CN113340781A - Semiconductor environmental parameter monitoring device for intelligent warehousing - Google Patents
Semiconductor environmental parameter monitoring device for intelligent warehousing Download PDFInfo
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- CN113340781A CN113340781A CN202110753613.2A CN202110753613A CN113340781A CN 113340781 A CN113340781 A CN 113340781A CN 202110753613 A CN202110753613 A CN 202110753613A CN 113340781 A CN113340781 A CN 113340781A
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 28
- 230000007613 environmental effect Effects 0.000 title claims abstract description 15
- 238000012806 monitoring device Methods 0.000 title claims abstract description 15
- 239000000428 dust Substances 0.000 claims abstract description 80
- 238000001514 detection method Methods 0.000 claims abstract description 64
- 238000004140 cleaning Methods 0.000 claims abstract description 17
- 229920000742 Cotton Polymers 0.000 claims description 11
- 230000005684 electric field Effects 0.000 claims description 8
- 230000006698 induction Effects 0.000 claims description 7
- 230000008859 change Effects 0.000 claims description 5
- 230000007704 transition Effects 0.000 claims description 2
- 238000009434 installation Methods 0.000 claims 1
- 230000001360 synchronised effect Effects 0.000 claims 1
- 230000000694 effects Effects 0.000 abstract description 9
- 230000001105 regulatory effect Effects 0.000 abstract 1
- 238000007790 scraping Methods 0.000 description 9
- 238000000034 method Methods 0.000 description 4
- 238000012544 monitoring process Methods 0.000 description 4
- 230000009471 action Effects 0.000 description 3
- 230000009286 beneficial effect Effects 0.000 description 2
- 238000001914 filtration Methods 0.000 description 2
- 230000007246 mechanism Effects 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 230000004075 alteration Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
- G01N15/06—Investigating concentration of particle suspensions
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Abstract
The invention discloses a semiconductor environmental parameter monitoring device for intelligent warehousing, which comprises a base, a plurality of sensing devices and a regulating device, wherein each sensing device comprises a detection box, an air inlet arranged at one side of the detection box, a detection cavity in the same direction as the air inlet, an air outlet arranged at one side of the detection cavity, a filter plate arranged inside the air outlet, a detection part arranged inside the detection cavity, a fan used for guiding air to enter and a collecting part used for cleaning the detection cavity. By arranging the base, the sensing device and the adjusting device, the storage environment for storing the semiconductors can be monitored in all aspects and in multiple directions, the dust concentration in the storage environment can be monitored in time, and the problems that the dust concentration cannot be detected in time in the existing storage, filtered dust is easy to accumulate on detection equipment, and the detection effect is easy to cause overlarge error after long-time uncleaning are solved.
Description
Technical Field
The invention belongs to the technical field of semiconductors, and particularly relates to a semiconductor environmental parameter monitoring device for intelligent warehousing.
Background
The application of the semiconductor is extremely extensive, has very high scientific and technological value and economic value, and the special storage is usually required to current semiconductor, and is higher to the requirement of environment moreover, and the problem that prior art exists is: the dust appears in current storage environment easily, and the dust is too much can influence the performance of semiconductor, and current storage can not detect dust concentration in time, and gathers filterable dust on the check out test set easily, does not clear up for a long time and causes the detection effect error too big easily.
Disclosure of Invention
The invention provides a semiconductor environmental parameter monitoring device for intelligent storage, and aims to solve the problems that the existing storage cannot timely detect the dust concentration, filtered dust is easy to accumulate on detection equipment, and the detection effect error is easy to be overlarge due to the fact that the dust is not cleaned for a long time.
The invention is realized in this way, a semiconductor environmental parameter monitoring device for intelligent warehousing, including the base, a plurality of induction devices used for monitoring dust and adjusting devices used for monitoring dust concentration of different positions, the induction device includes the detection box, locate the air intake of one side of the detection box, detect the chamber the same as air intake direction, locate the air outlet of one side of detecting the chamber, locate the filter inside the air outlet, locate the detection part inside detecting the chamber, used for guiding the air to enter the blower and used for clearing up the collection part of detecting the chamber, the air intake direction of the said air intake is perpendicular to base each other;
the detection part comprises a first plate body arranged on one side of the detection cavity, a second plate body matched with the first plate body and a sensor used for detecting the change of the internal current of the detection cavity, the first plate body and the second plate body are parallel to each other, after the first plate body and the second plate body are electrified, a stable electric field is formed between the first plate body and the second plate body, and the sensor calculates the dust concentration by detecting the change of the internal current of the detection cavity.
Preferably, the collecting part comprises two scraping plates arranged in the detection cavity, a cotton roller arranged on one side of each scraping plate, guide rods arranged on two sides of each scraping plate, a guide groove for the guide rods to slide, a driving part for driving the guide rods to slide, a dust collecting port arranged on one side of the detection cavity, a collecting cavity communicated with the dust collecting port, an air outlet channel arranged in the collecting cavity and a storage part for collecting dust, wherein negative pressure is arranged in the collecting cavity, the air outlet direction of the air outlet channel is communicated with the air outlet and is approximately parallel to the air outlet, the stroke end of each scraping plate and the dust collecting port are positioned on the same plane, and the two scraping plates slide on the first plate body and the second plate body respectively.
Preferably, the storage part comprises a storage cavity arranged on one side of the collection cavity, a filter screen arranged in the collection cavity, a threaded part arranged at one end of the storage cavity and a screw cap matched with the threaded part, and the air outlet channel and the dust collecting opening are separated by the filter screen.
Preferably, the filter screen includes a first inclined portion disposed in the collection chamber and a second inclined portion disposed at an inlet of the storage chamber, the first inclined portion is connected to an inner wall of the collection chamber, and a gap is formed between the second inclined portion and the storage chamber.
Preferably, the interior of the collecting cavity is provided with a third inclined part matched with the filter screen, and the third inclined part is in smooth transition with the storage cavity.
Preferably, the scraping plates comprise a supporting part, a first arc-shaped part arranged on the outer side of the supporting part, a second arc-shaped part arranged on the inner side of the supporting part, a cleaning part arranged between the first arc-shaped part and the second arc-shaped part, and a plurality of gaps arranged on the cleaning part, the cotton roller is positioned on one side of the second arc-shaped part, and the cleaning parts on the two scraping plates are respectively contacted with the first plate body and the second plate body.
Preferably, the adjusting device comprises a first pipe body arranged on the base, a second pipe body matched with the first pipe body, a fixed disc arranged at the middle upper part of the second pipe body and an extending component arranged on the fixed disc and used for mounting the detection box, and the second pipe bodies stretch synchronously.
Preferably, the stretching member includes a plurality of first fixing plates on the fixing plate, a sliding groove disposed inside the first fixing plates, a second fixing plate slidably connected to the sliding groove, a connecting rod disposed on the second fixing plate, a spring disposed inside the sliding groove, a rotating plate rotatably disposed outside the fixing plate, and a plurality of opening portions disposed on the rotating plate, the rotating plate is connected to the fixing plate through a ratchet structure, the detection box is mounted at one end of the second fixing plate, the opening portions are abutted to the connecting rod, a top of the sliding groove is open, and the connecting rod extends to an outside of the first fixing plate.
Compared with the prior art, the invention has the beneficial effects that:
the base, the induction device and the adjusting device are matched for use, the storage environment for storing the semiconductor can be monitored in all aspects and in multiple directions, the dust concentration in the storage environment can be monitored in time, the influence of overhigh dust concentration on the performance of the semiconductor is avoided, and the problems that the performance of the semiconductor is influenced by the dust easily generated in the existing storage environment, the dust concentration cannot be detected in time in the existing storage, filtered dust is easily accumulated on detection equipment, and the detection effect is easily caused by oversize error without being cleaned for a long time are solved.
Drawings
FIG. 1 is a schematic diagram of a structure provided by an embodiment of the present invention;
FIG. 2 is a left side view provided by an embodiment of the present invention;
FIG. 3 is a schematic cross-sectional view taken along line A-A of FIG. 2 according to an embodiment of the present invention;
FIG. 4 is an enlarged view at A of FIG. 3 provided by an embodiment of the present invention;
FIG. 5 is an enlarged view at B of FIG. 4 provided by an embodiment of the present invention;
FIG. 6 is an enlarged view at C of FIG. 5 provided by an embodiment of the present invention;
FIG. 7 is an enlarged view at E of FIG. 6 provided by an embodiment of the present invention;
FIG. 8 is an enlarged view at D of FIG. 5 provided by an embodiment of the present invention;
FIG. 9 is a schematic cross-sectional view taken along line B-B of FIG. 2 according to an embodiment of the present invention;
FIG. 10 is an enlarged view at F of FIG. 9 provided by an embodiment of the present invention;
fig. 11 is an enlarged view at G in fig. 10 provided by an embodiment of the present invention.
In the figure: 1. a base; 21. a detection cartridge; 22. an air inlet; 23. a detection chamber; 24. an air outlet; 25. a filter plate; 27. a fan; 261. a first plate body; 262. a second plate body; 263. a sensor; 281. a squeegee; 282. a cotton roller; 283. a guide bar; 284. a guide groove; 285. a drive member; 286. a dust collection port; 287. a collection chamber; 288. an air outlet channel; 2891. a storage chamber; 2892. a filter screen; 2893. a threaded portion; 2894. a screw cap; 2811. a support portion; 2812. a first arcuate portion; 2813. a second arcuate portion; 2814. a cleaning part; 2815. a notch; 31. a first pipe body; 32. a second tube body; 33. fixing the disc; 341. a first fixing plate; 342. a chute; 343. a second fixing plate; 344. a connecting rod; 345. a spring; 346. a turntable; 347. a distraction section; 41. a first inclined portion; 42. a second inclined portion; 5. a third inclined portion; 61. a third arc-shaped portion; 62. a fourth arc; 63. a fifth arc-shaped portion; 7. a guide plate; 8. an extension portion.
Detailed Description
In order to further understand the contents, features and effects of the present invention, the following embodiments are illustrated and described in detail with reference to the accompanying drawings.
The structure of the present invention will be described in detail below with reference to the accompanying drawings.
Example one
As shown in fig. 1 to 11, an embodiment of the present invention provides a semiconductor environmental parameter monitoring device for smart storage, which includes a base 1, a plurality of sensing devices for monitoring dust, and an adjusting device for monitoring dust concentrations at different positions, where the sensing devices include a detection box 21, an air inlet 22 disposed at one side of the detection box 21, a detection chamber 23 having the same air inlet direction as the air inlet direction, an air outlet 24 disposed at one side of the detection chamber 23, a filter plate 25 disposed inside the air outlet 24, a detection component disposed inside the detection chamber 23, a fan 27 for guiding air to enter, and a collection component for cleaning the detection chamber 23, where the air inlet direction of the air inlet 22 is perpendicular to the base 1;
the detection part comprises a first plate body 261 arranged on one side of the detection cavity 23, a second plate body 262 matched with the first plate body 261 and a sensor 263 used for detecting the change of current in the detection cavity 23, the first plate body 261 and the second plate body 262 are parallel to each other, after the detection part is electrified, a stable electric field is formed between the first plate body 261 and the second plate body 262, and the sensor 263 calculates the dust concentration by detecting the change of current in the detection cavity 23.
According to the invention, through the arrangement of the base 1, the induction device and the adjusting device, the air quality at different positions in a semiconductor storage environment can be monitored, after the semiconductor storage environment is electrified, a stable electric field is formed between the first plate body 261 and the second plate body 262, air in the storage environment enters the space between the first plate body 261 and the second plate body 262 through the air inlet 22, if dust is contained in the air, the dust can interfere with the electric field between the first plate body 261 and the second plate body 262, and the sensor 263 can calculate the size of the dust interference electric field and send the size to the console to ventilate the storage environment.
Referring to fig. 5, 6 and 11, the collecting member includes two scrapers 281 disposed inside the detecting chamber 23, a cotton roller 282 disposed on one side of the scrapers 281, guide rods 283 disposed on both sides of the scrapers 281, a guide groove 284 for sliding the guide rods 283, a driving member 285 for driving the guide rods 283 to slide, a dust collecting port 286 disposed on one side of the detecting chamber 23, a collecting chamber 287 communicated with the dust collecting port 286, an air outlet channel 288 disposed inside the collecting chamber 287, and a storage member for collecting dust, the collecting chamber 287 is under negative pressure, an air outlet direction of the air outlet channel 288 is communicated with and approximately parallel to the air outlet, an end of a stroke of the scraper 281 is on the same plane with the dust collecting port 286, and the two scrapers 281 slide on the first plate 261 and the second plate 262, respectively.
Adopt above-mentioned scheme: by arranging the scraper 281, the cotton roller 282, the guide rods 283, the guide groove 284, the driving part 285, the dust collecting port 286, the collecting cavity 287 and the air outlet channel 288, the scraper 281 can scrape off the dust accumulated on the first plate body 261 and the second plate body 262, the cotton roller 282 can wipe the surfaces of the first plate body 261 and the second plate body 262, the driving part 285 can drive the scraper 281 to move back and forth through the two guide rods 283 and push the dust onto the dust collecting port 286, the collecting cavity 287 with internal negative pressure can suck the dust near the dust collecting port 286, and the driving part 285 can be an electric push rod directly purchased on the market.
Referring to fig. 8, the storage member includes a storage chamber 2891 provided at one side of the collection chamber 287, a filter screen 2892 provided inside the collection chamber 287, a screw portion 2893 provided at one end of the storage chamber 2891, and a screw cover 2894 engaged with the screw portion 2893, and the air outlet passage 288 is separated from the dust collection port 286 by the filter screen 2892.
Adopt above-mentioned scheme: through setting up storage chamber 2891, filter screen 2892, screw thread portion 2893 and spiral shell lid 2894, dust in the collection chamber 287 can enter into storage chamber 2891, and the gas after filter screen 2892 can discharge through outlet channel 288, can open storage chamber 2891 through spiral shell lid 2894 and screw thread portion 2893, makes the dust in the storage chamber 2891 in time clear up.
Referring to fig. 8, the filter 2892 includes a first inclined portion 41 provided in the collection chamber 287 and a second inclined portion 42 provided at an inlet of the storage chamber 2891, the first inclined portion 41 being connected to an inner wall of the collection chamber 287, and the second inclined portion 42 being spaced apart from the storage chamber 2891.
Adopt above-mentioned scheme: through setting up first slope 41 and second slope 42, first slope 41 can shelter from outlet channel 288, makes the gas in collection chamber 287 discharge from outlet channel 288 after filtering, and second slope 42 can prevent the dust refluence, influences normal collection efficiency.
Referring to fig. 8, the inside of the collecting chamber 287 is provided with a third inclined portion 5 which is engaged with the filtering screen 2892, and the third inclined portion 5 is smoothly transited to the storage chamber 2891.
Adopt above-mentioned scheme: through setting up third slope 5, make the dust can enter into storage chamber 2891 smoothly, put the collection of dust.
Referring to fig. 6, the squeegee 281 includes a support portion 2811, a first arc-shaped portion 2812 disposed outside the support portion 2811, a second arc-shaped portion 2813 disposed inside the support portion 2811, a cleaning portion 2814 disposed between the first arc-shaped portion 2812 and the second arc-shaped portion 2813, and a plurality of notches 2815 disposed on the cleaning portion 2814, the cotton roll 282 is located on one side of the second arc-shaped portion 2813, and the cleaning portions 2814 of the two squeegees 281 are in contact with the first plate 261 and the second plate 262, respectively.
Adopt above-mentioned scheme: through setting up supporting part 2811, first arc portion 2812, second arc portion 2813, clearance portion 2814 and breach 2815, clearance portion 2814 and first plate body 261 and second plate body 262 surface contact, when scraper 281 moves on first plate body 261 and second plate body 262, can strike off the dust on first plate body 261 and second plate body 262 surface, and the clearance is convenient, and breach 2815 can make scraper 281 strike off first plate body 261 and second plate body 262 many times, improves the clearance effect.
Referring to fig. 1, the adjusting device includes a first tube 31 disposed on the base 1, a second tube 32 engaged with the first tube 31, a fixing plate 33 disposed on the middle upper portion of the second tube 32, and an extending member disposed on the fixing plate 33 for mounting the detecting box 21, wherein the plurality of second tubes 32 are extended and retracted synchronously.
Adopt above-mentioned scheme: by arranging the first tube 31, the second tube 32 and the fixing plate 33, since the fixing plate 33 is mounted on the plurality of second tubes 32, the plurality of second tubes 32 can be extended and retracted synchronously, and the detection box 21 can be placed at different positions.
Referring to fig. 1, 3 and 4, the stretching member includes a plurality of first fixing plates 341 on the fixed plate 33, a sliding groove 342 provided in the first fixing plate 341, a second fixing plate 343 slidably connected to the sliding groove 342, a connecting rod 344 provided on the second fixing plate 343, a spring 345 provided in the sliding groove 342, a rotating plate 346 rotatably provided outside the fixed plate 33, and a plurality of expanding portions 347 provided on the rotating plate 346, the rotating plate 346 is connected to the fixed plate 33 by a ratchet mechanism, the detection cassette 21 is mounted on one end of the second fixing plate 343, the expanding portions 347 abut against the connecting rod 344, the top of the sliding groove 342 is open, and the connecting rod 344 extends to the outside of the first fixing plate 341.
Adopt above-mentioned scheme: by providing the first fixing plate 341, the sliding groove 342, the second fixing plate 343, the connecting rod 344, the spring 345, the rotating disc 346, and the expanding portion 347, the position of the measuring cassette 21 can be adjusted, the rotating disc 346 connected to the fixed disc 33 by a ratchet mechanism (not shown) can rotate in one direction, the expanding portion 347 on the rotating disc 346 can push the connecting rod 344 to move the second fixing plate 343 outward, and the spring 345 can pull the second fixing plate 343 to return to the original position, thereby facilitating the adjustment of the position of the measuring cassette 21.
Example two
As shown in fig. 7, other structures are not changed, and unlike the first embodiment, the notch 2815 includes a third arc portion 61, a fourth arc portion 62 opposite to the third arc portion 61, and a fifth arc portion 63 connected to the fourth arc portion 62, the third arc portion 61 is arched, and a portion between the fourth arc portion 62 and the fifth arc portion 63 is convex, so that the strength of the scraper 281 can be improved.
EXAMPLE III
As shown in fig. 8, the other structure is not changed, and is different from the first embodiment, the guide plate 7 is obliquely disposed inside the storage chamber 2891, the guide plate 7 and the second inclined portion 42 are partially overlapped on the projection plane, and the guide plate 7 is obliquely disposed inside the storage chamber 2891 and is disposed opposite to the filter screen 2892, so that the pressure of the filter screen 2892 is reduced, and the collecting effect is improved.
Example four
As shown in fig. 6, the other structure is not changed, and unlike the first embodiment, the first arc-shaped part 2812 is provided with the extension part 8, and a certain cavity is formed between the extension part 8 and the first arc-shaped part 2812, so that certain dust can be temporarily stored and prevented from flying to other positions.
The working principle of the invention is as follows:
when the dust detection device is used, firstly, different detection boxes 21 are adjusted to positions to be monitored, the first plate body 261 and the second plate body 262 are electrified in advance, a stable electric field is formed between the first plate body 261 and the second plate body 262, then, air nearby enters the detection cavity 23 through the air inlet 22 through the fan 27, when dust exists in the air, certain fluctuation can be generated inside the electric field, and the sensor 263 can detect the fluctuation and calculate the concentration of the dust; when dust is accumulated on the first plate body 261 and the second plate body 262, the two scraping plates 281 are driven by the driving piece 285 to respectively slide on the first plate body 261 and the second plate body 262, the dust on the first plate body 261 and the second plate body 262 is scraped to be close to the dust collecting port 286, because the inside of the collecting chamber 287 is in a negative pressure state, the dust scraped by the scraping plates 281 can be sucked to the inside of the collecting chamber 287 through the dust collecting port 286, then the dust enters the storage chamber 2891 after being filtered by the filter screen 2892, part of the gas can be discharged into the gas outlet 24 through the gas outlet channel 288, because the air outlet direction of the gas outlet channel 288 is communicated with the gas outlet and is close to be parallel, the flow rate during gas outlet can be improved, the dust passing through the detection chamber 23 can be filtered through the filter plate 25, and the dust can be collected again.
In conclusion, the beneficial effects of the invention are as follows:
1. the base, the induction device and the adjusting device are matched for use, the storage environment for storing the semiconductor can be monitored in all aspects and in multiple directions, the dust concentration in the storage environment can be monitored in time, the influence of overhigh dust concentration on the performance of the semiconductor is avoided, and the problems that the performance of the semiconductor is influenced by the dust easily generated in the existing storage environment, the dust concentration cannot be detected in time in the existing storage, filtered dust is easily accumulated on detection equipment, and the detection effect is easily caused by oversize error without being cleaned for a long time are solved.
2. According to the invention, the scraper plate, the cotton roller, the guide rods, the guide grooves, the driving part, the dust collecting opening, the collecting cavity and the air outlet channel are arranged, the scraper plate can scrape dust accumulated on the first plate body and the second plate body, the cotton roller can wipe the surfaces of the first plate body and the second plate body, the driving part can drive the scraper plate to move back and forth through the two guide rods and push the dust onto the dust collecting opening, the collecting cavity with internal negative pressure can suck the dust near the dust collecting opening, and the driving part can be an electric push rod directly purchased from the market.
3. According to the invention, the storage cavity, the filter screen, the threaded part and the screw cap are arranged, dust in the collection cavity can enter the storage cavity, gas coming from the filter screen can be discharged through the gas outlet channel, and the storage cavity can be opened through the screw cap and the threaded part, so that the dust in the storage cavity can be cleaned in time.
4. According to the invention, the first inclined part and the second inclined part are arranged, the first inclined part can shield the air outlet channel, so that the air in the collection cavity is exhausted from the air outlet channel after passing through, and the second inclined part can prevent dust from flowing backwards to influence the normal collection efficiency.
5. According to the invention, the third inclined part is arranged, so that dust can smoothly enter the storage cavity and can be collected.
6. According to the invention, the supporting part, the first arc-shaped part, the second arc-shaped part, the cleaning part and the gap are arranged, the cleaning part is in contact with the surfaces of the first plate body and the second plate body, when the scraper moves on the first plate body and the second plate body, dust on the surfaces of the first plate body and the second plate body can be scraped, the cleaning is convenient, the gap can enable the scraper to scrape the first plate body and the second plate body for multiple times, and the cleaning effect is improved.
7. According to the invention, by arranging the first pipe body, the second pipe bodies and the fixed disk, the fixed disk is arranged on the plurality of second pipe bodies, and the plurality of second pipe bodies can be synchronously stretched and contracted, so that the detection box can be placed at different positions.
8. According to the invention, the position of the detection box can be adjusted by arranging the first fixing plate, the sliding chute, the second fixing plate, the connecting rod, the spring, the rotary table and the opening part, the rotary table connected with the fixed disc through the ratchet structure can rotate in a single direction, meanwhile, the opening part on the rotary table can push the connecting rod to enable the second fixing plate to move outwards, and the spring can pull the second fixing plate to reset, so that the position of the detection box can be conveniently adjusted.
It is noted that, herein, relational terms such as first and second, and the like may be used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Also, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus.
Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.
Claims (8)
1. The utility model provides a semiconductor environmental parameter monitoring device for smart storage, includes base (1), induction system and adjusting device, its characterized in that: the induction device comprises a detection box (21), an air inlet (22) arranged on one side of the detection box (21), a detection cavity (23) with the same air inlet direction, an air outlet (24) arranged on one side of the detection cavity (23), a filter plate (25) arranged in the air outlet (24), a detection part arranged in the detection cavity (23), a fan (27) used for guiding air to enter and a collection part used for cleaning the detection cavity (23), wherein the air inlet direction of the air inlet (22) is perpendicular to the air inlet direction of the base (1);
the detection part comprises a first plate body (261) arranged on one side of the detection cavity (23), a second plate body (262) matched with the first plate body (261) and a sensor (263), wherein the first plate body (261) and the second plate body (262) are parallel to each other, after the detection part is electrified, a stable electric field is formed between the first plate body (261) and the second plate body (262), and the sensor (263) is used for detecting the change of the current inside the detection cavity (23) to calculate the dust concentration.
2. The semiconductor environmental parameter monitoring device for smart storage according to claim 1, wherein: the collecting part comprises two scrapers (281) arranged in the detection cavity (23), a cotton roller (282) arranged on one side of the scrapers (281), guide rods (283) arranged on two sides of the scrapers (281), a guide groove (284), a driving piece (285), a dust collecting port (286) arranged on one side of the detection cavity (23), a collecting cavity (287) communicated with the dust collecting port (286), an air outlet channel (288) arranged in the collecting cavity (287) and a storage part, wherein negative pressure is arranged in the collecting cavity (287), the air outlet direction of the air outlet channel (288) is communicated with an air outlet and is approximately parallel to the air outlet, the stroke end point of the scrapers (281) is positioned on the same plane with the dust collecting port (286), and the scrapers (281) slide on the first plate body (261) and the second plate body (262) respectively.
3. The semiconductor environmental parameter monitoring device for smart storage according to claim 2, wherein: the storage component comprises a storage cavity (2891), a filter screen (2892), a threaded portion (2893) and a screw cap (2894), and the air outlet channel (288) and the dust collecting opening (286) are separated by the filter screen (2892).
4. The semiconductor environmental parameter monitoring device for smart storage according to claim 3, wherein: the filter screen (2892) is including locating first slope portion (41) in the collection chamber (287) with locate second slope portion (42) of holding chamber (2891) entry position, first slope portion (41) with the collection chamber (287) inner wall links to each other, second slope portion (42) with there is certain clearance between the holding chamber (2891).
5. The semiconductor environmental parameter monitoring device for smart storage according to claim 3, wherein: the inside of collection chamber (287) be equipped with filter screen (2892) matched with third slope portion (5), third slope portion (5) with storage chamber (2891) smooth transition.
6. The semiconductor environmental parameter monitoring device for smart storage according to claim 2, wherein: the scraper (281) comprises a supporting part (2811), a first arc-shaped part (2812) arranged on the outer side of the supporting part (2811), a second arc-shaped part (2813) arranged on the inner side of the supporting part (2811), a cleaning part (2814) arranged between the first arc-shaped part (2812) and the second arc-shaped part (2813) and a plurality of notches (2815) arranged on the cleaning part (2814), the cotton roller (282) is positioned on one side of the second arc-shaped part (2813), and the two cleaning parts (2814) are respectively contacted with the first plate body (261) and the second plate body (262).
7. The semiconductor environmental parameter monitoring device for smart storage according to claim 1, wherein: adjusting device including locate first body (31) on base (1), with first body (31) matched with second body (32), locate upper portion's fixed disk (33) and locate in second body (32) be used for the installation to detect the part that stretches of box (21), it is a plurality of on fixed disk (33) second body (32) are synchronous flexible.
8. The semiconductor environmental parameter monitoring device for smart storage according to claim 7, wherein: the stretching component comprises a first fixing plate (341), a sliding groove (342) arranged in the first fixing plate (341), a second fixing plate (343) connected with the sliding groove (342) in a sliding manner, a connecting rod (344) arranged on the second fixing plate (343), a spring (345) arranged in the sliding groove (342), a rotating disc (346) rotatably arranged on the outer side of the fixed disc (33) and a stretching part (347) arranged on the rotating disc (346), wherein the rotating disc (346) is connected with the fixed disc (33) through a ratchet structure, the detection box (21) is installed at one end of the second fixing plate (343), the stretching part (347) is abutted against the connecting rod (344), the top of the sliding groove (342) is opened, and the connecting rod (344) extends to the outer side of the first fixing plate (341).
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| Application Number | Priority Date | Filing Date | Title |
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| CN202110753613.2A CN113340781B (en) | 2021-07-02 | 2021-07-02 | Semiconductor environmental parameter monitoring device for intelligent storage |
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| CN202110753613.2A CN113340781B (en) | 2021-07-02 | 2021-07-02 | Semiconductor environmental parameter monitoring device for intelligent storage |
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| CN113340781A true CN113340781A (en) | 2021-09-03 |
| CN113340781B CN113340781B (en) | 2024-04-26 |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114965872A (en) * | 2022-04-27 | 2022-08-30 | 重庆科技学院 | Multi-sensor data fusion electronic nose and method |
| CN114965872B (en) * | 2022-04-27 | 2023-10-13 | 重庆科技学院 | Electronic nose and method for multi-sensor data fusion |
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