CN113337819A - 一种镀膜设备 - Google Patents
一种镀膜设备 Download PDFInfo
- Publication number
- CN113337819A CN113337819A CN202110771536.3A CN202110771536A CN113337819A CN 113337819 A CN113337819 A CN 113337819A CN 202110771536 A CN202110771536 A CN 202110771536A CN 113337819 A CN113337819 A CN 113337819A
- Authority
- CN
- China
- Prior art keywords
- source
- coating
- dlc
- ion
- ion source
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011248 coating agent Substances 0.000 title claims abstract description 72
- 238000000576 coating method Methods 0.000 title claims abstract description 72
- 238000004544 sputter deposition Methods 0.000 claims abstract description 18
- 238000001914 filtration Methods 0.000 claims abstract description 17
- 238000004140 cleaning Methods 0.000 claims description 28
- 238000000151 deposition Methods 0.000 claims description 14
- 230000003647 oxidation Effects 0.000 claims description 6
- 238000007254 oxidation reaction Methods 0.000 claims description 6
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 5
- 229910052799 carbon Inorganic materials 0.000 claims description 5
- 230000008021 deposition Effects 0.000 claims description 5
- 238000005728 strengthening Methods 0.000 claims description 3
- 238000009501 film coating Methods 0.000 abstract description 13
- 239000007888 film coating Substances 0.000 abstract description 13
- 239000010410 layer Substances 0.000 description 18
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 14
- 238000000034 method Methods 0.000 description 9
- 238000001035 drying Methods 0.000 description 8
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 8
- 229910052786 argon Inorganic materials 0.000 description 7
- 238000012827 research and development Methods 0.000 description 7
- HSFWRNGVRCDJHI-UHFFFAOYSA-N alpha-acetylene Natural products C#C HSFWRNGVRCDJHI-UHFFFAOYSA-N 0.000 description 5
- 125000002534 ethynyl group Chemical group [H]C#C* 0.000 description 5
- 239000007789 gas Substances 0.000 description 5
- 238000007747 plating Methods 0.000 description 4
- 239000013077 target material Substances 0.000 description 4
- 238000005086 pumping Methods 0.000 description 3
- 238000001771 vacuum deposition Methods 0.000 description 3
- 238000011161 development Methods 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 239000011247 coating layer Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 238000001755 magnetron sputter deposition Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000012495 reaction gas Substances 0.000 description 1
- 238000011282 treatment Methods 0.000 description 1
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/04—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
- C23C28/046—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material with at least one amorphous inorganic material layer, e.g. DLC, a-C:H, a-C:Me, the layer being doped or not
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/02—Pretreatment of the material to be coated
- C23C14/021—Cleaning or etching treatments
- C23C14/022—Cleaning or etching treatments by means of bombardment with energetic particles or radiation
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0605—Carbon
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
- C23C14/325—Electric arc evaporation
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/58—After-treatment
- C23C14/5873—Removal of material
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/02—Pretreatment of the material to be coated
- C23C16/0227—Pretreatment of the material to be coated by cleaning or etching
- C23C16/0245—Pretreatment of the material to be coated by cleaning or etching by etching with a plasma
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/26—Deposition of carbon only
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/54—Apparatus specially adapted for continuous coating
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/56—After-treatment
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Inorganic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Physical Vapour Deposition (AREA)
Abstract
本发明公开了一种镀膜设备,包括镀膜腔体,围绕镀膜腔体的外周边设置有多个法兰口,其中一个法兰口为抽气口,其余的法兰口中,每个法兰口上配置一个DLC镀膜源,所述DLC镀膜源包括但不限于Sputtering溅射源、离子源、多弧源和过滤弧源;整个镀膜设备包含至少一个离子源、和/或Sputtering溅射源、和/或多弧源、和/或过滤弧源。本发明的镀膜设备,具有多功能,包含多种DLC镀膜源制备DLC膜层,并在同一台设备中一并实现镀膜、退膜功能,实现一机多用。
Description
技术领域
本发明涉及一种镀膜设备,属于真空镀膜领域。
背景技术
通常真空镀膜设备,功能配置单一,普遍配置单独的Sputtering溅射源(磁控溅射源),或单独的DLC(Diamond-like C氩气bon,类金刚石)源,或单独的弧源等用于沉积DLC膜层。缺乏具有多功能的镀膜设备,多种方法沉积DLC膜层以及镀膜、退膜一体的真空镀膜设备。
发明内容
本发明的目的是克服现有技术的缺陷,提供一种镀膜设备,具有多功能,包含多种DLC镀膜源制备DLC膜层,并在同一台设备中一并实现镀膜、退膜功能,实现一机多用。
实现上述目的的技术方案是:一种镀膜设备,包括镀膜腔体,围绕镀膜腔体的外周边设置有多个法兰口,其中一个法兰口为抽气口,其余的法兰口中,每个法兰口上配置一个DLC镀膜源,所述DLC镀膜源包括但不限于Sputtering溅射源、离子源、多弧源和过滤弧源;
整个镀膜设备包含至少一个离子源、和/或Sputtering溅射源、和/或多弧源、和/或过滤弧源;
所述离子源用于离子清洗,或用于增强等离子体沉积DLC膜层,或用于氧化退膜。
上述的一种镀膜设备,其中,所述氧化退膜的膜层包括但不限于DLC等碳膜。
上述的一种镀膜设备,其中,所述离子源包括但不限于阳极层离子源、射频离子源、考夫曼离子源、霍尔离子源和高频离子源。
本发明的镀膜设备,为多功能镀膜设备,包含多种DLC镀膜源制备DLC膜层,并在同一台设备中一并实现镀膜、退膜功能。该镀膜设备可以作为生产设备,更可以作为技术研发设备,高效沉积DLC膜层及碳膜等的氧化处理。为本领域技术研发提供便捷,极大提高研发效率。
附图说明
图1为本发明的镀膜设备的结构示意图;
图2为本发明的镀膜设备的使用状态图。
具体实施方式
为了使本技术领域的技术人员能更好地理解本发明的技术方案,下面结合附图对其具体实施方式进行详细地说明:
请参阅图1和图2,本发明的实施例,一种镀膜设备,包括镀膜腔体10,围绕镀膜腔体10的外周边设置有八个法兰口1~8,其中一个法兰口8为抽气口,其余的七个法兰口中,每个法兰口上配置一个DLC镀膜源,DLC镀膜源包括但不限于Sputtering溅射源、离子源、多弧源和过滤弧源;整个镀膜设备包含三个离子源、两个Sputtering溅射源(简称SPT)、一个多弧源和一个过滤弧源。两个Sputtering溅射源分别设置在法兰口1和法兰口5,三个离子源分别设置在法兰口2、法兰口4和法兰口7;法兰口设置在法兰口3,过滤弧源设置在法兰口6。三个离子源中,一个离子源用于离子清洗;一个离子源用于增强等离子体沉积DLC膜层;一个离子源用于氧化退膜,氧化退膜的膜层包括但不限于DLC等碳膜。离子源包括但不限于阳极层离子源、射频离子源、考夫曼离子源、霍尔离子源和高频离子源。
本发明的镀膜设备,在加工时,根据需要,围绕镀膜腔体10的圆周设置的法兰口的数量可以改变,其中一个法兰口为抽气口,其余的法兰口中,每个法兰口上配置一个DLC镀膜源,DLC镀膜源的位置、数量,可根据需求调整。整个镀膜设备包含至少一个离子源、和/或Sputtering溅射源、和/或多弧源、和/或过滤弧源;离子源用于离子清洗,或用于增强等离子体沉积DLC膜层,或用于氧化退膜。
本发明的镀膜设备,在工作时,通过抽气口外接抽真空设备,实现镀膜腔体10内需要的真空度。
本发明的镀膜设备,可以实现包括但不限于如下功能:
(1)将被镀工件用纯水清洗、烘干,再置于镀膜腔体10内,镀膜腔体10内抽真空至4.0E-5Torr时,选用离子源进行离子清洗,清洗结束后使用离子源开始镀膜。步骤包括:开启一个或多个离子源电源,通入氩气,乙炔气体,沉积DLC膜层。
(2)将被镀工件用纯水清洗、烘干,再置于镀膜腔体10内,镀膜腔体10内抽真空至4.0E-5Torr时,选用离子源进行离子清洗,清洗结束后使用SPT溅射源开始镀膜,靶材为C靶(简称SPT C溅射源)。步骤包括:开启一个或多个SPT C溅射源电源,通入氩气,沉积DLC膜层。
(3)将被镀工件用纯水清洗、烘干,再置于镀膜腔体10内,镀膜腔体10内抽真空至4.0E-5Torr时,选用离子源进行离子清洗,清洗结束后使用多弧源开始镀膜,靶材为C靶。步骤包括:开启一个或多个多弧源电源,沉积DLC膜层。
(4)将被镀工件用纯水清洗、烘干,再置于镀膜腔体10内,镀膜腔体10内抽真空至4.0E-5Torr时,选用离子源进行离子清洗,清洗结束后使用过滤弧源开始镀膜,靶材为C靶。步骤包括:开启一个或多个过滤弧源电源,沉积DLC膜层。
(5)将被镀工件用纯水清洗、烘干,再置于镀膜腔体10内,镀膜腔体10内抽真空至4.0E-5Torr时,选用离子源进行离子清洗,清洗结束后使用多弧源和过滤弧源开始镀膜,靶材为C靶。步骤包括:开启多弧源和过滤弧源电源,沉积DLC膜层。
(6)将被镀工件用纯水清洗、烘干,再置于镀膜腔体10内,镀膜腔体10内抽真空至4.0E-5Torr时,选用离子源进行离子清洗,清洗结束后使用离子源和过滤弧源开始镀膜,过滤弧源靶材为C靶。步骤包括:开启离子源电源和过滤弧源电源,通入氩气,乙炔气体,沉积DLC膜层。
(7)将被镀工件用纯水清洗、烘干,再置于镀膜腔体10内,镀膜腔体10内抽真空至4.0E-5Torr时,选用离子源进行离子清洗,清洗结束后使用离子源和SPT C溅射源开始镀膜。步骤包括:开启离子源电源和SPT C溅射源电源,通入氩气,乙炔气体,沉积DLC膜层。
(8)将被镀工件用纯水清洗、烘干,再置于镀膜腔体10内,镀膜腔体10内抽真空至4.0E-5Torr时,选用离子源进行离子清洗,清洗结束后使用离子源、SPT C溅射源、C靶过滤弧源开始镀膜。步骤包括:开启离子源电源、SPT C溅射源电源、过滤弧源电源,通入氩气,乙炔气体,沉积DLC膜层。
(9)退膜实施例:将待退工件置于镀膜腔体10内,镀膜腔体10内抽真空至2.0E-4Torr时,开启离子源电源,通入氧气、氩气,退去工件上的膜层。
各实施例为实际应用举例,非本申请的限制;实施所用电离气体氩气、反应气体乙炔,为实施例举例,非本申请的限制,还可以用其他惰性气体、C-H等气体。
本发明的镀膜设备,包含多种DLC镀膜源用于制备DLC膜层,并在同一台设备中一并实现镀膜、退膜功能,该镀膜设备可以作为生产设备,更可以作为技术研发设备,高效沉积DLC膜层及碳膜氧化处理。为本领域技术研发提供便捷,极大提高研发效率。
综上所述,本发明的镀膜设备,具有多功能,包含多种DLC镀膜源制备DLC膜层,并在同一台设备中一并实现镀膜、退膜功能。一机多用,为镀膜领域设备开发、膜层开发提供新思路,为镀膜领域的技术研发提供便捷,极大提高研发效率。
本技术领域中的普通技术人员应当认识到,以上的实施例仅是用来说明本发明,而并非用作为对本发明的限定,只要在本发明的实质精神范围内,对以上所述实施例的变化、变型都将落在本发明的权利要求书范围内。
Claims (3)
1.一种镀膜设备,其特征在于,包括镀膜腔体,围绕镀膜腔体的外周边设置有多个法兰口,其中一个法兰口为抽气口,其余的法兰口中,每个法兰口上配置一个DLC镀膜源,所述DLC镀膜源包括但不限于Sputtering溅射源、离子源、多弧源和过滤弧源;
整个镀膜设备包含至少一个离子源、和/或Sputtering溅射源、和/或多弧源、和/或过滤弧源;
所述离子源用于离子清洗,或用于增强等离子体沉积DLC膜层,或用于氧化退膜。
2.根据权利要求1所述的一种镀膜设备,其特征在于,所述氧化退膜的膜层包括但不限于DLC等碳膜。
3.根据权利要求1所述的一种镀膜设备,其特征在于,所述离子源包括但不限于阳极层离子源、射频离子源、考夫曼离子源、霍尔离子源和高频离子源。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN202110771536.3A CN113337819A (zh) | 2021-07-08 | 2021-07-08 | 一种镀膜设备 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN202110771536.3A CN113337819A (zh) | 2021-07-08 | 2021-07-08 | 一种镀膜设备 |
Publications (1)
Publication Number | Publication Date |
---|---|
CN113337819A true CN113337819A (zh) | 2021-09-03 |
Family
ID=77483118
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN202110771536.3A Pending CN113337819A (zh) | 2021-07-08 | 2021-07-08 | 一种镀膜设备 |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN113337819A (zh) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN115852315A (zh) * | 2022-12-20 | 2023-03-28 | 安徽纯源镀膜科技有限公司 | 一种用于提高退膜效率的设备及工艺 |
Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN2086749U (zh) * | 1990-12-25 | 1991-10-16 | 航空航天工业部第五研究院五一一研究所 | 多弧-磁控溅射多功能镀膜设备 |
KR20010054293A (ko) * | 1999-12-06 | 2001-07-02 | 한전건 | 초고속 펄스-직류 마그네트론 스퍼터 코팅원에 의한 저온다결정 실리콘 및 고기능성 박막의 증착을 위한 스퍼터링장치 |
CN102634764A (zh) * | 2012-04-01 | 2012-08-15 | 上海仟纳真空镀膜科技有限公司 | 一种多功能pvd镀膜机 |
CN105200377A (zh) * | 2015-09-16 | 2015-12-30 | 北京丹鹏表面技术研究中心 | 离子镀膜机、气体离子刻蚀清洗方法及辅助沉积方法 |
CN207259585U (zh) * | 2017-08-31 | 2018-04-20 | 上海双石钛金有限公司 | 一种真空离子镀膜炉体 |
CN211367703U (zh) * | 2019-07-12 | 2020-08-28 | 王福贞 | 一种沉积dlc薄膜的磁控溅射镀膜机 |
CN217230943U (zh) * | 2021-07-08 | 2022-08-19 | 纳峰真空镀膜(上海)有限公司 | 一种镀膜设备 |
-
2021
- 2021-07-08 CN CN202110771536.3A patent/CN113337819A/zh active Pending
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN2086749U (zh) * | 1990-12-25 | 1991-10-16 | 航空航天工业部第五研究院五一一研究所 | 多弧-磁控溅射多功能镀膜设备 |
KR20010054293A (ko) * | 1999-12-06 | 2001-07-02 | 한전건 | 초고속 펄스-직류 마그네트론 스퍼터 코팅원에 의한 저온다결정 실리콘 및 고기능성 박막의 증착을 위한 스퍼터링장치 |
CN102634764A (zh) * | 2012-04-01 | 2012-08-15 | 上海仟纳真空镀膜科技有限公司 | 一种多功能pvd镀膜机 |
CN105200377A (zh) * | 2015-09-16 | 2015-12-30 | 北京丹鹏表面技术研究中心 | 离子镀膜机、气体离子刻蚀清洗方法及辅助沉积方法 |
CN207259585U (zh) * | 2017-08-31 | 2018-04-20 | 上海双石钛金有限公司 | 一种真空离子镀膜炉体 |
CN211367703U (zh) * | 2019-07-12 | 2020-08-28 | 王福贞 | 一种沉积dlc薄膜的磁控溅射镀膜机 |
CN217230943U (zh) * | 2021-07-08 | 2022-08-19 | 纳峰真空镀膜(上海)有限公司 | 一种镀膜设备 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN115852315A (zh) * | 2022-12-20 | 2023-03-28 | 安徽纯源镀膜科技有限公司 | 一种用于提高退膜效率的设备及工艺 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN109295414B (zh) | 一种深孔内镀膜的技术和设备 | |
TW469534B (en) | Plasma processing method and apparatus | |
US8697249B1 (en) | Coated article | |
CN110819965B (zh) | 一种铝电解电容器用阳极铝箔的节能制备方法 | |
CN113337819A (zh) | 一种镀膜设备 | |
CN106622824A (zh) | 一种等离子体聚合涂层装置 | |
CN217230943U (zh) | 一种镀膜设备 | |
KR20200129615A (ko) | 균일한 두께로 코팅 가능한 플라스틱 진공증착 코팅장치 | |
CN109576668B (zh) | 一种多工位长管材高效磁控溅射镀膜专用装置 | |
JP2014136836A (ja) | 硬質膜が被覆されたステンレス製品及びその製造方法 | |
CA2780893A1 (en) | Method of creating pvd layers using a cylindrical rotating cathode and apparatus for carrying out this method | |
TWI425107B (zh) | 連續式濺鍍設備以及太陽能選擇性吸收膜的製造方法 | |
CN113817999A (zh) | 一种用于制备压电陶瓷的真空镀膜设备 | |
EP1990443A3 (en) | Method and apparatus for DC plasma assisted chemical vapor deposition in the absence of a positive column, and diamond thin film fabricated thereby | |
CN211367711U (zh) | 一种管状磁控溅射源、磁控溅射单元及镀膜系统 | |
JP2007191753A (ja) | アンダコート用および蒸着用マスク治具と、これを用いた電磁波シールド膜の成膜方法 | |
TWI377264B (en) | Sputtering device | |
US9328409B2 (en) | Coated article, method for making the same and electronic device using the same | |
CN2075655U (zh) | 双室旋转磁控溅射镀膜机 | |
CN209923422U (zh) | 一种应用于掺杂类金刚石薄膜制备设备的电极 | |
CN203588970U (zh) | 一种适用于常压环境材料表面等离子体处理装置 | |
JPH1192968A (ja) | ドライエッチング装置とプラズマ化学的気相堆積装置 | |
CN112226732B (zh) | 一种薄膜沉积设备 | |
CN101240410B (zh) | 溅镀装置 | |
TWM475016U (zh) | 複合式沉積系統 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
PB01 | Publication | ||
PB01 | Publication | ||
SE01 | Entry into force of request for substantive examination | ||
SE01 | Entry into force of request for substantive examination |