CN113279052A - Large-size single crystal pre-temperature-adjusting system and device thereof - Google Patents
Large-size single crystal pre-temperature-adjusting system and device thereof Download PDFInfo
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- CN113279052A CN113279052A CN202110450432.2A CN202110450432A CN113279052A CN 113279052 A CN113279052 A CN 113279052A CN 202110450432 A CN202110450432 A CN 202110450432A CN 113279052 A CN113279052 A CN 113279052A
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- 239000013078 crystal Substances 0.000 title claims abstract description 94
- 230000001360 synchronised effect Effects 0.000 claims abstract description 76
- 238000010899 nucleation Methods 0.000 claims abstract description 39
- 238000010438 heat treatment Methods 0.000 claims abstract description 31
- 238000001514 detection method Methods 0.000 claims abstract description 16
- 238000005338 heat storage Methods 0.000 claims description 39
- 238000003756 stirring Methods 0.000 claims description 11
- 230000001276 controlling effect Effects 0.000 claims description 9
- 238000005485 electric heating Methods 0.000 claims description 8
- 238000003466 welding Methods 0.000 claims description 7
- 230000001105 regulatory effect Effects 0.000 claims description 5
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 3
- 229910052802 copper Inorganic materials 0.000 claims description 3
- 239000010949 copper Substances 0.000 claims description 3
- 238000000034 method Methods 0.000 abstract description 7
- 239000007788 liquid Substances 0.000 abstract description 5
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract description 4
- 229910052710 silicon Inorganic materials 0.000 abstract description 4
- 239000010703 silicon Substances 0.000 abstract description 4
- 238000002425 crystallisation Methods 0.000 abstract description 3
- 230000008025 crystallization Effects 0.000 abstract description 3
- 238000005507 spraying Methods 0.000 abstract description 3
- 238000006073 displacement reaction Methods 0.000 description 4
- 239000002893 slag Substances 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000003111 delayed effect Effects 0.000 description 1
- 238000009795 derivation Methods 0.000 description 1
- 238000005381 potential energy Methods 0.000 description 1
- 238000005496 tempering Methods 0.000 description 1
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
- C30B15/20—Controlling or regulating
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
- C30B15/32—Seed holders, e.g. chucks
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/02—Elements
- C30B29/06—Silicon
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
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- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The invention discloses a large-size single crystal pre-temperature-adjusting system and a device thereof, and relates to the technical field of novel single crystal processing. The self-heating single crystal fixing device comprises a center carrying support and a self-heating single crystal fixing structure, wherein the bottom end of the center carrying support is fixedly connected with the self-heating single crystal fixing structure, the self-heating single crystal fixing structure is used for fixing seeding and adjusting temperature, and the self-heating single crystal fixing device also comprises an auxiliary automatic clamping structure. According to the invention, through the design of the carrying module of the detection control system, the corresponding pre-temperature regulation system is carried, so that the automatic pre-control temperature detection and pre-regulation in the single crystal processing process are automatically completed, the temperature regulation time is greatly saved, the yield is improved, and through the matching design of the self-heating single crystal fixing structure and the auxiliary automatic clamping structure, the device is convenient for completing the automatic clamping and clamping synchronous heating of the single crystal, and the risks of liquid level crystallization and silicon spraying caused by manual clamping seeding and overhigh or overlow given power for seeding and temperature finding are avoided.
Description
Technical Field
The invention relates to the technical field of novel single crystal processing, in particular to a large-size single crystal pre-temperature-regulating system and a device thereof.
Background
Along with the rapid development of the society, the market of the single crystal industry changes rapidly, and for increasing market competitiveness, the improvement of productivity and the control of non-silicon cost become important projects in the industry, wherein a large thermal field and large charging become the main direction for improving the productivity of the industry, but the defects existing in the single crystal processing process under the large-size large thermal field are that the temperature adjusting time is relatively increased, the temperature response is relatively lagged, the efficiency is lowered, and the risk of liquid level crystallization and silicon spraying is caused because the seeding is easy to lose or be overhigh in temperature due to the lack of automatic clamping and temperature rise of the seeding in the using process.
Disclosure of Invention
The invention aims to provide a large-size single crystal pre-temperature-adjusting system and a device thereof, which are used for solving the existing problems: however, the processing of single crystals under large-size and large-heat-field conditions has the disadvantages of relatively long temperature-adjusting time and relatively delayed temperature reaction, resulting in low efficiency.
In order to achieve the purpose, the invention provides the following technical scheme:
a large-size single crystal pre-temperature adjusting device: the self-heating single crystal fixing device comprises a center carrying support and a self-heating single crystal fixing structure, wherein the bottom end of the center carrying support is fixedly connected with the self-heating single crystal fixing structure, the self-heating single crystal fixing structure is used for fixing seeding crystals and adjusting temperature, the self-heating single crystal fixing structure further comprises an auxiliary automatic clamping structure, the auxiliary automatic clamping structure is fixed at one end of the center carrying support, and the auxiliary automatic clamping structure is used for automatically preventing falling off of the seeding crystals.
Preferably, the self-heating single crystal fixing structure comprises a single crystal assembling pipe, a heat storage output box body, an internally-installed positioning plate, an electric heating pipe, a heat storage leading-out block, a circulating heat leading-out connecting pipe and a heat storage inner groove, wherein the heat storage output box body is fixedly connected to one end of the single crystal assembling pipe, the internally-installed positioning plate is welded to the top end and the bottom end of the inner side of the heat storage output box body, the electric heating pipes are fixed between the internally-installed positioning plates, the heat storage leading-out block is fixedly connected to the top end and the bottom end of the heat storage output box body, the circulating heat leading-out connecting pipe is fixedly connected to the top end of the heat storage leading-out block, the heat storage inner groove is formed in the inner side of the single crystal assembling pipe, the circulating heat leading-out connecting pipe is welded to the inner side of the heat storage inner groove, and the heat storage leading-out block and the single crystal assembling pipe are made of copper.
Preferably, supplementary automatic chucking structure is including moving lead output structure, synchronous clamp output structure and anti-drop chucking structure, the one end fixedly connected with synchronous clamp output structure that moves lead output structure, the one end fixedly connected with anti-drop chucking structure of synchronous clamp output structure, it is used for power to provide to move lead output structure, the synchronous clamp output structure is used for coordinating to accomplish automatic centre gripping, anti-drop chucking structure is used for the anti-drop to injectd.
Preferably, move and lead output structure and including joining in marriage dress supporting baseplate, guide power piece, motor, output stirring gear and synchronous moving rack, the top and the bottom of guide power piece all weld and join in marriage dress supporting baseplate, screw fixedly connected with motor is passed through to the bottom of the one end of guide power piece, the output fixedly connected with output stirring gear of motor, the inside sliding connection that motor one end was kept away from to the guide power piece has synchronous moving rack, the one end and the output stirring gear meshing of synchronous moving rack are connected.
Preferably, the synchronous clamping output structure comprises an auxiliary guide sliding rod, a first synchronous shaft sleeve, a stressed driving push plate, a synchronous clamping push plate, a second synchronous shaft sleeve, a linkage clamping push plate, an internally-installed support rod and a stirring rotating shaft driving rod, wherein the auxiliary guide sliding rod is welded at one end of the assembling support base, the internally-installed support rod is welded at the inner side of one end of the auxiliary guide sliding rod, the first synchronous shaft sleeve is connected to the outer side of one side of the auxiliary guide sliding rod in a sliding manner, the stressed driving push plate is welded at one side of the first synchronous shaft sleeve, one end of the synchronous driving rack is connected with the stressed driving push plate in a welding manner, the synchronous clamping push plate is welded at the other side of the first synchronous shaft sleeve, the stirring rotating shaft driving rod is connected with the internally-installed support rod in a rotating manner, the second synchronous shaft sleeve is connected to the other side of the auxiliary guide sliding rod in a sliding manner, and one end of the second synchronous shaft sleeve is welded with a linkage clamping push plate, and the other side of the stirring rotating shaft driving rod is rotationally connected with the linkage clamping push plate.
Preferably, anti-drop chucking structure falls to unload power bearing structure, first chucking ferrule and second chucking ferrule including the anti-shake, the one end of the tight push pedal of synchronous clamp and the inboard one end of the tight push pedal of linkage all weld have the anti-shake to fall and unload power bearing structure, are located the anti-shake of the tight push pedal one end of synchronous clamp drops to unload the one end welding of power bearing structure has first chucking ferrule, is located the anti-shake of the inboard one end of the tight push pedal of linkage clamp drops to unload the one end welding of power bearing structure and has second chucking ferrule, first chucking ferrule and second chucking ferrule joint.
Preferably, the anti-shake drops and unloads power bearing structure and includes that the anti-shake leads power piece, component folding rod, auxiliary stay carrier, spring, component push rod and unloads the built-in post of doing all welds the built-in post of doing all can of auxiliary stay carrier both sides, the inside one side welding of the built-in post of doing all can has the spring, the inside opposite side sliding connection of the built-in post of doing all can unloads has the component push rod, the component push rod with unload the inside spring welded connection of the built-in post of doing all can, one side of component push rod is rotated and is connected with the component folding rod, the inboard of component folding rod also has the spring, the one end of component folding rod is rotated and is connected with the anti-shake and leads the power piece.
A large-sized single crystal pre-temperature regulating system comprising a large-sized single crystal pre-temperature regulating device as claimed in any one of the preceding claims;
preferably, a jumbo size single crystal tempering system in advance, including detection control system carries on the module, detection control system carries on the module and is fixed in one side that the support was carried at the center, detection control system carries on the module and includes luminance detector, thermodetector, central processing unit, first controller and second controller, each other is electric connection between luminance detector, thermodetector, central processing unit, first controller and the second controller, the second controller is electric connection with adorning structure and the supplementary automatic clamping structure certainly from the heat single crystal.
Preferably, the brightness detector and the temperature detector are used for synchronously detecting the brightness and the temperature of the seeding and the inside of the furnace, the central processing unit is used for processing data and controlling the intervention system, the first controller is used for controlling the brightness detector and the temperature detector to do work, and the second controller is used for controlling seeding adjustment and the self-heating single crystal fixing structure to adjust the temperature and the power of the seeding and the crucible.
Compared with the prior art, the invention has the beneficial effects that:
1. according to the invention, through the design of the carrying module of the detection control system, the corresponding pre-temperature regulation system is carried, so that the automatic pre-control temperature detection and pre-regulation in the single crystal processing process are automatically completed, the temperature regulation time is greatly saved, and the yield is improved;
2. the device is convenient to finish automatic clamping and clamping synchronous heating of the single crystal by the matching design of the self-heating single crystal fixing structure and the auxiliary automatic clamping structure, and avoids the risks of liquid level crystallization and silicon spraying caused by manual clamping seeding and over-high or over-low given power for temperature finding of the seeding.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings used in the description of the embodiments will be briefly introduced below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art that other drawings can be obtained according to the drawings without creative efforts.
FIG. 1 is a schematic structural view of the present invention as a whole;
FIG. 2 is a side view of the present invention in its entirety;
FIG. 3 is a view showing an arrangement for holding a self-heating single crystal according to the present invention;
FIG. 4 is a schematic view of a partial structure of an auxiliary automated clamping structure according to the present invention;
FIG. 5 is a schematic diagram of a partial structure of a power output structure according to the present invention;
FIG. 6 is a partial schematic diagram of the synchronous clamping output structure of the present invention;
FIG. 7 is a partial structural view of the anti-falling clamping structure of the present invention;
FIG. 8 is a flow chart of a pre-attemperation system of the present invention
In the figure: 1. a center-mounted bracket; 2. a detection control system carrying module; 3. an autothermal single crystal loading configuration; 4. an auxiliary automated clamping structure; 5. a single crystal assembling pipe; 6. a heat storage output box body; 7. a positioning plate is arranged in the box body; 8. an electric heating tube; 9. a heat storage lead-out block; 10. a circulating heat-leading connecting pipe; 11. an inner heat storage tank; 12. a dynamic output structure; 13. synchronously clamping the output structure; 14. an anti-drop clamping structure; 15. assembling a support base; 16. a guide power block; 17. a motor; 18. an output toggle gear; 19. synchronously driving the rack; 20. auxiliary guide slide bars; 21. a first synchronizing sleeve; 22. the push plate is driven by force; 23. synchronously clamping the push plate; 24. a second synchronizing shaft sleeve; 25. clamping the push plate in a linkage manner; 26. a support rod is arranged in the bracket; 27. the rotating shaft is pulled to drive the rod; 28. a first clamping lock collar; 29. a second clamping lock hoop; 30. an anti-shake force-guiding block; 31. a component force folding rod; 32. auxiliary supporting and carrying frame; 33. a spring; 34. a component force push rod; 35. the column is arranged in the force-releasing way.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments.
The first embodiment is as follows:
please refer to fig. 1-7:
a large-size single crystal pre-temperature adjusting device comprises a center carrying support 1 and a self-heating single crystal fixing structure 3, wherein the bottom end of the center carrying support 1 is fixedly connected with the self-heating single crystal fixing structure 3, the self-heating single crystal fixing structure 3 is used for fixing seeding crystals and adjusting temperature, the large-size single crystal pre-temperature adjusting device also comprises an auxiliary automatic clamping structure 4, the auxiliary automatic clamping structure 4 is fixed at one end of the center carrying support 1, and the auxiliary automatic clamping structure 4 is used for automatically preventing dropping and clamping the seeding crystals;
specifically, please refer to fig. 3:
the self-heating single crystal fixing structure 3 comprises a single crystal assembling pipe 5, a heat storage output box body 6, an internally installed positioning plate 7, electric heating pipes 8, a heat storage guiding block 9, a circulating heat guiding connecting pipe 10 and a heat storage inner groove 11, wherein one end of the single crystal assembling pipe 5 is fixedly connected with the heat storage output box body 6, the internally installed positioning plate 7 is welded at the top end and the bottom end of the inner side of the heat storage output box body 6, the plurality of electric heating pipes 8 are fixed between the internally installed positioning plates 7, the heat storage guiding block 9 is fixedly connected at the top end and the bottom end of the heat storage output box body 6, the circulating heat guiding connecting pipe 10 is fixedly connected at the top end of the heat storage guiding block 9, the inner groove 11 is formed in the inner side of the single crystal assembling pipe 5, the circulating heat guiding connecting pipe 10 is welded with the inner side of the heat storage inner groove 11, and the heat storage guiding block 9 and the single crystal assembling pipe 5 are made of copper;
when the seeding crystal needs to be positioned and the temperature and brightness are pre-adjusted, the top end of the seeding crystal is inserted into the single crystal assembly pipe 5, when the temperature and brightness are adjusted, the electric heating pipe 8 is controlled to be electrified to generate high heat, the high heat is led out to the circulating heat leading connecting pipe 10 by the heat storage leading-out block 9, part of the circulating heat leading connecting pipe 10 is positioned in the heat storage inner groove 11, so that the heat is stored in the heat storage inner groove 11, and the heat is led out to the seeding crystal by the single crystal assembly pipe 5, so that the pre-adjusted temperature and brightness are further achieved;
specifically, please refer to fig. 4-7:
the auxiliary automatic clamping structure 4 comprises a movable guide output structure 12, a synchronous clamping output structure 13 and an anti-falling clamping structure 14, one end of the movable guide output structure 12 is fixedly connected with the synchronous clamping output structure 13, one end of the synchronous clamping output structure 13 is fixedly connected with the anti-falling clamping structure 14, the movable guide output structure 12 is used for providing power, the synchronous clamping output structure 13 is used for completing automatic clamping in a matching manner, and the anti-falling clamping structure 14 is used for limiting anti-falling;
the movable guide output structure 12 comprises an assembly supporting base 15, a guide power block 16, a motor 17, an output toggle gear 18 and a synchronous moving rack 19, the assembly supporting base 15 is welded at the top end and the bottom end of the guide power block 16, the motor 17 is fixedly connected to the bottom of one end of the guide power block 16 through a screw, the output end of the motor 17 is fixedly connected with the output toggle gear 18, the synchronous moving rack 19 is connected to the inner portion of one end, far away from the motor 17, of the guide power block 16 in a sliding mode, and one end of the synchronous moving rack 19 is meshed with the output toggle gear 18;
the synchronous clamping output structure 13 comprises an auxiliary guide sliding rod 20, a first synchronous shaft sleeve 21, a stressed driving push plate 22, a synchronous clamping push plate 23, a second synchronous shaft sleeve 24, a linkage clamping push plate 25, an internally-installed support rod 26 and a poking rotating shaft driving push rod 27, wherein the auxiliary guide sliding rod 20 is welded at one end of the assembling support base 15, the internally-installed support rod 26 is welded at the inner side of one end of the auxiliary guide sliding rod 20, the first synchronous shaft sleeve 21 is slidably connected at the outer side of one side of the auxiliary guide sliding rod 20, the stressed driving push plate 22 is welded at one side of the first synchronous shaft sleeve 21, one end of the synchronous driving rack 19 is welded with the stressed driving push plate 22, the synchronous clamping push plate 23 is welded at the other side of the first synchronous shaft sleeve 21, the top end and the bottom end of the synchronous clamping push plate 23 are both rotatably connected with, the other side of the auxiliary guide sliding rod 20 is connected with a second synchronous shaft sleeve 24 in a sliding manner, one end of the second synchronous shaft sleeve 24 is welded with a linkage clamping push plate 25, and the other side of the stirring rotating shaft driving rod 27 is rotationally connected with the linkage clamping push plate 25;
the anti-falling clamping structure 14 comprises an anti-shaking falling force-unloading supporting structure, a first clamping lock hoop 28 and a second clamping lock hoop 29, wherein the anti-shaking falling force-unloading supporting structure is welded at one end of the synchronous clamping push plate 23 and one end of the inner side of the linkage clamping push plate 25, the first clamping lock hoop 28 is welded at one end of the anti-shaking falling force-unloading supporting structure positioned at one end of the synchronous clamping push plate 23, the second clamping lock hoop 29 is welded at one end of the anti-shaking falling force-unloading supporting structure positioned at one end of the inner side of the linkage clamping push plate 25, and the first clamping lock hoop 28 is clamped with the second clamping lock hoop 29;
the anti-shake falling force-unloading supporting structure comprises an anti-shake force-guiding block 30, a component force folding rod 31, an auxiliary supporting erection frame 32, a spring 33, a component force push rod 34 and a force-unloading inner column 35, wherein the force-unloading inner column 35 is welded inside each of two sides of the auxiliary supporting erection frame 32, the spring 33 is welded on one side inside the force-unloading inner column 35, the component force push rod 34 is slidably connected to the other side inside the force-unloading inner column 35, the component force push rod 34 is welded with the spring 33 inside the force-unloading inner column 35, one side of the component force push rod 34 is rotatably connected with the component force folding rod 31, the spring 33 is also welded on the inner side of the component force folding rod 31, and one end of the component force folding rod 31 is rotatably connected with the anti-shake force-guiding block 30;
the output of the control motor 17 drives the output toggle gear 18 to rotate, the output toggle gear 18 is matched with the synchronous moving rack 19, the output toggle gear 18 rotates to complete the toggle of the synchronous moving rack 19, the guide power block 16 is used for guiding and limiting the synchronous moving rack 19, the sliding displacement derivation stress of the synchronous moving rack 19 drives the push plate 22 to drive the first synchronous shaft sleeve 21 and the synchronous clamping push plate 23 to move, the sliding connection of the first synchronous shaft sleeve 21 and the auxiliary guide slide bar 20 is used for driving the clamping push plate 23 to carry out the clamping displacement drive, the toggle rotating shaft is used for driving the linkage rod 27 to be connected with the synchronous clamping push plate 23 and the linkage clamping push plate 25 in a matched mode, the toggle rotating shaft is used for driving the linkage clamping push plate 25 to move by the rotating connection of the toggle rotating shaft drive rod 27 and the built-in support rod 26, and the conduction of the toggle rotating shaft drive rod 27 is used for driving the linkage clamping push plate 25 to move by the toggle rotating shaft drive rod 23, the second synchronous shaft sleeve 24 and the auxiliary guide sliding rod 20 are matched to complete the supporting and limiting of the displacement of the linkage clamping push plate 25, so that the linkage clamping push plate 25 and the synchronous clamping push plate 23 are oppositely clamped and driven, the anti-shaking and anti-falling force-unloading supporting structure is derived by utilizing the displacement of the synchronous clamping push plate 23 and the linkage clamping push plate 25, so that the first clamping locking hoop 28 and the second clamping locking hoop 29 are clamped, the clamping and guiding output of the seeding crystal is completed, when the seeding crystal shakes in the processing process, in order to avoid shaking and falling, the shaking stress is led out to the component force folding rod 31 by utilizing the anti-shaking force-guiding block 30, so that the component force folding rod 31 is stressed and compressed, the stress is led out to the component force push rod 34 to two sides, the stress is extruded to the spring 33 in the unloading force internal column 35 by utilizing the sliding of the push rod component force 34 in the unloading force internal column 35, the center of the component force folding rod 31 is conducted to the spring 33 in the component force folding rod 31, the elastic potential energy generated by the force compression of the two springs 33 is utilized to offset the shaking impact, so that the anti-falling stability is realized.
Example two:
please refer to fig. 8:
a large-size single crystal pre-temperature regulating system comprises a large-size single crystal pre-temperature regulating device as the above embodiment;
a large-size single crystal pre-temperature-adjusting system comprises a detection control system carrying module 2, wherein the detection control system carrying module 2 is fixed on one side of a central carrying support 1, the detection control system carrying module 2 comprises a brightness detector, a temperature detector, a central processing unit, a first controller and a second controller, the brightness detector, the temperature detector, the central processing unit, the first controller and the second controller are electrically connected with each other, and the second controller is electrically connected with a self-heating single crystal fixing structure 3 and an auxiliary automatic clamping structure 4;
the brightness detector and the temperature detector are used for synchronously detecting the brightness and the temperature of the furnace and the seeding crystal, the central processor is used for processing data and controlling the intervention system, the first controller is used for controlling the brightness detector and the temperature detector to do work, and the second controller is used for controlling the seeding crystal adjustment and the temperature power adjustment of the self-heating single crystal fixing structure 3 to the seeding crystal and the crucible.
The method comprises the steps that after slag is adhered to a crucible, a water-cooling screen is lowered to the lower limit, the crucible position is placed near a temperature-adjusting crucible position, crystal rotation, crucible rotation, argon flow and furnace pressure are set in advance according to crystal pulling parameters, a slag cover is controlled to be screwed out, when the slag cover rises to a throat, a large-size single crystal pre-temperature-adjusting system is automatically inserted, a second controller controls a self-heating single crystal fixing structure 3 and an auxiliary automatic clamping structure 4 to cooperate with each other to complete heat storage, heating and clamping of seeding, so that the seeding is enabled to reach the pre-temperature-adjusting brightness of seeding, a first controller controls a brightness detector and a temperature detector to conduct brightness detection and temperature detection on the seeding, the seeding brightness serves as a brightness basic value, the basic value is input into a central processing unit, the pre-temperature-adjusting brightness is compared with the seeding brightness in the central processing unit, and the pre-temperature-adjusting brightness is greater than fourteen seeding brightness;
when the central processing unit takes the seeding power as a power basic value and performs power adjustment through the pre-temperature-adjusting brightness and the seeding brightness difference, the brightness of the liquid level in the crucible is gradually adjusted to the pre-temperature-adjusting brightness in the slag-extracting process through the second controller, the actual brightness and the pre-temperature-adjusting deviation are within 2, the power under the control of the second controller is not changed, and the seeding power is automatically recovered, wherein the specific calculation mode is as follows:
seeding power-seeding power compensation value-liquid level brightness-pre-temperature regulation brightness-brightness power coefficient.
It will be evident to those skilled in the art that the invention is not limited to the details of the foregoing illustrative embodiments, and that the present invention may be embodied in other specific forms without departing from the spirit or essential attributes thereof. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.
Claims (9)
1. A large-size single crystal pre-temperature adjusting device is characterized in that: it adorns structure (3) to adorn including center carrying support (1) and self-heating single crystal, the bottom fixedly connected with self-heating single crystal that support (1) was carried in the center adorns structure (3) surely, self-heating single crystal is adorned structure (3) and is used for the fixed and the processing of adjusting the temperature of seeding, still includes supplementary automatic chucking structure (4), supplementary automatic chucking structure (4) are fixed in the center and are carried the one end of support (1), supplementary automatic chucking structure (4) are used for carrying out automatic anti-drop to the seeding and press from both sides tightly.
2. A large-sized single crystal pre-temperature adjustment apparatus as set forth in claim 1, wherein: the self-heating single crystal fixing structure (3) comprises a single crystal assembly pipe (5), a heat storage output box body (6), an internally-arranged positioning plate (7), electric heating pipes (8), heat storage guide blocks (9), circulating heat-guiding connecting pipes (10) and heat storage inner grooves (11), wherein one end of the single crystal assembly pipe (5) is fixedly connected with the heat storage output box body (6), the internally-arranged positioning plates (7) are welded at the top end and the bottom end of the inner side of the heat storage output box body (6), the electric heating pipes (8) are fixed between the internally-arranged positioning plates (7), the heat storage guide blocks (9) are fixedly connected at the top end and the bottom end of the heat storage output box body (6), the circulating heat-guiding connecting pipes (10) are fixedly connected at the top end of the heat storage guide blocks (9), the heat storage inner grooves (11) are formed in the inner side of the single crystal assembly pipe (5), and the circulating heat-guiding connecting pipes (10) are welded with the inner sides of the heat storage inner grooves (11), the heat storage lead-out block (9) and the single crystal assembling pipe (5) are both made of copper.
3. A large-sized single crystal pre-temperature adjustment apparatus as set forth in claim 1, wherein: supplementary automatic chucking structure (4) are including moving lead output structure (12), synchronous clamp output structure (13) and anti-drop chucking structure (14), the one end fixedly connected with synchronous clamp output structure (13) of moving lead output structure (12), the one end fixedly connected with anti-drop chucking structure (14) of synchronous clamp output structure (13), it is used for power to provide to move lead output structure (12), synchronous clamp output structure (13) are used for coordinating to move and accomplish automatic centre gripping, anti-drop chucking structure (14) are used for anti-drop to prescribe a limit to.
4. A large-sized single crystal pre-temperature adjustment apparatus as set forth in claim 3, wherein: the dynamic guide output structure (12) comprises a supporting base (15), a guide power block (16), a motor (17), an output toggle gear (18) and a synchronous moving rack (19), wherein the supporting base (15) is welded to the top end and the bottom end of the guide power block (16), the motor (17) is fixedly connected to the bottom of one end of the guide power block (16) through a screw, the output toggle gear (18) is fixedly connected to the output end of the motor (17), the synchronous moving rack (19) is connected to the inner portion, away from one end of the motor (17), of the guide power block (16) in a sliding mode, and one end of the synchronous moving rack (19) is meshed with the output toggle gear (18).
5. A large-sized single crystal pre-temperature adjustment device according to claim 4, wherein: the synchronous clamping output structure (13) comprises an auxiliary guide sliding rod (20), a first synchronous shaft sleeve (21), a stress driving push plate (22), a synchronous clamping push plate (23), a second synchronous shaft sleeve (24), a linkage clamping push plate (25), an internal supporting rod (26) and a stirring rotating shaft driving rod (27), wherein the auxiliary guide sliding rod (20) is welded at one end of an assembly supporting base (15), the internal supporting rod (26) is welded at the inner side of one end of the auxiliary guide sliding rod (20), the first synchronous shaft sleeve (21) is slidably connected at the outer side of one side of the auxiliary guide sliding rod (20), the stress driving push plate (22) is welded at one side of the first synchronous shaft sleeve (21), one end of a synchronous driving rack (19) is welded with the stress driving push plate (22), and the synchronous clamping push plate (23) is welded at the other side of the first synchronous shaft sleeve (21), the top and the bottom of tight push pedal (23) of synchronous clamp all rotate and are connected with and stir pivot drive pole (27), stir pivot drive pole (27) and built-in bracing piece (26) and rotate and be connected, the opposite side sliding connection of supplementary guide slide bar (20) has the synchronous axle sleeve of second (24), the one end welding of the synchronous axle sleeve of second (24) has the tight push pedal of linkage clamp (25), the opposite side of stirring pivot drive pole (27) is connected with the tight push pedal of linkage clamp (25) rotation.
6. A large-sized single crystal pre-temperature adjustment device according to claim 5, wherein: anti-drop chucking structure (14) drop including the anti-shake and unload power bearing structure, first chucking lock hoop (28) and second chucking lock hoop (29), the one end of the tight push pedal of synchronous clamp (23) and the tight push pedal of linkage (25) inboard one end all weld have the anti-shake to drop and unload power bearing structure, are located the anti-shake of the tight push pedal of synchronous clamp (23) one end drops and unloads power bearing structure's one end welding has first chucking lock hoop (28), is located the anti-shake of the tight push pedal of linkage (25) inboard one end drops and unloads power bearing structure's one end welding has second chucking lock hoop (29), first chucking lock hoop (28) and second chucking lock hoop (29) joint.
7. A large-sized single crystal pre-temperature adjustment device according to claim 6, wherein: the anti-shake falling force-unloading supporting structure comprises an anti-shake force-guiding block (30), a force-component folding rod (31), an auxiliary supporting and carrying frame (32), a spring (33), a force-component push rod (34) and a force-unloading inner column (35), the inner parts of the two sides of the auxiliary supporting and carrying frame (32) are welded with force-unloading inner columns (35), a spring (33) is welded at one side inside the force unloading inner column (35), a component force push rod (34) is connected at the other side inside the force unloading inner column (35) in a sliding way, the component force push rod (34) is welded with a spring (33) in the force unloading inner column (35), one side of the component force push rod (34) is rotationally connected with a component force folding rod (31), a spring (33) is welded on the inner side of the component force folding rod (31), and one end of the component force folding rod (31) is rotatably connected with an anti-shake force guide block (30).
8. A large-size single crystal pre-temperature-adjusting system is characterized in that: the large-size single crystal pre-temperature-adjusting system comprises the large-size single crystal pre-temperature-adjusting device as claimed in any one of claims 1 to 7, and comprises a detection control system carrying module (2), wherein the detection control system carrying module (2) is fixed on one side of a central carrying support (1), the detection control system carrying module (2) comprises a brightness detector, a temperature detector, a central processing unit, a first controller and a second controller, the brightness detector, the temperature detector, the central processing unit, the first controller and the second controller are electrically connected with each other, and the second controller is electrically connected with the self-heating single crystal fixing structure (3) and the auxiliary automatic clamping structure (4).
9. A large-sized single crystal pre-temperature regulating system and device thereof as claimed in claim 8, wherein: the brightness detector and the temperature detector are used for synchronously detecting brightness and temperature in the furnace and seeding, the central processing unit is used for processing data and controlling an intervention system, the first controller is used for controlling the brightness detector and the temperature detector to do work, and the second controller is used for controlling seeding adjustment and the self-heating single crystal loading structure (3) to adjust the temperature and power of the seeding and the crucible.
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| CN111472043A (en) * | 2020-04-30 | 2020-07-31 | 刘建军 | Heating device for preparing tubular crystal material |
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| RU2088701C1 (en) * | 1991-02-27 | 1997-08-27 | Ангарский электролизный химический комбинат | Installation for growing crystals from melt |
| KR101333668B1 (en) * | 2013-06-26 | 2013-11-27 | 주식회사 에이에스이 | Auto seeding system of single crystal growth furnace |
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