CN113418396B - Furnace door structure of reaction furnace and reaction furnace - Google Patents
Furnace door structure of reaction furnace and reaction furnace Download PDFInfo
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- CN113418396B CN113418396B CN202110694283.4A CN202110694283A CN113418396B CN 113418396 B CN113418396 B CN 113418396B CN 202110694283 A CN202110694283 A CN 202110694283A CN 113418396 B CN113418396 B CN 113418396B
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- 239000010453 quartz Substances 0.000 claims abstract description 96
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 96
- 238000000034 method Methods 0.000 claims abstract description 58
- 230000008569 process Effects 0.000 claims abstract description 58
- 238000007789 sealing Methods 0.000 claims abstract description 17
- 230000000712 assembly Effects 0.000 claims description 7
- 238000000429 assembly Methods 0.000 claims description 7
- 230000000149 penetrating effect Effects 0.000 claims description 3
- 238000007790 scraping Methods 0.000 abstract description 7
- 239000007789 gas Substances 0.000 description 21
- 230000007246 mechanism Effects 0.000 description 10
- 239000002912 waste gas Substances 0.000 description 6
- 230000002035 prolonged effect Effects 0.000 description 4
- 230000009471 action Effects 0.000 description 3
- 230000033001 locomotion Effects 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 238000007599 discharging Methods 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 239000002002 slurry Substances 0.000 description 2
- 239000002699 waste material Substances 0.000 description 2
- 238000005299 abrasion Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
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Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D1/00—Casings; Linings; Walls; Roofs
- F27D1/18—Door frames; Doors, lids, removable covers
- F27D1/1858—Doors
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D17/00—Arrangements for using waste heat; Arrangements for using, or disposing of, waste gases
- F27D17/001—Extraction of waste gases, collection of fumes and hoods used therefor
- F27D17/002—Details of the installations, e.g. fume conduits or seals
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67098—Apparatus for thermal treatment
- H01L21/67109—Apparatus for thermal treatment mainly by convection
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Physics & Mathematics (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Environmental & Geological Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Furnace Details (AREA)
- Muffle Furnaces And Rotary Kilns (AREA)
Abstract
The application discloses furnace door structure and reaction furnace of reaction furnace, the reaction furnace includes the process tube and sets up the exhaust gas collection device at the process tube open end, the furnace door structure includes first furnace door, second furnace door and location axle subassembly, first furnace door is used for sealing the tip that exhaust gas collection device deviates from the process tube, the second furnace door is used for sealing the tip that the process tube is close to exhaust gas collection device, location axle subassembly includes positioning tube, quartz rod and sleeve; the positioning tube is sleeved at one end of the quartz rod, and the other end of the quartz rod is clamped at the second furnace door; the sleeve is sleeved on the quartz rod and is positioned between the positioning tube and the second furnace door, and the sleeve is elastically connected to the positioning tube so as to clamp the second furnace door with the other end of the quartz rod, so that the second furnace door is always kept in a vertical state; the first furnace door is arranged in the middle of the positioning tube. The furnace door structure of the reaction furnace can keep the second furnace door in a vertical state all the time in the moving process, and avoid scraping and collision with the SIC paddle and the quartz rod in the opening and closing process of the second furnace door.
Description
Technical Field
The invention belongs to the technical field of semiconductors, and particularly relates to a furnace door structure of a reaction furnace and the reaction furnace.
Background
The horizontal diffusion furnace is an important technological device for carrying out diffusion technology on a semiconductor production line, and mainly comprises a heating furnace body, a quartz tube, a gas circuit system, a feeding device and the like. The cantilever push-pull boat with the furnace door mechanism is an important device of the reaction furnace, and the furnace door mechanism is used for sealing a quartz tube and an exhaust gas collecting box in a gas path system. As shown in fig. 1, in the process of feeding a wafer to be processed into a reaction chamber, a stepping motor 11 drives a rack 1 to linearly move towards a quartz tube through a spiral transmission system 12, a SIC paddle 8 fixed on the rack 1 automatically puts a loaded silicon wafer into the quartz tube 14, a furnace door mechanism 13 is in contact with the quartz tube 14 so as to realize the closing operation of a furnace door, after the process is finished, a cantilever push-pull boat reversely linearly moves to take out the silicon wafer of which the process flow is finished, and the furnace door is opened along with the reverse movement of the cantilever push-pull boat.
In the prior art, the furnace door mechanism comprises a metal furnace door and a quartz furnace door, and the quartz furnace door is mounted on a quartz rod connected with the rack 1 in a hole shaft fit manner. In the process of closing and opening the furnace door, when the quartz furnace door contacts the quartz tube 14 and is not completely attached, a certain included angle exists between the quartz furnace door and the vertical plane, so that scraping and collision between the quartz furnace door and the SIC paddle and between the quartz furnace door and the quartz rod are caused, part abrasion is caused, and the service life is reduced.
Therefore, a novel furnace door structure of the reaction furnace needs to be designed, so that scraping and collision between a quartz furnace door and the SIC paddle and between the quartz furnace door and the quartz rod can be avoided in the furnace door opening process of the reaction furnace, and the service lives of the furnace door, the quartz rod and the SIC paddle are prolonged.
Disclosure of Invention
The invention aims to provide a furnace door structure of a reaction furnace and the reaction furnace, which can prevent a quartz furnace door from scraping and colliding with a SIC paddle and a quartz rod in the process of opening the furnace door of the reaction furnace, and prolong the service lives of the furnace door, the quartz rod and the SIC paddle.
In order to achieve the above object, the present invention provides a furnace door structure of a reaction furnace, the reaction furnace including a process tube and an exhaust gas collecting device disposed at an open end of the process tube, the furnace door structure including a first furnace door for sealing an end of the exhaust gas collecting device facing away from the process tube, a second furnace door for sealing an end of the process tube adjacent to the exhaust gas collecting device, and a positioning shaft assembly including a positioning tube, a quartz rod, and a sleeve; wherein,,
the positioning pipe is sleeved at one end of the quartz rod;
the other end of the quartz rod is clamped with the second furnace door;
the sleeve is sleeved on the quartz rod and is positioned between the positioning tube and the second furnace door, and the sleeve is elastically connected to the positioning tube so as to clamp the second furnace door with the other end of the quartz rod;
the first furnace door is arranged in the middle of the positioning tube.
Preferably, the positioning shaft assembly further comprises a first elastic element, wherein a stepped through hole penetrating through the positioning tube along the axial direction is formed in the positioning tube, the positioning tube comprises a large-diameter hole section and a small-diameter hole section, the quartz rod penetrates through the small-diameter hole section, the sleeve is inserted into the large-diameter hole section, the first elastic element is sleeved on the quartz rod, and two ends of the first elastic element are respectively connected with the bottom of the large-diameter hole section and the end of the sleeve.
Preferably, the second furnace door is made of quartz, a gourd-shaped hole is formed in the surface, facing the quartz rod, of the second furnace door, the gourd-shaped hole comprises a large hole and a small hole, and a clamping groove corresponding to the gourd-shaped hole is formed in the second furnace door.
Preferably, the other end of the quartz rod is provided with a cylindrical boss, and the boss of the quartz rod can pass through the large hole to the clamping groove and be clamped by the small hole.
Preferably, the diameter of the large hole of the gourd-shaped hole is larger than the outer diameter of the boss, and the diameter of the small hole is smaller than the outer diameter of the boss.
Preferably, the sleeve is made of quartz, a shaft shoulder is arranged at the other end of the sleeve, and the end face of the shaft shoulder is tightly attached to the surface of the second furnace door.
Preferably, the outer diameter of the shaft shoulder is larger than the diameter of the small hole of the clamping groove.
Preferably, paddle holes are formed in the first furnace door and the second furnace door respectively and are used for connecting SIC paddles of the reaction furnace.
Preferably, the positioning shaft assembly further comprises a second elastic element and a positioning circular plate, the second elastic element is sleeved on the outer wall of the positioning tube, one end of the second elastic element is connected to one end, far away from the second furnace door, of the positioning tube, the other end of the second elastic element is connected to the first furnace door, and the positioning circular plate is sleeved on the outer wall of the positioning tube and is attached to the surface, facing the second furnace door, of the first furnace door.
Preferably, the locating shaft assemblies are arranged in a pair, and the locating shaft assemblies are arranged on the rack of the reaction furnace in parallel.
The invention also provides a reaction furnace, which comprises the furnace door structure of the reaction furnace, a process pipe and an exhaust gas collecting device arranged at the opening end of the process pipe, wherein the first furnace door is used for sealing one end of the exhaust gas collecting device, which is far away from the process pipe, and the second furnace door is used for sealing one end of the process pipe, which is close to the exhaust gas collecting device.
The furnace door structure of the reaction furnace has the beneficial effects that the sleeve and the quartz rod form the clamping mechanism, so that the second furnace door is always kept in a vertical state in the moving process, the scraping and collision with the SIC paddle and the quartz rod in the opening and closing process of the second furnace door are avoided, and the service lives of the second furnace door, the quartz rod and the SIC paddle are prolonged.
Additional features and advantages of the invention will be set forth in the detailed description which follows.
Drawings
The foregoing and other objects, features and advantages of the invention will be apparent from the following more particular descriptions of exemplary embodiments of the invention as illustrated in the accompanying drawings wherein like reference numbers generally represent like parts throughout the exemplary embodiments of the invention.
FIG. 1 shows a schematic diagram of a prior art cantilever push-pull boat with oven door mechanism;
FIG. 2 illustrates a cross-sectional view of a door structure of a reaction furnace according to an embodiment of the present invention;
fig. 3a illustrates a schematic structural view of a second door in a door structure of a reaction furnace according to an exemplary embodiment of the present invention, and fig. 3b illustrates a sectional view of the second door in A-A direction of fig. 3 a;
fig. 4 illustrates a schematic structural view of a quartz rod in a door structure of a reaction furnace according to an exemplary embodiment of the present invention;
fig. 5a illustrates a structural schematic view of a sleeve in a door structure of a reaction furnace according to an exemplary embodiment of the present invention, and fig. 5b illustrates a sectional view of the sleeve;
reference numerals illustrate:
1. the device comprises a rack, 2, a positioning pipe, 3, a first furnace door, 4, a quartz rod, 5, a second furnace door, 51, a gourd-shaped groove, 6, a sleeve, 7, a first elastic element, 8, a SIC paddle, 9, a second elastic element, 10, a positioning circular plate, 11, a motor, 12, a screw transmission system, 13, a furnace door mechanism, 14 and a quartz pipe.
Detailed Description
Preferred embodiments of the present invention will be described in more detail below. While the preferred embodiments of the present invention are described below, it should be understood that the present invention may be embodied in various forms and should not be limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the invention to those skilled in the art.
In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings are merely for convenience in describing the present invention and simplifying the description, and do not indicate or imply that the device or element being referred to must have a specific orientation, be configured and operated in a specific orientation, and therefore should not be construed as limiting the present invention.
In order to solve the problems existing in the prior art, the invention provides a furnace door structure of a reaction furnace, the reaction furnace comprises a process pipe and an exhaust gas collecting device arranged at the opening end of the process pipe, the furnace door structure comprises a first furnace door 3, a second furnace door 5 and a positioning shaft assembly, the first furnace door 3 is used for sealing the end part of the exhaust gas collecting device, which is far away from the process pipe, the second furnace door 5 is used for sealing the end part of the process pipe, which is close to the exhaust gas collecting device, the process pipe and the second furnace door 5 form a reaction chamber, the exhaust gas collecting device is respectively communicated with the reaction chamber and an exhaust pipeline through a gas path system and is used for collecting exhaust gas discharged from the reaction chamber and discharging the exhaust gas through the exhaust pipeline; the reaction furnace further comprises a rack 1, the rack 1 is driven by a driving mechanism to do linear motion along the direction facing the reaction chamber, a SIC paddle 8 is arranged on the rack 1, a furnace door structure is arranged on the rack 1 of the reaction furnace, fig. 2 shows a cross-section view of the furnace door structure, a first furnace door 3 is used for sealing the end part of the waste gas collecting device, which is far away from the process pipe, as shown in fig. 2, a second furnace door 5 is used for sealing the end part of the process pipe, which is close to the waste gas collecting device, and a positioning shaft assembly comprises a positioning pipe 2, a quartz rod 4 and a sleeve 6; wherein,,
the positioning tube 2 is sleeved at one end of the quartz rod 4, and the other end of the quartz rod 4 is clamped at the second furnace door 5;
the sleeve 6 is sleeved on the quartz rod 4 and is positioned between the positioning tube 2 and the second furnace door 5, and the sleeve 6 is elastically connected to the positioning tube so as to clamp the second furnace door with the other end of the quartz rod 4;
the first furnace door 3 is arranged in the middle of the positioning tube 2.
According to the furnace door structure of the reaction furnace, the sleeve and the quartz rod form the clamping mechanism, so that the second furnace door 5 is always kept in a vertical state in the moving process, scraping and collision with the SIC paddle 8 and the quartz rod 4 in the opening and closing process of the second furnace door 5 are avoided, and the service lives of the second furnace door 5, the quartz rod 4 and the SIC paddle 8 are prolonged.
In this embodiment, the positioning shaft assembly further includes a first elastic element 7, a stepped through hole penetrating through the positioning tube 2 along the axial direction is provided in the positioning tube 2, the stepped through hole comprises a large-diameter hole section and a small-diameter hole section, the quartz rod 4 penetrates through the small-diameter hole section, the sleeve 6 is inserted into the large-diameter hole section, the first elastic element 7 is sleeved on the quartz rod 4, and two ends of the first elastic element 7 are respectively connected with the bottom of the large-diameter hole section and the end of the sleeve 6.
The positioning tube 2 is of a hollow structure and is fixedly connected with the quartz rod 4, the first elastic element 7 is positioned in the positioning tube 2, the sleeve 6 is inserted into the positioning tube 2, the quartz rod 4 passes through the sleeve 6 and the positioning tube 2, and the sleeve 6 is matched with the quartz rod 4 to form a clamping structure under the action of the first elastic element 7, so that the second furnace door 5 is always kept in a vertical state, and scraping and collision are avoided.
In this embodiment, the first elastic element 7 may be a spring, for providing thrust to the sleeve 6, and the stepped through hole structure provides an installation space for the first elastic element 7 and limits the first elastic element 7. In other embodiments of the invention, the first elastic element 7 may also be limited by a fixing member provided on the outer wall of the quartz rod 4.
Fig. 3a shows a schematic structural view of a second furnace door, fig. 3b shows a cross-sectional view of the second furnace door, and as shown in fig. 3a and 3b, in this embodiment, the second furnace door 5 is made of quartz, a gourd-shaped hole is provided on the surface of the second furnace door 5 facing the quartz rod 4, the gourd-shaped hole comprises a large hole and a small hole, a clamping groove 51 corresponding to the gourd-shaped hole is provided on the second furnace door, the gourd-shaped hole is communicated with the clamping groove 51, and the quartz rod 4 is used for extending into the clamping groove 51 and being clamped by the gourd-shaped hole.
Fig. 4 shows a schematic structural view of the quartz rod, and as shown in fig. 4, the other end of the quartz rod 4 is provided with a cylindrical boss, and the boss of the quartz rod 4 can pass through the large hole to the clamping groove 51 and be clamped by the small hole. When the quartz rod 4 is assembled with the second furnace door 5, the boss of the quartz rod 4 extends into the clamping groove 51 through the large hole, then is horizontally moved upwards and clamped into the small hole, and the left side face of the boss of the quartz rod 4 is tightly attached to the right side face of the small hole of the second furnace door 5 through the first elastic element 7, so that the second furnace door 5 is clamped. The diameter of the big hole of the gourd-shaped hole is larger than the outer diameter of the boss, and the diameter of the small hole is smaller than the outer diameter of the boss, so that the quartz rod is inserted into the big hole and clamped in the small hole.
Fig. 5a shows a schematic structural view of the sleeve, fig. 5b shows a cross-sectional view of the sleeve, as shown in fig. 5a and 5b, the sleeve 6 is made of quartz, a shaft shoulder is arranged at the other end of the sleeve 6, the end face of the shaft shoulder is tightly attached to the surface of the second furnace door 5, and the shaft shoulder is matched with a boss of the quartz rod 4 together to clamp the second furnace door 5 and clamp the second furnace door 5 under the action of the first elastic element 7.
The shaft shoulder is arranged at the end part of the sleeve 6, which is in contact with the second furnace door 5, to form a flanging structure, and is tightly attached to the second furnace door, the first elastic element 7 provides thrust for the sleeve 6 and transmits the thrust to the boss of the quartz rod 4, the second furnace door 5 is subjected to the reaction force of the boss of the quartz rod 4, the shaft shoulder of the sleeve 6 forms a clamping mechanism with the boss of the quartz rod 4 through the thrust, and the second furnace door 5 is clamped and fixed between the quartz rod 4 and the sleeve 6, so that the second furnace door 5 always keeps in a vertical state.
In the closing process of the second furnace door 5, the second furnace door 5 moves from left to right towards the process pipe, when the second furnace door 5 does not contact the process pipe, the second furnace door 5 is simultaneously subjected to the acting forces with equal size and opposite direction of the quartz rod 4 and the sleeve 6, and the whole closing stroke is always kept in a vertical state, so that the second furnace door 5 does not scrape and collide with the SIC paddle 8 and the quartz rod 4 in the whole closing process of the second furnace door 5; when the second furnace door 5 moves from the left side to the right side of the process pipe to be in contact with the process pipe, the sleeve 6 gives the second furnace door 5a right pushing force under the action of the first elastic element 7, so that the second furnace door 5 and the process pipe are tightly closed and sealed.
In the process of opening the second furnace door 5, the second furnace door 5 is simultaneously subjected to the acting forces of equal size and opposite direction of the quartz rod 4 and the sleeve 6, the second furnace door 5 is always kept in a vertical state in the whole door opening stroke, and the second furnace door is not scraped and collided with the SIC paddle 8 and the quartz rod 4, so that the service lives of the SIC paddle 8 and the quartz rod 4 are prolonged, the maintenance and replacement rate is reduced, and the cost is reduced.
The outer diameter of the shaft shoulder is larger than the diameter of the small hole of the clamping groove 51, so that the shaft shoulder of the sleeve 6 and the boss of the quartz rod 4 can clamp the second furnace door 5 to be positioned at the edge part of the gourd-shaped hole.
The first furnace door 3 and the second furnace door 5 are respectively provided with a paddle hole for connecting SIC paddles 8 of the reaction furnace. The slurry holes can be arranged in the middle of the first furnace door 3 and the second furnace door 5, and the SIC paddles 8 on the reaction furnace sequentially penetrate through the slurry holes on the first furnace door 3 and the second furnace door 5 and are used for conveying objects to be processed into the process tube.
In this embodiment, as shown in fig. 2, the positioning shaft assembly further includes a second elastic element 9 and a positioning circular plate 10, where the second elastic element 9 is sleeved on the outer wall of the positioning tube 2, one end of the second elastic element is connected to one end of the positioning tube 2 far away from the second furnace door 5, the other end of the second elastic element is connected to the first furnace door 3, and the positioning circular plate 10 is sleeved on the outer wall of the positioning tube 2 and is attached to the surface of the first furnace door 3 facing the second furnace door 5. The first door 3 is made of metal and is fixed to the positioning tube 2 by the clamping of the second elastic member 9 and the positioning disk 10.
In this embodiment, the second elastic element 9 may be a spring. The second elastic element 9 is compressed in cooperation with the first elastic element 7 to ensure that the first furnace door 3 and the second furnace door 5 are in close contact and sealed with the exhaust gas collecting device and the process tube of the respective reaction furnace.
In this embodiment, the pair of positioning shaft assemblies are arranged in parallel on the rack 1 of the reaction furnace. The SIC paddle 8 of the reaction furnace is arranged between a pair of positioning shaft assemblies, penetrates through the first furnace door 3 and the second furnace door 5 to convey articles to be processed to the reaction chamber, the positioning pipe 2 is symmetrically fixed on the rack 1, the clamping grooves 51 on the second furnace door 5 are a pair of symmetrically arranged, and bosses of quartz rods 4 of the pair of positioning shaft assemblies respectively extend into the pair of clamping grooves 51 and are clamped by the gourd-shaped holes; the first door 3 is provided with a pair of symmetrically arranged connecting holes, and the positioning pipe 2 of each positioning shaft assembly passes through one connecting hole.
The invention also provides a reaction furnace, which comprises the furnace door structure of the reaction furnace, a process pipe and an exhaust gas collecting device arranged at the opening end of the process pipe, wherein the first furnace door 3 of the furnace door structure is used for sealing one end of the exhaust gas collecting device, which is far away from the process pipe, and the second furnace door 5 of the furnace door structure is used for sealing one end of the process pipe, which is close to the exhaust gas collecting device.
The furnace door structure is arranged on the rack 1 of the reaction furnace and moves along the direction towards the process pipe for the linear movement of the rack 1, the second furnace door 5 is arranged between the waste gas collecting device and the process pipe, the SIC paddle 8 is arranged on the rack 1 and penetrates through the second furnace door 5, and when the second furnace door 5 seals the process pipe, the SIC paddle 8 stretches into the process pipe to convey objects to be processed. The process tube may be a quartz tube. And the waste gas collecting device is respectively communicated with the reaction chamber and the waste discharge pipeline through the gas path system, and is used for collecting waste gas discharged by the reaction chamber and discharging the waste gas through the waste discharge pipeline.
The foregoing description of embodiments of the invention has been presented for purposes of illustration and description, and is not intended to be exhaustive or limited to the embodiments disclosed. Many modifications and variations will be apparent to those of ordinary skill in the art without departing from the scope and spirit of the various embodiments described.
Claims (11)
1. The furnace door structure of the reaction furnace comprises a process pipe and an exhaust gas collecting device arranged at the opening end of the process pipe, the furnace door structure comprises a first furnace door (3), a second furnace door (5) and a positioning shaft assembly, the first furnace door (3) is used for sealing the end part of the exhaust gas collecting device, which is far away from the process pipe, and the second furnace door (5) is used for sealing the end part of the process pipe, which is close to the exhaust gas collecting device, and the reaction furnace is characterized in that the positioning shaft assembly comprises a positioning pipe (2), a quartz rod (4) and a sleeve (6); wherein,,
the positioning tube (2) is sleeved at one end of the quartz rod (4);
the other end of the quartz rod (4) is clamped with the second furnace door (5);
the sleeve (6) is sleeved on the quartz rod (4) and is positioned between the positioning tube (2) and the second furnace door (5), and the sleeve (6) is elastically connected to the positioning tube (2) so as to clamp the second furnace door (5) with the other end of the quartz rod (4), so that the second furnace door (5) is always kept in a vertical state;
the first furnace door (3) is arranged in the middle of the positioning tube (2);
the positioning shaft assembly further comprises a first elastic element (7), wherein two ends of the first elastic element (7) are respectively connected with the positioning tube (2) and the sleeve (6) and used for providing thrust for the sleeve (6).
2. The furnace door structure of the reaction furnace according to claim 1, wherein the positioning tube (2) is internally provided with a stepped through hole penetrating through the positioning tube (2) along the axial direction, the stepped through hole comprises a large-diameter hole section and a small-diameter hole section, the quartz rod (4) penetrates through the small-diameter hole section, the sleeve (6) is inserted into the large-diameter hole section, the first elastic element (7) is sleeved on the quartz rod (4), and two ends of the first elastic element (7) are respectively connected with the bottom of the large-diameter hole section and the end part of the sleeve (6).
3. Furnace door structure of a reaction furnace according to claim 2, characterized in that the second furnace door (5) is made of quartz, the surface of the second furnace door (5) facing the quartz rod (4) is provided with a gourd-shaped hole, the gourd-shaped hole comprises a big hole and a small hole, the second furnace door (5) is provided with a clamping groove (51) corresponding to the gourd-shaped hole, and the other end of the quartz rod (4) is clamped in the clamping groove (51).
4. The furnace door structure of the reaction furnace according to claim 3, characterized in that the other end of the quartz rod (4) is provided with a column-shaped boss, and the boss of the quartz rod (4) can pass through the large hole into the clamping groove (51) and be clamped by the small hole.
5. The door structure of the reaction furnace according to claim 4, wherein the diameter of the large hole of the gourd-shaped hole is larger than the outer diameter of the boss, and the diameter of the small hole is smaller than the outer diameter of the boss.
6. Furnace door structure of a reaction furnace according to claim 4, characterized in that the sleeve (6) is made of quartz, the other end of the sleeve (6) is provided with a shaft shoulder, and the end face of the shaft shoulder is tightly attached to the surface of the second furnace door (5).
7. The door structure of the reaction furnace according to claim 6, wherein an outer diameter of the shoulder is larger than a diameter of the small hole of the gourd-shaped hole.
8. Furnace door structure according to claim 1, characterized in that the first furnace door (3) and the second furnace door (5) are provided with paddle holes for connecting SIC paddles (8) of the reaction furnace.
9. The furnace door structure of the reaction furnace according to claim 1, wherein the positioning shaft assembly further comprises a second elastic element (9) and a positioning circular plate (10), the second elastic element (9) is sleeved on the outer wall of the positioning tube (2), one end of the second elastic element is connected with one end, far away from the second furnace door (5), of the positioning tube (2), the other end of the second elastic element is connected with the first furnace door (3), and the positioning circular plate (10) is sleeved on the outer wall of the positioning tube (2) and is attached to the surface, facing the second furnace door (5), of the first furnace door (3).
10. The furnace door structure of the reaction furnace according to claim 1, wherein the positioning shaft assemblies are a pair, and the pair of positioning shaft assemblies are arranged on a rack (1) of the reaction furnace in parallel.
11. A reaction furnace, characterized by comprising a furnace door structure of the reaction furnace according to any one of claims 1-10, a process tube and an exhaust gas collecting device arranged at the open end of the process tube, wherein the first furnace door (3) is used for sealing one end of the exhaust gas collecting device facing away from the process tube, and the second furnace door (5) is used for sealing one end of the process tube close to the exhaust gas collecting device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110694283.4A CN113418396B (en) | 2021-06-22 | 2021-06-22 | Furnace door structure of reaction furnace and reaction furnace |
Applications Claiming Priority (1)
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| DE202012003380U1 (en) * | 2012-03-16 | 2012-05-15 | Mwt Mikrowellen Labor Technik Ag | Oven with refractory insert |
| CN102610696A (en) * | 2012-03-22 | 2012-07-25 | 常州亿晶光电科技有限公司 | Diffusion process for solar cell tube furnace |
| CN209989503U (en) * | 2019-05-10 | 2020-01-24 | 青岛华旗科技有限公司 | Novel quartz furnace device applied to oxidation diffusion furnace |
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