CN113369507A - High-speed high-precision electric spindle integrating three-dimensional vibration active control function - Google Patents

High-speed high-precision electric spindle integrating three-dimensional vibration active control function Download PDF

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Publication number
CN113369507A
CN113369507A CN202110721989.5A CN202110721989A CN113369507A CN 113369507 A CN113369507 A CN 113369507A CN 202110721989 A CN202110721989 A CN 202110721989A CN 113369507 A CN113369507 A CN 113369507A
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radial
main shaft
displacement sensor
axial
shaft body
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CN202110721989.5A
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Chinese (zh)
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田胜利
张建恒
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Chongqing Technology and Business University
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Chongqing Technology and Business University
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Priority to CN202110721989.5A priority Critical patent/CN113369507A/en
Publication of CN113369507A publication Critical patent/CN113369507A/en
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23QDETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/70Stationary or movable members for carrying working-spindles for attachment of tools or work

Abstract

The invention relates to the technical field of electric spindles, and particularly discloses a high-speed and high-precision electric spindle integrating three-dimensional vibration active control function, which comprises a spindle body and a shell, and further comprises an actuator, a radial displacement sensor, an axial displacement sensor and a processor, wherein the actuator comprises a radial control winding and an axial control winding, and the radial control winding and the axial control winding are arranged on the periphery of the spindle body in a non-contact manner; the processor is used for receiving the three-dimensional vibration signals of the main shaft body measured by the radial displacement sensor and the axial displacement sensor, and guiding the actuator to apply axial control force and radial control force to the main shaft body after real-time calculation by the processor, so that three-dimensional vibration of the main shaft body is inhibited. According to the scheme, the non-contact actuator and the displacement sensor are arranged, so that the three-dimensional vibration of the spindle body is monitored in real time, the purpose of inhibiting the three-dimensional vibration in real time is achieved, the machining precision of the electric spindle is improved, and high-precision machining of the high-speed electric spindle is facilitated.

Description

High-speed high-precision electric spindle integrating three-dimensional vibration active control function
Technical Field
The invention relates to the technical field of electric spindles, in particular to a high-speed high-precision electric spindle integrating three-dimensional vibration active control function.
Background
The high-speed precise electric spindle is used as a marking functional component of a modern machine tool, is rapidly developed and perfected in several years, is applied to various machine tools such as turning, milling, grinding and the like at present, is a preferred component in a high-grade machining center, can generate vibration in the machining process of the electric spindle, and the electric spindle always needs to machine complex parts, so that the vibration of the electric spindle has complexity, and the complex vibration characteristic of the high-speed electric spindle directly influences the motion track of a cutter to cause machining surface errors.
Although some spindle production enterprises in China already have professional design and process technology levels and perfect or even advanced machining equipment for the parts of the electric spindle, the dynamic behavior and the machining surface precision of the high-speed electric spindle are improved by means of improving the machining precision, the assembling precision and the like of the parts of the electric spindle, and the high-speed electric spindle is limited by various factors such as production cost, technical bottlenecks and the like; the domestic high-speed electric main shaft produced by using an imported motor and a bearing has unsatisfactory comprehensive performance. In short, the development of high-precision and high-reliability high-speed electric spindles is heavy and far.
In the prior art, a vibration active control theory and technology provides a development idea of reducing vibration response of a main shaft by adopting an active intervention means so as to improve the precision of a machined surface, namely, an online monitoring technology is applied to measure the vibration response of the main shaft as a feedback signal, and the feedback signal is calculated in real time by a vibration active control algorithm so as to drive an actuator to inhibit the vibration of the main shaft, thereby improving the precision of the machined surface.
At present, domestic and foreign documents mainly aim at the radial vibration of the electric spindle to carry out active control, for example, a sensor is adopted to monitor the radial vibration condition of the spindle, and a flexible supporting structure is utilized to ensure that a control force can act on the spindle, but the problem still exists, for example, the vibration of the electric spindle is not only simple radial vibration, but is not comprehensive only in radial monitoring and processing; in addition, the flexible supporting structure is adopted to exert external force on the main shaft, on one hand, the movement of the main shaft is influenced, and if the influence of the supporting structure on the main shaft is small, the mounting difficulty and the manufacturing difficulty of the supporting structure are increased.
Disclosure of Invention
The invention aims to provide a high-speed high-precision electric spindle integrating a three-dimensional vibration active control function, and solves the problem that vibration monitoring and control are incomplete due to the fact that vibration of the electric spindle is only monitored in the radial direction in the prior art.
In order to achieve the above object, the basic scheme of the invention is as follows:
the high-speed high-precision electric spindle integrating the three-dimensional vibration active control function comprises a spindle body and a shell, wherein the spindle body is rotatably connected to the shell, the high-speed high-precision electric spindle further comprises an actuator, a radial displacement sensor, an axial displacement sensor and a processor, the actuator comprises a radial control winding and an axial control winding, and the radial control winding, the axial control winding, the radial displacement sensor and the axial displacement sensor are all electrically connected with the processor; the radial control winding and the axial control winding are fixed on the shell and are arranged on the periphery of the main shaft body in a non-contact mode; the radial displacement sensor and the axial displacement sensor are uniformly arranged on the periphery of the main shaft body, the radial displacement sensor is used for acquiring a radial displacement signal of the main shaft body, the radial displacement sensor comprises a front radial displacement sensor and a rear radial displacement sensor, and a connecting line of the front radial displacement sensor and the rear radial displacement sensor is parallel to the axial direction of the main shaft body; the axial displacement sensor is used for acquiring an axial displacement signal of the main shaft body; the processor is used for controlling the radial control winding to apply radial control force to the main shaft body when the radial displacement signal acquired by the front radial displacement sensor changes; the processor is used for controlling the radial control winding to apply radial control force to the main shaft body when radial displacement signals acquired by the front radial displacement sensor and the rear radial displacement sensor change; and the processor is used for controlling the axial control winding to apply axial control force to the main shaft body when the axial displacement signal changes.
Compare the beneficial effect in prior art:
when the scheme is adopted, when the main shaft body collected by the radial displacement sensor changes in a radial displacement signal, the main shaft body vibrates in the radial direction, and the radial control force can be given to the main shaft body by adjusting the current condition of the radial control winding through the processor so as to offset the radial cutting force of the main shaft body part and achieve the purpose of inhibiting the main shaft body from vibrating in the radial direction. When the axial displacement signal acquired by the axial displacement sensor changes, the axial vibration of the main shaft body is meant, and at the moment, the processor adjusts the current condition of the axial control winding, so that an axial control force can be given to the main shaft body to offset the axial cutting force of the main shaft body, and the purpose of inhibiting the main shaft body from vibrating in the axial direction is achieved. In addition, when the radial displacement signal collected by the front radial displacement sensor and the radial displacement signal collected by the rear radial displacement sensor change, the main shaft body is inclined at an angle, and the radial control force can be applied to the main shaft body by adjusting the current condition of the radial control winding through the processor, so that the inclination condition of the main shaft body is adjusted. By adopting the scheme, the three-dimensional vibration generated in the radial direction, the axial direction and the inclination angle direction of the main shaft body can be inhibited, the processing precision of the electric main shaft is improved, and the high-precision processing of the high-speed electric main shaft is facilitated.
Compared with the prior art, the scheme arranges the radial displacement sensor and the axial displacement sensor on the premise of not interfering the cutting of the main shaft body, realizes the online real-time monitoring of the three-dimensional vibration of the main shaft body and realizes the omnibearing monitoring of the vibration of the main shaft body; the three-dimensional vibration generated by the main shaft body in the radial direction, the axial direction and the inclination angle is processed in real time by combining the processor, the radial control winding and the axial control winding, so that the three-dimensional vibration of the high-speed and high-precision electric main shaft is inhibited, and the axial high-precision development of the electric main shaft is promoted.
In addition, compared with the prior art, the radial control winding and the axial control winding of the scheme provide radial control force and axial control force for the main shaft body on the premise of not contacting with the main shaft body, and damage of a contact type actuator to an original supporting system of the high-speed electric main shaft in the prior art is avoided.
Further, the number of the radial control windings is multiple, and the radial control windings which are opposite in the radial direction are connected in series.
Has the advantages that: through the arrangement of the radial control windings, radial control force can be generated in a plurality of radial directions, and then the control on a plurality of radial vibrations of the main shaft body is realized.
Furthermore, the number of the axial control windings is two, a rotor core is fixedly connected to the main shaft body and located between the two axial control windings, and the two axial control windings are connected in series.
Has the advantages that: the arrangement of two axial control windings facilitates the generation of axial control forces in both axial directions.
Further, the radial control winding is located between the two axial control windings, and the plurality of radial control windings are distributed on the periphery of the rotor core.
Has the advantages that: the rotor core is positioned between the two axial control windings and is surrounded by the plurality of radial control windings, so that the axial control windings can conveniently apply axial control force to the main shaft body, and the radial control windings can conveniently apply radial control force to the main shaft body.
Furthermore, the actuator further comprises a radial stator, the radial control winding is arranged on the radial stator, a plurality of permanent magnets are further arranged on the radial stator, and the permanent magnets and the radial control winding are arranged at intervals.
Has the advantages that: the permanent magnets and the radial control windings are arranged at intervals, so that the magnetic leakage problem of the active magnetic suspension bearing is greatly reduced compared with the common active magnetic suspension bearing; meanwhile, the power loss of the scheme is greatly reduced compared with that of an active magnetic suspension bearing; in addition, the permanent magnet can generate a radial bias magnetic field in the radial stator and also can generate an axial bias magnetic field in the axial control winding, and the bias magnetic field can be superposed or offset with the control magnetic field, so that the actuator formed by the radial control winding and the axial control winding can ensure that the actuator has small size and small mass and can ensure wider vibration adjustment range of the main shaft body.
Furthermore, the shell is provided with a connecting hole, the radial displacement sensor is detachably connected to the shell, and the radial sensor penetrates through the connecting hole and is inserted into the shell.
Has the advantages that: through the arrangement of the connecting holes, on one hand, the online real-time monitoring of the three-dimensional vibration of the main shaft body is ensured on the premise of not influencing the assembly and operation of the existing electric main shaft; on the other hand, the radial displacement sensor is convenient to disassemble and assemble.
Further, the main shaft body is rotatably connected to the shell through a front bearing and a rear bearing, the front radial displacement sensor is close to the front bearing, and the rear radial displacement sensor is close to the rear bearing.
Has the advantages that: when the electric main shaft runs, the main shaft body is supported by the front bearing and the rear bearing, so that the rigidity of the main shaft body mainly depends on the rigidity of the front bearing and the rear bearing, the front bearing and the rear bearing are greatly influenced when the main shaft body vibrates, the radial displacement sensor is arranged at a position close to the bearing, the vibration of the main shaft body can be measured more accurately, the vibration condition of the front bearing and the vibration condition of the rear bearing are also measured more accurately, and the accuracy of vibration control is improved more favorably.
Further, actuator and preceding radial displacement sensor are located the both sides of front bearing, and the actuator is close to the front end of main shaft body.
Has the advantages that: when this scheme of adoption, be close to the front bearing with actuator and preceding radial displacement sensor for the compact structure of whole electricity main shaft, and the actuator is close to the front end of main shaft body, makes radial control power and the axial control power that the actuator produced can directly offset with the cutting force of main shaft body, has weakened the atress and the deformation of front and back bearing, has realized still having guaranteed the compactedness of structure under the prerequisite of the real-time accurate regulation and control to three-dimensional vibration to the real-time accurate measurement of main shaft body three-dimensional vibration.
Drawings
FIG. 1 is a schematic structural diagram of an embodiment of the present invention;
FIG. 2 is a schematic view showing the construction of an actuator according to an embodiment of the present invention;
FIG. 3 is a left side view of a radial control winding in an embodiment of the present invention;
FIG. 4 is a magnetic circuit diagram of an actuator in a radial cross section according to an embodiment of the present invention;
FIG. 5 is a magnetic circuit diagram of an actuator in an axial cross-section according to an embodiment of the present invention;
FIG. 6 is a control flow chart of an embodiment of the present invention.
Detailed Description
The following is further detailed by way of specific embodiments:
reference numerals in the drawings of the specification include: the device comprises an actuator 10, a main shaft body 7, a shell 11, a front bearing 12, a rear bearing 13, an end cover 14, a sealing disc 15, a rear radial displacement sensor 16, an axial displacement sensor 17, a front radial displacement sensor 18, a radial control magnetic pole 1, a radial control winding 2, a radial stator 3, an axial control winding 4, an axial stator 5, a rotor iron core 6 and a permanent magnet 8.
Examples
The embodiment is substantially as shown in the accompanying figures 1 to 6:
referring to fig. 1, the high-speed high-precision electric spindle integrating three-dimensional vibration active control function comprises a spindle body 7 and a shell 11, wherein the spindle body 7 is rotatably connected to the shell 11 through a front bearing 12 and a rear bearing 13, the front bearing 12 and the rear bearing 13 both adopt two pairs of precise mixed ceramic ball bearings, the high-speed high-precision electric spindle further comprises an actuator 10, a radial displacement sensor, an axial displacement sensor and a processor, the actuator 10 comprises a radial stator 3 and a radial control winding 2, the radial control magnetic pole is wound on the radial control magnetic pole 1, the radial control winding 2, the axial control winding 4, the radial displacement sensor and the axial displacement sensor are all electrically connected with the processor, and the radial displacement sensor and the axial displacement sensor are all electric eddy current displacement sensors.
An end cover 14 is fixedly connected to the shell 11 through a screw, the end cover 14 is sleeved on the main shaft body 7, a sealing disc 15 is fixedly connected to the main shaft body 7, a connecting hole is formed in the shell 11 and adopts a screw hole, a radial displacement sensor is connected to the screw hole, and the radial displacement sensor penetrates through the connecting hole and is inserted into the shell 11; an end cover 14 of the shell 11 is connected with an axial displacement sensor 17 through a screw hole; the radial displacement sensor is arranged on the periphery of the main shaft body 7 and is used for acquiring a radial displacement signal of the main shaft body 7; the axial displacement sensor is used for acquiring an axial displacement signal of the sealing disc 15 (the sealing disc 15 is fixedly connected with the main shaft body 7, so that the axial displacement condition of the main shaft body 7 is acquired equivalently).
The radial displacement sensors comprise 2 front radial displacement sensors 18 and 2 rear radial displacement sensors, the connecting line of the 2 front radial displacement sensors 18 and the center of the main shaft body 7 is 90 degrees, the 2 rear radial displacement sensors are arranged corresponding to the 2 front radial displacement sensors 18, and the connecting line of the front radial displacement sensors 18 and the rear radial displacement sensors is parallel to the axial direction of the main shaft body 7; the radial displacement signals collected by the 2 front radial displacement sensors 18 or the 2 rear radial displacement sensors are equivalent to the collected coordinates of the plane where the main shaft body 7 is located in the radial direction.
The front radial displacement sensor 18 is close to the front bearing 12, the rear radial displacement sensor is close to the rear bearing 13, the actuator 10 and the front radial displacement sensor 18 are located on two sides of the front bearing 12, and the actuator 10 is close to the front end of the main shaft body 7.
With reference to fig. 2 to 5, the number of the radial control windings 2 is plural, the radial control windings 2 which are opposite in the radial direction are connected in series, the radial stator 3 is further fixedly connected with a plurality of permanent magnets 8, the permanent magnets 8 and the radial control windings 2 are arranged at intervals, and the number of the radial control windings 2 and the number of the permanent magnets 8 are 4 in this embodiment.
The number of the axial control windings 4 is two, each axial control winding 4 is wound on the corresponding axial stator 5, the radial stator 3 is fixedly connected with the left axial stator 5 and the right axial stator 5, and meanwhile, the axial stators 5 are fixedly connected with the shell 11.
The main shaft body 7 is fixedly connected with a rotor core 6, the rotor core 6 is positioned between the two axial control windings 4, and the two axial control windings 4 are connected in series.
The radial control winding 2 is positioned between the two axial control windings 4, and the plurality of radial control windings 2 are distributed on the periphery of the rotor core 6; the radial control winding 2 is positioned between the two axial control windings 4, and the radial stator 3 is fixedly connected with the axial stator 5, so that the radial control winding 2 and the axial control winding 4 form an integral body easy to disassemble and assemble.
The working principle of the actuator 10 in this embodiment is as follows:
the permanent magnet 8 can generate a radial bias magnetic field in the radial stator 3 and an axial bias magnetic field in the axial control winding 4, and the solid line in fig. 4 and 5 is a magnetic circuit formed by the bias magnetic field generated by the permanent magnet 8.
The plurality of radial control windings 2 generate radial control magnetic fields in the radial direction, the control magnetic fields generated by the radial control windings 2 connected in series at the upper right and the lower left are taken as an example in fig. 4, and the dotted line in fig. 4 is a magnetic path formed by the radial control magnetic fields generated by the set of radial control windings 2.
The two axial control windings 4 generate axial control magnetic fields in the axial direction, and the dotted line in fig. 5 is a magnetic circuit formed by the axial control magnetic fields generated by the axial control windings 4.
The bias magnetic field can be superimposed or cancelled with the control magnetic field.
Referring to fig. 6, the processor includes a control board and a power amplifier, the control board includes an a/D conversion chip and a D/a conversion chip, the control board can execute a multi-channel control algorithm, the a/D conversion chip is electrically connected to the radial displacement sensor and the axial displacement sensor, the D/a conversion chip is electrically connected to the power amplifier, and the power amplifier is electrically connected to the radial control winding 2 and the axial control winding 4.
The processor is used for controlling the power amplifier to load voltage or current to the radial control winding 2 to apply radial control force to the main shaft body 7 when the radial displacement signal collected by the front radial displacement sensor 18 changes (which means that the main shaft body 7 vibrates in the radial direction), so as to counteract the cutting force of the main shaft body 7 in the partial radial direction, and thus, the purpose of inhibiting the main shaft body 7 from vibrating in the radial direction is achieved.
The processor is used for controlling the power amplifier to load voltage or current on the radial control winding 2 to apply radial control force to the main shaft body 7 when radial displacement signals collected by the front radial displacement sensor 18 and the rear radial displacement sensor are changed (which means that the main shaft body 7 has an angular inclination), so that the inclination condition of the main shaft body 7 is adjusted, and the vibration of the main shaft body 7 is inhibited.
The processor is used for controlling the power amplifier to load voltage or current on the axial control winding 4 to apply axial control force to the main shaft body 7 when the axial displacement signal changes (meaning that the main shaft body 7 has vibration in the axial direction), so as to counteract the cutting force of the main shaft body 7 in the partial axial direction, and thus, the purpose of inhibiting the main shaft body 7 from vibrating in the axial direction is achieved.
When the spindle is used specifically, the spindle body 7 is vibrated and intensified under the action of cutting force, collected displacement signals (radial displacement signals and axial displacement signals) are converted into digital signals through an A/D conversion chip by a radial displacement sensor and an axial displacement sensor, and the digital signals are calculated by an internal multichannel control algorithm and then converted into analog signals by a D/A conversion chip to be input to a power amplifier; and finally, the power amplifier loads the amplified voltage or current to the radial control winding 2 and the axial control winding 4, and the generated control magnetic field is superposed with the bias magnetic field to change the magnetic field distribution of the air gap, so that the resultant force borne by the high-speed spindle body 7 can be changed, and the purpose of inhibiting the three-dimensional vibration generated by the high-speed electric spindle in the radial direction, the axial direction and the inclination angle direction is achieved.
In the embodiment, the radial displacement sensor and the axial displacement sensor are arranged on the premise of not interfering the cutting of the main shaft body 7, so that the three-dimensional vibration of the main shaft body 7 is monitored on line in real time, and the omnibearing monitoring of the vibration of the main shaft body 7 is realized; the three-dimensional vibration generated by the main shaft body 7 in the radial direction, the axial direction and the inclination angle is processed in real time by combining the processor, the radial control winding 2 and the axial control winding 4, so that the three-dimensional vibration of the high-speed and high-precision electric main shaft is inhibited, and the development of the electric main shaft in the high-precision direction is promoted.
In addition, the radial control winding 2 and the axial control winding 4 of the embodiment provide radial control force and axial control force for the main shaft body 7 on the premise of not contacting with the main shaft body 7, thereby avoiding the damage of the contact type actuator 10 to the original support system of the high-speed electric main shaft in the prior art.
The foregoing is merely an example of the present invention and common general knowledge of known specific structures and features of the embodiments is not described herein in any greater detail. It should be noted that, for those skilled in the art, without departing from the structure of the present invention, several changes and modifications can be made, which should also be regarded as the protection scope of the present invention, and these will not affect the effect of the implementation of the present invention and the practicability of the patent. The scope of the claims of the present application shall be determined by the contents of the claims, and the description of the embodiments and the like in the specification shall be used to explain the contents of the claims.

Claims (8)

1. High-speed high accuracy electricity main shaft of integrated three-dimensional vibration active control function, including main shaft body and casing, main shaft body rotates to be connected on the casing, its characterized in that: the actuator comprises a radial control winding and an axial control winding, and the radial control winding, the axial control winding, the radial displacement sensor and the axial displacement sensor are all electrically connected with the processor;
the radial control winding and the axial control winding are fixed on the shell and are arranged on the periphery of the main shaft body in a non-contact mode;
the radial displacement sensor and the axial displacement sensor are uniformly arranged on the periphery of the main shaft body, the radial displacement sensor is used for acquiring a radial displacement signal of the main shaft body, the radial displacement sensor comprises a front radial displacement sensor and a rear radial displacement sensor, and a connecting line of the front radial displacement sensor and the rear radial displacement sensor is parallel to the axial direction of the main shaft body; the axial displacement sensor is used for acquiring an axial displacement signal of the main shaft body;
the processor is used for controlling the radial control winding to apply radial control force to the main shaft body when the radial displacement signal acquired by the front radial displacement sensor changes;
the processor is used for controlling the radial control winding to apply radial control force to the main shaft body when radial displacement signals acquired by the front radial displacement sensor and the rear radial displacement sensor change;
and the processor is used for controlling the axial control winding to apply axial control force to the main shaft body when the axial displacement signal changes.
2. The high-speed high-precision electric spindle integrating the three-dimensional vibration active control function according to claim 1, characterized in that: the number of the radial control windings is multiple, and the radial control windings which are opposite in the radial direction are connected in series.
3. The high-speed high-precision electric spindle integrating the three-dimensional vibration active control function according to claim 2, characterized in that: the number of the axial control windings is two, a rotor core is fixedly connected to the main shaft body and located between the two axial control windings, and the two axial control windings are connected in series.
4. The high-speed high-precision electric spindle integrating the three-dimensional vibration active control function according to claim 3, characterized in that: the radial control winding is positioned between the two axial control windings, and the plurality of radial control windings are distributed on the periphery of the rotor core.
5. The high-speed high-precision electric spindle integrating the three-dimensional vibration active control function according to claim 4, characterized in that: the actuator further comprises a radial stator, the radial control winding is arranged on the radial stator, a plurality of permanent magnets are further arranged on the radial stator, and the permanent magnets and the radial control winding are arranged at intervals.
6. The high-speed high-precision electric spindle integrating the three-dimensional vibration active control function according to claim 1, characterized in that: the casing is provided with a connecting hole, the radial displacement sensor is detachably connected to the casing, and the radial sensor penetrates through the connecting hole and is inserted into the casing.
7. The high-speed high-precision electric spindle integrating the three-dimensional vibration active control function according to claim 1, characterized in that: the main shaft body is rotatably connected to the shell through a front bearing and a rear bearing, the front radial displacement sensor is close to the front bearing, and the rear radial displacement sensor is close to the rear bearing.
8. The high-speed high-precision electric spindle integrating the three-dimensional vibration active control function according to claim 7, characterized in that: the actuator and the front radial displacement sensor are located on two sides of the front bearing, and the actuator is close to the front end of the main shaft body.
CN202110721989.5A 2021-06-28 2021-06-28 High-speed high-precision electric spindle integrating three-dimensional vibration active control function Pending CN113369507A (en)

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CN202110721989.5A CN113369507A (en) 2021-06-28 2021-06-28 High-speed high-precision electric spindle integrating three-dimensional vibration active control function

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Application Number Priority Date Filing Date Title
CN202110721989.5A CN113369507A (en) 2021-06-28 2021-06-28 High-speed high-precision electric spindle integrating three-dimensional vibration active control function

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