CN113295734B - Microminiature sensor chip - Google Patents
Microminiature sensor chip Download PDFInfo
- Publication number
- CN113295734B CN113295734B CN202110459719.1A CN202110459719A CN113295734B CN 113295734 B CN113295734 B CN 113295734B CN 202110459719 A CN202110459719 A CN 202110459719A CN 113295734 B CN113295734 B CN 113295734B
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- shell
- sensor chip
- zirconia substrate
- positioning
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- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 claims abstract description 55
- 239000000758 substrate Substances 0.000 claims abstract description 28
- 239000010410 layer Substances 0.000 claims abstract description 11
- 239000011241 protective layer Substances 0.000 claims abstract description 10
- 239000011267 electrode slurry Substances 0.000 claims abstract description 5
- 238000009434 installation Methods 0.000 claims description 8
- 230000000149 penetrating effect Effects 0.000 claims description 6
- 239000000446 fuel Substances 0.000 description 4
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 4
- 238000001125 extrusion Methods 0.000 description 3
- 238000002485 combustion reaction Methods 0.000 description 2
- 230000017525 heat dissipation Effects 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 238000003825 pressing Methods 0.000 description 2
- 238000005452 bending Methods 0.000 description 1
- 230000003139 buffering effect Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000004134 energy conservation Methods 0.000 description 1
- 238000003912 environmental pollution Methods 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Measuring Oxygen Concentration In Cells (AREA)
Abstract
The miniature sensor chip comprises a zirconia substrate and a protective layer, wherein the protective layer is arranged on the upper side of one end of the zirconia substrate; the first sensor sheet and the second sensor sheet are arranged on the upper side of the other end of the zirconia substrate; the first sensing sheet and the second sensing sheet are printed by Pt electrode slurry; the zirconia substrate comprises a plate body, a mounting frame is embedded at the end part of the plate body, a positioning block is fixed at the end part of the plate body, and a guide pipe penetrates through the positioning block; the mounting frame comprises a shell, and the mounting cavity is concavely arranged in the shell from the top of the shell; the first positioning groove is concavely arranged at the bottom of the mounting cavity; the convex rib is arranged on the side wall of the mounting cavity in a protruding way; the convex rib comprises an inner supporting column, and the rubber shell is semi-cylindrical; the buffer layer is arranged between the rubber shell and the inner support column; the end block is of a quadrangular frustum pyramid structure; the end block is arranged at one end of the shell, which is far away from the first positioning groove; the fixing hole penetrates through the side wall of one end of the shell; the sensor chip can not generate position deviation when in use.
Description
Technical Field
The invention relates to the technical field of sensor chips, in particular to a microminiature sensor chip.
Background
At present, the sensor is a key sensing component in an electronic injection engine control system, and is a key part for controlling tail gas emission, reducing environmental pollution and improving the fuel combustion quality of the engine. The sensor with unqualified performance parameters is low in sensitivity and long in response time, and cannot provide an accurate feedback signal for the electronic control unit, so that the proportion of air and fuel in a fuel chamber of an engine cannot be accurately controlled, the highest combustion efficiency of the fuel cannot be achieved, and the social requirements of energy conservation and emission reduction cannot be met. The sensor core for the vehicle is mounted on the vehicle and travels with the vehicle. When the vehicle runs, vibration can be generated, the chip can vibrate together, and once the sensing piece of the chip is subjected to position deviation due to vibration, the detection precision is affected, and the normal use is affected.
Therefore, a micro sensor chip is needed, the sensor chip is firmly fixed, and the sensor chip cannot deviate due to vibration during use, so that normal use is ensured.
Disclosure of Invention
The invention aims to provide a microminiature sensor chip, which is used for solving the problem that the normal use is affected by position deviation of a sensor chip in the prior art.
In order to achieve the above purpose, the technical scheme of the invention is as follows:
a miniature sensor chip comprising a zirconia substrate, further comprising:
a protective layer provided on an upper side of one end of the zirconia substrate;
The first sensor sheet and the second sensor sheet are arranged on the upper side of the other end of the zirconia substrate; the first sensing sheet and the second sensing sheet are parallel to each other;
the first sensing piece and the second sensing piece are formed by printing Pt electrode slurry;
The zirconia substrate includes:
A plate body which is rectangular and thin plate-shaped;
The mounting frame is embedded at the end part of the plate body; the two mounting frames are arranged in parallel;
The positioning block is fixed at the end part of the plate body and is aligned with the mounting frame;
A guide tube penetrating into the setting block; the guide pipes are arranged along the axial direction of the positioning block;
The mounting frame includes:
A shell, which is rectangular parallelepiped-shaped;
The mounting cavity is concavely arranged in the shell inwards from the top of the shell;
the first positioning groove is concavely arranged at the bottom of the mounting cavity;
a rib protruding from a side wall of the installation cavity and extending in an axial direction of the installation cavity;
The rib comprises:
An inner support column which is semi-cylindrical;
a rubber shell which is semi-cylindrical and is covered on the outer side of the inner support column;
A buffer layer disposed between the rubber shell and the inner support column;
An end block which is a quadrangular frustum pyramid-shaped structure; the end block is arranged at one end of the shell, which is far away from the first positioning groove; a second positioning groove is concavely arranged between two adjacent end blocks;
and a fixing hole penetrating in a sidewall of an end of the case remote from the first positioning groove.
Preferably, the guide tube includes:
a connecting pipe which is an arc-shaped pipe; the connecting tube comprises a tube; a circular guide groove is concavely arranged on the outer wall of one end of the pipe;
A first pipe section which is tubular and screwed into one end of the connecting pipe;
and the second pipe section is round pipe-shaped and is screwed into the other end of the connecting pipe.
Preferably, the positioning block includes:
a body which is rectangular parallelepiped-shaped;
A guide hole, which is a circular hole penetrating in the body;
A locking ring screwed at the port of the guide hole.
Preferably, the locking ring comprises:
A ring body which is annular;
the guide rib is annular and integrally formed and is arranged on the inner wall of the ring body.
Preferably, the length of the zirconia substrate is 27 mm, the width of the zirconia substrate is 2.4mm, and the height of the zirconia substrate is 1.2 mm.
Preferably, the length of the protective layer is 2.8 mm, and the length of the second sensor chip is 2.3 mm.
The invention has the following advantages:
(1) The microminiature sensor chip has the advantages of no heater, simplified manufacturing process, reduced chip cost, small chip size, reduced installation space, reduced use cost, no reference air channel, increased chip strength, improved bending resistance, and more sensitive chip small reaction.
(2) One end of the first sensing piece and one end of the second sensing piece are fixed by the first positioning groove, and the other end of the first sensing piece and the other end of the second sensing piece are fixed by the end block. The lateral walls of the first sensing piece and the second sensing piece are fixed by the convex edges, so that the first sensing piece and the second sensing piece are ensured to be stably installed and are balanced in stress, and structural damage caused by vibration during use is avoided.
(3) Through rotating connecting pipe and second pipeline section, drive the lead wire rotation of wearing to establish in it to adjust the output direction of lead wire, thereby adjust target position and orientation with the lead wire in, be convenient for place the lead wire in a plurality of orientations and positions, satisfy the installation needs under the multiple installation condition.
Drawings
Fig. 1 is a schematic view of a miniature sensor chip of the present invention.
Fig. 2 is a schematic view of a zirconia substrate of the present invention.
Fig. 3 is a schematic view of a mounting frame of the present invention.
Fig. 4 is a schematic view of the positioning block of the present invention.
Fig. 5 is a schematic view of a guide tube of the present invention.
Fig. 6 is a schematic view of a rib of the present invention.
Fig. 7 is a schematic view of a positioning block of the present invention.
Fig. 8 is a schematic view of a locking ring of the present invention.
Fig. 9 is a schematic view of a connection tube of the present invention.
1-A protective layer; a 2-zirconia substrate; 21-a mounting frame; 211-shell; 212-a first positioning groove; 213-mounting cavity; 214-a rib; 2141-a rubber shell; 2142-a buffer layer; 2143-inner support posts; 215-end block; 216-fixing holes; 22-positioning blocks; 221-body; 222-a guide hole; 223-locking ring; 2231-ring; 2232-guide rib; 23-guiding tube; 2321-a tube; 2322-guide slots; 231-a first pipe section; 232-connecting pipes; 233-a second pipe section; 24-plate body; 3-a first sensor chip; and 4-a second sensor chip.
Detailed Description
The following examples are illustrative of the invention and are not intended to limit the scope of the invention.
Examples
In order that the manner in which the above-recited features, advantages, objects and advantages of the invention are obtained, a more particular description of the invention will be rendered by reference to specific embodiments thereof which are illustrated in the appended drawings.
The micro sensor chip of the present invention will be described in detail with reference to fig. 1 to 9.
Referring to fig. 1, the micro sensor chip of the present embodiment includes a zirconia substrate 2 and a protective layer 1, and the protective layer 1 is attached to an upper side of one end of the zirconia substrate 2. The first sensing piece 3 and the second sensing piece 4 are arranged on the upper side of the other end of the zirconia substrate 2, and the first sensing piece 3 and the second sensing piece 4 are parallel to each other. And the first sensing sheet 3 and the second sensing sheet 4 are printed by using Pt electrode slurry.
Referring to fig. 2, the zirconia substrate 2 includes a plate body 24, and the plate body 24 is a rectangular thin plate. The mounting frames 21 are embedded in the end portions of the plate body 24, and the two mounting frames 21 are arranged in parallel. The mounting frame 21 is rectangular parallelepiped. The positioning block 22 is rectangular parallelepiped, the positioning block 22 is fixed to an end of the plate 24 by adhesion, and the positioning block 22 and the mounting frame 21 are aligned in the axial direction of the plate 24. The guide tube 23 penetrates the positioning block 22, and the plurality of guide tubes 23 are arranged along the axial direction of the positioning block 22.
Referring to fig. 3, the mounting frame 21 includes a housing 211, and the housing 211 is rectangular parallelepiped. A mounting cavity 213 is recessed within the housing 211 from the top of the housing 211. The first positioning groove 212 is concavely formed at the bottom of the mounting cavity 213. The first positioning groove 212 is a rectangular groove. One end of the mounting cavity 213 is a V-shaped recess. The two first positioning grooves 212 are respectively concavely arranged in the two side walls of the V-shaped groove, and the two first positioning grooves 212 are symmetrical with respect to the transverse middle section of the mounting cavity 213.
When the sensor chip is used, the first sensor chip 3 and the second sensor chip 4 are printed by using Pt electrode slurry, namely the first sensor chip 3 and the second sensor chip 4 are integrally formed. The end of the first sensor piece 3 is tightly attached to the first positioning groove 212, and when the sensor piece 3 is installed and used, even if the sensor piece 3 is subjected to extrusion force in the longitudinal direction or vibration to shake, the two first positioning grooves 212 are respectively used for fixing the end of the sensor piece 3 from the upper side and the lower side, so that the balance is ensured when the end of the sensor piece 3 is subjected to acting force in the longitudinal direction, and the position deviation of the end of the sensor piece 3 fixed by the first positioning groove 212 can not occur.
The first positioning groove 212 is obliquely arranged relative to the height direction of the shell 211, the first sensing piece 3 and the first positioning groove 212 are in inclined surface contact, the acting force acting on the first sensing piece 3 can be decomposed along the contacted inclined surface to the vertical direction and the horizontal direction, and the fact that the acting force is too concentrated to cause large extrusion to the first sensing piece 3 to cause damage is avoided.
The inclination directions of the upper and lower first positioning grooves 212 are opposite, so that the acting force applied to the first sensing piece 3 by the first positioning groove 212 can be counteracted after being decomposed, the acting force obtained by longitudinal decomposition can be mutually counteracted, the stress balance is ensured, and the structural stability of the first sensing piece 3 after being installed is ensured.
Referring to fig. 6, a rib 214 is integrally formed to protrude on a side wall of the mounting cavity 213, and the rib 214 extends along an axial direction of the mounting cavity 213. The rib 214 includes an inner support post 2143, the inner support post 2143 being semi-cylindrical. Rubber casing 2141 is semi-cylindrical and rubber casing 2141 is housed outside of inner support column 2143. The cushioning layer 2142 is bonded between the rubber shell 2141 and the inner support columns 2143. The buffer layer 2142 is semicircular, and a plurality of buffer layers 2142 are distributed along the circumferential direction of the inner support columns 2143. A gap is left between the buffer layer 2142 and the rubber case 2141.
In use, rib 214 presses against the side walls of sensor chip one 3 and sensor chip two 4. The plurality of ribs 214 respectively press the first sensor chip 3 from two sides to fix the first sensor chip 3. The rubber shell 2141 is extruded on the outer wall of the first sensing piece 3, an arc-shaped heat dissipation groove 2144 is spirally and concavely arranged in the outer wall of the rubber shell 2141, and heat generated by the first sensing piece 3 during operation is dissipated from the heat dissipation groove 2144.
When the first sensing piece 3 extrudes the rubber shell 2141, the rubber shell 2141 extrudes the buffer layer 2142, and a gap is reserved between the buffer layer 2142 and the rubber shell 2141, so that the gap can play a good role in buffering, and structural damage of the buffer layer 2142 and the rubber shell 2141 caused by hard extrusion is avoided.
The end block 215 is a quadrangular frustum pyramid-like structure. An end block 215 is integrally formed at an end of the shell 211 facing away from the first detent 212. A second detent is recessed between two adjacent end blocks 215. A fixing hole 216 penetrates in a sidewall of an end of the housing 211 remote from the first positioning groove 212.
The second detent between two adjacent end blocks 215 is also quadrangular frustum-shaped. In use, the other end of sensor chip one 3 is in contact with end block 215. The two end blocks 215 adjacent in the longitudinal direction can apply pressing force to the end of the first sensor piece 3, and the applied pressing force is opposite in the longitudinal direction after being decomposed, so that the end of the first sensor piece 3 is clamped and fixed, and the end of the first sensor piece 3 is stably installed.
Referring to fig. 5, the guide tube 23 includes a connection tube 232, and the connection tube 232 is a circular arc-shaped tube. The connection pipe 232 includes a pipe 2321, and a circular guide groove 2322 is concavely provided in an outer wall of one end of the pipe 2321. The first pipe section 231 is circular pipe-shaped, and the first pipe section 231 is screwed into one end of the connection pipe 232. The second pipe section 233 is circular pipe-shaped, and the second pipe section 233 is screwed into the other end of the connection pipe 232. The lumens of the first tube segment 231, the connecting tube 232, and the second tube segment 233 are conductive.
Referring to fig. 7, the positioning block 22 includes a body 221, and the body 221 is rectangular parallelepiped. The guide hole 222 is a circular hole penetrating in the body 221. A locking ring 223 is screwed at the port of the guide hole 222. The locking ring 223 includes a ring body 2231, and the ring body 2231 is annular. Guide rib 2232 is annular and guide rib 2232 is integrally formed on the inner wall of ring 2231. Guide rib 2232 extends along the circumference of ring 2231.
In use, second tube segment 233 is inserted into guide hole 222 along the axial direction thereof, ring body 2231 is sleeved on the outer side of tube 2321, and guide rib 2232 slides in guide groove 2322. The lead wires connecting the first sensor chip 3 and the second sensor chip 4 penetrate into the first pipe section 231 and extend to the outside of the zirconia substrate 2 along the connection pipe 232 and the second pipe section 233.
Under different use scenes and installation conditions, the lead-out wires of the first sensor chip 3 and the second sensor chip 4 need to be arranged at different positions or led out in different directions so as to output collected information. In the present embodiment, the lead is directly led out from the first sensing piece 3 and the second sensing piece 4, and the lead is driven to rotate along with the second pipe section 233 by rotating the connecting pipe 232 and the second pipe section 233, so that the lead is adjusted to a target position and direction, and the lead is conveniently placed in a plurality of directions and positions.
The length of the zirconia substrate 2 was 27 mm, the width of the zirconia substrate 2 was 2.4 mm, and the height of the zirconia substrate 2 was 1.2 mm. The length of the protective layer 1 is 2.8 mm, and the length of the second sensing piece 4 is 2.3 mm.
While the invention has been described in detail in the foregoing general description and specific examples, it will be apparent to those skilled in the art that modifications and improvements can be made thereto. Accordingly, such modifications or improvements may be made without departing from the spirit of the invention and are intended to be within the scope of the invention as claimed.
Claims (6)
1. A miniature sensor chip comprising a zirconia substrate (2), further comprising:
a protective layer (1) provided on the upper side of one end of the zirconia substrate (2);
The first sensor chip (3) and the second sensor chip (4) are arranged on the upper side of the other end of the zirconia substrate (2); the first sensing sheet (3) and the second sensing sheet (4) are parallel to each other;
The first sensing sheet (3) and the second sensing sheet (4) are printed by Pt electrode slurry;
the zirconia substrate (2) comprises:
A plate body (24) which is rectangular and thin plate-shaped;
A mounting frame (21) which is embedded on the upper side of one end of the plate body (24); the two mounting frames (21) are arranged in parallel, and the first sensing piece (3) and the second sensing piece (4) are respectively arranged in the two mounting frames (21);
A positioning block (22) which is fixed to an end of one end of the plate body (24) and is aligned with the mounting frame (21) in the axial direction of the plate body (24);
a guide tube (23) which penetrates through the positioning block (22); the guide pipes (23) are arranged along the axial direction of the positioning block (22);
the mounting frame (21) includes:
a shell (211) which is rectangular parallelepiped-shaped;
a mounting cavity (213) recessed inwardly within the shell (211) from the top of the shell (211);
The first positioning groove (212) is concavely arranged at the bottom of the mounting cavity (213), and the end part of the first sensing piece (3) is tightly attached in the first positioning groove (212); the two first positioning grooves (212) are respectively used for fixing the end parts of the first sensor sheet (3) from the upper side and the lower side, the first positioning grooves (212) are obliquely arranged relative to the height direction of the shell (211), the first sensor sheet (3) is in oblique contact with the first positioning grooves (212), and the oblique directions of the upper and the lower first positioning grooves (212) are opposite;
a rib (214) which is provided on the side wall of the installation cavity (213) in a protruding manner and extends in the axial direction of the installation cavity (213);
The rib (214) comprises:
An inner support column (2143) which is semi-cylindrical;
a rubber case 2141 which is semi-cylindrical and is provided to cover the outer side of the inner support column 2143;
a buffer layer (2142) provided between the rubber case (2141) and the inner support column (2143);
An end block (215) that is a quadrangular frustum pyramid-shaped structure; the end block (215) is arranged at one end of the shell (211) which is far away from the first positioning groove (212); a second positioning groove is concavely arranged between two adjacent end blocks (215), and the other end of the first sensing piece (3) is contacted with the end blocks (215);
a fixing hole (216) penetrating in a side wall of one end of the housing (211) remote from the first positioning groove (212);
The plurality of ribs (214) respectively extrude the first sensing piece (3) from two sides so as to fix the first sensing piece (3); the rubber shell (2141) is extruded on the outer wall of the first sensing piece (3), and an arc-shaped radiating groove (2144) is spirally and concavely arranged in the outer wall of the rubber shell (2141);
The second detent between adjacent end blocks (215) is also quadrangular frustum-shaped.
2. The miniature sensor chip according to claim 1, wherein the guide tube (23) comprises:
A connection pipe (232) which is a circular arc-shaped pipe; the connection pipe (232) includes a pipe (2321); a circular guide groove (2322) is concavely arranged on the outer wall of one end of the tube (2321);
A first pipe section (231) which is tubular and screwed into one end of the connection pipe (232);
A second pipe section (233) which is circular pipe-shaped and screwed into the other end of the connection pipe (232).
3. The miniature sensor chip of claim 1, wherein the positioning block (22) comprises:
A body (221) that is rectangular parallelepiped-shaped;
A guide hole (222) which is a circular hole penetrating into the body (221);
a locking ring (223) screwed at the port of the guide hole (222).
4. The micro sensor chip of claim 3, wherein,
The locking ring (223) comprises:
-a ring body (2231) which is annular;
And a guide rib (2232) which is annular and integrally formed on the inner wall of the ring body (2231).
5. The miniature sensor chip according to claim 1, wherein the zirconia substrate (2) has a length of 27 mm, the zirconia substrate (2) has a width of 2.4 mm, and the zirconia substrate (2) has a height of 1.2 mm.
6. The miniature sensor chip of claim 1, wherein the length of the protective layer (1) is 2.8 mm and the length of the second sensor chip (4) is 2.3 mm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110459719.1A CN113295734B (en) | 2021-04-27 | 2021-04-27 | Microminiature sensor chip |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110459719.1A CN113295734B (en) | 2021-04-27 | 2021-04-27 | Microminiature sensor chip |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN113295734A CN113295734A (en) | 2021-08-24 |
| CN113295734B true CN113295734B (en) | 2024-07-26 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202110459719.1A Active CN113295734B (en) | 2021-04-27 | 2021-04-27 | Microminiature sensor chip |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN113295734B (en) |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CH255985A (en) * | 1946-07-11 | 1948-07-31 | Hofgaard Rolf | Card index. |
| CN101262210A (en) * | 2002-09-27 | 2008-09-10 | 英诺晶片科技股份有限公司 | Piezoelectric vibrator and fabricating method thereof |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH088293B2 (en) * | 1987-09-01 | 1996-01-29 | 住友電気工業株式会社 | Chip mounting device |
| CN101591875B (en) * | 2008-05-30 | 2013-05-22 | 郑丙林 | Digital coded track sleeper bearing plate and washer, sleeper bottom bearing plate and bearing plate sheet, nylon seat and washer seat |
| CN205103200U (en) * | 2015-11-09 | 2016-03-23 | 苏州工业园区福特斯汽车电子有限公司 | Piece formula oxygen sensor chip for motorcycle |
| KR101770965B1 (en) * | 2017-03-31 | 2017-08-24 | 주식회사 고령기와 | The Korean Lamination Female Roof tile of Applied lamination to Seismic Design |
| JP7126083B2 (en) * | 2017-04-20 | 2022-08-26 | 戸田建設株式会社 | sheet sensor |
| CN207902644U (en) * | 2018-01-17 | 2018-09-25 | 浙江朗德电子科技有限公司 | A kind of oxygen sensor of motorcycle |
| CN209167195U (en) * | 2018-10-25 | 2019-07-26 | 江苏惟哲新材料有限公司 | A kind of permanent protective property sheet type sensor |
| CN210401310U (en) * | 2019-08-02 | 2020-04-24 | 上海施迈尔精密陶瓷有限公司 | Ceramic part for automobile oxygen sensor |
-
2021
- 2021-04-27 CN CN202110459719.1A patent/CN113295734B/en active Active
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CH255985A (en) * | 1946-07-11 | 1948-07-31 | Hofgaard Rolf | Card index. |
| CN101262210A (en) * | 2002-09-27 | 2008-09-10 | 英诺晶片科技股份有限公司 | Piezoelectric vibrator and fabricating method thereof |
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| CN113295734A (en) | 2021-08-24 |
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