CN201302377Y - Furnace door closing device for horizontal furnace tube - Google Patents
Furnace door closing device for horizontal furnace tube Download PDFInfo
- Publication number
- CN201302377Y CN201302377Y CNU2008201525844U CN200820152584U CN201302377Y CN 201302377 Y CN201302377 Y CN 201302377Y CN U2008201525844 U CNU2008201525844 U CN U2008201525844U CN 200820152584 U CN200820152584 U CN 200820152584U CN 201302377 Y CN201302377 Y CN 201302377Y
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- Prior art keywords
- fire door
- locking device
- boiler tube
- horizontal
- support column
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Abstract
The utility model belongs to the field of microelectronics equipment, and particularly relates to a furnace door closing device for a horizontal furnace tube. The furnace door closing device for the horizontal furnace tube comprises a furnace door with three or more support pillars, a support pillar adjusting device connected with the support pillars on the furnace door, and a paddle which penetrates through the furnace door. By adjusting the support pillar adjusting device, the furnace tube can be better meshed with the port of the horizontal furnace tube in the same plane, so that sealing effect is better. Meanwhile, the adjustment of the support pillar adjusting device ensures that the furnace door is vertical to the horizontal arranged paddle to the extent that abrasion can be avoided between paddles as well as between the paddle and a square hole on the furnace door which allows the paddle to pass through, the sealing effect of a furnace door closing system is improved and the service life of the furnace door closing system is prolonged.
Description
Technical field
The utility model belongs to microelectronics equipment field, is specifically related to a kind of fire door locking device of horizontal boiler tube.
Background technology
In wafer manufactory, diffusion technique is the very important processing step in the chip manufacturing, mainly realizes by diffusion furnace.During diffusion, wafer places the boiler tube of diffusion furnace by brilliant boat, and the boiler tube mouth seals by fire door, realizes the Position Control of brilliant boat in the oar of fire door by break-through.After charging into diffuse source gas in the boiler tube, under the process conditions of uniform temperature and time, wafer is realized diffusing, doping.
Wherein, the sealing effectiveness of fire door can influence the stability of the concentration value of diffuse source gas in boiler tube, and therefore the stability to diffusion technique has material impact.The fire door locking device of the horizontal boiler tube of prior art as depicted in figs. 1 and 2.Figure 1 shows that the face of the facing schematic diagram of the fire door locking device of the horizontal boiler tube of prior art, as shown in Figure 1, the fire door locking device comprises the square opening 12 on support column 11 on fire door 10, the fire door, the square opening 12 on the fire door, boiler tube 30, the break-through fire door and connects the oar 20 of the brilliant boat (not shown) in the boiler tube 30.The face schematic diagram is looked on a left side that Figure 2 shows that fire door, as shown in Figure 1, has square opening 12 and two mutual horizontal location to be fixed in the support column 11 of fire door 10 on the fire door 10.In conjunction with illustrated in figures 1 and 2,, fire door 10 contacted with the port of boiler tube 30 realize the boiler tube sealing by pushing away two support columns 11.Wherein support column does not have adjusting device, and the plane contact characteristic of the port of fire door 10 and boiler tube 30 mainly realizes the active force of support column by the adjustment of operating personnel's feel; Simultaneously since two support columns 11 be horizontal fixed on fire door 10, fire door is difficult to adjust in the dip deviation of vertical direction, thereby is difficult to guarantee the sealing effectiveness of fire door.Further, because square opening 12 and the tolerance clearance between the oar 20 on the fire door are less, the vertical missing of fire door 10 causes oar 20 not vertical fully with fire door, oar 20 in pumping the process of brilliant boat can and fire door on square opening 12 between produce bigger frictional force, therefore can cause the wearing and tearing of the square opening 12 on oar 20 and the fire door, the further variation of the sealing effectiveness of fire door, the service life of reducing fire door.
The utility model content
The technical problem that the utility model solves is: the sealing effectiveness of the boiler tube of improving the standard and the service life of improving the fire door locking device.
The fire door locking device of horizontal boiler tube disclosed in the utility model comprises:
The fire door that has three or three above support columns;
The support column adjusting device that is connected with support column on the fire door;
And break-through is in the oar of fire door.
Wherein, described support column vertical fixing is on fire door, all support column differences are located distribution point-blank, comprise a square opening on the described fire door, described oar horizontal positioned is also passed through the square opening break-through in fire door, gap between described square opening and the described oar is less, and the tolerance clearance scope is that 0.5mm is to 1.5mm.
Preferably, described fire door locking device also comprises the exhaust air box that is connected on the boiler tube, is used for the discharging of boiler tube gas leakage.
Wherein, the support column adjusting device that is connected with support column on the fire door comprises carrier base, first spring, first bolt and supporting sleeve; Described supporting sleeve is fixedlyed connected by screw thread with support column, described carrier base is connected with supporting sleeve by first bolt, first spring places between carrier base and the supporting sleeve, and described carrier base is fixed on the diffusion furnace by screw thread, and fixing described carrier base position before has adjustability.
Preferably, described support column adjusting device also comprises second spring, second bolt and exhaust air box hermatic door; Exhaust air box hermatic door break-through supporting sleeve also is connected in carrier base by second bolt, second spring place on the carrier base and the exhaust air box hermatic door between.
Technique effect of the present utility model is: by the support column regulating system, can realize difference support column is point-blank regulated, thereby realize fire door perpendicular to horizontal boiler tube, therefore the plane engagement preferably of the port of boiler tube and horizontal boiler tube can reach the better seal effect.Simultaneously, also guarantee the perpendicularity of the oar of fire door and horizontal positioned, therefore can reduce the wearing and tearing between the square opening on oar and the fire door greatly, improved the sealing effectiveness of fire door closed system, and the service life of improving the fire door closed system.
Description of drawings
Fig. 1 is the front view of fire door locking device of the horizontal boiler tube of prior art;
Fig. 2 is the left view of fire door of fire door locking device of the horizontal boiler tube of prior art;
Fig. 3 is the top view of the fire door locking device of a kind of horizontal boiler tube provided by the utility model;
Fig. 4 is the front view of the fire door locking device of a kind of horizontal boiler tube provided by the utility model;
Fig. 5 is the left view of fire door of the fire door locking device of a kind of horizontal boiler tube provided by the utility model;
Fig. 6 is the elevation cross-sectional view of fire door of the fire door locking device of a kind of horizontal boiler tube provided by the utility model;
Fig. 7 is the cross section zoomed-in view in the front view of fire door locking device of a kind of horizontal boiler tube provided by the utility model.
The specific embodiment
For making the purpose of this utility model, technical scheme and advantage clearer, the utility model is described in further detail below in conjunction with accompanying drawing.
Figure 3 shows that the top view of the fire door locking device of a kind of horizontal boiler tube provided by the utility model, Fig. 4 is the front view of the fire door locking device of a kind of horizontal boiler tube provided by the utility model.In conjunction with Fig. 3 and shown in Figure 4, the fire door locking device of horizontal boiler tube comprises: three support columns 11 on fire door 10, the fire door, exhaust air box 50, exhaust air box hermatic door 46, supporting sleeve 47, second spring 42, first spring 43, second bolt 44, first bolt 45, carrier base 41 and oar 20 (not shown)s.Go back partial graph among the figure boiler tube 30 that fire door 10 will seal is shown, exhaust air box 50 is connected with boiler tube 30, boiler tube 30 horizontal positioned, and its port surface is vertical with boiler tube.Port by boiler tube 30 contacts with the parallel engagement of fire door 10, can realize the sealing to boiler tube 30.Wherein, fire door 10 places exhaust air box 50, is generally quartz material, has insulation effect preferably, and fire door 10 has essentially identical flatness with the port of boiler tube 30.Three support column 11 vertical fixing on the fire door are on fire door 10.Exhaust air box hermatic door 46, supporting sleeve 47, second spring 42, first spring 43, second bolt 44, first bolt 45 and the carrier base 41 common regulating systems of forming support column.One end of three supporting sleeves 47 is fixed on three support columns 11 by screw thread respectively, and the other end is connected with carrier base 41 by three first bolts 45.Wherein have four locating holes and four screwed holes on the carrier base 41, the 3rd bolt 411 passes locating hole, and carrier base 41 can move in the boiler tube direction in the horizontal vertical of locating hole; Threaded post 412 is screwed into four screwed holes, can regulate the height of carrier base 41; Hold-down nut 413 and the 3rd bolt 411, the positioning and fixing of realization carrier base 41.Three first springs 43 place and support between pipe box and the carrier base 41.Three hole (not shown)s are arranged in the middle of the exhaust air box hermatic door 46, and pipe box 47 is supported in three of hermatic door 46 break-through, and realizes location between itself and the carrier base 41 by three second bolts 44 and three second springs 42.Three second spring 42 break-through supporting sleeves 47 place between hermatic door 46 and the carrier base 41.Second spring 42 generally is in compressive state, by regulating three second bolts 44 respectively, can regulate the locus of exhaust air box hermatic door 46.First spring 43 also generally is in compressive state, by regulating three first bolts 45 respectively, can regulate the locus of fire door 10.
The left view of the fire door of the fire door locking device of a kind of horizontal boiler tube that Fig. 5 is provided for the utility model embodiment.As shown in Figure 5, on three support column 11 vertical fixing fire doors 10, the triangle location distributes between three support columns 11, therefore can regulate the locus of fire door 10 by regulating support column 11.As long as be not to coexist that the location distributes on the straight line between the support column 11, the quantity of its support column 11 can be greater than three.For example, four support columns can be fixed on the fire door 10 in the distribution of square location, and the quantity of dagger 11 is preferably three among the utility model embodiment as shown in Figure 5.A square opening 12 is arranged in the middle of the fire door 10, and its shape size is by the shape decision of oar 20.
The elevation cross-sectional view of the fire door of the fire door locking device of a kind of horizontal boiler tube that Fig. 6 is provided for the utility model embodiment.As shown in Figure 6, the fire door locking device of horizontal boiler tube also comprises the oar 20 of break-through in fire door 10, in conjunction with shown in Figure 5, the end face of oar 20 is also square-shaped, square opening 12 horizontal positioned in the oar 20 break-through fire doors, tolerance clearance scope between oar 20 and the square opening 12 be 0.5mm to 1.5mm, less tolerance clearance has guaranteed the sealing effectiveness of fire door.One end of oar 20 is connected with brilliant boat (not marking among the figure) in the boiler tube.When the end face of fire door 10 and the boiler tube 30 of level meshes fully, fire door 10 is perpendicular to horizontal plane, also perpendicular to the oar 20 of horizontal positioned, therefore guarantee that oar pumps in the process of brilliant boat in level, gap between oar 20 and the square opening 12 remains in the tolerance clearance scope, avoids the friction between the square opening of oar and fire door.
Fig. 7 is the cross section zoomed-in view in the front view of fire door locking device of a kind of horizontal boiler tube provided by the utility model.As shown in Figure 7, second spring 42 in the support column regulating system and first spring 43, all be in compressive state, be connected by first bolt 45 between supporting sleeve 47 and the carrier base 41, first bolt 45 is screwed into the end of supporting sleeve 47; When regulating first bolt 45, can realize the moving at the diagram left and right directions of reference column 11.
The adjustment process of the fire door locking device of the horizontal boiler tube that present embodiment provides is as follows:
At first, promote fire door and realize that the end face of fire door 10 and boiler tube 30 contacts, when perhaps fire door 10 will contact with boiler tube 30, measure the depth of parallelism of fire door 10 and boiler tube end face; Can regulate fixed support seat 41 by regulating the 3rd bolt 411, threaded post 412 and nut 413.
Secondly, regulate three first bolts 45, realization is to the adjusting of support column 11, thereby realize that the fire door 10 and the port of boiler tube 30 preferably mesh on the plane, the boiler tube of fire door 10 vertical and horizontals, also guaranteed simultaneously the perpendicularity of fire door 10, therefore can avoid the wearing and tearing between the square opening 12 on oar 20 and the fire door with the oar 20 of horizontal positioned.
At last,, realize the locus of exhaust air box hermatic door 46 is regulated by three second bolts 44, thus with the preferably plane engagement of port of exhaust air box 50, prevent to leak from the toxic gas that boiler tube gives off.
Under the situation that does not depart from spirit and scope of the present utility model, can also constitute many very embodiment of big difference that have.Should be appreciated that except as defined by the appended claims, the utility model is not limited at the specific embodiment described in the specification.
Claims (7)
1. the fire door locking device of a horizontal boiler tube is characterized in that, comprising:
The fire door that has three or three above support columns;
The support column adjusting device that is connected with support column on the fire door;
And break-through is in the oar of fire door.
2. fire door locking device according to claim 1 is characterized in that, described support column vertical fixing is on fire door, and all support columns are not located on same straight line and distributed.
3. fire door locking device according to claim 1 is characterized in that, comprises a square opening on the described fire door, and described oar horizontal positioned is also passed through the square opening break-through in fire door.
4. fire door locking device according to claim 3 is characterized in that, the tolerance clearance scope between described square opening and the described oar is that 0.5mm is to 1.5mm.
5. fire door locking device according to claim 1 is characterized in that, described fire door locking device also comprises the exhaust air box that is connected on the boiler tube.
6. fire door locking device according to claim 1 is characterized in that, described support column adjusting device comprises carrier base, first spring, first bolt and supporting sleeve; Described supporting sleeve is fixedlyed connected by screw thread with support column, and described carrier base is connected with supporting sleeve by first bolt, and first spring places between carrier base and the supporting sleeve.
7. fire door locking device according to claim 6 is characterized in that, described support column adjusting device also comprises second spring, second bolt and exhaust air box hermatic door; Exhaust air box hermatic door break-through supporting sleeve also is connected in carrier base by second bolt, second spring place on the carrier base and the exhaust air box hermatic door between.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2008201525844U CN201302377Y (en) | 2008-09-02 | 2008-09-02 | Furnace door closing device for horizontal furnace tube |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2008201525844U CN201302377Y (en) | 2008-09-02 | 2008-09-02 | Furnace door closing device for horizontal furnace tube |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201302377Y true CN201302377Y (en) | 2009-09-02 |
Family
ID=41086003
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNU2008201525844U Expired - Lifetime CN201302377Y (en) | 2008-09-02 | 2008-09-02 | Furnace door closing device for horizontal furnace tube |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN201302377Y (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108193193A (en) * | 2017-12-29 | 2018-06-22 | 刘成 | Process based on difunctional reacting furnace |
| CN112542410A (en) * | 2020-12-22 | 2021-03-23 | 深圳市捷佳伟创新能源装备股份有限公司 | Reaction furnace |
| CN113418396A (en) * | 2021-06-22 | 2021-09-21 | 北京北方华创微电子装备有限公司 | Furnace door structure of reaction furnace and reaction furnace |
-
2008
- 2008-09-02 CN CNU2008201525844U patent/CN201302377Y/en not_active Expired - Lifetime
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108193193A (en) * | 2017-12-29 | 2018-06-22 | 刘成 | Process based on difunctional reacting furnace |
| CN112542410A (en) * | 2020-12-22 | 2021-03-23 | 深圳市捷佳伟创新能源装备股份有限公司 | Reaction furnace |
| CN113418396A (en) * | 2021-06-22 | 2021-09-21 | 北京北方华创微电子装备有限公司 | Furnace door structure of reaction furnace and reaction furnace |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| ASS | Succession or assignment of patent right |
Owner name: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (BEIJING Free format text: FORMER OWNER: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (SHANGHAI) CORPORATION Effective date: 20130204 |
|
| C41 | Transfer of patent application or patent right or utility model | ||
| COR | Change of bibliographic data |
Free format text: CORRECT: ADDRESS; FROM: 201203 PUDONG NEW AREA, SHANGHAI TO: 100076 DAXING, BEIJING |
|
| TR01 | Transfer of patent right |
Effective date of registration: 20130204 Address after: 100076 No. 18, Wenchang Avenue, Beijing economic and Technological Development Zone Patentee after: Semiconductor Manufacturing International (Beijing) Corporation Address before: 201203 Shanghai City, Pudong New Area Zhangjiang Road No. 18 Patentee before: Semiconductor Manufacturing International (Shanghai) Corporation |
|
| CX01 | Expiry of patent term |
Granted publication date: 20090902 |
|
| CX01 | Expiry of patent term |