CN113361389B - Method for processing high-frequency oscillation characteristics of signal - Google Patents

Method for processing high-frequency oscillation characteristics of signal Download PDF

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CN113361389B
CN113361389B CN202110622371.3A CN202110622371A CN113361389B CN 113361389 B CN113361389 B CN 113361389B CN 202110622371 A CN202110622371 A CN 202110622371A CN 113361389 B CN113361389 B CN 113361389B
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邹明珣
朱阳军
张文亮
雷小阳
张军辉
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Shandong Yuexin Electronic Technology Co ltd
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    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06FELECTRIC DIGITAL DATA PROCESSING
    • G06F2218/00Aspects of pattern recognition specially adapted for signal processing
    • G06F2218/08Feature extraction
    • G06F2218/10Feature extraction by analysing the shape of a waveform, e.g. extracting parameters relating to peaks
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • H01L22/10Measuring as part of the manufacturing process
    • H01L22/14Measuring as part of the manufacturing process for electrical parameters, e.g. resistance, deep-levels, CV, diffusions by electrical means
    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06FELECTRIC DIGITAL DATA PROCESSING
    • G06F2218/00Aspects of pattern recognition specially adapted for signal processing
    • G06F2218/12Classification; Matching

Abstract

The invention relates to a method for processing high-frequency oscillation characteristics of a signal. Which comprises the following steps: step 1, storing a vibration solution in a knowledge base; step 2, when the signals to be processed are searched in a knowledge base to obtain a matched oscillation solution, skipping to step 3, otherwise, skipping to step 4; step 3, processing the signal to be processed by utilizing the searched oscillation solution, generating a processing report and skipping to the step 6; step 4, acquiring a standard waveform, and obtaining the waveform characteristics of the waveform to be processed according to the corresponding standard waveform; step 5, determining an oscillation signal processing method of the signal to be processed according to the waveform characteristics of the signal to be processed; and 6, ending. The invention can improve the authenticity, flexibility, tightness and reliability of the waveform analysis process, adapts to the unpredictable oscillation interference of the waveform, and can continuously and effectively extract the high-frequency oscillation with variable complexity.

Description

Method for processing high-frequency oscillation characteristics of signal
Technical Field
The invention relates to a processing method, in particular to a method for processing high-frequency oscillation characteristics of signals.
Background
With the wide application and rapid development of the semiconductor industry, semiconductor switching devices are gradually enriched, and the dynamic requirements of high load, fast response and low power consumption are gradually improved; for the detection equipment, "batch, rapid, consistent, real" is also the pressure and challenge facing the semiconductor detection industry; improving the analysis efficiency of dynamic testing is of great significance to research and development and process improvement.
In the development and production process of semiconductor devices, specific product design, such as a core chip, a packaging process, etc., is required according to the target market demand and requirements of the product. After the design and production of the product are finished, the product needs to be dynamically tested, whether the semiconductor device meets the market requirement is determined by analyzing dynamic test parameters, the design or product process is adjusted in time under the real dynamic parameters, and the technical index of the semiconductor device is improved. The method can be used for carrying out batch dynamic test analysis on the semiconductor devices which are produced in quantity, so that the reliability of the design and production process of the semiconductor devices can be ensured, and the public confidence of enterprises can be improved. However, in the field of detection, it is always difficult to ensure the authenticity of the signal waveform and to provide consistent and specific quantization parameters in the processing of the oscillating signal waveform.
Disclosure of Invention
The invention aims to overcome the defects in the prior art and provide a signal high-frequency oscillation characteristic processing method which can improve the authenticity, flexibility, tightness and reliability of a waveform analysis process, adapts to the unpredictable oscillation interference of a waveform and can continuously extract the practical and effective trend of high-frequency oscillation with variable complexity.
According to the technical scheme provided by the invention, the processing method of the high-frequency oscillation characteristics of the signal comprises the following steps:
step 1, providing a knowledge base, and storing a plurality of oscillation solutions in the knowledge base, wherein each oscillation solution comprises a signal acquisition object name, a waveform condition, an effective signal frequency, an acquisition precision, an acquisition length, a standard waveform and a corresponding oscillation signal processing method;
step 2, acquiring basic characteristics of the signal to be processed from the signal to be processed, searching in the knowledge base according to the acquired basic characteristics, and jumping to step 3 when a matched oscillation solution is searched in the knowledge base, or jumping to step 4;
step 3, processing the signal to be processed by utilizing the searched oscillation solution, generating a processing report and skipping to step 6;
step 4, acquiring a standard waveform corresponding to the signal to be processed, determining all approximate characteristic positions contained in the signal to be processed, and mapping the approximate characteristic positions of the signal to be processed and standard waveform characteristic points in the standard waveform to obtain a characteristic point mapping overlay according to a mapping state;
determining a standard waveform corresponding to the signal to be processed according to the intersection state of the feature points in the feature point mapping overlay, so as to obtain the waveform characteristics of the waveform to be processed according to the standard waveform corresponding to the signal to be processed and the standard waveform corresponding to the standard waveform;
step 5, determining an oscillation signal processing method of the signal to be processed according to the waveform characteristics of the signal to be processed, and adding the basic characteristics of the signal to be processed and the oscillation signal processing method into a knowledge base as an oscillation solution;
and 6, ending.
In step 2, the basic characteristics of the signals to be processed include signal acquisition object names, waveform conditions, effective signal frequency, acquisition precision and acquisition length.
In step 5, the oscillation signal processing method includes filling processing of adjacent approximate feature positions in the signal to be processed, where the filling processing includes translation, compression, stretching, rotation, polynomial fitting, median envelope and/or post-interpolation fitting.
The invention has the advantages that: the method has the advantages that effective processing of different signals to be processed is achieved through the knowledge base, targeted processing is achieved through methods such as polynomial fitting and median envelope, meanwhile, the knowledge base is rich, authenticity, flexibility, tightness and reliability of an analysis process of the signals to be processed are improved, meanwhile, oscillation interference which cannot be predicted by waveforms is adapted, and practical and effective trend extraction can be conducted on high-frequency oscillation with changing complexity continuously.
Therefore, compared with the prior art, the invention has the following advantages:
1) And the processing speed is high: the historical oscillation solution is stored in the knowledge base, and when signal waveforms with common characteristics are confronted, the existing oscillation signal processing method can be used for quickly carrying out waveform processing, the processed waveforms are guaranteed, and the result is prevented from being unknown.
2) Self-learning: carrying out feature point mapping on the waveform of a signal to be processed and a standard waveform in a mode of interpolation after translation, compression, rotation and the like to obtain a feature point mapping overlay, and determining an oscillation signal processing method of the signal to be processed according to the waveform feature of the signal to be processed;
3) And the universality is wide: the method has universality for high-frequency oscillation processing of signals, such as semiconductor device switching waveforms, wireless communication signals and the like.
4) And the cost is low: the method is low in implementation cost, a feature point mapping overlay can be obtained after the mapping is carried out on the selected standard waveform, the waveform feature of the signal to be processed is further determined, and the oscillation signal processing method can be obtained according to the waveform feature.
5) And the expansibility is strong: when a new type of signal waveform exists, the new type of signal waveform can be added into a knowledge base only by simply marking the characteristics, sorting the name of a collection object, the waveform condition, the effective signal frequency, the collection precision and the collection length information and compiling a processing program. .
Drawings
FIG. 1 is a flow chart of the present invention.
FIG. 2 is a flow chart of the present invention for processing a signal to be processed according to a standard waveform.
Fig. 3 is a diagram illustrating a conventional standard waveform.
FIG. 4 is a diagram illustrating a correspondence between a signal to be processed and a standard waveform according to the present invention.
Detailed Description
The invention is further illustrated by the following specific figures and examples.
As shown in the figure: in order to improve the authenticity, flexibility, tightness and reliability of a waveform analysis process, adapt to unpredictable oscillation interference of a waveform and continuously extract a practical and effective trend of high-frequency oscillation with variable complexity, the processing method comprises the following steps:
step 1, providing a knowledge base, and storing a plurality of oscillation solutions in the knowledge base, wherein each oscillation solution comprises a signal acquisition object name, a waveform condition, an effective signal frequency, an acquisition precision, an acquisition length, a standard waveform and a corresponding oscillation signal processing method;
specifically, the knowledge base may adopt an existing database form, and the specific process and manner for establishing the knowledge base are consistent with those of the existing knowledge base, which are well known to those skilled in the art and will not be described herein again. A plurality of oscillation solutions can be stored through a knowledge base, wherein each oscillation solution comprises a signal acquisition object name, a waveform condition, an effective signal frequency, an acquisition precision, an acquisition length, a standard waveform and a corresponding oscillation signal processing method.
In the embodiment of the invention, the name of the signal acquisition object is generally the name of the test object, and the name of the signal acquisition object is related to the tested semiconductor device, such as an IGBT device or an MOSFET device. The waveform condition is a generating condition, the effective signal frequency is the signal frequency for processing waveform information, the acquisition frequency is the grabbing sampling frequency of the waveform, the acquisition precision is the calibration precision of the signal acquisition equipment, the acquisition length is the actual time length of the signal, and the standard waveform is generally a theoretical waveform or a mathematical standard waveform. The conditions for generating the waveform are related to the actual test, and the acquisition precision, the acquisition length, the acquisition frequency, and the like can be determined according to the actual test, which is well known to those skilled in the art and will not be described herein again.
The oscillation signal processing method is a method for processing a signal in the prior art, and includes polynomial fitting, spline interpolation, linear fitting, median envelope and/or feature matching, and the specific conditions of the signal processing method are related to test signals determined for signal acquisition object names, waveform conditions, effective signal frequencies, acquisition accuracy, acquisition lengths and the like, and are known to those skilled in the art. When the corresponding test signal is processed by the oscillation signal processing method, the waveform oscillation of the test signal can be reduced, and the trend is kept complete without deformation and distortion.
In specific implementation, a plurality of oscillation solutions can be established or added in a knowledge base according to the test of different objects and the signal processing mode of the different objects all the time.
Step 2, acquiring basic characteristics of the signal to be processed from the signal to be processed, searching in the knowledge base according to the acquired basic characteristics, and jumping to step 3 when a matched oscillation solution is searched in the knowledge base, or jumping to step 4;
specifically, the signal to be processed specifically refers to a signal generated at the time of test. The basic characteristics of the signal with processing are obtained, and specifically include a signal acquisition object name, a waveform condition, an effective signal frequency, an acquisition precision and an acquisition length. The signal acquisition object name, waveform condition, effective signal frequency, acquisition precision, acquisition length, etc. can all refer to the above description, and are not described herein again, and the basic features of the signal to be processed can be obtained by adopting the technical means commonly used in the technical field, which are specifically known by those skilled in the art, and are not described herein again.
As can be seen from the above description, the knowledge base has the characteristics of a database, so that the basic features can be used for searching, generally, during the searching, the name of the signal acquisition object, the waveform condition, the effective signal frequency, the acquisition precision, and the acquisition length can be used as the search condition, of course, a single condition can also be used for searching, and the searching can be specifically selected as needed, and will not be described herein again. When all basic features are adopted as search conditions, a more matched oscillation solution can be searched.
Step 3, processing the signal to be processed by utilizing the searched oscillation solution, generating a processing report and skipping to step 6;
specifically, after the oscillation solution is searched, the signal to be processed can be processed by using the oscillation solution, that is, the signal to be processed is processed by using the oscillation signal processing method in the oscillation solution, so that a more appropriate processing result can be achieved.
Step 4, acquiring a standard waveform corresponding to the signal to be processed, determining all approximate characteristic positions contained in the signal to be processed, and mapping the approximate characteristic positions of the signal to be processed and standard waveform characteristic points in the standard waveform to obtain a characteristic point mapping overlay according to a mapping state;
determining a standard waveform corresponding to the signal to be processed according to the intersection state of the feature points in the feature point mapping overlay, so as to obtain the waveform characteristics of the waveform to be processed according to the standard waveform corresponding to the signal to be processed and the standard waveform corresponding to the standard waveform;
in specific implementation, the standard waveform is a theoretical technical standard or a standard waveform manually made according to the processing experience of a certain type of waveform. The standard waveform and the waveform to be processed should be from the same source, such as the same device or the same signal source, so as to ensure that the basic variable (physical hardware variable) is small and the subsequent processing of the standard waveform and the waveform to be processed can have higher reliability. Typically, the standard waveforms are also stored in a knowledge base.
In the embodiment of the present invention, a standard waveform corresponding to the signal to be processed is determined according to the intersection state of the feature points of the feature point mapping overlay, specifically, the feature that the waveform to be processed and the standard waveform have the most consistent features on the feature point mapping overlay. For the signal to be processed, the approximate feature position may be a situation where a peak occurs on a rising edge or a falling edge, and the approximate feature position may be selected and confirmed according to actual needs, which is specifically known to those skilled in the art and will not be described herein again. And for the standard waveform, the characteristic points of the standard waveform existing in the standard waveform are known for determination.
Since a signal to be processed has a plurality of approximate characteristic points, and a section of waveform exists between every two approximate characteristic points, the waveform between the approximate characteristic points can be expressed by using a polynomial expression:
Figure BDA0003100034730000041
wherein W is the waveform time series (X-axis) set of the signal to be processed, and T is the waveform basic offset amplitude (offset degree of the whole waveform on Y-axis, such as standard) of the signal to be processedQuasi-waveform base height of 10, T = 10), a i The ith slope is the slope of the corresponding waveform of the two approximate characteristic points, bd (the X-axis position of the characteristic point), and Bl is the number of the approximate characteristic points.
Fig. 3 is a schematic diagram of a standard waveform, where the standard waveform has 13 standard waveform feature points, and a distance, i.e., a slope, exists between two adjacent standard waveform feature points, and then the waveform between the standard waveform feature points can be described by an expression. For example, the waveform between the first standard waveform feature point and the second standard waveform feature point may be:
Figure BDA0003100034730000042
the conditions of other adjacent standard waveform feature points are analogized in turn, which are well known to those skilled in the art and will not be described herein again. In fig. 3, the waveform change between the first standard waveform feature point and the second standard waveform feature point may be increased or decreased with a fixed slope, and the remaining adjacent standard waveform feature points are related to the actual waveform change.
In fig. 4, the upper waveform is a standard waveform, the lower waveform is a waveform of a signal to be processed, and the waveform of the signal to be processed including 13 approximate feature positions can be obtained according to the waveform of the signal to be processed. For the approximate characteristic position contained in the signal waveform to be processed, at this time, the approximate characteristic position in the signal waveform to be processed cannot be corresponded to the standard waveform. Generally, the signals to be processed need to be selected to have the same standard waveform feature points or more standard waveform feature points than approximate feature bits.
In order to obtain the feature point mapping overlay, the approximate feature position of the signal to be processed needs to be sequentially corresponding to the standard waveform feature point of the selected standard waveform, and because the signal to be processed is inconsistent with the standard waveform, measures such as stretching and compressing need to be performed during the corresponding, so that the approximate feature position can be corresponding to the standard waveform feature point. When a plurality of standard waveforms exist, counting the number of mutual overlapping of the approximate characteristic positions and the standard waveform characteristic points, and when the number of overlapping is the largest or the number of overlapping reaches a preset threshold value, obtaining the standard waveform corresponding to the processing signal, so as to obtain the waveform characteristics of the waveform to be processed according to the corresponding standard waveform. The specific situation of overlapping the preset threshold may be selected as needed, and is specifically known to those skilled in the art, and will not be described herein again.
Step 5, determining an oscillation signal processing method of the signal to be processed according to the waveform characteristics of the signal to be processed, and adding the basic characteristics of the signal to be processed and the oscillation signal processing method into a knowledge base as an oscillation solution;
specifically, after the waveform characteristics of the waveform to be processed are determined, according to the corresponding state of the standard waveform, for two adjacent approximate characteristic points of the waveform to be processed, a filling mode between the two approximate characteristic points is determined, such as translation, compression, stretching, rotation, polynomial fitting, median envelope and/or post-interpolation fitting, and after the filling modes between all the approximate characteristic points are determined, the oscillation signal processing method of the signal to be processed is realized.
When the oscillation solution is not searched in the knowledge base, the signal to be processed needs to be processed and stored in the knowledge base as a new oscillation solution after being processed, so that the oscillation solution can be directly utilized later.
And 6, ending.
In conclusion, the invention realizes effective processing on different signals to be processed through the knowledge base, realizes targeted processing by using methods such as polynomial fitting, median envelope and the like, simultaneously enriches the knowledge base, improves the authenticity, flexibility, tightness and reliability of the analysis process of the signals to be processed, simultaneously adapts to the oscillation interference which cannot be predicted by the waveform, and can continuously and effectively extract the high-frequency oscillation with variable complexity.
Therefore, compared with the prior art, the invention has the following advantages:
1) And the processing speed is high: the historical oscillation solution is stored in the knowledge base, and when signal waveforms with common characteristics are confronted, the existing oscillation signal processing method can be used for quickly carrying out waveform processing, the processed waveforms are guaranteed, and the result is prevented from being unknown.
2) Self-learning: carrying out feature point mapping on the waveform of a signal to be processed and a standard waveform in a mode of interpolation after translation, compression, rotation and the like to obtain a feature point mapping overlay, and determining an oscillation signal processing method of the signal to be processed according to the waveform feature of the signal to be processed;
3) And the universality is wide: the method has universality for high-frequency oscillation processing of signals, such as semiconductor device switching waveforms, wireless communication signals and the like.
4) And the cost is low: the implementation cost is low, a feature point mapping overlay can be obtained after mapping is carried out on the selected standard waveform, the waveform feature of the signal to be processed is further determined, and the oscillation signal processing method can be obtained according to the waveform feature.
5) And the expansibility is strong: when a new type of signal waveform exists, the new type of signal waveform can be added into a knowledge base only by simply marking the characteristics, sorting the name of a collection object, the waveform condition, the effective signal frequency, the collection precision and the collection length information and compiling a processing program.

Claims (2)

1. A method for processing high-frequency oscillation characteristics of a signal is characterized by comprising the following steps: the processing method comprises the following steps:
step 1, providing a knowledge base, and storing a plurality of oscillation solutions in the knowledge base, wherein each oscillation solution comprises a signal acquisition object name, a waveform condition, an effective signal frequency, an acquisition precision, an acquisition length, a standard waveform and a corresponding oscillation signal processing method;
step 2, acquiring basic characteristics of the signal to be processed from the signal to be processed, searching in the knowledge base according to the acquired basic characteristics, and jumping to step 3 when a matched oscillation solution is searched in the knowledge base, or jumping to step 4; wherein the content of the first and second substances,
acquiring basic characteristics of a signal to be processed, including a signal acquisition object name, a waveform condition, an effective signal frequency, an acquisition frequency, acquisition precision and an acquisition length;
step 3, processing the signal to be processed by utilizing the searched oscillation solution, generating a processing report and skipping to step 6;
step 4, obtaining the waveform of the signal to be processed, determining all approximate characteristic positions contained in the signal to be processed, and mapping the approximate characteristic positions of the signal to be processed and standard waveform characteristic points in a standard waveform to obtain a characteristic point mapping overlay according to a mapping state;
determining a standard waveform corresponding to the signal to be processed according to the intersection state of the feature points in the feature point mapping overlay so as to obtain the waveform characteristics of the waveform to be processed according to the standard waveform corresponding to the signal to be processed; wherein the content of the first and second substances,
approximate feature locations, which are locations where a peak occurs on a rising or falling edge; the signal to be processed has a plurality of approximate characteristic points, a section of waveform exists between every two approximate characteristic points, the waveform between the approximate characteristic points is expressed by using a polynomial expression, and then:
Figure FDA0003986687720000011
wherein W is the waveform time sequence set of the signal to be processed, T is the waveform basic offset amplitude of the signal to be processed, A i The ith slope is the slope of the corresponding waveform of the two approximate characteristic points, bd is the X-axis position of the characteristic points, and Bl is the number of the approximate characteristic points;
determining a standard waveform corresponding to the signal to be processed according to the intersection state of the feature points of the feature point mapping overlay, specifically, determining that the waveform to be processed and the standard waveform have the most consistent features on the feature point mapping overlay;
when the characteristic point mapping overlay is obtained, the approximate characteristic position of the signal to be processed is required to be sequentially corresponding to the standard waveform characteristic point of the selected standard waveform, and stretching and/or compressing processing is carried out when the approximate characteristic position is corresponding to the standard waveform characteristic point;
when a plurality of standard waveforms exist, counting the number of mutual overlapping of the approximate characteristic positions and the standard waveform characteristic points, wherein when the number of overlapping is the largest or the number of overlapping reaches a preset threshold value, the standard waveform corresponding to the signal to be processed is obtained, and the waveform characteristics of the waveform to be processed can be obtained according to the corresponding standard waveform;
step 5, determining an oscillation signal processing method of the signal to be processed according to the waveform characteristics of the signal to be processed, and adding the basic characteristics of the signal to be processed and the oscillation signal processing method into a knowledge base as an oscillation solution;
and 6, ending.
2. A method for processing high frequency oscillation characteristics of a signal as claimed in claim 1, wherein: in step 5, the oscillation signal processing method includes filling processing of adjacent approximate feature positions in the signal to be processed, where the filling processing includes translation, compression, stretching, rotation, polynomial fitting, median envelope and/or post-interpolation fitting.
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