CN113328651A - Deformation scale based on piezoelectric drive and deformation method - Google Patents
Deformation scale based on piezoelectric drive and deformation method Download PDFInfo
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- 230000007246 mechanism Effects 0.000 claims abstract description 40
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- 229920000049 Carbon (fiber) Polymers 0.000 claims description 10
- 239000004917 carbon fiber Substances 0.000 claims description 10
- 230000005540 biological transmission Effects 0.000 claims description 9
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 claims description 9
- 238000006073 displacement reaction Methods 0.000 claims description 8
- 238000009434 installation Methods 0.000 claims description 6
- 229920001721 polyimide Polymers 0.000 claims description 5
- 239000003365 glass fiber Substances 0.000 claims description 4
- 229910000831 Steel Inorganic materials 0.000 claims description 3
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- 238000010586 diagram Methods 0.000 description 4
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- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
- H02N2/001—Driving devices, e.g. vibrators
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- H—ELECTRICITY
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- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
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Abstract
The invention discloses a piezoelectric drive-based deformable scale and a deformation method, wherein the deformable scale comprises a scale unit, a base, a piezoelectric driver and a flexible spherical four-bar linkage; one end of the piezoelectric driver is connected with one end of the base, the other end of the piezoelectric driver is connected with one end of the flexible spherical four-bar linkage mechanism, and the other end of the flexible spherical four-bar linkage mechanism is connected with the other end of the base; the middle part of the flexible spherical four-bar linkage mechanism is fixedly connected to one surface of the scale unit. The artificial scale is combined with the deformation mechanism to be a deformable scale, so that the selective reflectivity, flexibility, stealth performance and the like of common scales are enhanced, the controllable single-degree-of-freedom swinging of rigid scales with special functions can be realized, and a plurality of scales can be arranged in an array mode according to requirements to form a skin, a reflection array and the like which can be deformed locally in a plane.
Description
Technical Field
The invention relates to the technical field of micro deformation mechanisms, in particular to a deformation scale based on piezoelectric driving and a deformation method.
Background
The scale is a hard sheet structure derived from the surface of the skin of some animals, such as the scale and feather belonging to the scale of animals, which has the protection function and special function, and the structure similar to the scale is added on the surface of some objects in the industrial production, such as the surface of vehicles, the surface of airplanes, the surface of some fixed equipment and the like, and the functions of protecting equipment, selectively reflecting, hiding and the like can be realized by adding the scale. At present, the artificial scale in the prior art does not have the characteristic of controllable deformation, so that the application of the artificial scale has partial limitation.
Disclosure of Invention
Aiming at the defects in the prior art, the invention provides a piezoelectric-drive-based deformable scale and a deformation method, wherein the artificial scale is combined with a deformation mechanism to form the deformable scale so as to enhance the selective reflectivity, flexibility, stealth performance and the like of common scales, can be used for realizing the controllable single-degree-of-freedom swing of rigid scales with special functions, and can be used for arraying a plurality of scales in a designed manner according to requirements to form a skin, a reflection array and the like which can be locally deformed in a plane.
In order to achieve the purpose, the invention provides a deformation scale based on piezoelectric driving, which comprises a scale unit, a base, a piezoelectric driver and a flexible spherical four-bar linkage;
one end of the piezoelectric driver is connected with one end of the base, the other end of the piezoelectric driver is connected with one end of the flexible spherical four-bar linkage mechanism, and the other end of the flexible spherical four-bar linkage mechanism is connected with the other end of the base;
the middle part of the flexible spherical four-bar linkage mechanism is fixedly connected to one surface of the scale unit.
In one embodiment, the flexible spherical four-bar linkage comprises a first rigid plate, a second rigid plate, a third rigid plate and a fourth rigid plate, wherein the first rigid plate, the second rigid plate and the fourth rigid plate are all flat plates, and the third rigid plate is a U-shaped plate;
one end of the first rigid plate is connected with the piezoelectric driver, the other end of the first rigid plate is connected with one end of the second rigid plate through a flexible film, and the other end of the second rigid plate is connected with one U-shaped vertical side plate of the third rigid plate through a flexible film;
one end of the fourth rigid plate is connected with the base, and the other end of the fourth rigid plate is connected with the other U-shaped vertical side plate of the third rigid plate through a flexible film;
and the U-shaped bottom edge plate of the third rigid plate is connected with the scale unit.
In one embodiment, the number of the flexible films is one;
one end of the flexible film is positioned in the first rigid plate, and the other end of the flexible film sequentially penetrates through the second rigid plate and the third steel plate and then is positioned in the fourth rigid plate.
In one embodiment, the flexible spherical four-bar linkage further comprises a fifth rigid plate and a sixth rigid plate;
the fifth rigid plate and the sixth rigid plate are connected to two ends of a U-shaped bottom edge plate on the third rigid plate, and the fifth rigid plate and the sixth rigid plate are connected with the scale units.
In one embodiment, the first rigid plate, the second rigid plate, the third rigid plate, the fourth rigid plate, the fifth rigid plate, and the sixth rigid plate are each a rigid carbon fiber sheet;
the flexible film is a flexible polyimide film.
In one embodiment, the base is of a groove-shaped frame structure, one end of the base is integrally formed with the fourth rigid plate, and the other end of the base is provided with a clamping groove;
the first rigid plate is provided with an installation through hole corresponding to the position of the piezoelectric actuator, one end of the piezoelectric actuator is connected to the clamping groove in a lap joint mode, and the other end of the piezoelectric actuator is embedded into the installation through hole.
In one embodiment, the piezoelectric actuator is formed by compounding a PZT-5H piezoelectric sheet, a carbon fiber sheet and glass fiber.
In order to achieve the above object, the present invention further provides a method for controllably deforming a deformed scale based on piezoelectric actuation, comprising the following steps:
step 1, adjusting a threshold value of a swing angle of a scale unit;
step 2, adjusting the frequency of an external input signal to change the swinging frequency of the scale unit mechanism;
and 3, adjusting the types of external input signals to obtain the deformed scales with different swing patterns.
In one embodiment, step 1 specifically includes:
step 1.1, adjusting the length proportion of each rigid plate in the flexible spherical four-bar linkage mechanism to change the transmission ratio of the flexible spherical four-bar linkage mechanism;
step 1.2, adjusting parameters of the piezoelectric driver to change a vibration output displacement threshold value of the piezoelectric driver;
and step 1.3, adjusting the amplitude of the external input signal.
In one embodiment, the external input signal is a continuous ac signal or a dc bias signal or a step signal.
The deformation scale and the deformation method based on piezoelectric driving provided by the invention have the following beneficial technical effects:
1. the flexible spherical four-bar mechanism is adopted, so that the energy loss and the motion resistance caused by contact friction of the revolute pair under small size are reduced, and the flexibility and the transmission efficiency of the bar mechanism are improved;
2. the main body of the flexible spherical four-bar mechanism is made of carbon fiber materials with high strength and light weight, so that the load of a carrier can be greatly reduced on the premise of realizing the same function;
3. the parameters of the flexible spherical four-bar linkage mechanism are convenient to adjust, and the multiple deformation scales are arrayed on the surface of the carrier, input parameters are adjusted, the combination of multiple deformation arrays is generated, and reflection at different directions and angles or skin in different deformation forms can be realized.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the structures shown in the drawings without creative efforts.
FIG. 1 is an isometric view of a deformed scale in an embodiment of the invention;
FIG. 2 is a cross-sectional view of a deformed scale in an embodiment of the present invention;
FIG. 3 is an isometric view of a base and flexible spherical four-bar linkage structure in an embodiment of the invention;
FIG. 4 is an isometric view of a piezoelectric actuator in an embodiment of the invention;
FIG. 5 is a cross-sectional view of a piezoelectric actuator in an embodiment of the invention;
FIG. 6 is a top view of a piezoelectric actuator in an embodiment of the invention;
fig. 7 is a schematic diagram of an array arrangement manner of a plurality of deformed scales in the embodiment of the present invention.
FIG. 8 is a simplified link structure diagram of the scale of the present invention;
FIG. 9 is a schematic diagram illustrating the clockwise rotation of the simplified linkage of the present embodiment;
fig. 10 is a schematic diagram of the counterclockwise rotation of the simplified link in this embodiment.
Reference numerals: the scale unit 10, the base 20, the clamping groove 201, the hollowed groove 202, the piezoelectric actuator 30, the first connector 301, the second connector 302, the first rigid plate 401, the second rigid plate 402, the third rigid plate 403, the fourth rigid plate 404, the fifth rigid plate 405, the sixth rigid plate 406, the flexible film 407, and the installation through hole 408.
The implementation, functional features and advantages of the objects of the present invention will be further explained with reference to the accompanying drawings.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
It should be noted that all the directional indicators (such as up, down, left, right, front, and rear … …) in the embodiment of the present invention are only used to explain the relative position relationship between the components, the movement situation, etc. in a specific posture (as shown in the drawing), and if the specific posture is changed, the directional indicator is changed accordingly.
In addition, the descriptions related to "first", "second", etc. in the present invention are only for descriptive purposes and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one such feature. In the description of the present invention, "a plurality" means at least two, e.g., two, three, etc., unless specifically limited otherwise.
In the present invention, unless otherwise expressly stated or limited, the terms "connected," "secured," and the like are to be construed broadly, and for example, "secured" may be a fixed connection, a removable connection, or an integral part; the connection can be mechanical connection, electrical connection, physical connection or wireless communication connection; they may be directly connected or indirectly connected through intervening media, or they may be connected internally or in any other suitable relationship, unless expressly stated otherwise. The specific meanings of the above terms in the present invention can be understood by those skilled in the art according to specific situations.
In addition, the technical solutions in the embodiments of the present invention may be combined with each other, but it must be based on the realization of those skilled in the art, and when the technical solutions are contradictory or cannot be realized, such a combination of technical solutions should not be considered to exist, and is not within the protection scope of the present invention.
Fig. 1-6 show a deformable scale based on piezoelectric actuation according to the present embodiment, which includes a scale unit 10, a base 20, a piezoelectric actuator 30, and a flexible spherical four-bar linkage. Specifically, one end of the piezoelectric actuator 30 is connected to one end of the base 20, the other end of the piezoelectric actuator 30 is connected to one end of the flexible spherical four-bar linkage mechanism, the other end of the flexible spherical four-bar linkage mechanism is connected to the other end of the base 20, and the middle portion of the flexible spherical four-bar linkage mechanism is fixedly connected to one surface of the scale unit 10. The piezoelectric driver 30 is configured to convert an electrical signal input from the outside into a vibrating displacement signal, and then transmit, amplify and output the displacement signal of the piezoelectric driver 30 as the swing of the scale unit 10 through the flexible spherical four-bar linkage.
In this embodiment, the artificial scale unit 10 is combined with the flexible spherical four-bar linkage to be a deformable scale, so as to enhance the selective reflectivity, flexibility, stealth performance and the like of the scale unit 10, and can be used for realizing controllable single-degree-of-freedom swing of the rigid scale unit 10 with special functions, and a plurality of scale units 10 can be arranged in an array manner according to requirements to form a skin, a reflective array and the like which can be deformed locally in a plane.
In this embodiment, the flexible spherical four-bar linkage includes a first rigid plate 401, a second rigid plate 402, a third rigid plate 403, and a fourth rigid plate 404. The first rigid plate 401, the second rigid plate 402, and the fourth rigid plate 404 are all flat plates, the third rigid plate 403 is a U-shaped plate, and the two U-shaped vertical side plates on the third rigid plate 403 have the same height. One end of the first rigid plate 401 is connected with the piezoelectric driver 30, the other end of the first rigid plate 401 is connected with one end of the second rigid plate 402 through the flexible film 407, and the other end of the second rigid plate 402 is connected with one U-shaped vertical side plate of the third rigid plate 403 through the flexible film 407; one end of the fourth rigid plate 404 is connected to the base 20, and the other end of the fourth rigid plate 404 is connected to the other U-shaped vertical side plate of the third rigid plate 403 through the flexible film 407; the U-shaped bottom plate of the third rigid plate 403 is connected to the scale unit 10. The connection between the rigid rods in the flexible spherical four-bar linkage mechanism adopts a flexible film 407 connection instead of the traditional low pair of surface contact, and the connection mode can effectively reduce the influence of friction force on the micro-motion system.
In this embodiment, the number of the flexible thin films 407 in the flexible spherical four-bar linkage is one, one end of the flexible thin film 407 is located in the first rigid plate 401, and the other end of the flexible thin film 407 sequentially passes through the second rigid plate 402 and the third steel plate and then is located in the fourth rigid plate 404, thereby ensuring the stability of the flexible spherical four-bar linkage in the transmission process.
In a preferred embodiment, the flexible spherical four-bar linkage further includes a fifth rigid plate 405 and a sixth rigid plate 406, the fifth rigid plate 405 and the sixth rigid plate 406 are connected to the third rigid plate 403 at two ends of the U-shaped bottom edge plate, and the fifth rigid plate 405 and the sixth rigid plate 406 are connected to the scale unit 10. So as to increase the contact area between the flexible spherical four-bar linkage mechanism and the scale unit 10 and improve the connection stability between the flexible spherical four-bar linkage mechanism and the scale unit 10.
In this embodiment, the first rigid plate 401, the second rigid plate 402, the third rigid plate 403, the fourth rigid plate 404, the fifth rigid plate 405, and the sixth rigid plate 406 are all rigid carbon fiber thin plates, and the flexible film 407 is a flexible polyimide film.
In this embodiment, the base 20 is a groove-shaped frame structure composed of a rigid thin plate, and is used to fix the relative positions of the flexible spherical four-bar linkage and the piezoelectric actuator 30. Specifically, one end of the base 20 and the fourth rigid board 404 are integrally formed, the other end is provided with a clamping groove 201, a mounting through hole 408 is formed in the first rigid board 401 at a position corresponding to the piezoelectric driver 30, one end of the piezoelectric driver 30 is provided with the first connecting member 301, and the other end is provided with the second connecting member 302. In a specific implementation process, one end of the piezoelectric driver 30 is fixedly overlapped on the card slot 201 through the first connecting piece 301 by being adhered with an adhesive, and the other end is embedded into the installation through hole 408 through the second connecting piece 302. Wherein, a plurality of hollowed-out grooves 202 are formed on the base 20 for providing attachment points for arranging the scale units 10 on the surface of the carrier, and reducing the weight.
In a preferred embodiment, the piezoelectric actuator 30 is a sandwich of two specifically shaped PZT-5H piezoelectric sheets 303 and a carbon fiber sheet 304, which function to provide a vibratory displacement input. Further preferably, glass fiber reinforced plates 305 are respectively arranged at two ends of the PZT-5H piezoelectric sheet 303 to increase the connection strength of the two ends of the piezoelectric actuator 30.
In this embodiment, the scale unit 10 is a thin plate whose surface is specially treated and which can absorb a specific wave band, and the external dimension of the scale unit is not fixed and can be adjusted according to specific requirements, and the scale unit is used for absorbing radar waves and serving as a stealth skin. The scale unit 10 has a single degree of freedom of rotation about the U-shaped bottom plate of the third rigid plate 403, and a plurality of kinds of deformation combination skins can be formed by arraying a plurality of deformation scales on the surface of the carrier in different directions. Referring to fig. 7, 9 deformed scales are arrayed according to a certain direction to form a skin part which can be deformed in a plane, and the deformation direction of each scale is well arranged by design.
Based on the above deformed scale based on piezoelectric driving, this embodiment further provides a controllable deformation method for the deformed scale, including the following steps:
step 1, adjusting a threshold value of a swing angle of the scale unit 10, specifically:
step 1.1, adjusting the length proportion of each rigid plate in the flexible spherical four-bar linkage mechanism to change the transmission ratio of the flexible spherical four-bar linkage mechanism;
step 1.2, adjusting parameters of the piezoelectric driver 30 to change a vibration output displacement threshold of the piezoelectric driver 30;
step 1.3, adjusting the amplitude of an external input signal;
step 2, adjusting the frequency of an external input signal to change the frequency of the swing of the scale unit 10 mechanism;
and 3, adjusting the types of external input signals, such as continuous alternating current signals, direct current offset, stepping signals and the like, so as to obtain the deformed scales with different swing patterns.
In step 1.1, the transmission ratio of the flexible spherical four-bar linkage mechanism is specifically as follows:
first, the variable scale is simplified to the linkage shown in fig. 8, where δ is the input, i.e., the vibration amplitude of the piezoelectric driver 30; thetaWIs the output, i.e. the rotation angle of the scale unit 10; l is1Height, L, of second rigid plate 4022、L4Two U-shaped vertical side plates of the third rigid plate 403 have a height, L3Two U-shaped bottom plate heights of the third rigid plate 403, wherein L2＝L4。
In the linkage shown in FIG. 8, when an input of delta magnitude is given, the mechanism will have an output angle change θWAs shown in fig. 9-10 below.
If the clockwise rotation angle of the link mechanism is positive and the input delta is positive when going downwards, the following geometric relation can be obtained:
L3 cosθ3-L1 sinθ1＝L3
L1 cosθ1+L3 sinθ3-δ＝L1
θ1+θ2＝θ3
variation of output angle of mechanism thetaWAnd angle theta3Equality, the following results can be obtained by using the above three simultaneous equations:
if the transmission ratio of the mechanism is the input displacement change in the output angle ratio, the transmission ratio of the link mechanism can be found as follows:
the deformed scale and the deforming method in the present embodiment will be further described below by specific examples.
The length proportion of each rigid plate of the flexible spherical four-bar linkage mechanism is designed to ensure that the transmission ratio of the flexible spherical four-bar linkage mechanism is 1rad/mm, and the materials of the flexible spherical four-bar linkage mechanism are 2 layers of rigid carbon fiber woven plates with the thickness of 100 micrometers, 1 layer of flexible polyimide films with the thickness of 8 micrometers and 2 layers of polymeric resin adhesives (used for curing the carbon fibers and the polyimide films) with the thickness of 8 micrometers. The piezoelectric actuator 30 is designed such that the output displacement threshold of the piezoelectric actuator 30 toward the end of the first rigid plate 401 is ± 600 μm, and the material of the piezoelectric actuator 30 is selected from two trapezoidal PZT-5H piezoelectric sheets with a thickness of 100 μm, a layer of carbon fiber prepreg (conductive) with a thickness of 30 μm, and two layers of glass fiber (insulating) with a thickness of 100 μm. And adjusting an external input signal, and giving two paths of sinusoidal alternating current signals with the amplitude of 250V (the threshold value of the input signal of the piezoelectric driver 30), the frequency of 15Hz and the phase difference of 180 degrees, wherein the most-shaped scale unit 10 swings at the frequency of 15Hz within the swinging range of +/-34 degrees.
The above description is only a preferred embodiment of the present invention, and is not intended to limit the scope of the present invention, and all modifications and equivalents of the present invention, which are made by the contents of the present specification and the accompanying drawings, or directly/indirectly applied to other related technical fields, are included in the scope of the present invention.
Claims (10)
1. A deformation scale based on piezoelectric drive is characterized by comprising a scale unit, a base, a piezoelectric driver and a flexible spherical four-bar linkage;
one end of the piezoelectric driver is connected with one end of the base, the other end of the piezoelectric driver is connected with one end of the flexible spherical four-bar linkage mechanism, and the other end of the flexible spherical four-bar linkage mechanism is connected with the other end of the base;
the middle part of the flexible spherical four-bar linkage mechanism is fixedly connected to one surface of the scale unit.
2. The piezoelectric-drive-based deformable scale of claim 1, wherein the flexible spherical four-bar linkage comprises a first rigid plate, a second rigid plate, a third rigid plate and a fourth rigid plate, wherein the first rigid plate, the second rigid plate and the fourth rigid plate are all planar plates, and the third rigid plate is a U-shaped plate;
one end of the first rigid plate is connected with the piezoelectric driver, the other end of the first rigid plate is connected with one end of the second rigid plate through a flexible film, and the other end of the second rigid plate is connected with one U-shaped vertical side plate of the third rigid plate through a flexible film;
one end of the fourth rigid plate is connected with the base, and the other end of the fourth rigid plate is connected with the other U-shaped vertical side plate of the third rigid plate through a flexible film;
and the U-shaped bottom edge plate of the third rigid plate is connected with the scale unit.
3. The piezoelectrically actuated deformable flake of claim 2 wherein said flexible membrane is one in number;
one end of the flexible film is positioned in the first rigid plate, and the other end of the flexible film sequentially penetrates through the second rigid plate and the third steel plate and then is positioned in the fourth rigid plate.
4. The piezoelectric-drive-based deformable scale of claim 2, wherein the flexible spherical four-bar linkage further comprises a fifth rigid plate and a sixth rigid plate;
the fifth rigid plate and the sixth rigid plate are connected to two ends of a U-shaped bottom edge plate on the third rigid plate, and the fifth rigid plate and the sixth rigid plate are connected with the scale units.
5. The piezoelectric-drive-based deformable flake of claim 4, wherein the first, second, third, fourth, fifth and sixth rigid plates are each a rigid carbon fiber sheet;
the flexible film is a flexible polyimide film.
6. The piezoelectric-driven deformable flake according to any one of claims 2 to 5, wherein the base is a groove-shaped frame structure, one end of the base is integrally formed with the fourth rigid plate, and the other end of the base is provided with a clamping groove;
the first rigid plate is provided with an installation through hole corresponding to the position of the piezoelectric actuator, one end of the piezoelectric actuator is connected to the clamping groove in a lap joint mode, and the other end of the piezoelectric actuator is embedded into the installation through hole.
7. The piezoelectric-driven deformable flake of any one of claims 1 to 5, wherein the piezoelectric driver is formed by compounding PZT-5H piezoelectric sheets, carbon fiber sheets and glass fibers.
8. A method for the controlled deformation of deformed scales based on piezoelectric actuation according to any one of claims 1 to 7, characterized by comprising the following steps:
step 1, adjusting a threshold value of a swing angle of a scale unit;
step 2, adjusting the frequency of an external input signal to change the swinging frequency of the scale unit mechanism;
and 3, adjusting the types of external input signals to obtain the deformed scales with different swing patterns.
9. The method of controllable deformation according to claim 8, wherein step 1 specifically comprises:
step 1.1, adjusting the length proportion of each rigid plate in the flexible spherical four-bar linkage mechanism to change the transmission ratio of the flexible spherical four-bar linkage mechanism;
step 1.2, adjusting parameters of the piezoelectric driver to change a vibration output displacement threshold value of the piezoelectric driver;
and step 1.3, adjusting the amplitude of the external input signal.
10. A method according to claim 8, wherein the external input signal is a continuous ac signal or a dc bias signal or a step signal.
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Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE19743658A1 (en) * | 1997-10-02 | 1999-04-08 | Abb Research Ltd | Fiber optic voltage sensor for outdoor high voltage systems |
| CN106081104A (en) * | 2016-07-20 | 2016-11-09 | 上海交通大学 | A kind of insecticide yardstick Piezoelectric Driving flapping-wing MAV |
| CN106160565A (en) * | 2016-08-17 | 2016-11-23 | 上海交通大学 | High-precision micro linear electric motors based on Piezoelectric Driving |
| JP2018174620A (en) * | 2017-03-31 | 2018-11-08 | セイコーエプソン株式会社 | Piezoelectric drive device, piezoelectric motor, robot, electronic component transfer device and printer |
| CN109050911A (en) * | 2018-07-24 | 2018-12-21 | 东南大学 | A kind of processing method of multiple degrees of freedom driving type piezoelectric actuator micro flapping wing air vehicle and its transmission mechanism |
-
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- 2021-07-14 CN CN202110796304.3A patent/CN113328651B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE19743658A1 (en) * | 1997-10-02 | 1999-04-08 | Abb Research Ltd | Fiber optic voltage sensor for outdoor high voltage systems |
| CN106081104A (en) * | 2016-07-20 | 2016-11-09 | 上海交通大学 | A kind of insecticide yardstick Piezoelectric Driving flapping-wing MAV |
| CN106160565A (en) * | 2016-08-17 | 2016-11-23 | 上海交通大学 | High-precision micro linear electric motors based on Piezoelectric Driving |
| JP2018174620A (en) * | 2017-03-31 | 2018-11-08 | セイコーエプソン株式会社 | Piezoelectric drive device, piezoelectric motor, robot, electronic component transfer device and printer |
| CN109050911A (en) * | 2018-07-24 | 2018-12-21 | 东南大学 | A kind of processing method of multiple degrees of freedom driving type piezoelectric actuator micro flapping wing air vehicle and its transmission mechanism |
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