CN113353349A - Centering device - Google Patents
Centering device Download PDFInfo
- Publication number
- CN113353349A CN113353349A CN202110225378.1A CN202110225378A CN113353349A CN 113353349 A CN113353349 A CN 113353349A CN 202110225378 A CN202110225378 A CN 202110225378A CN 113353349 A CN113353349 A CN 113353349A
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- China
- Prior art keywords
- wedge
- loading
- placing
- moving
- centering device
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65B—MACHINES, APPARATUS OR DEVICES FOR, OR METHODS OF, PACKAGING ARTICLES OR MATERIALS; UNPACKING
- B65B43/00—Forming, feeding, opening or setting-up containers or receptacles in association with packaging
- B65B43/42—Feeding or positioning bags, boxes, or cartons in the distended, opened, or set-up state; Feeding preformed rigid containers, e.g. tins, capsules, glass tubes, glasses, to the packaging position; Locating containers or receptacles at the filling position; Supporting containers or receptacles during the filling operation
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65B—MACHINES, APPARATUS OR DEVICES FOR, OR METHODS OF, PACKAGING ARTICLES OR MATERIALS; UNPACKING
- B65B23/00—Packaging fragile or shock-sensitive articles other than bottles; Unpacking eggs
- B65B23/20—Packaging plate glass, tiles, or shingles
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67778—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving loading and unloading of wafers
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Mechanical Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The present invention is a centering device for aligning cassettes at accurate positions by being respectively disposed at four corners of the cassettes, and is characterized by comprising: a placing part rotating in a centering direction of the loading cassette as the loading cassette is placed, including a plurality of rollers for supporting the loading cassette; a moving part connected to a lower side of the placing part and including a wedge part, the wedge part moving in an up-and-down direction along with rotation of the placing part; and a guide part disposed at a lower side of the moving part, including a wedge groove formed in a corresponding manner to the wedge part and guiding the up and down movement of the wedge part, wherein the placing part connected to the wedge part is adjusted to an accurate position as the wedge part is inserted into the wedge groove and adjusted to an accurate position, thereby aligning the loading cassettes. The centering device can effectively reduce the time required for arranging the loading cassettes. Thus, the loading cassettes for transferring the substrates can be arranged at the predetermined position of the support, and accurate loading/unloading can be realized for the interior of the next process device.
Description
Technical Field
The present invention relates to a centering device, and more particularly, to a centering device that can effectively reduce the time required to arrange loading cassettes.
Background
In general, substrates such as liquid crystal display devices (LCDs), Plasma Display Panels (PDPs), organic electroluminescent display devices (OLEDs), and wafers are required to be mass-produced, and before the next process, the substrates are required to be temporarily loaded in a loading cassette for storage or transportation.
After the transfer, the cassette on which the substrate is loaded needs to be accurately positioned at a designated position so that the robot can load the loaded substrate and accurately transfer the loaded substrate to a device performing a next process.
Therefore, in order for the robot to accurately take out the products loaded in the loading tray, the position needs to be determined by the centering device.
The conventional centering device has disadvantages in that a separate power means is required for aligning the loading cassette, and particularly, in the cylinder type, it is not used where there is no air supply means and it takes a long setting time.
Accordingly, there is a need to develop a load cassette centering device that ameliorates the above-described problems.
Documents of the prior art
Patent document
Patent document 1: granted patent publication No. 10-1374670 (2014, 03, 10)
Disclosure of Invention
Technical problem
The present invention has been made to solve the above-mentioned conventional problems, and an object of the present invention is to provide a centering device which can effectively reduce the time required for aligning cassettes, can align the cassettes only by a mechanical mechanism, and does not require additional power.
Technical scheme
In order to achieve the above object, the present invention provides a centering device for aligning cassettes at accurate positions by being respectively disposed at four corners of the cassettes, the centering device comprising: a placing section that rotates in a centering direction of the loading cassette as the loading cassette is placed, the placing section including a plurality of rollers for supporting the loading cassette; a moving part connected to a lower side of the placing part and including a wedge part, the wedge part moving in an up-and-down direction according to rotation of the placing part; and a guide part disposed at a lower side of the moving part, including a wedge groove formed to correspond to the wedge part and guiding the up and down movement of the wedge part, wherein the placing part connected to the wedge part is adjusted to an accurate position as the wedge part is inserted into the wedge groove and adjusted to an accurate position, thereby aligning the loading cassettes.
The present invention is characterized in that the placement unit includes: a bracket including an upper side portion and a lower side portion, the upper side portion surrounding a corner of the loading box, the lower side portion being disposed vertically with respect to the upper side portion; a centering roller part which is combined with the upper side part of the bracket in a rotatable way and forms a right angle with each other for supporting the corner part of the loading box; and a roller unit rotatably coupled to a lower portion of the bracket to support a load of the cassette.
In addition, the present invention is characterized in that the moving unit includes: a moving plate having a through hole for passing the wedge portion therethrough; a pair of shaft fixing blocks provided on the moving plate and hinge-coupled to both ends of the rotating shaft of the placing part; and a stopper portion provided on the moving plate for restricting rotation of the placing portion, wherein an upper end portion of the wedge portion is inserted into an insertion groove formed in a bottom surface of the bracket, and a lower end portion thereof is tapered in a wedge shape.
Further, according to the present invention, the guide portion includes: a linear guide part connected with the moving plate, crossed with a plurality of linear guides, and moving along the front and back direction and the left and right direction relative to the corner of the loading box along with the up and down movement of the wedge part; a guide plate having an insertion block formed with the wedge groove, the guide plate being provided with the linear guide; and a spring, the lower end of which is arranged on the inserting block, the upper end of which is inserted into the inner side of the wedge part, when the load of the loading box is eliminated, the wedge part returns to the original position.
ADVANTAGEOUS EFFECTS OF INVENTION
The centering device of the present invention can effectively reduce the time required for arranging the loading cassettes. Accordingly, the loading cassettes for transferring the substrates can be arranged at the predetermined positions of the rack, and accurate loading/unloading (unloading) can be realized for the interior of the next process device.
In addition, the centering device of the invention can adopt a simple assembly/disassembly mode, can center the loading box only by a mechanical mode, does not need an additional driving unit, and therefore, does not need an additional Air pressure device (Air Cylinder, Regulator, etc.), a control device and a working Logic (Logic) structure, thereby furthest reducing the field Setting and installation (Setting) operation and having the effect of convenient maintenance and repair.
Drawings
Fig. 1 is a plan view and a front view showing an installation state of a centering device of the present invention.
Fig. 2 is a perspective view showing a centering device of the present invention.
Fig. 3 is a top perspective view showing a state where the placement section, the moving section, and the guide section are separated from the centering device of the present invention.
Fig. 4 is a bottom perspective view showing a state where the placement section, the moving section, and the guide section are separated from the centering device of the present invention.
Fig. 5 is a sectional view taken along line a-a of fig. 2.
Fig. 6 is a top perspective view showing a state where the guide is separated from the centering device of the present invention.
Fig. 7 is a diagram showing an operation state of the centering device of the present invention.
Description of reference numerals
1: the centering device 100: placing part
110: bracket 111: upper side of the bracket
112: lower side 113 of bracket: insertion groove
120: centering roller portion 130: roller part
200: the moving section 210: movable board
211: through-hole 220: a pair of axle fixed block
230: the stopper 240: wedge part
300: the guide part 310: linear guide
311: the plurality of linear guides 312: connecting plate
320: guide plate 321: insert block
321 a: wedge groove 330: spring
Detailed Description
Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings. First, in the process of assigning reference numerals to constituent elements of drawings, the same constituent elements are assigned the same reference numerals as much as possible even when they appear in different drawings. Also, in the event that it is judged that the gist of the present invention may be unnecessarily obscured, detailed description thereof will be omitted. The embodiments of the present invention are described below, but the technical idea of the present invention is not limited to these, and can be implemented by a person having ordinary skill.
Fig. 1 is a plan view and a front view showing an installation state of a centering device of the present invention, fig. 2 is a perspective view showing the centering device of the present invention, fig. 3 is a top perspective view showing a state where a placement portion, a moving portion, and a guide portion are separated from the centering device of the present invention, fig. 4 is a bottom perspective view showing a state where the placement portion, the moving portion, and the guide portion are separated from the centering device of the present invention, fig. 5 is a sectional view taken along line a-a in fig. 2, fig. 6 is a top perspective view showing a state where the guide portion is separated from the centering device of the present invention, and fig. 7 is an operation state view showing the centering device of the present invention.
Hereinafter, a centering device 1 according to a preferred embodiment of the present invention will be described with reference to fig. 1 to 7.
Referring to fig. 1, the centering device 1 of the present invention may be disposed at an upper portion of a frame (not shown) in which the cartridges C are arranged, and may push four corners of the cartridges C by being disposed at the four corners of the cartridges C, respectively, so that the cartridges C may be arranged at an accurate position.
In this case, the four centering devices 1 have different centering directions, but have the same structure and shape.
Referring to fig. 2 to 4, the centering device 1 includes a placing part 100, a moving part 200, and a guide part 300.
As the placing part 100 rotates in the centering direction of the loading cassette C as the loading cassette C is placed, the placing part 100 may include a bracket 110, a centering roller part 120, and a placing roller part 130.
The bracket 110 may include an upper portion 111 and a lower portion 112, the upper portion 111 surrounds corners of the cassette C, and the lower portion 112 is disposed perpendicular to the upper portion 111.
In this case, the centering roller part 120 is rotatably combined with the upper side part 111 of the bracket 110 and forms a right angle with each other. Such centering roller portions 120 may support corner portions of the loading tray C.
The placing roller 130 is rotatably coupled to the lower portion 112 of the bracket 110, and is capable of supporting the load of the cassette C by contacting the bottom surface of the cassette C.
The centering roller portion 120 and the placing roller portion 130 may be made of a material such as rubber or urethane so as to stably support the loading cassette C, but is not limited thereto.
As described above, when the centering device of the present invention centers the loaded cartridges C, the centering roller part 120 and the placing roller part 130 combined with the bracket 110 can align the loaded cartridges C by one rotation.
That is, the placing part 110 may rotate in the centering direction and adjust the position of the loading cassette C while placing the loading cassette C, and thus may reduce a tact time (tact time), thereby improving a phenomenon that the loading cassette C is pushed due to mechanical full restriction.
Further, since the arrangement can be performed by increasing the load of the cartridges C, it is not limited by the long side or the short side of the cartridges C, and the time required for arranging the cartridges C can be reduced.
On the other hand, the moving unit 200 is connected to the lower side of the placing unit 100, and may include a moving plate 210, a pair of shaft fixing blocks 220, a stopper 230, and a wedge 240.
The movable plate 210 has a through hole 211 for allowing the wedge 240 to pass therethrough.
And, the moving plate 210 includes a pair of shaft fixing blocks 220 to be hinge-coupled with both ends of the rotation shaft of the placing part 100. That is, as shown in fig. 5, in the case of placing the loading cassette C, the placing part 100 may be rotated in the centering direction of the loading cassette C.
The stopper 230 is provided on the moving plate 210 and limits the rotation of the placing unit 100. For example, the rotation angle α of the placing section 100 may be 0 ° to 20 °, but is not limited thereto.
The moving unit 200 may include a wedge unit 240, and the wedge unit 240 may move up and down by the rotation of the placing unit 100.
As shown in fig. 5, the wedge 240 may have an upper end inserted into an insertion groove 113 formed in the bottom surface of the bracket 110 and a lower end tapered in a wedge shape.
As described above, the wedge part 240 may be formed in a tapered triangular pyramid shape, but is not limited thereto. For example, the wedge portion 240 may be formed in another form that can be inserted into the groove and fixed in position as the centering object descends.
On the other hand, as shown in fig. 3 and 6, the guide 300 is disposed under the moving unit 200, and may include a linear guide 310, a guide plate 320, and a spring 330.
The linear guide 310 is connected to the moving plate 2100 of the moving unit 200, and a plurality of linear guides 311 may be arranged to cross each other, and the plurality of linear guides 311 may move in the front-rear direction and the left-right direction with respect to the corners of the loading tray C according to the up-down movement of the wedge 240. In this case, the plurality of linear guides 311 may be arranged to intersect with each other with the connection plate 312 in between.
On the other hand, the guide 300 of the present invention includes the linear guide 310 so as to allow the moving plate 210 to freely move, but is not limited thereto. For example, although not shown, the guide 300 may include a thrust bearing, a ball, a parallel direction spring, and the like, and thus the guide 300 may move the moving plate 210.
The guide plate 320 may be provided with the linear guide 310 described above, and may include an insertion block 321 formed with a wedge groove 321 a.
The spring 330 has a lower end portion disposed at the insertion block 321 and an upper end portion inserted inside the wedge portion 240, and returns the wedge portion 240 to an original position when the load of the loading cassette C is removed. That is, since the wedge 240 moved downward by the load of the loaded cartridge C can be returned to the original position by the elastic force of the spring 330, it is possible to restore the original state without additional power when the load of the loaded cartridge C is removed.
The operation of the centering device 1 of the present invention having the above-described configuration will be described below.
Referring to fig. 7, in the initial state shown in the part (a), as shown in the parts (b) and (C), if the loading tray C descends toward the placing roller part 130 of the placing part 100, the centering roller part 120 can support the corner portions of the loading tray at two points.
Next, as shown in the sections (d) and (e), when the loaded cartridge C is placed on the placing roller unit 130, the placing unit 100 is rotated in the centering direction of the loaded cartridge C by the load of the loaded cartridge C.
In this case, the wedge part 240 is lowered to the wedge groove 321a by the rotation of the placing part 100 and inserted into the wedge groove 321a, wherein the lower end of the wedge part 240 is tapered in a wedge shape, and thus can be stably inserted by the guide of the wedge groove 321 a.
Further, since the wedge 240 is inserted into the through hole 211 of the moving plate 210, the position of the moving plate 210 can be adjusted when the wedge 240 is inserted in this state.
That is, as described above, since the moving plate 210 is in a state of being connected to the linear guide 310, the moving plate 210 can be horizontally moved in the front-rear direction and the left-right direction and adjusted in position as the wedge 240 descends.
Further, since the placing section 100 is coupled to the moving plate 210, the placing section 100 coupled to the moving plate 210 can be adjusted to an accurate position by adjusting the position of the moving plate 210 as the wedge part 240 descends.
Therefore, as shown in fig. 7 (e), when the loading cassette C is finally placed, the upper end of the wedge 240 is inserted into the insertion groove 113 formed in the bottom surface of the bracket 110, and the position of the lower end is adjusted to be inserted into the wedge groove 321 a.
As described above, as the position of the placing part 100 is adjusted, the centering roller part 120 and the placing roller part 130 may support the corner portions and the bottom surface of the loading cassettes C and align the loading cassettes C.
As described above, the centering device 1 of the present invention has an advantage in that since it is provided at the four corners of the loading cassette C, respectively, the loading cassette C can be positioned at an accurate position even though only one work is performed, by the supplementary action of the centering devices 1, which push the loading cassette C at an accurate position, with each other. That is, since the centering device 1 of the present invention can align the loading cassettes C for transferring the substrates at accurate positions, accurate loading/unloading can be performed to the inside of the next process device.
Further, the centering device 1 of the present invention can center the loading cassette C in a simple assembly/disassembly manner, only by a mechanical manner, and does not require an additional driving unit, and thus, does not require additional air pressure devices (air cylinders, regulators, etc.), a control device, and a working logic structure, and thus, can minimize field Setting and installation (Setting) operations, and has an effect of facilitating maintenance.
Although the preferred embodiments of the present invention have been described in detail, the technical scope of the present invention is not limited to the above embodiments, and the technical scope of the present invention should be interpreted according to the claims. In this case, a person of ordinary skill in the art to which the present invention pertains may make various modifications and variations without departing from the scope of the present invention.
Claims (4)
1. A centering device for aligning a loading box at an accurate position by being respectively provided at four corners of the loading box,
the method comprises the following steps:
a placing section that rotates in a centering direction of the loading cassette as the loading cassette is placed, the placing section including a plurality of rollers for supporting the loading cassette;
a moving part connected to a lower side of the placing part and including a wedge part, the wedge part moving in an up-and-down direction according to rotation of the placing part; and
a guide part disposed under the moving part and including a wedge groove formed to correspond to the wedge part and guiding the wedge part to move up and down,
and a wedge part which is inserted into the wedge groove and adjusted to a correct position, wherein the placing part connected with the wedge part is also adjusted to a correct position, thereby arranging the loading boxes.
2. The centering device according to claim 1, wherein the placing section includes:
a bracket including an upper side portion and a lower side portion, the upper side portion surrounding a corner of the loading box, the lower side portion being disposed vertically with respect to the upper side portion;
a centering roller part which is combined with the upper side part of the bracket in a rotatable way and forms a right angle with each other for supporting the corner part of the loading box; and
and a roller unit rotatably coupled to a lower portion of the bracket to support a load of the cassette.
3. The centering device according to claim 2, wherein the moving portion includes:
a moving plate having a through hole for passing the wedge portion therethrough;
a pair of shaft fixing blocks provided on the moving plate and hinge-coupled to both ends of the rotating shaft of the placing part; and
a stopper provided on the moving plate for restricting rotation of the placing section,
the wedge part has its upper end inserted into the inserting slot and its lower end tapered in wedge shape.
4. The centering device according to claim 3, wherein the guide portion includes:
a linear guide part connected with the moving plate, crossed with a plurality of linear guides, and moving along the front and back direction and the left and right direction relative to the corner of the loading box along with the up and down movement of the wedge part;
a guide plate having an insertion block formed with the wedge groove, the guide plate being provided with the linear guide; and
and a spring, the lower end of which is arranged on the inserting block, the upper end of which is inserted into the inner side of the wedge part, and when the load of the loading box is eliminated, the wedge part returns to the original position.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1020200028506A KR102178615B1 (en) | 2020-03-06 | 2020-03-06 | Centering apparatus |
| KR10-2020-0028506 | 2020-03-06 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN113353349A true CN113353349A (en) | 2021-09-07 |
| CN113353349B CN113353349B (en) | 2023-06-06 |
Family
ID=73398951
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202110225378.1A Active CN113353349B (en) | 2020-03-06 | 2021-03-01 | Centering device |
Country Status (2)
| Country | Link |
|---|---|
| KR (1) | KR102178615B1 (en) |
| CN (1) | CN113353349B (en) |
Citations (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH07171722A (en) * | 1993-12-20 | 1995-07-11 | Fuji Electric Co Ltd | Centering type four-way chucking mechanism |
| US20030070915A1 (en) * | 2001-10-12 | 2003-04-17 | Taiwan Semiconductor Manufacturing Co., Ltd. | Apparatus and method for self-centering a wafer in a sputter chamber |
| CN1959488A (en) * | 2005-12-29 | 2007-05-09 | 塔工程有限公司 | Device for aligning box |
| JP2009155000A (en) * | 2007-12-25 | 2009-07-16 | Hitachi Plant Technologies Ltd | Positioning and guiding device for cassette |
| KR20100136682A (en) * | 2009-06-19 | 2010-12-29 | 크린팩토메이션 주식회사 | Mechanical centering unit and centering apparatus using the same |
| KR20110083296A (en) * | 2010-01-14 | 2011-07-20 | 주식회사 에스에프에이 | Cassette centering apparatus |
| KR20110083297A (en) * | 2010-01-14 | 2011-07-20 | 주식회사 에스에프에이 | Cassette centering apparatus |
| KR20120025258A (en) * | 2010-09-07 | 2012-03-15 | 한국에스엠씨공압(주) | Centering unit |
| CN102442492A (en) * | 2010-10-01 | 2012-05-09 | 现代显示技术株式会社 | Cassette for Loading Substrate |
| KR101394318B1 (en) * | 2012-11-20 | 2014-05-13 | 주식회사 신성에프에이 | Cassette centering apparatus |
| JP2016063058A (en) * | 2014-09-18 | 2016-04-25 | 株式会社ダイヘン | Centering device |
| KR101825193B1 (en) * | 2017-09-05 | 2018-03-22 | 박한서 | a position automatic aligning device of a cassette |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20060074582A (en) * | 2004-12-27 | 2006-07-03 | 동부일렉트로닉스 주식회사 | Cassette index for a manufacturing process of a semiconductor device |
| KR101374670B1 (en) | 2012-10-25 | 2014-03-17 | 주식회사 에스에프에이 | Apparatus for transferring cassette |
| KR101964244B1 (en) * | 2017-08-31 | 2019-04-01 | 주식회사 신성에프에이 | Cassette centering apparatus |
-
2020
- 2020-03-06 KR KR1020200028506A patent/KR102178615B1/en active IP Right Grant
-
2021
- 2021-03-01 CN CN202110225378.1A patent/CN113353349B/en active Active
Patent Citations (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH07171722A (en) * | 1993-12-20 | 1995-07-11 | Fuji Electric Co Ltd | Centering type four-way chucking mechanism |
| US20030070915A1 (en) * | 2001-10-12 | 2003-04-17 | Taiwan Semiconductor Manufacturing Co., Ltd. | Apparatus and method for self-centering a wafer in a sputter chamber |
| CN1959488A (en) * | 2005-12-29 | 2007-05-09 | 塔工程有限公司 | Device for aligning box |
| JP2009155000A (en) * | 2007-12-25 | 2009-07-16 | Hitachi Plant Technologies Ltd | Positioning and guiding device for cassette |
| KR20100136682A (en) * | 2009-06-19 | 2010-12-29 | 크린팩토메이션 주식회사 | Mechanical centering unit and centering apparatus using the same |
| KR20110083296A (en) * | 2010-01-14 | 2011-07-20 | 주식회사 에스에프에이 | Cassette centering apparatus |
| KR20110083297A (en) * | 2010-01-14 | 2011-07-20 | 주식회사 에스에프에이 | Cassette centering apparatus |
| KR20120025258A (en) * | 2010-09-07 | 2012-03-15 | 한국에스엠씨공압(주) | Centering unit |
| CN102442492A (en) * | 2010-10-01 | 2012-05-09 | 现代显示技术株式会社 | Cassette for Loading Substrate |
| KR101394318B1 (en) * | 2012-11-20 | 2014-05-13 | 주식회사 신성에프에이 | Cassette centering apparatus |
| JP2016063058A (en) * | 2014-09-18 | 2016-04-25 | 株式会社ダイヘン | Centering device |
| KR101825193B1 (en) * | 2017-09-05 | 2018-03-22 | 박한서 | a position automatic aligning device of a cassette |
Also Published As
| Publication number | Publication date |
|---|---|
| KR102178615B1 (en) | 2020-11-13 |
| CN113353349B (en) | 2023-06-06 |
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