CN113380278B - Optical disk reading method, reading device and optical disk reading and writing device based on nano photoetching - Google Patents
Optical disk reading method, reading device and optical disk reading and writing device based on nano photoetching Download PDFInfo
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- G11B7/09—Disposition or mounting of heads or light sources relatively to record carriers with provision for moving the light beam or focus plane for the purpose of maintaining alignment of the light beam relative to the record carrier during transducing operation, e.g. to compensate for surface irregularities of the latter or for track following
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Abstract
The invention provides an optical disk reading method, an optical disk reading device and an optical disk reading and writing device based on nano photoetching. The technical scheme of the invention comprises the following steps: forming a white light source, and focusing and irradiating the white light source on an information recording point of a recording layer of the physical storage medium of the optical disk; collecting a measurement light signal; obtaining the depth information w of the continuous writing groove on the recording layer of the optical disc physical storage medium in advance k And its corresponding digital storage information s k Reflectance measurement spectral information ref k The association relationship of (a); obtaining reflectance measurement spectral information ref from the measurement optical signal k ' thereafter, the reflectance measurement spectrum information ref matched with the correlation is searched in the correlation k Corresponding continuous writing groove depth information w k Further, the continuous writing groove depth information w k Digital storage information s of the corresponding information recording point k Reading out, so as to effectively improve the reading speed and resolution capability of the optical disc information and greatly improve the storage density and storage dimension of the optical disc.
Description
The application is a divisional application of Chinese invention patent applications with the application date of 2018-11-20, the application number of 2018113839605 and the invention name of 'optical disc read-write method based on nano lithography and write control information coding and decoding method' of the same applicant.
Technical Field
The present invention relates to the field of optical technology, and in particular, to a method and apparatus for reading an optical disc based on nanolithography, and an optical disc reading/writing apparatus.
Background
With the development of technologies such as gene sequencing and brain activity reading, not only a large amount of data is generated, but also higher requirements are put forward on how to effectively, stably and accurately store the data. Based on the above background, the optical disc storage technology has well conformed to the requirements of the times due to its advantages of energy saving, long storage life, good safety, easy processing, etc. For optical disc technology, the development of optical disc technology is severely hampered by the limitation of storage capacity.
In order to increase the capacity of the optical disc, the conventional technical route is to reduce the size of the recording spot. With the successful development of short wavelength laser diodes (GaN blue-green lasers), blu-ray discs are becoming the mainstream storage mode in the optical disc market. In the early CD, the recording laser wavelength is 780nm, the numerical aperture is 0.45, the track pitch is 1.6 μm, and the single-layer storage capacity is only 650MB; later DVD optical disk, the recording laser wavelength is 650nm, the numerical aperture is 0.6, the track pitch is 0.74 μm, and the single-layer storage capacity is 4.7GB; the current blue-ray disc has the recording laser wavelength of 405nm, the numerical aperture of 0.85 and the track spacing of 0.32 mu m, the track spacing is only half of that of a red-ray DVD disc (0.74 mu m), the single-layer storage capacity is up to 25GB, and meanwhile, the blue-ray disc achieves the multi-layer writing effect by utilizing different reflectivities, thereby realizing 12-layer 300GB blue-ray disc storage.
In order to further break through the limitation of the storage capacity of the optical disc, some methods for increasing the storage capacity have been proposed by researchers. The Gu Min research team in australia in 2009 utilizes the response difference of gold nanowires with different length-width ratios to laser with different wavelengths and polarization directions, and realizes three-layer five-dimensional (and polarization) optical information storage in thickness (Nature, 2009,459 (7245): 410-413). In 2011, a S.W hel research team provides a novel microtechnology RESOLFT (reversible stable optical 'fluorescence' transition between two states) for super-resolution optical storage reading and writing, and a high-density optical storage experiment (Nature, 2011,478, 204-208) with a point spacing of 250nm is realized by using photocuring and optical switching characteristics of green fluorescent protein (rseFP) and a super-resolution reading and writing method. The Gu Min research team in australia in 2012 combines the photo-polymerization and super-resolution stimulated radiation loss technical principles, and utilizes a 1,5-bis (p-dimethylaminocinneimide) cyclopentanone (BDCC) material system to realize the photoetching channel width of 9nm and the channel spacing of 52nm (Nature Communications,2013, 4.6. Accordingly, the Gu Min research team filed an international patent (appl.No: 15/039,368, PCT No.
Disclosure of Invention
The invention aims to provide an optical disk reading method, an optical disk reading device and an optical disk reading-writing device based on nano photoetching so as to improve the reading speed of an optical disk.
To achieve the above and other related objects, the present invention provides a method for reading an optical disc based on nanolithography, comprising: forming a white light source, and focusing and irradiating the white light source on an information recording point of a recording layer of the physical storage medium of the optical disk; collecting a measurement light signal; the measuring optical signal comprises a total reflected light field formed by coherent superposition of the reflected light fields of the writing grooves of the information recording point
Wherein it is present>
A reflected light field of the ith writing groove of the information recording point; e 0 The reflected light field is the reflection light field of the non-engraved groove; m is the number of bits of the data storage site of the information recording point; the '0' and '1' numbers respectively represent whether the data storage site of the information recording point has a writing groove or not; n is 1 (λ) is the refractive index of the recording layer of the optical disc physical storage medium, which depends on the wavelength λ of the writing beam; z i For the depth information of the ith writing groove, Z 0 =0 denotes that the unwritten groove depth information is 0; l 0 Is the thickness of the recording layer;
Δn＝n 1 -n 0 ，n 0 is the refractive index of air; obtaining the continuous writing groove depth information w on the recording layer of the optical disk physical storage medium in advance k And its corresponding digital storage information s k Reflectance measurement spectral information ref k The association relationship of (a); obtaining reflectance measurement spectral information ref from the measurement optical signal k ' thereafter, the reflectance measurement spectrum information ref matched with the correlation is searched in the correlation k Corresponding continuous writing groove depth information w k Further, the continuous writing groove depth information w k Digital storage information s of the corresponding information recording point k And (6) reading.
In an embodiment of the present invention, the method further includes: focusing and irradiating a white light source to a next information recording point of a recording layer of the optical disk physical storage medium; obtaining the digital storage information of the next information recording point according to the measured optical signal of the next information recording point and the incidence relation until the digital storage information s of all the information recording points is read out k 。
To achieve the above and other related objects, the present invention provides a method for decoding lithographic information from a reflectance measurement spectrum, comprising: pre-establishing continuous writing groove depth information w on recording layer of optical disc physical storage medium k And its corresponding digital storage information s k Reflectance measurement spectral information ref k The association relationship of (a); wherein each reflectance measurement spectrum information ref k Forming a reflection measurement spectrum set
Obtaining reflection spectrum information ref of a measured information recording point k ' when, the matched reflection measurement spectrum information ref is searched in the correlation k Corresponding continuous writing groove depth information w k Further, the continuous writing groove depth information w k Corresponding digital storage information s k And storing the information as the decoded number of the information recording dots.
To achieve the above and other related objects, the present inventionThe invention provides an optical disk reading device based on nano-lithography, comprising: the optical path module is used for forming a white light source and focusing and irradiating the white light source on an information recording point of a recording layer of the physical storage medium of the optical disk; for collecting light measurement signals; the measuring optical signal comprises a total reflected light field formed by coherent superposition of the reflected light fields of the information recording points and the depth information writing grooves
Wherein,
a reflected light field of the ith writing groove of the information recording point; e 0 The reflected light field is the reflection light field of the non-engraved groove; m is the bit number of the data storage site of the information recording point; the '0' and '1' numbers respectively represent whether the data storage position of the information recording point has a writing groove or not; n is 1 (λ) is the refractive index of the recording layer of the optical disc physical storage medium, which depends on the wavelength λ of the writing beam; z is a linear or branched member i For the depth of the ith writing groove, Z 0 =0 denotes that the unwritten groove depth information is 0; l 0 Is the thickness of the recording layer; />
Δn＝n 1 -n 0 ，n 0 Is the refractive index of air; a processing module for obtaining the continuous groove writing information w on the recording layer of the optical disc physical storage medium in advance k And its corresponding reflectance measurement spectral information ref k The association relationship of (a); obtaining reflectance measurement spectral information ref from the measurement optical signal k Then, the matched reflection measurement spectrum information ref is searched in the correlation k Corresponding continuous writing groove information w k According to which information s is stored as a number of said information recording spots k And (6) reading.
In an embodiment of the present invention, the optical path module includes: the device comprises a light source, a lens group, a high-power objective lens, a beam splitter and a single lens; the processing module comprises: a spectrometer; wherein, the light source is used for emitting white light; the lens group is used for collimating and expanding the white light and converging the white light to the beam splitter; the beam splitter is used for splitting the received white light and transmitting the white light to the high-power objective lens; the high-power objective lens is used for focusing the received white light to act on the surface of the physical storage medium of the optical disc so as to perform reflection measurement on a recording layer of the optical disc and emit a collected measurement light signal; the single lens is used for converging the measuring light signal to the spectrometer; and the spectrometer is used for processing the received measuring optical signal and decoding data storage information from the measuring optical signal.
In an embodiment of the present invention, the spectrometer includes: a grating spectrometer or a high-speed measurement spectrometer; the high-speed measurement spectrometer comprises: the optical dispersion element, the narrow-band integrated optical filter and the linear array detector; wherein the optical dispersion element is configured to split the received measurement optical signal so as to spatially spread the reflection spectrum information; the narrow-band integrated optical filter is used for obtaining light with a wavelength corresponding to the reflection spectrum information after the light is dispersed by the optical dispersion element; and the linear array detector is used for detecting the light intensity of the light with each wavelength obtained by the narrow-band integrated optical filter so as to obtain the reflection spectrum information.
In an embodiment of the invention, the light source is a halogen lamp, a tungsten lamp, a xenon lamp, a white light LED lamp, a band-pass filtered white light source, or an ultraviolet LED light source.
To achieve the above and other related objects, the present invention provides an optical disc reading/writing apparatus based on nanolithography, comprising: the optical disc reading device based on the nano photoetching.
In an embodiment of the present invention, the reading apparatus further includes a third dichroic mirror, disposed between the lens group of the reading apparatus and the beam splitter, for reflecting the white light collimated and expanded by the lens group to the high power objective lens; the beam splitter is used for splitting the measuring optical signal emitted by the high-power objective lens; and the single lens is used for converging the measuring optical signal split by the beam splitter to the spectrometer.
As described above, the optical disc reading method, reading apparatus and optical disc reading/writing apparatus based on nanolithography according to the present invention have the following advantages:
1. the reading of the information recording points with nanometer sizes is realized;
2. the storage density and the storage capacity are higher, and the reading speed is faster;
3. the expandability is strong, and the prior optical drive system does not need to be greatly improved.
Drawings
Fig. 1A is a schematic diagram illustrating a structure and a writing principle of an optical disc physical storage medium according to an embodiment of the invention.
FIG. 1B is a schematic diagram illustrating a structure and a writing principle of an optical disc physical storage medium according to another embodiment of the present invention.
FIG. 1C is a schematic diagram of the spectrum of the absorption modulation layer of the diarylethene material according to an embodiment of the invention.
FIG. 1D is a diagram illustrating the influence of the optimization of the structure of the physical storage medium on the spectral resolution of an optical disc according to an embodiment of the present invention.
FIG. 1E is a schematic structural diagram of an optical disc physical storage medium according to another embodiment of the present invention.
Fig. 2A is a flowchart illustrating a method for writing an optical disc based on nanolithography according to an embodiment of the present invention.
FIG. 2B shows digital storage information s according to an embodiment of the present invention k Continuous writing of groove depth information w k And reflectance measurement spectral information ref k Schematic diagram of the association relationship of (1).
FIG. 3A is a flowchart illustrating a method for reading an optical disc based on nanolithography according to an embodiment of the present invention.
FIG. 3B is a schematic diagram of reflectance spectroscopy readings in an embodiment of the invention.
FIG. 4 is a block diagram of an optical disc reading/writing apparatus based on single-beam nanolithography according to an embodiment of the present invention.
FIG. 5 is a schematic structural diagram of an optical disc reading/writing apparatus based on dual-beam nanolithography according to an embodiment of the present invention.
FIG. 6 is a schematic structural diagram of an optical disc read-only device based on nanolithography according to another embodiment of the present invention.
Detailed Description
The embodiments of the present invention are described below with reference to specific embodiments, and other advantages and effects of the present invention will be easily understood by those skilled in the art from the disclosure of the present specification. The invention is capable of other and different embodiments and of being practiced or of being carried out in various ways, and its several details are capable of modification in various respects, all without departing from the spirit and scope of the present invention. It is to be noted that the features in the following embodiments and examples may be combined with each other without conflict.
It should be noted that the drawings provided in the following embodiments are only for illustrating the basic idea of the present invention, and the drawings only show the components related to the present invention rather than being drawn according to the number, shape and size of the components in actual implementation, and the type, amount and proportion of each component in actual implementation can be changed freely, and the layout of the components can be more complicated.
First embodiment
As shown in fig. 1A, there is shown an optical disc physical storage medium, which comprises:
1) A protective layer 101 that allows the disc to withstand frequent use, fingerprints, scratches and dirt, thereby ensuring the storage quality and data security of the disc;
2) A recording layer 102 for writing and recording information, characterized in that it is stable for storage and can be optically written, and selected material comprises SiO 2 、GaF 2 、MgF 2 Organic glass, photosensitive material, etc., but are not limited thereto;
3) The reflective layer 103 is used to improve the spectral reflectivity and facilitate the reflection measurement of spectral information, and is made of a material with high reflectivity, mainly including, but not limited to, a metal material or a multilayer Distributed Bragg Reflector (DBR) material.
A compressed diffraction-limited focused spot 104 is obtained by focusing with a shorter wavelength writing laser beam (which may be a semiconductor laser with 405nm or shorter wavelength output, or 355 nm and 266 nm solid state laser output, or 248 nm, 193 nm and 157 nm excimer laser output, etc.) and a high numerical aperture objective lens, which beam acts on the recording layer to perform digital information writing. Combination 2 m A bit digital information coding method, taking m =3 as an example, carries out different groove depths Z at position data storage positions (1), (2) and (3) of an information recording point 107 on a 101 1 ,Z 2 ,Z 3 The writing is performed at the corresponding position (m) to indicate that the digital code "1" is stored at the position, otherwise, the digital code "0" is stored, and the different position (m) corresponds to 2 m Different numbers of bits in a bit digital information encoding method; at this point, the information storage at 107 is finished, and then the mobile terminal moves to the next fixed position according to 105, and the process is repeated to finish the digital information storage; and the rest is done in sequence to finish the whole process of digital information storage.
Second embodiment
As shown in fig. 1B, there is shown an optical disc physical storage medium, which comprises:
1) A protective layer 201 that allows the optical disc to withstand frequent use, fingerprints, scratches and dirt, thereby ensuring the storage quality and data security of the optical disc;
2) An absorption modulation layer 202, the layer of material having absorption modulation characteristics, the absorption spectrum of which has the characteristics as shown in fig. 1C, the layer thickness is less than 500nm, and the absorption modulation layer material includes, but is not limited to, diarylethenes, fulgides, azides;
3) A recording layer 203 for writing and recording information, characterized in that it can be stably stored and can be optically written, and the material selected comprises SiO 2 ，GaF 2 ，MgF 2 Organic glass, photosensitive material, etc., but are not limited thereto;
4) The reflective layer 204 is used to improve the spectral reflectivity and facilitate the reflection measurement of the spectral information, and is made of a material with high reflectivity, mainly including a metal material or a multilayer Distributed Bragg Reflector (DBR) material, but not limited to these.
In another embodiment, further, a transition protection layer of less than 10nm may be added between the absorption modulation layer 202 and the recording layer 203 as required to prevent the absorption modulation layer 202 from affecting the recording layer 203. The transition protective layer comprises the following materials: PVA (polyvinyl alcohol), PMMA (polymethyl methacrylate), and the like.
In conjunction with the physical storage structure of the optical disc, the solid writing beam 205 and the hollow inhibiting beam 206 act on the absorption modulation layer 202 simultaneously, and the hollow inhibiting beam 206 inhibits the peripheral beam of the solid writing beam 205 from transmitting through the absorption modulation layer 202 through the absorption modulation characteristic, so that the writing spot size transmitted through the absorption modulation layer is further compressed, as shown at 207, the hollow inhibiting beam 208 inhibits the peripheral beam of the solid writing beam 209 through the absorption modulation layer 202, and the compressed beam 210 acts on the recording layer 203 to write the depth information groove. Combination 2 m A bit digital information coding method, taking m =3 as an example, carries out different groove depths Z at digital storage positions (1), (2) and (3) at a fixed position 212 of an information recording point on a 203 1 ,Z 2 ,Z 3 The writing is performed at the corresponding position (m) to indicate that the digital code "1" is stored at the position, otherwise, the digital code "0" is stored, and the different position (m) corresponds to 2 m Different number of bits in the bit encoding; at this point, the information recording at 212 is completed, and then the mobile terminal moves to the next fixed position according to 211, and the above processes are repeated to complete the digital information storage; and the rest is done in sequence to finish the whole process of digital information storage.
It should be noted that, for the optical disc physical storage media in the first embodiment and the second embodiment, the protective layer 101 and the protective layer 201 are not necessary, and other layers may also be implemented separately in the absence of the protective layer 101 and the protective layer 201.
Third embodiment
Referring to fig. 1D, in order to increase the resolution of the reflection spectrum measurement, the present embodiment provides a physical storage medium of an optical disc by adding one or more intermediate layers between the recording layer 102 and the reflective layer 103 or between the recording layer 203 and the reflective layer 204 on the basis of the first embodiment and the second embodiment, and the structure thereof includes:
1) A recording layer 303 for writing and recording information, characterized in that it can be stably stored and can be optically written, and the material selected comprises SiO 2 、GaF 2 、MgF 2 Organic glass, photosensitive materials, and the like, but are not limited thereto;
2) An intermediate layer 304 of a high refractive index material having a refractive index greater than that of the material of the recording layer 303 and a low spectral absorption, the thickness of the material being less than the measurement wavelength, the material selected including Al 2 O 3 、Si 3 N 4 、Nb 2 O 5 、Ta 2 O 5 And TiO 2 Etc., but are not limited thereto;
3) The reflective layer 305, which is used to improve the spectral reflectivity and facilitate the reflection measurement of the spectral information, is made of a material with high reflectivity, and mainly includes a metal material or a multilayer Distributed Bragg Reflector (DBR) material, but is not limited thereto.
Fig. 1D shows reflection measurement spectrum information 306 and 307 corresponding to the physical storage medium of the optical disc without the intermediate layer and the physical storage medium of the optical disc with the intermediate layer added. It is obvious from comparing 306 and 307 that the spectral resolution of the physical optical disc storage medium with the intermediate layer is obviously improved:
(1) 307 the shift in "peak position" is more pronounced than 306;
(2) 307, the intensity changes more violently, the coded information can be distinguished in a smaller window, such as 360 nm-400 nm, and the possibility of reading the spectrum information by adopting a light source in an ultraviolet interval is provided;
(3) The peak-type differences of the corresponding reflection spectra between different digitally encoded information increase.
Therefore, by adding one or more intermediate layers, the resolving power of the spectrum can be greatly improved, so that the encoding dimension m of the writing control information to be introduced below is further improved, and the information storage capacity is greatly improved.
Fourth embodiment
Carrying out the structure described in the second embodiment, as shown in fig. 1E, there is shown another optical physical storage medium, in which the recording layer 402 has completed writing of the lithography information on the second surface (see the plane in contact with 403 in the figure) and the reflective layer 401 is added on the first surface (see the plane in contact with 401 in the figure).
The forming mode of the optical disc physical storage medium is as follows: after the optical writing is performed on the recording layer 203 of the second embodiment, the absorption modulation layer 202 (including the transition layer) of the optical disc is cleaned by a chemical method such as ultrasonic, and after the cleaning, the recording layer 203 is turned over by 180 degrees to form the recording layer 303 with the second surface of the optical writing completed as shown in fig. 1D being under and the first surface being on, at this time, the second surface is overlapped with the original reflective layer 204 (i.e. 403 in fig. 1E), the reflective layer 401 is newly plated on the first surface, and a dielectric cavity is formed between the reflective layer 401 and the reflective layer 403. The reflective layer 401 may be made of a metal material such as gold or silver, or a multilayer DBR material. The reflective layer 401 is also a protective layer for the optical disc.
The medium cavity structure ensures that the service life of the spectral information only depends on the service life of the recording layer, thereby realizing the permanent storage of the stored information and greatly improving the storage density and the storage capacity.
Fifth embodiment
The optical disc physical storage media described in the first to fourth embodiments can be regarded as a "single-sided" structure. The embodiment provides a double-sided optical disc physical storage medium, thereby achieving the effect of double-sided high-density information storage. The so-called "double-sided" structure can be viewed as being formed by two "single-sided" structures sharing a reflective layer 103 or reflective layer 204 disposed "back-to-back". In this embodiment, the reflective layer 103 in the first embodiment or the reflective layer 204 in the second embodiment is used as a base layer, and other layers are symmetrically disposed on the upper surface and the lower surface of the base layer. For example, taking the optical disc physical storage medium described in the first embodiment as an example, the structure of the optical disc physical storage medium extended to double sides is a protective layer, a recording layer, a reflective layer, a recording layer, and a protective layer from top to bottom.
Sixth embodiment
As shown in fig. 2A, the present embodiment provides an optical disc writing method based on nanolithography, including the following steps:
s21: the focal spot size of the solid writing beam is compressed.
The beam intensity of the solid writing beam conforms to Gaussian intensity distribution, and visible, ultraviolet and deep ultraviolet continuous laser or pulse laser with a wave band between visible light and ultraviolet light can be adopted. Specifically, compressing the focal spot size of the solid writing beam can be achieved in one or two ways:
the method comprises the steps that in the first mode, a solid writing light beam and a hollow suppression light beam with different wavelengths are formed respectively, wherein the light beam intensity of the hollow suppression light beam accords with annular intensity distribution, and the central intensity tends to be zero; making focal planes of the solid writing light beam and the hollow suppression light beam coincide on the space; irradiating the overlapped light beam on a physical storage medium of an optical disc, wherein the hollow suppression light beam suppresses peripheral light spots of the solid writing light beam, for example: the hollow suppression light beam irradiates an absorption modulation layer of the optical disk physical storage medium; another example is: under the action of the hollow suppression light beam, the absorption modulation layer suppresses peripheral light spots of the solid writing light beam from transmitting through the absorption modulation layer, and for example: the solid writing beam in the first mode or the second mode adopts a pulse beam to realize a two-photon writing method and the like so as to compress the focal spot size of the solid writing beam;
and secondly, reducing the wavelength of the solid writing light beam and/or increasing the numerical aperture of the objective lens.
S22: the digital storage information to be stored in the optical disc is read as the writing control information.
In detail, the writing control information includes sub-writing control information arranged in sequence. Each of the sub-writing control information is used for controlling the writing of an information recording point; the information recording point comprises m data storage sites, each piece of sub-writing control information is formed by m binary numbers, and the '0' and '1' digit of each binary number is used for indicating whether the corresponding depth information groove is written at the corresponding data storage site.
Specifically, the method for encoding the writing control information includes the following steps:
step one, taking the number m of data storage positions contained in each information recording point to be inscribed as a power exponent of 2 to determine to adopt 2 m Encoding by a binary number;
step two, using the m-bit binary digital storage information to be stored in the optical disk as the writing control information s of the information recording point to be written k (ii) a Correspondingly giving '0' and '1' digital codes of each binary digit in the group according to the condition that whether the data storage bit of the information recording point to be inscribed needs to be inscribed in the corresponding depth information groove or not;
step three, the writing control information of all information recording points to be written is formed 2 m Digital information set
1≤k≤2 m As the total write control information.
Optionally, each data storage site performs data storage by using different depth information to represent different digits, that is, different storage digits are represented by using multiple different depth information grooves at the same data storage site, so that the data information storage capacity is improved. For example: 4 different depth information are adopted at the same data storage position to respectively correspond to the representation storage digital numbers '0', '1', '2' and '3', so that the information capacity of the storage data is improved.
Referring to fig. 2B, for example, each information recording point has 3 data storage locations, so that an octal number is required for encoding; digital storage information s of binary number per 3 bits k As a set of write control information for an information recording spot to be written, and if it is the 1 st of the information recording spot to be writtenIf the bit data storage bit position needs to be etched, a binary number 1 in the 1 st bit in the group is given, and if the bit data storage bit position does not need to be etched, a binary number 0 is given; if the 2 nd bit data storage position of the writing information recording point needs to be written, the 2 nd bit binary digit of the group is given with a '1' digit, if the writing is not needed, the group is given with a '0' digit, and so on. In fig. 2B, "001" represents writing control information of the second information recording point to be written, and the 1 st bit and the 2 nd bit are "0" and the 3 rd bit is "1", respectively, which indicates that no writing is performed at the 1 st data storage location and the 2 nd data storage location of the second information recording point to be written, and Z writing is required at the 3 rd data storage location 3 A deep trench.
S23: and controlling the compressed focal spot to write a corresponding information recording point on a recording layer of the physical storage medium of the optical disc according to a group of m-bit sub-writing control information in the writing control information.
Corresponding to the encoding method set forth in step S22, this step is implemented by using a decoding method for writing control information, and includes the following steps:
writing corresponding information recording points on a recording layer of a physical storage medium of an optical disc according to a group of m-bit binary numbers in the digital storage information; judging whether to carry out corresponding depth information groove writing at the corresponding data storage position of the information recording point according to the digital code of each binary number, and forming continuous writing groove depth information w of the information recording point after writing k1 ；
Moving the solid writing light beam to the next information recording point after completing the writing of the information recording point, controlling the solid writing light beam to perform groove writing according to the next group of m-bit binary numbers in the digital storage information, and forming continuous writing groove depth information of the information recording point after writing
Until all information recording points are inscribed to form total continuous inscription groove depth information->
1≤k 1 ,k 2 ≤2 m 。
Referring to fig. 1A, taking m =3 as an example, different groove depths Z are performed at 3 fixed positions (1), (2), (3) at the information recording spot 107 of the recording layer 102 1 、Z 2 、Z 3 The writing is controlled according to the content of the writing control code, and if the number corresponding to (m) in the writing control code is "1", the groove depth Z is performed at (m) m If the number corresponding to (m) in the code is "0", the writing is not performed at (m). Of course, the meanings of "0" and "1" may be interchanged in specific applications, that is, the digital code is written when being "0" but not when being "1", which is not limited in the present invention. After the writing of the information recording spot 107 is completed, the writing is moved to the next information recording spot according to 105, and so on until the whole process of data recording is completed.
It is noted that different depth information can be used for data storage at the same data storage location, thereby increasing the data information storage capacity.
S24: and after completing the writing of the information recording points, moving the compressed focal spot to the position of the next information recording point to be written, and controlling the compressed focal spot to write according to the next group of m-bit sub writing control information in the writing control information until the writing of the digital storage information of all the information recording points is completed.
Further, the optical disc writing method based on nanolithography of this embodiment further includes: controlling the beam intensity and action time of the solid writing beam to control the groove writing depth at the data storage position on the recording layer; the width of groove writing at the data storage location on the recording layer is controlled by controlling the beam intensity and the action time of the hollow writing beam.
It is worth noting that, by the optical disc writing method based on nano lithography of the embodiment, the size of the information recording point is not more than 130nm, and the track pitch of the information recording point is not more than 320nm, so that the storage density and the storage dimension of the optical disc are greatly improved while the writing speed of lithography information is improved.
Seventh embodiment
As shown in fig. 3A, the present embodiment provides an optical disc reading method based on nanolithography, including the following steps:
s31: a white light source is formed and focused to irradiate an information recording spot of a recording layer of a physical storage medium of an optical disc.
S32: the measurement light signal is collected.
The measuring optical signal comprises a total reflected light field formed by coherent superposition of the reflected light fields of the writing grooves of the information recording point
Wherein it is present>
A reflected light field of the ith writing groove of the information recording point; e 0 The reflected light field is the reflection light field of the non-engraved groove; m is the number of bits of the data storage site of the information recording point; the '0' and '1' numbers respectively represent whether the data storage site of the information recording point has a writing groove or not; n is 1 (λ) is the refractive index of the recording layer of the optical disc physical storage medium, which depends on the wavelength λ of the writing beam; z is a linear or branched member i For the depth information of the ith writing groove, Z 0 =0 denotes that the unwritten groove depth information is 0; l 0 Is the thickness of the recording layer;
Δn＝n 1 -n 0 ，n 0 is the refractive index of air.
This step is explained below with reference to fig. 3B. In detail, with the optical disc physical storage medium of the first embodiment, the incident light field is
First passing through the recording layer and having a refractive index n 1 (lambda) thickness of l 0 Then passes through the reflecting layer with refractive index n 2 (lambda) thickness of l 1 The high-power objective lens collects the reflected spectrum signal to obtain a reflected light field, namely, the writing direction is opposite to the reading direction. Due to, for different trench depths Z i The corresponding recording layer has a thickness of (l) 0 -Z i ) Thus, the reflected light field signal of the ith writing groove of an information recording spot can be expressed as->
Wherein m is the number of bits of the data storage site of the information recording point, the "0" and "1" numbers respectively indicate whether the data storage site of the information recording point has a writing groove, and n 1 (λ) is the refractive index of the recording layer, which depends on the wavelength λ, l 0 Thickness of recording layer, Z i For correspondingly writing the depth (Z) of the groove 0 ＝0)，/>
Δn＝n 1 -n 0 . The reflected light fields corresponding to the different groove depths form a complete base E of the reflection spectrum measurement 0 ，E 1 ，E 2 ...E m (ii) a The depth of m-bit grooves is inscribed in a measuring beam diffraction limited light spot, and the corresponding total reflected light field is coherent superposition of light fields of all orders, namely->
Intensity of the reflected spectrum of
S33: obtaining the depth information w of the continuous writing groove on the recording layer of the optical disc physical storage medium in advance k And its corresponding digital storage information s k Reflectance measurement spectrum information ref k The association relationship of (2).
As shown in fig. 2B, taking m =3 as an example, the corresponding writing control codes are "000" to "111" respectively at (1), (2) and (c),(3) Is processed into grooves Z with different depths 1 、Z 2 、Z 3 The writing result and the reflection spectrum curve corresponding to each writing control code group are shown below the information writing. As can be seen from the corresponding reflection spectrum information in fig. 1D, within the spectrum window of 340nm to 500nm, there is a large difference between the corresponding reflection spectra, including the movement of the "peak", the variation of the intensity, and the movement of the "peak valley".
S34: obtaining reflectance measurement spectral information ref from the measurement optical signal k ' thereafter, the reflectance measurement spectrum information ref matched with the correlation is searched in the correlation k Corresponding continuous writing groove depth information w k Further, the continuous writing groove depth information w k Digital storage information s of the corresponding information recording point k And (6) reading.
As described above, the data storage information can be decoded from the reflection spectrum in combination with steps S33 to S34. The writing information is reversely solved by comparing the measured reflection spectrum curve with the corresponding superposed light field distribution, the m-bit digital storage information can be read at one time, and the reading speed of the optical disk is greatly accelerated.
Further, the optical disc reading method based on nanolithography of this embodiment further includes: focusing and irradiating a white light source on a next information recording point of a recording layer of the optical disk physical storage medium; and obtaining the data storage information of the next information recording point according to the measured optical signal of the next information recording point and the incidence relation until the data storage information of all the information recording points is read out.
Eighth embodiment
As shown in fig. 4, an optical disc reading/writing apparatus based on nanolithography is shown, and the reading/writing apparatus can be divided into an optical disc writing apparatus based on nanolithography and an optical disc reading apparatus based on nanolithography. The optical disc writing apparatus of this embodiment can be used to implement writing of information into the optical disc physical storage medium of the first embodiment, and the principle of the optical disc writing method corresponds to the sixth embodiment; and the optical disc reading apparatus can be used to read the digital storage information of the optical disc physical storage medium of the first embodiment, and the principle of the optical disc reading method corresponds to the seventh embodiment.
The optical disc writing device based on nano-lithography of the embodiment comprises: a light path module and a control module, wherein the control module may adopt a CPU, an MCU, an SOC, and other control devices, and is configured to execute steps S22 to S24 described in the sixth embodiment, and control the depth of the writing groove at the data storage location on the recording layer by controlling the beam intensity and the action time of the solid writing beam; the width of the writing groove at the data storage position on the recording layer is controlled by controlling the beam intensity and the acting time of the hollow writing beam.
When the optical path module compresses the focal spot size of the solid writing beam and irradiates it on the physical storage medium of the optical disc in the second mode in the sixth embodiment, the optical path module includes: a first laser 501, a first lens 502, a first filter 503, a second lens 504, a first dichroic mirror 505, and a high power objective 508.
When in work: the first laser 501 emits laser with a first preset wavelength as a solid writing beam; the first lens 502, the first filter 503 and the second lens 504 are sequentially arranged along the optical path of the solid writing beam; the first lens 502 converges the solid writing light beam, the filter 503 filters the solid writing light beam converged by the first lens 502, and the second lens 504 collimates and expands the solid writing light beam filtered by the first filter 503 and converges the solid writing light beam to the first dichroic mirror 505; the first dichroic mirror 505 is arranged at a certain angle with the second lens 504, and reflects the solid writing light beam collimated and expanded by the second lens 504 to the high-power objective 508; the high power objective lens 508 focuses the received solid writing beam and irradiates it onto the surface of the optical disc physical storage medium 509 to perform writing of data storage information.
Preferably, the first laser 501 is a blue laser, an ultraviolet laser, a deep ultraviolet laser, or a high peak power laser with a wavelength range from visible light to ultraviolet light, and the compressed diffraction-limited focusing spot 104 is obtained by a focusing method using a shorter wavelength writing beam (which may be a semiconductor laser with 405nm or shorter wavelength output, or 355 nm and 266 nm solid laser output, or 248 nm, 193 nm and 157 nm excimer laser output, etc.) and a high numerical aperture objective lens, and the beam is applied to the recording layer for information recording.
Preferably, the first filter 503 is a small hole or a single mode fiber, such as: the writing beam is emitted from a laser 501, focused by a lens 502, and filtered by a corresponding μm-level pinhole 503 according to the focal length and NA of the lens 502, or a single-mode fiber can be selected to replace the pinhole 503.
The optical disc reading apparatus based on nanolithography of the present embodiment includes: an optical path module and a processing module, wherein the processing module may adopt a spectrometer 514 for executing steps S31 to S34 described in the seventh embodiment. Types of spectrometers 514 include, but are not limited to, grating spectrometers or high-speed measurement spectrometers, and the like.
The conventional grating spectrometer adopts a mechanical rotation grating method, and is not suitable for high-speed reading and processing of data. In order to meet the requirements of optical disc reading on speed and sensitivity, the spectrometer 514 of this embodiment uses a high-speed measurement spectrometer, which specifically includes: the system comprises an optical dispersion element, a narrow-band integrated optical filter and a linear array detector; wherein the optical dispersion element splits the received measurement optical signal to spatially spread the reflected spectral information; the narrow-band integrated optical filter obtains light with a wavelength corresponding to the reflection spectrum information after the light is dispersed by the optical dispersion element; the linear array detector detects the light intensity of the light with each wavelength obtained by the narrow-band integrated optical filter to obtain the reflection spectrum information. Certainly, in other specific applications, the spectrometer can only use the modes of the optical dispersion element + the linear array detector or the integrated narrowband filter + the linear array detector to perform rapid spectral information measurement according to the actual spectral measurement requirement.
When the optical path module compresses the focal spot size of the solid writing beam and irradiates it on the physical storage medium of the optical disc in the second mode in the sixth embodiment, the optical path module includes: a light source 513, a lens group 512, a high power objective 508, a beam splitter 507, a single lens 511, and further, in order to achieve the combination with the writing device, the reading device further includes a third dichroic mirror 506 disposed between the lens group 512 and the beam splitter 507.
When in work: the light source 513 emits white light; the lens group 512 collimates and expands the beam of the white light, reflects the white light to the third dichroic mirror 506, and then reaches the beam splitter 507 after reflection; the beam splitter 507 splits the received white light and transmits the split white light to the high power objective 508; the high power objective 508 focuses the received white light on the surface of the optical disc physical storage medium 509 to perform reflection measurement on the recording layer thereof, and emits the collected measurement light signal; the beam splitter 507 splits the measurement optical signal emitted by the high power objective 508; the single lens 511 converges the received measurement light signal to the spectrometer 514; the spectrometer 514 processes the received measured light signal and decodes data storage information therefrom.
Preferably, the light source is a halogen lamp, a tungsten lamp, a xenon lamp, a white light LED lamp, a band-pass filtering white light source, or an ultraviolet LED light source. The bandpass filtered white light source allows the measurement spot to be compressed. The ultraviolet LED light source enables the measurement information recording dot pitch and the track pitch to be further improved.
In addition, the specific material of the recording layer can be selected according to the type of light source, such as halogen lamp, tungsten lamp, xenon lamp, white light LED lamp, and white light source, and SiO 2 And photosensitive materials and the like are used as recording layer materials, and the materials are characterized by having higher transmissivity in visible light and ultraviolet bands; and when the ultraviolet LED light source is adopted to improve the distance between the recording points of the measured information and the distance between the tracks, gaF is selected 2 ，MgF 2 And the like as recording layer materials, which are characterized by higher transmissivity in ultraviolet and deep ultraviolet bands.
Ninth embodiment
As shown in fig. 5, an optical disc reading/writing apparatus based on nanolithography is shown, and the reading/writing apparatus can be divided into an optical disc writing apparatus based on nanolithography and an optical disc reading apparatus based on nanolithography. The optical disc writing apparatus of this embodiment is used to implement writing of information to the optical disc physical storage medium of the second embodiment, and the principle of the optical disc writing method corresponds to the sixth embodiment, while the optical disc reading apparatus is used to implement reading of information to the optical disc physical storage medium of the second embodiment, and the principle of the optical disc reading method corresponds to the seventh embodiment.
Different from the eighth embodiment, the optical path module of this embodiment adopts the first method in the sixth embodiment to compress the focal spot size of the solid writing beam and irradiate it to the physical storage medium of the optical disc. Thus, the structure of the optical disc writing apparatus of the present embodiment can be regarded as adding the following structure to the structure of fig. 3A: a second laser 601, a third lens 603, a second filter 605, a fourth lens 607, a hollow beam generator 609, and a second dichroic mirror 610. Since the structure and operation principle of the optical disc reading apparatus of this embodiment are the same as those of the reading apparatus shown in fig. 3A, the detailed description is not repeated.
When in work: the second laser 601 emits laser with a second preset wavelength; the third lens 603, the second filter 605, the fourth lens 607 and the hollow beam generator 609 are sequentially arranged along the optical path of the laser with the second preset wavelength; the third lens 603 converges the laser with the second preset wavelength, the second filter 605 filters the laser with the second preset wavelength converged by the third lens 603, the fourth lens 607 collimates and expands the laser with the second preset wavelength filtered by the second filter 605 and converges the laser with the second preset wavelength to the hollow light beam generator 609, and the hollow light beam generator 609 generates a hollow suppression light beam according to the received laser with the second preset wavelength and transmits the hollow suppression light beam to the second dichroic mirror 610; the second dichroic mirror 610 is arranged at an angle to the hollow beam generator 609 and in parallel with the first dichroic mirror 611, reflecting the hollow suppression beam to the high power objective 614; the high power objective lens 614 focuses the solid writing beam to form a solid light spot 616 with a size of "diffraction limit" and a hollow light beam 617 of the hollow inhibiting beam, which are spatially overlapped and simultaneously irradiate the surface of the optical disc physical storage medium 615 for writing data storage information; wherein the solid light spot 616 is used for writing data storage information, and the hollow light beam 617 is used for suppressing the peripheral light spot of the solid light spot 616 from transmitting through the absorption modulation layer of the optical disc physical storage medium 815.
The above-mentioned implementation of spatially coinciding the solid spot 616 with the hollow beam 617 may be: the divergence of the light beam 616 is adjusted by adjusting the front and back positions of the lens 608, while the dichroic mirror 611 is adjusted, and the incident angle of the light beam 616 is adjusted, based on the hollow light beam 617, such that the solid light spot 616 spatially coincides with the hollow light beam 617 while acting on the physical storage media structure 615 of the optical disc to perform a data storage information writing process 618 on the recording layer.
Preferably, the light intensity of the laser with the first preset wavelength accords with gaussian intensity distribution; the light intensity of the laser with the second preset wavelength accords with the annular intensity distribution, and the central intensity tends to zero. The writing light beam can be blue light or ultraviolet short wavelength continuous laser, and visible to ultraviolet high peak power pulse laser can be selected according to the two-photon absorption characteristic of the material of the recording layer, so that the small-size two-photon two-beam nanometer information writing is realized.
Preferably, the second filter 605 is a small hole or a single mode fiber, specifically: the writing light beam is emitted from the laser 602, focused by the lens 604, and filtered by selecting the corresponding μm-level pinhole 606 according to the focal length and NA of the lens 604, or selecting a single-mode fiber to replace the pinhole 606; the suppression beam is emitted from the laser 601, focused by the lens 603, and filtered by selecting the corresponding μm-level pinhole 605 according to the focal length and NA of the lens 603, or selecting a single mode fiber instead of the pinhole 605.
Preferably, the hollow beam generator 609 uses a vortex phase plate or a spatial light modulator to generate a laser beam with a phase distribution from 0 to pi.
Tenth embodiment
As shown in fig. 6, it is shown as a cd-rom based on nanolithography, which is used to read information from the physical storage medium of the optical disc, such as the first embodiment or the second embodiment. The reading apparatus based on nanolithography of the present embodiment includes: a light source 701, a lens group 702, a high power objective lens 704, a beam splitter 703, a single lens 707, and a spectrometer 708.
When in work: the light source 701 emits white light; the lens group 702 collimates and expands the white light and converges the white light to the beam splitter 703; the beam splitter 703 splits the received white light and transmits the split white light to the high power objective 704; the high power objective lens 704 focuses the received white light on the surface of the optical disc physical storage medium 705 to perform reflection measurement on the recording layer thereof, and emits the collected measurement light signal; a single lens 707 converges the measurement light signal to a spectrometer 708; the spectrometer 708 processes the received measured light signal and decodes the data storage information therefrom.
Since the optical disc reading method based on nanolithography performed by the optical disc read-only device of this embodiment is the same as the principle of the seventh embodiment, the detailed description is not repeated.
The cd rom device of this embodiment can realize fast measurement and reading of signals, the optical path is simple, the stability is strong, the spectrometer 708 combines the linear array detector to fast obtain spectral information by using the method of optical dispersion element and narrow band filter, and processes signals, so as to meet the practical requirement of fast data processing during cd reading, and is suitable for high-speed reading of cd information.
In summary, the optical disc read-write method based on nano lithography and the encoding and decoding method of the writing control information of the present invention have the following beneficial technical effects:
1. compared with the existing blue-ray disc storage method, when m =0, the optical disc writing method of the nano-photoetching information is similar to the existing blue-ray disc storage technology, but the invention can realize information recording points with smaller size, so that the size and the track pitch of the written information recording points can be equal to or smaller than or far smaller than 130nm and 320nm of the existing blue-ray recording points; when m is larger than or equal to 1, the storage density and the storage dimension are effectively improved. Therefore, the method has higher storage capacity, higher reading speed and stronger expandability;
2. the optical disc writing method based on the nano lithography improves the information storage density by reducing the spot size of the writing light beam and improves the information storage dimension by using different groove depths to characterize digital information with different digits, thereby greatly improving the storage density and the storage capacity of the optical disc information storage;
3. compared with the existing blue-ray disc for storing data by using the refractive index change of materials, the optical disc writing method based on nano lithography has higher stability and is more suitable for long-term storage of information;
4. the material absorption modulation characteristic is utilized to compress the focused light spot of the etching light beam, and the etching depth and the etching width are accurately controlled by controlling the intensity and the acting time of the etching light beam and the inhibiting light beam, so that the nanometer photoetching information writing process with nanometer size is realized;
5. the reflection spectrum measuring method can realize the quick reading of the stored information, and simultaneously, in the data reading process, the data reading can be carried out under the requirement of the positioning precision of the existing optical drive due to the adoption of a white light spectrum reading mode without greatly improving the existing optical drive system;
6. the storage capacity of the optical disk can be further improved by increasing the intermediate layer of the high-refractive-index material to improve the difference of the reflection spectrum and the spectrum reading resolution capability and optimizing the optical disk structure according to the specific practical requirements;
7. the novel medium cavity physical storage structure of the optical disk is provided, the information writing density and the spectrum reading efficiency are further improved, and the service life, the scratch resistance and the dust resistance of the optical disk are improved;
8. the high-speed measurement spectrometer adopts an optical dispersion element and a narrow-band filter, and is combined with a linear array detector, so that spectral information can be quickly obtained, the high-speed measurement spectrometer is applied to reading of optical disc information, and the reading speed of optical discs is greatly improved.
The foregoing embodiments are merely illustrative of the principles and utilities of the present invention and are not intended to limit the invention. Any person skilled in the art can modify or change the above-mentioned embodiments without departing from the spirit and scope of the present invention. Accordingly, it is intended that all equivalent modifications or changes which can be made by those skilled in the art without departing from the spirit and technical spirit of the present invention be covered by the claims of the present invention.
Claims (7)
1. An optical disc reading method based on nanolithography, comprising:
forming a white light source and focusing and irradiating the white light source on an information recording point of a recording layer of a physical storage medium of an optical disc, wherein the groove writing depth of a data storage point on the recording layer is controlled by the beam intensity and action time of a solid writing beam, and the groove writing width of the data storage point on the recording layer is controlled by the beam intensity and action time of a hollow writing beam;
collecting a measurement light signal; the measuring optical signal comprises a total reflected light field formed by coherent superposition of the reflected light fields of the writing grooves of the information recording point
Wherein +>
A reflected light field of the ith writing groove of the information recording point; e 0 A reflected light field of the non-engraved groove; m is the number of bits of the data storage site of the information recording point; the '0' and '1' numbers respectively represent whether the data storage site of the information recording point has a writing groove or not; n is 1 (λ) is the refractive index of the recording layer of the optical disc physical storage medium, which depends on the wavelength λ of the writing beam; z i For the depth information of the ith writing groove, Z 0 =0 denotes that the unwritten groove depth information is 0;
l 0 is the thickness of the recording layer;
Δn＝n 1 -n 0 ，n 0 the refractive index of air is adopted, different depth information represents different digits at each data storage site for data storage, namely, different storage digits are represented by a plurality of different depth information grooves at the same data storage site;
obtaining the continuous writing groove depth information w on the recording layer of the optical disk physical storage medium in advance k And its corresponding digital storage information s k Reflectance measurement spectral information ref k The association relationship of (a);
obtaining reflectance measurement spectral information ref from the measurement optical signal k ' thereafter, the reflectance measurement spectrum information ref matched with the correlation is searched in the correlation k Corresponding continuous writing groove depth information w k Further, the continuous writing groove depth information w k Digital storage information s of the corresponding information recording point k And (6) reading.
2. The method of claim 1, further comprising:
focusing and irradiating a white light source to a next information recording point of a recording layer of the optical disk physical storage medium;
and obtaining the digital storage information of the next information recording point according to the measured optical signal of the next information recording point and the incidence relation until the digital storage information of all the information recording points is read out.
3. A method of decoding lithographic information from a reflectance measurement spectrum, comprising:
pre-establishing continuous writing groove depth information w on recording layer of optical disc physical storage medium k And its corresponding digital storage information s k Reflectance measurement spectral information ref k The association relationship of (a); wherein each reflectance measurement spectrum information ref k Form a reflection measurement spectrum set Ref = { Ref = { Ref 1 ,ref 2 ,...,ref 2m }；
Obtaining reflection spectrum information ref of a measured information recording point k ' when, the matched reflection measurement spectrum information ref is searched in the correlation k Corresponding continuous writing groove depth information w k Further, the continuous writing groove depth information w k Corresponding digital storage information s k AsAnd decoding the obtained digital storage information of the information recording points.
4. An optical disc reading apparatus based on nanolithography, comprising:
the optical path module is used for forming a white light source and focusing and irradiating the white light source on an information recording point of a recording layer of the physical storage medium of the optical disk; for collecting light measurement signals; the measuring optical signal comprises a total reflected light field formed by coherent superposition of the reflected light fields of the depth information writing grooves of the information recording points
Wherein,
a processing module for obtaining the continuous groove writing information w on the recording layer of the optical disc physical storage medium in advance k And its corresponding reflectance measurement spectral information ref k The association relationship of (a); obtaining reflectance measurement spectral information ref from the measurement optical signal k Then, the matched reflection measurement spectrum information ref is searched in the correlation k Corresponding continuous writing groove information w k According to which information s is stored as a number of said information recording spots k -read out, the processing module comprising: a spectrometer; wherein the light source is used for emitting white light; the lens group is used for collimating and expanding the white light and converging the white light to the beam splitter; the beam splitter is used for splitting the received white light and transmitting the white light to the high-power objective lens; the high power objective lens is used for focusing the received white light on the surface of the optical disk physical storage medium so as to perform reflection measurement on the recording layer of the optical disk physical storage medium and emit the collected measuring light signal; the single lens is used for converging the measuring light signal to the spectrometer; the spectrometer for processing the received measurement light signal and decoding data storage information therefrom, the spectrometer comprising: a grating spectrometer or a high-speed measurement spectrometer; the high-speed measurement spectrometer comprises: the optical dispersion element, the narrow-band integrated optical filter and the linear array detector; wherein the optical dispersion element is configured to split the received measurement optical signal so as to spatially spread the reflection spectrum information; the narrow-band integrated optical filter is used for obtaining light with a wavelength corresponding to the reflection spectrum information after the light is dispersed by the optical dispersion element; and the linear array detector is used for detecting the light intensity of the light with each wavelength obtained by the narrow-band integrated optical filter so as to obtain the reflection spectrum information.
5. An optical disc reading apparatus according to claim 4, wherein the light source is a halogen lamp, a tungsten lamp, a xenon lamp, a white LED lamp, a band-pass filtered white light source, or an ultraviolet LED light source.
6. An optical disc read-write device based on nanolithography, comprising: the nanolithography based optical disc reading apparatus according to any one of claims 4 to 5.
7. The optical disc reading/writing apparatus according to claim 6, wherein the reading apparatus further comprises a third dichroic mirror, disposed between the lens group of the reading apparatus and the beam splitter, for reflecting the white light collimated and expanded by the lens group to the high power objective lens;
the beam splitter is used for splitting the measuring optical signal emitted by the high-power objective lens;
and the single lens is used for converging the measuring optical signal split by the beam splitter to the spectrometer.
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| CN113838485B (en) * | 2020-06-08 | 2024-10-25 | 中国科学院上海高等研究院 | Two-dimensional information code writing and quick reading method and device for optical disc |
| CN113838486B (en) * | 2020-06-08 | 2024-10-25 | 中国科学院上海高等研究院 | Coding information writing and interferometry reading method and device for nano-inscribed optical disk |
| CN114895535B (en) * | 2022-07-13 | 2022-12-02 | 之江实验室 | Super-resolution lithography method based on double-step absorption effect and STED principle |
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