CN113295645A - Terahertz hybrid network detection chip based on clover type - Google Patents
Terahertz hybrid network detection chip based on clover type Download PDFInfo
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- CN113295645A CN113295645A CN202110549971.1A CN202110549971A CN113295645A CN 113295645 A CN113295645 A CN 113295645A CN 202110549971 A CN202110549971 A CN 202110549971A CN 113295645 A CN113295645 A CN 113295645A
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- 241000219793 Trifolium Species 0.000 title claims abstract description 23
- 238000001514 detection method Methods 0.000 title claims description 24
- 239000000463 material Substances 0.000 claims abstract description 14
- 239000000758 substrate Substances 0.000 claims abstract description 14
- 238000003491 array Methods 0.000 claims description 6
- 244000025254 Cannabis sativa Species 0.000 claims 1
- 238000012545 processing Methods 0.000 abstract description 4
- 230000035945 sensitivity Effects 0.000 abstract description 2
- 238000005516 engineering process Methods 0.000 description 6
- 239000007788 liquid Substances 0.000 description 5
- 238000011160 research Methods 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000010146 3D printing Methods 0.000 description 2
- 230000001174 ascending effect Effects 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical group [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000001802 infusion Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000004038 photonic crystal Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000002210 silicon-based material Substances 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
- G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
- G01N21/3581—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light using far infrared light; using Terahertz radiation
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
- G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
- G01N21/3577—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light for analysing liquids, e.g. polluted water
Abstract
The invention discloses a terahertz hybrid network chip based on a clover type, which comprises a circumferential array cylinder, a top cylindrical sample pool and a bottom hybrid network device, wherein the top cylindrical sample pool is arranged on the circumferential array cylinder; the circular array cylinder consists of an air hole area, a substrate material area and a central clover type sample pool unit area, wherein the air hole area comprises three layers which are distributed on the substrate material area in a mirror symmetry manner; the top cylindrical sample pool consists of a hollow cylinder embedded in the unit area of the central clover-type sample pool and a capping cylinder; the bottom mixing network device is formed by embedding a plurality of hollow cylindrical pipelines with the same inner diameter into a cuboid bottom plate, wherein two inlets and one outlet are formed by thin-wall cylindrical pipelines and are externally connected to the cuboid bottom plate. The invention has the characteristics of high sensitivity, easy processing and the like, and has wide application prospect in the fields of biochemistry and the like.
Description
Technical Field
The invention relates to a terahertz detection chip, in particular to a terahertz hybrid network detection chip based on a clover type.
Background
The terahertz wave is a section of electromagnetic wave region with the frequency of 0.1-10THz and the wavelength of 0.03-3mm and between the millimeter wave and the infrared ray. The development of the terahertz technology depends on the electronics science technology and the photonics science technology, terahertz waves are in the cross field of macroscopic electronics and microscopic photonics research, the terahertz wave research can be carried out from the electronics field and the photonics field, the blank area of an electromagnetic spectrum is filled, and the terahertz wave has very important scientific significance and research value. In practical application, different materials with different refractive indexes and resonance effect generated by terahertz waves are utilized, so that different responses of the terahertz waves are caused, a foundation is laid for further application of the terahertz waves, and the terahertz detection chip with good performance attracts attention of a large number of researchers.
The important role of terahertz detection chips in terahertz systems is that terahertz detection chips of different structures are proposed one after another. However, most of the existing terahertz detection chips have the defects of complex structure, low performance, high cost, difficult processing and the like, so that the terahertz detection chip which is simple in structure, low in cost and easy to manufacture has great significance in research.
Disclosure of Invention
In order to overcome the defects of the prior art, the invention provides the terahertz hybrid network detection chip based on the clover type, which has the advantages of simple structure, high sensing performance and easiness in processing.
In order to achieve the purpose, the invention adopts the following technical scheme:
the terahertz mixed network detection chip based on the clover type comprises a circumferential array cylinder I, a top cylindrical sample pool II and a bottom mixed network device III.
The circumferential array cylinder I comprises an air hole area 3, a substrate material area 4 and a central sample cell unit area 5; the air hole area 3 consists of 3 layers of 84 air holes distributed on the substrate material area 4, the first layer, the second layer and the third layer are respectively composed of two semi-annular air hole arrays which are arranged in mirror symmetry, a gap is reserved between two ends of the two semi-annular air hole arrays, the number of the air holes contained in the first layer, the second layer and the third layer of air holes is distributed in an equal difference mode, and the number of the air holes is respectively 22, 28 and 34; the central clover type sample pool unit area 5 is distributed in the first layer of air hole circular ring and is composed of four air holes in the shape of clover in mirror symmetry.
The top cylindrical sample cell II is formed by digging a hollow cylinder 7 with the depth of 3mm at the center of the circumferential array cylinder I, and placing a capping cylinder 6 to seal the hollow cylinder 7, so that each air column in the unit area 5 of the central clover-type sample cell can be filled with liquid.
The bottom mixing network device III comprises two inlets 8, two input channels 9, four mixing areas 10, an uplink infusion channel 11, a downlink liquid outlet channel 12, an output channel 13 and an outlet 14, all the parts are placed in a cuboid bottom plate and are channels for liquid to enter and exit the chip.
The above technical scheme can adopt the following preferred modes:
preferably, in the air hole region 3 of the circular array cylinder I, on the xoy plane, the arrangement of the air hole positions is expressed as: x (M, M) ═ aMcos (2M pi/6M), y (M, M) ═ aMsin (2M pi/6M), where a represents the lattice constant, M represents the number of layers of air hole units, M represents the number of air holes in one layer of air hole units, and satisfies 0. ltoreq. m.ltoreq.6M, x (M, M) is the x-axis coordinate of the mth air hole in the mth layer of air hole units, and y (M, M) is the y-axis coordinate of the mth air hole in the mth layer of air hole units.
Compared with the prior art, the invention has the following beneficial effects:
firstly, the invention can replace the silicon-based material with the common rigid photosensitive resin as the substrate material, use the mature and cheap 3D printing technology to replace the silicon etching technology to manufacture the detection chip, and print the detection chip by the rigid photosensitive resin material through the 3D printing technology, thereby obtaining the high-precision and high-performance device and simultaneously reducing the manufacturing cost. Secondly, the invention uses a larger sample cell design in the central clover type sample cell unit area, increases the action area of the terahertz waves and the sample, and can realize higher sensitivity. Thirdly, the detection chip has the advantages of high performance, easy processing, simple structure, convenient carrying and the like, and can play an important role in biological and chemical sensing terahertz application systems and the like.
Drawings
FIG. 1 is a schematic diagram of the present invention.
FIG. 2 is a schematic cross-sectional view of a circumferential array of cylinders in accordance with the present invention.
Fig. 3 is a right side view of the present invention.
Fig. 4 is a schematic diagram of a bottom hybrid network device of the present invention.
In the drawings, the components represented by the respective reference numerals are listed below:
i: a circumferential array cylinder; II: a top cylindrical sample cell; III: a bottom hybrid network device;
1: a signal input terminal; 2: a signal output terminal; 3: an air hole region; 4: a substrate material region;
5: a central clover-type sample cell unit area; 6: capping the cylinder; 7: a hollow cylinder;
8: two inlets (IN1, IN 2); 9: two input channels (first connected to IN1, second connected to IN 2);
10: a mixing zone; 11: an ascending transfusion channel; 12: a downward liquid outlet channel; 13: an output channel;
14: an Outlet (OUT).
Detailed Description
The invention is described in further detail below with reference to the accompanying drawings:
as shown in fig. 1 and fig. 2, the terahertz hybrid network detection chip based on the clover type of the present invention includes a circumferential array cylinder I, a top cylindrical sample cell II, and a bottom hybrid network device III, where the circumferential array cylinder I includes an air hole region 3, a substrate material region 4, and a central clover type sample cell unit region 5. The substrate material area 4 is the substrate of the whole terahertz detection chip, and the air hole area 3 and the central clover type sample cell unit area 5 are arranged on the substrate.
The air hole area 3 consists of 84 air holes which are arranged on the substrate material area 4 in 3 layers, the first layer, the second layer and the third layer are respectively composed of two semi-annular air hole arrays which are distributed in mirror symmetry, a gap is reserved between two ends of the two semi-annular air hole arrays, and the number of the air holes contained in the first layer, the second layer and the third layer of air holes is respectively 22, 28 and 34; the central clover type sample pool unit area 5 is distributed in the first layer of air hole circular ring and consists of four clover-shaped air holes. The central clover type sample pool unit area 5 is used for injecting samples to be tested with different refractive indexes.
In the terahertz detection chip, terahertz waves are input from a signal input end 1, enter a central clover type sample cell unit area 5 through a substrate material area 4 and an air hole area 3 in sequence, are output from a signal output end 2 through the air hole area 3 and the substrate material area 4 after being refracted by a sample in a sample cell, and the detection function of different sample refractive indexes in the central clover type sample cell unit area 5 is realized through the action of a photonic crystal structure of the air hole area 3 in the process.
As shown in the figures 1 and 3, the top cylindrical sample cell II consists of a capped cylinder 6 and a hollow cylinder 7, which are embedded in the center of the circumferential array cylinder I, and the purpose of the top cylindrical sample cell II is to ensure that each air hole in the central clover-type sample cell unit area 5 can be filled with the liquid to be detected.
As shown IN fig. 3 and 4, the bottom mixing network device III includes two inlets 8(IN1, IN2), two input channels 9 (r, r), a mixing region 10, an ascending liquid-feeding channel 11, a descending liquid-discharging channel 12, an output channel 13, and an outlet 14(OUT), all of which are disposed IN a rectangular bottom plate. The direction indicated by the arrow in fig. 3 is the flow direction of the sample to be tested inside the terahertz detection chip, and the direction indicated by the arrow in fig. 4 is the flow direction of the sample to be tested inside the bottom hybrid network device III.
Claims (4)
1. Terahertz mixes network detection chip now based on four leaf grass types, its characterized in that: the terahertz hybrid network detection chip comprises a circumferential array cylinder I, a top cylindrical sample cell II and a bottom hybrid network device III.
2. The terahertz hybrid network detection chip based on the clover type is characterized in that the circumferential array cylinder I comprises an air hole area 3, a substrate material area 4 and a central clover type sample cell unit area 5, the air hole area 3 of the circumferential array cylinder I has three layers, the first layer, the second layer and the third layer are respectively composed of two semi-annular air hole arrays distributed in mirror symmetry, a gap is reserved between two ends of the two semi-annular air hole arrays, the number of air holes contained in the first layer, the second layer and the third layer of air holes is distributed in an equal difference mode, and the same gap is reserved between every two air holes; the central clover type sample pool unit area 5 is distributed in the first layer of air hole circular ring and is composed of four air holes in the shape of clover in mirror symmetry.
3. The terahertz hybrid network detection chip based on the clover type as claimed in claim 1, wherein the top cylindrical sample cell II is a hollow cylinder 7 with a depth of 3mm dug at the center of the circumferential array cylinder I, and a capping cylinder 6 is placed to enclose the hollow cylinder 7.
4. The THz hybrid network detection chip based on clover type according to claim 1, wherein said bottom hybrid network device III comprises two inlets 8(IN1, IN2), two input channels 9, four mixing zones 10, one up feeding channel 11, one down feeding channel 12, one output channel 13 and one outlet 14(OUT), each part being placed IN a cuboid bottom plate.
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| Application Number | Priority Date | Filing Date | Title |
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| CN202110549971.1A CN113295645A (en) | 2021-05-20 | 2021-05-20 | Terahertz hybrid network detection chip based on clover type |
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| CN202110549971.1A CN113295645A (en) | 2021-05-20 | 2021-05-20 | Terahertz hybrid network detection chip based on clover type |
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2021
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Application publication date: 20210824 |