CN113346352A - Vertical cavity surface emitting laser and optical fiber coupling system - Google Patents
Vertical cavity surface emitting laser and optical fiber coupling system Download PDFInfo
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- CN113346352A CN113346352A CN202110764140.6A CN202110764140A CN113346352A CN 113346352 A CN113346352 A CN 113346352A CN 202110764140 A CN202110764140 A CN 202110764140A CN 113346352 A CN113346352 A CN 113346352A
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
- H01S5/18—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities
- H01S5/183—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities having only vertical cavities, e.g. vertical cavity surface-emitting lasers [VCSEL]
- H01S5/18361—Structure of the reflectors, e.g. hybrid mirrors
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/40—Arrangement of two or more semiconductor lasers, not provided for in groups H01S5/02 - H01S5/30
- H01S5/4012—Beam combining, e.g. by the use of fibres, gratings, polarisers, prisms
Abstract
The application discloses vertical cavity surface emitting laser and fiber coupling system, wherein, a vertical cavity surface emitting laser, including first reflector layer, oxide layer, the active layer of range upon range of setting, first reflector layer includes grating area, grating area includes first grating portion and centers on the second grating portion that first grating portion set up, be provided with the unoxidized area on the oxide layer, the unoxidized area is used for delimiting the exit window of laser, the exit window is located first grating portion is in orthographic projection within range on the oxide layer. The vertical cavity surface emitting laser provided by the embodiment of the application enables an external back reflection interference light source to be refracted at a grating area, partial shielding of refracted light is carried out through an exit window, light of a backlight source is prevented from entering a resonant cavity, influence of the light on light field distribution of a VCSEL is reduced, the signal to noise ratio is improved, and the transmission rate and the distance are increased.
Description
Technical Field
The present application relates generally to the field of optoelectronics, and more particularly to a vertical cavity surface emitting laser and an optical fiber coupling system.
Background
With the development of optical communication, semiconductor laser diodes have attracted attention and development in many fields. A Vertical-Cavity Surface-Emitting Laser (VCSEL) has the advantages of high speed, high integration, high cost performance, and the like, is rapidly developed in the fields of short-distance high-speed parallel optical interconnection, ethernet data communication networks, data centers, and the like, and is one of novel light sources in the field of optical communication.
In the field of high-speed optical communication, coupling between a laser and an optical fiber is an important ring, in the coupling process, interference of external light can affect coupling efficiency, back reflection is generated by any interface or scattering center in an optical network, the back reflection can propagate along an optical path or an optical guide and does not need to be emitted from the nearest place of a signal source, and when a back-reflected optical signal enters a resonant cavity, the change of a resonant condition often causes great change of laser output.
Therefore, finding a way to reduce the influence of the disturbance light has become a problem to be solved urgently in optical coupling.
Disclosure of Invention
In view of the above-mentioned drawbacks and deficiencies of the prior art, it is desirable to provide a vertical cavity surface emitting laser and a fiber coupling system that can improve the immunity of the laser.
In a first aspect, the present application provides a vertical cavity surface emitting laser, including a first reflector layer, an oxide layer, and an active layer, which are stacked, where the first reflector layer includes a grating region, the grating region includes a first grating portion and a second grating portion surrounding the first grating portion, the oxide layer is provided with an unoxidized region, the unoxidized region is used to define an exit window of laser light, and the exit window is located in a forward projection range of the first grating portion on the oxide layer.
Further, the phase difference of the first grating portion is smaller than the phase difference of the second grating portion, and/or the transmission coefficient of the first grating portion is smaller than the transmission coefficient of the second grating portion, and/or the refractive index of the first grating portion is larger than the refractive index of the second grating portion, and/or the reflectivity of the first grating portion is larger than the reflectivity of the second grating portion.
Preferably, the grating region is a plurality of grating bodies arranged in a periodic or aperiodic array, the grating body includes a cylinder and a grating groove arranged along the array direction, the width of each of the plurality of grating bodies arranged in the periodic array is equal, and the width of each of the cylinders in the plurality of grating bodies is unequal or the width of each of the grating grooves is unequal; the width of each grid body in the plurality of grid bodies in the aperiodic array arrangement is different.
Preferably, the first grating portion includes a central grating groove and a central cylinder adjacent to both sides of the central grating groove.
Preferably, first grating portion includes a plurality of first bars bodies that periodic array arranged, second grating portion includes a plurality of second bars bodies that periodic array arranged, first bars body includes first bars groove and first bars, second bars body includes second bars groove and second bars, in the first grating portion the density of first bars groove is less than in the second grating portion the density of second bars groove.
Further, the width of the first grid body is greater than that of the second grid body, the width of the first grid groove is less than that of the second grid groove, and the width of the first grid strip is greater than that of the second grid strip.
Further, the width of the first grid groove is smaller than that of the first grid bar; the width of the second grid groove is smaller than that of the second grid strip.
The active layer is arranged on the substrate, the oxide layer is arranged on the active layer, the first reflector layer is arranged on one side of the active layer, which is far away from the oxide layer, the first reflector layer is provided with a first electrode on one side of the first reflector layer, which is far away from the active layer, and the second reflector layer is provided with a second electrode on one side of the second reflector layer, which is far away from the active layer.
In a second aspect, the present application provides a fiber coupling system comprising a vertical cavity surface emitting laser as described in any of the above.
The laser device further comprises a total reflection prism, wherein the total reflection prism is configured to receive the laser beam emitted by the exit window and totally reflect the laser beam onto the optical fiber, and the laser beam emitted by the exit window is perpendicular to the direction of the optical fiber.
The technical scheme provided by the embodiment of the application can have the following beneficial effects:
the vertical cavity surface emitting laser provided by the embodiment of the application enables an external back reflection interference light source to be refracted at a grating area, partial shielding of refracted light is carried out through an exit window, light of a backlight source is prevented from entering a resonant cavity, influence of the light on light field distribution of a VCSEL is reduced, the signal to noise ratio is improved, and the transmission rate and the distance are increased. In addition, the divergence angle of the laser is made small by controlling the area of the exit window, which contributes to the improvement of the light coupling efficiency.
According to the vertical cavity surface emitting laser provided by the embodiment of the application, the refractive index and the phase of the grating are adjusted by designing the period of the grating and the width of each grating, so that the effect that external light is difficult to enter a resonant cavity and internal light can be radiated is achieved, the anti-interference performance of emitted light is further improved, and the coupling efficiency can be further improved.
Drawings
Other features, objects and advantages of the present application will become more apparent upon reading of the following detailed description of non-limiting embodiments thereof, made with reference to the accompanying drawings in which:
fig. 1 is a schematic structural diagram of a vertical cavity surface emitting laser according to an embodiment of the present disclosure;
FIG. 2 is a schematic structural diagram of another VCSEL provided by an embodiment of the present application;
FIG. 3 is a schematic structural diagram of another VCSEL provided in an embodiment of the present application;
FIG. 4 is a schematic structural diagram of another VCSEL provided by an embodiment of the present application;
FIG. 5 is an analog schematic diagram of the working principle of the grating provided by the embodiment of the present application;
fig. 6 is a schematic structural diagram of an optical fiber coupling system according to an embodiment of the present application.
In the figure:
1. a first reflector layer; 2. an exit window; 3. a grating area; 4. an active layer; 5. an oxide layer; 51. an unoxidized region; 52. an oxidation zone; 21. a first gate trench; 22. a first grid; 23. a second gate trench; 24. a second grid; 31. a first grating section; 32. a second grating section; 6. a second reflector layer; 7. an oxide isolation layer; 8. a current spreading layer; 91. a central gate trench; 92. a central column; 10. a first electrode; 11. a second electrode; 12. an optical fiber; 13. a total reflection prism.
Detailed Description
The present application will be described in further detail with reference to the following drawings and examples. It is to be understood that the specific embodiments described herein are merely illustrative of the relevant invention and not restrictive of the invention. It should be noted that, for convenience of description, only the portions related to the present invention are shown in the drawings.
It should be noted that the embodiments and features of the embodiments in the present application may be combined with each other without conflict. The present application will be described in detail below with reference to the embodiments with reference to the attached drawings.
Referring to fig. 1-4 in detail, the present application provides a vertical cavity surface emitting laser, including a first reflector layer 1, an oxide layer 5, and an active layer 4, which are stacked, where the first reflector layer 1 includes a grating region 3, the grating region 3 includes a first grating portion 31 and a second grating portion 32 disposed around the first grating portion 31, an unoxidized region 51 is disposed on the oxide layer 5, the unoxidized region 51 is used to define an exit window 2 of laser light, and the exit window 2 is located in a forward projection range of the first grating portion 31 on the oxide layer.
It should be noted that the vertical cavity surface emitting laser in the present application employs a High-Contrast Grating (HCG), and the HCG is a Grating having a Grating period smaller than the optical wavelength, and has High reflection and transmission focusing capabilities. When light is irradiated to the surface, the grating has the characteristic of no occurrence of high-order diffraction.
An unoxidized area 51 is arranged on the oxidized layer 5 and an oxidized area 52 is arranged around the unoxidized area 51, the unoxidized area 52 being used for defining the exit window 2.
In a specific configuration, selective wet oxidation may be performed by a wet oxidation process, for example, at a temperature of 430 ℃, 2L/min of nitrogen carries water vapor at a certain temperature, and the oxidation depth, i.e., the extension depth of the oxide layer 5 in the left-right direction, is controlled by time, so as to form an oxidized region in the oxide layer 5, and a non-oxidized region in the central portion where wet oxidation is not performed.
Under the condition that the high-contrast grating vertical cavity surface emitting laser is provided with a plurality of light emitting areas, the current flowing through each light emitting area is uniform by arranging the oxidation layer 5, so that the brightness uniformity of the light emitting areas is high, and the quality of the vertical cavity surface emitting laser is improved.
The laser further comprises a second reflector layer 6 arranged on the side of the active layer 4 facing away from the first reflector layer 1, the first reflector layer 1 is provided with a first electrode 10 on the side facing away from the active layer 4, and the second reflector layer 6 is provided with a second electrode 11 on the side facing away from the active layer 4.
The second reflector layer 6 may be a DBR. The second reflector layer may comprise a stack of two materials of different refractive indices AlGaAs and GaAs; the substrate and the second reflector layer may be both N-type or both P-type.
It should be noted that in the embodiments of the present application, other layer structures, such as the oxide isolation layer 7 or the current spreading layer 8, may also be disposed between the light emitting layer and the first reflector layer or between the oxide layer and the first reflector layer, and the present application is not limited to the specific structure between the laser layers.
The resonant cavity is a necessary and most important component of a fiber laser, and generally comprises a total reflection mirror and a half reflection mirror which are respectively positioned at two ends of an optical path of the resonant cavity, wherein the total reflection mirror and the half reflection mirror form the resonant cavity through reflection of light. The high-reflectivity grating is used as a total reflection mirror of the laser resonant cavity, and the spontaneous radiation vibrates in the cavity to form stimulated radiation to generate laser output.
For the laser beam in the resonant cavity, the laser beam enters the high-refractive-index material from the low refractive index, the light is reflected in the grating region, and when the light in the resonator reaches the grating layer in the forward direction, the effect of high reflectivity is achieved. For back-reflected beams outside the cavity, refraction occurs from the high index material into the low index material, and when external light reaches the grating layer, a refraction phenomenon occurs.
For the height ratio grating, the grating has extremely high reflectivity and reflection bandwidth, and the reflectivity and the reflection bandwidth are adjusted by a plurality of factors such as substrate refractive index, grating period, duty ratio, etching depth, morphology and the like.
In the prior art, various parameters in the chip need to be adjusted, for example, the doping concentration of the rare earth ion doped silica fiber is changed or the shape structure of the grating is changed, so that the laser achieves a higher signal-to-noise ratio. However, in the present application, the area of the exit window is adjusted to control the back reflection light entering the resonant cavity, thereby improving the anti-interference effect. In order to further improve the interference rejection capability of the laser, in the embodiment of the present application, the setting of the grating region is further adjusted, so that the angle of refraction of the back-reflected light entering the first grating portion is increased, and the amount of light of the back-reflected light entering the exit window of the first grating portion is reduced.
For example, the phase difference of the first grating portion is smaller than the phase difference of the second grating portion, and/or the transmission coefficient of the first grating portion is smaller than the transmission coefficient of the second grating portion, and/or the refractive index of the first grating portion is larger than the refractive index of the second grating portion, and/or the reflectivity of the first grating portion is larger than the reflectivity of the second grating portion.
In a specific setting, the grating region is a plurality of grating bodies arranged in a periodic or aperiodic array, and the grating bodies include a cylinder and a grating groove arranged along the array direction.
As shown in fig. 1, the width of each gate in the plurality of gates arranged in the periodic array is equal, and the width of each pillar in the plurality of gates is different or the width of each gate slot is different, and in fig. 1, the width of each gate is σ; as shown in fig. 2 and 3, the widths of the gates in the plurality of gates arranged in the aperiodic array are different, and in fig. 2 and 3, the widths of the gates are σ1、σ2、σ3、σ4。
In addition, it should be noted that, in the quasi-periodic grating layer, the width of each periodic grating groove in the grating layer designed by the present invention may be uniform or nonuniform; in the non-periodic grating, the width of each grating in the grating layer designed by the invention can be uniform or nonuniform.
In the embodiment of the present application, specific parameters or specific structures of the grating layer are not limited, but the reflectivity and the reflection phase are adjusted by adjusting the structural parameters of the grating layer, so as to improve the performance of the laser against external light interference.
It should be noted that, in the embodiment of the present application, a non-uniform grating is used, and the more non-uniform the arrangement of lines on the grating is, the wider the angular spread of the diffraction orders is, so that the lower the resolution of the grating is, the less obvious the diffraction effect is.
The grating is also known as a diffraction grating. An optical element that disperses (decomposes) light into spectra by using the principle of multi-slit diffraction.
The position of the spectral line generated by the grating on the screen can be defined as d
The formula is shown. Where a represents the width of the grating grooves, b represents the pitch of the pillars, phi is the diffraction angle, theta is the angle between the incident direction of the light and the normal to the grating plane, k is the bright fringe spectral order (k ═ 0, ± 1, ± 2 … …), λ is the wavelength, and a + b is called the grating constant.
For the height ratio grating HCG of the present application, a phenomenon that high order diffraction does not occur is adopted, only 0 order diffraction exists, and the mechanism of transmittance can be interpreted as: physically, HCG can be seen as a short slab waveguide array with propagation direction along the y-axis, with incident light exciting multiple modes of the waveguide array, the first two modes playing a major role, and the higher order modes are all below the cutoff condition in the form of evanescent surface bound waves.
The HCG has three physical parameters that control the grating's transmittance (or reflectivity) and its phase according to the bragg phase matching condition: the width of the column, the width of the grating groove and the thickness of the grating. Incident light energy excites modes confined in the waveguide. I.e. the grating structure parameters can be varied in the lateral direction to achieve an arbitrary phase distribution of the reflected or transmitted light.
In a specific setting, the parameters of the refractive index, the reflectivity, the phase curve and the like of the grating can be determined by utilizing a known finite element method or strict coupled wave analysis. For example, different patterns are converted into the number of grating lines by using the grating vision software, different patterns are presented at different angles by using the principle of grating refraction, and gratings with different specifications have different refraction effects and refraction angles. This application is not described in detail herein.
By adjusting the grating structure, the grating region can be analogized to a flat concave mirror, as shown in fig. 5, including a plane and a concave surface, the back-reflected light can be regarded as incident on the vertical grating region, the plane corresponds to one side of the back-reflected light source, and the concave surface corresponds to one side of the resonant cavity. Which reflects light inside the resonant cavity such that the light is concentrated in the region between the first reflector layer and the second reflector layer.
When reaching the concave mirror from the resonator, the reflected light is focused light as shown in fig. 5(II), but the light coming from the outside becomes divergent light through the concave mirror as shown in fig. 5(I), so that the influence on the laser itself is reduced. The grating layer can achieve the effect of the plano-concave lens in fig. 5 by adjusting whether the period is the same or not and the width of each grating.
In one embodiment, the first grating portion includes a central grating groove 91 and central pillars 92 adjacent to both sides of the central grating groove 91.
In the embodiment of the application, the back reflection light is controlled to enter the resonant cavity by adjusting the area of the exit window. It should be noted that the area of the exit window in the present application may be smaller than or equal to the area of the first grating portion projected onto the oxide layer, but the area of the exit window may be adjusted appropriately while various parameters of the laser, such as the signal-to-noise ratio, are satisfied. The invention idea of the application belongs to any arrangement mode.
It should be noted that, in the present application, the grating portion belongs to and defines the specific position of the grating region, in some embodiments, for example, the number of the grating grooves is even, and one of the two grating grooves in the central position may be selected as the central grating groove, and the present application does not limit the specific position of the selected grating groove. For another example, in some embodiments, for example, the number of gate slots is an odd number, and the gate slots at the center position can be used as the center gate slot.
In one embodiment, the first grating portion 31 includes a plurality of first grating bodies arranged in a periodic array, the second grating portion 32 includes a plurality of second grating bodies arranged in a periodic array, the first grating bodies include first grating grooves 21 and first grating bars 22, the second grating bodies include second grating grooves 23 and second grating bars 24, and a density of the first grating grooves 21 in the first grating portion 31 is smaller than a density of the second grating grooves 23 in the second grating portion 32.
In a specific setting, the width of the first grid is greater than that of the second grid, the width of the first grid groove 21 is less than that of the second grid groove 23, and the width of the first grid 22 is greater than that of the second grid 24. The width of the first grid groove 21 is smaller than that of the first grid strip 22; the width of the second grid groove 23 is smaller than that of the second grid strip 24.
In the embodiment of the application, the grating is designed to be sparse in the middle and narrow in width, and the two sides are designed to be dense in the middle and wide in width, so that when external light enters from the middle, the phase difference is small, and when the external light enters from the two sides, the phase difference is large, the concave lens type effect is realized, the external light entering the active region is reduced, and the better anti-reflection effect is achieved.
In the embodiment of the application, the external back reflection interference light source is refracted at the grating area, the refracted light is partially shielded through the exit window, the light of the backlight source is prevented from entering the resonant cavity, the influence of the backlight source on the VCSEL light field distribution is reduced, the signal to noise ratio is improved, and the transmission rate and the distance are increased. In addition, the divergence angle of the laser is made small by controlling the area of the exit window, which contributes to the improvement of the light coupling efficiency.
In addition, in the embodiment of the application, the refractive index and the phase of the grating are adjusted by designing the period of the grating and the width of each grating, so that the effect that external light is difficult to enter the resonant cavity and internal light can be excited is achieved, the anti-interference performance of emitted light is improved, and the coupling efficiency can be improved.
In a second aspect, the present application provides a fiber coupling system comprising a vertical cavity surface emitting laser as described in any of the above.
Further, the optical fiber device further comprises a total reflection prism 13, wherein the total reflection prism 13 is configured to receive the laser beam emitted from the exit window 9 and totally reflect the laser beam onto the optical fiber 12.
It should be noted that fig. 6 only shows the case where the optical fiber is perpendicular to the laser, and in some embodiments, the light-emitting angle of the prism is adjusted so that the light-emitting angle of the laser beam corresponds to the position of the optical fiber.
The laser in the embodiment of the application is not only suitable for the case that the optical fiber is directly coupled with the laser, but also suitable for the case that the optical fiber is not directly coupled, and the back reflection light can come from any optical element (such as a prism and the like) on the chip light hole. A prism is arranged between the optical fiber and the VCSEL to turn the light.
It will be understood that the terms "length," "width," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," and the like, as used herein, refer to an orientation or positional relationship indicated in the drawings that is solely for the purpose of facilitating the description and simplifying the description, and do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and is therefore not to be construed as limiting the invention.
Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the present invention, "a plurality" means two or more unless specifically defined otherwise.
Unless defined otherwise, technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. Terms such as "disposed" and the like, as used herein, may refer to one element being directly attached to another element or one element being attached to another element through intervening elements. Features described herein in one embodiment may be applied to another embodiment, either alone or in combination with other features, unless the feature is otherwise inapplicable or otherwise stated in the other embodiment.
The present invention has been described in terms of the above embodiments, but it should be understood that the above embodiments are for purposes of illustration and description only and are not intended to limit the invention to the scope of the described embodiments. It will be appreciated by those skilled in the art that many variations and modifications may be made to the teachings of the invention, which fall within the scope of the invention as claimed.
Claims (10)
1. The vertical cavity surface emitting laser is characterized by comprising a first reflector layer, an oxide layer and an active layer which are arranged in a stacked mode, wherein the first reflector layer comprises a grating area, the grating area comprises a first grating part and a second grating part arranged around the first grating part, an unoxidized area is arranged on the oxide layer and used for limiting an exit window of laser light, and the exit window is located in the forward projection range of the first grating part on the oxide layer.
2. The vcsel of claim 1, wherein the phase difference of the first grating portion is smaller than the phase difference of the second grating portion, and/or the transmission coefficient of the first grating portion is smaller than the transmission coefficient of the second grating portion, and/or the refractive index of the first grating portion is larger than the refractive index of the second grating portion, and/or the reflectivity of the first grating portion is larger than the reflectivity of the second grating portion.
3. A vcsel according to claim 1, wherein said grating region is a plurality of grating bodies arranged in a periodic or non-periodic array, said grating bodies include a pillar and a groove arranged along the array direction, the width of each of said grating bodies in said plurality of grating bodies arranged in said periodic array is equal, and the width of each of said pillars in said plurality of grating bodies is different or the width of each of said grooves is different; the width of each grid body in the plurality of grid bodies in the aperiodic array arrangement is different.
4. A vertical cavity surface emitting laser according to claim 1, wherein said first grating portion includes a central grating groove and central pillars adjacent to both sides of said central grating groove.
5. The vcsel of claim 1, wherein the first grating portion includes a plurality of first grating bodies arranged in a periodic array, the second grating portion includes a plurality of second grating bodies arranged in a periodic array, the first grating bodies include first grating grooves and first grating bars, the second grating bodies include second grating grooves and second grating bars, and a density of the first grating grooves in the first grating portion is less than a density of the second grating grooves in the second grating portion.
6. A vertical cavity surface emitting laser according to claim 5, wherein said first grating has a width larger than that of said second grating, said first grating groove has a width smaller than that of said second grating groove, and said first grating has a width larger than that of said second grating.
7. A vertical cavity surface emitting laser according to claim 5, wherein said first grating groove has a width smaller than that of said first grating; the width of the second grid groove is smaller than that of the second grid strip.
8. A vertical cavity surface emitting laser according to claim 1, further comprising a second reflector layer provided on a side of said active layer facing away from said oxide layer, said first reflector layer being provided with a first electrode on a side facing away from said active layer, said second reflector layer being provided with a second electrode on a side facing away from said active layer.
9. A fiber coupling system comprising a vertical cavity surface emitting laser according to any one of claims 1 to 8.
10. The fiber coupling system of claim 9, further comprising a total reflection prism configured to receive the laser beam emitted from the exit window and totally reflect the laser beam onto the optical fiber, wherein the laser beam emitted from the exit window is perpendicular to the direction of the optical fiber.
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| CN116799610A (en) * | 2023-08-24 | 2023-09-22 | 芯辰半导体(苏州)有限公司 | Vertical cavity surface emitting laser and preparation process thereof |
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| CN116799610A (en) * | 2023-08-24 | 2023-09-22 | 芯辰半导体(苏州)有限公司 | Vertical cavity surface emitting laser and preparation process thereof |
| CN116799610B (en) * | 2023-08-24 | 2023-11-07 | 芯辰半导体(苏州)有限公司 | Vertical cavity surface emitting laser and preparation process thereof |
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