CN113359078A - Vector network analyzer calibration method based on sixteen-term error model - Google Patents

Vector network analyzer calibration method based on sixteen-term error model Download PDF

Info

Publication number
CN113359078A
CN113359078A CN202110467666.8A CN202110467666A CN113359078A CN 113359078 A CN113359078 A CN 113359078A CN 202110467666 A CN202110467666 A CN 202110467666A CN 113359078 A CN113359078 A CN 113359078A
Authority
CN
China
Prior art keywords
network analyzer
vector network
error
sixteen
ports
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202110467666.8A
Other languages
Chinese (zh)
Inventor
丁旭
王立平
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Zhejiang Chengchang Technology Co Ltd
Original Assignee
Zhejiang Chengchang Technology Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Zhejiang Chengchang Technology Co Ltd filed Critical Zhejiang Chengchang Technology Co Ltd
Priority to CN202110467666.8A priority Critical patent/CN113359078A/en
Publication of CN113359078A publication Critical patent/CN113359078A/en
Pending legal-status Critical Current

Links

Images

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R35/00Testing or calibrating of apparatus covered by the other groups of this subclass
    • G01R35/005Calibrating; Standards or reference devices, e.g. voltage or resistance standards, "golden" references

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measurement Of Resistance Or Impedance (AREA)

Abstract

The invention relates to a vector network analyzer calibration method based on sixteen-term error model, computer equipment and a computer readable storage medium, wherein the method comprises the following steps: setting an initial state of a vector network analyzer; setting calibration standard part parameters; acquiring various test parameters of two ports to be tested of a vector network analyzer; correcting scattering coefficients measured when the two ports to be measured are connected with the direct connection standard component by using the forward switch item and the reverse switch item; constructing an overdetermined equation set for solving the error term; solving an over-determined equation set by using a singular value decomposition method to obtain each error term of the sixteen-term model; testing the tested device by using a vector network analyzer to obtain original test data; and correcting the original test data by the forward switch item and the reverse switch item, and calibrating by using each obtained error item to obtain the calibrated scattering parameters of the tested device. The invention improves the calibration accuracy and the application range of the vector network analyzer and reduces the manufacturing difficulty of the calibration standard component.

Description

Vector network analyzer calibration method based on sixteen-term error model
Technical Field
The invention relates to the technical field of testing, in particular to a vector network analyzer calibration method based on sixteen-term error models, computer equipment and a computer readable storage medium.
Background
The S parameter (scattering parameter) is an important test parameter in the field of radio frequency microwaves, and needs to be measured by using a vector network analyzer. Different from other instruments, the vector network analyzer needs to be calibrated to correct system errors before actually testing the tested device, the accuracy of a calibration result is determined by the quality of a calibration method, and finally the quality of the test result is directly influenced. The calibration type is generally divided into three forms of coaxial, on-chip and waveguide according to the type of the test port. The calibration process is a post-processing mathematical operation process, necessary pre-data is obtained through testing a calibration standard component, an error matrix is obtained through a corresponding calibration method, original test data are corrected through the error matrix through mathematical operation in the process of truly testing the tested device, and finally real data corresponding to the tested device are obtained.
At present, common vector network analyzer calibration methods include a Short-Open-Load-Thru (SOLT) method or TOSM (Thru-Open-Short-Match) method based on a twelve-term error model of a three-receiver architecture vector network analyzer, a TRL (Thru-reflector-Line) method based on an eight-term error model of a four-receiver architecture vector network analyzer, and the like. Although the most common SOLT (or TOSM) method is simple in operation, the dependence on the accuracy of a calibration standard piece is high, the parameters of the calibration standard piece must be completely and accurately defined, the accuracy of the calibration standard piece generally gives three-order model parameters, but the model parameters are gradually misaligned along with the increase of frequency, the high-frequency test accuracy is poor, and the abrasion of each connection brings certain deviation to the model parameters, so that the method is not suitable for high-frequency high-accuracy test. Although the conventional TRL method has small accuracy dependence on the calibration standard and high accuracy, the TRL method is limited by a test frequency range, and the frequency range requires a ratio of start frequency to end frequency to be less than 1: 8, when the frequency is very low (generally less than or equal to 1GHz), the transmission line is too long in size and difficult to manufacture and use, and the method has high requirements on personnel operation, is very easy to damage and has limited use range. Meanwhile, when the above model is applied to frequencies of millimeter waves and above, the description of the isolation and crosstalk model between ports is not very perfect, and needs to be improved.
Disclosure of Invention
The invention aims to provide a vector network analyzer calibration method based on sixteen-item error model and singular value decomposition method, which aims at least part of defects, increases test items, solves an over-determined equation set by using the singular value decomposition method to obtain an error matrix, finally corrects the error of a test system, and completes the calibration of the vector network analyzer.
In order to achieve the above object, the present invention provides a calibration method for a vector network analyzer based on a sixteen-term error model, which comprises the following steps:
s1, setting the initial state of the vector network analyzer;
s2, setting necessary prepositive parameters of the calibration standard;
s3, acquiring various test parameters of two ports to be tested of the vector network analyzer, wherein the test parameters comprise respective reflection coefficients when the two ports to be tested are connected with an open-circuit standard component, respective reflection coefficients when the two ports to be tested are connected with a short-circuit standard component, respective reflection coefficients when the two ports to be tested are connected with a matched load standard component, respective reflection coefficients when one port of the two ports to be tested is connected with the open-circuit standard component, and respective reflection coefficients when the other port of the two ports to be tested is connected with the matched load standard component and exchanged, and scattering coefficients, forward switch items and backward switch items which are measured when the two ports to be tested are connected with a direct-connection standard component;
s4, correcting the scattering coefficient measured when the two ports to be measured are connected with the direct connection standard component by the forward switch item and the reverse switch item;
s5, constructing an overdetermined equation set for solving error terms by using all the test parameters;
s6, solving the over-determined equation set by using a singular value decomposition method to obtain each error term of the sixteen-term model;
s7, testing the tested device by using the vector network analyzer to obtain original test data;
s8, correcting the original test data by a forward switch item and a reverse switch item to obtain corrected test data, and calibrating the corrected test data by the obtained error items to obtain the calibrated scattering parameters of the tested device.
Preferably, the calibration method further comprises the steps of:
and S9, outputting the calibrated scattering parameters of the tested device, storing and displaying the parameters by a graphical interface.
Preferably, the calibration method further comprises the steps of:
and S10, judging whether the test is finished or not, and returning to the step S7 if the test is finished.
Preferably, the calibration standard is a SOLT calibration piece used in the SOLT method.
Preferably, in step S1, the setting of the initial state of the vector network analyzer includes setting a start-stop frequency point, a frequency step, an output power, an intermediate frequency bandwidth, and an average number of times.
Preferably, in the step S2, the setting of the necessary pre-parameters of the calibration standard includes setting the parasitic capacitance C of the open standardOParasitic inductance L of short circuit standard componentSDC resistance R of matched load standard componentMAnd parasitic inductance LMAnd calculating the delay tau and the insertion loss IL of the direct connection standard part to obtain the reflection coefficient gamma of the open circuit standard part, the short circuit standard part and the matched load standard partO、ГS、ГMAnd transmission coefficient gamma of through standardT
Preferably, the calibration method further comprises:
before the step S1, the vector network analyzer is preheated for more than half an hour.
Preferably, in step S5, when the over-determined equation system for solving the error term is constructed by using all the test parameters, there are:
Figure BDA0003043867470000031
Figure BDA0003043867470000032
wherein, a0Representing waves incident at the input port of the interface to be calibrated, a1Representing waves incident at the input port of the device under test, a2Representing incident waves at the output port of the device under test, a3Representing incident waves at the output port of the interface to be calibrated, b0Representing reflected waves at the input port of the interface to be calibrated, b1Representing reflected waves from the input port of the device under test, b2Representing reflected waves from the output port of the device under test, b3Indicating interface input to be calibratedOutputting a reflected wave;
Figure BDA0003043867470000041
e denotes an error matrix, each element E of E00~e33Respectively representing corresponding errors in the error matrix;
Figure BDA0003043867470000042
t denotes an error matrix characterized in the form of a scattering cascade, T0~t15Respectively representing each element of an error matrix T characterized in a scattering cascade form;
and constructing an over-determined equation set according to the error matrix T and the error matrix E which are characterized in a scattering cascade form.
The invention also provides computer equipment which comprises a memory and a processor, wherein the memory stores a computer program, and the processor realizes the steps of any one of the sixteen-term error model-based vector network analyzer calibration methods when executing the computer program.
The present invention also provides a computer readable storage medium having stored thereon a computer program which, when being executed by a processor, implements the steps of any of the sixteen-term error model-based vector network analyzer calibration methods described above.
The technical scheme of the invention has the following advantages: the invention provides a calibration method of a vector network analyzer based on sixteen error models, computer equipment and a computer readable storage medium, wherein the calibration method considers the influence of signal crosstalk between isolation items and ports on the high-frequency S parameter calibration of the vector network analyzer, adds a test item considering the influence of the crosstalk signals between the ports of the vector network analyzer in the calibration process, and solves an over-definite equation set by using a singular value decomposition method to obtain an error matrix.
Drawings
FIG. 1 is a schematic flow chart of a calibration method of a vector network analyzer based on a sixteen-term error model according to an embodiment of the present invention;
fig. 2 is a signal flow diagram of a sixteen-term error model in an embodiment of the invention.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are some, but not all, embodiments of the present invention. All other embodiments, which can be obtained by a person skilled in the art without any inventive step based on the embodiments of the present invention, are within the scope of the present invention.
As shown in fig. 1 and fig. 2, a calibration method for a vector network analyzer based on a sixteen-term error model according to an embodiment of the present invention includes the following steps:
s1, vector network analyzer initialization step: and setting the initial state of the vector network analyzer.
Preferably, in step S1, the setting of the initial state of the vector network analyzer includes setting the start-stop frequency point, the frequency step, the output power, the intermediate frequency bandwidth, and the average number of times of the vector network analyzer.
S2, calibration standard parameter setting step: the necessary pre-parameters of the calibration standard are set.
Preferably, in step S2, the setting of the necessary pre-parameter of the calibration standard includes setting the parasitic capacitance C of the Open circuit (Open) standardOParasitic inductance L of Short-circuit (Short) standard componentSDC resistance R of matched load (Match) standard componentMAnd parasitic inductance LMAnd calculating the reflection coefficient r of the open-circuit standard component according to the delay tau and the insertion loss IL of the straight-through (Thru) standard componentOReflection coefficient f of short circuit standard partSMatched load targetReflection coefficient f of the quasi-objectMAnd transmission coefficient gamma of through standardT
The execution sequence of the step S1 and the step S2 can be exchanged or performed simultaneously, that is, the step of setting the calibration standard parameters and the step of initializing the vector network analyzer can be performed first, or the two steps can be performed simultaneously.
Further, in order to ensure the accuracy of the vector network analyzer in testing the device under test, the method further comprises the following steps:
before step S1, the vector network analyzer is preheated for more than half an hour to enter a stable operating state.
S3, calibration standard parameter acquisition: the method comprises the steps of obtaining various test parameters of two ports to be tested of a vector network analyzer (or two ports to be calibrated of the vector network analyzer, namely, a port 1 and a port 2), wherein the test parameters comprise various test items required by a SOLT method and test items which are added by the method and take crosstalk signal influence between the ports into consideration.
Specifically, the test parameters of the two ports to be tested of the vector network analyzer, which are obtained in step S3, include:
a) gamma _ Measure _ Open _ Port: when the two ports to be tested are connected with the Open circuit standard (that is, the two ports to be calibrated of the vector network analyzer are connected with Open), the respective reflection coefficients of the two ports can be recorded as rMO1(corresponding to port 1), rMO2(corresponding to port 2);
b) gamma _ Measure _ Short _ Port: when the two ports to be tested are connected with the Short circuit standard (namely, two ports to be calibrated of the vector network analyzer are connected with Short), the respective reflection coefficients of the two ports can be recorded as gammaMS1(corresponding to port 1), rMS2(corresponding to port 2);
c) gamma _ Measure _ Load _ Port: when the two ports to be tested are connected with the matched load standard (namely, two ports to be calibrated of the vector network analyzer are connected with Match), the respective reflection coefficients of the two ports can be marked as gammaML1(corresponding to port 1), rML2(corresponding to port 2);
d) gamma _ Measure _ Open _ Match _ Port: one of two ports to be measuredWhen the port (port 1) is connected with the open circuit standard part and the other port (port 2) is connected with the matched load standard part, the respective reflection coefficients of the two ports can be recorded as fMOM1(corresponding to port 1), rMOM2(corresponding to port 2);
e) gamma _ Measure _ Match _ Open _ Port: when the two ports to be measured are aligned, namely, when one port (port 1) of the two ports to be measured is connected with the matched load standard part and the other port (port 2) of the two ports to be measured is connected with the open circuit standard part, the respective reflection coefficients of the two ports can be recorded as gammaMMO1(corresponding to port 1), rMMO2(corresponding to port 2);
f) SMeasure _ Thru: when the two ports to be measured are connected with a straight-through standard component (namely, two ports to be calibrated of the vector network analyzer are connected with Thru), the scattering coefficient measured by the vector network analyzer can be recorded as SThru;
g) gamma _ F: when the two ports to be tested are connected with the direct connection standard component, the forward switch item measured by the vector network analyzer can be marked as GammaF
h) Gamma _ R: when the two ports to be measured are connected with the direct connection standard component, the reverse switch item measured by the vector network analyzer can be marked as GammaR
S4, correction step: with the forward switch term f measured in step S3FAnd reverse switching term rRCorrecting the scattering coefficient SThru measured when the two ports to be measured are connected with the through standard component to obtain the corrected scattering coefficient SThrusc
S5, an overdetermined equation set building step: using all the test parameters, including the test parameters obtained in step S3: rMO1、ГMO2、ГMS1、ГMS2、ГML1、ГML2、ГMOM1、ГMOM2、ГMMO1、ГMMO2、ГF、ГRAnd the scattering coefficient SThru corrected in step S4scAnd constructing an over-determined equation set for solving each error term.
S6, solving by a Singular Value Decomposition (SVD) method: solving the over-determined equation set by using a singular value decomposition method to obtain each error term (which can be recorded as e) of the sixteen-term model00~e03、e10~e13、e20~e23And e30~e33)。
And S7, testing the device to be tested by using the vector network analyzer to obtain the original test data SDUT corresponding to the device to be tested.
S8, forward switch term rFAnd reverse switching term rRCorrecting the original test data SDUT to obtain the corrected test data SDUTSCUsing the error terms (i.e. e) thus determined00~e03、e10~e13、e20~e23And e30~e33) Calibration corrected test data SDUTSCObtaining the calibrated scattering parameter SDUT of the device under testACTAnd finishing the calibration of the vector network analyzer.
Preferably, as shown in fig. 1, the calibration method further includes the steps of:
s9, calibrating scattering parameters SDUT of the tested deviceACTAnd outputting, storing and displaying by a graphical interface.
In this step, SDUTACTAnd outputting and storing the test result in the s2p format, and displaying the actual value of the tested device in a graphical interface.
Further, the calibration method further comprises the following steps:
and S10, judging whether the test is finished or not, and returning to the step S7 if the test is finished.
If the test is judged to be finished, the test platform is arranged, instruments (such as a vector network analyzer) are closed, and the whole test process is finished; if the test is not completed, the process returns to step S7 to collect the test data of the next group of devices under test.
Preferably, the calibration standard used by the calibration method of the vector network analyzer is a SOLT calibration piece used by a SOLT method, and the calibration method is easy to implement and high in accuracy.
Preferably, in step S5, when the over-determined equation system for solving the error term is constructed by using all the test parameters, there are:
Figure BDA0003043867470000081
Figure BDA0003043867470000082
wherein, a0Representing waves incident at the input port of the interface to be calibrated, a1Representing waves incident at the input port of the device under test, a2Representing incident waves at the output port of the device under test, a3Representing incident waves at the output port of the interface to be calibrated, b0Representing reflected waves at the input port of the interface to be calibrated, b1Representing reflected waves from the input port of the device under test, b2Representing reflected waves from the output port of the device under test, b3Representing the reflected wave of the output port of the interface to be calibrated;
Figure BDA0003043867470000083
e denotes an error matrix, each element E of E00~e33Respectively representing corresponding errors in the error matrix;
Figure BDA0003043867470000091
t denotes an error matrix characterized in the form of a scattering cascade, T0~t15Respectively representing each element of an error matrix T characterized in a scattering cascade form;
an error matrix T represented in a scattering cascade form can be obtained through cascade operation, and an error matrix E is obtained through conversion.
In step S5, when constructing the over-determined equation set for solving the error term using all the test parameters, the over-determined equation set is constructed by the above equations (1) and (2), and the symbolic form is shown in the equation (3):
Figure BDA0003043867470000092
wherein A, B is an over-determined equation coefficient matrix,
Figure BDA0003043867470000097
is represented by t0~t15The unknown column vector is constructed, and the specific form of the above formula (3) is as follows:
Figure BDA0003043867470000093
wherein the content of the first and second substances,
Figure BDA0003043867470000094
the subscript a in the S-parameter indicates the true S-parameter, m indicates the measured S-parameter, the S, O, L letters in the superscript indicate short, open and load respectively and the first letter corresponds to the input port and the second letter corresponds to the output port, Thru indicates through, i.e.,
Figure BDA0003043867470000095
the true S-parameter indicating that the input and output ports are all open,
Figure BDA0003043867470000096
a measured S parameter indicating that the input and output ports are all open,
Figure BDA0003043867470000101
the true S-parameters indicating that the input and output ports are all short-circuited,
Figure BDA0003043867470000102
a measured S parameter indicating that the input and output ports are all shorted,
Figure BDA0003043867470000103
the true S parameter indicating that the input port is open and the output port is matched to the load,
Figure BDA0003043867470000104
a measured S parameter indicating that the input port is open and the output port is matched to the load,
Figure BDA0003043867470000105
the true S parameter indicating that the input port matches the load output port open circuit,
Figure BDA0003043867470000106
a measured S parameter indicating that the input port is matched to the load output port is open,
Figure BDA0003043867470000107
the true S-parameter representing the straight-through,
Figure BDA0003043867470000108
indicating the measured S parameter straight through.
The coefficient matrix A of the over-determined equation is decomposed into a formula (4) by a singular value decomposition method and a generalized inverse formula (5), and finally an error term is solved to obtain an error matrix E:
A=U·[diag(λi)]·VT (4)
Figure BDA0003043867470000109
Figure BDA00030438674700001010
pinv (-) denotes the pseudo-inverse, U, V is a decomposed unitary matrix, UT、VTRespectively, are transposes of U, V.
Referring to fig. 2, fig. 2 is a signal flow diagram of a calibration method for a vector network analyzer based on sixteen Error models, including a DUT and an Error Matrix, a in fig. 20Representing waves incident at the input port of the interface to be calibrated, a1Representing waves incident at the input port of the device under test, a2Representing incident waves at the output port of the device under test, a3Representing incident waves at the output port of the interface to be calibrated, b0Representing reflected waves at the input port of the interface to be calibrated, b1Representing reflected waves from the input port of the device under test, b2Representing reflections at the output port of the device under testWave, b3Representing reflected waves, S, at the output port of the interface to be calibrateda11~Sa22And representing the real S parameters of the tested device, and solving an error matrix ErrorMatrix (namely a final error matrix E), wherein the matrix elements of the error matrix ErrorMatrix are error items of the sixteen items of the model.
The calibration method of the vector network analyzer based on the sixteen-term error model is similar to the traditional SOLT calibration method based on the twelve-term error model, and only a few test items (test parameters Gamma) are addedMOM1、ГMOM2、ГMMO1、ГMMO2) The method is used for calibrating crosstalk between two ports of the vector network analyzer, adding test redundancy items, and matching with a singular value decomposition method to solve, so that the influence of signal coupling leakage between the ports on a test result can be well corrected, and the calibration accuracy and the application range are greatly improved. Moreover, the calibration method is a broadband calibration method, the calibration process is not limited by the frequency range, different calibration standard parts do not need to be replaced at different frequencies, and a plurality of sections of transmission lines do not need to deal with different frequencies like a TRL method.
In particular, in some preferred embodiments of the present invention, there is further provided a computer device, including a memory and a processor, where the memory stores a computer program, and the processor implements the steps of the sixteen-term error model-based vector network analyzer calibration method according to any one of the above embodiments when executing the computer program.
In other preferred embodiments of the present invention, there is further provided a computer readable storage medium, on which a computer program is stored, the computer program being executed by a processor to implement the steps of the sixteen-term error model-based vector network analyzer calibration method according to any one of the above embodiments.
It will be understood by those skilled in the art that all or part of the processes of the method according to the above embodiments may be implemented by a computer program, which may be stored in a non-volatile computer readable storage medium, and when executed, the computer program may include the processes of the embodiments of the calibration method for a vector network analyzer based on sixteen error models, and the description thereof will not be repeated here.
Finally, it should be noted that: the above examples are only intended to illustrate the technical solution of the present invention, but not to limit it; although the present invention has been described in detail with reference to the foregoing embodiments, it will be understood by those of ordinary skill in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some technical features may be equivalently replaced; and such modifications or substitutions do not depart from the spirit and scope of the corresponding technical solutions of the embodiments of the present invention.

Claims (10)

1. A vector network analyzer calibration method based on a sixteen-term error model is characterized by comprising the following steps:
s1, setting the initial state of the vector network analyzer;
s2, setting necessary prepositive parameters of the calibration standard;
s3, acquiring various test parameters of two ports to be tested of the vector network analyzer, wherein the test parameters comprise respective reflection coefficients when the two ports to be tested are connected with an open-circuit standard component, respective reflection coefficients when the two ports to be tested are connected with a short-circuit standard component, respective reflection coefficients when the two ports to be tested are connected with a matched load standard component, respective reflection coefficients when one port of the two ports to be tested is connected with the open-circuit standard component, and respective reflection coefficients when the other port of the two ports to be tested is connected with the matched load standard component and exchanged, and scattering coefficients, forward switch items and backward switch items which are measured when the two ports to be tested are connected with a direct-connection standard component;
s4, correcting the scattering coefficient measured when the two ports to be measured are connected with the direct connection standard component by the forward switch item and the reverse switch item;
s5, constructing an overdetermined equation set for solving error terms by using all the test parameters;
s6, solving the over-determined equation set by using a singular value decomposition method to obtain each error term of the sixteen-term model;
s7, testing the tested device by using the vector network analyzer to obtain original test data;
s8, correcting the original test data by a forward switch item and a reverse switch item to obtain corrected test data, and calibrating the corrected test data by the obtained error items to obtain the calibrated scattering parameters of the tested device.
2. The sixteen-term error model-based vector network analyzer calibration method according to claim 1, further comprising the steps of:
and S9, outputting the calibrated scattering parameters of the tested device, storing and displaying the parameters by a graphical interface.
3. The sixteen-error-model-based vector network analyzer calibration method of claim 2, further comprising the steps of:
and S10, judging whether the test is finished or not, and returning to the step S7 if the test is finished.
4. The sixteen-error-model-based vector network analyzer calibration method of claim 1, wherein:
the calibration standard is a SOLT calibration piece used in the SOLT method.
5. The sixteen-error-model-based vector network analyzer calibration method of claim 1, wherein:
in step S1, the setting of the initial state of the vector network analyzer includes setting of a start-stop frequency point, a frequency step, an output power, an intermediate frequency bandwidth, and an average number of times.
6. The sixteen-error-model-based vector network analyzer calibration method of claim 1, wherein:
in step S2, the setting of the necessary pre-parameters of the calibration standard includes setting the open standardGenerating capacitor COParasitic inductance L of short circuit standard componentSDC resistance R of matched load standard componentMAnd parasitic inductance LMAnd calculating the delay tau and the insertion loss IL of the direct connection standard part to obtain the reflection coefficient gamma of the open circuit standard part, the short circuit standard part and the matched load standard partO、ГS、ГMAnd transmission coefficient gamma of through standardT
7. The sixteen-error-model-based vector network analyzer calibration method of claim 1, further comprising:
before the step S1, the vector network analyzer is preheated for more than half an hour.
8. The sixteen-error-model-based vector network analyzer calibration method of claim 1, wherein:
in step S5, when the over-determined equation set for solving the error term is constructed using all the test parameters, there are:
Figure FDA0003043867460000031
Figure FDA0003043867460000032
wherein, a0Representing waves incident at the input port of the interface to be calibrated, a1Representing waves incident at the input port of the device under test, a2Representing incident waves at the output port of the device under test, a3Representing incident waves at the output port of the interface to be calibrated, b0Representing reflected waves at the input port of the interface to be calibrated, b1Representing reflected waves from the input port of the device under test, b2Representing reflected waves from the output port of the device under test, b3Representing the reflected wave of the output port of the interface to be calibrated;
Figure FDA0003043867460000033
e denotes an error matrix, each element E of E00~e33Respectively representing corresponding errors in the error matrix;
Figure FDA0003043867460000034
t denotes an error matrix characterized in the form of a scattering cascade, T0~t15Respectively representing each element of an error matrix T characterized in a scattering cascade form;
and constructing an over-determined equation set according to the error matrix T and the error matrix E which are characterized in a scattering cascade form.
9. A computer device comprising a memory and a processor, the memory storing a computer program, wherein the processor when executing the computer program performs the steps of the sixteen-term error model based vector network analyzer calibration method of any one of claims 1 to 8.
10. A computer-readable storage medium, on which a computer program is stored, which, when being executed by a processor, carries out the steps of the sixteen-term error model based vector network analyzer calibration method according to any one of claims 1 to 8.
CN202110467666.8A 2021-04-28 2021-04-28 Vector network analyzer calibration method based on sixteen-term error model Pending CN113359078A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202110467666.8A CN113359078A (en) 2021-04-28 2021-04-28 Vector network analyzer calibration method based on sixteen-term error model

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202110467666.8A CN113359078A (en) 2021-04-28 2021-04-28 Vector network analyzer calibration method based on sixteen-term error model

Publications (1)

Publication Number Publication Date
CN113359078A true CN113359078A (en) 2021-09-07

Family

ID=77525569

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202110467666.8A Pending CN113359078A (en) 2021-04-28 2021-04-28 Vector network analyzer calibration method based on sixteen-term error model

Country Status (1)

Country Link
CN (1) CN113359078A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111751627A (en) * 2020-06-05 2020-10-09 浙江铖昌科技有限公司 Self-calibration method of vector network analyzer based on ten-term error model

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109239636A (en) * 2018-11-16 2019-01-18 中电科仪器仪表有限公司 Vector network analyzer Electronic Calibration part based on more impedance states
CN109709420A (en) * 2018-12-27 2019-05-03 中电科仪器仪表有限公司 A kind of Integral wire cable test method based on vector network analyzer
CN110286345A (en) * 2019-05-22 2019-09-27 中国电子科技集团公司第十三研究所 A kind of vector network analyzer is in the calibration method of piece S parameter, system and equipment
CN111751627A (en) * 2020-06-05 2020-10-09 浙江铖昌科技有限公司 Self-calibration method of vector network analyzer based on ten-term error model
CN112630716A (en) * 2020-12-11 2021-04-09 西安电子科技大学 Two-port vector network analyzer calibration method based on weighting correction

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109239636A (en) * 2018-11-16 2019-01-18 中电科仪器仪表有限公司 Vector network analyzer Electronic Calibration part based on more impedance states
CN109709420A (en) * 2018-12-27 2019-05-03 中电科仪器仪表有限公司 A kind of Integral wire cable test method based on vector network analyzer
CN110286345A (en) * 2019-05-22 2019-09-27 中国电子科技集团公司第十三研究所 A kind of vector network analyzer is in the calibration method of piece S parameter, system and equipment
CN111751627A (en) * 2020-06-05 2020-10-09 浙江铖昌科技有限公司 Self-calibration method of vector network analyzer based on ten-term error model
CN112630716A (en) * 2020-12-11 2021-04-09 西安电子科技大学 Two-port vector network analyzer calibration method based on weighting correction

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
JOHN V. BUTLER 等: "16-Term Error Model and Calibration Procedure for On-Wafer Network Analysis Measurements", 《IEEE TRANSACTIONS ON MICROWAVE THEORY AND TECHNIQUES》 *
周瑞 等: "基于十六项误差模型算法的GCPW校准标准研制", 《宇航计测技术》 *

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111751627A (en) * 2020-06-05 2020-10-09 浙江铖昌科技有限公司 Self-calibration method of vector network analyzer based on ten-term error model
CN111751627B (en) * 2020-06-05 2022-11-29 浙江铖昌科技股份有限公司 Self-calibration method of vector network analyzer based on ten-term error model

Similar Documents

Publication Publication Date Title
US6853198B2 (en) Method and apparatus for performing multiport through-reflect-line calibration and measurement
CN109444717B (en) Novel on-chip S parameter error calibration method and device
US7019535B2 (en) Method and system for calibrating a measurement device path and for measuring a device under test in the calibrated measurement device path
US7034548B2 (en) Balanced device characterization including test system calibration
CN111751627B (en) Self-calibration method of vector network analyzer based on ten-term error model
US7068049B2 (en) Method and apparatus for measuring a device under test using an improved through-reflect-line measurement calibration
US7777497B2 (en) Method and system for tracking scattering parameter test system calibration
US7030625B1 (en) Method and apparatus for performing a minimum connection multiport through-reflect-line calibration and measurement
US8504315B2 (en) Method for the secondary error correction of a multi-port network analyzer
US7652484B2 (en) Self calibration apparatus and methods
CN103399286A (en) Measurement calibration method for multi-characteristic impedance network
EP2363719A1 (en) Method and apparatus for calibrating a test system for measuring a device under test
CN112698257B (en) Method for analyzing influence of hardware indexes of vector network analyzer on measurement precision
CN110954809A (en) Vector calibration quick correction method for large signal test
US5734268A (en) Calibration and measurment technique and apparatus for same
US20130317767A1 (en) Measurement error correction method and electronic component characteristic measurement apparatus
CN111983538A (en) On-chip S parameter measurement system calibration method and device
CN113359078A (en) Vector network analyzer calibration method based on sixteen-term error model
JP4177804B2 (en) Acquisition of calibration parameters for 3-port devices under test
US6571187B1 (en) Method for calibrating two port high frequency measurements
Martens et al. Multiport vector network analyzer measurements
US20080010034A1 (en) Method for network analyzer calibration and network analyzer
US6982561B2 (en) Scattering parameter travelling-wave magnitude calibration system and method
CN109270479B (en) Multi-line TRL calibration method based on tensor decomposition
Qin Measurement and Application of VNA

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
RJ01 Rejection of invention patent application after publication

Application publication date: 20210907

RJ01 Rejection of invention patent application after publication