structure can be manufactured by one optical fiber; excellent performance, high Q value, low loss and good mechanical stability. The sensitivity of the invention is higher under the environment with higher humidity, and the invention can be applied to the fields of agricultural processing monitoring, industrial process control and the like.
Drawings
FIG. 1 is an embodiment of a humidity sensor;
FIG. 2 is a spectrum of a humidity sensor;
FIG. 3 is humidity sensitivity;
fig. 4 is a response time.
Detailed Description
The present invention will be described in further detail with reference to the accompanying drawings and specific embodiments.
Preparing a micro-nano optical fiber multi-ring resonator:
the single mode fiber is heated to the working temperature (about 1300 ℃) by utilizing a ceramic micro-electric couple heater, then the single mode fiber is heated to the molten state and drawn into the micro-nano fiber, the diameter of the cone waist is 2.7 mu m, and the length is 10 mm. After a micro-nano optical fiber is prepared, the left end of the micro-nano optical fiber is fixed on an optical fiber displacement three-dimensional platform, and the right end of the micro-nano optical fiber rotates 180 degrees along the axis anticlockwise so as to ensure that the optical fiber keeps a straight shape and does not intersect. Moving the right portion of the fiber to the left, the tapered portions will intersect due to internal stresses. One of the intersecting pigtails is threaded into a loop generated by the intersection by using a probe to form a multi-loop structure consisting of a single-loop resonator and a curved Mach-Zehnder interferometer.
Implementation of the humidity sensor:
the manufactured micro-nano optical fiber multi-ring resonator is horizontally arranged on the MgF with low refractive index2Low-refractive index uv gel (refractive index of about 1.34) was dropped on the glass (about 1.37) except for the mach-zehnder interferometer arms, including the end of the tapered fiber, and cured with an ultraviolet lamp. Preparing 1% agarose gel solution, uniformly performing ultrasonic treatment, heating, dripping the agarose gel solution onto the Mach-Zehnder interference arm by using an injector, and airing at room temperature until a uniform film is formed. And welding the tail fiber at one side of the prepared humidity sensor with a white light source by using an optical fiber welding machine, and welding the tail fiber at the other side of the prepared humidity sensor with a spectrometer by using the optical fiber welding machine. The white light source is turned on to measure its output spectrum. The prepared humidity sensor presents an output spectrum with obvious periodic envelopes, which indicate that vernier effect is generated.
Measuring humidity:
keeping the light path of the measured output spectrum unchanged, and putting the prepared humidity sensor into a temperature and humidity control box. The temperature was constant at 25 ℃ and the initial relative humidity was 60%. The change in spectral transmission at different relative humidities was measured.
Measuring response time:
and fusing the tail fiber at one side of the humidity sensor with the Raman fiber laser by using an optical fiber welding machine, and fusing the tail fiber at the other side of the humidity sensor with the oscilloscope by using the optical fiber welding machine. The sensor was placed in a clear plastic box, where the humidity was maintained at 65% by the humidifier. When the initial strength measured by the oscilloscope is stable, the cover of the plastic box is quickly opened, the humidity in the box is quickly reduced to be consistent with the indoor humidity, and the measured response time is 102 ms.
The invention relates to a high-sensitivity humidity sensor based on a micro-nano optical fiber multi-ring resonator. The invention consists of the following parts: 1. and (5) preparing a micro-nano optical fiber multi-ring resonator. 2. The construction of the optical path of the high-sensitivity humidity sensor is realized. The invention has the advantages of simple preparation, high performance, low loss and low cost, prepares the humidity sensor by utilizing vernier effect and the humidity sensitivity characteristic of agarose gel, has high sensitivity, quick response and larger measurement range, and can be used in various fields needing to measure dynamic humidity, such as chemical production, food processing and the like.
Claims (1)
1. A high-sensitivity humidity sensor based on a micro-nano optical fiber multi-ring resonator is characterized by comprising two parts:
preparing a micro-nano optical fiber multi-ring resonator:
heating the single mode fiber to a working temperature (about 1300 ℃) by using a ceramic micro-electric couple heater, heating the single mode fiber to a molten state, and drawing the single mode fiber into a micro-nano fiber, wherein the diameter of a cone waist is 2.7 mu m, and the length of the cone waist is 10 mm; after preparing a micro-nano optical fiber, fixing the left end of the micro-nano optical fiber on an optical fiber displacement three-dimensional platform, and rotating the right end of the micro-nano optical fiber along the axis thereof by 180 degrees in an anticlockwise manner so as to ensure that the optical fiber keeps a straight shape and is not crossed; moving the right portion of the fiber to the left, the tapered portions will intersect due to internal stresses; one of the intersected tail fibers is penetrated into a loop generated by intersection by using a probe to form a multi-loop structure consisting of a single-loop resonator and a bent Mach-Zehnder interferometer;
implementation of the humidity sensor:
the manufactured micro-nano optical fiber multi-ring resonator is horizontally arranged on the MgF with low refractive index2Dropping ultraviolet glue with low refractive index (refractive index is about 1.34) on the glass (about 1.37) except the Mach-Zehnder interference arms, including the tail end of the tapered optical fiber, and curing by using an ultraviolet lamp; preparing 1% agarose gel solution, uniformly performing ultrasonic treatment, heating, dripping the agarose gel solution onto the Mach-Zehnder interference arm by using an injector, and airing at room temperature until a uniform film is formed; welding the tail fiber at one side of the prepared humidity sensor with a white light source by using an optical fiber welding machine, and welding the tail fiber at the other side of the prepared humidity sensor with a spectrometer by using the optical fiber welding machine; the white light source is turned on to measure its output spectrum.
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Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| RU2117934C1 (en) * | 1996-09-27 | 1998-08-20 | Московский государственный университет леса | Fiber-optic self-excited oscillator |
| CN105259139A (en) * | 2015-10-22 | 2016-01-20 | 中国计量学院 | Tilted fiber bragg grating humidity sensor based on oxidized graphene and agarose composite film |
| JP2016061632A (en) * | 2014-09-17 | 2016-04-25 | 国立研究開発法人物質・材料研究機構 | Humidity sensor |
| CN106290170A (en) * | 2016-07-27 | 2017-01-04 | 哈尔滨工业大学深圳研究生院 | A kind of supersensitive light fibre humidity transducer based on full agar F P chamber |
| CN108318452A (en) * | 2018-03-26 | 2018-07-24 | 福建硅光通讯科技有限公司 | A kind of cone of intensity modulation type four light fibre humidity transducer |
| CN111693492A (en) * | 2020-06-05 | 2020-09-22 | 哈尔滨工程大学 | Ultrafast respiration humidity sensor based on micro-nano optical fiber multi-ring resonator and preparation method |
| CN213456655U (en) * | 2020-10-12 | 2021-06-15 | 中国计量大学 | Interference type probe type optical fiber humidity sensor based on hollow optical fiber |
-
2021
- 2021-06-22 CN CN202110690061.5A patent/CN113433093A/en active Pending
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| RU2117934C1 (en) * | 1996-09-27 | 1998-08-20 | Московский государственный университет леса | Fiber-optic self-excited oscillator |
| JP2016061632A (en) * | 2014-09-17 | 2016-04-25 | 国立研究開発法人物質・材料研究機構 | Humidity sensor |
| CN105259139A (en) * | 2015-10-22 | 2016-01-20 | 中国计量学院 | Tilted fiber bragg grating humidity sensor based on oxidized graphene and agarose composite film |
| CN106290170A (en) * | 2016-07-27 | 2017-01-04 | 哈尔滨工业大学深圳研究生院 | A kind of supersensitive light fibre humidity transducer based on full agar F P chamber |
| CN108318452A (en) * | 2018-03-26 | 2018-07-24 | 福建硅光通讯科技有限公司 | A kind of cone of intensity modulation type four light fibre humidity transducer |
| CN111693492A (en) * | 2020-06-05 | 2020-09-22 | 哈尔滨工程大学 | Ultrafast respiration humidity sensor based on micro-nano optical fiber multi-ring resonator and preparation method |
| CN213456655U (en) * | 2020-10-12 | 2021-06-15 | 中国计量大学 | Interference type probe type optical fiber humidity sensor based on hollow optical fiber |
Non-Patent Citations (1)
| Title |
|---|
| 邵敏 等: "光纤折射率与湿度传感器", vol. 1, 北京国防工业出版社, pages: 11 - 12 * |
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