CN216712308U - System for automatically drawing zone-melting silicon single crystal through remote control - Google Patents

Abstract

The utility model provides a system for remotely controlling and automatically drawing zone-melting silicon single crystals, which is matched with one or more zone-melting furnaces with PLC controllers, and comprises a remote control workstation, signal windows arranged on the side surface of a furnace chamber in the zone-melting furnaces, and a plurality of cameras correspondingly arranged on the outer side of each signal window; each zone melting furnace is correspondingly provided with a single furnace industrial personal computer, and the signal output ends of a plurality of cameras corresponding to the outer side of the signal window of each zone melting furnace are connected with the signal receiving ends of the corresponding single furnace industrial personal computers; the signal output end of the camera is also connected with the remote control workstation; and the single-furnace industrial personal computer and the remote control workstation are both connected with the PLC. The remote control workbench provided by the utility model realizes remote observation and control of the production conditions in a plurality of zone melting furnaces, and a single furnace industrial personal computer can also perform observation and control on one zone melting furnace, so that the flexibility is strong, and the remote control reduces the number of workers and the production cost.

Description

System for automatically drawing zone-melting silicon single crystal through remote control

Technical Field

The utility model belongs to the field of zone-melting silicon single crystals, and particularly relates to a system for automatically drawing zone-melting silicon single crystals through remote control.

Background

Silicon is a semiconductor material, and with the development of power electronic devices, the market demand of zone-melting silicon single crystals is more and more increased. The floating zone melting method is also called as a floating zone melting method because a high-frequency heating coil is used as a heat source in the growth process of the floating zone silicon single crystal and a melting zone is suspended between the polycrystalline material rod and the silicon single crystal. The zone-melting silicon single crystal is finally produced through the steps of seed crystal fusion, seeding, shouldering, shoulder rotating, diameter equalizing, ending and the like. The method can be carried out in a protective atmosphere, and has the greatest advantage over the Czochralski method that a high-purity silicon single crystal can be produced without contacting with a tool such as a crucible. With the rapid development of the semiconductor industry, the advantages of large-diameter silicon wafers for manufacturing devices such as IGBTs and the like in the aspects of reducing the cost, improving the productivity, increasing the area utilization rate of a single silicon wafer and the like are remarkable. Therefore, industrialization of large-size float-zone silicon single crystal is a problem to be solved urgently.

At present, almost all the seeding and initial shoulder expanding processes of zone-melting silicon single crystals in China are completed in a manual operation mode, and an operator completes the seeding and initial shoulder expanding processes according to the current polycrystalline materials and seed crystal forms. The method has two defects because the power is not matched with the up-down speed well, one is easy to melt, and the other is broken. The ending is that program control is matched with manual operation, the speed of the ending process is judged through the experience of an operator, the diameter of the single crystal and the thickness of the waist are observed, and then proper up-down speed and power are given, and the process also depends on the personal skill of the operator, otherwise the problems of ending breakage, ending crack and the like are easy to occur, and loss is generated. The manual operation mode has high labor cost, the seeding, the initial shouldering and the low success rate of ending, the production efficiency is also reduced, and the raw material cost is increased. Therefore, the remote control automatic crystal pulling has important significance for realizing large-scale industrialization of the zone-melting silicon single crystal.

SUMMERY OF THE UTILITY MODEL

In view of the above, the present invention provides a system for remotely controlling an automatic pulling zone-melting silicon single crystal, so as to solve the problems of low automation degree, requirement of cooperation of workers and low production efficiency in the existing silicon single crystal production process, and is not suitable for large-scale industrial production.

In order to achieve the purpose, the technical scheme of the utility model is realized as follows:

a system for remotely controlling and automatically drawing zone-melting silicon single crystals is matched with one or more zone-melting furnaces with PLC controllers, and comprises a remote control workstation, a single-furnace industrial personal computer, signal windows arranged on the side surface of a furnace chamber in the zone-melting furnaces, and a plurality of cameras correspondingly arranged on the outer side of each signal window;

each zone melting furnace is correspondingly provided with a single furnace industrial personal computer, and the signal output ends of a plurality of cameras corresponding to the outer side of the signal window of each zone melting furnace are connected with the signal receiving ends of the corresponding single furnace industrial personal computers; the signal output end of the camera is also connected with a remote control workstation; the remote control workstation and the single-furnace industrial personal computer are connected with the PLC for bidirectional communication.

Furthermore, three cameras are correspondingly arranged on the outer side of each signal window, and the three cameras are respectively aligned to polycrystalline materials, liquid silicon and monocrystalline silicon in the zone melting furnace at an overlooking angle, a parallel angle and an uplooking angle;

the three cameras are matched with the shooting area to cover the area where the polycrystalline material is converted from the polycrystalline high-temperature area to the single-crystal high-temperature area, and are used for collecting image information including the diameter of the polycrystalline material, the melting level of the polycrystalline material, the waist, the surface of the melt, the angle of the melt at three phase points and the diameter of the single crystal.

Further, the camera is a high pixel CCD camera.

Further, every camera all corresponds and is provided with a camera alignment jig, the camera alignment jig includes the base, with base lateral sliding connection's slider, sets firmly the montant in the slider upper surface perpendicularly, the montant closes on the upper end and sets up the altitude mixture control piece, the one end that the montant was kept away from to the altitude mixture control piece sets up the high fine tuning subassembly, one side that the montant was kept away from to the high fine tuning subassembly transversely sets up the round bar, the rotation is connected with the angle fine tuning subassembly on the round bar, angle fine tuning subassembly and camera rigid coupling.

Further, the base upside sets up the rectangular groove, and the slider sets up in rectangular inslot side, rectangular groove length direction middle part is provided with the screw rod, the equal parallel arrangement in screw rod both sides has the guide arm, the slider corresponds the screw rod and sets up the screw hole, the slider corresponds the guide arm and sets up the guiding hole, the screw rod both ends correspond rectangular groove both ends lateral wall and set firmly the cylinder pole, the cylinder pole rotates with the rectangular groove lateral wall that corresponds to be connected, the guide arm both ends also all rotate with rectangular groove both ends lateral wall to be connected.

Further, the altitude mixture control piece corresponds the montant and sets up vertical round hole, vertical round hole diameter corresponds the setting with the montant external diameter, the altitude mixture control piece perpendicular to vertical round hole axis sets up the screw hole, the altitude mixture control piece corresponds the screw hole and sets up the bolt, the screw thread one end and the montant lateral wall butt of bolt.

Furthermore, the height fine adjustment assembly comprises a vertical plate, a rack is fixedly arranged on one side of the vertical plate close to the height adjusting block, and the height adjusting block is provided with a clearance groove corresponding to the rack;

the inner side of the height adjusting block is arranged on a first gear meshed and connected with the rack, rotating shafts are fixedly arranged on two sides of the first gear along the axis of the first gear, the height adjusting block is provided with a U-shaped groove corresponding to the rotating shafts, the opening of the U-shaped groove faces one side of the vertical plate, the bottom of the U-shaped groove is a semi-circular arc, the diameter of the semi-circular arc corresponds to the diameter of the rotating shafts,

the rotating shaft on one side of the gear extends out of the adjacent U groove and then is fixedly connected with the distance adjusting knob, the rotating shaft on the other side extends out of the adjacent U groove and then is provided with an external thread II and is connected with the locking knob, the locking knob is provided with an internal thread corresponding to the external thread II, and when the locking knob limits the rotation of the gear I, one end of the locking knob, which is close to the height adjusting block, is tightly pressed and attached to the outer side wall of the height adjusting block;

the riser bilateral symmetry sets up the bar groove, the altitude mixture control piece let the dead slot inside wall correspond the bar groove and set up the bar piece, the bar groove is with the vertical sliding connection of bar piece.

Furthermore, the round rod is fixedly arranged on one side, away from the rack, of the vertical plate, the angle fine adjustment assembly comprises a rotating plate, one side of the rotating plate is provided with a first through hole with the same diameter corresponding to the round rod, and the rotating plate is rotatably connected with the round rod;

the rotating plate is provided with a second through hole parallel to the first through hole, a rotating rod is arranged on the inner side of the second through hole, the diameter of the rotating rod corresponds to that of the second through hole, and the rotating rod is rotatably connected with the second through hole;

a second gear is fixedly arranged on one side, close to the rotating plate, of the round rod, a first external thread is arranged at one end, far away from the vertical plate, of the round rod, the end, extending out of the first through hole, of the round rod, a detachable connecting nut is arranged on the round rod corresponding to the first external thread, a third gear is arranged on the rotating rod corresponding to the second gear, the second gear is meshed with the third gear, and the third gear is rotatably connected with the rotating rod through a bearing;

the gear three sides set up spacing hole perpendicularly, spacing hole uses three pivots of gear to be provided with a plurality ofly as axis border equidistance, the rotor plate closes on three one sides of gear and corresponds spacing hole and set up a bolt circular slot, gear three is pegged graft spacing hole and bolt circular slot in proper order through the bolt and is carried on spacingly.

Compared with the prior art, the system for remotely controlling and automatically pulling the float-zone silicon single crystal has the following beneficial effects:

(1) the remote control workbench provided by the utility model realizes remote observation and control of the production conditions in a plurality of zone melting furnaces, and a single furnace industrial personal computer can also perform observation and control on one zone melting furnace, so that the flexibility is strong, and the remote control reduces the number of workers and the production cost.

(2) The three cameras completely display the molten zone through three angles of overlooking, looking up and looking up, the central situation of the molten zone is not judged by raising or lowering the head of a person, the production efficiency is greatly improved, the cameras adopt high-pixel CCD cameras, the judgment error of workers is reduced, the production quality is improved, and the flexible adjustment of the height and the angle is realized through the mounting bracket.

Drawings

The accompanying drawings, which are incorporated in and constitute a part of this specification, illustrate an embodiment of the utility model and, together with the description, serve to explain the utility model and not to limit the utility model. In the drawings:

FIG. 1 is a schematic view of a system for remotely controlling the automatic pulling of a float-zone silicon single crystal according to an embodiment of the present invention;

fig. 2 is a schematic view of an overall structure of a camera adjusting bracket according to an embodiment of the present invention;

FIG. 3 is a schematic diagram of a structure of the height fine adjustment assembly and the angle fine adjustment assembly according to an embodiment of the present invention;

FIG. 4 is a schematic structural diagram of a rotating plate according to an embodiment of the present invention;

fig. 5 is a schematic view of a structure of a first gear and a height adjusting block according to an embodiment of the present invention.

Description of the reference numerals:

1-a remote control workstation; 2-a signal window; 3-a camera; 4-single furnace industrial personal computer; 5-a base; 51-a slider; 52-vertical bar; 53-rectangular groove; 54-a screw; 55-a guide rod; 6-height adjusting block; 61-a limit bolt; 62-letting empty groove; 63-U groove; 64-a bar-shaped block; 7-a height fine adjustment assembly; 71-a vertical plate; 72-a rack; 73-gear one; 74-a pitch knob; 75-locking knob; 76-a strip-shaped groove; 8-fine angle adjustment component; 81-round bar; 82-a rotating plate; 821-first through hole; 822-through hole two; 823-round slot for bolt; 83-rotating rods; 84-gear two; 85-a nut; 86-gear three; 861-Limit holes; 87-a latch; 9-PLC controller.

Detailed Description

It should be noted that the embodiments and features of the embodiments may be combined with each other without conflict.

In the description of the present invention, it is to be understood that the terms "center", "longitudinal", "lateral", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", and the like, indicate orientations or positional relationships based on those shown in the drawings, and are used only for convenience in describing the present invention and for simplicity in description, and do not indicate or imply that the referenced devices or elements must have a particular orientation, be constructed and operated in a particular orientation, and thus, are not to be construed as limiting the present invention. Furthermore, the terms "first", "second", etc. are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first," "second," etc. may explicitly or implicitly include one or more of that feature. In the description of the present invention, "a plurality" means two or more unless otherwise specified.

In the description of the present invention, it should be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present invention can be understood by those of ordinary skill in the art through specific situations.

The present invention will be described in detail below with reference to the embodiments with reference to the attached drawings.

As shown in figure 1, the system for remotely controlling and automatically drawing the zone melting silicon single crystal is matched with one or more zone melting furnaces with PLC controllers for installation and setting, and comprises a remote control workstation 1, signal windows 2 arranged on the side surfaces of a furnace chamber in the zone melting furnaces, and a plurality of cameras 3 correspondingly arranged on the outer sides of the signal windows 2;

each zone melting furnace is correspondingly provided with a single furnace industrial personal computer 4, and the signal output ends of a plurality of cameras 3 corresponding to the outer side of the signal window 2 of each zone melting furnace are connected with the signal receiving ends of the corresponding single furnace industrial personal computers 4; the signal output end of the camera 3 is also connected with the remote control workstation 1; the remote control workstation 1 and the single furnace industrial control 4 are both connected with the PLC 9 for bidirectional communication.

The remote control workstation 1 realizes remote observation and controls the production conditions in a plurality of zone-melting furnaces, and a single furnace industrial control computer 4 can also observe and control one zone-melting furnace.

The signals collected by the camera and the signals fed back by the PLC after the PLC executes the programs on the polycrystalline materials, the single crystal silicon rods and the electric parameters in the zone melting furnace can be sent to the single furnace industrial personal computer and the remote control workstation, and the single furnace industrial personal computer and the remote control workstation can control the PLC of the zone melting furnace to execute the required programs on the polycrystalline materials, the single crystal silicon rods and the electric parameters.

For example, the PLC controller controls the upper shaft of the zone melting furnace to descend by 5mm, the zone melting furnace receives signals, and after the upper shaft motor drives the upper shaft to descend by 5mm, the PLC controller feeds back the position of the upper shaft which descends by 5mm to the single-furnace industrial personal computer and the remote control workstation.

As shown in fig. 1, three cameras 3 are correspondingly arranged outside each signal window 2, and the three cameras 3 are respectively aligned to the polycrystalline material in the zone furnace at an angle of overlooking, parallel and looking up;

the three cameras 3 are matched with a shooting area to cover a region where polycrystalline materials are converted from a polycrystalline high-temperature region to a single-crystal high-temperature region, and are used for collecting image information including the diameters of the polycrystalline materials, the melting material surfaces of the polycrystalline materials, the waist, the melt surfaces, the melt angles at three phase points and the diameters of the single crystals.

The three cameras 3 completely display the melting zone through three angles of overlooking, looking straight and looking up, and when the three cameras 3 are not used, only a person raises or lowers the head to judge the central condition, so that one person cannot control the multiple furnace platforms, and the production efficiency is low.

The camera 3 is a high pixel CCD camera.

The high pixel CCD camera 3 may select acA1600-20gm by the BASLER brand.

The CCD camera 3 irradiates the melting zone capture pixel, corresponding charges are generated according to the intensity of light, the magnitude of the charges is read as an electric signal, and the computer of the remote control workstation 1 can calculate the polycrystalline diameter, the waist diameter, the single crystal growth angle, the polycrystalline temperature, the waist temperature, the melt temperature and the change condition of the single crystal temperature.

After charging, the remote control workstation 1 and the single-furnace industrial personal computer 4 after furnace sealing can control the PLC controller of the zone melting furnace to initiate operation according to signals collected by the CCD camera 3, wherein the operation comprises evacuation, inflation, diameter reduction, shoulder expansion, shoulder rotation, diameter equalization, ending and cooling, and the heating power, the speed of an upper shaft polycrystal material and the speed of a lower shaft monocrystal are controlled more accurately;

for example, a PLC controller on the zone melting furnace realizes the automation control method of the zone melting single crystal pulling process: and manual intervention can be performed by hitting the corresponding interface for confirmation, so that the power is increased or decreased, the polycrystalline or single crystal speed is increased or decreased, the coil position is adjusted and the like.

Judging whether the information of power, single crystal angle, single crystal growth curve, center thickness and the like of a certain furnace exceeds a preset range value or not, and alarming if the information exceeds the corresponding range value; triggering PID program correction, wherein an operator clicks a single furnace industrial personal computer 4 to allocate one for each zone melting furnace, and the remote control workstation 1 can be connected with a plurality of zone melting furnaces; the single furnace industrial personal computer 4 and the remote control workstation 1 can control the PLC controller on the zone melting furnace, and the PLC controller on the zone melting furnace is the prior art;

the production conditions in the multiple zone melting furnaces are remotely observed and controlled through the remote control workbench, a certain zone melting furnace can be observed and controlled through the single furnace industrial personal computer 4, the flexibility is high, and the number of workers is reduced through remote control, so that the production cost is reduced.

As shown in fig. 2-5, each camera 3 all corresponds and is provided with a camera alignment jig, the camera alignment jig includes base 5, with base 5 lateral sliding connection's slider 51, sets firmly the montant 52 of setting in the slider 51 upper surface perpendicularly, montant 52 closes on the upper end and sets up altitude mixture control piece 6, the one end that montant 52 was kept away from to altitude mixture control piece 6 sets up high fine tuning subassembly 7, one side that montant 52 was kept away from to high fine tuning subassembly 7 transversely sets up round bar 81, it is connected with angle fine tuning subassembly 8 to rotate on the round bar 81, angle fine tuning subassembly 8 and camera 3 rigid coupling.

As shown in fig. 2, the upper side of the base 5 is provided with a rectangular groove 53, the sliding block 51 is arranged inside the rectangular groove 53, the middle part of the rectangular groove 53 in the length direction is provided with a screw 54, two sides of the screw 54 are both provided with a guide rod 55 in parallel, the sliding block 51 is provided with a threaded hole corresponding to the screw 54, the sliding block 51 is provided with a guide hole corresponding to the guide rod 55, two ends of the screw 54 are provided with a post rod corresponding to the side walls of two ends of the rectangular groove 53, the post rod is rotatably connected with the corresponding side wall of the rectangular groove 53 through a bearing, and two ends of the guide rod 55 are also rotatably connected with the side walls of two ends of the rectangular groove 53.

As shown in fig. 2 and 3, the height adjusting block 6 is provided with a vertical round hole corresponding to the vertical rod 52, the diameter of the vertical round hole is correspondingly set to the outer diameter of the vertical rod 52, the height adjusting block 6 is provided with a threaded hole perpendicular to the axis of the vertical round hole, the height adjusting block 6 is provided with a limit bolt 61 corresponding to the threaded hole, and one end of the thread of the limit bolt 61 is abutted against the side wall of the vertical rod 52.

After the height adjusting block 6 is adjusted to a vertical proper position, the limiting bolt 61 is screwed with the threaded hole and is abutted to the outer side of the vertical rod 52, so that the vertical movement of the height adjusting block 6 is limited, and the coarse adjustment of the camera 3 in the height direction is realized.

As shown in fig. 2 to 5, the height fine adjustment assembly 7 includes a vertical plate 71, a rack 72 is fixedly disposed on one side of the vertical plate 71 close to the height adjustment block 6, and the height adjustment block 6 is provided with a clearance groove 62 corresponding to the rack 72;

the inner side of the height adjusting block 6 is provided with a first gear 73 engaged and connected with the rack 72, two sides of the first gear 73 are respectively provided with a rotating shaft corresponding to the axis of the first gear 73, the height adjusting block 6 is provided with a U groove 63 corresponding to the rotating shaft, the opening of the U groove 63 faces one side of the vertical plate 71, the bottom of the U groove 63 is a semi-circular arc, the diameter of the semi-circular arc corresponds to the diameter of the rotating shaft,

a rotating shaft on one side of the first gear 73 extends out of the adjacent U-shaped groove 63 and is fixedly connected with a distance adjusting knob 74, a rotating shaft on the other side extends out of the adjacent U-shaped groove 63 and is provided with a second external thread and is connected with a locking knob 75, the locking knob 75 is provided with an internal thread corresponding to the second external thread, and when the locking knob 75 limits the rotation of the first gear 73, one end of the locking knob 75, which is adjacent to the height adjusting block 6, is tightly pressed and attached to the outer side wall of the height adjusting block 6;

the riser 71 bilateral symmetry sets up bar groove 76, the clearance groove 62 inside wall that lets of altitude mixture control piece 6 corresponds bar groove 76 and sets up bar piece 64, bar groove 76 and the vertical sliding connection of bar piece 64.

The first rotating gear 73 rotates, namely, the rack 72 can be rotated, so that the rack 72 drives the vertical plate 71 to vertically move, after a proper height position is determined, the distance adjusting knob 74 is held and does not rotate, the locking knob 75 is rotated and pressed onto the outer side wall of the height adjusting block 6, and then the first rotating gear 73 is limited to rotate, so that the fine adjustment of the height position of the camera is realized.

As shown in fig. 2 to 5, the round rod 81 is fixedly arranged on one side of the vertical plate 71 away from the rack 72, the fine angle adjustment assembly 8 includes a rotating plate 82, a first through hole 821 with the same diameter is arranged on one side of the rotating plate 82 corresponding to the round rod 81, and the rotating plate 82 is rotatably connected with the round rod 81;

a second through hole 822 is formed in the rotating plate 82 in parallel to the first through hole 821, a rotating rod 83 is arranged on the inner side of the second through hole 822, the diameter of the rotating rod 83 corresponds to that of the second through hole 822, and the rotating rod 83 is rotatably connected with the second through hole 822;

a second gear 84 is fixedly arranged on one side, close to the rotating plate 82, of the round rod 81, an external thread I is arranged at one end, far away from one end of the vertical plate 71, of the round rod 81, extending out of the through hole I821, a detachable connecting nut 85 corresponding to the external thread I is arranged on the round rod 81, a third gear 86 is arranged on the rotating rod 83 corresponding to the second gear 84, the second gear 84 is meshed with the third gear 86, and the third gear 86 is rotatably connected with the rotating rod 83 through a bearing;

the dwang 83 sets firmly the ring platform on the lateral wall that is close to three 86 one ends of installation gear, ring platform external diameter is greater than dwang 83 external diameter, the ring platform is kept away from gear three 86's one end and is laminated with the rotating plate 82 lateral wall, dwang 83 can be connected through bearing rotation with two through-hole 822.

The side surface of the gear third 86 is vertically provided with a limiting hole 861, the limiting hole 861 is equidistantly arranged around the axis by taking the rotating shaft of the gear third 86 as the axis, one side of the rotating plate 82, which is close to the gear third 86, is provided with a bolt circular groove 823 corresponding to the limiting hole 861, and the gear third 86 is sequentially inserted into the limiting hole 861 and the bolt circular groove 823 through a bolt 87 for limiting.

The third gear 86 is sequentially inserted into the limit hole 861 and the round plug pin groove 823 through the plug pin 87 for limiting, the third gear 86 and the rotating plate 82 are kept static, the second gear 84 is fixed on the round rod 81, the round rod 81 is fixed on the vertical plate 71, and the third gear 86 and the second gear 84 are only meshed and do not rotate, so that the rotating plate 82 keeps an angle after rotating to a certain angle through the plug pin 87, and the angle of the camera 3 is kept stable.

The present invention is not limited to the above-described preferred embodiments, but rather, the present invention is to be construed broadly and cover all modifications, equivalents, and improvements falling within the spirit and scope of the present invention.

Claims (8)

1. A system for remotely controlling and automatically drawing zone-melting silicon single crystal is matched with one or more zone-melting furnaces with PLC (9), and is characterized in that: comprises a remote control workstation (1), signal windows (2) arranged on the side surfaces of a furnace chamber in a zone-melting furnace, and a plurality of cameras (3) correspondingly arranged on the outer side of each signal window (2);

each zone melting furnace is correspondingly provided with a single furnace industrial personal computer (4), and the signal output ends of a plurality of cameras (3) corresponding to the outer side of the signal window (2) of each zone melting furnace are connected with the signal receiving ends of the corresponding single furnace industrial personal computers (4); the signal output end of the camera (3) is also connected with the remote control workstation (1);

the remote control workstation (1) and the single-furnace industrial personal computer are both connected with the PLC for bidirectional communication.

2. A system for remotely controlling an automatic pull zone melting single crystal of silicon as claimed in claim 1 wherein: three cameras (3) are correspondingly arranged on the outer side of each signal window (2), and the three cameras (3) are respectively aligned to polycrystalline materials, liquid silicon and monocrystalline silicon in the zone furnace at the overlooking, parallel and upward angles;

the three cameras (3) are matched with the shooting area to cover the area where the polycrystalline material is converted from the polycrystalline high-temperature area to the single-crystal high-temperature area, and are used for collecting image information including the diameter of the polycrystalline material, the melting level of the polycrystalline material, the waist, the surface of the melt, the angle of the melt at three phase points and the diameter of the single crystal.

3. A system for remotely controlling an automatic pull zone melting single crystal of silicon as claimed in claim 1 wherein: the camera (3) is a high-pixel CCD camera.

4. A system for remotely controlling an automatic pull zone of a float silicon single crystal as claimed in claim 2 wherein: every camera (3) all corresponds and is provided with a camera alignment jig, the camera alignment jig includes base (5), with base (5) lateral sliding connection's slider (51), sets firmly montant (52) in slider (51) upper surface perpendicularly, montant (52) are close to the upper end and are set up altitude mixture control piece (6), the one end that montant (52) were kept away from in altitude mixture control piece (6) sets up high fine tuning subassembly (7), one side that montant (52) were kept away from in high fine tuning subassembly (7) transversely sets up round bar (81), it is connected with angle fine tuning subassembly (8) to rotate on round bar (81), angle fine tuning subassembly (8) and camera (3) rigid coupling.

5. A system for remotely controlling an automatic pull zone silicon single crystal as claimed in claim 4 wherein: base (5) upside sets up rectangular groove (53), and institute slider (51) set up in rectangular groove (53) inboard, rectangular groove (53) length direction middle part is provided with screw rod (54), the equal parallel arrangement in screw rod (54) both sides has guide arm (55), slider (51) correspond screw rod (54) and set up the screw hole, slider (51) correspond guide arm (55) and set up the guiding slide hole, screw rod (54) both ends correspond rectangular groove (53) both ends lateral wall and set firmly the post pole, the post pole passes through the bearing and rotates with rectangular groove (53) lateral wall that corresponds to be connected, guide arm (55) both ends also all rotate with rectangular groove (53) both ends lateral wall to be connected.

6. A system for remotely controlling an automatic pull zone silicon single crystal as claimed in claim 4 wherein: the height adjusting block (6) corresponds montant (52) and sets up vertical round hole, vertical round hole diameter corresponds the setting with montant (52) external diameter, height adjusting block (6) vertical round hole axis of perpendicular to sets up the screw hole, height adjusting block (6) corresponds the screw hole and sets up stop bolt (61), the screw thread one end and montant (52) lateral wall butt of stop bolt (61).

7. A system for remotely controlling an automatic pull zone silicon single crystal as claimed in claim 4 wherein: the height fine adjustment assembly (7) comprises a vertical plate (71), a rack (72) is fixedly arranged on one side, close to the height adjustment block (6), of the vertical plate (71), and the height adjustment block (6) is provided with a clearance groove (62) corresponding to the rack (72);

the inner side of the height adjusting block (6) is provided with a first gear (73) which is meshed and connected with a rack (72), the two sides of the first gear (73) are fixedly provided with a rotating shaft corresponding to the axis of the first gear (73), the height adjusting block (6) is provided with a U groove (63) corresponding to the rotating shaft, the opening of the U groove (63) faces to one side of a vertical plate (71), the bottom of the U groove (63) is a semicircular arc, and the diameter of the semicircular arc corresponds to the diameter of the rotating shaft,

a rotating shaft on one side of the first gear (73) extends out of the adjacent U-shaped groove (63) and then is fixedly connected with a distance adjusting knob (74), a rotating shaft on the other side extends out of the adjacent U-shaped groove (63) and then is provided with an external thread II and is connected with a locking knob (75), the locking knob (75) is provided with an internal thread corresponding to the external thread II, and when the locking knob (75) limits the rotation of the first gear (73), one end, close to the height adjusting block (6), of the locking knob (75) is pressed and attached to the outer side wall of the height adjusting block (6);

riser (71) bilateral symmetry sets up bar groove (76), the let dead slot (62) inside wall of altitude mixture control piece (6) corresponds bar groove (76) and sets up bar piece (64), bar groove (76) and the vertical sliding connection of bar piece (64).

8. A system for remotely controlling an automatic pull zone silicon single crystal as claimed in claim 7 wherein: the round rod (81) is fixedly arranged on one side, away from the rack (72), of the vertical plate (71), the angle fine adjustment assembly (8) comprises a rotating plate (82), one side of the rotating plate (82) is provided with a first through hole (821) with the same diameter corresponding to the round rod (81), and the rotating plate (82) is rotatably connected with the round rod (81);

a through hole II (822) is formed in the rotating plate (82) in parallel to the through hole I (821), a rotating rod (83) is arranged on the inner side of the through hole II (822), the diameter of the rotating rod (83) corresponds to that of the through hole II (822), and the rotating rod (83) is rotatably connected with the through hole II (822);

a second gear (84) is fixedly arranged on one side, close to the rotating plate (82), of the round rod (81), an external thread I is arranged at one end, far away from the vertical plate (71), of the round rod (81) and extending out of the through hole I (821), a detachable connecting nut (85) corresponding to the external thread I is arranged on the round rod (81), a third gear (86) is arranged on the rotating rod (83) corresponding to the second gear (84), the second gear (84) is meshed with the third gear (86), and the third gear (86) is rotatably connected with the rotating rod (83) through a bearing;

gear three (86) side sets up spacing hole (861) perpendicularly, spacing hole (861) use gear three (86) pivot to be provided with a plurality ofly as axis periphery equidistance, rotating plate (82) close to gear three (86) one side and correspond spacing hole (861) and set up bolt circular slot (823), gear three (86) are pegged graft spacing hole (861) and bolt circular slot (823) in proper order through bolt (87) and are carried on spacingly.

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