CN113388872A - Preparation method of composite-structure superconducting resonant acceleration cavity and superconducting resonant acceleration cavity - Google Patents
Preparation method of composite-structure superconducting resonant acceleration cavity and superconducting resonant acceleration cavity Download PDFInfo
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Abstract
The invention relates to a preparation method of a superconducting resonant accelerating cavity with a composite structure and the superconducting resonant accelerating cavity, wherein the preparation method comprises the following steps: preparing a substrate superconducting cavity made of a high-superconducting material; post-processing the substrate superconducting cavity before electroplating; electroplating high-heat-conduction material on the outer surface of the substrate superconducting cavity; post-processing the superconducting cavity with the high superconducting performance and the high heat conduction material composite structure; the superconducting resonant accelerating cavity is manufactured by adopting the preparation method. The invention starts from the prior art, and realizes the composite structure superconducting resonance accelerating cavity composed of high superconducting material and high heat conducting material by electroplating on the outer surface of the substrate superconducting cavity.
Description
Technical Field
The invention relates to a preparation method of a superconducting cavity, in particular to a preparation method of a superconducting resonant accelerating cavity with a composite structure by electroplating on the outer surface and the superconducting resonant accelerating cavity (superconducting cavity for short), belonging to the technical field of particle accelerators.
Background
The current superconducting cavity is mainly manufactured by adopting a high-purity niobium plate with the Residual Resistivity of RRR (RRR) to 300 and the thickness of 3-4mm, and the application range covers various charged particles with the beta (relative velocity) from-0.05 to 1. However, the pure niobium superconducting cavity is limited by the heat conductivity of metal niobium, the wall thickness is generally 3-4mm, and the thin-wall single-layer structure causes poor mechanical stability and thermal stability of the pure niobium superconducting cavity, so that not only is the pure niobium superconducting cavity prone to frequency detuning caused by helium pressure fluctuation, Lorentz detuning, microphonic and other factors, but also the pure niobium superconducting cavity prone to thermal detuning caused by defects, secondary electron multiplication effect and field emission effect, and stable operation of the high-current superconducting accelerator is difficult to meet.
On the premise of ensuring good radio frequency performance of the superconducting cavity, the superconducting cavity with the composite structure is formed by high-heat-conduction materials and high-superconducting-energy materials, and by increasing the total wall thickness, the mechanical stability such as the frequency helium pressure-sensitive sensitivity, the Lorentz detuning coefficient and the like of the superconducting cavity can be remarkably improved, the rapid transverse heat transfer can be realized, and the thermal stability of the superconducting cavity is improved, so that the superconducting cavity is a key technology capable of meeting the long-time stable operation of a high-current high-power superconducting accelerator.
However, the processing of the superconducting cavity with the composite structure is different from the processing of a pure niobium superconducting cavity with a single-layer structure, and a targeted implementation method is needed.
Disclosure of Invention
In view of the above problems, an object of the present invention is to provide a method for manufacturing a superconducting resonant accelerating cavity with a composite structure by electroplating on the outer surface, so as to solve the processing problem of a superconducting cavity with a composite structure with high performance and high reliability; the invention also aims to provide the superconducting resonant accelerating cavity prepared by the preparation method.
In order to achieve the purpose, the invention adopts the following technical scheme: a preparation method of a superconductive resonant accelerating cavity with a composite structure comprises the following steps:
s1, preparing a single-layer superconducting cavity which is made of high-superconducting-performance materials as a substrate superconducting cavity;
s2, carrying out vacuum leak detection on the substrate superconducting cavity in the step S1;
s3, performing ultrasonic cleaning and air drying on the substrate superconducting cavity subjected to vacuum leak detection in the step S2;
s4, carrying out chemical polishing treatment on the inner surface of the substrate superconducting cavity subjected to the ultrasonic cleaning in the step S3;
s5, ultrasonically cleaning and airing the substrate superconducting cavity which is subjected to the chemical polishing treatment in the step S4;
s6, placing the substrate superconducting cavity subjected to ultrasonic cleaning in the step S5 into a vacuum furnace for heating, and performing high-temperature degassing treatment;
s7, performing ultrasonic cleaning and air drying on the substrate superconducting cavity subjected to the high-temperature degassing treatment in the step S6;
s8, performing chemical polishing treatment on the inner surface and the outer surface of the superconducting cavity of the substrate subjected to the ultrasonic cleaning in the step S7;
s9, performing ultrasonic cleaning and air drying on the substrate superconducting cavity subjected to the chemical polishing treatment in the step S8, wrapping all flange openings and the whole outer surface of the substrate superconducting cavity by using a protective layer, strictly sealing all flange openings of the substrate superconducting cavity, and storing the substrate superconducting cavity in a clean manner;
s10, assembling the substrate superconducting cavity which is subjected to the sealing operation in the step S9 on a plating bath, uncovering a protective layer on the outer surface of the substrate superconducting cavity, taking the substrate superconducting cavity as a cathode, taking an electrode surrounding the substrate superconducting cavity as an anode, and then injecting an electroplating solution into the plating bath until the liquid level surface of the electroplating solution is higher than that of the substrate superconducting cavity; wherein, the anode is processed by high heat conduction material to be electroplated;
s11, enabling the substrate superconducting cavity to rotate at a constant speed along the axial direction, then turning on a power supply to electroplate selected high-heat-conductivity materials on the outer surface of the substrate superconducting cavity until the thickness of each part of an electroplated layer on the outer surface of the substrate superconducting cavity is not lower than the specified thickness, and stopping electroplating;
s12, carrying out ultrasonic cleaning and air drying on the composite structure superconducting cavity after electroplating in the step S11;
s13, machining and polishing the outer surface of the composite structure superconducting cavity subjected to ultrasonic cleaning in the step S12 to obtain a smooth and flat outer surface of a coating, namely, the preparation of the composite structure superconducting resonant acceleration cavity is completed.
In the preparation method, preferably, in the step S2, the leak rate required for vacuum leak detection is lower than 1x10-10mbar L/s, slow vacuum pumping is adopted in the vacuum leak detection process, and the vacuum pump needs to be an oil-free pump set.
Preferably, in the step S3, the specific method of ultrasonic cleaning and air drying is as follows:
s31, placing the substrate superconducting cavity into a cleaning pool filled with ultrasonic cleaning liquid, and ultrasonically cleaning the substrate superconducting cavity for not less than 40 minutes by using ultrapure water, wherein the water temperature is 50-60 ℃, and the ultrasonic power density is 25-35W/gal; wherein the ultrasonic cleaning liquid is Micro-90, Citranox or Liqui-Nox, the dosage is 10-20ml of ultrasonic cleaning liquid added into per liter of ultrapure water, and the ultrasonic cleaning is carried out in a clean environment not lower than ten thousand levels;
and S32, washing the outer surface of the superconducting cavity of the substrate by using ultrapure water, and drying.
In the manufacturing method, preferably, in the step S4, the polished thickness of the inner surface of the superconducting cavity of the substrate is about 80-150 μm;
in step S8, the polishing thickness of the inner and outer surfaces of the superconducting cavity of the substrate is about 10-40 μm.
In the preparation method, preferably, in the step S6, the heating rate is 1-6 ℃/min, and the substrate superconducting cavity is heated to 600-850 ℃ under vacuum of less than 1x10-3Keeping the temperature for 2-10 hours under the condition of Pa.
In the preparation method, preferably, in the step S1, the material with high superconducting performance refers to a material with a superconducting transition temperature higher than 9K at zero magnetic field and a superheated magnetic field higher than 150mT at 4K;
in the step S10, the high thermal conductive material refers to a material having a thermal conductivity higher than 100W/mK at a temperature of 4K.
In the preparation method, preferably, in the step S11, the rotation speed of the substrate superconducting cavity is 10-60 rpm, the voltage between the cathode and the anode is 3-10V, and the specified thickness is not less than 4-9 mm.
The inner layer of the superconductive resonant accelerating cavity is made of high-superconductive material, the outer layer of the superconductive resonant accelerating cavity is made of high-heat-conduction material, and the superconductive resonant accelerating cavity is manufactured by the preparation method.
The superconducting resonant accelerating cavity is preferably a transverse magnetic wave superconducting cavity with the working frequency of 1.3 GHz.
The superconducting resonant accelerating cavity, preferably, the transverse magnetic wave superconducting cavity comprises: the beam current ports are sequentially connected in series between two adjacent accelerating barrels through the beam current ports, and the two beam current ports positioned on the outermost side of each accelerating barrel respectively form a beam current injection port and a beam current extraction port; the beam injection pipeline and the beam extraction pipeline are respectively butted with the beam injection port and the beam extraction port of the acceleration cylinder; the main coupling port is connected with the beam lead-out pipeline; the two high-order mode coupling ports are respectively connected with the beam injection pipeline and the beam extraction pipeline; and the extraction port is connected with the beam injection pipeline.
Due to the adoption of the technical scheme, the invention has the following advantages:
1) the substrate superconducting cavity adopting the single-layer material has low processing difficulty, and can be processed by the existing mature processing technology.
2) The invention electroplates the high-thermal conductivity composite layer on the outer surface of the substrate superconducting cavity, does not influence the radio frequency surface on the inner surface of the substrate superconducting cavity, and has large tolerance and low difficulty.
3) The invention adopts the electroplating mode to reduce the thickness of the high-super-conductive material of the substrate cavity, has low cost, can be produced in batches and is suitable for large-scale application.
In summary, the present invention starts from the prior art, and realizes a superconducting resonant acceleration cavity with a composite structure composed of a high superconducting material and a high heat conducting material by electroplating on the outer surface of a substrate superconducting cavity.
Drawings
FIG. 1 is a schematic flow chart of the production process of the present invention;
FIG. 2 is a schematic view of a substrate superconducting cavity according to the present invention in a state of being electroplated;
FIG. 3 is a schematic structural diagram of a transverse magnetic wave superconducting cavity according to an embodiment of the present invention;
FIG. 4 is a schematic cross-sectional view of a superconducting resonant accelerating cavity made using the transverse magnetic wave superconducting cavity of FIG. 3 according to the present invention;
fig. 5 is a partial structural view of a superconducting resonant accelerating cavity of the present invention.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings. It is to be understood that the embodiments described are only a few embodiments of the present invention, and not all embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
In the description of the present invention, it should be noted that the terms "upper", "lower", "inside", "outside", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience in describing the present invention and simplifying the description, but do not indicate or imply that the system or element referred to must have a specific orientation, be constructed in a specific orientation, and be operated, and thus, should not be construed as limiting the present invention.
In the description of the present invention, it should be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "disposed," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meanings of the above terms in the present invention can be understood in specific cases to those skilled in the art.
As shown in fig. 1, the method for preparing a superconducting resonant accelerating cavity with a composite structure according to this embodiment includes the following steps:
s1, preparing a single-layer superconducting cavity which is processed and manufactured by high-superconducting-performance materials as a substrate superconducting cavity according to the existing processing technology (as shown in figure 2).
In this embodiment, preferably, the cavity type of the substrate superconducting cavity is a transverse magnetic wave superconducting cavity with an operating frequency of 1.3GHz, the wall thickness of the superconducting cavity may be 0.5-3mm, the superconducting cavity mainly includes 9 accelerating cylinders (the number of the accelerating cylinders is determined according to design requirements), 1 beam injection pipeline, 1 beam extraction pipeline, 1 main coupling port, 2 high-order mode coupling ports and 1 extraction port, and the outer surface of the substrate superconducting cavity must not have obvious mechanical scratches, pits and sharp protrusions; wherein the material with high superconducting property refers to a superconducting transition temperature higher than 9K under zero magnetic Field and a super heating Field (H) under 4Ksh) Materials higher than 150mT, e.g. such as metallic niobium, Nb3Sn、MgB2Or NbN, etc.
S2, carrying out vacuum leak detection on the substrate superconducting cavity in the step S1, wherein the leak rate required by the vacuum leak detection is lower than 1x10- 10mbar·L/s。
In this embodiment, preferably, slow vacuum pumping is adopted in the vacuum leak detection process, and the vacuum pump needs to be an oil-free pump set; the leakage detection in the step is to ensure that no leakage point exists between the welding seam of the substrate superconducting cavity and each flange surface, and ensure that the electroplating solution cannot enter the inside of the substrate superconducting cavity in the subsequent electroplating process to pollute the inner surface of the substrate superconducting cavity, thereby influencing the performance of the substrate superconducting cavity.
And S3, performing ultrasonic cleaning and air drying on the substrate superconducting cavity subjected to vacuum leak detection in the step S2 to remove possible pollution on the inner surface of the substrate superconducting cavity without influencing the chemical polishing treatment in the next step.
In this embodiment, preferably, the specific method of ultrasonic cleaning and drying is as follows:
s31, placing the substrate superconducting cavity into a cleaning pool filled with ultrasonic cleaning liquid, and ultrasonically cleaning the substrate superconducting cavity for not less than 40 minutes by using ultrapure water, wherein the water temperature is 50-60 ℃ (preferably 55 ℃), and the ultrasonic power density is 25-35W/gal; wherein the ultrasonic cleaning liquid is generally Micro-90, Citranox or Liqui-Nox, the dosage is 10-20ml of ultrasonic cleaning liquid added into per liter of ultrapure water, and the ultrasonic cleaning is carried out in a clean environment not lower than ten thousand levels;
and S32, washing the outer surface of the superconducting cavity of the substrate by using ultrapure water, and drying.
And S4, carrying out chemical polishing treatment on the inner surface of the substrate superconducting cavity subjected to ultrasonic cleaning in the step S3 to remove a mechanical damage layer formed on the inner surface of the substrate niobium cavity in the machining and manufacturing process, and avoiding the influence of the damage layer on the radio frequency performance of the superconducting cavity at low temperature.
In this embodiment, the chemical polishing acid solution is preferably selected according to the material to be polished, for example, for the metal material niobium, the chemical polishing acid solution is prepared from hydrofluoric acid with a mass fraction of 40%, nitric acid with a mass fraction of 65%, and phosphoric acid with a mass fraction of 85% in the following order of 1: 1: 2 volume ratio, and the polishing thickness of the inner surface of the substrate superconducting cavity is about 80-150 μm.
S5, the substrate superconducting cavity which is subjected to the chemical polishing treatment in the step S4 is subjected to ultrasonic cleaning and air drying to remove possible residual acid on the inner surface and the outer surface of the substrate niobium cavity after the chemical polishing process, so that the condition that the residual acid impurity pollutes the annealing furnace or diffuses into the substrate superconducting cavity material to influence the performance of the substrate superconducting cavity material in the next high-temperature annealing operation process is avoided.
In this embodiment, the conditions of ultrasonic cleaning and drying are the same as those in step S3, and therefore, the description thereof is omitted.
S6, the substrate superconducting cavity subjected to ultrasonic cleaning in the step S5 is placed in a vacuum furnace for heating, and high-temperature degassing treatment is carried out to remove residual stress on the cavity wall of the substrate superconducting cavity and carry out degassing treatment on a cavity wall material.
In the present embodiment, it is preferable that the heating rate is 1 to 6 ℃/minHeating to 600-850 deg.C for the substrate superconducting cavity to be under vacuum less than 1x10-3Keeping the temperature for 2-10 hours under the condition of Pa; the annealing temperature and the annealing holding time are specifically selected according to the material of the superconducting cavity of the substrate, for example, for the metal material niobium, the annealing temperature can be 800 ℃, and the annealing holding time can be 3 hours.
And S7, carrying out ultrasonic cleaning on the substrate superconducting cavity subjected to the high-temperature degassing treatment in the step S6, and airing to remove possible pollution on the inner surface and the outer surface of the substrate superconducting cavity in the processes of taking the substrate superconducting cavity out of the vacuum furnace and transporting.
In this embodiment, the conditions of ultrasonic cleaning and drying are also the same as those in step S3.
S8, carrying out chemical polishing treatment on the inner surface and the outer surface of the substrate superconducting cavity subjected to the ultrasonic cleaning in the step S7 to remove a pollution layer formed by residual gas adsorbed on the outer surface of the substrate superconducting cavity in the annealing and cooling process, and preparing for subsequent outer surface electroplating.
In this embodiment, the chemical polishing acid solution is selected in the same manner as step S4, and the polishing thickness of the inner and outer surfaces of the superconducting cavity of the substrate is about 10-40 μm.
And S9, carrying out ultrasonic cleaning and air drying on the substrate superconducting cavity subjected to the chemical polishing treatment in the step S8 to remove residual acid possibly remained in the inner surface and the outer surface of the substrate superconducting cavity in the chemical polishing process, wrapping all flange ports and all outer surfaces of the substrate superconducting cavity by using a preservative film, and strictly sealing all flange ports of the substrate superconducting cavity to ensure that plating solution cannot enter the inner part of the substrate superconducting cavity to pollute the inner surface of the substrate superconducting cavity and is stored cleanly.
In this embodiment, the ultrasonic cleaning and drying conditions are the same as those in step S3, and the above operations should be performed in a clean environment with a cleanliness of ten thousand or more levels, so as to avoid the contamination of the outer surface of the substrate superconducting cavity.
S10, as shown in figure 5, assembling the substrate superconducting cavity which is sealed in the step S9 on an electroplating bath, carefully uncovering a preservative film on the outer surface of the substrate superconducting cavity, taking the substrate superconducting cavity as a cathode, taking an electrode surrounding the substrate superconducting cavity as an anode, and then injecting an electroplating solution into the electroplating bath until the liquid level surface of the electroplating solution is higher than that of the substrate superconducting cavity; wherein, the anode is processed by high heat conduction material to be electroplated, the high heat conduction material refers to material with heat conductivity higher than 100W/mK at 4K temperature, such as oxygen-free copper or high-purity aluminum.
S11, enabling the substrate superconducting cavity to rotate at a constant speed along the axial direction at a speed of 10-60 revolutions per minute under the driving of a motor, then turning on a power supply to enable the voltage between a cathode and an anode to be 3-10V, electroplating selected high-heat-conductivity materials on the outer surface of the substrate superconducting cavity, and stopping electroplating when the thickness of each electroplating layer on the outer surface of the substrate superconducting cavity is not lower than 4-9 mm.
S12, carrying out ultrasonic cleaning and air drying on the composite structure superconducting cavity after electroplating in the step S11;
s13, machining and polishing the outer surface of the composite structure superconducting cavity subjected to ultrasonic cleaning in the step S12 to remove the defects of sharp protrusions and the like on an electroplated layer to obtain a smooth and flat outer surface of the electroplated layer, namely, the preparation of the composite structure superconducting resonance acceleration cavity is completed.
As shown in fig. 3 to fig. 5, the present invention further provides a superconducting resonant accelerating cavity prepared by the above preparation method, wherein the inner layer material of the superconducting resonant accelerating cavity is a high superconducting material B for providing good radio frequency performance to the superconducting cavity; the outer layer material is a high heat conduction material A, and is used for effectively increasing the wall thickness of the superconducting cavity and the mechanical stability and the thermal stability of the superconducting cavity on the premise of ensuring the heat conduction capability of the superconducting cavity.
In the above embodiment, preferably, the cavity type of the substrate superconducting cavity is a transverse magnetic wave superconducting cavity with an operating frequency of 1.3GHz, and the transverse magnetic wave superconducting cavity includes: two sides of each acceleration cylinder body 1 are provided with beam ports, two adjacent acceleration cylinder bodies 1 are sequentially connected in series through the beam ports, and two beam ports positioned on the outermost side of each acceleration cylinder body 1 form a beam injection port and a beam extraction port respectively; a beam injection pipeline 2 and a beam extraction pipeline 3 are respectively butted with a beam injection port and a beam extraction port of the acceleration cylinder 1; the main coupling port 4 is connected with the beam lead-out pipeline 3; the two high-order mode coupling ports 5 are respectively connected with the beam injection pipeline 2 and the beam extraction pipeline 3; and the extraction port 6 is connected with the beam injection pipeline 2.
Finally, it should be noted that: the above examples are only intended to illustrate the technical solution of the present invention, but not to limit it; although the present invention has been described in detail with reference to the foregoing embodiments, it will be understood by those of ordinary skill in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some technical features may be equivalently replaced; and such modifications or substitutions do not depart from the spirit and scope of the corresponding technical solutions of the embodiments of the present invention.
Claims (10)
1. A preparation method of a superconductive resonance accelerating cavity with a composite structure is characterized by comprising the following steps:
s1, preparing a single-layer superconducting cavity which is made of high-superconducting-performance materials as a substrate superconducting cavity;
s2, carrying out vacuum leak detection on the substrate superconducting cavity in the step S1;
s3, performing ultrasonic cleaning and air drying on the substrate superconducting cavity subjected to vacuum leak detection in the step S2;
s4, performing chemical polishing treatment on the inner surface of the substrate superconducting cavity subjected to the ultrasonic cleaning in the step S3;
s5, ultrasonically cleaning and airing the substrate superconducting cavity which is subjected to the chemical polishing treatment in the step S4;
s6, placing the substrate superconducting cavity subjected to ultrasonic cleaning in the step S5 into a vacuum furnace for heating, and performing high-temperature degassing treatment;
s7, performing ultrasonic cleaning and air drying on the substrate superconducting cavity subjected to the high-temperature degassing treatment in the step S6;
s8, performing chemical polishing treatment on the inner surface and the outer surface of the superconducting cavity of the substrate subjected to the ultrasonic cleaning in the step S7;
s9, performing ultrasonic cleaning and air drying on the substrate superconducting cavity subjected to the chemical polishing treatment in the step S8, wrapping all flange openings and the whole outer surface of the substrate superconducting cavity by using a protective layer, strictly sealing all flange openings of the substrate superconducting cavity, and storing the substrate superconducting cavity in a clean manner;
s10, assembling the substrate superconducting cavity which is subjected to the sealing operation in the step S9 on a plating bath, uncovering a protective layer on the outer surface of the substrate superconducting cavity, taking the substrate superconducting cavity as a cathode, taking an electrode surrounding the substrate superconducting cavity as an anode, and then injecting an electroplating solution into the plating bath until the liquid level surface of the electroplating solution is higher than that of the substrate superconducting cavity; wherein, the anode is processed by high heat conduction material to be electroplated;
s11, enabling the substrate superconducting cavity to rotate at a constant speed along the axial direction, then turning on a power supply to electroplate selected high-heat-conductivity materials on the outer surface of the substrate superconducting cavity until the thickness of each part of an electroplated layer on the outer surface of the substrate superconducting cavity is not lower than the specified thickness, and stopping electroplating;
s12, carrying out ultrasonic cleaning and air drying on the composite structure superconducting cavity after electroplating in the step S11;
s13, machining and polishing the outer surface of the composite structure superconducting cavity subjected to ultrasonic cleaning in the step S12 to obtain a smooth and flat outer surface of a coating, namely, the preparation of the composite structure superconducting resonant acceleration cavity is completed.
2. The method of claim 1, wherein in step S2, vacuum leak detection requires a leak rate of less than 1x10-10mbar L/s, slow vacuum pumping is adopted in the vacuum leak detection process, and the vacuum pump needs to be an oil-free pump set.
3. The method for preparing a Chinese medicinal composition according to claim 1, wherein in the step S3, the specific method of ultrasonic cleaning and air drying is as follows:
s31, placing the substrate superconducting cavity into a cleaning pool filled with ultrasonic cleaning liquid, and ultrasonically cleaning the substrate superconducting cavity for not less than 40 minutes by using ultrapure water, wherein the water temperature is 50-60 ℃, and the ultrasonic power density is 25-35W/gal; wherein the ultrasonic cleaning liquid is Micro-90, Citranox or Liqui-Nox, the dosage is 10-20ml of ultrasonic cleaning liquid added into per liter of ultrapure water, and the ultrasonic cleaning is carried out in a clean environment not lower than ten thousand levels;
and S32, washing the outer surface of the superconducting cavity of the substrate by using ultrapure water, and drying.
4. The method according to claim 1, wherein in step S4, the polished thickness of the inner surface of the superconducting cavity of the substrate is about 80 to 150 μm;
in step S8, the polishing thickness of the inner and outer surfaces of the superconducting cavity of the substrate is about 10-40 μm.
5. The method as claimed in claim 1, wherein in step S6, the heating rate is 1-6 ℃/min, and the heating is carried out to 600 ℃ and 850 ℃ so that the substrate superconducting cavity is under vacuum less than 1x10-3Keeping the temperature for 2-10 hours under the condition of Pa.
6. The method according to claim 1, wherein in step S1, the material with high superconducting properties is a material with superconducting transition temperature higher than 9K at zero magnetic field and superheated magnetic field higher than 150mT at 4K;
in the step S10, the high thermal conductive material refers to a material having a thermal conductivity higher than 100W/mK at a temperature of 4K.
7. The method of claim 1, wherein in step S11, the substrate superconducting cavity rotates at 10-60 rpm, the voltage between the cathode and anode is 3-10V, and the specified thickness is not less than 4-9 mm.
8. A superconducting resonant acceleration cavity, the inner layer of which is made of high-superconducting material and the outer layer of which is made of high-thermal conductive material, characterized in that the superconducting resonant acceleration cavity is prepared by the preparation method of any one of claims 1 to 7.
9. The superconducting resonant accelerating cavity of claim 8, wherein the cavity type of the substrate superconducting cavity is a transverse magnetic wave superconducting cavity with an operating frequency of 1.3 GHz.
10. The superconducting resonant accelerating cavity of claim 9, wherein the transverse magnetic wave superconducting cavity comprises:
the beam current accelerating device comprises accelerating cylinders (1), wherein beam current ports are processed on two sides of each accelerating cylinder (1), two adjacent accelerating cylinders (1) are sequentially connected in series through the beam current ports, and two beam current ports located on the outermost sides of the accelerating cylinders (1) respectively form a beam current injection port and a beam current extraction port;
the beam injection pipeline (2) and the beam extraction pipeline (3) are respectively butted with the beam injection port and the beam extraction port of the acceleration cylinder (1);
the main coupling port (4) is connected with the beam lead-out pipeline (3);
the two high-order mode coupling ports (5) are respectively connected with the beam injection pipeline (2) and the beam extraction pipeline (3);
an extraction port (6) connected to the beam injection conduit (2).
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Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0217127A2 (en) * | 1985-08-26 | 1987-04-08 | The Furukawa Electric Co., Ltd. | Method of fabricating a superconducting cavity |
| JPH02250402A (en) * | 1989-03-23 | 1990-10-08 | Furukawa Electric Co Ltd:The | Manufacture of superconducting cavity |
| WO2002100133A2 (en) * | 2001-06-06 | 2002-12-12 | Cornell Research Foundation, Inc. | Superconductor accelerator cavity with multiple layer metal films |
| CN103179775A (en) * | 2013-02-28 | 2013-06-26 | 中国科学院高能物理研究所 | Superconducting accelerator, superconducting cavity for same and manufacturing method of superconducting accelerator |
| CN103619119A (en) * | 2013-11-18 | 2014-03-05 | 中国科学院近代物理研究所 | Method for manufacturing superconducting cavity |
| CN107699899A (en) * | 2017-10-25 | 2018-02-16 | 中国科学院近代物理研究所 | The whole chamber surface chemistry buffering full automatic polishing system and method for superconductor cavity |
| CN108277450A (en) * | 2017-12-29 | 2018-07-13 | 中国科学院高能物理研究所 | A kind of superconductor cavity N doping method |
-
2021
- 2021-06-10 CN CN202110647653.9A patent/CN113388872B/en active Active
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0217127A2 (en) * | 1985-08-26 | 1987-04-08 | The Furukawa Electric Co., Ltd. | Method of fabricating a superconducting cavity |
| JPH02250402A (en) * | 1989-03-23 | 1990-10-08 | Furukawa Electric Co Ltd:The | Manufacture of superconducting cavity |
| WO2002100133A2 (en) * | 2001-06-06 | 2002-12-12 | Cornell Research Foundation, Inc. | Superconductor accelerator cavity with multiple layer metal films |
| CN103179775A (en) * | 2013-02-28 | 2013-06-26 | 中国科学院高能物理研究所 | Superconducting accelerator, superconducting cavity for same and manufacturing method of superconducting accelerator |
| CN103619119A (en) * | 2013-11-18 | 2014-03-05 | 中国科学院近代物理研究所 | Method for manufacturing superconducting cavity |
| CN107699899A (en) * | 2017-10-25 | 2018-02-16 | 中国科学院近代物理研究所 | The whole chamber surface chemistry buffering full automatic polishing system and method for superconductor cavity |
| CN108277450A (en) * | 2017-12-29 | 2018-07-13 | 中国科学院高能物理研究所 | A kind of superconductor cavity N doping method |
Non-Patent Citations (3)
| Title |
|---|
| LI, MIN等: ""The investigation of chemical vapor deposited copper-based niobium films"", 《MATERIALS RESEARCH EXPRESS》 * |
| 杨自钦 等: ""Low-Temperature Baking Effect of the Radio-Frequency Nb3Sn Thin Film Superconducting Cavity"", 《CHINESE PHYSICS LETTERS》 * |
| 马永胜 等: ""超导高频铜腔镀铌研究进展"", 《真空科学与技术学报》 * |
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