CN113271080A - Annular structure wine cup modal radio frequency micro-electromechanical resonator - Google Patents
Annular structure wine cup modal radio frequency micro-electromechanical resonator Download PDFInfo
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- CN113271080A CN113271080A CN202110543094.7A CN202110543094A CN113271080A CN 113271080 A CN113271080 A CN 113271080A CN 202110543094 A CN202110543094 A CN 202110543094A CN 113271080 A CN113271080 A CN 113271080A
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- H—ELECTRICITY
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- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02244—Details of microelectro-mechanical resonators
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- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02244—Details of microelectro-mechanical resonators
- H03H9/02393—Post-fabrication trimming of parameters, e.g. resonance frequency, Q factor
Abstract
The utility model provides a ring structure wineglass mode radio frequency micro-electromechanical syntonizer, includes: the resonance unit works in a wine cup mode and is in an annular structure; the supporting unit is coupled with the displacement node of the resonance unit and is used for supporting the resonance unit to be suspended; an electrode disposed at a periphery of the resonance unit; wherein the electrode and the resonance unit have a gap layer for electromechanical conversion between the resonance unit and the electrode. Compared with the resonator in the prior art, the wine cup mode radio frequency micro-electromechanical resonator has the advantages of lower thermoelastic loss, higher Q value, lower insertion loss, higher high-frequency stability, lower system power consumption and noise, smaller device size, contribution to large-scale low-cost production of devices, capability of being used for constructing various high-performance radio frequency devices in a radio frequency system and wide application prospect, and the gain requirement of a post-stage amplifying circuit is relaxed.
Description
Technical Field
The disclosure relates to the field of Radio Frequency Micro-Electro-Mechanical systems (RF-MEMS), in particular to a wine cup mode Radio Frequency Micro-electromechanical resonator with an annular structure.
Background
In the future, wireless communication systems are moving toward high frequency, multimode, miniaturization, integration, and low power consumption. However, the conventional resonators cannot fully meet the requirements of the future wireless communication systems due to various limiting factors, and particularly, the conventional resonators are characterized in the following aspects: the quartz crystal resonator has low frequency, is sensitive to thermal shock and has larger power consumption; the ceramic resonator has large volume and is difficult to realize monolithic integration; the LC resonance circuit and the SAW (Surface Acoustic Wave) resonator have low Q value and large insertion loss; the frequency of the FBAR (Film Bulk Acoustic Resonator) is determined by the Film thickness, which is difficult to control accurately.
Compared with the resonators, the MEMS resonator has better performance and wide application prospect.
In the process of implementing the concept of the present disclosure, the inventors found that at least the following problems exist in the related art: the MEMS resonator of the bending mode of the out-of-plane vibration has large thermoelastic loss and low Q value, so that the resonator has large insertion loss and poor frequency stability; the frequency of the MEMS resonator of the in-plane vibration mode depends on the in-plane size, the occupied area is large, and the large-scale integration of devices is not facilitated.
Disclosure of Invention
In view of the above, the present disclosure is directed to a ring-structured wine glass mode rf micro-electromechanical resonator, so as to at least partially solve at least one of the above-mentioned technical problems.
The utility model provides a ring structure wineglass mode radio frequency micro-electromechanical syntonizer, includes: the resonance unit is in a ring structure; the resonance unit works in an in-plane wine glass mode and performs mutually opposite contraction and expansion motions;
a supporting unit coupled to a displacement node of the resonant unit for supporting the resonant unit in the air;
an electrode disposed at the periphery of the resonance unit; the electrode and the resonance unit are provided with a gap layer for electromechanical conversion between the resonance unit and the electrode.
According to an embodiment of the present disclosure, the resonance unit includes an outer edge and an inner edge; wherein, the outer edge shape comprises at least one of a regular polygon, a circle and an ellipse; wherein, the shape of the inner edge comprises at least one of a regular polygon, a circle and an ellipse.
According to an embodiment of the present disclosure, the material of the resonant unit includes at least one of a silicon-based material, diamond, a III-V semiconductor, and a piezoelectric material.
According to an embodiment of the present disclosure, the resonant unit is a circular ring structure or a square ring structure; the number of the supporting units is 4, and the supporting units are respectively distributed on the displacement nodes of the resonance unit; wherein, the above-mentioned electrode includes 4, and every above-mentioned electrode distributes between two adjacent above-mentioned support units.
According to the embodiment of the disclosure, the resonance unit is provided with adjusting holes which are axially symmetrically distributed; wherein, the adjusting holes are not filled with materials, partially filled with materials or completely filled with materials.
According to an embodiment of the present disclosure, the shape of the adjustment hole includes a polygon and/or a circle.
According to an embodiment of the present disclosure, the supporting unit includes a support and a supporting beam; wherein one end of the support beam is coupled to a displacement node of the resonance unit, and the other end of the support beam is fixed to the support.
According to an embodiment of the present disclosure, the supporting beam is at least one of a straight beam, a curved beam, a ring beam, or a periodic structure; the material of the support beam comprises at least one of silicon-based material, diamond, III-V semiconductor and piezoelectric material.
According to an embodiment of the present disclosure, the electrode is configured as a single-ended mode drive-detect or a double-ended mode drive-detect; wherein, the shape of the electrode comprises at least one of rectangle, sector, interdigital and comb teeth; the material of the electrode includes a metal and/or a semiconductor.
According to an embodiment of the present disclosure, the gap layer is configured to be not filled with a dielectric material, partially filled with a dielectric material, or completely filled with a dielectric material; wherein the dielectric layerThe material includes air, HfO2、SiNxOr a composite dielectric material.
According to the embodiment of the disclosure, because the annular-structure wine glass mode radio frequency micro-electromechanical resonator realizes the annular-structure wine glass mode, compared with the resonator in the prior art, the thermoelastic loss is lower, the Q value is higher, the insertion loss is lower, the high-frequency stability is higher, the gain requirement of a post-stage amplifying circuit is relaxed, the system power consumption and the noise are lower, the device volume is smaller, and the large-scale integration is easy.
In summary, the wine cup mode radio frequency micro-electromechanical resonator with the annular structure can be used for constructing various high-performance radio frequency devices in a radio frequency system, and has a wide application prospect.
Drawings
The above and other objects, features and advantages of the present disclosure will become more apparent from the following description of embodiments of the present disclosure with reference to the accompanying drawings, in which:
FIG. 1 schematically illustrates a structural schematic diagram of a wine glass mode radio frequency micro-electromechanical resonator with a circular ring structure according to an embodiment of the disclosure;
fig. 2 schematically shows a schematic diagram of a resonant unit of the ring structure wineglass mode radio frequency micro-electromechanical resonator in fig. 1 operating in a wineglass mode;
FIG. 3 is a schematic view of a disk-shaped tread vibration unit of the prior art;
fig. 4 schematically shows a structural schematic diagram of a square ring structure wine glass mode radio frequency micro-electromechanical resonator according to another embodiment of the disclosure.
In the above figures, the reference numerals have the following meanings:
1. a resonance unit; 2. an inner edge; 3. an outer edge; 4. an adjustment hole; 5. a support beam; 6. a support; 7. electrode 8, gap layer; 9. a ring-shaped structure wine glass mode; 10. a disc-shaped resonant unit.
Detailed Description
The present disclosure is described in further detail below with reference to the accompanying drawings and examples. It is to be understood that the specific embodiments described herein are merely illustrative of the disclosure and not restrictive thereof, and that various features described in the embodiments may be combined to form multiple alternatives. It should be further noted that, for the convenience of description, only some of the structures relevant to the present disclosure are shown in the drawings, not all of them.
The utility model provides a ring structure wineglass mode radio frequency micro-electromechanical syntonizer, includes: the resonance unit is in a ring structure; the resonance unit works in a wine glass mode and performs mutually opposite contraction and expansion motions; the supporting unit is coupled with the displacement node of the resonance unit and is used for supporting the resonance unit to be suspended; an electrode disposed at a periphery of the resonance unit; wherein the electrode and the resonance unit have a gap layer for electromechanical conversion between the resonance unit and the electrode.
By utilizing the annular structure wine glass mode radio frequency micro-electromechanical resonator provided by the disclosure, the annular structure wine glass mode radio frequency micro-electromechanical resonator works under the annular structure wine glass mode, the thermoelastic loss is low, the Q value is high, the effects of low insertion loss and high frequency stability can be realized, the gain requirement of a post-stage amplifying circuit is relaxed, and the system power consumption and noise are reduced; compared with other in-plane modes, the annular structure wine cup mode of the annular structure wine cup mode radio frequency micro-electromechanical resonator has the advantages that the volume of devices is smaller under the same frequency, and large-scale integration is easy.
In summary, the wine cup mode radio frequency micro-electromechanical resonator with the annular structure provided by the disclosure has the advantages of high Q value, small size, high stability and the like.
According to an embodiment of the present disclosure, the resonance unit includes an outer edge and an inner edge; wherein the outer edge shape comprises at least one of a regular polygon, a circle and an ellipse; wherein the inner edge shape comprises at least one of a regular polygon, a circle, and an ellipse.
According to an embodiment of the present disclosure, the material of the resonance unit may employ at least one of a silicon-based material (e.g., polycrystalline silicon, single crystal silicon, SiC, etc.), diamond, a III-V semiconductor, or a piezoelectric material.
Fig. 1 schematically shows a structural schematic diagram of a wine glass mode radio frequency micro-electromechanical resonator with a circular ring structure according to an embodiment of the disclosure.
According to an embodiment of the present disclosure, as shown in fig. 1, the resonance unit 1 includes an inner edge 2 and an outer edge 3; wherein both the inner edge 2 and the outer edge 3 of the resonator element 1 are circular.
According to the embodiment of the present disclosure, as shown in fig. 1, the resonance unit 1 has a circular ring shape, which is surrounded by an inner edge 2 to form a through hole in the middle.
According to the embodiment of the present disclosure, as shown in fig. 1, the through holes of the resonant unit 1 are distributed at the geometric center to form a circular ring structure.
Fig. 2 schematically shows a schematic diagram of the resonant unit of the ring structure wineglass mode radio frequency micro-electromechanical resonator in fig. 1 operating in the wineglass mode.
According to the embodiment of the present disclosure, as shown in fig. 1 and fig. 2, the resonant unit 1 operates in the wine glass mode 9, the vibration axes are the x axis and the y axis, the geometric center of the resonant unit 1 is used as the origin, the resonant unit 1 performs mutually opposite contraction and expansion movements on the x axis and the y axis, the displacement node of the resonant unit 1 is located on the axes of y ═ x and y ═ x, and the displacement amount at the displacement node is the minimum.
Fig. 3 schematically shows a disc-shaped resonator element according to the prior art.
As shown in fig. 3, the resonant unit 10 has a disk shape.
It should be noted that silicon-based materials (e.g., polysilicon, single crystal silicon, SiC, etc.), diamond, III-V semiconductors, piezoelectric materials, etc. may be used as the resonant unit 10. However, the disk-shaped resonant unit 10 disclosed in the prior art, for example, cannot form a ring-structured wine glass modal working state, and only can form a wine glass modal working state.
Compared with the radio frequency micro-electromechanical resonator in the prior art, the radio frequency micro-electromechanical resonator capable of forming the annular structure wine cup mode can achieve the effects of higher Q value, lower insertion loss and higher high frequency stability, and can also enable the device to be smaller in size and easy to integrate on a large scale.
According to the embodiment of the present disclosure, an adjustment hole may be further provided on the resonance unit. Wherein, the adjusting hole can be provided with 1, 2 or more. The setting is adjustable according to the actual situation, which is not limited herein.
According to an embodiment of the present disclosure, the shape of the adjustment hole may be a polygon (e.g., a rectangle or a diamond), a circle, or an ellipse.
According to an alternative embodiment of the present disclosure, as shown in fig. 1, the adjustment hole 4 is rectangular in shape and rounded at four corners.
According to the embodiment of the disclosure, the round-cornered (i.e. rounded) design can concentrate energy at the edge of the resonant unit, and reduce energy loss caused by modal distortion.
According to the embodiment of the disclosure, the adjusting hole can change the structural rigidity and adjust the resonant frequency of the resonant unit.
According to the embodiment of the disclosure, the resonance unit can be further provided with adjusting holes which are axially symmetrically distributed; wherein, the adjusting hole is not filled with materials, is partially filled with materials or is completely filled with materials.
According to the embodiment of the disclosure, the rigidity adjusting material is filled in the adjusting hole, so that the equivalent rigidity of the resonance unit can be changed, and the working frequency of the resonator can be adjusted.
According to an embodiment of the present disclosure, the support unit includes a support beam and a stand; one end of the supporting beam is coupled with the displacement node of the resonance unit, and the other end of the supporting beam is fixed on the support.
According to an embodiment of the present disclosure, as shown in fig. 1, the resonance unit 1 is a circular ring structure; the number of the supporting units is 4, and the supporting units are respectively distributed on the displacement nodes of the resonance unit 1; one end of the support beam 5 is coupled to a displacement node of the resonance unit 1, and the other end of the support beam 5 is fixed to the support 6.
According to the embodiment of the present disclosure, the thickness of the support 6 is greater than the thickness of the support beam 5 and the resonance unit 1, respectively, so that the resonance unit 1 is maintained in a suspended state.
It should be noted that the modes of the support beam 5 and the resonance unit 1 are matched, and the vibration frequency of the support beam 5 is consistent with that of the resonance unit 1, so as to reduce the energy loss at the connection part and improve the Q value.
According to an embodiment of the present disclosure, the support beam is at least one of a straight beam, a curved beam, a ring beam, or a periodic structure.
According to an embodiment of the present disclosure, as shown in fig. 1, the 4 support beams 5 are all straight beams.
According to the embodiment of the present disclosure, the material of the support beam may be at least one of silicon-based material, diamond, III-V semiconductor, and piezoelectric material.
According to the embodiment of the present disclosure, as shown in fig. 1, the number of the electrodes 7 is 4, and each electrode 7 is distributed between two adjacent supporting units.
According to an embodiment of the present disclosure, the shape of the electrode includes at least one of a rectangle, a sector, an interdigital, and a comb tooth.
According to an embodiment of the present disclosure, the material of the electrode includes a metal and/or a semiconductor.
According to an embodiment of the present disclosure, the electrode 7 is fan-shaped as shown in fig. 1.
According to an embodiment of the present disclosure, the electrode configuration is single ended mode drive-detect or double ended mode drive-detect.
According to embodiments of the present disclosure, the electrodes may be single ended mode drive-detect or double ended mode drive-detect; when single-ended mode driving-detection is adopted, two opposite electrodes are simultaneously used as driving electrodes or simultaneously used as detection electrodes, the phases of the two driving electrodes are the same, and the phases of the two detection electrodes are also the same. According to the embodiment of the disclosure, the single-ended mode driving-detection is utilized, so that a larger driving area can be possessed, the measurement Q value is improved, and a resonator with low insertion loss can be realized.
According to the embodiment of the disclosure, when the electrodes are in double-end mode driving-detection, two adjacent electrodes are simultaneously used as driving electrodes or simultaneously used as detection electrodes, the phase difference between the two driving electrodes is 180 degrees, and the phase difference between the two detection electrodes is 180 degrees. According to the embodiments of the present disclosure, feedthrough signals can be suppressed using double-ended mode drive-detection, resulting in a high-purity spectrum.
According to the embodiment of the present disclosure, the electrode and the resonance unit have a gap layer for electromechanical conversion between the resonance unit and the electrode. Wherein the gap layer is configured to be not filled with dielectric material, partially filled with dielectric material, or completely filled with dielectric material.
According to the embodiment of the present disclosure, as shown in fig. 1, an electrostatic transduction mechanism is adopted between the resonance unit 1 and the electrode 7; wherein, there is a gap layer 8 between the resonance unit 1 and the electrode 7.
According to an embodiment of the present disclosure, the material of the dielectric includes air, HfO2、SiNxOr a composite dielectric material.
It should be noted that the thickness of the gap layer may be in the range of zero to several microns, depending on the resonator insertion loss index requirements.
Fig. 4 schematically shows a structural schematic diagram of a square ring structure wine glass mode radio frequency micro-electromechanical resonator according to another embodiment of the disclosure.
According to an embodiment of the present disclosure, as shown in fig. 1 and fig. 4, a square ring-structured wine glass mode radio frequency micro electro mechanical resonator according to another embodiment of the present disclosure in fig. 4 is the same as or similar to the part of fig. 1 in terms of component structure and material of a wine glass mode radio frequency micro electro mechanical resonator according to an embodiment of the present disclosure, and details are not repeated herein. The difference lies in that: the inner edge 2 and the outer edge 3 of the resonator element 1 may also be square.
According to an embodiment of the present disclosure, the resonance unit is a square ring structure; the number of the supporting units is 4, and the supporting units are respectively distributed on the displacement nodes of the resonance unit; wherein, the electrode includes 4, and every electrode distributes between two adjacent support units.
According to the embodiment of the present disclosure, as shown in fig. 4, the number of the supporting units includes 4, which are respectively distributed on the displacement nodes of the resonant unit 1, that is, the displacement nodes of the resonant unit 1 are located on four corners of the resonant unit.
According to the embodiment of the present disclosure, as shown in fig. 4, 4 electrodes 7 are distributed among four supporting units, and the 4 electrodes 7 are all parallel to four sides of the square ring structure.
According to an embodiment of the present disclosure, the electrode 7 may also be rectangular in shape, as shown in fig. 4.
According to the embodiment of the present disclosure, as shown in fig. 4, the shape of the adjusting hole 4 is a combination of a rectangle and a circle, the long side of which remains unchanged, and the two short sides of which are semicircular arcs.
According to the embodiment of the present disclosure, the adjustment hole can improve structural rigidity, and adjust the resonance frequency of the resonance unit.
According to the embodiment of the disclosure, the resonant unit of the wine glass mode radio frequency micro-electromechanical resonator with the annular structure is not limited to a circular annular structure, and can also be a square annular structure. As long as the annular structure wine glass mode can be realized. However, in the annular-structure wine glass mode, the thermoelastic loss is low in the vibration process, the Q value is high, and the annular-structure wine glass mode is an excellent choice for constructing a resonance structure.
The above description is only exemplary of the present disclosure and should not be taken as limiting the disclosure, as any modification, equivalent replacement, or improvement made within the spirit and principle of the present disclosure should be included in the scope of protection of the present disclosure.
Claims (10)
1. A ring structure wineglass mode radio frequency micro-electromechanical resonator is characterized by comprising:
the resonance unit is in a ring structure; the resonance unit works in a wine glass mode and performs mutually opposite contraction and expansion motions;
the supporting unit is coupled with the displacement node of the resonance unit and is used for supporting the resonance unit to be suspended;
an electrode disposed at a periphery of the resonance unit; wherein the electrode and the resonance unit have a gap layer for electromechanical conversion between the resonance unit and the electrode.
2. The ring structure wineglass mode radio frequency microelectromechanical resonator of claim 1, characterized in that the resonating unit comprises an outer edge and an inner edge; wherein the outer edge shape comprises at least one of a regular polygon, a circle, and an ellipse; wherein the inner edge shape comprises at least one of a regular polygon, a circle, and an ellipse.
3. A ring structured wine glass mode radio frequency microelectromechanical resonator according to claim 2, the material of said resonating element comprising at least one of silicon based materials, diamond, III-V semiconductors, piezoelectric materials.
4. The ring-structured wine glass mode radio frequency microelectromechanical resonator of claim 1, characterized in that the resonance unit is a circular ring structure or a square ring structure; the number of the supporting units is 4, and the supporting units are respectively distributed on the displacement nodes of the resonance unit; the number of the electrodes is 4, and each electrode is distributed between two adjacent supporting units.
5. The ring-structured wine glass mode radio frequency micro-electromechanical resonator according to claim 1, wherein the resonance unit is provided with adjusting holes which are distributed in axial symmetry; wherein the adjusting hole is not filled with a material, is partially filled with a material or is completely filled with a material.
6. The ring structure wineglass mode radio frequency microelectromechanical resonator of claim 5, characterized in that the shape of the adjustment aperture comprises a polygon and/or a circle.
7. The ring structure wineglass mode radio frequency microelectromechanical resonator of claim 1, characterized in that the support unit comprises a support and a support beam; one end of the supporting beam is coupled with a displacement node of the resonance unit, and the other end of the supporting beam is fixed on the support.
8. The ring structure wineglass mode radio frequency microelectromechanical resonator of claim 7, characterized in that the support beam is at least one of a straight beam, a curved beam, a ring beam or a periodic structure; the material of the support beam comprises at least one of silicon-based materials, diamond, III-V group semiconductors and piezoelectric materials.
9. The ring structure wineglass mode radio frequency microelectromechanical resonator of claim 1, characterized in that the electrodes are configured as single-ended mode drive-detect or double-ended mode drive-detect; wherein the shape of the electrode comprises at least one of rectangle, sector, interdigital and comb teeth; the material of the electrodes comprises a metal and/or a semiconductor.
10. The ring structure wineglass mode radio frequency microelectromechanical resonator of claim 1, characterized in that the gap layer is configured to be unfilled, partially filled, or completely filled with a dielectric material; wherein the dielectric material comprises air, HfO2、SiNxOr a composite dielectric material.
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20040207492A1 (en) * | 2002-12-17 | 2004-10-21 | Nguyen Clark T.-C. | Micromechanical resonator device and method of making a micromechanical device |
| US20050206479A1 (en) * | 2004-01-21 | 2005-09-22 | Nguyen Clark T | High-Q micromechanical resonator devices and filters utilizing same |
| US20160118954A1 (en) * | 2014-10-22 | 2016-04-28 | Micrel, Inc. | Compound spring mems resonators for frequency and timing generation |
| CN110661506A (en) * | 2019-09-20 | 2020-01-07 | 中国科学院半导体研究所 | RF-MEMS resonator based on bulk acoustic wave vibration mode coupling |
| CN111490740A (en) * | 2019-01-29 | 2020-08-04 | 中国科学院半导体研究所 | Arrayed distributed lamb mode radio frequency micro-electromechanical resonator |
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2021
- 2021-05-18 CN CN202110543094.7A patent/CN113271080A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20040207492A1 (en) * | 2002-12-17 | 2004-10-21 | Nguyen Clark T.-C. | Micromechanical resonator device and method of making a micromechanical device |
| US20050206479A1 (en) * | 2004-01-21 | 2005-09-22 | Nguyen Clark T | High-Q micromechanical resonator devices and filters utilizing same |
| US20160118954A1 (en) * | 2014-10-22 | 2016-04-28 | Micrel, Inc. | Compound spring mems resonators for frequency and timing generation |
| CN111490740A (en) * | 2019-01-29 | 2020-08-04 | 中国科学院半导体研究所 | Arrayed distributed lamb mode radio frequency micro-electromechanical resonator |
| CN110661506A (en) * | 2019-09-20 | 2020-01-07 | 中国科学院半导体研究所 | RF-MEMS resonator based on bulk acoustic wave vibration mode coupling |
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