CN1133416A - Vacuum valve and vacuum breaker adapting it - Google Patents
Vacuum valve and vacuum breaker adapting it Download PDFInfo
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- CN1133416A CN1133416A CN95121120A CN95121120A CN1133416A CN 1133416 A CN1133416 A CN 1133416A CN 95121120 A CN95121120 A CN 95121120A CN 95121120 A CN95121120 A CN 95121120A CN 1133416 A CN1133416 A CN 1133416A
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H33/00—High-tension or heavy-current switches with arc-extinguishing or arc-preventing means
- H01H33/60—Switches wherein the means for extinguishing or preventing the arc do not include separate means for obtaining or increasing flow of arc-extinguishing fluid
- H01H33/66—Vacuum switches
- H01H33/666—Operating arrangements
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H33/00—High-tension or heavy-current switches with arc-extinguishing or arc-preventing means
- H01H33/60—Switches wherein the means for extinguishing or preventing the arc do not include separate means for obtaining or increasing flow of arc-extinguishing fluid
- H01H33/66—Vacuum switches
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H33/00—High-tension or heavy-current switches with arc-extinguishing or arc-preventing means
- H01H33/60—Switches wherein the means for extinguishing or preventing the arc do not include separate means for obtaining or increasing flow of arc-extinguishing fluid
- H01H33/66—Vacuum switches
- H01H33/662—Housings or protective screens
- H01H33/66207—Specific housing details, e.g. sealing, soldering or brazing
- H01H2033/66215—Details relating to the soldering or brazing of vacuum switch housings
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H33/00—High-tension or heavy-current switches with arc-extinguishing or arc-preventing means
- H01H33/60—Switches wherein the means for extinguishing or preventing the arc do not include separate means for obtaining or increasing flow of arc-extinguishing fluid
- H01H33/66—Vacuum switches
- H01H33/662—Housings or protective screens
- H01H33/66207—Specific housing details, e.g. sealing, soldering or brazing
- H01H2033/66223—Details relating to the sealing of vacuum switch housings
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H33/00—High-tension or heavy-current switches with arc-extinguishing or arc-preventing means
- H01H33/60—Switches wherein the means for extinguishing or preventing the arc do not include separate means for obtaining or increasing flow of arc-extinguishing fluid
- H01H33/66—Vacuum switches
- H01H33/662—Housings or protective screens
- H01H33/66261—Specific screen details, e.g. mounting, materials, multiple screens or specific electrical field considerations
- H01H2033/66276—Details relating to the mounting of screens in vacuum switches
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H33/00—High-tension or heavy-current switches with arc-extinguishing or arc-preventing means
- H01H33/60—Switches wherein the means for extinguishing or preventing the arc do not include separate means for obtaining or increasing flow of arc-extinguishing fluid
- H01H33/66—Vacuum switches
- H01H33/662—Housings or protective screens
- H01H33/66207—Specific housing details, e.g. sealing, soldering or brazing
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H9/00—Details of switching devices, not covered by groups H01H1/00 - H01H7/00
- H01H9/52—Cooling of switch parts
Landscapes
- High-Tension Arc-Extinguishing Switches Without Spraying Means (AREA)
- Gas-Insulated Switchgears (AREA)
Abstract
A low cost and a high reliable vacuum valve is provided which can improve the production efficiency and the vacuum tightness of the vacuum valve, and a vacuum circuit breaker using the vacuum valve. Inside a insulating housing, a pair of separable conductors in the central axial direction of the sealed vacuum vessel composed of a stationary conductor and amovable conductor are disposed. A stationary conductor having an external surface being broader than a contact area of the separable conductors is jointed to the lower end portion of the insulating housing and the lower end portion of the insulating housing is sealed thereby.
Description
The present invention relates to a kind of vacuum valve (vacuum valve), refer more particularly to a kind of vacuum circuit breaker of a kind of vacuum valve and this vacuum valve of application, above-mentioned vacuum valve is applicable to vacuum tightness and the manufacturing efficiency of improving it.
Vacuum valve is one of vitals in the vacuum circuit breaker, as opening circuit part, it is made of a vacuum vessel and pair of separable electrode, this vacuum vessel is made of the hollow cylindrical insulator of its two ends with the metal end plate sealing, and above-mentioned electrode is made of a fixed contact and a moving contact in this vacuum vessel.This fixed contact metal end plate by Stationary side under vacuum seal extends, and is installed in the sealing container.An end and this moving contact that another electrode is fixed to moving contact are connected with another piece metal end plate by a bellows under vacuum seal.In addition, as what disclosed among the early stage disclosed patent application 5-41143 of Japan (1993), use copper for quiet and moving contact, and for metal end plate, especially for the insulation crust of the phosphorized copper with the thermal stress of bearing, its metal end plate uses a kind of iron-nickel alloy and teleoseal.
The parts of the formation vacuum valve of narrating above connect with soldering, adopt a kind of brazing metal as a connected element.This soldering realizes with a kind of like this method: welding consumables is placed between the weldment that will connect or near, in the stove of a non-oxidation air, such as the temperature that is heated to above the welding consumables fusing point in vacuum furnace or the hydrogen stove, make the welding consumables fusing so that weld assembly is connected.And, can connect the parts that constitute this vacuum valve with TIG welding or plasma welding.
When making vacuum valve, vacuumizing with soldering is to finish in vacuum furnace simultaneously, and this vacuum valve inside vacuumizes and with vacuum seal.For example, this method disclosed in Japan early stage publication application 59-175521 (1984), and after local assembling part, assembly is sealed under tight vacuum condition in a vacuum furnace especially.More particularly, at first a stationary electrode, a fixed contact are connected with the Stationary side metal end plate and a moving electrode, a moving contact, a metal bellows are connected with moving side end panel with soldering, then, this Stationary side metal end plate is connected with hollow circular cylinder by soldering in vacuum furnace with this moving side metal end plate for the second time: promptly this Stationary side metal end plate and moving side metal end plate sandwich this insulation crust.After finishing this welding and doing exercises, be connected the end and carry out silver-plated in that each of this quiet and moving contact is outside.
Secondly, so far, for many researchs had been carried out in the vacuum seal that improves this vacuum valve.The Japan Patent of publication number 5-31245 (1992) discloses a this result of study, a kind of improved welding consumables that is used to connect weldment has been proposed in this result of study, and in the early stage disclosed patent application 2-195618 of Japan (1990), disclosed another result of study, wherein, adopted annular solder parts for correct for the sealing location, this weld assembly is provided with the projection of many interruptions along inside and outside two circumference.
Purpose for the sealing of the inner vacuum of vacuum valve, if connect each parts by single brazing operation, it is not enough then to connect the heat that fixed contact and stationary electrode and moving contact and moving electrode transmitted by this single brazing operation, so just can not realize welding reliably.Adopt above said connecting means for this reason, in the method, at first, stationary electrode, fixed contact and Stationary side metal end plate and moving electrode, moving contact, metal bellows and moving side metal end plate at first are connected with soldering, then, Stationary side metal end plate and moving side metal end plate are connected on this insulation crust by welding in a vacuum furnace.In this way, find the brazing operation time lengthening, manufacturing efficiency (working efficiency) is reduced, and increased the cost of production of this vacuum valve.
Secondly, after carrying out welding operation between parts,, coat a kind of solution (as acid and plating bath) on the surface of this connection part carrying out silver-plated place with external contacts attachment portion quiet, moving contact.Yet these materials present corrosivity, so that when these materials remain in the vacuum valve place, can take place such as vacuum leak or similar problem deserving of attention.Therefore must all remove this corrosion material, this needs many times, makes manufacturing efficiency (working efficiency) further reduce and further increase the cost of production of this vacuum valve.
In addition, when in this vacuum furnace, forming the parts of vacuum valve, by radiation heat is supplied with vacuum valve, so that the brazing material of connected element fusing, yet pricker is a kind of Main Ingredients and Appearance material, it is reflected radiation heat and absorb limited heat most likely, so that make this vacuum valve cost of heating long time and the photothermal even transmission of overslaugh and cause the inhomogeneous fusing of the brazing material of connected element, this is one of reason that causes vacuum leak.
Have again, in above-mentioned vacuum valve, will be different with contact material copper be used for this metal end plate such as iron-nickel alloy or teleoseal material, and then many constituent elementss require to connect at the tight vacuum-packed position of needs, this is one of reason that causes vacuum leak.
Have, although use this conventional method, use the brazing material of the connected element that has improved or use the location weldment that forms a plurality of projections on connected element such as a kind of, the vacuum seal characteristic of vacuum valve still is improved.But up to now, still do not have a kind of vacuum valve, its structure has reached reliable vacuum seal.Therefore, the vacuum seal characteristic of traditional vacuum valve remains not enough.
An object of the present invention is to provide a kind of low cost and high reliable vacuum valve, the manufacturing efficiency of this vacuum valve and vacuum seal performance improve.
Another object of the present invention provides a kind of circuit breaker, and this circuit breaker makes its weight saving by using the vacuum valve of introducing above.
In order to obtain a kind of vacuum valve that reaches above purpose, vacuum valve according to the present invention comprises an insulation crust, a pair of separable contact that an electrode is respectively arranged, the end of the contact that this electrode is installed in insulation crust, and flexible part, these parts are connected with a kind of like this method one of them contact with an end of this insulator shell, make in the contact one keep this hollow cylindrical insulator inner vacuum tightness again when separating with another contact, the other end of this insulation crust touches with another and carries out vacuum seal.
In order to obtain to reach a kind of vacuum valve of above purpose, this vacuum valve according to the present invention comprises a pair of separable contact that respectively has an electrode, the end of the contact that this electrode is installed in insulation crust, and by distolateral with this insulation crust of one of them contact, end plate and bellows at the vacuum condition lower seal, wherein the opposite side of this insulation crust by other contact at the vacuum lower seal.
In order to obtain to reach a kind of vacuum valve of above purpose, vacuum valve according to the present invention comprises a pair of by a fixed contact and the separable contact that moving contact constitutes, this contact end that they are provided with in insulation crust respectively has an electrode, and of insulation crust is distolateral, by one of them contact, an end plate and a bellows at the vacuum lower seal, wherein another of this insulation crust distolateral by fixed contact at the vacuum lower seal.
Be preferably between the distolateral and fixed contact of another of this insulation crust connection part near the material at place be a kind of with copper as main constituent and contain the alloy that its weight is the chromium of 1%-10%.
In addition, best the changing according to variation of connection part between the distolateral and fixed contact of another of insulation crust near the moment of flexure amount of the distance of connection part near the cross sectional area at place.
Have, preferably this fixed contact has a groove in its end again, with another attachment portion of distolateral formation of insulation crust, and has one to protrude the surface, and this surperficial horizontal plane is than the horizontal plane height of the attachment portion of this attachment portion offside.
In order to obtain to reach a kind of vacuum valve of above purpose, the empty valve of this tool according to the present invention comprises a pair of by a fixed contact and the separable contact that moving contact constitutes, the contact end that they are installed in insulation crust respectively has an electrode, and of this insulation crust is distolateral, by one of them contact, an end plate and a bellows at the vacuum lower seal.Wherein another of this insulation crust distolateral by fixed contact at the vacuum lower seal, and in the part between the distolateral and fixed contact of another of a part between the distolateral and moving contact and this insulation crust is multi-layer sealed under vacuum condition of this insulation crust at least.
Be preferably between distolateral and this fixed contact of another of insulation crust two attachment portions are set at least, and the space between two attachment portions is vacuumized.
In addition, preferably this bellows is made up of a plurality of bellowss, and the end in a plurality of bellows is connected with this moving contact, and distolateral a connection of one of the other end of these a plurality of bellowss and this insulation crust, and the space between a plurality of bellowss is vacuumized.
In order to obtain to reach a kind of vacuum valve of above purpose, vacuum valve according to the present invention comprises a pair of by a fixed contact and the separable contact that moving contact constitutes, face each other in the insulation crust end of contact of installing has electrode, and this insulation crust one distolateral by one of them contact, an end plate and a bellows at the vacuum lower seal.Wherein another of this insulation crust distolateral by fixed contact at the vacuum lower seal.Another of this insulation crust is distolateral to be connected by an annular connected element with this fixed contact, this annular connected element is the fixed contact location with the inner circumference with a bending part, is the insulation crust location with excircle and by the protuberance that circumferencial direction is provided with at certain intervals.
Preferably this bellows is made up of a plurality of bellowss, one end of these a plurality of bellowss is connected with this moving contact, and at least one and distolateral connection of this insulation crust in the other end of a plurality of bellowss, and the other end of at least one is connected with an annular connected element in the distolateral and a plurality of bellowss of this insulation crust, this annular connected element is fixed contact location with its inner circumference with curved section, is the insulation crust location with its excircle with by the protuberance of circumferencial direction certain intervals setting.
Have again, preferably this bellows is made up of a plurality of bellowss, one end of these a plurality of bellowss is connected with this moving contact, and at least one and distolateral connection of this insulation crust in the other end of a plurality of bellowss, and at least one the other end of metal end plate and a plurality of bellowss is connected with a connected element, this connected element has annular bending part, with its inner circumference is the metal end plate location, and with the excircle is the insulation crust location, also has a step portion, be at least one location in a plurality of bellowss, and press the protuberance that the circumferencial direction certain intervals is provided with.
Manufacture method for the vacuum valve of realizing reaching above purpose, in an end of fixed contact a connected element is set, the underpart of insulation crust is placed on it, then, moving contact is inserted in this insulation crust, and a plurality of connected elements are set to the bellows attachment portion of this moving contact and the upper end portion of this insulation crust respectively, then, one end of bellows is set to this bellows attachment portion by this link, and an end of metal end plate is arranged on the upper end portion of this insulation crust by means of this link, then, a link is placed on the other end of this metal end plate, and the other end of bellows places on this link, after this, in a vacuum furnace, heat this assembly, meanwhile with the melting temperature that is higher than this link, apply a pressure from the outside to the attachment portion of bellows, make vacuum valve thus.
Preferably this vacuum valve is by making this fixed contact nickel plating, and a heater is linked into nickel plating part with the transmission of heat heating.
In order to obtain to reach a kind of vacuum circuit breaker of above purpose, this vacuum circuit breaker according to the present invention comprises that at least one passes through one of a plurality of vacuum valves that the sealing of one end of insulation crust constituted with contact, the outer contact that extends from the two ends of this vacuum valve, be used for a plurality of contact terminals of linking outer contact that vacuum valve is connected with external electrical, and the operating device of an operation vacuum valve.
One end of this insulation crust by fixed contact at the vacuum lower seal, the metal end plate that has saved that tradition closely is connected with this fixed contact and under vacuum, the lower end of this insulation crust is sealed under vacuum.Thereby, the attachment portion quantity between each parts that constitutes vacuum valve is reduced, and needs the also corresponding minimizing of vacuum-packed partial amt.
Secondly, be according to changing near cross sectional area with respect to variation to the moment of flexure of the distance of this attachment portion with the fixed contact of this insulation crust attachment portion.And form near the Cuprum alloy that the material of the fixed contact of this attachment portion is 1%-10% by its weight that contains chromium.Thus, that part of mechanical strength has improved about 40%.
Have, this fixed contact is provided with a convex protrusion surface again, and this surperficial horizontal plane is higher than the horizontal plane with the attachment portion, underpart of insulation crust.Thereby, the concentrating of upper end electric field of having weakened the brazing material that during applying voltage, causes.
Have, in the part between distolateral and this fixed contact of another of the part between one of this insulation crust distolateral and moving contact and this insulation crust is that multilayer ground is at the vacuum lower seal at least again.That is, two attachment portions are at the vacuum lower seal between this fixed contact and this insulation crust at least, or the end in a plurality of bellows is to the sealing of this moving contact, and of the other end of a plurality of at least bellowss is to this insulation crust sealing under vacuum.Therefore just having improved may vacuum leak vacuum tightness partly.
Further, attachment portion between the underpart of this insulation crust and this fixed contact connects with an annular connected element, this annular connected element is the fixed contact location with its inner circumference with curved section, is the insulation crust location with its excircle with by the protuberance that circumferencial direction is provided with at certain intervals.Therefore can vacuumize and keep vacuum at double sealing configuration place.And then, owing to be provided with curved section, strengthened in the attachment portion between the parts, and improved the vacuum tightness at possibility vacuum leak place.
Furtherly, use this structure, brazing material is dispersed on the attachment portion between each parts equably, and guarantees the reliable of these parts.
Have again, this bellows is made up of a plurality of bellowss, and at least one end in the other end in a plurality of bellowss is distolateral connection the with insulation crust, and at least one the other end of distolateral and a plurality of bellowss of this insulation crust is connected with an annular connected element, this annular connected element is the fixed contact location with its inner circumference with curved section, with excircle with by the protuberance that circumferencial direction is provided with at certain intervals is the insulation crust location, and at least one is connected to the distolateral of insulation crust in the other end of a plurality of bellowss, and the other end of at least one is connected with the connected element with ring-type bending part in metal end plate and a plurality of bellowss, this connected element is the metal end plate location with its tool inner circumference, with its excircle is the insulation crust location, a step portion, be at least one the other end location in a plurality of bellowss, one and the protuberance that is provided with at certain intervals by circumferencial direction, therefore can carry out space between a plurality of bellowss and vacuumize and keep vacuum.Have, for such structure, brazing material is dispersed on the link between each parts equably, makes the attachment portion reliable again.
During vacuum valve was made, it was disposed thereon with the underpart of insulation crust again in an end of fixed contact a connected element to be set.Then, moving contact is inserted in this insulation crust, and a plurality of connected elements are set to a bellows attachment portion of this moving contact and the upper end portion of this insulation crust respectively.Then, an end of bellows is set to this bellows attachment portion by this link, and an end of metal end plate is arranged on the upper end portion of this insulation crust by this link.Then, a link is placed on the other end of this metal end plate, and the other end of bellows places on this link, after this, in a vacuum furnace, heat this assembly with the melting temperature that is higher than this link, meanwhile, apply a pressure, make vacuum valve thus from the outside to the attachment portion of bellows.Insert wherein at the simultaneously corresponding connected element in location, bottom from this fixed contact, whole parts of this vacuum valve are assembled successively.As a result, manufacture this vacuum valve with a kind of single connection operation.
Preferably this vacuum valve is by making this fixed contact nickel plating, and a heater is linked into nickel plating part with the transmission of heat heating.Therefore, this vacuum valve assembly absorbs the heat from heater effectively, thereby, shortened its heating time.
Have, also saved the needed silver-plated time of traditional manufacturing vacuum valve, the result has shortened the time of making vacuum valve.
Fig. 1 is a longitudinal section diagrammatic sketch, and embodiment's feature structure of the vacuum valve according to the present invention is shown.
Fig. 2 is in the expression vacuum valve as shown in Figure 1, the relation between the size of the attachment portion of this fixed contact, bending moment and the section area.
Fig. 3 is a longitudinal section diagrammatic sketch, is used to illustrate the making method of vacuum valve shown in Figure 1.
Fig. 4 is a longitudinal section diagrammatic sketch, and another embodiment's feature structure of the vacuum valve according to the present invention is shown.
Fig. 5 is a diagrammatic sketch that has amplified, and the lower end attachment portion of insulation crust in the vacuum valve as shown in Figure 4 is shown.
Fig. 6 is a diagrammatic sketch that has amplified, and the upper end attachment portion of insulation crust in the vacuum valve as shown in Figure 4 is shown.
Fig. 7 is a perspective view, and a connected element structure is shown, and this connected element is used for a position of the connection of Fig. 6.
Fig. 8 is a perspective view, and a connected element structure is shown, and this connected element is used for a position of the connection of Fig. 6.
Fig. 9 is a perspective view, and a connected element structure is shown, and this link is used in the position that Fig. 5 connects.
Figure 10 is a sectional view, and the vacuum circuit breaker of the vacuum valve that adopts Fig. 1 to Fig. 4 is shown.
With reference to each accompanying drawing, will be elaborated to various embodiments of the present invention below.
Fig. 1 is a longitudinal plane diagrammatic sketch, and first embodiment according to a vacuum valve of the present invention is shown.Fig. 2 is in the expression vacuum valve as shown in Figure 1, the relation between the size of this fixed contact attachment portion, bending moment and the section area.
In an insulation crust 1, a pair of separable contact so that the central axis direction of seal container is provided with comprises a fixed contact 3 and a moving contact 5.
One end of the metal end plate 7 of moving contact side is connected with the upper end portion 1A of this insulation crust 1, flexible part is an end (the moving contact side 6B of metal end plate) of bellows 6, with another distolateral connection of this metal end plate 7, the other end of flexible part (moving contact side 6A) is connected with moving contact 5, with the upper end portion 1A sealing with this insulation crust 1.Even bellows 6 still keeps the inside of vacuum valve 100 under vacuum state when these moving contact 5 work.
This fixed contact 3 is connected with the underpart 1B of this insulation crust 1, and the underpart 1B of this insulation crust 1 is therefore sealed.
The Stationary side electrical contact surface 3E of this fixed contact 3 forms the umbrella of radially extending, and the end in extension radially forms a groove 3C, and owing to form this groove 3C, then formed connection root 3B and connected end 3A, be connected with the underpart 1B of this insulation crust 1.
The difference of this attachment portion material coefficient of thermal expansion coefficient is to control near the thickness of the connection end 3A of this attachment portion by reducing.Yet this thickness reduces to cause the mechanical strength of these parts to descend.So, in the present embodiment, in order to obtain needed intensity, used and contained the reinforcement copper (reinforced copper) of its weight closing on the part that connects end 3A as the Cuprum alloy of the chromium of 1%-10%.Having, just as shown in Figure 2, is with respect to the distance (L) from this attachment portion 3B to attachment portion 3A from connecting root 3B to the section area (S) that connects end 3A again, reduces gradually from connection root 3B according to the variation that acts on the bending moment (M) above them.Especially, the thickness t of locating to the top that connects end 3A from the thickness t 1 of this connection root 3B 2 reduces gradually.
Have, in the central axis side (connection root 3B and the offside that is connected end 3A of groove 3C) of this fixed contact 3, it is prominent to stationary electrode 2 to form this boss surface of boss surface 3D 3D again, is higher than and connects end 3A.In addition, form one and comprise having expansion diameter part 3G, it extends to the core of fixed contact from this boss surface 3D.Further, nickel plating on the surface of fixed contact 3.
End (fixed contact 3 sides) at moving contact 5 connect a moving electrode 4, and its other end is provided with an attachment screw part 5F, is used for being connected (not shown) with an outer contact.Thereby formed a clavate contact, this contact extends to a moving side electrical contact surface 5E who allows electric current to pass through from this moving electrode 4 by moving contact 5.In the intermediate portion office of this moving contact, form a bellows protection baffle plate 5A who outwards protrudes, its external diameter is greater than the external diameter of this bellows 6.And the root place at this protection baffle plate be provided with a bellows attachment portion 5B, and the bellows attachment portion can be connected with the moving contact side 6A of bellows 6.
Have, this moving contact 5 is the same materials of connection end 3A of the close fixed contact 3 stated by as above chatting face to face again, and the reinforcement copper that promptly contains its weight and be the Cuprum alloy of 1%-10% chromium is made, and as mentioned above, with fixed contact 3 the same also nickel plating.
This bellows 6 is provided with moving contact side 6A at the side of the first end of movable contact, and this side 6A is used for being connected with the attachment portion 5B of bellows, and the metal end plate side 6B at the other end place of bellows is used to connect this moving contact side metal end plate 7.
Moving contact side metal end plate 7 is used to be connected its bellows 6 metal end plate side 6B at inner circumference place and the upper end portion 1A of the insulation crust 1 at its excircle place.
Have again, around the radome 8 of stationary electrode 2 and moving electrode 4, by the inwall support of insulation crust 1.
With reference now to Fig. 3, a kind of manufacture method of the vacuum valve of introducing above is described.Among Fig. 3, vacuum valve is according to the following steps manufacturing:
I, this fixed contact 3 installed to inside be provided with in the lower support pedestal 31 of a heater 32, this Stationary side electrical contact surface 3E is in contact with it, and on this fixed contact 3 soldering relay part 10 of assembling and stationary electrode 2.
II, successively the underpart 1B of an annular soldering relay part 11 and this insulation crust 1 is installed to this and be connected end 3A, and this insulation crust 1 is packed in this lower support pedestal 31.
III, pack into the bottom of this moving contact and this moving electrode inserted up to this moving electrode 4 of a soldering relay part 12 and moving electrode 4 is contacted with its this stationary electrode 2 of support.
IV, a soldering relay part 15 is contained on the upper end portion 1A of this insulation crust 1, and refills this moving contact side metal end plate 7.
V, a soldering relay part 13 is installed on the bellows attachment portion 5B of this moving contact 5, and the moving contact side end 6A of this bellows 6 of packing into, then a soldering fitting 14 is installed to the top of the inner circumference of this moving contact side metal end plate 7, and the metal end plate side end 6B of this bellows 6 of then packing into.
VI, a central upper portion metal casting die 33 is inserted, simultaneously the moving contact side end 6A and the soldering relay part 13 of this bellows 6 are pressurizeed in heating, in pressurization and heating, another upper metal casting die 34 is installed on the metal end plate side end 6B of movable side metal end plate 7, soldering relay part 14 and bellows 6 then.
VII, the assembly that assembles is heated to above these solderings and connects the weldering parts temperature of dissolving in a vacuum furnace after, just finished the manufacturing of vacuum valve.
According to present embodiment, because the lower end section 1B side of this insulation crust 1 seals with fixed contact 3, and is directly to heat nickel plating by heater 32 by transmission of heat from the Stationary side electrical contact surface 3E of this fixed contact 3 to a wide area that connects end 3A, then this fixed contact 3 effectively absorbs this heat, and remaining heat is dissolved the weld assembly 11 at this 3A place, connection end.The major part of the heat that is absorbed by this fixed contact 3 is dissolved the soldering relay part 10 of this stationary electrode 2, and the soldering relay part 12 at moving electrode 4 places that contact with stationary electrode 2 is dissolved by having the incline section 3G of big cross sectional area.
And then, because by to nickel plating on from moving contact side electrical contact surface 5E to the big coverage rate of the moving contact 5 of bellows attachment portion 5B, directly pressurize with its weight with upper metal casting die 33 to the moving contact side 6A of bellows 6, improved the heat absorption of moving contact 5, nickel plating surface and the moving contact side end 6A of bellows and contact segment central upper portion metal casting die 33 between of the heat that photothermal central upper portion metal casting die 33 absorbs in vacuum furnace by moving contact 5 is absorbed and enters in the moving contact 5, and soldering relay part 13 is dissolved, and make in soldering relay part 12 heating at moving electrode 4 places and dissolve.
By heating to aforesaid upper and lower side two places, be sure of that the soldering relay part 10,12 and 13 of this insulation crust 1 inboard has dissolved, then each parts is connected with a kind of single joining operation.And then, because shortened heating time and shortened the operating time, manufacturing efficiency is improved.In addition, because evenly heat, so reach complete connection to being connected part accordingly.
Have again,, use the underpart of 3 pairs of insulation crusts 1 of fixed contact to seal, just can save the metal end plate of the underpart of this insulation crust 1 according to the present invention.Thereby reduced the quantity of the part that will be tightly connected, also reduced may vacuum leak part.Therefore the vacuum tightness and the reliability of this vacuum valve have been improved.
Because the underpart to insulation crust 1 seals, it is thicker than the thickness of the upper end portion of this insulation crust 1 (moving contact 5 sides) that the thickness of the underpart of this insulation crust 1 becomes, and the intensity of the underpart side of this insulation crust 1 improves, and therefore, has improved the reliability of this vacuum valve.
Have again, in this fixed contact 3, from connecting root 3B, according to respect to from connecting root 3B to the variation of the distance that connects end 3A according to the moment of flexure (M) of effect on it to the cross sectional area (S) that connects end 3A, reduce gradually from connecting root 3B, as shown in Figure 2.Its thickness is for reducing to the thickness t 2 at the top that connects end 3A from the thickness t 1 that connects root 3B.Have, because this fixed contact 3 is adopting a kind of reinforcement copper that its weight is the Cuprum alloy of 1%-10% chromium that contains with insulation crust 1 attachment portion near the place, the mechanical strength of these parts of this fixed contact 3 is compared with the fine copper contact will strengthen about 40% again.Therefore, the thickness t 2 of this connection end 3A of this fixed contact 3 has approached about 40%.So, even when a pressure affacts on this moving contact side metal end plate 7, simultaneously this Stationary side electrical contact surface 3E is fixed as static plane, and when moment of flexure is applied to being connected end 3A and going up of the connection root 3B of thickness t 1 of this fixed contact 3 and thickness t 2 respectively, because above measure has been arranged, the influence that difference of thermal expansion coefficients between insulation crust 1 and the connection end 3A causes has just reduced, thereby has reduced the possibility that this attachment portion is damaged.And then the connection end portion thickness of this fixed contact 3 can be easy to adjust by the shape of improving 3C.Therefore improved the reliability of this vacuum valve.
Have, according to present embodiment, because boss surface 3D is designed to the horizontal plane height of its horizontal plane than the attachment portion between the connection end of the underpart 1B of insulation crust 1 and fixed contact 3, then at pressure dwell, the electric field that soldering connects the tip portion of material reduces again.Therefore the initial voltage of coronal discharge can be improved, and the dielectric tracking of this vacuum valve can be prevented.Therefore also improved the reliability of vacuum valve.
Have, according to present embodiment, this moving contact 5 has also used and has contained the reinforcement copper of its weight as the Cuprum alloy of the chromium of 1%-10% as fixed contact 3 again.Therefore the mechanical strength of this moving contact 5 has also been strengthened, and during closing of circuit-rupturing operation since may being out of shape also of causing of big mechanical force reduced, thereby improved the reliability of this vacuum valve.
Have again,,, therefore after seal operation, do not need silver-plated because fixed contact 3 and moving contact 5 carry out nickel plating on it before the assembling stage according to present embodiment.Can shorten the production time of this vacuum valve thus, thereby improve the reliability of this vacuum valve.
From indiffusion, even after vacuum furnace carried out seal operation, this nickeling layer was still kept its function that electrically contacts to this nickeling layer under the brazing temperature of soldering relay part.
Have again,, especially use a kind of used usually silver, make at the each several part that requires the high vacuum seal degree with highly reliable in being connected of the each several part that requires to conduct electricity as brazing material owing to shown good wettability with brazing material nickel plating.
Further, nickel demonstrates it in a vacuum and bears the twice that voltage is copper, thereby has shortened the insulation distance between radome 8 and fixed contact 3 or the moving contact 5.Thereby, can reduce the diameter of vacuum valve and can also reduce the size of this vacuum valve.
In the present embodiment, owing to used said structure, the vacuum tightness of this vacuum valve improves.But the vacuum tightness of this vacuum valve also can improve by adopting following structure (will illustrate with reference to figure 4 to Fig. 9).
Fig. 4 is the longitudinal sectional drawing of this vacuum valve of expression.Fig. 5 is the amplification diagrammatic sketch of the attachment portion 16 between a underpart 1B who is illustrated in an insulation crust 1 and the fixed contact 3.Fig. 6 is attachment portion, the upper end 1A of this insulation crust 1 of expression and the amplification diagrammatic sketch of an attachment portion 17 between the moving contact metal end plate 7.Fig. 7 is the perspective pictorial view of expression present embodiment as each soldering relay part of connected element to Fig. 9.In the present embodiment, the parts identical and equivalent with front embodiment are represented with identical reference symbol, also economize the explanation of omitting it here.
At first, the upper end portion side 1A of this hollow circuit cylinder insulator will be narrated.In this vacuum valve 100, bellows one of (in the combiner) constitutes with double structure, comprise a moving contact side bellows 6 and insulation crust side bellows 6 '.In the moving contact side bellows 6 in these two bellowss, end (being connected to the opposite end, upper end portion of this insulation crust 1) at this moving contact side metal end plate 7 is located, be connected with the end 6B of this metal end plate side along its inner circumference, and moving contact side end 6A is connected with the bellows attachment portion 5B of this moving contact 5.
In this insulation crust side bellows 6 ', this metal end plate side end 6 ' B is connected with the upper end portion 1A of this insulation crust 1, and moving contact side end 6 ' A also is connected with the bellows attachment portion 5B of this moving contact 5.
On the 5B of the bellows attachment portion of this moving contact 5, form a ladder, its thickness is corresponding to desired thickness of this moving contact side bellows 6 of soldering, 6 ' time.And with pressure P respectively with this moving contact side bellows 6,6 ' be soldered on the bellows attachment portion 5B of this moving contact 5.
For this insulation crust side bellows 6 ' metal end plate side end 6 ' B be connected with the upper end portion 1A of this insulation crust 1, used soldering parts 26 in the moving contact side of a ring-type.The excircle part of this moving contact side metal end plate 7 is connected on the metal end plate side 6 ' B of this insulation crust side bellows 6 by the outer soldering parts 25 of a ring-type moving contact side.
Soldering parts 26 are made of an inner circumference curved section 20 and a plurality of protuberance 23 in this moving contact side, this inner circumference curved section 20 is used for firmly the whole inner circumference location to the upper end portion 1A of this hollow cylindrical insulator 1, and a plurality of protuberance 23 constitutes a gap for the space between a plurality of bellowss is vacuumized.This protuberance 23 forms spill and convex along the circumferencial direction of this insulation crust 1 with certain interval.
The outer soldering parts 25 of this moving contact side are provided with: an excircle curved section 21, this part 21 are designed to firmly the whole circumference location to the upper end portion 1A of this insulation crust 1; An inner circumference curved section 20, this part 20 are designed to the inner circumference location to this moving contact side metal end plate 7; A step portion 24, it be designed to the excircle of soldering parts 26 in this moving contact side and this insulation crust side bellows 6 ' metal end plate side end 6B location, and a plurality of protuberances 23, their constitute one and are used for gap that the space between a plurality of bellowss is vacuumized.This protuberance 23 forms spill and convex along the circumference of this insulation crust 1 at certain interval.
For this reason, between the upper end portion 1A of this moving contact side metal end plate 7 and this insulation crust 1, select this attachment portion 17, make from the excircle of the upper end portion 1A of this insulation crust 1 extend to the inboard of this metal end plate 7 and with this insulation crust side bellows 6 ' the surface coverage of metal end plate side end 6 ' B.
In the present embodiment, the surface of upper end portion ' A and metal end plate side end 6 ' B all connects the material covering with soldering after soldering connects operation.
The underpart 1B side of this insulation crust 1 will be described below.The fixed contact side electrical contact surface 3E of this fixed contact 3 forms by extending into a umbrella shape, is provided with a groove 3C in its end.In its end, the protuberance 3H with this groove 3C constitutes is connected with the underpart 1B of this insulation crust 1 with ring-type, and the underpart 1B of this protuberance 3H and this insulation crust 1 is connected by a ring-type fixed contact side soldering relay part 22.
These ring-type fixed contact side soldering parts 22 are provided with an excircle curved section 21, and it is designed to firmly the whole circumference location to the underpart 1B of this insulation crust 1; An inner circumference curved section 20, it is designed to firmly the whole circumference of protuberance 3H be located, and a plurality of protuberance 23, and they are designed to form the gap that the space between this protuberance 3H is vacuumized usefulness.This protuberance 23 forms spill and convex along the circumference of this insulation crust 1 at a determining deviation place.
Have again, adopted with front embodiment according to this vacuum valve of present embodiment and narrated substantially the same manufacture method manufacturing.
According to present embodiment, (one of combiner of vacuum valve is to constitute with double structure to this bellows.That is, by moving contact side bellows 6 and insulation crust side bellows 6 ' constitute.And the end at fixed contact 3 forms groove 3C, with formation protuberance 3H, thereby this vacuum seal is partly doubled, and makes the part of possibility vacuum leak obtain reinforcing.Therefore, the vacuum tightness according to this vacuum valve of present embodiment further improves.
According to present embodiment, because the underpart of this insulation crust 1 seals, then the thickness of the underpart of this insulation crust 1 becomes thicker than the upper end portion (moving contact 5 sides) of this insulation crust 1, and the intensity of the underpart of this insulation crust 1 is improved.Therefore, improved the reliability of this vacuum valve.
Have again, according to present embodiment, the measure of having adopted is the protuberance 23 that constitutes spill and convex structure along the circumference of this insulation crust 1, the underpart 1B of this insulation crust 1 and the attachment portion of this fixed contact 3, and the space between a plurality of bellowss, and the inboard of this insulation crust 1, all be evacuated in heating with during vacuumizing.
And then, because soldering parts 26 are provided with inner circumference curved section 20 in this moving contact side, its design comes the whole circumference of the upper end portion 1A of this insulation crust 1 is firmly located, and the outer soldering parts 25 of this moving contact side are provided with excircle curved section 21, its design is firmly located the whole circumference of the upper end portion 1A of this insulation crust 1, and inner circumference curved section 20 is designed to the inner circumference location to this moving contact side metal end plate 7, step portion 24, be designed to the circumference of soldering parts 26 in this moving contact side and this insulation crust side bellows 6 ' metal end plate side end 6 ' B location, then this insulation crust side bellows 6 ' metal end plate side end 6 ' B, the attachment portion 17 of the upper end portion 1A of this insulation crust 1 and this moving contact side metal end plate 7 remains under the given state, be a kind of vacuum seal state, even when these moving contact 5 motions, also be like this.Therefore just kept the vacuum in this insulation crust 1, improved these like this, thereby can improve the reliability of this vacuum valve by the tightness of tight connection part.
The vacuum valve of this double seal for being used in the vacuum circuit breaker that requires under the frequent handover operation condition, is very useful.
Have again, because present embodiment has adopted the manufacture method substantially the same with the embodiment who narrates previously, so, promptly can finish attended operation reliably by single connection work.Have, because shortened heating time and operating time, manufacturing efficiency is improved again.In addition, because each attachment portion is evenly heated, so can realize complete connection.And then can improve the reliability of this vacuum valve.
Figure 10 illustrates the section diagrammatic sketch of a kind of vacuum circuit breaker of any formation of vacuum valve that adopts above statement.
This vacuum circuit breaker 101 that constitutes has a movable pedestal with a plurality of wheels 102 103 that is arranged on operating device 104, the three pairs of insulating cylinders 107 on the rear side of this operating device 104 (a pair of insulating cylinder only is shown among Figure 10) in the front panel side and this operating device 104 and this insulating cylinder 107 are installed.
This vacuum valve 100 is separately positioned in these three pairs of insulating cylinders 107, and the separable contact that constitutes this fixed contact 3 and moving contact 5 is connected with the outer contact 105,106 that is arranged on vacuum valve 100 central axis places respectively.
The outer contact 105 that is connected with fixed contact 3 is connected with splicing ear 108,109 respectively with the outer contact 106 that is connected with moving contact 5, and comes out from the upper and lower of insulating cylinder 107 respectively.Splicing ear 108,109 is by movable base 103, is connected with unshowned in the drawings switchboard respectively or disconnects.
When the outer contact 105,106 that is connected with splicing ear 108,109 from the upper and lower portion of the insulating cylinder 107 at the back side of the front panel of vacuum circuit breaker 101 with level when coming out, the upper and lower portion of insulating cylinder 107 are opened.Because insulating cylinder 107 plays a chimney effect, so the air that the under shed by insulating cylinder 107 enters is heated by vacuum valve 100, and the air after the heating is gone out by the upper opening of insulating cylinder 107.
The end of the outer contact 106 that is connected with moving contact 5 is connected with an operation pull bar 110, and, operation pull bar 110 is connected with a master lever (not shown), one end of this main lever is connected with operating device 104, so the moving contact 5 of vacuum valve 100 drives by master lever, operation pull bar 110 and outer contact 106 by this operating device 104.
Therefore, when the operation pull bar moved downward, the electrode that is contained in the top electrode of locating and the place, top that is contained in fixed contact 3 of moving contact 5 disconnected.And when this operation pull bar 110 moved upward, the electrode that is contained in the place, top of moving contact 5 was connected with the electrode at the place, top that is contained in this fixed contact 3.
In this vacuum valve 100, the outer surface of this fixed contact 3 is very big, and has the effect of radiator.At least the area of the outer surface of this fixed contact is bigger than the area of contact of separable contact 3,5.The separable contact 3,5 that constitutes fixed contact 3 and moving contact 5 electrode 2,4 at the place, top by being contained in fixed contact 3 and moving contact 5 respectively is connected and when stationary electrode 2 is connected with moving electrode 4, very big electric current is by therebetween, so produce heat between stationary electrode 2 and moving electrode 4.
In this case, because the exterior surface area of fixed contact is bigger than the area of contact of the separable contact 3,5 that passes through stationary electrode 2 and moving electrode 4, that is: the area of contact than stationary electrode 2 and moving electrode 4 is big, then the heat that produces at this area of contact place is easily by the very big outer surface radiation of fixed contact, so, can make the size of vacuum valve very compact, and the little 7-10% of its weight ratio traditional vacuum valve.
And then, can also come compactly than any vacuum circuit breaker with the vacuum circuit breaker of this vacuum valve.
Claims (13)
1, a kind of vacuum valve, the a pair of separable contact (3,5) that constitutes a fixed contact (3) and a moving contact (5) in this vacuum valve is arranged in the hollow cylindrical insulator (1), and above-mentioned hollow cylindrical insulator (1) one distolateral be with an end plate (7) and a flexible part (6,6 ') at the vacuum lower seal, this vacuum valve is characterised in that:
Another of above-mentioned hollow cylindrical insulator (1) is distolateral be by above-mentioned fixed contact (3) with outer surface that is connected with an external contacts (105) at the vacuum lower seal, above-mentioned external surface area is bigger than the area of contact of this separable contact (3,5).
2, the described a kind of vacuum valve of claim 1 is characterized in that:
Above-mentioned vacuum valve is arranged in the insulating vessel of a vacuum circuit breaker, and this vacuum circuit breaker has open upper portion and bottom.
3, the described a kind of vacuum valve of claim 2 is characterized in that above-mentioned insulating vessel is a vertically disposed tube.
4, the described a kind of vacuum valve of claim 1 is characterized in that:
Above-mentioned fixed contact (3) is arranged on the above-mentioned moving contact.
5, the described a kind of vacuum valve of claim 1 is characterized in that:
Basically vertical of the axis at the center that is arranged on above-mentioned moving contact (5) top of above-mentioned fixed contact (3).
6, a kind of vacuum circuit breaker that comprises a vacuum valve, wherein, the separable contact (3 of a fixed contact of a pair of formation (3) and a moving contact (5) is set in a hollow cylindrical insulator (1), 5), and above-mentioned hollow cylindrical insulator (1) is one distolateral by an end plate (7) and a flexible part (6,6 ') at the vacuum lower seal, an outer contact (105) that is connected with the outer surface of this fixed contact (3), another contact (106) that is connected with above-mentioned moving contact (5) and an operation pull bar (110) that is used to make above-mentioned moving contact (5) action is characterized in that:
Another of above-mentioned hollow cylindrical insulator (1) distolateral by above-mentioned fixed contact (3) at the vacuum lower seal.Above-mentioned fixed contact (3) has the outer surface that is connected with an outer contact (105), and the area on said external surface is bigger than the area of contact of this separable contact (3,5).
7, the described a kind of vacuum circuit breaker of claim 1 is characterized in that:
Above-mentioned vacuum valve is arranged in the insulating vessel with open upper portion and bottom.
8, the described a kind of vacuum circuit breaker of claim 2 is characterized in that:
Above-mentioned insulating vessel is vertically disposed tube.
9, the described a kind of vacuum circuit breaker of claim 1 is characterized in that:
Above-mentioned separable contact (3,5) is arranged vertically, and therefore above-mentioned moving contact (5) is by the upper and lower motion of aforesaid operations pull bar (110).
10, the described vacuum circuit breaker of claim 1 is characterized in that:
Above-mentioned fixed contact (3) is arranged on the top of above-mentioned moving contact (5).
11, the described a kind of vacuum circuit breaker of claim 1 is characterized in that:
Above-mentioned fixed contact (3) central axis that is arranged on above-mentioned moving contact (5) top is vertical basically.
12, a kind of vacuum valve, wherein, the separable contact (3,5) of a fixed contact of a pair of formation (3) and a moving contact (5) is set in a hollow cylindrical insulator (1), and above-mentioned hollow cylindrical insulator (1) one distolateral be at the vacuum lower seal, to it is characterized in that by an end plate (7) and a flexible part (6,6 '):
Another of above-mentioned hollow cylindrical insulator (1) is distolateral to be at the vacuum lower seal by above-mentioned fixed contact (3), this fixed contact (3) has an outer surface that is connected with an outer contact (105), and the area of above-mentioned outer surface is bigger than the area of contact that is contained in the contact electrode on this separable contact (3,5) respectively.
13, a kind of vacuum circuit breaker that comprises a vacuum valve, wherein, the separable contact (3 of a fixed contact of a pair of formation (3) and a moving contact (5) is set in the cylindrical insulator (1) of a hollow, 5), above-mentioned hollow cylindrical insulator (1) one distolateral by an end plate (7) and a flexible part (6,6 ') at the vacuum lower seal, an outer contact (105) that is connected with above-mentioned fixed contact (3) outer surface, another contact (106) that is connected with above-mentioned moving contact (5) and an operation pull bar (110) that is used to make above-mentioned moving contact (5) action is characterized in that:
The other end of above-mentioned hollow cylindrical insulator (1) by above-mentioned fixed contact (3) at the vacuum lower seal, above-mentioned fixed contact (3) has the outer surface that is connected with an outer contact (105), and the area of above-mentioned outer surface is bigger than the area of contact that is contained in the contact electrode on this separable contact (3,5) respectively.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP31976594A JP3166523B2 (en) | 1993-12-24 | 1994-12-22 | Vacuum valve, method of manufacturing the same, and vacuum circuit breaker |
JP319765/94 | 1994-12-22 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1133416A true CN1133416A (en) | 1996-10-16 |
CN1047463C CN1047463C (en) | 1999-12-15 |
Family
ID=18113938
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN95121120A Expired - Fee Related CN1047463C (en) | 1994-12-22 | 1995-12-21 | Vacuum valve and vacuum breaker adapting it |
Country Status (4)
Country | Link |
---|---|
EP (1) | EP0718860A3 (en) |
KR (1) | KR100242330B1 (en) |
CN (1) | CN1047463C (en) |
TW (1) | TW373207B (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN112442672A (en) * | 2019-08-30 | 2021-03-05 | 佳能特机株式会社 | Vacuum device |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE19902498C2 (en) * | 1999-01-22 | 2001-05-17 | Moeller Gmbh | Vacuum interrupter |
US20070007250A1 (en) | 2005-07-08 | 2007-01-11 | Eaton Corporation | Sealing edge cross-sectional profiles to allow brazing of metal parts directly to a metallized ceramic for vacuum interrupter envelope construction |
JP4765538B2 (en) * | 2005-10-20 | 2011-09-07 | 富士電機機器制御株式会社 | Vacuum valve, vacuum valve manufacturing method |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3021407A (en) * | 1958-09-16 | 1962-02-13 | Jennings Radio Mfg Corp | Vacuumized electric switch |
US3166658A (en) * | 1962-07-05 | 1965-01-19 | Jennings Radio Mfg Corp | Vacuum switch and envelope construction therefor |
US4587390A (en) * | 1985-01-07 | 1986-05-06 | Golden Gate Switchboard Co. | Vacuum circuit breaker |
US4672156A (en) * | 1986-04-04 | 1987-06-09 | Westinghouse Electric Corp. | Vacuum interrupter with bellows shield |
-
1995
- 1995-12-07 EP EP95119341A patent/EP0718860A3/en not_active Withdrawn
- 1995-12-08 TW TW084113118A patent/TW373207B/en active
- 1995-12-21 CN CN95121120A patent/CN1047463C/en not_active Expired - Fee Related
- 1995-12-22 KR KR1019950072339A patent/KR100242330B1/en not_active IP Right Cessation
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN112442672A (en) * | 2019-08-30 | 2021-03-05 | 佳能特机株式会社 | Vacuum device |
CN112442672B (en) * | 2019-08-30 | 2023-09-22 | 佳能特机株式会社 | Vacuum device |
Also Published As
Publication number | Publication date |
---|---|
TW373207B (en) | 1999-11-01 |
KR100242330B1 (en) | 2000-02-01 |
CN1047463C (en) | 1999-12-15 |
EP0718860A2 (en) | 1996-06-26 |
KR960025890A (en) | 1996-07-20 |
EP0718860A3 (en) | 1997-10-22 |
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