CN113337819A - 一种镀膜设备 - Google Patents

一种镀膜设备 Download PDF

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CN113337819A
CN113337819A CN202110771536.3A CN202110771536A CN113337819A CN 113337819 A CN113337819 A CN 113337819A CN 202110771536 A CN202110771536 A CN 202110771536A CN 113337819 A CN113337819 A CN 113337819A
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唐智
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Nafeng Vacuum Coating Shanghai Co ltd
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Abstract

本发明公开了一种镀膜设备,包括镀膜腔体,围绕镀膜腔体的外周边设置有多个法兰口,其中一个法兰口为抽气口,其余的法兰口中,每个法兰口上配置一个DLC镀膜源,所述DLC镀膜源包括但不限于Sputtering溅射源、离子源、多弧源和过滤弧源;整个镀膜设备包含至少一个离子源、和/或Sputtering溅射源、和/或多弧源、和/或过滤弧源。本发明的镀膜设备,具有多功能,包含多种DLC镀膜源制备DLC膜层,并在同一台设备中一并实现镀膜、退膜功能,实现一机多用。

Description

一种镀膜设备
技术领域
本发明涉及一种镀膜设备,属于真空镀膜领域。
背景技术
通常真空镀膜设备,功能配置单一,普遍配置单独的Sputtering溅射源(磁控溅射源),或单独的DLC(Diamond-like C氩气bon,类金刚石)源,或单独的弧源等用于沉积DLC膜层。缺乏具有多功能的镀膜设备,多种方法沉积DLC膜层以及镀膜、退膜一体的真空镀膜设备。
发明内容
本发明的目的是克服现有技术的缺陷,提供一种镀膜设备,具有多功能,包含多种DLC镀膜源制备DLC膜层,并在同一台设备中一并实现镀膜、退膜功能,实现一机多用。
实现上述目的的技术方案是:一种镀膜设备,包括镀膜腔体,围绕镀膜腔体的外周边设置有多个法兰口,其中一个法兰口为抽气口,其余的法兰口中,每个法兰口上配置一个DLC镀膜源,所述DLC镀膜源包括但不限于Sputtering溅射源、离子源、多弧源和过滤弧源;
整个镀膜设备包含至少一个离子源、和/或Sputtering溅射源、和/或多弧源、和/或过滤弧源;
所述离子源用于离子清洗,或用于增强等离子体沉积DLC膜层,或用于氧化退膜。
上述的一种镀膜设备,其中,所述氧化退膜的膜层包括但不限于DLC等碳膜。
上述的一种镀膜设备,其中,所述离子源包括但不限于阳极层离子源、射频离子源、考夫曼离子源、霍尔离子源和高频离子源。
本发明的镀膜设备,为多功能镀膜设备,包含多种DLC镀膜源制备DLC膜层,并在同一台设备中一并实现镀膜、退膜功能。该镀膜设备可以作为生产设备,更可以作为技术研发设备,高效沉积DLC膜层及碳膜等的氧化处理。为本领域技术研发提供便捷,极大提高研发效率。
附图说明
图1为本发明的镀膜设备的结构示意图;
图2为本发明的镀膜设备的使用状态图。
具体实施方式
为了使本技术领域的技术人员能更好地理解本发明的技术方案,下面结合附图对其具体实施方式进行详细地说明:
请参阅图1和图2,本发明的实施例,一种镀膜设备,包括镀膜腔体10,围绕镀膜腔体10的外周边设置有八个法兰口1~8,其中一个法兰口8为抽气口,其余的七个法兰口中,每个法兰口上配置一个DLC镀膜源,DLC镀膜源包括但不限于Sputtering溅射源、离子源、多弧源和过滤弧源;整个镀膜设备包含三个离子源、两个Sputtering溅射源(简称SPT)、一个多弧源和一个过滤弧源。两个Sputtering溅射源分别设置在法兰口1和法兰口5,三个离子源分别设置在法兰口2、法兰口4和法兰口7;法兰口设置在法兰口3,过滤弧源设置在法兰口6。三个离子源中,一个离子源用于离子清洗;一个离子源用于增强等离子体沉积DLC膜层;一个离子源用于氧化退膜,氧化退膜的膜层包括但不限于DLC等碳膜。离子源包括但不限于阳极层离子源、射频离子源、考夫曼离子源、霍尔离子源和高频离子源。
本发明的镀膜设备,在加工时,根据需要,围绕镀膜腔体10的圆周设置的法兰口的数量可以改变,其中一个法兰口为抽气口,其余的法兰口中,每个法兰口上配置一个DLC镀膜源,DLC镀膜源的位置、数量,可根据需求调整。整个镀膜设备包含至少一个离子源、和/或Sputtering溅射源、和/或多弧源、和/或过滤弧源;离子源用于离子清洗,或用于增强等离子体沉积DLC膜层,或用于氧化退膜。
本发明的镀膜设备,在工作时,通过抽气口外接抽真空设备,实现镀膜腔体10内需要的真空度。
本发明的镀膜设备,可以实现包括但不限于如下功能:
(1)将被镀工件用纯水清洗、烘干,再置于镀膜腔体10内,镀膜腔体10内抽真空至4.0E-5Torr时,选用离子源进行离子清洗,清洗结束后使用离子源开始镀膜。步骤包括:开启一个或多个离子源电源,通入氩气,乙炔气体,沉积DLC膜层。
(2)将被镀工件用纯水清洗、烘干,再置于镀膜腔体10内,镀膜腔体10内抽真空至4.0E-5Torr时,选用离子源进行离子清洗,清洗结束后使用SPT溅射源开始镀膜,靶材为C靶(简称SPT C溅射源)。步骤包括:开启一个或多个SPT C溅射源电源,通入氩气,沉积DLC膜层。
(3)将被镀工件用纯水清洗、烘干,再置于镀膜腔体10内,镀膜腔体10内抽真空至4.0E-5Torr时,选用离子源进行离子清洗,清洗结束后使用多弧源开始镀膜,靶材为C靶。步骤包括:开启一个或多个多弧源电源,沉积DLC膜层。
(4)将被镀工件用纯水清洗、烘干,再置于镀膜腔体10内,镀膜腔体10内抽真空至4.0E-5Torr时,选用离子源进行离子清洗,清洗结束后使用过滤弧源开始镀膜,靶材为C靶。步骤包括:开启一个或多个过滤弧源电源,沉积DLC膜层。
(5)将被镀工件用纯水清洗、烘干,再置于镀膜腔体10内,镀膜腔体10内抽真空至4.0E-5Torr时,选用离子源进行离子清洗,清洗结束后使用多弧源和过滤弧源开始镀膜,靶材为C靶。步骤包括:开启多弧源和过滤弧源电源,沉积DLC膜层。
(6)将被镀工件用纯水清洗、烘干,再置于镀膜腔体10内,镀膜腔体10内抽真空至4.0E-5Torr时,选用离子源进行离子清洗,清洗结束后使用离子源和过滤弧源开始镀膜,过滤弧源靶材为C靶。步骤包括:开启离子源电源和过滤弧源电源,通入氩气,乙炔气体,沉积DLC膜层。
(7)将被镀工件用纯水清洗、烘干,再置于镀膜腔体10内,镀膜腔体10内抽真空至4.0E-5Torr时,选用离子源进行离子清洗,清洗结束后使用离子源和SPT C溅射源开始镀膜。步骤包括:开启离子源电源和SPT C溅射源电源,通入氩气,乙炔气体,沉积DLC膜层。
(8)将被镀工件用纯水清洗、烘干,再置于镀膜腔体10内,镀膜腔体10内抽真空至4.0E-5Torr时,选用离子源进行离子清洗,清洗结束后使用离子源、SPT C溅射源、C靶过滤弧源开始镀膜。步骤包括:开启离子源电源、SPT C溅射源电源、过滤弧源电源,通入氩气,乙炔气体,沉积DLC膜层。
(9)退膜实施例:将待退工件置于镀膜腔体10内,镀膜腔体10内抽真空至2.0E-4Torr时,开启离子源电源,通入氧气、氩气,退去工件上的膜层。
各实施例为实际应用举例,非本申请的限制;实施所用电离气体氩气、反应气体乙炔,为实施例举例,非本申请的限制,还可以用其他惰性气体、C-H等气体。
本发明的镀膜设备,包含多种DLC镀膜源用于制备DLC膜层,并在同一台设备中一并实现镀膜、退膜功能,该镀膜设备可以作为生产设备,更可以作为技术研发设备,高效沉积DLC膜层及碳膜氧化处理。为本领域技术研发提供便捷,极大提高研发效率。
综上所述,本发明的镀膜设备,具有多功能,包含多种DLC镀膜源制备DLC膜层,并在同一台设备中一并实现镀膜、退膜功能。一机多用,为镀膜领域设备开发、膜层开发提供新思路,为镀膜领域的技术研发提供便捷,极大提高研发效率。
本技术领域中的普通技术人员应当认识到,以上的实施例仅是用来说明本发明,而并非用作为对本发明的限定,只要在本发明的实质精神范围内,对以上所述实施例的变化、变型都将落在本发明的权利要求书范围内。

Claims (3)

1.一种镀膜设备,其特征在于,包括镀膜腔体,围绕镀膜腔体的外周边设置有多个法兰口,其中一个法兰口为抽气口,其余的法兰口中,每个法兰口上配置一个DLC镀膜源,所述DLC镀膜源包括但不限于Sputtering溅射源、离子源、多弧源和过滤弧源;
整个镀膜设备包含至少一个离子源、和/或Sputtering溅射源、和/或多弧源、和/或过滤弧源;
所述离子源用于离子清洗,或用于增强等离子体沉积DLC膜层,或用于氧化退膜。
2.根据权利要求1所述的一种镀膜设备,其特征在于,所述氧化退膜的膜层包括但不限于DLC等碳膜。
3.根据权利要求1所述的一种镀膜设备,其特征在于,所述离子源包括但不限于阳极层离子源、射频离子源、考夫曼离子源、霍尔离子源和高频离子源。
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