CN113264499A - Micro-nano substrate transfer printing method based on water-soluble polyacrylic acid - Google Patents
Micro-nano substrate transfer printing method based on water-soluble polyacrylic acid Download PDFInfo
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- CN113264499A CN113264499A CN202110381114.5A CN202110381114A CN113264499A CN 113264499 A CN113264499 A CN 113264499A CN 202110381114 A CN202110381114 A CN 202110381114A CN 113264499 A CN113264499 A CN 113264499A
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- polyacrylic acid
- adhesive tape
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- 239000000758 substrate Substances 0.000 title claims abstract description 86
- 229920002125 Sokalan® Polymers 0.000 title claims abstract description 35
- 239000004584 polyacrylic acid Substances 0.000 title claims abstract description 35
- 238000000034 method Methods 0.000 title claims abstract description 26
- 238000010023 transfer printing Methods 0.000 title claims abstract description 19
- 239000002390 adhesive tape Substances 0.000 claims abstract description 45
- 239000004793 Polystyrene Substances 0.000 claims abstract description 16
- 229920002223 polystyrene Polymers 0.000 claims abstract description 16
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 13
- 238000012546 transfer Methods 0.000 claims abstract description 9
- 239000004743 Polypropylene Substances 0.000 claims abstract description 6
- -1 polypropylene Polymers 0.000 claims abstract description 6
- 229920001155 polypropylene Polymers 0.000 claims abstract description 6
- 238000010438 heat treatment Methods 0.000 claims description 7
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 claims description 6
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 claims description 6
- 239000002798 polar solvent Substances 0.000 claims description 6
- 238000002844 melting Methods 0.000 claims description 3
- 230000008018 melting Effects 0.000 claims description 3
- 239000012790 adhesive layer Substances 0.000 claims description 2
- 238000002791 soaking Methods 0.000 abstract description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 13
- 229910052710 silicon Inorganic materials 0.000 description 13
- 239000010703 silicon Substances 0.000 description 13
- 238000001338 self-assembly Methods 0.000 description 8
- 238000003825 pressing Methods 0.000 description 6
- 238000013461 design Methods 0.000 description 5
- 238000005516 engineering process Methods 0.000 description 4
- 239000000084 colloidal system Substances 0.000 description 3
- 239000004005 microsphere Substances 0.000 description 3
- 238000004140 cleaning Methods 0.000 description 2
- 239000002131 composite material Substances 0.000 description 2
- 238000001035 drying Methods 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 239000010410 layer Substances 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 238000001816 cooling Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 239000008367 deionised water Substances 0.000 description 1
- 229910021641 deionized water Inorganic materials 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000008595 infiltration Effects 0.000 description 1
- 238000001764 infiltration Methods 0.000 description 1
- 238000010147 laser engraving Methods 0.000 description 1
- 239000002086 nanomaterial Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 239000013545 self-assembled monolayer Substances 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 238000004416 surface enhanced Raman spectroscopy Methods 0.000 description 1
Images
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
- B81C1/00436—Shaping materials, i.e. techniques for structuring the substrate or the layers on the substrate
- B81C1/00444—Surface micromachining, i.e. structuring layers on the substrate
- B81C1/00468—Releasing structures
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
- B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
- B81C1/00023—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems without movable or flexible elements
- B81C1/00119—Arrangement of basic structures like cavities or channels, e.g. suitable for microfluidic systems
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y40/00—Manufacture or treatment of nanostructures
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- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Nanotechnology (AREA)
- Dispersion Chemistry (AREA)
- Analytical Chemistry (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Crystallography & Structural Chemistry (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
Abstract
The invention discloses a micro-nano substrate transfer printing method based on water-soluble polyacrylic acid, which utilizes the viscosity and water solubility of the polyacrylic acid to transfer and release a micro-nano substrate based on polystyrene without damage. The method comprises the following steps: firstly, the ordered substrate is stuck up by using polyacrylic acid adhesive tape. ② fixing the adhesive tape to the transferred target substrate. Thirdly, the substrate and the adhesive tape are heated to combine the ordered base and the substrate. Soaking the substrate and the adhesive tape into water, and removing the adhesive tape after the polyacrylic acid is dissolved. The method utilizes the controllability of the viscosity of the polypropylene adhesive tape to realize nondestructive, rapid and customized transfer printing on the micro-nano substrate.
Description
Technical Field
The invention relates to a micro-nano substrate transfer printing method based on water-soluble polyacrylic acid, and belongs to the technical field of nano ordered substrate transfer printing.
Background
In recent years, various substrates based on a polystyrene colloid self-assembly technology have the advantages of low cost, simplicity in preparation, good uniformity, high reproducibility, good adjustability and the like, become one of the popular leading edge micro-nano processing technologies in recent years, and provide technical support for the research of the fields of optical super-surfaces, controllable infiltration interfaces, fluorescence enhancement, surface enhanced Raman scattering and the like.
By adjusting the size of the polystyrene microspheres, various types of single-layer ordered substrates can be prepared. By the superposition of multilayer polystyrene microspheres or other nano-and micron-particle self-assembled monolayers, the ordered micro-nano substrate with special morphology and based on polystyrene can be prepared in a large area. The low melting point and high plasticity of polystyrene further enrich the operable space of the substrate.
However, self-assembly techniques often fail to control the area of colloidal particle deposition, limiting the application of such ordered substrates in some fields. For example, the channel of the microfluidic chip is usually in the micrometer scale, which far exceeds the precision range of the general self-assembly technology for position control. In order to deal with similar difficulties and simultaneously inherit and play the existing various self-assembly technologies, a transfer printing method capable of transferring polystyrene-based ordered micro-nano substrates in a customized, rapid and lossless manner is urgently needed to be developed.
Disclosure of Invention
The technical problem is as follows: in order to overcome the defects in the prior art, the micro-nano substrate based on the self-assembly of the polystyrene colloid is quickly, nondestructively and custom-made transferred.
The technical scheme is as follows: a micro-nano substrate transfer printing method based on water-soluble polyacrylic acid utilizes the viscosity and water solubility of the polyacrylic acid to transfer and release a micro-nano substrate based on polystyrene without damage. The method comprises the following steps:
the first step is as follows: sticking the micro-nano substrate by using a polyacrylic acid adhesive tape;
the second step is that: fixing the adhesive tape to the transferred target substrate;
the third step: heating the substrate and the adhesive tape to combine the micro-nano substrate with the substrate;
the fourth step: the substrate and tape are immersed in a polar solvent and the tape is removed after the polyacrylic acid loses its tack.
The polyacrylic acid adhesive tape is a single-sided or double-sided adhesive tape with an adhesive layer made of hydrophilic modified polypropylene.
The heating temperature is the melting point temperature or the softening temperature of the micro-nano substrate.
The polar solvent comprises any one of water, methanol and ethanol for dissolving polyacrylic acid.
The operation of removing the adhesive tape is carried out in a polar solvent.
Has the advantages that:
1. the micro-nano substrate is adhered by utilizing the viscosity of the polyacrylic acid adhesive tape in a dry environment, and the transferred micro-nano substrate can keep a complete and fine structure.
2. The utilization efficiency of the colloid self-assembly substrate is effectively improved.
3. And (3) soaking the composite obtained in the third step into water by utilizing the water solubility of polyacrylic acid, so that the polypropylene adhesive tape in the composite loses viscosity, and further removing the adhesive tape. The transfer printing steps and technical requirements are simplified.
4. The adhesion of heated polystyrene is enhanced, so that the micro-nano substrate and the substrate are tightly attached, and the micro-nano substrate and the substrate are firmly combined after cooling, and the substrate has better adaptability to substrates with a series of appearances.
5. The technical parameters are convenient to adjust, and the shape of the adhesive tape can be designed in modes of laser engraving and the like.
Drawings
FIG. 1 is a schematic diagram of a micro-nano substrate transfer printing method based on water-soluble polyacrylic acid provided by the invention. Wherein, 1 is a micro-nano substrate, 2 is a raw substrate, 3 is a polystyrene microsphere, 4 is a polyacrylic adhesive tape, and 5 is a target substrate.
FIG. 2 is a design drawing of the custom-made adhesive tape of example 1.
Fig. 3 is a photograph of the micro-nano substrate after transfer printing of example 1.
Fig. 4 SEM of example 1 before micro-nano substrate transfer.
Fig. 5 SEM of the micro-nano substrate of example 1 after transfer.
Fig. 6 is an SEM of the micro-nano substrate of example 2 after transfer.
Detailed Description
The invention is further explained below with reference to examples and figures. The following examples are provided only for illustrating the present invention and are not intended to limit the scope of the invention.
An ordered substrate transfer printing method based on water-soluble polyacrylic acid utilizes the viscosity and water solubility of polyacrylic acid to transfer and release a micro-nano substrate based on polystyrene without damage. The method comprises the following steps:
the first step is as follows: sticking the micro-nano substrate by using a polyacrylic acid adhesive tape; the polyacrylic acid adhesive tape is in direct contact with the micro-nano substrate.
The second step is that: fixing the adhesive tape to the transferred target substrate; the polystyrene is in direct contact with the target substrate.
The third step: heating the substrate and the adhesive tape to combine the micro-nano substrate with the substrate;
the fourth step: and (3) immersing the substrate and the adhesive tape into water, and removing the adhesive tape after the polyacrylic acid is dissolved.
Example 1
Polystyrene/gold film/silver nano cubic substrate with a similar granular structure and a Desha 64437 modified polypropylene adhesive tape are taken as examples. The micro-nano substrate is prepared on the PET sheet by a layer-by-layer self-assembly method.
The first step is as follows: the ordered substrate was taped up using polyacrylic tape. Specifically, the adhesive tape carved into a specified shape by laser is spread on a substrate, the adhesive tape is made to be in fit by slight pressing, and the adhesive tape is lifted at a constant speed. The shape of the tape is designed as shown in fig. 2.
The second step is that: and attaching the adhesive tape to a specified position on the silicon wafer to be transferred, and lightly pressing to ensure that the adhesive tape is fitted.
The third step: the silicon wafer and tape were heated to bond the ordered substrate to the silicon wafer and held at 120 c for 20 seconds. Specifically, the silicon wafer was placed on a substrate preheated to 120 ℃, and the heating plate was removed after gently pressing the tape for 20 seconds using a soft rubber block.
The fourth step: and (3) immersing the silicon chip and the adhesive tape into water, and removing the adhesive tape after the polyacrylic acid is dissolved. Specifically, the wafer was immersed in deionized water at 70 ℃ for 20 minutes. As the polyacrylic acid dissolves, the tape gradually loses tack and detaches from the ordered substrate. And cleaning and drying the silicon wafer to finish the transfer printing process.
The tape shape of the design was compared with the transfer results (fig. 2, fig. 3), and the customized design was revealed. Comparing the substrate morphology before and after the method is implemented (fig. 4 and 5), the complex micro-nano structure of the substrate is completely reserved. The embodiment fully proves that the customized micro-nano substrate can be transferred quickly and nondestructively by using the method.
Example 2
Polystyrene/gold film substrates with a structure similar to a granular body, and a Desha 64437 modified polypropylene tape are taken as examples. The micro-nano substrate is prepared on the PET sheet by a layer-by-layer self-assembly method.
The first step is as follows: the ordered substrate was taped up using polyacrylic tape. Specifically, the adhesive tape carved into a specified shape by laser is spread on a substrate, the adhesive tape is made to be in fit by slight pressing, and the adhesive tape is lifted at a constant speed. The tape shape is designed as 3 columns and 2 rows of square patches.
The second step is that: and attaching the adhesive tape to a specified position on the silicon wafer to be transferred, and lightly pressing to ensure that the adhesive tape is fitted.
The third step: the silicon wafer and tape were heated to bond the ordered substrate to the silicon wafer and held at 120 c for 20 seconds. Specifically, the silicon wafer was placed on a substrate preheated to 120 ℃, and the heating plate was removed after gently pressing the tape for 20 seconds using a soft rubber block.
The fourth step: and (3) immersing the silicon chip and the adhesive tape into water, and removing the adhesive tape after the polyacrylic acid is dissolved. Specifically, the silicon wafer was immersed in ethanol at 70 ℃ for 20 minutes. As the polyacrylic acid dissolves, the tape gradually loses tack and detaches from the ordered substrate. And cleaning and drying the silicon wafer to finish the transfer printing process.
The tape shape of the design was compared to the transfer results (fig. 6), and a customized design was presented. The embodiment fully proves that the customized micro-nano substrate can be transferred quickly and nondestructively by using the method.
Claims (5)
1. A micro-nano substrate transfer printing method based on water-soluble polyacrylic acid is characterized in that the viscosity and water solubility of the polyacrylic acid are utilized to transfer and release a micro-nano substrate based on polystyrene without damage, and the method comprises the following steps:
the first step is as follows: sticking the micro-nano substrate by using a polyacrylic acid adhesive tape;
the second step is that: fixing the adhesive tape to the transferred target substrate;
the third step: heating the substrate and the adhesive tape to combine the micro-nano substrate with the substrate;
the fourth step: the substrate and tape are immersed in a polar solvent and the tape is removed after the polyacrylic acid loses its tack.
2. The micro-nano substrate transfer printing method based on the water-soluble polyacrylic acid is characterized in that the polyacrylic acid adhesive tape is a single-sided or double-sided adhesive tape with an adhesive layer made of hydrophilic modified polypropylene.
3. The micro-nano substrate transfer printing method based on the water-soluble polyacrylic acid according to claim 1, wherein in the third step, the heating temperature is the melting point temperature or the softening temperature of the micro-nano substrate.
4. The micro-nano substrate transfer printing method based on the water-soluble polyacrylic acid, according to claim 1, wherein in the fourth step, the polar solvent comprises any one of water, methanol and ethanol for dissolving the polyacrylic acid.
5. The micro-nano substrate transfer printing method based on the water-soluble polyacrylic acid according to claim 1, wherein in the fourth step, the operation of removing the adhesive tape is performed in a polar solvent.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110381114.5A CN113264499A (en) | 2021-04-09 | 2021-04-09 | Micro-nano substrate transfer printing method based on water-soluble polyacrylic acid |
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| Application Number | Priority Date | Filing Date | Title |
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| CN202110381114.5A CN113264499A (en) | 2021-04-09 | 2021-04-09 | Micro-nano substrate transfer printing method based on water-soluble polyacrylic acid |
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| KR20190042905A (en) * | 2017-10-17 | 2019-04-25 | 한국과학기술원 | Fabrication of self-assembled quantum dot array in single-quantum-particle resolution using block-copolymer as template and nanotransfer printing of the array |
| CN110760275A (en) * | 2018-07-27 | 2020-02-07 | 德莎欧洲股份公司 | Colored backing-free covering tape and its preparation method and use |
| CN111128716A (en) * | 2019-11-15 | 2020-05-08 | 西安电子科技大学 | Heterogeneous integration method for large-area graph self-alignment |
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2021
- 2021-04-09 CN CN202110381114.5A patent/CN113264499A/en active Pending
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| KR20140099409A (en) * | 2013-02-01 | 2014-08-12 | 국민대학교산학협력단 | Pattern transferring method using modification by self assembled monolayer |
| KR20170031401A (en) * | 2015-09-11 | 2017-03-21 | 한국과학기술연구원 | 3 Method of preparing metal nano wire and metal nano catalyst |
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