CN113310422B - Measuring device and measuring method for workpiece feature spacing - Google Patents
Measuring device and measuring method for workpiece feature spacing Download PDFInfo
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- CN113310422B CN113310422B CN202110860676.8A CN202110860676A CN113310422B CN 113310422 B CN113310422 B CN 113310422B CN 202110860676 A CN202110860676 A CN 202110860676A CN 113310422 B CN113310422 B CN 113310422B
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- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/14—Measuring arrangements characterised by the use of optical techniques for measuring distance or clearance between spaced objects or spaced apertures
Abstract
The invention discloses a measuring device and a measuring method for characteristic spacing of workpieces, belonging to the technical field of geometric measurement, wherein the device comprises a spherical measurer and a measuring bracket, wherein the measurer is arranged beside a workpiece to be measured, the measuring bracket is movably connected with the measurer through a measuring seat, and the measurer can rotate on the measuring seat for 360 degrees; the measurer comprises a spherical shell which is a transparent glass body, a spherical optical sensor module, a three-axis tilt angle sensor, a processor and a display panel; the invention also provides a method for measuring the characteristic distance of the workpiece, which solves the problems that the three-dimensional coordinate of the geometric center of each measuring position is obtained through the three-dimensional coordinate of the center of each measuring position or the fitting of a plurality of edge points with non-collinear edges, and the distance between the measuring positions is obtained through calculation according to the three-dimensional coordinate.
Description
Technical Field
The invention belongs to the technical field of geometric quantity measurement, and particularly relates to a device and a method for measuring a workpiece characteristic interval.
Background
The machined workpiece generally includes features such as holes, grooves, bosses and the like, and the distances between the features need to be controlled during machining to meet precision requirements, for example, the distances between hole series, the distances between holes and grooves, the distances between holes and bosses and the like, and if the distances do not meet the requirements, the machined workpiece cannot be used and is discarded.
The distance measurement method in the prior art has various methods, and measurement is usually performed by using a measuring tape and a caliper, but for a complex workpiece comprising a plurality of features, other features may be included between two features to be measured, for example, a boss is arranged between two holes to block the unavailable measuring tool, and for example, the distance between the hole and the boss is measured, and the distance between the hole and the boss cannot be measured by using the measuring tool because a reference surface is difficult to find between the hole and the boss. The common method for measuring the distance also comprises a vision measurement method, the workpiece is photographed to acquire an image of the workpiece, and a characteristic outline is obtained through image processing, so that the characteristic coordinate calculation characteristic distance is obtained.
Disclosure of Invention
Aiming at the defects in the prior art, the device and the method for measuring the workpiece characteristic distance solve the problems that the three-dimensional coordinate of the geometric center of each measuring position is obtained through the fitting of the three-dimensional coordinate at the center of each measuring position or a plurality of edge points with non-collinear edges, and the distance between the measuring positions is obtained through calculation according to the three-dimensional coordinate.
In order to achieve the purpose of the invention, the invention adopts the technical scheme that:
the invention provides a measuring device for the characteristic spacing of workpieces, which comprises a spherical measurer and a measuring bracket, wherein the measurer is arranged beside a workpiece to be measured, the measuring bracket is movably connected with the measurer through a measuring seat, and the measurer can rotate on the measuring seat for 360 degrees;
the measurer comprises a spherical shell of a transparent glass body, a spherical optical sensor module, a three-axis tilt angle sensor, a processor and a display panel;
the optical sensor module is arranged at the position of the spherical center in the spherical shell; the three-axis tilt angle sensor is arranged in the spherical shell; the display panel is embedded in the outer side surface of the spherical shell; the processor is arranged on the inner side surface of the spherical shell relative to the display panel.
The invention has the beneficial effects that: the measuring device for the workpiece characteristic interval provided by the invention has the advantages that the measurer rotates on the measuring seat for 360 degrees, the spherical shell is a transparent glass body, the influence on the emission and the receiving of the measuring light beam can be avoided, the measuring light beam can reach the measuring position, the measuring device obtains the three-dimensional coordinate of the geometric center of the measuring device through the non-collinear point at the center or a plurality of edges of the measuring position, the workpiece interval is obtained, the measuring distance is obtained according to the light intensity, the three-dimensional coordinate of the measuring point is calculated according to the angle information, the accuracy is high, and the anti-interference capability is strong.
Further, the optical sensor module comprises a light emitter and a light receiver, and the light emitter and the light receiver are separately arranged, or the light emitter and the light receiver are combined to form a measurement structure integrating emission and reception.
The beneficial effect of adopting the further scheme is as follows: the optical sensor module can emit measuring beams to a measuring position and receive the beams reflected by the measuring position of a measured workpiece, the emitted measuring beams can be various types of beams such as infrared light, laser light, visible light and the like, the optical sensor module comprises a light emitter and a light receiver, and the light emitter and the light receiver can be arranged in a split mode or combined to form a measuring structure integrating emitting and receiving.
Further, the optical sensor module is used for rotating with the measurer and emitting a measuring beam to a measuring position;
the three-axis tilt angle sensor is used for sensing the three-dimensional angle of the measurer;
the processor is used for calculating the three-dimensional angle variation of the measuring position relative to the initial zero position and calculating the incidence angle according to the three-dimensional angle variationαAnd according to the incident angleαCalculating to obtain the light intensity at the measuring positionI(ii) a The processor is used for measuring the light intensity at the position according to the measured light intensityICalculating distance datadAnd according to the three-dimensional angle variation and the distance datadCalculating three-dimensional coordinates at the center of the measuring position, and calculating the distance between the measuring positions according to a space coordinate distance formula, wherein the incident direction of the measuring beam corresponds to the incident angleα；
The display panel is used for displaying three-dimensional angles, three-dimensional angle variation and incident anglesαMeasuring the light intensity at the locationI、Distance datadAnd the distance between the measurement locations.
Adopt the aboveThe beneficial effects of the further scheme are as follows: the measuring device provided by the invention can emit measuring beams to a measuring position through the optical sensor module, obtain three-dimensional coordinates at the measuring position through the measurement of the three-axis tilt sensor, and calculate the three-dimensional angle variation and the incident angle of the measuring position relative to the initial zero position through the processorαMeasuring the light intensity at the locationIAnd distance datadAnd according to the three-dimensional angle variation and the distance datadThe distance between the measurement positions can be calculated, the three-dimensional angle measured by the three-axis tilt sensor and the three-dimensional angle variation and the incident angle can be calculated by the processorαMeasuring the light intensity at the locationI、Distance datadAnd the distances between the measurement positions are displayed on a display panel.
Further, the incident angleαThe expression of (a) is as follows:
wherein the content of the first and second substances,αwhich represents the angle of incidence,θ x representing the rotation of the triaxial tilt sensor along with the measurer and the initial coordinate systemXThe included angle of the axes is formed by the angle of the axes,θ y representing the rotation of the triaxial tilt sensor along with the measurer and the initial coordinate systemYThe included angle of the axes is formed by the angle of the axes,θ z representing the rotation of the triaxial tilt sensor along with the measurer and the initial coordinate systemZThe included angle of the axes is formed by the angle of the axes,gwhich represents the acceleration of the force of gravity,xrepresenting correspondence of three-dimensional coordinates of the location to be measuredXThe coordinates of the position of the object to be imaged,xrepresenting correspondence of three-dimensional coordinates of the location to be measuredYThe coordinates of the position of the object to be imaged,zrepresenting correspondence of three-dimensional coordinates of the location to be measuredZThe coordinates of the position of the object to be imaged,Ra rotation matrix representing the amount of change with respect to the three-dimensional angle.
The beneficial effect of adopting the further scheme is as follows: the incident angle of the measuring beam emitted by the optical sensor module corresponds to the incident directionαAngle of incidenceαThe three-dimensional coordinates of the measurement position can be determined from the incident angle, corresponding to the rotation matrix of the three-dimensional angle variation.
Further, the light intensity at the measuring positionIThe expression of (a) is as follows:
wherein the content of the first and second substances,cos(α) Indicating angle of incidenceαThe cosine value of (a) of (b),cos n (2. alpha.) denotes the angle between the incident direction and the reflected ray direction2αOf cosine valuesnTo the power of the above, the first order,na surface parameter indicative of the location of the measurement,C 0、C 1、C 2respectively representing a first measurement position surface constant, a second measurement position surface constant and a measurement position ambient light constant.
The beneficial effect of adopting the further scheme is as follows: the optical sensor module is based on the incident angle and the measuring positionαAnd measuring the position surface parameter and the ambient light parameter to determine the light intensity at the measuring position.
Further, the distance datadThe expression of (a) is as follows:
wherein r denotes a radius of the optical sensor module,cos(α) Indicating angle of incidenceαThe cosine value of (a) of (b),cos(2 α) shows the angle 2 between the incident direction and the reflected ray directionαThe value of the cosine is calculated,C 0 、C 1 respectively representing a first measurement position surface constant and a second measurement position surface constant,Erepresenting the total energy absorbed by the optical sensor module, A representing the area at the measurement location, 2LRepresenting the measurement beam propagation distance.
The beneficial effect of adopting the further scheme is as follows: providing the processor to absorb a total energy from the optical sensor moduleE、Angle of incidenceαMeasuring position surface parameters, measuring device radius and measuring beam incidence direction and reflection direction included angle to obtain distance datadThe method of (3).
The invention provides a method for measuring the characteristic spacing of a workpiece, which comprises the following steps:
s1, determining an initial zero position through a calibration measurer, and completing construction of an initial coordinate system;
s2, judging whether the measuring beam of the measurer is incident to the center of the measuring position, if so, entering the step S3, otherwise, entering the step S4;
s3, rotating the measurer to make the measuring beam incident to the center of each measuring position and read the three-dimensional angle variation and distance data calculated by the processor on the display paneldAnd according to the variation of each three-dimensional angle and the corresponding distance datadCalculating a first three-dimensional coordinate at the center of each measurement position by the processor, and entering step S5;
s4, rotating the measurer to make the measuring beam incident on several non-collinear edge points at the edge of each measuring position, and reading the three-dimensional angle variation and distance data calculated by the processor on the display paneldAnd according to the variation of each three-dimensional angle and the corresponding distance datadCalculating a second three-dimensional coordinate of each edge point of the measuring position by the processor, and entering step S6;
s5, according to the space coordinate distance calculation method and the first three-dimensional coordinate, the distance between the centers of the measurement positions is calculated by the processor and displayed on the display panel, and the measurement of the characteristic distance of the workpiece is completed;
and S6, performing shape fitting on the measurement positions according to the second three-dimensional coordinates to obtain three-dimensional coordinates at the center of the fitted shape, calculating the distance between the centers of the measurement positions through the processor according to the space coordinate distance calculation method and the three-dimensional coordinates at the center of the fitted curve, and displaying the distance on the display panel to finish the measurement of the characteristic distance of the workpiece.
The invention has the beneficial effects that: the measuring device can rotate 360 degrees, the measuring beam can reach a measuring position, each characteristic measuring position of a workpiece is measured by the optical sensor module to obtain distance data, the three-axis tilt angle sensor is used for measuring to obtain three-dimensional angle variation, the processor is used for calculating to obtain a three-dimensional coordinate of the center of the measured position, the processor is used for calculating to obtain the distance between each measuring position according to a space coordinate distance formula, non-collinear points at the edge of the measuring position can be measured for measuring the measuring position which is difficult to find at the center, the non-collinear points are used for carrying out shape fitting on the measuring position to obtain the three-dimensional coordinate of the center of the measuring position, and the processor is used for calculating to obtain the distance between the measuring position and another measuring position.
Further, S11, the center of the optical sensor module is set as the origin, and the longitudinal direction and the width direction of the workpiece are set as the originXShaft andYthe axis is perpendicular to the plane of the workpiece to be measuredZAxis, establishing a rectangular coordinate systemO-XYZ；
S12, byXAnd arranging a target in the axial direction, enabling a measuring beam to be incident on the target, reading a three-dimensional angle obtained by measuring by a triaxial tilt angle sensor on a display panel, zeroing the triaxial tilt angle sensor, calibrating an initial zero position, and completing construction of an initial coordinate system.
The beneficial effect of adopting the further scheme is as follows: and through the establishment of an initial coordinate system and the initial zero calibration, a reference coordinate system of three-dimensional angle variation is provided for calculating the three-dimensional coordinates of the measuring position.
Further, the expression of the first three-dimensional coordinates in said step S3 is as follows:
wherein the content of the first and second substances,dthe distance data is represented by a distance data,θ x representing the rotation of the triaxial tilt sensor along with the measurer and the initial coordinate systemXThe included angle of the axes is formed by the angle of the axes,θ y representing the rotation of the triaxial tilt sensor along with the measurer and the initial coordinate systemYThe included angle of the axes is formed by the angle of the axes,θ z representing the rotation of the triaxial tilt sensor along with the measurer and the initial coordinate systemZThe included angle of the axes is formed by the angle of the axes,Xrepresenting correspondence of three-dimensional coordinates of the location to be measuredXThe coordinates of the position of the object to be imaged,Yrepresenting correspondence of three-dimensional coordinates of the location to be measuredYThe coordinates of the position of the object to be imaged,Zrepresenting correspondence of three-dimensional coordinates of the location to be measuredZAnd (4) coordinates.
The beneficial effect of adopting the further scheme is as follows: a three-dimensional coordinate calculation method for calculating the center of a measurement position by using three-dimensional angle variation and distance data is provided.
Further, the expression of the distance at the center of each measurement position in step S5 is as follows:
wherein the content of the first and second substances,S o 1 o 2representing the distance between the center of the first measurement location and the center of the second measurement location,O 1indicating the center of the first measurement location,O 2indicating the center of the second measurement location,Xo 1representing correspondence of three-dimensional coordinates of first measuring positionX`The coordinates of the position of the object to be imaged,Xo 2representing correspondence of three-dimensional coordinates of second measuring positionX``The coordinates of the position of the object to be imaged,Yo 1representing correspondence of three-dimensional coordinates of first measuring positionY `The coordinates of the position of the object to be imaged,Yo 2representing correspondence of three-dimensional coordinates of second measuring positionY``The coordinates of the position of the object to be imaged,Zo 1representing correspondence of three-dimensional coordinates of first measuring positionZ`The coordinates of the position of the object to be imaged,Zo 2representing correspondence of three-dimensional coordinates of second measuring positionZ``And (4) coordinates.
The beneficial effect of adopting the further scheme is as follows: a space coordinate distance calculation method is provided for calculating the distance between the centers of two measurement locations.
Drawings
FIG. 1 is a front half-sectional view of an apparatus for measuring the pitch of features of a workpiece according to an embodiment of the present invention.
FIG. 2 is a right side view of an apparatus for measuring the pitch of features on a workpiece in an embodiment of the invention.
FIG. 3 is a left side cross-sectional view of an apparatus for measuring the pitch of features of a workpiece in an embodiment of the invention.
FIG. 4 is a schematic diagram of a measuring beam emitted by an optical sensor module according to an embodiment of the present invention.
Fig. 5 is a schematic diagram of the three-dimensional angle variation at the center of the measurement position according to the embodiment of the present invention.
FIG. 6 is a schematic diagram of a distance between centers of two measurement positions measured by a spatial distance calculation method according to an embodiment of the present invention.
Wherein: 1. a measuring support; 2. a spherical shell; 3. a measuring seat; 4. an optical sensor module; 5. a three-axis tilt sensor; 6. a processor; 7. a display panel.
Detailed Description
The following description of the embodiments of the present invention is provided to facilitate the understanding of the present invention by those skilled in the art, but it should be understood that the present invention is not limited to the scope of the embodiments, and it will be apparent to those skilled in the art that various changes may be made without departing from the spirit and scope of the invention as defined and defined in the appended claims, and all matters produced by the invention using the inventive concept are protected.
The invention provides a measuring technology for the measuring process of the characteristic distance of the complex workpiece, and compared with the situation that a boss and the like influence the distance measurement, the heavy calculation amount for changing the measuring position and fitting and measuring the shape of an object by utilizing deep learning is not needed for multiple times, the three-dimensional coordinate of the measuring position is obtained in the rotating measuring process of the measuring instrument by utilizing the three-dimensional angle variation and the distance data, and the distance between the measuring positions is obtained by calculating according to a space distance coordinate formula.
As shown in fig. 1, 2 and 3, in an embodiment of the present invention, the present invention provides a device for measuring a characteristic distance between workpieces, including a spherical measuring device disposed beside a workpiece to be measured, and a measuring bracket 1 movably connected to the measuring device through a measuring base 3, wherein the measuring device rotates 360 degrees on the measuring base 3;
the measurer comprises a spherical shell 2 which is a transparent glass body, a spherical optical sensor module 4, a three-axis tilt angle sensor 5, a processor 6 and a display panel 7;
the optical sensor module 4 is arranged at the center of the sphere in the spherical shell 2; the three-axis tilt angle sensor 5 is arranged inside the spherical shell 2; the display panel 7 is embedded on the outer side surface of the spherical shell 2; the processor 6 is arranged on the inner side surface of the spherical shell 2 relative to the display panel 7;
the optical sensor module 4 comprises a light emitter and a light receiver, wherein the light emitter and the light receiver are arranged separately, or the light emitter and the light receiver are combined to form a measurement structure integrating emission and reception;
the optical sensor module 4 is used for rotating with the measurer and emitting a measuring beam to a measuring position;
the three-axis tilt angle sensor 5 is used for sensing a three-dimensional angle of the measurer;
the processor 6 is used for calculating the three-dimensional angle variation of the measuring position relative to the initial zero position and calculating the incidence angle according to the three-dimensional angle variationαAnd according to the incident angleαCalculating to obtain the light intensity at the measuring positionI(ii) a The processor 6 is used for measuring the light intensity at the position according to the measured light intensityICalculating distance datadAnd according to the three-dimensional angle variation and the distance datadCalculating three-dimensional coordinates at the center of the measuring position, and calculating the distance between the measuring positions according to a space coordinate distance formula, wherein the incident direction of the measuring beam corresponds to the incident angleα；
The display panel 7 is used for displaying three-dimensional angles, three-dimensional angle variation and incidence anglesαMeasuring the light intensity at the locationI、Distance datadAnd the distance between the measurement locations.
As shown in fig. 4 and 5, the incident angleαThe expression of (a) is as follows:
wherein the content of the first and second substances,αwhich represents the angle of incidence,θ x representing the rotation of the triaxial tilt sensor along with the measurer and the initial coordinate systemXThe included angle of the axes is formed by the angle of the axes,θ y representing the rotation of the triaxial tilt sensor along with the measurer and the initial coordinate systemYThe included angle of the axes is formed by the angle of the axes,θ z representing the rotation of the triaxial tilt sensor along with the measurer and the initial coordinate systemZThe included angle of the axes is formed by the angle of the axes,gwhich represents the acceleration of the force of gravity,xrepresenting correspondence of three-dimensional coordinates of the location to be measuredXThe coordinates of the position of the object to be imaged,xrepresenting correspondence of three-dimensional coordinates of the location to be measuredYThe coordinates of the position of the object to be imaged,zrepresenting correspondence of three-dimensional coordinates of the location to be measuredZThe coordinates of the position of the object to be imaged,Ra rotation matrix representing the amount of change with respect to the three-dimensional angle.
As shown in fig. 4, the light intensity at the measurement positionIThe expression of (a) is as follows:
wherein the content of the first and second substances,cos(α) Indicating angle of incidenceαThe cosine value of (a) of (b),cos n (2 α) shows the angle 2 between the incident direction and the reflected ray directionαOf cosine valuesnTo the power of the above, the first order,na surface parameter indicative of the location of the measurement,C 0、C 1、C 2respectively representing the surface constant of the first measurement position and the second measurementPosition surface constant, measurement position ambient light constant.
The distance datadThe expression of (a) is as follows:
wherein the content of the first and second substances,rwhich represents the radius of the optical sensor module, cos(α) Indicating angle of incidenceαThe cosine value of (a) of (b),cos(2. alpha.) denotes the angle between the incident direction and the reflected ray direction2αThe value of the cosine is calculated,C 0 、C 1 respectively representing a first measurement position surface constant and a second measurement position surface constant,Erepresenting the total energy absorbed by the optical sensor module,Adenotes the area at the measurement position, 2LRepresenting the measurement beam propagation distance.
In another embodiment of the present invention, the present invention provides a method for measuring a feature pitch of a workpiece, comprising the steps of:
s1, determining an initial zero position through a calibration measurer, and completing construction of an initial coordinate system;
s2, judging whether the measuring beam of the measurer is incident to the center of the measuring position, if so, entering the step S3, otherwise, entering the step S4;
s3, rotating the measurer to make the measuring beam incident to the center of each measuring position, and reading the three-dimensional angle variation and distance data calculated by the processor 6 on the display panel 7dAnd according to the variation of each three-dimensional angle and the corresponding distance datadCalculating by the processor 6 to obtain first three-dimensional coordinates at the center of each measurement position, and proceeding to step S5;
s4, rotating the measurer to make the measuring beam incident on several non-collinear edge points at the edge of each measuring position, and reading the three-dimensional angle variation and distance data calculated by the processor 6 on the display panel 7dAnd according to the variation of each three-dimensional angle and the corresponding distance datadCalculating by the processor 6 to obtain a second three-dimensional coordinate of the edge point of each measurement position, and entering step S6;
s5, according to the space coordinate distance calculation method and the first three-dimensional coordinate, the distance between the centers of the measurement positions is calculated by the processor 6 and displayed on the display panel 7, and the measurement of the workpiece characteristic distance is completed;
and S6, performing shape fitting on the measurement positions according to the second three-dimensional coordinates to obtain three-dimensional coordinates at the center of the fitted shape, calculating by the processor 6 to obtain the distance between the centers of the measurement positions according to the space coordinate distance calculation method and the three-dimensional coordinates at the center of the fitted curve, and displaying on the display panel 7 to complete the measurement of the workpiece characteristic distance.
The step S1 includes the following steps:
s11, setting the center of the optical sensor module 4 as the origin and the length direction and the width direction of the workpiece as the originXShaft andYthe axis is perpendicular to the plane of the workpiece to be measuredZAxis, establishing a rectangular coordinate systemO-XYZ；
S12, byXAnd arranging a target in the axial direction, enabling a measuring beam to be incident on the target, reading a three-dimensional angle obtained by measurement of the three-axis tilt angle sensor 5 on the display panel 7, zeroing the three-axis tilt angle sensor, calibrating an initial zero position, and completing construction of an initial coordinate system.
As shown in fig. 5, the expression of the first three-dimensional coordinates in said step S3 is as follows:
wherein the content of the first and second substances,dthe distance data is represented by a distance data,θ x representing the rotation of the triaxial tilt sensor along with the measurer and the initial coordinate systemXIncluded angle of axis，θ y Representing the rotation of the triaxial tilt sensor along with the measurer and the initial coordinate systemYThe included angle of the axes is formed by the angle of the axes,θ z representing the rotation of the triaxial tilt sensor along with the measurer and the initial coordinate systemZThe included angle of the axes is formed by the angle of the axes,Xrepresenting correspondence of three-dimensional coordinates of the location to be measuredXThe coordinates of the position of the object to be imaged,Yrepresenting correspondence of three-dimensional coordinates of the location to be measuredYThe coordinates of the position of the object to be imaged,Zrepresenting correspondence of three-dimensional coordinates of the location to be measuredZAnd (4) coordinates.
In one practical example of the present invention, as shown in fig. 6, the measuring device is rotated until the measuring beams are incident on two measuring positions O, respectively1(Xo 1,Yo 1,Zo 1) And O2(Xo 2,Yo 2,Zo 2) Respectively obtaining coordinate systemsO-X`Y`Z`And a coordinate systemO-X``Y` `Z``And respectively obtaining three-dimensional angle variation of the rotation measurer twice by using the three-axis tilt sensor, and obtaining the three-dimensional angle variation according to the three-dimensional angle rotation matrix and the distance data measured by the optical sensor moduleO 1AndO 2calculating three-dimensional space coordinates in a space coordinate system by using a space coordinate distance formula and three-dimensional coordinates at the centers of the two measuring positions to obtain the distance between the centers of the two measuring positions;
the expression of the pitch at the center of each measurement position in step S5 is as follows:
wherein the content of the first and second substances,S o 1 o 2representing the distance between the center of the first measurement location and the center of the second measurement location,O 1indicating the center of the first measurement location,O 2indicating the center of the second measurement location,Xo 1representing correspondence of three-dimensional coordinates of first measuring positionX`The coordinates of the position of the object to be imaged,Xo 2representing correspondence of three-dimensional coordinates of second measuring positionX``The coordinates of the position of the object to be imaged,Yo 1representing correspondence of three-dimensional coordinates of first measuring positionY `The coordinates of the position of the object to be imaged,Yo 2representing correspondence of three-dimensional coordinates of second measuring positionY``The coordinates of the position of the object to be imaged,Zo 1representing correspondence of three-dimensional coordinates of first measuring positionZ`The coordinates of the position of the object to be imaged,Zo 2representing correspondence of three-dimensional coordinates of second measuring positionZ``And (4) coordinates.
It is worth noting that the center of the measuring position mentioned in the scheme can be easily obtained according to elementary mathematical knowledge, for example, three non-collinear points at the edge of a circle can confirm the position of the center of the circle in space, the radius of the circle and the vector direction in space, so that the shape fitting of the measuring position is realized, and the three-dimensional coordinate of the center of the measuring position is obtained.
Claims (5)
1. The device for measuring the characteristic spacing of the workpieces is characterized by comprising a spherical measurer and a measuring support (1), wherein the measurer is arranged beside the workpiece to be measured, the measuring support is movably connected with the measurer through a measuring seat (3), and the measurer rotates on the measuring seat (3) for 360 degrees;
the measurer comprises a spherical shell (2) which is a transparent glass body, a spherical optical sensor module (4), a three-axis tilt angle sensor (5), a processor (6) and a display panel (7);
the optical sensor module (4) is arranged at the position of the spherical center in the spherical shell (2); the three-axis tilt angle sensor (5) is arranged in the spherical shell (2); the display panel (7) is embedded in the outer side surface of the spherical shell (2); the processor (6) is arranged on the inner side surface of the spherical shell (2) relative to the display panel (7);
the optical sensor module (4) comprises a light emitter and a light receiver which are arranged separately, or the light emitter and the light receiver are combined to form a measurement structure integrating emission and reception;
the optical sensor module (4) is used for rotating with the measurer and emitting a measuring beam to a measuring position;
the three-axis inclination angle sensor (5) is used for sensing the three-dimensional angle of the measurer;
the processor (6) is used for calculating the relative position of the measurementThree-dimensional angle variation of the initial zero position, and calculating to obtain an incident angle according to the three-dimensional angle variationαAnd according to the incident angleαCalculating to obtain the light intensity at the measuring positionI(ii) a The processor (6) is used for measuring the light intensity at the position according to the measured light intensityICalculating distance datadAnd according to the three-dimensional angle variation and the distance datadCalculating three-dimensional coordinates at the center of the measuring position, and calculating the distance between the measuring positions according to a space coordinate distance formula, wherein the incident direction of the measuring beam corresponds to the incident angleα；
The display panel (7) is used for displaying three-dimensional angles, three-dimensional angle variation and incidence anglesαMeasuring the light intensity at the locationI、Distance datadAnd the distance between the measurement locations;
the angle of incidenceαThe expression of (a) is as follows:
wherein the content of the first and second substances,αwhich represents the angle of incidence,θ x representing the rotation of the triaxial tilt sensor along with the measurer and the initial coordinate systemXThe included angle of the axes is formed by the angle of the axes,θ y representing the rotation of the triaxial tilt sensor along with the measurer and the initial coordinate systemYThe included angle of the axes is formed by the angle of the axes,θ z representing the rotation of the triaxial tilt sensor along with the measurer and the initial coordinate systemZThe included angle of the axes is formed by the angle of the axes,gwhich represents the acceleration of the force of gravity,xrepresenting correspondence of three-dimensional coordinates of the location to be measuredXThe coordinates of the position of the object to be imaged,yrepresenting correspondence of three-dimensional coordinates of the location to be measuredYThe coordinates of the position of the object to be imaged,zrepresenting correspondence of three-dimensional coordinates of the location to be measuredZThe coordinates of the position of the object to be imaged,Ra rotation matrix representing the amount of change with respect to the three-dimensional angle;
light intensity at the measuring positionIThe expression of (a) is as follows:
wherein the content of the first and second substances,cos(α) Indicating angle of incidenceαThe cosine value of (a) of (b),cos n (2. alpha.) denotes the angle between the incident direction and the reflected ray direction2αOf cosine valuesnTo the power of the above, the first order,na surface parameter indicative of the location of the measurement,C 0、C 1、C 2respectively representing a first measuring position surface constant, a second measuring position surface constant and a measuring position environment light constant;
the distance datadThe expression of (a) is as follows:
wherein r denotes a radius of the optical sensor module, cos(α) Indicating angle of incidenceαThe cosine value of (a) of (b),cos(2α) Indicating the angle 2 between the incident direction and the direction of the reflected lightαThe value of the cosine is calculated,C 0 、C 1 respectively representing a first measurement position surface constant and a second measurement position surface constant,Eindicating optical sensor module absorptionEnergy, A denotes the area at the measurement location, 2LRepresenting the measurement beam propagation distance.
2. A method for measuring a device for measuring a feature pitch of a workpiece, comprising the steps of:
s1, determining an initial zero position through a calibration measurer, and completing construction of an initial coordinate system;
s2, judging whether the measuring beam of the measurer is incident to the center of the measuring position, if so, entering the step S3, otherwise, entering the step S4;
s3, rotating the measurer to make the measuring beam incident to the center of each measuring position, and reading the three-dimensional angle variation and distance data calculated by the processor (6) on the display panel (7)dAnd according to the variation of each three-dimensional angle and the corresponding distance datadCalculating a first three-dimensional coordinate at the center of each measuring position through the processor (6), and entering the step S5;
s4, rotating the measurer to make the measuring beam incident on several non-collinear edge points at the edge of each measuring position, and reading the three-dimensional angle variation and distance data calculated by the processor (6) on the display panel (7)dAnd according to the variation of each three-dimensional angle and the corresponding distance datadCalculating a second three-dimensional coordinate of the edge point of each measuring position through the processor (6), and entering the step S6;
s5, according to the space coordinate distance calculation method and the first three-dimensional coordinate, the distance between the centers of the measurement positions is calculated through the processor (6) and displayed on the display panel (7), and the measurement of the workpiece feature distance is completed;
s6, carrying out shape fitting on the measuring positions according to the second three-dimensional coordinates to obtain three-dimensional coordinates at the center of the fitted shape, calculating the distance between the centers of the measuring positions through the processor (6) according to the space coordinate distance calculation method and the three-dimensional coordinates at the center of the fitted curve, and displaying the distance on the display panel (7) to finish the measurement of the characteristic distance of the workpiece;
the device for measuring the characteristic spacing of the workpieces comprises a spherical measurer and a measuring support (1), wherein the measurer is arranged beside the workpieces to be measured, the measuring support is movably connected with the measurer through a measuring seat (3), and the measurer rotates on the measuring seat (3) for 360 degrees;
the measurer comprises a spherical shell (2) which is a transparent glass body, a spherical optical sensor module (4), a three-axis tilt angle sensor (5), a processor (6) and a display panel (7);
the optical sensor module (4) is arranged at the position of the spherical center in the spherical shell (2); the three-axis tilt angle sensor (5) is arranged in the spherical shell (2); the display panel (7) is embedded in the outer side surface of the spherical shell (2); the processor (6) is arranged on the inner side surface of the spherical shell (2) relative to the display panel (7);
the optical sensor module (4) comprises a light emitter and a light receiver which are arranged separately, or the light emitter and the light receiver are combined to form a measurement structure integrating emission and reception;
the optical sensor module (4) is used for rotating with the measurer and emitting a measuring beam to a measuring position;
the three-axis inclination angle sensor (5) is used for sensing the three-dimensional angle of the measurer;
the processor (6) is used for calculating the three-dimensional angle variation of the measuring position relative to the initial zero position and calculating the incidence angle according to the three-dimensional angle variationαAnd according to the incident angleαCalculating to obtain the light intensity at the measuring positionI(ii) a The processor (6) is used for measuring the light intensity at the position according to the measured light intensityICalculating distance datadAnd according to the three-dimensional angle variation and the distance datadCalculating three-dimensional coordinates at the center of the measuring position, and calculating the distance between the measuring positions according to a space coordinate distance formula, wherein the incident direction of the measuring beam corresponds to the incident angleα；
The display panel (7) is used for displaying three-dimensional angles, three-dimensional angle variation and incidence anglesαMeasuring the light intensity at the locationI、Distance datadAnd the distance between the measurement locations;
the above-mentionedAngle of incidenceαThe expression of (a) is as follows:
wherein the content of the first and second substances,αwhich represents the angle of incidence,θ x representing the rotation of the triaxial tilt sensor along with the measurer and the initial coordinate systemXThe included angle of the axes is formed by the angle of the axes,θ y representing the rotation of the triaxial tilt sensor along with the measurer and the initial coordinate systemYThe included angle of the axes is formed by the angle of the axes,θ z representing the rotation of the triaxial tilt sensor along with the measurer and the initial coordinate systemZThe included angle of the axes is formed by the angle of the axes,gwhich represents the acceleration of the force of gravity,xrepresenting correspondence of three-dimensional coordinates of the location to be measuredXThe coordinates of the position of the object to be imaged,yrepresenting correspondence of three-dimensional coordinates of the location to be measuredYThe coordinates of the position of the object to be imaged,zrepresenting correspondence of three-dimensional coordinates of the location to be measuredZThe coordinates of the position of the object to be imaged,Ra rotation matrix representing the amount of change with respect to the three-dimensional angle;
light intensity at the measuring positionIThe expression of (a) is as follows:
wherein the content of the first and second substances,cos(α) Indicating angle of incidenceαThe cosine value of (a) of (b),cos n (2. alpha.) denotes the angle between the incident direction and the reflected ray direction2αOf cosine valuesnTo the power of the above, the first order,ntable for indicating measuring positionThe parameters of the plane are set according to the standard,C 0、C 1、C 2respectively representing a first measuring position surface constant, a second measuring position surface constant and a measuring position environment light constant;
the distance datadThe expression of (a) is as follows:
wherein r denotes a radius of the optical sensor module, cos(α) Indicating angle of incidenceαThe cosine value of (a) of (b),cos(2α) Indicating the angle 2 between the incident direction and the direction of the reflected lightαThe value of the cosine is calculated,C 0 、C 1 respectively representing a first measurement position surface constant and a second measurement position surface constant,Erepresenting the total energy absorbed by the optical sensor module, A representing the area at the measurement location, 2LRepresenting the measurement beam propagation distance.
3. The method of claim 2, wherein the step S1 includes the steps of:
s11, setting the center of the optical sensor module (4) as the origin and the length direction and the width direction of the workpiece as the length direction and the width direction of the workpiece respectivelyXShaft andYthe axis is perpendicular to the plane of the workpiece to be measuredZAxis, establishing a rectangular coordinate systemO-XYZ；
S12, byXA target is arranged in the axial direction, a measuring beam is incident on the target, and a three-axis tilt sensor (5) on a display panel (7) is readAnd measuring the obtained three-dimensional angle, zeroing the three-axis tilt angle sensor, calibrating an initial zero position, and completing the construction of an initial coordinate system.
4. The method of measuring with the apparatus for measuring the pitch of workpiece features as set forth in claim 3, wherein the expression of the first three-dimensional coordinates in step S3 is as follows:
wherein the content of the first and second substances,dthe distance data is represented by a distance data,θ x representing the rotation of the triaxial tilt sensor along with the measurer and the initial coordinate systemXThe included angle of the axes is formed by the angle of the axes,θ y representing the rotation of the triaxial tilt sensor along with the measurer and the initial coordinate systemYThe included angle of the axes is formed by the angle of the axes,θ z representing the rotation of the triaxial tilt sensor along with the measurer and the initial coordinate systemZThe included angle of the axes is formed by the angle of the axes,Xrepresenting correspondence of three-dimensional coordinates of the location to be measuredXThe coordinates of the position of the object to be imaged,Yrepresenting correspondence of three-dimensional coordinates of the location to be measuredYThe coordinates of the position of the object to be imaged,Zrepresenting correspondence of three-dimensional coordinates of the location to be measuredZAnd (4) coordinates.
5. The method for measuring a device for measuring the pitch of a workpiece feature of claim 4, wherein the expression of the pitch at the center of each measurement position in step S5 is as follows:
wherein the content of the first and second substances,S o 1 o 2representing the distance between the center of the first measurement location and the center of the second measurement location,O 1indicating the center of the first measurement location,O 2indicating the center of the second measurement location,Xo 1representing correspondence of three-dimensional coordinates of first measuring positionX`The coordinates of the position of the object to be imaged,Xo 2representing correspondence of three-dimensional coordinates of second measuring positionX``The coordinates of the position of the object to be imaged,Yo 1representing correspondence of three-dimensional coordinates of first measuring positionY`The coordinates of the position of the object to be imaged,Yo 2representing correspondence of three-dimensional coordinates of second measuring positionY``The coordinates of the position of the object to be imaged,Zo 1representing correspondence of three-dimensional coordinates of first measuring positionZ `The coordinates of the position of the object to be imaged,Zo 2representing correspondence of three-dimensional coordinates of second measuring positionZ``And (4) coordinates.
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