CN113236529A - Adsorption array structure convenient for hydrogen pumping - Google Patents
Adsorption array structure convenient for hydrogen pumping Download PDFInfo
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- CN113236529A CN113236529A CN202110546883.6A CN202110546883A CN113236529A CN 113236529 A CN113236529 A CN 113236529A CN 202110546883 A CN202110546883 A CN 202110546883A CN 113236529 A CN113236529 A CN 113236529A
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- plate
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- upper fixing
- fixing flange
- bending plate
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
- F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
- F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
- F04B37/02—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by absorption or adsorption
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Separation Of Gases By Adsorption (AREA)
Abstract
The invention relates to the technical field of vacuum, and discloses an adsorption array structure convenient for hydrogen extraction, which comprises a plurality of adsorption plates, wherein a plurality of activated carbons are mounted on each adsorption plate; the adsorption plate is fixed between the upper fixing flange and the lower supporting plate through rivets and comprises a first bending plate, two sides of the first bending plate are respectively bent to form a second bending plate and a third bending plate, the second bending plate is fixedly connected with the upper fixing flange, the third bending plate is fixedly connected with the lower supporting plate, and the first bending plate is inclined and uniformly distributed between the upper fixing flange and the lower supporting plate. Each adsorption plate is directly and tightly riveted with the upper fixing flange, so that temperature imbalance caused by heat conduction is reduced, and the temperature of each area of the adsorption plate can be more easily kept below 20K; the multi-surface air inlet is realized, and meanwhile, no gap is formed in the circumferential surface, so that the molecules can contact the adsorption surface below 20K in the movement process, and the air extraction speed is improved.
Description
Technical Field
The invention relates to the technical field of vacuum, in particular to an adsorption array structure convenient for hydrogen pumping.
Background
In some specific fields, the vacuum system only has high requirement on the pumping speed of hydrogen, other gases in the vacuum system have less content, and a cryopump which can meet the pumping speed of the vacuum system on the hydrogen is selected at present, so that the vacuum system has larger caliber and large power consumption compared with a cryopump with a hydrogen pumping type adsorption array, increases purchasing cost and using power consumption, and causes resource waste. For example, in the groove type adsorption array structure of the refrigerator type cryopump of application No. 201220700440.4, although the adsorption area of the adsorption plate is increased and the size of the adsorption plate is uniform, the aperture is too large, the energy consumption is high, and the adsorption capacity of the adsorption plate is not very high.
Disclosure of Invention
Aiming at the defects in the prior art, the invention provides an adsorption array structure convenient for hydrogen extraction.
In order to solve the technical problem, the invention is solved by the following technical scheme:
the utility model provides an adsorb battle array structure convenient to take out hydrogen, is the adsorption plate of multi-disc including quantity, installs the active carbon that quantity is a plurality of on every adsorption plate. The adsorption plate is fixed between the upper fixing flange and the lower support plate through rivets and comprises a first bending plate, two sides of the first bending plate are respectively bent to form a second bending plate and a third bending plate, the second bending plate is fixedly connected with the upper fixing flange, the third bending plate is fixedly connected with the lower support plate, the first bending plate is inclined and uniformly distributed between the upper fixing flange and the lower support plate, and the lower support plate is in a circular ring shape. The adsorption array structure improves the pumping speed of hydrogen by more than 50 percent in a cryopump with the same caliber. Each adsorption plate is directly and tightly riveted with the upper fixing flange, so that temperature imbalance caused by heat conduction is reduced, and the temperature of each area of the adsorption plate can be more easily kept below 20K; the multi-surface air inlet is realized, and meanwhile, no gap is formed in the circumferential surface, so that the molecules can contact the adsorption surface below 20K in the movement process, and the air extraction speed is improved.
Preferably, the second bending plate is provided with at least two rivet holes, the central axes of all the rivet holes are on the same horizontal plane, the central axis of the rivet hole closest to the central axis of the upper fixing flange and the central axis of the upper fixing flange form a first plane, and the included angle between the first plane and the side face of the first bending plate is 45 degrees.
Preferably, both side surfaces of the first bending plate are covered with activated carbon, all rectangular arrays of activated carbon are arranged on the side surfaces of the first bending plate, and the activated carbon is bonded on the first bending plate. The adsorption surface area of the adsorption plate is increased, so that the air extraction speed is improved.
Preferably, one side of the first bending plate, which is close to the upper fixing flange, is bent to form a fourth bending plate, two side faces of the fourth bending plate are all covered with activated carbon, all rectangular arrays of the activated carbon are arranged on the side faces of the fourth bending plate, and all the activated carbon are bonded on the fourth bending plate. The adsorption surface area of the adsorption plate is increased, so that the air extraction speed is improved.
Preferably, the upper fixing flange is provided with a plurality of air passing holes which are arranged on the periphery of the adsorption plate, the air passing holes penetrate through the upper fixing flange, and the projection of the activated carbon in the upper partial area of the adsorption plate covers the air passing holes of the upper fixing flange. Go up mounting flange and adopt the form of a plurality of gas pockets for adsorption gas can follow the multiaspect, and during the multi-angle got into the absorption battle array, improved absorption efficiency.
Preferably, the number of the air passing holes covered by the projection of the activated carbon on the first bending plate is at least two, and the aperture of the outermost air passing hole on the upper fixing flange is larger than the apertures of the air passing holes on other positions of the upper fixing flange. Go up mounting flange and adopt the form of a plurality of gas pockets for adsorption gas can follow the multiaspect, and during the multi-angle got into the absorption battle array, improved absorption efficiency.
Preferably, an indium sheet is mounted between the upper fixing flange and the adsorption plate. The indium sheet can ensure good heat transfer effect.
Preferably, the upper fixing flange, the adsorption plate and the lower support plate are made of oxygen-free copper plates, and the surfaces of the upper fixing flange, the adsorption plate and the lower support plate are plated with bright nickel, so that good heat transfer is ensured, and meanwhile, the radiation-emitting device has a good radiation effect.
Due to the adoption of the technical scheme, the invention has the remarkable technical effects that:
the adsorption array structure improves the pumping speed of hydrogen by more than 50 percent in a cryopump with the same caliber. Each adsorption plate is directly and tightly riveted with the upper fixing flange, so that temperature imbalance caused by heat conduction is reduced, and the temperature of each area of the adsorption plate can be more easily kept below 20K; the multi-surface air inlet is realized, and meanwhile, no gap is formed in the circumferential surface, so that the molecules can contact the adsorption surface below 20K in the movement process, and the air extraction speed is improved.
Drawings
FIG. 1 is a schematic structural diagram of the present invention in a first position.
Fig. 2 is a schematic structural view in a second position state of the present invention.
Fig. 3 is a schematic left-side view of the structure of fig. 2.
Fig. 4 is a schematic diagram of the structure viewed from the right in fig. 2.
Fig. 5 is a schematic structural view of the adsorption plate and the activated carbon thereon in fig. 1.
The names of the parts indicated by the numerical references in the above figures are as follows:
1-adsorption plate
2-activated carbon
3-upper fixed flange
4-lower supporting plate
5-indium sheet
11-first bending plate
12-second bending plate
13-third bending plate
14-fourth bending plate
31-air passing hole
121-rivet hole
Detailed Description
The invention will be described in further detail below with reference to the accompanying figures 1-5 and examples.
Example 1
The utility model provides an adsorb battle array structure convenient to take out hydrogen, is the adsorption plate 1 of multi-disc including quantity, and the quantity of this embodiment adsorption plate 1 is 16, installs quantity on every adsorption plate 1 and is a plurality of active carbon 2, adsorbs battle array knot still includes mounting flange 3 and bottom suspension fagging 4, and adsorption plate 1 passes through the rivet to be fixed between last mounting flange 3 and bottom suspension fagging 4, and the rivet adopts the red copper rivet. The adsorption plate 1 comprises a first bending plate 11, two sides of the first bending plate 11 are respectively and vertically bent to form a second bending plate 12 and a third bending plate 13, and the length of the second bending plate 12 is larger than that of the third bending plate 13. The second bending plate 12 is fixedly connected with the upper fixing flange 3, and the second bending plate 12 is fixed on the upper fixing flange 3 through two rivets. The third bending plate 13 is fixedly connected with the lower supporting plate 4, the third bending plate 13 is fixed on the lower supporting plate 4 through a rivet, and the first bending plate 11 is inclined and uniformly distributed between the upper fixing flange 3 and the lower supporting plate 4. The lower support plate 4 is annular, and the annular lower support plate 4 can reduce the obstruction to the adsorbed gas. The adsorption array structure improves the pumping speed of hydrogen by more than 50 percent in a cryopump with the same caliber. Each adsorption plate 1 is directly and tightly riveted with the upper fixing flange 3, so that temperature imbalance caused by heat conduction is reduced, and the temperature of each area of the adsorption plate 1 can be more easily kept below 20K; the multi-surface air inlet is realized, and meanwhile, no gap is formed in the circumferential surface, so that the molecules can contact the adsorption surface below 20K in the movement process, and the air extraction speed is improved.
Be equipped with the rivet hole 121 that quantity is two at least on the second board 12 that bends, the quantity of rivet hole 121 is two on this embodiment second board 12 that bends, and all rivet holes 121's axis all is on same horizontal plane, and the axis that is closest to the rivet hole 121 of last mounting flange 3 axis forms first plane with the axis of last mounting flange 3, and first plane is 45 with the side contained angle of first board 11 that bends.
The two side surfaces of the first bending plate 11 are all covered with the active carbon 2, so that the adsorption surface area of the first bending plate 11 is increased, and the air exhaust speed is increased. All rectangular arrays of activated carbon are on the sides of the first folded sheet 11 and the activated carbon 2 is bonded to the first folded sheet 11.
The first bending plate 11 side that is close to last mounting flange 3 is bent and is formed fourth bending plate 14, and the both sides face of fourth bending plate 14 all is covered with active carbon 2, and all 2 rectangular arrays of active carbon are on the side of fourth bending plate 14, and all active carbon 2 bond on fourth bending plate 14, have increased the adsorption surface area of fourth bending plate 14, have improved the speed of bleeding.
Go up being equipped with quantity on mounting flange 3 and be a plurality of and set up at the peripheral gas vent 31 of crossing of adsorption plate 1, the periphery of every adsorption plate 1 of this embodiment is equipped with three gas vent 31 of crossing, crosses gas vent 31 and link up mounting flange 3, and the active carbon 2 projection in the sub-region of adsorption plate 1 top covers on last mounting flange 3's gas vent 31, and the last fixed flange of adsorbing the battle adopts the form of a plurality of gas vents 31 of crossing for adsorbed gas can follow the multiaspect, and the multi-angle gets into and adsorbs the battle.
The number of the air passing holes 31 covered by the projection of the activated carbon 2 on the first bending plate 11 is two, and the aperture of the air passing hole 31 on the outermost side of the upper fixing flange 3 is larger than the aperture of the air passing hole 31 on other positions of the upper fixing flange 3. The last fixed flange of adsorbing the battle array adopts the form of a plurality of gas holes 31 for adsorbed gas can follow the multiaspect, and the multi-angle gets into and adsorbs the battle array.
The upper fixing flange 3, the adsorption plate 1 and the lower support plate 4 are made of oxygen-free copper plates, and the surfaces of the upper fixing flange 3, the adsorption plate 1 and the lower support plate 4 are plated with bright nickel, so that good heat transfer is guaranteed, and the high-power transmission device has a good transmission effect.
Example 2
The utility model provides an adsorb battle array structure convenient to take out hydrogen, is the adsorption plate 1 of multi-disc including quantity, and the quantity of this embodiment adsorption plate 1 is 16, installs quantity on every adsorption plate 1 and is a plurality of active carbon 2, adsorbs battle array knot still includes mounting flange 3 and bottom suspension fagging 4, and adsorption plate 1 passes through the rivet to be fixed between last mounting flange 3 and bottom suspension fagging 4, and the rivet adopts the red copper rivet. The adsorption plate 1 comprises a first bending plate 11, two sides of the first bending plate 11 are respectively and vertically bent to form a second bending plate 12 and a third bending plate 13, and the length of the second bending plate 12 is larger than that of the third bending plate 13. The second bending plate 12 is fixedly connected with the upper fixing flange 3, and the second bending plate 12 is fixed on the upper fixing flange 3 through two rivets. The third bending plate 13 is fixedly connected with the lower supporting plate 4, the third bending plate 13 is fixed on the lower supporting plate 4 through a rivet, and the first bending plate 11 is inclined and uniformly distributed between the upper fixing flange 3 and the lower supporting plate 4. The lower support plate 4 is annular, and the annular lower support plate 4 can reduce the obstruction to the adsorbed gas. The adsorption array structure improves the pumping speed of hydrogen by more than 50 percent in a cryopump with the same caliber. Each adsorption plate 1 is directly and tightly riveted with the upper fixing flange 3, so that temperature imbalance caused by heat conduction is reduced, and the temperature of each area of the adsorption plate 1 can be more easily kept below 20K; the multi-surface air inlet is realized, and meanwhile, no gap is formed in the circumferential surface, so that the molecules can contact the adsorption surface below 20K in the movement process, and the air extraction speed is improved.
Be equipped with the rivet hole 121 that quantity is two at least on the second board 12 that bends, the quantity of rivet hole 121 is two on this embodiment second board 12 that bends, and all rivet holes 121's axis all is on same horizontal plane, and the axis that is closest to the rivet hole 121 of last mounting flange 3 axis forms first plane with the axis of last mounting flange 3, and first plane is 45 with the side contained angle of first board 11 that bends.
The two side surfaces of the first bending plate 11 are all covered with the active carbon 2, so that the adsorption surface area of the first bending plate 11 is increased, and the air exhaust speed is increased. All rectangular arrays of activated carbon are on the sides of the first folded sheet 11 and the activated carbon 2 is bonded to the first folded sheet 11.
Go up being equipped with quantity on mounting flange 3 and be a plurality of and set up at the peripheral gas vent 31 of crossing of adsorption plate 1, the periphery of every adsorption plate 1 of this embodiment is equipped with three gas vent 31 of crossing, crosses gas vent 31 and link up mounting flange 3, and the active carbon 2 projection in the sub-region of adsorption plate 1 top covers on last mounting flange 3's gas vent 31, and the last fixed flange of adsorbing the battle adopts the form of a plurality of gas vents 31 of crossing for adsorbed gas can follow the multiaspect, and the multi-angle gets into and adsorbs the battle.
The number of the air passing holes 31 covered by the projection of the activated carbon 2 on the first bending plate 11 is two, and the aperture of the air passing hole 31 on the outermost side of the upper fixing flange 3 is larger than the aperture of the air passing hole 31 on other positions of the upper fixing flange 3. The last fixed flange of adsorbing the battle array adopts the form of a plurality of gas holes 31 for adsorbed gas can follow the multiaspect, and the multi-angle gets into and adsorbs the battle array.
The upper fixing flange 3, the adsorption plate 1 and the lower support plate 4 are made of oxygen-free copper plates, and the surfaces of the upper fixing flange 3, the adsorption plate 1 and the lower support plate 4 are plated with bright nickel, so that good heat transfer is guaranteed, and the high-power transmission device has a good transmission effect.
Example 3
Claims (8)
1. The utility model provides an adsorb battle array structure convenient to take out hydrogen, be adsorption plate (1) of multi-disc including quantity, it is a plurality of active carbon (2) to install quantity on every adsorption plate (1), a serial communication port, still include mounting flange (3) and lower support plate (4), adsorption plate (1) is fixed between last mounting flange (3) and lower support plate (4) through the rivet, adsorption plate (1) is including first bent plate (11), first bent plate (11) both sides are bent respectively and are formed second bent plate (12) and third bent plate (13), second bent plate (12) and last mounting flange (3) fixed connection, third bent plate (13) and lower support plate (4) fixed connection, first bent plate (11) slope and equipartition are between last mounting flange (3) and lower support plate (4), lower support plate (4) shape is the ring shape.
2. An adsorption matrix structure for facilitating hydrogen extraction according to claim 1, wherein: the second bending plate (12) is provided with at least two rivet holes (121), the central axes of all the rivet holes (121) are on the same horizontal plane, the central axis of the rivet hole (121) closest to the central axis of the upper fixing flange (3) and the central axis of the upper fixing flange (3) form a first plane, and the side included angle between the first plane and the first bending plate (11) is 45 degrees.
3. An adsorption matrix structure for facilitating hydrogen extraction according to claim 1, wherein: the two side surfaces of the first bending plate (11) are all covered with activated carbon (2), all the activated carbon rectangular arrays are arranged on the side surfaces of the first bending plate (11), and the activated carbon (2) is bonded on the first bending plate (11).
4. An adsorption matrix structure for facilitating hydrogen extraction according to claim 1, wherein: the first bending plate (11) close to the upper fixing flange (3) is bent on one side to form a fourth bending plate (14), the two side faces of the fourth bending plate (14) are all covered with activated carbon (2), all activated carbon (2) are arrayed in a rectangular mode on the side face of the fourth bending plate (14), and all activated carbon (2) are bonded on the fourth bending plate (14).
5. An adsorption matrix structure for facilitating hydrogen extraction according to claim 1, wherein: the upper fixing flange (3) is provided with a plurality of air passing holes (31) which are arranged on the periphery of the adsorption plate (1), the air passing holes (31) penetrate through the upper fixing flange (3), and the projection of the activated carbon (2) in the upper partial area of the adsorption plate (1) covers the air passing holes (31) of the upper fixing flange (3).
6. An adsorption matrix structure for facilitating hydrogen extraction according to claim 5, wherein: the number of the air passing holes (31) covered by the projection of the activated carbon (2) on the first bending plate (11) is at least two, and the aperture of the air passing hole (31) on the outermost side of the upper fixing flange (3) is larger than the aperture of the air passing hole (31) on other positions of the upper fixing flange (3).
7. An adsorption matrix structure for facilitating hydrogen extraction according to any one of claims 1 to 6, wherein: an indium sheet (5) is arranged between the upper fixing flange (3) and the adsorption plate (1).
8. An adsorption matrix structure for facilitating hydrogen extraction according to any one of claims 1 to 6, wherein: the upper fixing flange (3), the adsorption plate (1) and the lower support plate (4) are made of oxygen-free copper plates, and bright nickel is plated on the surfaces of the upper fixing flange (3), the adsorption plate (1) and the lower support plate (4).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110546883.6A CN113236529A (en) | 2021-05-19 | 2021-05-19 | Adsorption array structure convenient for hydrogen pumping |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110546883.6A CN113236529A (en) | 2021-05-19 | 2021-05-19 | Adsorption array structure convenient for hydrogen pumping |
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| CN113236529A true CN113236529A (en) | 2021-08-10 |
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| CN202110546883.6A Pending CN113236529A (en) | 2021-05-19 | 2021-05-19 | Adsorption array structure convenient for hydrogen pumping |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117108477A (en) * | 2023-10-25 | 2023-11-24 | 苏州八匹马超导科技有限公司 | Cryopump and preparation method thereof |
| CN117167234A (en) * | 2023-10-30 | 2023-12-05 | 苏州八匹马超导科技有限公司 | Cryopump adsorption array and cryopump |
-
2021
- 2021-05-19 CN CN202110546883.6A patent/CN113236529A/en active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117108477A (en) * | 2023-10-25 | 2023-11-24 | 苏州八匹马超导科技有限公司 | Cryopump and preparation method thereof |
| CN117108477B (en) * | 2023-10-25 | 2024-01-26 | 苏州八匹马超导科技有限公司 | Cryopump and preparation method thereof |
| CN117167234A (en) * | 2023-10-30 | 2023-12-05 | 苏州八匹马超导科技有限公司 | Cryopump adsorption array and cryopump |
| CN117167234B (en) * | 2023-10-30 | 2024-02-06 | 苏州八匹马超导科技有限公司 | Cryopump adsorption array and cryopump |
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