CN113249782A

CN113249782A - Semiconductor process equipment and locking mechanism

Info

Publication number: CN113249782A
Application number: CN202110513142.8A
Authority: CN
Inventors: 王石
Original assignee: Beijing Naura Microelectronics Equipment Co Ltd
Current assignee: Beijing Naura Microelectronics Equipment Co Ltd
Priority date: 2021-05-11
Filing date: 2021-05-11
Publication date: 2021-08-13

Abstract

The application discloses semiconductor process equipment and locking mechanism, wherein, semiconductor process equipment is including the furnace that is used for carrying on semiconductor technology and the closing cap that is used for sealing the port of furnace, and locking mechanism includes setting element and first drive division, and the setting element sets up in the port department, and first drive division is connected with the setting element, and first drive division can drive the setting element and rotate to make the setting element lock the closing cap in the port, or make the setting element unblock the closing cap in the port. The scheme can facilitate the processes of locking and unlocking the sealing cover on the port, thereby improving the process efficiency of the semiconductor.

Description

Semiconductor process equipment and locking mechanism

Technical Field

The application relates to the field of semiconductor processing, in particular to semiconductor process equipment and a locking mechanism.

Background

In a semiconductor process, a physical vapor transport method is a commonly used semiconductor preparation process, and the process (such as a SiC growth process) requires that a raw material to be processed is placed in a reaction chamber (or a reaction furnace), a temperature gradient in the reaction chamber is increased, and an air pressure in the reaction chamber is precisely controlled, so that the raw material to be processed reacts under corresponding process conditions. In the reaction process, the reaction chamber needs to be sealed in order to ensure that the temperature and the air pressure in the reaction chamber are accurately controllable.

Among the correlation technique, in order to be convenient for add the raw materials of treating to the reaction chamber in, the reaction chamber is provided with opening and end cover, can add the raw materials of treating to the reaction chamber through the opening in, the end cover can be dismantled and connect in the opening, in order to make end cover and opening sealing connection, adopt the fixed end cover of screw bolt complex mode, such fixed mode needs the manual work to dismantle or mounting bolt etc. when the opening is opened or closed to the end cover, lead to the operation comparatively loaded down with trivial details, thereby can lead to semiconductor technology's inefficiency.

Disclosure of Invention

The application provides semiconductor process equipment and a locking mechanism to solve the problem that in the prior art, the dismounting and mounting modes of a lower cover and a hearth are complex.

In a first aspect, the present application provides a locking mechanism for semiconductor processing equipment, the semiconductor processing equipment includes a furnace for performing a semiconductor process and a cover for sealing a port of the furnace, the locking mechanism is used for locking and unlocking the cover for sealing the port of the furnace, and the locking mechanism comprises: a positioning member and a first driving portion;

wherein, the setting element set up in the port department, first drive division with the setting element is connected, first drive division can drive the setting element rotates, so that the setting element will the closing cap lock in the port, or make the setting element will the closing cap unblock in the port.

In a second aspect, the present application also provides a semiconductor processing apparatus comprising the above locking mechanism.

Compared with the prior art, the beneficial effects of this application are as follows:

in the locking mechanism disclosed in the embodiment of the application, the positioning piece is driven to rotate by the first driving part, so that the positioning piece can lock the sealing cover on the port of the hearth, and the port of the hearth is in a sealing state. The first driving part drives the positioning piece to rotate again, so that the positioning piece is not pressed on the sealing cover, the sealing cover is unlocked from the port, and the port of the hearth is in an open state. Like this, can realize the closing cap to the sealed or open of furnace port through the rotation of first drive division drive setting element for the process that the closing cap was locked in the port and was unblock in the port is simple and convenient, has avoided the manual work to dismantle mounting such as bolt, and then can improve semiconductor process efficiency.

When a semiconductor process is carried out, raw materials to be processed are added into the hearth through the port of the hearth, the sealing cover is moved to enable the sealing cover to be in butt joint with the port of the hearth, the sealing cover and the port of the hearth are arranged oppositely, the positioning piece is driven to rotate through the first driving part, the positioning piece enables the sealing cover to be locked at the port of the hearth, the hearth is in a sealing state at the moment, and the semiconductor processing process can be carried out. After the semiconductor processing technology is finished, the first driving part drives the positioning piece to rotate again, the positioning piece can unlock the sealing cover on the port of the hearth, and therefore the port is in an open state, and processed semiconductor process pieces can be taken out of the hearth through the port.

Drawings

The accompanying drawings, which are included to provide a further understanding of the application and are incorporated in and constitute a part of this application, illustrate embodiment(s) of the application and together with the description serve to explain the application and not to limit the application. In the drawings:

FIG. 1 is a schematic structural diagram of one embodiment of the present application;

FIG. 2 is a schematic top view of an embodiment of the present application;

FIG. 3 is a schematic view of a positioning member and positioning mount of an embodiment of the present application;

FIG. 4 is a schematic top view of a closure according to an embodiment of the present application;

FIG. 5 is a schematic side view of a closure according to an embodiment of the present application.

Description of reference numerals:

100-sealing cover, 110-positioning groove, 111-sliding surface,

200-positioning piece, 210-fixing ring, 220-fixing part,

300-the first drive part, and the second drive part,

400-hearth, 410-opening, 420-first detecting piece, 430-second detecting piece, 440-abutting part, 441-containing groove,

500-retaining member, 510-sensing member, 520-first support pad, 530-second support pad.

Detailed Description

In order to make the objects, technical solutions and advantages of the present application more apparent, the technical solutions of the present application will be described in detail and completely with reference to the following specific embodiments of the present application and the accompanying drawings. It should be apparent that the described embodiments are only some of the embodiments of the present application, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present application.

Fig. 1-5 schematically illustrate a locking mechanism according to one embodiment of the present application. The locking mechanism comprises a positioning piece 200 and a first driving part 300, and can be applied to semiconductor processing equipment, in particular to equipment for preparing semiconductor parts by adopting a physical vapor transport method.

The semiconductor processing equipment comprises a hearth 400 and a cover 100, wherein a reaction chamber is arranged in the hearth 400, semiconductor raw materials are placed in the hearth 400 in the semiconductor processing process, the hearth 400 is also provided with a port 410 communicated with the internal reaction chamber, the semiconductor raw materials can be placed in the hearth 400 through the port 410, the cover 100 is detachably connected with the port 410, so that the cover 100 can be in sealed butt joint with the port 410, the reaction chamber in the hearth 400 is in a sealed state for carrying out the semiconductor processing, or the cover 100 is separated from the port 410, and the port 410 of the hearth 400 is in an open state.

The positioning member 200 of the locking mechanism is disposed at the port 410, the first driving portion 300 is connected to the positioning member 200, and the first driving portion 300 can drive the positioning member 200 to rotate, so that the sealing cover 100 can be locked at the port 410, in which state the reaction chamber in the furnace 400 is in a sealed state, and the semiconductor process can be performed in the furnace 400. After the first driving part 300 drives the positioning member 200 to rotate again, the cover 100 can be separated from the port 410, so that the cover 100 is unlocked from the port 410, in this state, the reaction chamber in the furnace 400 is in an open state, semiconductor raw materials can be added into the furnace 400 through the port 410, or a finished product of a completed semiconductor process can be taken out through the port 410.

In the locking mechanism disclosed in the embodiment of the present application, the first driving portion 300 drives the positioning member 200 to rotate, so that the positioning member 200 locks the cover 100 to the port 410 of the furnace 400, and the reaction chamber in the furnace 400 is in a sealed state. The first driving part 300 drives the positioning member 200 to rotate again, so that the positioning member 200 is no longer pressed on the cover 100, and the cover 100 is unlocked from the port 410, and the port 410 of the firebox 400 is in an open state. According to the technical scheme, the process that the sealing cover 100 is locked on the port 410 and unlocked on the port 410 is more convenient, and the semiconductor process efficiency is further improved.

When a semiconductor process is performed, firstly, raw materials to be processed are added into the hearth 400 through the port 410 of the hearth 400, the sealing cover 100 is moved to enable the sealing cover 100 to be abutted to the port 410 of the hearth 400, the sealing cover 100 and the port 410 of the hearth 400 are oppositely arranged, the positioning member 200 is driven to rotate by the first driving part 300, so that the positioning member 200 locks the sealing cover 100 to the port 410 of the hearth 400, and at the moment, the hearth 400 is in a sealed state, and the semiconductor process can be performed. After the semiconductor processing process is completed, the first driving part 300 drives the positioning member 200 to rotate again, so that the positioning member 200 unlocks the cover 100 from the port 410 of the furnace 400, the port 410 is in an open state, and the processed semiconductor product can be taken out of the furnace 400 through the port 410.

Alternatively, the positioning member 200 includes a fixing ring 210 and a fixing portion 220, wherein the fixing ring 210 is disposed at the port 410 of the furnace 400, the fixing ring 210 is connected to the first driving portion 300, the fixing portion 220 is connected to the inner peripheral wall of the fixing ring 210, and the first driving portion 300 can drive the fixing ring 210 to rotate around the axial direction of the furnace 400, that is, the fixing ring 210 can rotate around the circumferential direction of the furnace 400, so that the fixing portion 220 can rotate with the fixing ring 210 around the axial direction of the furnace 400. Specifically, the fixing ring 210 can be sleeved on a side of the furnace 400 adjacent to the port 410 thereof, and an inner wall of the fixing ring 210 can be slidably connected with an outer wall of the furnace 400, so that the fixing ring 210 can rotate along the circumferential direction of the furnace 400.

The cover 100 has a first end and a second end, wherein the second end is located on a side of the cover 100 facing away from the port 410 of the firebox 400, the first end is located on a side of the cover 100 facing the port 410 of the firebox 400, and the first end and the second end are located on opposite sides of the cover 100. The peripheral wall of the cover 100 is provided with a plurality of positioning slots 110, the fixing portion 220 is disposed corresponding to the positioning slots 110 on the cover 100, when the cover 100 needs to be locked at the port 410 of the firebox 400, the fixing portion 220 can pass through the positioning slots 110 and then move to the second end of the cover 100, the first driving portion 300 can drive the fixing portion 220 to rotate, so that the fixing portion 220 rotates at the second end until the fixing portion 220 and the positioning slots 110 are arranged in a staggered manner, and at this time, the fixing portion 220 can be pressed on the cover 100 to tightly abut against the port 410 of the firebox 400, so that the cover 100 is locked at the opening of the firebox 400.

When the cover 100 needs to be unlocked from the port 410 of the hearth 400, the first driving portion 300 can drive the fixing portion 220 to rotate again, the fixing portion 220 rotates on the second end to be opposite to the positioning slot 110, that is, the fixing portion 220 is located in the corresponding positioning slot 110, so that the fixing portion 220 no longer presses the cover 100, and thus the fixing portion 220 no longer abuts against the second end of the cover 100, and the cover 100 is unlocked from the port 410.

In order to enable the cap 100 to be closely abutted to the port 410, the distance between the fixing portion 220 and the port 410 may be matched to the thickness of the cap 100, specifically, the distance may be slightly larger than the thickness of the cap 100, so that the cap 100 is closely abutted to the port 410 when the fixing portion 220 is pressed on the cap 100, and when the cap 100 needs to be separated from the port 410, the distance can reduce the sliding friction force between the cap 100 and the port 410, so that the cap 100 is more easily separated from the port 410, and thus the efficiency of opening and closing the port 410 is improved.

The positioning grooves 110 may be uniformly arranged along the circumferential direction of the sealing cover 100, and the positioning grooves 110 and the fixing portions 220 are correspondingly arranged one to one, so as to achieve the purpose of positioning the sealing cover 100. This allows the closure 100 to seal the port 410 when the closure 100 is mated to the port 410, preventing the closure 100 from shifting and causing a gap between the port 410 and the closure 100.

Optionally, the side wall of the positioning slot 110 has a sliding surface 111, the sliding surface 111 extends from the first end to the second end, the fixing portion 220 can move along the sliding surface 111, so that the fixing portion 220 can move from the first end to the second end of the sealing cover 100, or the fixing portion 220 moves from the second end to the first end, the sliding surface 111 can play a role of supporting the positioning fixing portion 220, so that the fixing portion 220 is always in sliding contact with the sliding surface 111 in the process of passing through the positioning slot 110, so that the fixing portion 220 can be kept stable in the moving process, and the sealing cover 100 is prevented from deviating from the fixing portion 220.

Specifically, the first driving portion 300 can drive the fixing ring 210 to rotate along a first direction or a second direction, the first direction and the second direction are opposite to each other, when the first driving portion 300 drives the fixing ring 210 to rotate along the first direction, the fixing portion 220 can slide along the sliding surface 111 to the second end of the sealing cover 100, and after the fixing portion 220 moves to the second end and continues to slide along the second end to be disposed in a staggered manner with the positioning groove 110, the fixing portion 220 can be pressed on the sealing cover 100, so that the sealing cover 100 is locked on the port 410. Under the condition that the first driving part 300 drives the fixing ring 210 to rotate in the second direction, the fixing part 220 can slide along the second end of the cover 100 to be opposite to the positioning slot 110, so that the fixing part 220 can not be pressed on the second end of the cover 100 any more, and the cover 100 is unlocked from the port 410.

When the fixing portion 220 moves to the second end and is distributed in a staggered manner with respect to the positioning slots 110, if the cap 100 is to be unlocked from the port 410, the first driving portion 300 may be further arranged to drive the cap 100 to rotate continuously along the first direction, so that the fixing portion 220 is opposite to another positioning slot 110, and thus the fixing portion 220 is no longer pressed on the cap 100, and the purpose of unlocking the cap 100 from the port 410 is achieved. It should be noted that, in such an arrangement, the plurality of positioning grooves 110 should be evenly distributed along the circumferential direction of the cover 100.

The cell type of constant head tank 110 can also set up to the appearance cooperation with fixed part 220 to make fixed part 220 pass the in-process of constant head tank 110, the inner wall of constant head tank 110 is spacing to fixed part 220 all the time, thereby reach the better location effect to closing cap 100, simultaneously because constant head tank 110 has a plurality ofly, a plurality of fixed parts 220 and a plurality of constant head tank 110 one-to-one set up can further make fixed part 220 and constant head tank 110 accurate location, prevent that closing cap 100 from squinting for fixed part 220. However, it should be noted that, in such an arrangement, the fixing portion 220 needs to move along the axial direction of the cap 100 to pass through the positioning slot 110, and after the fixing portion 220 moves to the second end of the cap 100, the fixing portion 220 moves along the second end, so that the fixing portion 220 and the positioning slot 110 are arranged in a staggered manner.

Alternatively, the sliding surface 111 described above may be at least one of a slope, an arc surface, a multi-step slope, and a multi-step arc surface. Thus, after at least a portion of the fixing portion 220 enters the positioning groove 110, the first driving portion 300 drives the fixing portion 220 to rotate, so that the fixing portion 220 can slide to the second end of the sealing cover 100 along the sliding surface 111, the component force of the driving force of the first driving portion 300 can cause the fixing portion 220 to displace in the axial direction of the sealing cover 100, the fixing portion 220 can support the sealing cover 100, the distance between the sealing cover 100 and the port 410 is gradually reduced, and accordingly, the fixing portion 220 can move to the second end of the sealing cover 100.

Optionally, the locking mechanism disclosed in the embodiment of the present application further includes a second driving portion, and the second driving portion can drive the cover 100 to approach the port 410 of the furnace 400 or drive the cover 100 to move away from the port 410 of the furnace 400. Specifically, when the cover 100 needs to be locked to the port 410, the cover 100 can be driven by the second driving portion to move toward the port 410, and at least a portion of the fixing portion 220 can enter the positioning slot 110 of the cover 100. The first driving portion 300 can drive the fixing portion 220 to rotate, so that the fixing portion 220 slides along the sliding surface 111, in the process, the second driving portion can continue to drive the sealing cover 100 to move towards the port 410, and the first driving portion 300 and the second driving portion respectively drive the fixing portion 220 and the sealing cover 100 to move, so that the fixing portion 220 slides along the sliding surface 111 more smoothly, and the fixing portion 220 and the sliding surface 111 are prevented from being locked.

The first and

second driving portions

300 and 300 may be an electric push rod, a hydraulic push rod, a pneumatic push rod, or the like, and the specific structure of the first and

second driving portions

300 and 300 is not limited in this application. When the first driving part 300 adopts the push rod structure, the driving direction of the first driving part 300 can be tangent to the fixing ring 210, so that the fixing ring 210 can rotate around the central axis of the furnace 400 when the first driving part 300 pushes the fixing ring 210. The second driving part may be connected to the center of the second end of the cap 100, so that the cap 100 can be kept balanced and stable during the process of the second driving part pushing the cap 100 to move, and the cap 100 is prevented from tilting. The second driving part may be detachably coupled with the cap 100.

Alternatively, the fixing portion 220 may be a roller, the roller may slide along the sliding surface 111, and the fixing portion 220 may be configured as a roller, so that the friction between the fixing portion 220 and the sliding surface 111 is a rolling friction, which can further reduce the friction between the fixing portion 220 and the sliding surface 111, and make the fixing portion 220 move along the sliding surface 111 more smoothly.

Optionally, the locking mechanism disclosed in the embodiment of the present application further includes a plurality of locking members 500, and the locking members 500 can fix the positioning member 200 at the port 410 and allow the positioning member 200 to rotate. Specifically, one side cover that furnace 400 is close to port 410 is equipped with butt portion 440, and butt portion 440 can be the ring form, and butt portion 440's inner wall and furnace 400's outer wall contact, butt portion 440 can be with furnace 400 integrative structure, or can dismantle the connection, and to this, this application does not limit. One axial side of the fixing ring 210 is in contact with the abutting portion 440, the locking member 500 sandwiches the abutting portion 440 and the fixing ring 210 in the axial direction of the furnace 400, and the locking member 500 may be a C-shaped member. Through the above-mentioned structural arrangement, the positioning member 200 can be fixed at the port 410 of the furnace 400.

In order to make the positioning element 200 have better fixing effect and make the positioning element 200 have better coaxiality with the central axis of the furnace 400 in the rotation process, the abutting portion 440 may be provided with an accommodating groove 441, at least a portion of the fixing ring 210 is disposed in the accommodating groove 441, and the inner side wall of the accommodating groove 441 may abut against the radial outer side wall of at least a portion of the fixing ring 210, so as to achieve the purpose of supporting the positioning element 200, prevent the positioning element 200 from radially deviating in the rotation process, and make the positioning element 200 more stable in the rotation process.

One side that fixed ring 210 and abutting portion 440 contacted is provided with first support gasket 520, and first support gasket 520 is located between the inside wall of abutting portion 440 and the outside wall of fixed ring 210, can avoid abutting portion 440 and fixed ring 210 direct contact to lead to both wearing and tearing each other through setting up first support gasket 520. One axial side of the fixing ring 210 is in contact with the locker 500, and a second support spacer 530 is disposed between the one axial side of the fixing ring 210 and the locker 500, and the second support spacer 530 prevents the fixing ring 210 and the locker 500 from being worn away from each other due to direct contact therebetween.

Optionally, the locking mechanism disclosed in the embodiment of the present application further includes a sensing element 510, a first detecting element 420, and a second detecting element 430, the sensing element 510 is disposed on the fixing ring 210, the first detecting element 420 and the second detecting element 430 are disposed on the furnace 400, the first detecting element 420 is in communication connection with the sensing element 510, and the second detecting element 430 is also in communication connection with the sensing element 510. Since the fixing ring 210 is rotatable, the position of the sensing member 510 may be varied. When the sensing member 510 approaches the first detecting member 420, the sensing member 510 can be detected by the first detecting member 420, and when the sensing member 510 approaches the second detecting member 430, the sensing member 510 can be detected by the second detecting member 430. The first and second detecting

members

420 and 430 are also in communication connection with the first and second driving

parts

300 and 430 to control the first and second driving

parts

300 and 300 to push the fixing ring 210 and the cap 100 to move.

Specifically, when the fixing ring 210 rotates, the fixing portion 220 slides to the second end along the sliding surface 111 of the positioning groove 110, and the fixing portion 220 and the positioning groove 110 are arranged in a staggered manner, the fixing portion 220 is pressed on the sealing cover 100, the sealing cover 100 is locked to the port 410 at this time, and accordingly, the sensing element 510 is close to the first detecting element 420 and is identified by the first detecting element 420, so that the first driving portion 300 and the second driving portion can be controlled to stop driving, and the sealing cover 100 is kept locked to the port 410.

When the fixing portion 220 moves to the position opposite to the positioning slot 110 along the second end when the fixing ring 210 rotates, the sensing member 510 is close to the second detecting member 430 and is identified by the second detecting member 430, so as to control the first driving portion 300 to stop driving the fixing ring 210, thereby preventing the fixing portion 220 from rotating continuously to abut against the inner wall of the positioning slot 110 to cause the fixing portion 220 to be clamped in the positioning slot 110. After the sensing member 510 is identified by the second detecting member 430, the second driving part can drive the cover 100 to move in a direction away from the port 410, so that the port 410 of the furnace 400 is opened.

During a semiconductor process, a semiconductor process material may be added into the furnace 400, the second driving portion drives the sealing cover 100 to approach the port 410, and the positioning slot 110 on the sealing cover 100 is opposite to the fixing portion 220, as the sealing cover 100 continuously approaches the port 410, at least a portion of the fixing portion 220 may be located in the positioning slot 110, at this time, the first driving portion 300 drives the fixing ring 210 to rotate along the first direction, and further the fixing portion 220 rotates along the first direction, the fixing portion 220 may slide along the sliding surface 111 in the positioning slot 110, so that the fixing portion 220 may move to the second end of the sealing cover 100, the first driving portion 300 continuously drives the fixing portion 220 to rotate, and the fixing portion 220 and the positioning slot 110 may be arranged in a staggered manner, and the fixing portion 220 may be pressed on the sealing cover 100, so that the sealing cover 100 is locked to the port 410. At this time, the sensing member 510 is close to the first detecting member 420 and recognized by the first detecting member 420, the first driving part 300 and the second driving part are both stopped, the furnace 400 is in a sealed state, and a semiconductor process can be performed inside the furnace.

After the semiconductor process is finished, the fixing ring 210 can be driven by the first driving portion 300 to rotate along the second direction, so that the fixing portion 220 rotates along the second direction, the fixing portion 220 can slide along the second end of the sealing cover 100 to be opposite to the positioning groove 110, at this time, the sensing element 510 is close to the second detection element 430 and is identified by the second detection element 430, the first driving portion 300 stops driving the fixing ring 210 to rotate, the second driving portion drives the sealing cover 100 to move along the direction away from the port 410, so that the fixing portion 220 passes through the positioning groove 110, the sealing cover 100 is separated from the port 410, and at this time, the semiconductor process element after the reaction in the furnace 400 can be taken out. Therefore, the cover 100 is unlocked from the port 410 and interlocked with the second driving part to drive the cover 100 to move, and the safety of the operation of the device can be ensured.

Based on the above locking mechanism, the present application also provides a semiconductor processing device, which includes the above locking mechanism.

The above description is only an example of the present application and is not intended to limit the present application. Various modifications and changes may occur to those skilled in the art. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present application should be included in the scope of the claims of the present application.

Claims

1. A locking mechanism for a semiconductor processing apparatus including a furnace (400) for performing a semiconductor process and a cover (100) for sealing a port (410) of the furnace (400), the locking mechanism for locking and unlocking the cover (100) for sealing the port (410) of the furnace (400), the locking mechanism comprising: a positioning member (200) and a first driving part (300);

the positioning element (200) is disposed at the port (410), the first driving portion (300) is connected to the positioning element (200), and the first driving portion (300) can drive the positioning element (200) to rotate, so that the positioning element (200) locks the cover (100) to the port (410), or the positioning element (200) unlocks the cover (100) to the port (410).

2. The locking mechanism according to claim 1, wherein the outer peripheral wall of the cover (100) defines a plurality of positioning slots (110), the positioning member (200) includes a fixing ring (210) and a plurality of fixing portions (220) corresponding to the positioning slots, the fixing ring (210) is disposed at the port (410), the fixing portions (220) are connected to the inner peripheral wall of the fixing ring (210), the cover (100) has a first end and a second end, the second end is located at a side of the cover (100) facing away from the port (410), the first end is located at a side of the cover (100) facing the port (410), the first driving portion (300) can drive the fixing ring (210) to rotate around the axial direction of the furnace (400), so that the fixing portion (220) can slide to the second end through the positioning slots (110), and the fixing part (220) and the positioning groove (110) are arranged in a staggered manner along the second end in a sliding manner, or the fixing part (220) and the positioning groove (110) are arranged oppositely in a sliding manner along the second end in the fixing part (220).

3. The locking mechanism according to claim 2, wherein the side wall of the positioning slot (110) has a sliding surface (111), the sliding surface (111) extends from the first end to the second end, the first driving portion (300) can drive the fixing ring (210) to rotate along a first direction or a second direction, and the first direction and the second direction are opposite to each other;

under the condition that the first driving part (300) drives the fixing ring (210) to rotate along the first direction, the fixing part (220) can slide to the second end along the sliding surface (111) and slide to the position, where the fixing part (220) and the positioning groove (110) are arranged in a staggered manner, along the second end,

under the condition that the first driving part (300) drives the fixing ring (210) to move along the second direction, the fixing part (220) can slide along the second end to be opposite to the positioning groove (110).

4. The locking mechanism of claim 3, wherein the sliding surface (111) is at least one of a ramp, a curved surface, a multi-step ramp, and a multi-step curved surface.

5. Locking mechanism according to claim 4, wherein the fixing part (220) is a roller, which is slidable along the sliding surface (111).

6. The locking mechanism according to any one of claims 3 to 5, further comprising a second driving portion connected to the cover (100), the second driving portion being configured to drive the cover (100) toward the port (410) or away from the port (410) in the axial direction of the firebox (400).

7. The locking mechanism according to claim 2, further comprising a plurality of locking members (500), wherein an abutting portion (440) is sleeved on one side of the hearth (400) close to the port (410), an axial end of the fixing ring (210) abuts against the abutting portion (440), and the locking members (500) clamp the abutting portion (440) and the fixing ring (210) in the axial direction of the hearth (400), so that the fixing ring (210) is fixed to the hearth (400).

8. The locking mechanism according to claim 6, characterized in that the fixing ring (210) is provided with a sensing member (510), the hearth (400) is provided with a first detecting member (420) and a second detecting member (430), and the sensing member (510), the first detecting member (420), the second detecting member (430), the first driving part (300) and the second driving part are in communication connection;

when the fixing part (220) moves to the second end along the sliding surface (111) and is arranged in a staggered manner with respect to the positioning groove (110), the sensing part (510) approaches the first detection part (420) and is identified by the first detection part (420), so that the first driving part (300) and the second driving part stop driving;

under the condition that the fixing part (220) moves along the second end to be opposite to the positioning groove (110), the sensing part (510) is close to the second detection part (430) and is identified by the second detection part (430), so that the first driving part (300) stops driving, and the second driving part drives the sealing cover (100) to be far away from the hearth (400).

9. The locking mechanism according to claim 7, wherein the abutment portion (440) has a receiving groove (441) for receiving at least a portion of the fixing ring (210), a central axis of the receiving groove (441) is collinear with a central axis of the furnace (400), and an inner sidewall of the receiving groove (441) is supported on at least a portion of a radially outer sidewall of the fixing ring (210) to limit displacement of the fixing ring (210) in a radial direction of the furnace (400) during rotation.

10. A semiconductor processing apparatus comprising a latching mechanism as claimed in any one of claims 1 to 9.