CN113334188B

CN113334188B - Three laminar quartz crucible surface trimmer systems of standing vertically

Info

Publication number: CN113334188B
Application number: CN202110526067.9A
Authority: CN
Inventors: 嵇亚明
Original assignee: Xinyi Zhongxin Photoelectric Technology Co ltd
Current assignee: Xinyi Zhongxin Photoelectric Technology Co ltd
Priority date: 2021-05-14
Filing date: 2021-05-14
Publication date: 2022-09-23
Anticipated expiration: 2041-05-14
Also published as: CN113334188A

Abstract

The invention discloses a vertical three-layer quartz crucible outer surface shaping machine system, which comprises: the plastic shaping machine comprises a shaping machine body, a polishing mechanism, a clamping mechanism, a conveying mechanism and a transmission mechanism, wherein two windows are hinged to the front surface of the shaping machine body, the clamping mechanism is arranged at the inner top of the shaping machine body, and the shaping machine body is of an L-shaped structure and is horizontally provided with the conveying mechanism in the middle. Before the adaptive crucible is polished, the adaptive crucible is placed on the conveying mechanism, the conveying mechanism is driven to move by the motor, the quartz crucible is sent into the shaping machine body, the clamp is moved downwards by the air cylinder and is supported to two sides from the inside of the quartz crucible by the two arc-shaped clamping plates on the clamp, the conveying mechanism is retracted after the support is finished, the motor is started to drive the clamp to rotate, the crucible is moved downwards at the same time, the lower end of the crucible is attached to the polishing cylinder, the clamp is moved upwards after polishing is finished, and the crucible is placed on the conveying mechanism and is sent out.

Description

Three laminar quartz crucible surface trimmer systems of standing vertically

Technical Field

The invention relates to the technical field of quartz crucible shaping machines, in particular to a vertical three-layer quartz crucible outer surface shaping machine system.

Background

The monocrystalline silicon rod is a raw material for producing monocrystalline silicon pieces, and along with the rapid increase of the demand of domestic and international markets for monocrystalline silicon pieces, the market demand of the monocrystalline silicon rod also shows a rapid growth trend, and the demand of quartz crucibles used for manufacturing the monocrystalline silicon rod also increases rapidly. The quartz crucible is a vitreous vessel formed by melting high-purity quartz at high temperature, and is an irreplaceable container in the process of producing monocrystalline silicon. The outer surface of the produced quartz crucible blank is adhered with a layer of quartz sand, if the layer of adhered quartz sand is not cleaned thoroughly, the service performance of the crucible is affected, the treated attached sand can be reused after a series of processing, and the production cost can be saved. The quartz crucible has the advantages of high purity, strong temperature resistance, large size, high precision, good heat preservation, energy conservation, stable quality and the like, is more and more widely applied, the detection work of the quartz crucible is a very important link, and nowadays, developed countries of the world semiconductor industry replace small transparent quartz crucibles with the quartz crucible, and the quartz crucible has the advantages of high purity, strong temperature resistance, large size, high precision, good heat preservation, energy conservation, stable quality and the like, and the polishing is a very important process in the production process of the crucible.

In the processing process, the quartz crucible is not easy to clamp and is easy to break; the clamping is unstable, and the center line of the ground pan is in a horizontal position and is easy to run; the top of the quartz crucible and the part clamped by the machine tool clamp form a processing dead angle, so that the quality of the shaping processing is greatly influenced; the machine tool has high cost and low working efficiency.

At present, when polishing, quartz crucible adopts anchor clamps to carry out the centre gripping to it, and the centre gripping position forms the dead angle, needs to carry out the secondary and polishes, and the step of polishing is loaded down with trivial details, and current grinding device is not good at the effect of polishing the crucible simultaneously. For this reason, a new scheme needs to be designed to give improvements.

Disclosure of Invention

The invention aims to provide a vertical three-layer quartz crucible outer surface shaping machine system, which solves the problems that when a quartz crucible is polished, the quartz crucible is clamped by a clamp, dead corners are formed at the clamping part, secondary polishing is needed, polishing steps are complicated, and the polishing effect of the existing polishing device on the crucible is poor, and meets the actual use requirement.

In order to achieve the purpose, the invention provides the following technical scheme: a vertical three-layer quartz crucible outer surface shaper system, comprising: the plastic shaping machine comprises a shaping machine body, a polishing mechanism, a clamping mechanism, a conveying mechanism and a transmission mechanism, wherein two windows are hinged to the front surface of the shaping machine body, the clamping mechanism is arranged at the inner top of the shaping machine body, the shaping machine body is of an L-shaped structure, the conveying mechanism is horizontally arranged in the middle of the shaping machine body, a partition plate is horizontally arranged below the inner part of the shaping machine body and is divided into a polishing bin and a power bin through the partition plate, the polishing mechanism is arranged in the polishing bin and is positioned below the clamping mechanism, and the transmission mechanism is arranged in the power bin;

the clamping mechanism comprises a first motor, a first air cylinder and a clamp, the first air cylinder is installed in the middle of the top surface of the trimmer body, the output end of the first air cylinder extends downwards into the trimmer body and is fixedly connected with the first motor, a connecting rod is installed on the power output end of the first motor, the clamp is installed at the lower end of the connecting rod, and a conductive sliding ring is sleeved on the connecting rod;

grinding machanism is including polishing a section of thick bamboo, cylinder two and the board of polishing, cylinder two is installed in the both sides of trimmer body and power take off end extend to the storehouse of polishing and is connected with the board of polishing, the section of thick bamboo of polishing is installed on the baffle and is located anchor clamps under, and the chamber of polishing the same with quartz crucible appearance is seted up to the top surface of the section of thick bamboo of polishing, the jet-propelled head is installed respectively to the bottom surface of the board of polishing.

As a preferred embodiment of the present invention, the clamp includes a fixed box, two movable rods are respectively disposed on two sides of the inside of the fixed box, the end of each movable rod horizontally extends to the outside of the fixed box, and a clamping plate is connected to the end of each movable rod, the radian of the clamping plate is the same as that of the inner wall of the quartz crucible, and a rubber anti-slip pad is disposed on the outer surface of each clamping plate.

As a preferred embodiment of the present invention, the movable rod is tubular, a nut is installed at one end inside the fixed box, a position-limiting strip is disposed on the top surface of the movable rod, and a position-limiting groove used in cooperation with the position-limiting strip is disposed on the side wall of the fixed box and above the connection position of the movable rod.

As a preferred embodiment of the invention, a screw rod is horizontally arranged in the fixed box, two ends of the screw rod respectively extend into the movable rod and are in threaded connection with the nut, a motor four is further installed in the fixed box, transmission gears are respectively installed at the power output end of the motor four and the middle part of the screw rod, and the two transmission gears are in meshed connection.

As a preferred embodiment of the invention, the transmission mechanism comprises a third air cylinder, a third motor and two transmission rods, wherein one transmission rod is positioned in the middle of the power bin, the upper end of the transmission rod is connected with the polishing barrel, the lower end of the transmission rod is rotatably connected with the bottom in the power bin, the surface of the other transmission rod is sleeved with a transmission pipe, the lower end of the transmission rod is connected with the power output end of the third motor, and the upper end of the transmission rod is rotatably connected with the partition plate.

As a preferred embodiment of the invention, a large gear and a small gear are arranged on the outer walls of a transmission rod and a transmission pipe which are positioned in the middle of the power bin, the positions of the large gear and the small gear on the transmission rod are opposite to the positions of the large gear and the small gear on the transmission pipe, a fixing ring is arranged in the middle of the transmission pipe, a push rod in an L-shaped structure is fixed on the side wall of the fixing ring, the end part of the push rod is connected with the power output end of a third air cylinder, and the third air cylinder is fixed on a partition plate.

As a preferred embodiment of the invention, the conveying mechanism comprises two limiting rods, two fixing plates, a threaded rod, a tray and a second motor, the two fixing plates are arranged and are respectively connected with the limiting rods and the threaded rod, the second motor is arranged at the back of the shaper body, the power output end of the second motor is connected with the threaded rod, the threaded rod is in threaded connection with the tray, and the limiting rods are in sliding connection with the tray.

As a preferred embodiment of the invention, two limiting plates are installed at the inner top of the shaping machine body, a fixing frame is arranged in the middle of the first motor, the fixing frame extends into the two limiting plates and is connected with limiting rings, limiting columns are vertically installed inside the limiting plates, and the limiting columns are connected with the limiting rings in a sliding manner.

Compared with the prior art, the invention has the following beneficial effects:

(1) according to the invention, before a suitable crucible is polished, the suitable crucible is placed on a conveying mechanism, the conveying mechanism is driven to move by a motor, the quartz crucible is sent into a shaper body, a clamp is moved downwards by an air cylinder and is supported to two sides from the inside of the quartz crucible by two arc-shaped clamping plates on the clamp, after the support is finished, the conveying mechanism is retracted, the motor is started to drive the clamp to rotate, the crucible is moved downwards at the same time, the lower end of the crucible is attached to a polishing cylinder for polishing, the polishing plate is pushed out by the air cylinder, the outer wall of the crucible is polished, after the polishing is finished, the clamp is moved upwards and is placed on the conveying mechanism for sending out.

(2) The polishing barrel is driven by the motor to rotate when polishing, the polishing is divided into two sections, the polishing barrel and the crucible are led to rotate when polishing is started, the rotating speed is adjusted through the transmission mechanism, the polishing barrel and the crucible rotate reversely after polishing, the rotating speed is adjusted through the transmission mechanism, differential polishing is achieved, and polishing quality is improved.

Drawings

FIG. 1 is a structural view of an outer surface shaping machine system of a vertical three-layer quartz crucible according to the present invention;

FIG. 2 is a view showing the internal structure of the outer surface shaping machine system of the vertical three-layer type quartz crucible of the present invention;

FIG. 3 is a block diagram of the clamping mechanism of the present invention;

fig. 4 is a structural view of the jig of the present invention.

In the figure, 1, a shaper body; 2. a window; 3. a conveying mechanism; 4. a limiting rod; 5. a tray; 6. a first motor; 7. a clamp; 8. a limiting plate; 9. a first cylinder; 10. a second motor; 11. a second air cylinder; 12. polishing the barrel; 13. a third air cylinder; 14. a push rod; 15. a fixing ring; 16. a third motor; 17. a transmission pipe; 18. a transmission rod; 19. a bull gear; 20. a pinion gear; 21. a gas showerhead; 22. grinding the plate; 23. a limiting ring; 24. a limiting column; 25. a connecting rod; 26. a conductive slip ring; 27. a fixing box; 28. a nut; 29. a splint; 30. a limiting strip; 31. a movable rod; 32. a screw; 33. a fourth motor; 34. a transmission gear.

Detailed Description

The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.

Referring to fig. 1-4, the present invention provides a technical solution: a vertical three-layer quartz crucible outer surface shaper system, comprising: the plastic shaping machine comprises a shaping machine body 1, a polishing mechanism, a clamping mechanism, a conveying mechanism 3 and a transmission mechanism, wherein the front surface of the shaping machine body 1 is hinged with two windows 2, the clamping mechanism is arranged at the inner top of the shaping machine body 1, the shaping machine body 1 is of an L-shaped structure, the middle part of the shaping machine body is horizontally provided with the conveying mechanism 3, a partition plate is horizontally arranged below the inner part of the shaping machine body 1 and is divided into a polishing bin and a power bin through the partition plate, the polishing mechanism is arranged in the polishing bin and is positioned below the clamping mechanism, and the transmission mechanism is arranged in the power bin;

the clamping mechanism comprises a first motor 6, a first cylinder 9 and a clamp 7, the first cylinder 9 is installed in the middle of the top surface of the shaping machine body 1, the output end of the first cylinder 9 extends downwards into the shaping machine body 1 and is fixedly connected with the first motor 6, a connecting rod 25 is installed on the power output end of the first motor 6, the clamp 7 is installed at the lower end of the connecting rod 25, a conductive sliding ring 26 is sleeved on the connecting rod 25, and power is supplied to a fourth motor 33 through the conductive sliding ring 26;

grinding machanism is including polishing a section of thick bamboo 12, two 11 and the board 22 of polishing of cylinder, two 11 installs in the both sides of trimmer body 1 and power take off end extend to in the storehouse of polishing and be connected with the board 22 of polishing, a section of thick bamboo 12 of polishing is installed on the baffle and is located anchor clamps 7 under, the chamber of polishing the same with quartz crucible appearance is seted up to the top surface of a section of thick bamboo 12 of polishing, the crucible lower extreme stretches into the intracavity of polishing and polishes, the jet-propelled head 21 is installed respectively to the bottom surface of board 22 of polishing, release the board 22 of polishing to outside a section of thick bamboo 12 of polishing after polishing the completion, and spout high-pressure gas in to a section of thick bamboo 12 of polishing through jet-propelled head 21, clean a section of thick bamboo 12 inner wall of polishing, conveniently polish next time.

In a further improvement, as shown in fig. 3-4: anchor clamps 7 are including fixed box 27, and the inside both sides of fixed box 27 are provided with movable rod 31 respectively, and the tip of movable rod 31 extends and end connection has splint 29 to the outer level of fixed box 27, and splint 29's radian is the same with quartz crucible inner wall radian and is provided with the rubber slipmat on the surface outward, and the rubber slipmat plays the protective effect, avoids the fish tail crucible, increases frictional force simultaneously, and it is more convenient fixed with the crucible. The movable rod 31 is tubulose and is located the inside one end of fixed box 27 and installs nut 28, and the top surface of movable rod 31 is provided with spacing 30, and the lateral wall of fixed box 27 and the junction top of movable rod 31 seted up with spacing 30 cooperation spacing groove that uses, play spacing effect to movable rod 31. The inside level of fixed box 27 is provided with screw rod 32, and the both ends of screw rod 32 extend to respectively in the movable rod 31 and with nut 28 threaded connection, still install motor four 33 in the fixed box 27, and drive gear 34 is installed respectively in the power take off of motor four 33 and the middle part of screw rod 32, and two drive gear 34 meshing are connected, and motor four 33 drives screw rod 32 and rotates, and nut 28 receives to rotate the screw thread influence and outwards releases movable rod 31.

Further improved, as shown in fig. 2: the transmission mechanism comprises a third air cylinder 13, a third motor 16 and two transmission rods 18, wherein one transmission rod 18 is positioned in the middle of the power bin, the upper end of the transmission rod 18 is connected with the polishing barrel 12, the lower end of the transmission rod is rotatably connected with the bottom in the power bin, a transmission pipe 17 is sleeved on the surface of the other transmission rod 18, the lower end of the transmission rod 18 is connected with the power output end of the third motor 16, the upper end of the transmission rod is rotatably connected with the partition plate, the polishing barrel 12 is transmitted through the transmission mechanism, the polishing barrel 12 is driven to rotate through the motor while polishing, the polishing is divided into a forward section and a reverse section, the rotating speed is adjusted through the transmission mechanism, differential polishing is achieved, and polishing quality is improved. The outer walls of a transmission rod 18 and a transmission pipe 17 which are positioned in the middle of the power bin are both provided with a large gear 19 and a small gear 20, the positions of the large gear 19 and the small gear 20 on the transmission rod 18 are opposite to the positions of the large gear 19 and the small gear 20 on the transmission pipe 17, the middle of the transmission pipe 17 is provided with a fixing ring 15, the side wall of the fixing ring 15 is fixed with a push rod 14 which is of an L-shaped structure, the end part of the push rod 14 is connected with the power output end of a cylinder III 13, the cylinder III 13 is fixed on a partition plate, and speed change is performed through connection of the large gear 20 and the small gear 20.

Further improved, as shown in fig. 2: conveying mechanism 3 includes gag lever post 4, the fixed plate, the threaded rod, tray 5 and two 10 motors, the fixed plate sets up two altogether and is connected with gag lever post 4 and threaded rod respectively, two 10 motors are installed at the back of trimmer body 1 and power take off end is connected with the threaded rod, threaded rod and 5 threaded connection of tray, gag lever post 4 and 5 sliding connection of tray will adapt to the crucible and place and carry on tray 5, the standing groove of undercut is seted up at the surperficial middle part of tray 5.

Specifically, two limiting plates 8 are installed at the interior top of trimmer body 1, and the middle part of motor 6 sets up mount and extends to in two limiting plates 8 and connect spacing ring 23, and limiting plate 8's inside vertical installation has spacing post 24, spacing post 24 and spacing ring 23 sliding connection, and motor 6 drives the threaded rod and rotates to drive tray 5 removes.

When the invention is used, a crucible is placed on a conveying mechanism 3, the conveying mechanism 3 is driven by a motor to move, a quartz crucible is sent into a shaping machine body 1, a clamp 7 is moved downwards by an air cylinder and supported to two sides from the inside of the quartz crucible by two arc-shaped clamping plates 29 on the clamp 7, after the support is finished, the conveying mechanism 3 is retracted, the motor is started to drive the clamp 7 to rotate, the crucible is moved downwards, the lower end of the crucible is attached to a polishing cylinder 12 for polishing, the polishing plate 22 is pushed out by the air cylinder, the outer wall of the crucible is polished, the polishing cylinder 12 is driven by the motor to rotate while polishing, the polishing is divided into two sections, the polishing cylinder 12 and the crucible are led to rotate when the polishing is started, the rotating speed is adjusted by a transmission mechanism, the polishing cylinder 12 and the crucible are rotated reversely after the polishing, the rotating speed is adjusted by the transmission mechanism, realize the differential and polish, improve the quality of polishing, move up anchor clamps 7 after polishing the completion to place and send out on conveying mechanism 3 can.

Finally, it should be noted that: although the present invention has been described in detail with reference to the foregoing embodiments, it will be apparent to those skilled in the art that changes may be made in the embodiments and/or equivalents thereof without departing from the spirit and scope of the invention. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims

1. A vertical three-layer quartz crucible outer surface shaper system, comprising: trimmer body (1), grinding machanism, fixture, conveying mechanism (3) and drive mechanism, the front surface hinged joint of trimmer body (1) has two windows (2), its characterized in that: the clamping mechanism is arranged at the inner top of the shaping machine body (1), the shaping machine body (1) is of an L-shaped structure, the middle part of the shaping machine body (1) is horizontally provided with the conveying mechanism (3), a partition plate is horizontally arranged below the inner part of the shaping machine body (1) and is divided into a polishing bin and a power bin through the partition plate, the polishing mechanism is arranged in the polishing bin and is positioned below the clamping mechanism, and the transmission mechanism is arranged in the power bin;

the clamping mechanism comprises a first motor (6), a first air cylinder (9) and a clamp (7), the first air cylinder (9) is installed in the middle of the top surface of the shaping machine body (1), the output end of the first air cylinder extends downwards into the shaping machine body (1) and is fixedly connected with the first motor (6), a connecting rod (25) is installed on the power output end of the first motor (6), the clamp (7) is installed at the lower end of the connecting rod (25), and a conductive sliding ring (26) is sleeved on the connecting rod (25);

the polishing mechanism comprises a polishing cylinder (12), a second cylinder (11) and a polishing plate (22), the second cylinder (11) is installed on two sides of the trimmer body (1), a power output end extends into a polishing bin and is connected with the polishing plate (22), the polishing cylinder (12) is installed on a partition plate and is located right below the clamp (7), a polishing cavity with the same shape as the quartz crucible is formed in the top surface of the polishing cylinder (12), and air injection heads (21) are installed on the bottom surface of the polishing plate (22) respectively;

the clamp (7) comprises a fixed box (27), two movable rods (31) are respectively arranged on two sides in the fixed box (27), the end parts of the movable rods (31) horizontally extend out of the fixed box and are connected with clamping plates (29), the radian of each clamping plate (29) is identical to that of the inner wall of the quartz crucible, and rubber anti-skid pads are arranged on the outer surfaces of the clamping plates;

the movable rod (31) is tubular, a nut (28) is mounted at one end of the movable rod (31) positioned in the fixed box, a limiting strip (30) is arranged on the top surface of the movable rod (31), and a limiting groove matched with the limiting strip (30) for use is formed in the side wall of the fixed box (27) and above the joint of the side wall and the movable rod (31);

the inside level of fixed box (27) is provided with screw rod (32), the both ends of screw rod (32) extend respectively to in movable rod (31) and with nut (28) threaded connection, still install motor four (33) in fixed box (27), drive gear (34) are installed respectively to the power take off of motor four (33) and the middle part of screw rod (32), and two drive gear (34) meshing connection.

2. The system of claim 1, wherein the system comprises: the transmission mechanism comprises a cylinder III (13), a motor III (16) and two transmission rods (18), wherein one transmission rod (18) is positioned in the middle of the power bin, the upper end of the transmission rod is connected with the polishing barrel (12), the lower end of the transmission rod is rotatably connected with the bottom in the power bin, a transmission pipe (17) is sleeved on the surface of the other transmission rod (18), the lower end of the transmission rod (18) is connected with the power output end of the motor III (16), and the upper end of the transmission rod is rotatably connected with the partition plate.

3. The system of claim 2, wherein the system comprises: all install gear wheel (19) and pinion (20) on the outer wall of transfer line (18) that is located the power storehouse middle part and transmission pipe (17), gear wheel (19) and pinion (20) on transfer line (18) and the position of gear wheel (19) and pinion (20) on transmission pipe (17) are opposite, the mid-mounting of transmission pipe (17) has solid fixed ring (15), be fixed with push rod (14) that are L type structure on solid fixed ring (15) lateral wall, the tip of push rod (14) is connected with the power take off of cylinder three (13), cylinder three (13) are fixed on the baffle.

4. The system of claim 1, wherein the system comprises: conveying mechanism (3) include gag lever post (4), fixed plate, threaded rod, tray (5) and motor two (10), the fixed plate sets up two altogether and is connected with gag lever post (4) and threaded rod respectively, motor two (10) are installed at the back and the power take off end of trimmer body (1) and are connected with the threaded rod, threaded rod and tray (5) threaded connection, gag lever post (4) and tray (5) sliding connection.

5. The system of claim 1, wherein the system comprises: two limiting plates (8) are installed at the interior top of trimmer body (1), the middle part of motor (6) sets up mount and extends to in two limiting plates (8) and connect spacing ring (23), the vertical spacing post (24) of installing in inside of limiting plate (8), spacing post (24) and spacing ring (23) sliding connection.