CN113238320B - Method for measuring insertion loss of device based on micro-ring resonator - Google Patents
Method for measuring insertion loss of device based on micro-ring resonator Download PDFInfo
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- CN113238320B CN113238320B CN202110520191.4A CN202110520191A CN113238320B CN 113238320 B CN113238320 B CN 113238320B CN 202110520191 A CN202110520191 A CN 202110520191A CN 113238320 B CN113238320 B CN 113238320B
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/28—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals
- G02B6/293—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means
- G02B6/29331—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means operating by evanescent wave coupling
- G02B6/29335—Evanescent coupling to a resonator cavity, i.e. between a waveguide mode and a resonant mode of the cavity
- G02B6/29338—Loop resonators
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
- G01M11/02—Testing optical properties
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/122—Basic optical elements, e.g. light-guiding paths
- G02B6/125—Bends, branchings or intersections
Abstract
The invention discloses a method for measuring the insertion loss of a device based on a micro-ring resonator, which is characterized in that the loss of an inserted device is obtained by comparing and calculating the spectrum obtained by the micro-ring resonator connected with the device to be measured and the spectrum obtained by the micro-ring resonator not connected with the device to be measured by changing the annular structure in the traditional single-ring micro-ring.
Description
Technical Field
The invention relates to the technical field of integrated optical waveguide device testing, in particular to a method for measuring insertion loss of a device based on a micro-ring resonator.
Background
Loss of an integrated optical waveguide device is one of important indexes for measuring performance of the integrated optical waveguide device, and currently, commonly used loss measurement methods include a cut-back method (cut-back method), a Fabry-Perot interferometer interference method (Fabry-Perot interferometer method) and a method for measuring a micro-ring Q factor. The intercept method is simple and convenient, most passive device loss measurement can use the method, but the method of measuring by different numbers of cascade devices occupies too much area of a chip, the manufacturing cost is increased, and extra test errors can be introduced by the coupling of optical fibers and different waveguides. The Fabry-Roper interferometry can avoid errors caused by coupling of different link devices and optical fibers in an intercept method, but has high requirements on the flatness of the end face of a waveguide, needs an additional polishing process, needs to additionally measure the reflection coefficient of the end face, has certain requirements on the stability of environment vibration, temperature and the like in the test process, and increases the complexity and difficulty of measurement.
Disclosure of Invention
The invention aims to provide a method for measuring the insertion loss of a device based on a micro-ring resonator, which overcomes the defects in the prior art.
In order to achieve the purpose, the invention provides the following technical scheme:
the invention discloses a micro-ring resonator, which is a single-ring up-down micro-ring resonator and comprises a resonant ring, wherein the resonant ring is respectively coupled with a first input bus waveguide and a first output bus waveguide up and down.
The invention also discloses a device insertion loss measuring method based on the micro-ring resonator, which comprises the following steps:
s1: connecting a device to be tested with upper and lower arc-shaped bent waveguides in a micro-ring resonant cavity of a micro-ring resonator;
s2: respectively coupling light into a micro-ring resonator connected with a device to be tested and a micro-ring resonator without the device to be tested, and obtaining output spectra of the micro-ring resonators;
s3: respectively calculating the in-loop Loss of the micro-loop resonator connected with the device to be tested and the in-loop intrinsic Loss of the micro-loop resonator without the device to be tested 0 ；
S4: according to the Loss and the Loss 0 The insertion loss of a single device to be tested is obtained through calculation of the difference value.
Preferably, the radius of the half ring of the micro-ring resonator connected to the device under test in step S2 is equal to the radius of the single ring of the micro-ring resonator without the device under test, and the waveguide width, the waveguide height, and the coupling distance between the waveguide and the ring of the two micro-ring resonators are kept consistent.
Preferably, after the light is coupled into the micro-ring resonator, a part of the light intensity Tthrough is output from the through terminal, a part of the light intensity Tthrough is coupled into the micro-ring, and the light intensity Tdrop is output from the down terminal through the micro-ring.
Preferably, the step S3 includes the following substeps:
s31: respectively calculating the fraction of each round-trip inherent power loss in the micro-ring resonator accessed to the device to be tested and not provided with the device to be tested according to the data parameters of the abscissa wavelength value lambda and the ordinate response value gamma t corresponding to the minimum Tthregh on the output spectrum accessed to the device to be tested and the output spectrum not provided with the device to be testedNumber of
Wherein, the first and the second end of the pipe are connected with each other,
δ λ d is the-3 dB bandwidth of the down-pass end, FSR is the distance between the trough and trough, i.e. the free spectral range;
s32: calculating Loss and Loss of light passing through a circle between single rings in micro-ring resonator 0 。
Preferably, in step S32, loss and Loss 0 Is calculated by the formula
The invention has the beneficial effects that: the invention relates to a method for measuring the insertion loss of a device based on a micro-ring resonator, which compares and calculates the spectrum obtained by the micro-ring resonator connected with a device to be measured and the spectrum obtained by the micro-ring resonator not connected with the device to be measured by changing the ring structure in the traditional single-ring micro-ring so as to obtain the loss of the insertion device.
The features and advantages of the present invention will be described in detail by embodiments in conjunction with the accompanying drawings.
Drawings
FIG. 1 is a schematic diagram of a single-ring upper and lower micro-ring resonator according to an embodiment of the present invention;
FIG. 2 is a schematic diagram of a single-ring up-down micro-ring resonator with crossed waveguides according to an embodiment of the present invention;
FIG. 3 is a schematic diagram of output spectra of a straight-through end and a down-through end of a micro-ring resonator according to an embodiment of the present invention;
in the figure: 1-a first input bus waveguide, 2-a resonant ring, 3-an output bus waveguide, 4-a second input bus waveguide, 5-a first resonant half-ring, 6-a first crossed waveguide, 7-a second crossed waveguide, 8-a second resonant half-ring, 9-a second output bus waveguide.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention is further described in detail below with reference to the accompanying drawings and examples. It should be understood, however, that the detailed description herein of specific embodiments is intended to illustrate the invention and not to limit the scope of the invention. Moreover, in the following description, descriptions of well-known structures and techniques are omitted so as to not unnecessarily obscure the concepts of the present invention.
Referring to fig. 1-3, the application of the method for measuring the insertion loss of a device based on a micro-ring resonator according to the present invention is described in detail by taking a crossed waveguide as an example.
First, the single-ring upper and lower micro-ring resonator shown in fig. 1 is composed of a resonant ring 2 and a first input bus waveguide 1 and a first output bus waveguide 3 coupled thereto, and the single-ring upper and lower micro-ring resonator shown in fig. 2 includes a first resonant half-ring 5 and a second resonant half-ring 8, both ends of the first half-ring 5 and the second half-ring 8 are connected by a first cross waveguide 6 and a second cross waveguide 7, and further includes a second input bus waveguide 4 and a second output bus waveguide 9 coupled thereto.
Taking a crossed waveguide as an example, as shown in fig. 2, one beam of incident light is coupled into the first half resonator 5 through the second input waveguide 4, transmitted in the first half resonator 5, coupled out of the resonant ring to the second output bus waveguide 9 through the first crossed waveguide 6 and the second crossed waveguide 7 in the second half resonator 8, and received by the spectrometer with a spectral response of Tthrough. The other beam is output from the straight port (drop port) via the first input waveguide 4 and is received by the spectrometer with a spectral response Tdrop. The spectrum is shown in FIG. 3, where Tthregh is taken as the minimum, λ = λ 0 Tthrough = γ t, can be calculated
Wherein delta lambda d is the-3 dB bandwidth of a lower pass end (drop port), FSR is the distance between a wave trough and a wave trough, namely the free spectral range, and then the in-loop loss of the single-loop upper and lower micro-loop resonators with the crossed waveguide micro-loop resonators is calculated
Obtaining the spectrum of the single-ring upper and lower micro-ring resonator without the device to be tested in the same way, and then calculating the in-ring intrinsic Loss of the single-ring upper and lower micro-ring resonator 0 。
And calculating the difference value of the two signals and dividing the difference value by 2 to obtain the loss of the crossed waveguide.
The above description is only for the purpose of illustrating the preferred embodiments of the present invention and is not to be construed as limiting the invention, and any modifications, equivalents or improvements made within the spirit and principle of the present invention should be included in the scope of the present invention.
Claims (5)
1. A device insertion loss measurement method based on a micro-ring resonator is characterized in that the micro-ring resonator is a single-ring upper and lower micro-ring resonator and comprises a resonant ring, a first input bus waveguide and a first output bus waveguide are respectively coupled to the upper part and the lower part of the resonant ring, and the insertion loss measurement method comprises the following steps:
s1: connecting a device to be tested with upper and lower arc-shaped bent waveguides in a micro-ring resonant cavity of a micro-ring resonator;
s2: respectively coupling light into a micro-ring resonator connected with a device to be tested and a micro-ring resonator without the device to be tested, and obtaining output spectra of the micro-ring resonators;
s3: respectively calculating the in-loop loss of the micro-ring resonator connected with the device to be tested
And intrinsic loss in the ring of the micro-ring resonator without the device under test
；
S4: according to the above
And
the insertion loss of a single device to be tested is obtained through calculation of the difference value.
2. The device insertion loss measurement method based on the micro-ring resonator as claimed in claim 1, wherein: in the step S2, the radius of the half ring of the micro-ring resonator connected to the device to be tested is equal to the radius of the single ring of the micro-ring resonator without the device to be tested, and the waveguide width, the waveguide height and the coupling distance between the waveguide and the ring of the two micro-ring resonators are kept consistent.
3. The device insertion loss measurement method based on the micro-ring resonator as claimed in claim 1, wherein: after the optical coupling enters the micro-ring resonant cavity, a part of light intensity Tthregh is output from the straight-through end, a part of light intensity Tthregh is coupled into the micro-ring, and the light intensity Tdrop is output from the down-through end through the micro-ring.
4. The method for measuring the insertion loss of the device based on the micro-ring resonator as claimed in claim 3, wherein the step S3 comprises the following sub-steps:
s31: according to the output spectrum accessed to the device to be tested and the abscissa wavelength value corresponding to the minimum Tthregh on the output spectrum without the device to be tested
And ordinate response values
Respectively calculating the fraction of the intrinsic power loss of each round trip in the micro-ring resonator connected to the device to be tested and the micro-ring resonator without the device to be tested
Wherein, in the process,
， 
is the-3 dB bandwidth of the lower end, and FSR is the distance between the wave troughs, namely the free spectral range;
s32: calculating the loss of light passing through a circle between single rings in the micro-ring resonator
And
。
5. the method for measuring the insertion loss of the device based on the micro-ring resonator as claimed in claim 4, wherein: in the step S32, the process is performed,
and
is calculated by the formula
。
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