CN113351120B - Gas mixing system and mixing method - Google Patents

Gas mixing system and mixing method Download PDF

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CN113351120B
CN113351120B CN202110639048.7A CN202110639048A CN113351120B CN 113351120 B CN113351120 B CN 113351120B CN 202110639048 A CN202110639048 A CN 202110639048A CN 113351120 B CN113351120 B CN 113351120B
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gas
inflation
exhaust
ith
air
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CN113351120A (en
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樊继壮
高峰
马维良
喻曦
赵杰
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Harbin Institute of Technology
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Harbin Institute of Technology
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J4/00Feed or outlet devices; Feed or outlet control devices
    • B01J4/02Feed or outlet devices; Feed or outlet control devices for feeding measured, i.e. prescribed quantities of reagents
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J19/00Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J19/0006Controlling or regulating processes
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J4/00Feed or outlet devices; Feed or outlet control devices
    • B01J4/001Feed or outlet devices as such, e.g. feeding tubes
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J4/00Feed or outlet devices; Feed or outlet control devices
    • B01J4/008Feed or outlet control devices
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2204/00Aspects relating to feed or outlet devices; Regulating devices for feed or outlet devices
    • B01J2204/002Aspects relating to feed or outlet devices; Regulating devices for feed or outlet devices the feeding side being of particular interest

Abstract

The invention discloses a gas mixing system and a mixing method, relates to a device and a method for mixing multiple single-component gases, and aims to solve the problems of complexity, large equipment and poor portability of the conventional chemical gas mixing device; the gas passing volume can be measured through the gas pressure change in the detection device based on an ideal gas equation and a gas pressure sensor technology, the mixing ratio of mixed gas is controlled to meet the requirement, and gases with different gas volumes and mixing ratios and quantitative exhaust gas can be output.

Description

Gas mixing system and mixing method
Technical Field
The present invention relates to an apparatus and method for mixing multiple single component gases.
Background
The development of a robot using gas combustion as a driving method has made higher demands on a chemical gas quantitative mixing device, and a stable and reliable small-sized high-precision chemical gas mixing device is demanded.
The existing chemical gas mixing device mostly adopts a metal box, a large instrument and the like, and has the defects of complexity, huge equipment, poor portability and the like.
Disclosure of Invention
The invention aims to solve the problems of complexity, large equipment and poor portability of the conventional chemical gas mixing device, and provides a gas mixing system and a mixing method.
The invention discloses a gas mixing system which comprises an integrated valve island, a middle cavity, a first gas pump, a gas circuit control module, a middle cavity gas pressure acquisition module, a middle cavity temperature acquisition module, a calculation control module and a reaction cavity, wherein the gas circuit control module is connected with the middle cavity gas pressure acquisition module;
the integrated valve island comprises a plurality of inlet solenoid valves and an outlet solenoid valve which are integrated into a whole; the inlet electromagnetic valve and the outlet electromagnetic valve are both normally closed electromagnetic valves;
the middle cavity is provided with inlets and outlets, the number of which is equal to that of the inlet electromagnetic valves, the inlets of the middle cavity are communicated with a plurality of gas sources through a plurality of inlet electromagnetic valves in a one-to-one correspondence manner, the outlets of the middle cavity are communicated with the inlet of a first gas pump through outlet electromagnetic valves, and the outlet of the first gas pump is communicated with the inlet of the reaction cavity; the gas source is used for providing single-component gas;
the calculation control module is used for obtaining an outlet electromagnetic valve control signal and a first air pump control signal according to the volume of the middle cavity and sending the first air pump control signal to the air path control module;
the air path control module is simultaneously connected with the calculation control module, the outlet electromagnetic valve and the first air pump and used for receiving an outlet electromagnetic valve control signal and a first air pump control signal, and simultaneously opening the outlet electromagnetic valve and the first air pump to discharge air in the middle cavity in a preset initial exhaust time step length;
the calculation control module is also used for predicting the predicted proportion of each single-component gas after the ith inflation according to the preset mixed gas demand, the preset single-component gas proportion in the mixed gas, the accumulated gas supply quantity of each single-component gas before the ith inflation, the total quantity of the gas delivered before the ith inflation and the preset inflation time step length of the ith inflation, and selecting the single-component gas to be inflated during the ith inflation according to the predicted proportion; generating an inlet electromagnetic valve control signal corresponding to the single-component gas, and sending the inlet electromagnetic valve control signal to the gas circuit control module; and ending generating the inlet solenoid valve control signal when the total amount of the delivered gas before the ith inflation is equal to the mixed gas demand;
the gas path control module is also connected with the inlet electromagnetic valve and used for receiving an inlet electromagnetic valve control signal, opening the corresponding inlet electromagnetic valve according to the inlet electromagnetic valve control signal and inflating the middle cavity for the ith time by the air supply time step of the ith inflation;
the calculation control module is also used for generating an outlet electromagnetic valve control signal and a first air pump control signal during the ith exhaust and sending the signals to the air path control module; the outlet electromagnetic valve control signal and the first air pump control signal in the ith exhaust comprise the exhaust time step of the ith exhaust;
the gas circuit control module is also used for receiving an outlet electromagnetic valve control signal and a first gas pump control signal, opening the outlet electromagnetic valve and the first gas pump according to the outlet electromagnetic valve control signal and the first gas pump control signal, discharging the single-component gas filled by the ith inflation to the reaction cavity according to the exhaust time step of the ith exhaust, and mixing the single-component gases in the reaction cavity;
the middle cavity air pressure acquisition module is positioned in the middle cavity, is connected with the calculation control module, and is used for detecting the air pressure value after each air exhaust and the air pressure value after each air inflation in the middle cavity and sending the air pressure values to the calculation control module;
the middle cavity temperature acquisition module is positioned in the middle cavity, is connected with the calculation control module, is used for detecting the temperature value after each exhaust and each inflation in the middle cavity and sending the temperature value to the calculation control module;
the calculation control module is also used for receiving the air pressure value after each time of air exhaust, the air pressure value after each time of air inflation, the temperature value after each time of air exhaust and the temperature value after each time of air inflation in the middle cavity, and calculating to obtain the ith inflation quantity of the corresponding single-component gas, wherein the ith inflation quantity of the single-component gas is the actual gas quantity of the single-component gas inflated during the ith inflation; before the ith inflation, the accumulated air supply quantity of each single-component gas is the accumulation of the current inflation quantity of each single-component gas from the 1 st time to the i-1 st time; the total amount of gas delivered before the ith inflation is the sum of the cumulative gas delivery of all the single-component gases after the ith-1 inflation.
Further, the inlet solenoid valve includes a solenoid valve X in1 And solenoid valve X in2 The outlet solenoid valve includes a solenoid valve X out (ii) a The first air pump is a one-way pump.
Furthermore, the device also comprises a plurality of air source air pressure acquisition modules and air source air pressure detection modules;
the air source air pressure acquisition modules are arranged at the air sources one by one and used for acquiring the air pressure of each air source and sending the air pressure to the air source air pressure detection module;
the air source air pressure detection module is connected with the air source air pressure acquisition modules simultaneously and used for receiving the air pressure of the air source and comparing the air pressure with the corresponding preset air source air pressure threshold value, and when the air pressure of the air source is smaller than the corresponding preset air source air pressure threshold value, a signal for prompting the insufficient air source pressure is generated.
Further, the device also comprises an exhaust cavity 13, a second air pump 14 and an exhaust cavity air pressure acquisition module 15;
the integrated valve island 1 further comprises an exhaust solenoid valve 12;
an inlet of the exhaust cavity is communicated with an outlet of the reaction cavity through an exhaust electromagnetic valve, and an outlet of the exhaust cavity is communicated to the outside through a second air pump; the exhaust electromagnetic valve is a normally closed electromagnetic valve;
the calculation control module is also used for generating a first opening signal of the exhaust electromagnetic valve and a first opening signal of the second air pump and sending the first opening signals to the air path control module;
the air path control module is also connected with the exhaust electromagnetic valve and the second air pump at the same time, and is used for receiving a first opening signal of the exhaust electromagnetic valve and a first opening signal of the second air pump and controlling the exhaust electromagnetic valve and the second air pump to be opened at the same time;
the exhaust cavity air pressure acquisition module is positioned in the exhaust cavity, is connected with the calculation control module and is used for acquiring an air pressure value in the exhaust cavity and sending the air pressure value to the calculation control module;
the calculation control module is also used for receiving the air pressure value in the exhaust cavity, generating a first closing signal of an exhaust electromagnetic valve and a first closing signal of a second air pump when the air pressure value in the exhaust cavity is lower than the air pressure threshold value of the exhaust cavity, and sending the first closing signal and the first closing signal of the second air pump to the air path control module;
and the air path control module is also used for receiving the first closing signal of the exhaust electromagnetic valve and the first closing signal of the second air pump and controlling the exhaust electromagnetic valve and the second air pump to be closed.
Further, the device also comprises an exhaust cavity temperature acquisition module;
the calculation control module is also used for generating a second opening signal of the exhaust electromagnetic valve;
the gas circuit control module is also used for receiving a second opening signal of the exhaust electromagnetic valve and opening the exhaust electromagnetic valve to discharge gas in the reaction cavity into the exhaust cavity and enable the gas in the exhaust cavityThe air pressure reaches p Row 1
The calculation control module is also used for generating a second closing signal of the exhaust electromagnetic valve and a second opening signal of the second air pump and sending the second closing signal and the second opening signal to the air path control module;
the gas path control module is also used for receiving a second closing signal of the exhaust electromagnetic valve and a second opening signal of the second air pump, closing the exhaust electromagnetic valve and opening the second air pump to discharge gas in the exhaust cavity;
the calculation control module is also used for generating a second closing signal of the second air pump and closing the second air pump to enable the air pressure in the exhaust cavity to reach p Row 2
An air pressure acquisition module of the exhaust cavity, which is connected with the calculation control module and is used for acquiring air pressure p Row 1 And gas pressure p Row 2 And sending the data to a calculation control module;
an exhaust cavity temperature acquisition module connected with the calculation control module and used for acquiring the pressure in the exhaust cavity reaching p Row 1 Time corresponding temperature T Row 1 And the gas pressure reaches p Row 2 Time corresponding temperature T Row 2 And sending the data to a calculation control module;
a calculation control module for receiving the air pressure p Row 1 Pressure p of gas Row 2 Temperature T Row 1 And temperature T Row 2 And obtaining the amount of the gas discharged from the gas discharge cavity according to an ideal gas state equation.
The invention discloses a gas mixing method, which is realized based on a gas mixing system and comprises the following specific steps:
step one, setting the demand of mixed gas and the proportion of each single-component gas in the mixed gas; the proportion of the individual component gases in the gas mixture comprising the proportion R of the first individual component gas a And the ratio R of the second monocomponent gas b
Step two, performing initial exhaust on the intermediate cavity;
step three, predicting according to the accumulated gas supply quantity of each single-component gas before the ith inflation, the total quantity of the gas conveyed before the ith inflation and the preset inflation time step length of the ith inflation to obtain the prediction proportion of each single-component gas after the ith inflation;
and the predicted proportion of each single-component gas after the ith inflation and the preset proportion R of the first single-component gas 1 And presetting a second monocomponent gas ratio R 2 Constructing a comparison inequality, and selecting a single-component gas as the single-component gas to be filled in the ith inflation through the comparison inequality;
selecting a first single component gas when i equals 1; the accumulated gas supply amount of each single-component gas during the 1 st cycle of inflation and the total amount of the gas which is delivered during the ith cycle of inflation are both 0;
step four, inflating the selected single-component gas in the step three for the ith time according to the preset inflation time step of the ith inflation; calculating the ith inflation quantity of the single-component gas, the accumulated gas supply quantity of each single-component gas after the ith inflation and the total quantity of the gas delivered after the ith inflation;
step five, calculating the exhausting time step of the ith exhaust according to the ith inflation quantity of the single-component gas obtained in the step four, and exhausting the single-component gas in the middle cavity according to the exhausting time step of the ith exhaust;
when the total amount of the delivered gas after the ith cycle of inflation is less than the required amount of the mixed gas, enabling i to be i +1, and returning to the step three;
and ending the inflation when the total amount of the delivered gas after the ith cycle of inflation is equal to the required amount of the mixed gas.
Further, in step three, the predicted ratio of each single component gas after the ith inflation is:
Figure GDA0003740032070000041
Figure GDA0003740032070000042
wherein R' a Is the predicted proportion of the first one-component gas, R ', after the ith inflation' b The predicted ratio of the second monocomponent gas after the ith inflation,
Figure GDA0003740032070000043
for the total amount of gas delivered before the ith inflation, n ai Cumulative gas delivery of the first monocomponent gas prior to the ith inflation, n bi Is cumulative gas supply of the second single-component gas before the ith inflation, delta n' i Is a prediction value of the ith inflation quantity of the corresponding single-component gas, delta n' i Obtaining the inflation time step length of the ith inflation through the preset inflation time step length;
when the single-component gas filled in the ith inflation is the first single-component gas, m is 1, otherwise m is 0; when the single-component gas charged in the ith inflation is the second single-component gas, k is 1, otherwise k is 0.
Further, in the fourth step, the comparison inequality is:
R′ a -R a <R′ b -R b
and when the comparative inequality is true, selecting a first monocomponent gas; when the comparison inequality is not true, a second single component gas is selected.
Further, the ith inflation of the single-component gas is as follows:
Figure GDA0003740032070000051
where V is the volume of the intermediate chamber, p i-1 Is the stable pressure value, T, in the middle cavity after the (i-1) th exhaust i-1 Is the stable temperature value, p, in the middle cavity after the (i-1) th exhaust i Is the stable pressure value in the middle cavity after the ith inflation; t is i Is the stable temperature value in the middle cavity after the ith inflation, i is 1,2,3 … …; r is 8.314J/(mol · K) is an ideal gas constant;
and p' 0 And T 0 ' stable pressure value and stable temperature value in the middle cavity after initial exhaust are respectively.
Further, the preset inflation time step comprises a long delay and a short delay;
and a long delay is adopted when the difference between the total amount of the delivered gas and the required amount of the mixed gas is smaller than a preset inflation difference value, otherwise a short delay is adopted.
The invention has the beneficial effects that:
the gas mixing system is miniaturized and high-precision, and based on the integrated valve island device, the device size is reduced, the device structure is simplified, and the device has excellent portability. The gas mixing method can measure the volume of gas passing through by detecting the change of the gas pressure in the device based on an ideal gas equation and a gas pressure sensor technology, control the mixing ratio of mixed gas to meet the requirement and output gas with different gas volumes and mixing ratios; the gas can be discharged quantitatively; the device is used for high-precision input and mixing of chemical gases, and has high portability and usability.
Drawings
FIG. 1 is a schematic block diagram of a gas mixing system according to the present invention;
FIG. 2 is a flow chart of a gas mixing method of the present invention.
Detailed Description
In a first embodiment, a gas mixing system according to the present embodiment is a miniaturized high-precision chemical gas mixing system based on an integrated valve island, including: the device comprises a gas passage module, a gas pressure detection module and a circuit module;
the gas passage module comprises an integrated valve island 1, a middle cavity 2, a reaction cavity 11, electromagnetic valves (an inlet electromagnetic valve 1-1, an outlet electromagnetic valve 1-2 and an exhaust electromagnetic valve 12), a first gas pump 3 (a one-way pump), a second gas pump 14 and a plurality of gas sources 8 (provided by gas bags) communicated with the integrated valve island 1; one end of the middle cavity 2 is connected with a first air pump 3 for providing pneumatic air through an outlet electromagnetic valve 1-2, and the other two ends are respectively connected with an air source 8 filled with gas to be mixed through an inlet electromagnetic valve 1-1; the outlet of the first air pump 3 is connected with the reaction cavity 11, and the single-component gases in the reaction cavity 11 are mixed and generate related reaction; the middle cavity air pressure acquisition module 5 is used for measuring the air pressure of the middle cavity and comprises an air pressure sensing chip and a communication part; the middle cavity temperature acquisition module 6 is used for measuring the temperature of the middle cavity and comprises a temperature sensing chip and a communication part; the first air pump 3, the middle cavity air pressure acquisition module 5, the middle cavity temperature acquisition module 6 and the electromagnetic valve on the integrated valve island 1 are all connected with a circuit module (an air path control module 4 and a calculation control module 7); the circuit module is used for controlling the opening or closing of the first air pump 3, the middle cavity air pressure acquisition module 5 and the electromagnetic valve on the integrated valve island 1 and is used for data acquisition and related calculation.
The integrated valve island comprises four two-position three-way electromagnetic valves, namely a first electromagnetic valve (an inlet electromagnetic valve 1-1), a second electromagnetic valve (an inlet electromagnetic valve 1-1), a third electromagnetic valve (an outlet electromagnetic valve 1-2) and a fourth electromagnetic valve (an exhaust electromagnetic valve 12); the first solenoid valve, the second solenoid valve, the third solenoid valve and the fourth solenoid valve are two-position two-way solenoid valves.
The gas bag with gas to be mixed is connected with a first electromagnetic valve and a second electromagnetic valve respectively, the first electromagnetic valve and the second electromagnetic valve are both connected with the middle cavity, one end of a third electromagnetic valve is connected with the middle cavity 2, and the other end of the third electromagnetic valve is connected with a first gas pump 3 (one-way pump).
The integrated valve island 1 is formed by adopting transparent photosensitive resin and adopting a 3D printing technology, and four electromagnetic valves are arranged on the integrated valve island and are fixed by screw structures.
The principle of the device is shown in fig. 1, and each air source 8 and the first air pump 3 are connected with the intermediate chamber 2 through an electromagnetic valve (marked as an electromagnetic valve X) in1 Solenoid valve X in2 And solenoid valve X out ) When closed, the three solenoid valves separate the intermediate chamber 2 from the environment, making it a sealed chamber of constant volume (volume denoted V) inside which a high-precision sensor is used to measure pressure changes.
Wherein the gas passage is controlled by the integrated valve island, when mixing the chemical gas, first, the first air pump 3 and the electromagnetic valve X are opened out Time delay t 1 Then, the electromagnetic valve X is closed out The intermediate chamber 2 is pumped to negative pressure under the action of the first air pump 3, that is, the air pressure in the intermediate chamber 2 is lower than the external atmospheric pressure. After the pressure has stabilized, data p are recorded i-1 . Open valve solenoid valve X in1 Delay t 2 And then closed. Because the pressure of the air source 8 is higher than that of the middle cavity, the chemical gas in the air source 8 can automatically enter the middle cavity 2 to compensate the pressure difference, and after the pressure is stable, the pressure is recordedRecording the pressure value as p i . The quantity of the substance for delivering the chemical gas at this time is calculated to be deltan according to an ideal gas state equation i See the following equation. Filling every cycle, then will be delta n i-1 The gas is added until the required gas amount is obtained, and the inflation method of the other gas is the same.
Figure GDA0003740032070000061
In the formula, DELTA n i Is the gas volume transported in the current cycle; v is the middle chamber volume; p is a radical of i-1 Is a stable pressure value when the middle cavity is under negative pressure; t is i-1 Is the gas temperature at the time of the intermediate chamber negative pressure; p is a radical of i The stable pressure value after the air source is supplemented is obtained by the middle cavity; t is i The gas temperature of the middle cavity after being supplemented by the gas source; r is an ideal gas constant of 8.314J/(mol.K).
The speed and the precision are two contradictory important parameters of the gas delivery device, which are related to the volume V and the delay time t of the intermediate chamber 2 1 Are closely related. Increasing volume V and delay time t 1 Can improve the gas delivery volume of single circulation and further accelerate the gas delivery speed, but increases the gas delivery step length of the device, reduces the gas delivery precision and reduces V and t 1 The resulting effect is the opposite. Since the delay time can be easily changed by programming, in order to improve the gas supply accuracy without seriously affecting the gas supply speed, the volume V of the intermediate chamber is appropriately increased, and a multi-stage delay time t is set 1 To change the air supply step length. When the inflation quantity is far less than the demand quantity, the speed is increased by using long delay, and when the inflation is about to end, the precision is ensured by using short delay. In addition, to ensure the accuracy of the delivered gas mixture ratio, the sequence problem in cyclic inflation is solved and the flow chart is shown in fig. 2. According to the proportion R of each component, the current gas delivery amount and the total amount of the currently delivered gas
Figure GDA0003740032070000071
And the current air supply step length, and predicting each gas station after the circulationThe ratio of the ingredients is such that the ratio of the ingredients closest to the ideal ratio is fed, thus ensuring the accuracy of the final mixing ratio.
Wherein, the gas mixing system and the mixing method further comprise:
1. exhaust section
A rapid exhaust mode: the exhaust electromagnetic valves 12 and the second air pump 14 (exhaust one-way pump) on the two sides of the exhaust cavity 13 are opened, the gas to be exhausted is rapidly exhausted, the air pressure is fed back through the exhaust cavity air pressure acquisition module 15 during the period, the temperature is fed back through the exhaust cavity temperature acquisition module 16, the air pressure is gradually reduced from 101kPa, and when the air pressure is reduced and stabilized at 60kPa, the exhaust process can be considered to be finished. This is a quick exhaust and does not count the amount of gas exhausted.
And (3) quantitative exhaust mode: the principle is similar to that of an inflation model, the exhaust electromagnetic valve 12 at one side of the exhaust cavity is opened in each cycle, and the air pressure data p at the moment is recorded Row 1 Opening the second air pump 14 to pump air until the air pressure is stabilized to p Row 2 The exhaust solenoid valve 12 and the second air pump 14 are closed, and the amount of air delivered for this small cycle is obtained. The circulation is repeated, and the amount of the discharged gas can be measured.
2. Step size
Long latency definition: the longer valve opening time, the more the gas pressure in the intermediate chamber during inflation/exhaust chamber during exhaust is reduced, the limit being 60 kPa. The gas amount of the gas to be fed in one cycle is increased, and the gas feeding speed per time can be increased, but the gas feeding accuracy is slightly lowered.
Short delay definition: the shorter valve opening time results in less pressure drop in the intermediate chamber during inflation/exhaust. The gas amount of the gas to be fed in one cycle is reduced, and the accuracy of each gas feed can be improved, but the gas feed speed is slightly reduced.
Different delays will affect the accuracy and speed of the gas delivery/evacuation process. Adopting a strategy that: when the inflation quantity is far less than the demand quantity, the speed is increased by using long delay, and when the inflation is about to end, the precision is ensured by using short delay. Therefore, the high gas transmission speed and the high gas transmission precision are ensured.
The gas device precision of the device is set at present, and the error of delivering 50ml of gas is within 0.1 ml.
3. Real-time detection of whether the input gas is sufficient or not and whether a fault occurs or not
The input positions of the oxygen gas source (first single-component gas) and the hydrogen gas source (second single-component gas) are simultaneously provided with a gas source pressure acquisition module 9 and a gas source pressure detection module 10 for monitoring the pressure in real time, so that the pressure change of the two gas sources can be obtained in real time. When the air source is sufficient, the change of the air source cannot be influenced in the inflation process and the exhaust process, and all the changes are normal. When the gas supply condition that the air feed is insufficient appears, real-time supervision's baroceptor can show the decline of gas pressure of gas supply department, and the personnel of host computer control alright know the not enough condition of gas supply this moment, have avoided taking place because of the not enough condition that leads to the inflation process failure of gas supply gas.
4. Overpressure protection and device leakage monitoring of air pressure
In order to ensure the healthy operation of the gas pressure of the gas device and the air tightness monitoring of the device, four pressure sensors are arranged in total and are respectively arranged at the gas inlet of the gas exhaust cavity 13, the middle cavity 2 and the two gas sources 8. When the one-way pump and the electromagnetic valve are opened during the charging/discharging process of the device, if an abnormal state that the air pressure is not reduced at a constant speed is found. Problems with the tightness of the device may be suspected.
Abnormal state in which the air pressure does not decrease at a constant speed: that is, the indication that the air pressure is not decreased, or has a lower rate of decrease than normal, or has a smaller value than normal, which may be called an abnormal state.
Pinpointing the leak site of the device: the air leakage place can be judged according to the process of the air passage by adjusting the electromagnetic valve of each passage of the air passage, the switch of the one-way pump and the value of the air pressure sensor at each position. And (4) preferentially judging each air path section which is not air-leaked, and positioning the air path section which is air-leaked by an exclusion method. For example, the air pressure of the inflation cavity is reduced to 60kPa by opening the inflation one-way pump, three electromagnetic valves at the end of the inflation cavity are closed, the change of the air pressure sensor is observed, if the air pressure is kept at 60kPa, the middle cavity is confirmed to have no air leakage, and the air leakage part occurs in other air path sections.
5. Device with high precision and adjustable precision
The device precision is high, and the device precision is set within 0.1ml of the error of delivering 50ml of gas.
The precision of the device can be adjusted, and the precision of the device can be flexibly changed by adjusting the set inflation/exhaust step length and can be improved to 0.0001ml at most. The requirements of various experimental conditions on the precision of the conveyed gas can be flexibly met.
The preset inflation time step comprises a long delay and a short delay;
and a short delay is used when the difference between the total amount of the delivered gas and the required amount of the mixed gas is smaller than a preset inflation difference value, otherwise a long delay is used. The long delay and the short delay are not fixed values, but long delay is larger than or equal to a delay limit, and short delay is smaller than the delay limit. The specific delay setting may be set in conjunction with the flow rate of the inlet solenoid valve 1-1. Similarly, the exhaust time step also includes a long delay and a short delay, and the exhaust time step is set according to the long delay and the short delay of the inflation time step and the flow rate of the outlet solenoid valve 1-2 because the exhaust time step is used for exhausting gas in the middle cavity.

Claims (10)

1. A gas mixing system is characterized by comprising an integrated valve island (1), a middle cavity (2), a first gas pump (3), a gas circuit control module (4), a middle cavity gas pressure acquisition module (5), a middle cavity temperature acquisition module (6), a calculation control module (7) and a reaction cavity (11);
the integrated valve island (1) comprises a plurality of inlet solenoid valves (1-1) and an outlet solenoid valve (1-2) which are integrated into a whole; the inlet electromagnetic valve (1-1) and the outlet electromagnetic valve (1-2) are both normally closed electromagnetic valves;
the middle cavity (2) is provided with inlets and outlets, the number of the inlets and the number of the outlets are equal to that of the inlet electromagnetic valves (1-1), the inlets of the middle cavity (2) are communicated with the plurality of air sources (8) through the plurality of inlet electromagnetic valves in a one-to-one correspondence mode, the outlets are communicated with the inlet of the first air pump (3) through the outlet electromagnetic valves, and the outlet of the first air pump (3) is communicated with the inlet of the reaction cavity (11); the gas source is used for providing single-component gas;
the calculation control module (7) is used for obtaining an outlet electromagnetic valve control signal and a first air pump control signal according to the volume of the middle cavity (2), and sending the first air pump control signal to the air path control module (4);
the gas circuit control module (4) is simultaneously connected with the calculation control module (7), the outlet electromagnetic valve (1-2) and the first air pump (3) and is used for receiving an outlet electromagnetic valve control signal and a first air pump control signal, and simultaneously opening the outlet electromagnetic valve (1-2) and the first air pump (3) to discharge air in the middle cavity (2) according to a preset initialized air discharge time step;
the calculation control module (7) is further used for predicting to obtain the predicted proportion of each single-component gas after the ith inflation according to the preset mixed gas demand, the preset single-component gas proportion in the mixed gas, the accumulated gas supply quantity of each single-component gas before the ith inflation, the total quantity of the gas conveyed before the ith inflation and the preset inflation time step length of the ith inflation, and selecting the single-component gas to be inflated during the ith inflation according to the predicted proportion; generating an inlet electromagnetic valve control signal corresponding to the single-component gas, and sending the inlet electromagnetic valve control signal to a gas path control module (4); and ending generating the inlet solenoid valve control signal when the total amount of delivered gas before the ith inflation is equal to the mixed gas demand;
the gas circuit control module (4) is also connected with an inlet electromagnetic valve (1-1) and is used for receiving the control signal of the inlet electromagnetic valve, opening the corresponding inlet electromagnetic valve (1-1) according to the control signal of the inlet electromagnetic valve and carrying out the ith inflation on the middle cavity (2) according to the air supply time step of the ith inflation;
the calculation control module (7) is also used for generating an outlet electromagnetic valve control signal and a first air pump control signal during the ith exhaust and sending the outlet electromagnetic valve control signal and the first air pump control signal to the air circuit control module (4); the outlet electromagnetic valve control signal and the first air pump control signal during the ith exhaust comprise the exhaust time step of the ith exhaust;
the gas circuit control module (4) is also used for receiving the outlet electromagnetic valve control signal and the first gas pump control signal, opening an outlet electromagnetic valve (1-2) and a first gas pump (3) according to the outlet electromagnetic valve control signal and the first gas pump control signal, discharging single-component gas filled by the ith inflation to the reaction cavity (11) according to the exhaust time step of the ith exhaust, and mixing the single-component gas in the reaction cavity (11);
the middle cavity air pressure acquisition module (5) is positioned in the middle cavity (2), is connected with the calculation control module (7), is used for detecting the air pressure value after each air exhaust and the air pressure value after each air inflation in the middle cavity (2), and sends the air pressure values to the calculation control module (7);
the middle cavity temperature acquisition module (6) is positioned in the middle cavity (2), is connected with the calculation control module (7), is used for detecting a temperature value after each exhaust and a temperature value after each inflation in the middle cavity (2), and sends the temperature values to the calculation control module (7);
the calculation control module (7) is further configured to receive an air pressure value after each air exhaust, an air pressure value after each air inflation, a temperature value after each air exhaust and a temperature value after each air inflation in the middle cavity (2), and calculate to obtain an ith inflation quantity of the corresponding single-component gas, wherein the ith inflation quantity of the single-component gas is an actual gas quantity of the single-component gas inflated during the ith inflation; before the ith inflation, the accumulated air supply quantity of each single-component gas is the accumulation of the current inflation quantity of each single-component gas from the 1 st time to the i-1 st time; the total amount of gas delivered before the ith inflation is the sum of the cumulative gas delivery of all the single-component gases after the ith-1 inflation.
2. Gas mixing system according to claim 1, wherein the inlet solenoid valve (1-1) comprises a solenoid valve X in1 And solenoid valve X in2 The outlet solenoid valve (1-2) comprises a solenoid valve X out (ii) a The first air pump (3) is a one-way pump.
3. The gas mixing system of claim 2, further comprising a plurality of gas source pressure acquisition modules (9) and gas source pressure detection modules (10);
the air source air pressure acquisition modules (9) are arranged at the air sources one by one and used for acquiring the air pressure of each air source and sending the air pressure to the air source air pressure detection module (10);
air supply atmospheric pressure detection module (10), simultaneously with a plurality of air supply atmospheric pressure collection module (9) are connected for receive the atmospheric pressure of air supply and with the air supply atmospheric pressure threshold value comparison of presetting that corresponds, and when the atmospheric pressure of air supply is less than the air supply atmospheric pressure threshold value of presetting that corresponds, generate and be used for indicateing that air supply pressure is not enough signal.
4. The gas mixing system according to claim 2, further comprising an exhaust chamber (13), a second gas pump (14) and an exhaust chamber pressure acquisition module (15);
the integrated valve island (1) also comprises an exhaust solenoid valve (12);
an inlet of the exhaust cavity (13) is communicated with an outlet of the reaction cavity (11) through the exhaust electromagnetic valve (12), and an outlet of the exhaust cavity (13) is communicated to the outside through a second air pump (14); the exhaust electromagnetic valve (12) is a normally closed electromagnetic valve;
the calculation control module (7) is also used for generating a first opening signal of the exhaust electromagnetic valve and a first opening signal of the second air pump and sending the first opening signals to the air path control module (4);
the air path control module (4) is also connected with the exhaust electromagnetic valve (12) and the second air pump (14) at the same time, and is used for receiving a first opening signal of the exhaust electromagnetic valve and a first opening signal of the second air pump and controlling the exhaust electromagnetic valve (12) and the second air pump (14) to be opened at the same time;
the exhaust cavity air pressure acquisition module (15) is positioned in the exhaust cavity (13), and the exhaust cavity air pressure acquisition module (15) is connected with the calculation control module (7) and is used for acquiring an air pressure value in the exhaust cavity (13) and sending the air pressure value to the calculation control module (7);
the calculation control module (7) is further used for receiving the air pressure value in the exhaust cavity (13), and generating a first closing signal of the exhaust electromagnetic valve and a first closing signal of the second air pump to be sent to the air path control module (4) when the air pressure value in the exhaust cavity (13) is lower than an air pressure threshold value of the exhaust cavity;
and the air path control module (4) is also used for receiving a first closing signal of the exhaust electromagnetic valve and a first closing signal of the second air pump and controlling the exhaust electromagnetic valve (12) and the second air pump (14) to be closed.
5. The gas mixing system of claim 4, further comprising an exhaust chamber temperature acquisition module (16);
the calculation control module (7) is also used for generating a second opening signal of the exhaust electromagnetic valve;
the gas circuit control module (4) is also used for receiving a second opening signal of the exhaust electromagnetic valve and opening the exhaust electromagnetic valve (12) so that gas in the reaction cavity (11) is exhausted into the exhaust cavity (13) and the gas pressure in the exhaust cavity (13) reaches p Row 1
The calculation control module (7) is further used for generating a second closing signal of the exhaust electromagnetic valve and a second opening signal of the second air pump and sending the second closing signal and the second opening signal to the air path control module (4);
the gas path control module (4) is further configured to receive a second closing signal of the exhaust solenoid valve and a second opening signal of the second air pump, close the exhaust solenoid valve (12) and open the second air pump (14), so that gas in the exhaust cavity (13) is exhausted;
the calculation control module (7) is further configured to generate a second air pump closing signal, close the second air pump (14), and enable the air pressure in the exhaust cavity (13) to reach p Row 2
An air exhaust cavity air pressure acquisition module (15) connected with the calculation control module (7) and used for acquiring air pressure p Row 1 And pressure p Row 2 And sending the data to the calculation control module (7);
an exhaust cavity temperature acquisition module (16) connected with the calculation control module (7) and used for acquiring the pressure in the exhaust cavity (13) reaching p Row 1 Time corresponding temperature T Row 1 And the gas pressure reaches p Row 2 Time corresponding temperature T Row 2 And sending the data to the calculation control module (7);
the calculation control module (7) is also used for receiving the air pressure p Row 1 Gas pressure p Row 2 Temperature T Row 1 And temperature T Row 2 The gas discharged from the gas discharge chamber (13) is obtained according to an ideal gas state equationAmount of the compound (A).
6. A gas mixing method is realized based on the gas mixing system of any one of claims 1-5, and comprises the following specific steps:
step one, setting the demand of mixed gas and the proportion of each single-component gas in the mixed gas; the ratio of the individual component gases in the gas mixture comprises the ratio R of the first individual component gas a And the ratio R of the second monocomponent gas b
Step two, performing initial exhaust on the intermediate cavity (2);
step three, predicting according to the accumulated gas supply quantity of each single-component gas before the ith inflation, the total quantity of the gas conveyed before the ith inflation and the preset inflation time step length of the ith inflation to obtain the prediction proportion of each single-component gas after the ith inflation;
and the predicted proportion of each single-component gas after the ith inflation and the preset proportion R of the first single-component gas 1 And presetting a second monocomponent gas ratio R 2 Constructing a comparison inequality, and selecting a single-component gas as the single-component gas to be filled in the ith inflation through the comparison inequality;
selecting a first single component gas when i equals 1; the accumulated gas supply amount of each single-component gas during the 1 st cycle of inflation and the total amount of the gas which is delivered during the ith cycle of inflation are both 0;
step four, inflating the selected single-component gas in the step three for the ith time according to the preset inflation time step of the ith inflation; calculating the ith inflation quantity of the single-component gas, the accumulated gas supply quantity of each single-component gas after the ith inflation and the total quantity of the gas delivered after the ith inflation;
step five, calculating the exhausting time step of the ith exhaust according to the ith inflation quantity of the single-component gas obtained in the step four, and exhausting the single-component gas in the middle cavity according to the exhausting time step of the ith exhaust;
when the total amount of the delivered gas after the ith cycle of inflation is less than the required amount of the mixed gas, enabling i to be i +1, and returning to the step three;
and ending the inflation when the total amount of the delivered gas after the ith cycle of inflation is equal to the required amount of the mixed gas.
7. A gas mixing method as claimed in claim 6, wherein in step three, the predicted ratio of the individual component gases after the i-th inflation is:
Figure FDA0003740032060000041
Figure FDA0003740032060000042
wherein R' a Is the predicted proportion of the first one-component gas, R ', after the ith inflation' b The predicted ratio of the second monocomponent gas after the ith inflation,
Figure FDA0003740032060000043
for the total amount of gas delivered before the ith inflation, n ai Cumulative gas delivery of the first monocomponent gas prior to the ith inflation, n bi Is cumulative gas supply of the second single-component gas before the ith inflation, delta n' i Is a prediction value of the ith inflation quantity of the corresponding single-component gas, delta n' i Obtaining the inflation time step length of the ith inflation through the preset inflation time step length;
when the single-component gas filled in the ith inflation is the first single-component gas, m is 1, otherwise m is 0; when the single-component gas charged in the ith inflation is the second single-component gas, k is 1, otherwise k is 0.
8. A gas mixing method as claimed in claim 7, wherein in step four, the comparison inequality is:
R′ a -R a <R′ b -R b
and when the comparative inequality is true, selecting a first monocomponent gas; when the comparison inequality is not true, a second single component gas is selected.
9. A gas mixing method as claimed in claim 8, wherein the ith gas charge of the single component gas is:
Figure FDA0003740032060000051
wherein V is the middle chamber volume, p' i-1 Is the stable pressure value in the middle cavity after the (i-1) th air exhaust, T' i-1 Is the stable temperature value p in the middle cavity after the i-1 st exhaust i Is the stable pressure value in the middle cavity after the ith inflation; t is i Is the stable temperature value in the middle cavity after the ith inflation, i is 1,2,3 … …; r is 8.314J/(mol · K) is an ideal gas constant;
and p' 0 And T' 0 Respectively is a stable pressure value and a stable temperature value in the middle cavity after initial exhaust.
10. A gas mixing method as claimed in claim 9, wherein the predetermined inflation time step comprises a long delay and a short delay; the time delay greater than or equal to the time delay limit is long time delay, and the time delay smaller than the time delay limit is short time delay;
and a short delay is used when the difference between the total amount of the delivered gas and the required amount of the mixed gas is smaller than a preset inflation difference value, otherwise a long delay is used.
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