CN113341350B - Vector magnetic field sensor quadrature error calibration device and correction method - Google Patents
Vector magnetic field sensor quadrature error calibration device and correction method Download PDFInfo
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Abstract
The invention discloses a vector magnetic field sensor quadrature error calibration device which is provided with two Helmholtz coils which are concentrically arranged and are arranged on a device base, wherein the left and right directions of the Helmholtz coils are adjustable, and the Helmholtz coils are used for generating a quantitative magnetic field environment. A lifting table is designed in the middle of the device base, and a calibration angle gauge is arranged on the lifting table; a vector magnetic field sensor is arranged on the calibration angle device; the vertical position of the vector magnetic sensor is adjusted by the lifting table, and the vector magnetic field sensor is controlled by the calibration angle device to present a specified deflection angle to the magnetic field direction generated between the two Helmholtz coils. The vector magnetic field sensor is used for acquiring triaxial magnetic measurement data under different magnetic field environments, calibrating a third-order sensitivity matrix and inverting the inverse sensitivity matrix according to the triaxial magnetic measurement data, and correcting non-orthogonal errors of vector magnetic field measurement results. The invention realizes the correction of the non-orthogonal error of the vector magnetic field measurement result so as to ensure the accuracy of magnetic vector measurement.
Description
Technical Field
The invention belongs to the field of vector magnetic field measurement, and relates to a calibration device and a correction method, in particular to a vector magnetic field sensor quadrature error calibration device and a correction method.
Background
Magnetic measurement is a vector physical field, and measurement of high-precision magnetic field vectors is often realized by combining three-axis orthogonal components of the magnetic field vectors.
The orthogonality of the three sensitive axes of the vector magnetic field sensor determines the accuracy of magnetic vector measurement, and the acquired magnetic field components are not completely orthogonal in practice due to the influence of non-orthogonality anisotropy of the magnetic sensitive materials, and errors generated by the orthogonality determination result in the reduction of the vector magnetic measurement accuracy of the magnetic field sensor.
In order to reduce the magnetic measurement accuracy degradation caused by the orthogonality error of the sensitive axes of the magnetic field sensor, the method is generally realized by strictly adjusting the orthogonality relation of three sensitive axes of a magnetic probe or utilizing a hardware correction circuit. However, these approaches are often accompanied by problems of high operational difficulty, low reliability, and increased cost, and do not have good applicability to packaged vector magnetic probes.
Disclosure of Invention
Aiming at the defects of the conventional vector magnetic field sensor orthogonality error correction method, the invention provides a vector magnetic field sensor orthogonality error calibration device which can fix a magnetic field sensor subjected to orthogonality correction at a designated deflection angle for calibration; the correction method provided by the invention is used for calibrating the third-order sensitivity matrix of the vector magnetic field sensor through the acquisition calibration device, and inverting the inverse sensitivity matrix, so that the correction of the non-orthogonal error of the vector magnetic field measurement result is realized, and the accuracy of magnetic vector measurement is ensured.
The vector magnetic field sensor quadrature error calibration device provided by the invention is provided with two concentric helm hertz coils which are arranged on a device base and can be adjusted in the left-right direction, a calibration angle device which can be adjusted in the vertical direction, and a vector magnetic field sensor arranged on the calibration angle device.
Wherein two helmholtz coils are used to create a quantitative magnetic field environment. The calibration angle device is used for controlling the vector magnetic field sensor to present a specified deflection angle to the magnetic field direction generated between the two Helmholtz coils. The vector magnetic field sensor is used for acquiring triaxial magnetic measurement data under different magnetic field environments.
The device can acquire the data required by correcting the quadrature error, and the method comprises the following steps:
step 1: the vertical distance between the two Helmholtz coils and the center of the base of the device is 1/2 of the radius of the Helmholtz coils.
Step 2: a vector magnetic field sensor is mounted on the calibration angle gauge.
Step 3: and (3) adjusting the vertical position of the angle calibrating device to enable the center of the vector magnetic field sensor probe to be collinear with the circle centers of the two Helmholtz coil groups.
Step 4: and placing the vector magnetic field sensor quadrature error calibration device set by the steps in a magnetic shielding environment.
Step 5: the vector magnetic field sensor is calibrated in the X, Y and Z three axes.
Calibrating an x-axis: the positive direction of the x-axis of the vector magnetic field sensor is positioned on the connecting line of the circle centers of the two Helmholtz coils; quantitative magnetic fields are then applied through two helmholtz coil sets, and vector magnetic field sensor readings under different magnetic field environments are recorded.
And (3) calibrating a y axis: the positive direction of the y-axis of the vector magnetic field sensor is positioned on a common connecting line of the circle centers of the two Helmholtz coil groups; quantitative magnetic fields are then applied through two Helmholtz coils, and vector magnetic field sensor readings under different magnetic field environments are recorded.
And (3) calibrating a z axis: the positive direction of the z-axis of the vector magnetic field sensor is positioned on a common connecting line of the circle centers of the two Helmholtz coil groups; quantitative magnetic fields are then applied through two Helmholtz coils, and vector magnetic field sensor readings under different magnetic field environments are recorded.
According to the reading of the vector magnetic field sensor, correcting the non-orthogonal error of the vector magnetic field measurement result by calibrating a third-order sensitivity matrix and inverting the inverse sensitivity matrix, the specific method comprises the following steps:
step 1: a magnetic field-current relationship is obtained using a current source and a fluxgate sensor.
Step 2: according to the x-axis calibration result V x Simultaneously, referring to the magnetic field-current relation curve of the Helmholtz coil set, calculating to obtain a corresponding magnetic field true value H x Finally by linear fitting V x —H x Relation, obtain sensitivity coherence matrix S of magnetic sensor x-axis x ，
Wherein S is xx ，S yx ，S zx And the data are magnetic field data of x, y and z three axes when the positive direction of the x axis is consistent with the magnetic field direction generated by the Helmholtz coil group.
Step 3: according to the y-axis calibration result V y Simultaneously, referring to the magnetic field-current relation curve of the Helmholtz coil set, calculating to obtain a corresponding magnetic field true value H y Finally by linear fitting "V y —H y "relation, the sensitivity coherence matrix S of the y-axis of the magnetic sensor can be obtained y ，
Wherein S is xy ，S yy ，S zy And the data are magnetic field data of x, y and z three axes when the positive direction of the y axis is consistent with the magnetic field direction generated by the Helmholtz coil group.
Step 4: according to the z-axis calibration result V z Simultaneously, referring to the magnetic field-current relation curve of the Helmholtz coil set, a corresponding magnetic field true value H is obtained z Finally by linear fitting "V z —H z "relation, the sensitivity coherence matrix S of the magnetic sensor z-axis can be obtained z ，
Wherein S is xz ，S yz ，S zz And the magnetic field data of the x, y and z three axes are respectively obtained when the positive direction of the z axis is consistent with the magnetic field direction generated by the Helmholtz coil group 3.
Step 5: integration S x ，S y ，S z The sensitivity coherence matrix S of the magnetic sensor is obtained.
Step 6: using the obtained sensitivity coherence matrix S, inverting the inverse sensitivity matrix H T ＝S -1 H m The sensitivity coherence matrix of the vector magnetic field sensor is S. Wherein H is T Is the corrected vector magnetic field data, H m Is the magnetic field data measured by the vector magnetic field sensor, and has orthogonality error.
The invention has the advantages that:
1. according to the vector magnetic field sensor quadrature error calibration device, all components are made of pure copper materials, the material characteristics of metal copper cannot interfere with a magnetic field within an allowable error range, and normal operation of calibration work is ensured.
2. According to the vector magnetic field sensor quadrature error calibration device, the vector magnetic field sensor quadrature error calibration device and the vector magnetic field sensor are placed in the magnetic shielding environment, so that the interference of the external environment, particularly the geomagnetic field, can be effectively shielded, and the accuracy of calibration work is improved.
3. The vector magnetic field sensor quadrature error calibration device disclosed by the invention utilizes the Helmholtz coil group to apply quantitative magnetic field conditions, and a stable and accurate magnetic field environment is provided for the calibration work.
5. The correction method for the vector magnetic field sensor quadrature error calibration can realize the quadrature error correction of the vector magnetic field sensor without changing the hardware structure of the vector magnetic field sensor, and ensure the magnetic measurement precision of the vector magnetic field sensor.
6. The correction method for the orthogonal error calibration of the vector magnetic field sensor has extremely strong compatibility and is suitable for the correction of the orthogonal errors of various linear vector magnetic measurement sensors.
7. The correction method for the vector magnetic field sensor quadrature error calibration realizes the correction of the quadrature error of the magnetic field sensor in the software layer by using the correction algorithm, and has low cost and strong stability compared with the correction in the hardware layer.
8. The correction method for the vector magnetic field sensor quadrature error calibration can perform specific correction aiming at different special application scenes, including high temperature, high pressure, weightlessness and other environmental factors influencing the measurement of the magnetic field sensor, so that the magnetic field sensor can work normally in the special environments.
9. The method can finish zero calibration work of the magnetic field sensor simultaneously when the orthogonality error of the vector magnetic field sensor is corrected.
Drawings
FIG. 1 is a schematic diagram of the overall structure of the quadrature error calibration device of the vector magnetic field sensor of the present invention.
Fig. 2 is a schematic diagram of the helm hertz coil structure in the vector magnetic field sensor quadrature error calibration device of the present invention.
FIG. 3 is a schematic diagram of the structure of the calibration angle gauge in the vector magnetic field sensor quadrature error calibration device of the present invention.
In the figure:
1-device base 2-lifting table 3-Helmholtz coil group
4-calibration goniometer 101-slide A201-slide B
301-slider A401-outer ring 402-vector magnetic field sensor mounting table
403-connecting shaft
Detailed Description
The invention is described in further detail below with reference to the accompanying drawings.
The invention relates to an orthogonal error calibration device of a vector magnetic field sensor, which comprises a device base 1, a lifting table 2, a Helmholtz coil group 3, a calibration angle device 4 and the vector magnetic field sensor, as shown in figure 1.
The device base 1 is of a rectangular plate-shaped structure, and a slide way A101 is designed along a middle branching line in the left-right direction. Meanwhile, a lifting table 2 perpendicular to the device base 1 is arranged at one side edge of the middle part of the device base 1, and the lifting table 2 is provided with a slideway B201 perpendicular to the device base 1.
The Helmholtz coil group 3 comprises two Helmholtz coils with the same size parameters and is used for generating a quantitative magnetic field environment. The diameter size of the helmholtz-coil group 3 is determined according to the size of the vector magnetic field sensor, and the larger the vector magnetic field sensor is, the larger the uniform magnetic field environment is required, and the larger the diameter size of the helmholtz-coil group 3 is, the larger the uniform magnetic field environment generated by the helmholtz-coil group is. As shown in fig. 2, the side parts of the two helm hertz coils are both provided with a sliding block a301, and the two helm hertz coils are matched and slidingly connected with a slide way a101 on the device base 1 through the sliding block a301, and are ensured to be coaxial.
As shown in fig. 3, the alignment angle gauge 4 includes an outer ring 401, a vector magnetic field sensor mount 402, and a connection shaft 403. The outer ring 401 is a circular ring, the axis is perpendicular to the device base 1, and the side wall of the inner ring is grooved in the circumferential direction. The side part of the outer ring 401 is provided with a sliding block B405, and the sliding block B405 is matched and slidingly connected with the sliding way B201 on the lifting platform 2, so that the vertical position of the angle calibrating device 4 can be adjusted.
The vector magnetic field sensor mounting table 402 is a circular disk, and a concentric rectangular recess 404 is designed in the middle of the mounting table to serve as a bearing area of the vector magnetic field sensor, and the size of the bearing area is the same as that of a vector magnetic field sensor mounting surface, so that the vector magnetic field sensor is mounted and positioned through the bearing area. The vector magnetic field sensor mounting table 402 is concentrically arranged in the outer ring 401, connecting shafts 403 are arranged at opposite positions on two sides, and the connecting shafts 403 on two sides are respectively matched with the side wall of the inner ring of the outer ring 401 and inserted into the slots, so that the vector magnetic field sensor mounting table 402 can rotate around the axis of the connecting shafts 403, and the vector magnetic field sensor can turn over 360 degrees on a vertical plane; meanwhile, the vector magnetic field sensor mounting table 402 can also rotate along the side wall of the inner ring of the outer ring 401 in a slotting way so as to enable the vector magnetic field sensor to rotate at 360 degrees in the horizontal plane; and then the vector magnetic field sensor presents a specified deflection angle to the magnetic field direction generated between the two Helmholtz coils.
The outer ring 401 is designed with a reference scale line, and the reference scale line is designed along the direction of the connecting line of the circle centers of the two Helmholtz coil groups; meanwhile, zero graduation marks are designed on the outer edge of the vector magnetic field sensor mounting table 402, when the zero graduation marks are aligned with the reference graduation marks, the horizontal rotation angle of the vector magnetic field sensor mounting table 402 is 0 degrees, and at the moment, the vertical position of the calibration angle regulator 4 is adjusted to enable the center of the vector magnetic field sensor probe to be collinear with the circle centers of the two Helmholtz coils.
In order to avoid introducing material interference factors, all the parts are made of pure copper materials, the material characteristics of the metal copper can not interfere a magnetic field within an allowable error range, and normal operation of calibration work is ensured.
The method for carrying out quadrature error calibration by the vector magnetic field sensor quadrature error calibration device with the structure comprises the following steps:
step 1: the position of the Helmholtz coil group 3 is adjusted, so that two Helmholtz coils are respectively positioned on two sides of the middle of the device base 1, and the distance between the two Helmholtz coils and the center point of the slide A101 on the device base 1 is 1/2 of the radius of the Helmholtz coils.
Step 2: mounting the vector magnetic field sensor on the rectangular bearing area of the calibration angle device 4; before the vector magnetic field sensor is installed, the posture of a vector magnetic field sensor installation table 402 of a calibration angle gauge 4 is adjusted, so that the vector magnetic field sensor installation table 402 is parallel to the device base 1; the flip angle of the vector magnetic field sensor mount 402 at this time is 0 °; at the same time, zero graduation marks on the vector magnetic field sensor mount 402 are aligned with reference graduation marks on the outer ring 401, and the horizontal rotation angle of the vector magnetic field sensor mount 402 is 0 °.
Step 3: the height of the angle calibrating device 4 is adjusted, so that the center of the vector magnetic field sensor probe is collinear with the circle centers of the two Helmholtz coil groups.
Step 4: and placing the vector magnetic field sensor quadrature error calibration device set by the steps in a magnetic shielding environment.
Step 5: the vector magnetic field sensor is calibrated in the X, Y and Z three axes.
Calibrating an x-axis: the overturning angle of the vector magnetic field sensor mounting table 402 is 0 degrees, and the rotating angle of the vector magnetic field sensor mounting table 402 is adjusted so that the positive direction of the x-axis of the vector magnetic field sensor is positioned on the connecting line of the circle centers of the two Helmholtz coils; a quantitative magnetic field is then applied by the helmholtz coil set 3, and vector magnetic field sensor readings under different magnetic field environments are recorded.
And (3) calibrating a y axis: the overturning angle of the vector magnetic field sensor mounting table 402 is 0 degrees, and the rotating angle of the vector magnetic field sensor mounting table 402 is adjusted so that the positive direction of the y-axis of the vector magnetic field sensor is positioned on the common connecting line of the circle centers of the two Helmholtz coil groups; a quantitative magnetic field is then applied by the helmholtz coil set 3, and vector magnetic field sensor readings under different magnetic field environments are recorded.
And (3) calibrating a z axis: the horizontal rotation angle of the vector magnetic field sensor mounting table 402 is 0 degrees, and the overturning angle of the vector magnetic field sensor is adjusted so that the positive direction of the z-axis of the vector magnetic field sensor is positioned on the common line of the circle centers of the two Helmholtz coil groups; a quantitative magnetic field is then applied by the helmholtz coil set 3, and vector magnetic field sensor readings under different magnetic field environments are recorded.
The data required for correcting the quadrature error is obtained through the vector magnetic field sensor quadrature error calibration device, the non-quadrature error of the vector magnetic field measurement result is corrected by calibrating a third-order sensitivity matrix and inverting the inverse sensitivity matrix according to the data, and the magnetic vector measurement precision is ensured, and the specific steps are as follows:
step 1: and obtaining a magnetic field-current relation curve of the Helmholtz coil group by using the mu A-level precision current source and the fluxgate sensor.
Step 2: the orientation of the vector magnetic field sensor is regulated to ensure that the positive direction of the x-axis of the vector magnetic field sensor is consistent with the magnetic field direction generated by the Helmholtz coil group 3, and triaxial magnetic measurement data V of the vector magnetic field sensor under different magnetic field environments are recorded x Meanwhile, referring to a magnetic field-current relation curve of the Helmholtz coil set, a corresponding magnetic field truth value H is obtained through operation x Finally by linear fitting "V x —H x Relation, the sensitivity coherence matrix S of the X-axis of the magnetic sensor can be obtained x ，
Wherein S is xx ，S yx ，S zx And the magnetic field data of the x, y and z three axes are respectively obtained when the positive direction of the x axis is consistent with the magnetic field direction generated by the Helmholtz coil group 3.
Step 3: the orientation of the vector magnetic field sensor is regulated to enable the positive direction of the y-axis of the vector magnetic field sensor to be consistent with the magnetic field direction generated by the Helmholtz coil group, and triaxial magnetic measurement data V of the vector magnetic field sensor under different magnetic field environments are recorded y Meanwhile, referring to a magnetic field-current relation curve of the Helmholtz coil set, a corresponding magnetic field truth value H is obtained through operation y Finally by linear fitting "V y —H y "relation, the sensitivity coherence matrix S of the y-axis of the magnetic sensor can be obtained y ，
Wherein S is xy ，S yy ，S zy And the data are magnetic field data of x, y and z three axes when the positive direction of the y axis is consistent with the magnetic field direction generated by the Helmholtz coil group 3.
Step 4: the orientation of the vector magnetic field sensor is regulated to enable the positive direction of the z-axis of the vector magnetic field sensor to be consistent with the direction of a magnetic field generated by the Helmholtz coil group, and triaxial magnetic measurement data V of the vector magnetic field sensor under different magnetic field environments are recorded z Meanwhile, referring to a magnetic field-current relation curve of the Helmholtz coil set, a corresponding magnetic field truth value H is obtained through operation z Finally by linear fitting "V z —H z "relation, the sensitivity coherence matrix S of the magnetic sensor z-axis can be obtained z ，
Wherein S is xz ，S yz ，S zz And the magnetic field data of the x, y and z three axes are respectively obtained when the positive direction of the z axis is consistent with the magnetic field direction generated by the Helmholtz coil group 3.
Step 5: integration S x ，S y ，S z The sensitivity coherence matrix S of the magnetic sensor is obtained.
Step 6: using the obtained sensitivity coherence matrix S, inverting the inverse sensitivity matrix H T ＝S -1 H m The sensitivity coherence matrix of the vector magnetic field sensor is S. Wherein H is T Is the corrected vector magnetic field data, H m Since the data of the magnetic field detected by the vector magnetic field sensor has an orthogonality error, correction is required.
Examples
The embodiment describes the method and the device for calibrating and correcting the orthogonal error of the vector magnetic field sensor HMC2003 of the Honeywell under the surface environment condition of 25 ℃ and 101 kPa.
A permalloy magnetic shielding barrel of the vinblastine common magnetoelectricity is utilized to provide a magnetic shielding environment required by orthogonal error calibration and correction of the vector magnetic field sensor.
Step 1: according to the probe size of the vector magnetic field sensor HMC2003, a Helmholtz coil group with the radius of 30cm is selected, the Helmholtz coil group is installed on the device base 1, two Helmholtz coil circular surfaces are required to be concentric and parallel, and the distance between the two circular coils and a center point is 1/2=15 cm of the coil radius.
Step 2: and installing the calibrating angle device 4 on the lifting platform 2, adjusting to a proper height position, and tightening the fixing bolt for limiting.
Step 3: the rotation shaft of the calibration angle device 4 is adjusted to enable the turnover angle to be 0 degrees, so that the installation of the vector magnetic field sensor is facilitated.
Step 4: the vector magnetic field sensor is arranged on a rectangular bearing area of the calibration angle gauge 4, the height of the calibration angle gauge 4 is adjusted, and the vector magnetic sensor and the circle center of the Helmholtz coil group 3 are on the same straight line.
Step 5: demagnetizing the magnetic shielding barrel according to the operation instruction of the magnetic shielding barrel, so that the internal residual magnetic environment of the magnetic shielding barrel meets the experimental magnetic shielding requirement.
Step 6: and placing the mounted and arranged vector magnetic field sensor quadrature error calibration device and the vector magnetic field sensor in a magnetic shielding environment.
Step 7: and obtaining a magnetic field-current relation curve of the Helmholtz coil group by using the mu A-level precision current source and the fluxgate sensor.
Step 8: the horizontal rotation angle of the calibration angle gauge is adjusted to adjust the orientation of the vector magnetic field sensor, so that the positive direction of the x-axis of the vector magnetic field sensor is consistent with the magnetic field direction generated by the Helmholtz coil set, three-axis magnetic measurement data Vx of the vector magnetic field sensor under different magnetic field environments are recorded, meanwhile, the corresponding magnetic field true value is obtained through calculation by referring to the magnetic field-current relation curve of the Helmholtz coil set, and finally, the sensitivity coherence matrix S of the x-axis of the magnetic sensor can be obtained through linear fitting of the relation of Vx-Hx x 。
Step 9: the horizontal rotation angle of the calibration angle gauge is adjusted to adjust the orientation of the vector magnetic field sensor, so that the positive direction of the y-axis of the vector magnetic field sensor is consistent with the direction of a magnetic field generated by the Helmholtz coil group, and triaxial magnetic measurement data of the vector magnetic field sensor under different magnetic field environments are recorded
Meanwhile, referring to a magnetic field-current relation curve of the Helmholtz coil set, calculating to obtain a corresponding magnetic field true value Hy, and finally obtaining a sensitivity coherence matrix S of a magnetic sensor y-axis by linearly fitting a relation of Vy-Hy y 。
Step 10: the turning angle of the calibration angle meter is adjusted to adjust the orientation of the vector magnetic field sensor, so that the positive direction of the z-axis of the vector magnetic field sensor is consistent with the direction of a magnetic field generated by the Helmholtz coil group, and triaxial magnetic measurement data V of the vector magnetic field sensor under different magnetic field environments are recorded z Meanwhile, referring to a magnetic field-current relation curve of the Helmholtz coil set, a corresponding magnetic field truth value H is obtained through operation z Finally by linear fitting "V z —H z "relation, the sensitivity coherence matrix S of the magnetic sensor z-axis can be obtained z 。
Step 11: integration S x ，S y ，S z The sensitivity coherence matrix S of the magnetic sensor is obtained.
Step 12: using the obtained sensitivity coherence matrix S, inverting the inverse sensitivity matrix H T ＝S -1 H m And vector magnetic measurement data subjected to triaxial orthogonality correction can be obtained by means of solution.
Claims (2)
1. A vector magnetic field sensor quadrature error calibration method based on a calibration device is characterized in that: the calibrating device is structurally designed as follows:
the calibrating device is provided with two Helmholtz coils which are concentrically arranged on the device base and can be adjusted in the left-right direction, the side parts of the Helmholtz coils are provided with sliding blocks, and the sliding blocks are connected onto a slide way on the device base in a sliding way;
a calibration angle device with adjustable vertical direction, and a vector magnetic field sensor arranged on the calibration angle device; the calibration angle device comprises an outer ring, a vector magnetic field sensor mounting table and a connecting shaft; wherein, the axis of the outer ring is perpendicular to the device base, and the side wall of the inner ring is grooved in the circumferential direction; a reference scale line is designed on the outer ring, and the reference scale line is designed along the direction of the connecting line of the circle centers of the two Helmholtz coil groups; the vector magnetic field sensor mounting table is arranged in the outer ring, connecting shafts are designed at the opposite positions of the two sides, and the connecting shafts at the two sides are respectively matched with the side wall of the inner ring of the outer ring and inserted into the slots, so that the vector magnetic field sensor mounting table is provided with a revolute pair around the axis of the connecting shaft and a revolute pair horizontally rotating along the sliding groove; zero graduation marks are designed on the outer edge of the vector magnetic field sensor mounting table, when the zero graduation marks are aligned with the reference graduation marks, the horizontal rotation angle of the vector magnetic field sensor mounting table is 0 degrees, and at the moment, the vertical position of the calibration angle regulator is adjusted to enable the center of the vector magnetic field sensor probe to be collinear with the circle centers of the two Helmholtz coils;
the two Helmholtz coils are used for generating a quantitative magnetic field environment; the calibration angle device is used for controlling the vector magnetic field sensor to present a specified deflection angle to the magnetic field direction generated between the two Helmholtz coils; the vector magnetic field sensor is used for acquiring triaxial magnetic measurement data under different magnetic field environments; correcting the non-orthogonal error of the vector magnetic field measurement result by calibrating a third-order sensitivity matrix and inverting the inverse sensitivity matrix according to the reading of the vector magnetic field sensor;
when acquiring the data required for correcting the quadrature error, the following steps are performed:
s101: the perpendicular distance between the two Helmholtz coils and the center of the base of the device is 1/2 of the radius of the Helmholtz coils;
s102: installing a vector magnetic field sensor on the calibration angle device; before the vector magnetic field sensor is installed, adjusting the posture of a vector magnetic field sensor installation table of the calibration angle device to enable the vector magnetic field sensor installation table to be parallel to a device base; at this time, the overturning angle of the vector magnetic field sensor mounting table is 0 degrees; simultaneously, zero graduation marks on the vector magnetic field sensor mounting table are aligned with reference graduation marks on the outer ring, and at the moment, the horizontal rotation angle of the vector magnetic field sensor mounting table is 0 degree;
s103: the vertical position of the angle calibrating device is adjusted, so that the center of the vector magnetic field sensor probe is collinear with the circle centers of the two Helmholtz coil groups;
s104: placing the vector magnetic field sensor quadrature error calibration device set by the steps in a magnetic shielding environment;
s105: calibrating the vector magnetic field sensor in the X, Y and Z three axes;
calibrating an x-axis: the overturning angle of the vector magnetic field sensor mounting table is 0 degrees, and the rotating angle of the vector magnetic field sensor mounting table is adjusted to enable the positive direction of the x axis of the vector magnetic field sensor to be positioned on the connecting line of the circle centers of the two Helmholtz coils; then, applying a quantitative magnetic field through two Helmholtz coil sets, and recording the readings of vector magnetic field sensors in different magnetic field environments;
and (3) calibrating a y axis: the overturning angle of the vector magnetic field sensor mounting table is 0 degrees, and the rotating angle of the vector magnetic field sensor mounting table is adjusted to enable the positive direction of the y axis of the vector magnetic field sensor to be positioned on the common line of circle centers of the two Helmholtz coil groups; then, applying a quantitative magnetic field through two Helmholtz coils, and recording the readings of vector magnetic field sensors in different magnetic field environments;
and (3) calibrating a z axis: the horizontal rotation angle of the vector magnetic field sensor mounting table is 0 degrees, and the overturning angle of the vector magnetic field sensor is adjusted, so that the positive direction of the z-axis of the vector magnetic field sensor is positioned on the common connecting line of the circle centers of the two Helmholtz coil groups; then, applying a quantitative magnetic field through two Helmholtz coils, and recording the readings of vector magnetic field sensors in different magnetic field environments;
in the process of quadrature error calibration, the following steps are executed:
s201: obtaining a magnetic field-current relation curve by using a current source and a fluxgate sensor;
s202: according toX-axis calibration result V x Simultaneously, referring to the magnetic field-current relation curve of the Helmholtz coil set, calculating to obtain a corresponding magnetic field true value H x Finally by linear fitting V x —H x Relation, obtain sensitivity coherence matrix S of magnetic sensor x-axis x ，
Wherein S is xx ，S yx ，S zx Respectively obtaining magnetic field data of x, y and z three axes when the positive direction of the x axis is consistent with the magnetic field direction generated by the Helmholtz coil group;
s203: according to the y-axis calibration result V y Simultaneously, referring to the magnetic field-current relation curve of the Helmholtz coil set, calculating to obtain a corresponding magnetic field true value H y Finally by linear fitting "V y —H y "relation, the sensitivity coherence matrix S of the y-axis of the magnetic sensor can be obtained y ，
Wherein S is xy ，S yy ，S zy Respectively obtaining magnetic field data of x, y and z three axes when the positive direction of the y axis is consistent with the magnetic field direction generated by the Helmholtz coil group;
s204: according to the z-axis calibration result V z Simultaneously, referring to the magnetic field-current relation curve of the Helmholtz coil set, a corresponding magnetic field true value H is obtained z Finally by linear fitting "V z —H z "relation, the sensitivity coherence matrix S of the magnetic sensor z-axis can be obtained z ，
Wherein S is xz ，S yz ，S zz The magnetic field data of the x, y and z three axes are respectively obtained when the positive direction of the z axis is consistent with the magnetic field direction generated by the Helmholtz coil group (3);
s205: integration S x ,S y ,S z Obtaining a sensitivity coherence matrix s of the magnetic sensor;
s206: using the obtained sensitivity coherence matrix s, inverting the inverse sensitivity matrix H T ＝S -1 H m The sensitivity coherence matrix of the vector magnetic field sensor used can be solved to be s; wherein H is T Is the corrected vector magnetic field data, H m Is the magnetic field data measured by the vector magnetic field sensor, and has orthogonality error.
2. The vector magnetic field sensor quadrature error calibration method based on a calibration device as set forth in claim 1, wherein: a rectangular recess is designed in the middle of a vector magnetic field sensor mounting table in the calibration device and is used as a bearing area of the vector magnetic field sensor for mounting and positioning the vector magnetic field sensor.
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