CN113218274B - Detection device of semiconductor process equipment - Google Patents
Detection device of semiconductor process equipment Download PDFInfo
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- CN113218274B CN113218274B CN202110621566.6A CN202110621566A CN113218274B CN 113218274 B CN113218274 B CN 113218274B CN 202110621566 A CN202110621566 A CN 202110621566A CN 113218274 B CN113218274 B CN 113218274B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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- General Physics & Mathematics (AREA)
- Testing Of Devices, Machine Parts, Or Other Structures Thereof (AREA)
- Force Measurement Appropriate To Specific Purposes (AREA)
Abstract
The embodiment of the application provides a detection device of semiconductor process equipment. The detection device is used for detecting the assembly state of a chuck of semiconductor process equipment, and comprises the following components: the device comprises a bearing mechanism, a first detection mechanism and a first pointer mechanism; the bearing mechanism can be arranged on the chuck and does not rotate along with the chuck; the first detection mechanism is pivotally connected with the bearing mechanism, extends along the radial direction of the bearing mechanism, is always in contact with the upper surface of the chuck when the bearing mechanism is arranged on the chuck, and rotates along with the fluctuation of the upper surface; the first pointer mechanism is connected with the first detection mechanism and used for indicating the rotation quantity of the first detection mechanism. The embodiment of the application can greatly improve the accuracy and the working efficiency of the detection of the chuck, thereby ensuring that the chuck can meet the design requirement.
Description
Technical Field
The application relates to the technical field of semiconductor processing, in particular to a detection device of semiconductor process equipment.
Background
Currently, in the production and assembly of single-wafer cleaning equipment of semiconductor process equipment, the chuck assembly condition for clamping wafers is critical to the operation of the machine. Specifically, the chuck mounted on the rotating shaft performs variable speed rotation during the process, the maximum rotation speed can reach 2000 revolutions per minute (Revolutions Per Minute, RPM), the dynamic stability of the chuck is poor due to the reasons of processing quality, errors and the like, and the chuck can generate surface runout and end runout during the actual process. In the prior art, the stability of the chuck can be guaranteed only through visual inspection or by depending on the processing quality, so that the accuracy and the efficiency of the detection of the chuck are poor, and the chuck cannot be ensured to meet the design requirement.
Disclosure of Invention
Aiming at the defects of the prior art, the application provides a detection device of semiconductor process equipment, which is used for solving the technical problems of poor detection accuracy and low detection efficiency of a chuck in the prior art, so that the chuck can meet the design requirement.
In a first aspect, an embodiment of the present application provides a detection apparatus for detecting an assembly state of a chuck of a semiconductor processing apparatus, including: the device comprises a bearing mechanism, a first detection mechanism and a first pointer mechanism; the bearing mechanism can be mounted on the chuck and does not rotate along with the chuck; the first detection mechanism is pivotally connected with the bearing mechanism, extends along the radial direction of the bearing mechanism, is always in contact with the upper surface of the chuck when the bearing mechanism is arranged on the chuck, and rotates along with the fluctuation of the upper surface; the first pointer mechanism is connected with the first detection mechanism and used for indicating the rotation quantity of the first detection mechanism.
In an embodiment of the application, the detection device further includes: the second detection mechanism and the second pointer mechanism; the second detection mechanism is arranged in the bearing piece in a sliding manner, extends along the radial direction of the bearing mechanism and can slide along the radial direction of the bearing mechanism, and when the bearing mechanism is arranged on the chuck, the second detection mechanism is always in contact with the outer peripheral surface of the chuck and slides along with the fluctuation of the outer peripheral surface; the second pointer mechanism is connected with the second detection mechanism and is used for indicating the sliding quantity of the second detection mechanism.
In an embodiment of the application, the bearing mechanism includes a bearing member and a connecting member, the bearing member is disposed at a top of the connecting member, the connecting member is used for being inserted into a rotating shaft of the chuck, and the connecting member is slidably matched with the rotating shaft, so that the bearing mechanism does not rotate along with the chuck.
In an embodiment of the application, the carrier is provided with a first installation portion and a second installation portion sequentially from top to bottom, the extending directions of the first installation portion and the second installation portion are the same and are arranged in parallel, and the first detection mechanism and the second detection mechanism are sequentially arranged in the first installation portion and the second installation portion.
In an embodiment of the application, the first detection mechanism includes a detection rod, a detection column, a pivot shaft and a pre-tightening structure, wherein a first end of the detection rod is located in the first installation portion, and a second end of the detection rod is provided with the detection column; the pre-tightening structure is arranged on the bottom surface of the second installation part and is used for applying pre-tightening force to the first end of the detection rod so that the detection column is always in contact with the upper surface of the chuck; the pivot shaft penetrates through the detection rod and is positioned between the pre-tightening structure and the detection column, and the detection rod is in pivot connection with the bearing piece through the pivot shaft.
In an embodiment of the application, the first detecting mechanism further includes a positioning pin, where the positioning pin can be selectively inserted through the detecting rod and the bearing member to limit rotation of the detecting rod, and the positioning pin is located between the pre-tightening structure and the pivot shaft.
In an embodiment of the application, the pre-tightening structure includes an elastic member, a limiting hole is provided on a bottom surface of the second installation portion, a bottom of the elastic member is disposed in the limiting hole, and a top of the elastic member is connected with the first end of the detection rod and is used for applying an upward pre-tightening force to the first end of the detection rod.
In an embodiment of the application, the second detection mechanism includes a detection plate, a detection assembly and a pre-tightening assembly, a first end of the detection plate is slidably disposed in the second mounting portion, a position of the detection plate corresponding to the first detection mechanism is provided with an avoidance gap, and a second end of the detection plate is provided with the detection assembly; one end of the pre-tightening assembly is connected with the detection plate, and the other end of the pre-tightening assembly is connected with the bearing piece and used for applying a pre-tightening force to the detection plate so that the detection assembly always contacts with the outer peripheral surface of the chuck.
In an embodiment of the application, the detecting component includes a detecting member and a central shaft, the detecting member is mounted at the bottom of the second end of the detecting plate through the central shaft, the detecting member can rotate automatically relative to the central shaft, and the periphery of the detecting member is used for rolling contact with the peripheral surface of the chuck.
In an embodiment of the application, the pre-tightening assembly includes a telescopic member, the bearing member and the detecting plate are both provided with connecting columns, and two ends of the telescopic member are respectively connected with the connecting columns on the bearing member and the detecting plate.
In an embodiment of the application, the first pointer mechanism includes a first mounting seat, a first dial, a first pointer and a first shift fork, the first dial is fixedly disposed on a side surface of the second detection mechanism through the first mounting seat, a bottom end of the first pointer is pivotally disposed on the first mounting seat, the first shift fork is disposed at the bottom end of the first pointer and extends towards one side of the first pointer, a first driving column is disposed on a side surface of the first detection mechanism, the first driving column is in transmission fit with the first shift fork, and when the first detection mechanism rotates, the first driving column drives the first pointer to rotate through the first shift fork and points to scales on the first dial, thereby indicating the rotation quantity of the first detection mechanism.
In an embodiment of the present application, the second pointer mechanism includes a second mounting seat, a second dial, a second pointer and a second shift fork, where the second dial is fixedly disposed on a side surface of the second detection mechanism through the second mounting seat, the bottom end of the second pointer is pivotally disposed on the second mounting seat, the second shift fork is disposed at the bottom end of the second pointer and extends along the direction of the second pointer, a second driving column is disposed on a side surface of the first detection mechanism, the second driving column is in transmission fit with the second shift fork, and when the second detection mechanism slides, the second driving column drives the second pointer to rotate through the second shift fork and points to a scale on the second dial, thereby indicating a sliding amount of the second detection mechanism.
The technical scheme provided by the embodiment of the application has the beneficial technical effects that:
according to the embodiment of the application, the bearing mechanism is arranged on the rotating shaft of the chuck in a clamping way, and the first detection mechanism is pivoted on the bearing mechanism and is contacted with the upper surface of the chuck. The surface runout range of the upper surface of the chuck can be tested by observing the first pointer mechanism through the contact of the first detection mechanism and the upper surface of the chuck, so that the detection accuracy and efficiency of the embodiment of the application to the chuck are higher, and the detection accuracy and the working efficiency of the chuck are greatly improved. Because the detection is quick and accurate, whether the chuck assembly meets the design standard can be judged quickly, and an accurate basis is provided for the chuck inspection and the later-stage problem analysis. Furthermore, the bearing mechanism is arranged on the rotating shaft of the chuck, so that the chuck can be automatically adapted according to different specifications, and the applicability and the application range of the embodiment of the application are greatly improved.
Additional aspects and advantages of the application will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the application.
Drawings
The foregoing and/or additional aspects and advantages of the application will become apparent and readily appreciated from the following description of the embodiments, taken in conjunction with the accompanying drawings, in which:
fig. 1 is a schematic structural diagram of a detection device according to an embodiment of the present application;
fig. 2 is a schematic structural diagram of a bearing mechanism according to an embodiment of the present application;
fig. 3 is a schematic structural diagram of a first detection mechanism according to an embodiment of the present application;
fig. 4 is a schematic structural diagram of a second detection mechanism according to an embodiment of the present application;
fig. 5 is a schematic structural diagram of a first pointer mechanism according to an embodiment of the present application;
FIG. 6 is a schematic structural diagram of a second pointer mechanism according to an embodiment of the present application;
fig. 7 is a schematic structural diagram of a detection device matched with a chuck according to an embodiment of the present application;
fig. 8 is a schematic structural diagram of a first pointer mechanism and a first driving column according to an embodiment of the present application;
fig. 9 is a schematic structural diagram of a second pointer mechanism matched with a second driving post according to an embodiment of the present application.
Detailed Description
The present application is described in detail below, examples of embodiments of the application are illustrated in the accompanying drawings, wherein the same or similar reference numerals refer to the same or similar components or components having the same or similar functions throughout. Further, if detailed description of the known technology is not necessary for the illustrated features of the present application, it will be omitted. The embodiments described below by referring to the drawings are illustrative only and are not to be construed as limiting the application.
It will be understood by those skilled in the art that all terms (including technical and scientific terms) used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs unless defined otherwise. It will be further understood that terms, such as those defined in commonly used dictionaries, should be interpreted as having a meaning that is consistent with their meaning in the context of the prior art and will not be interpreted in an idealized or overly formal sense unless expressly so defined herein.
The following describes the technical scheme of the present application and how the technical scheme of the present application solves the above technical problems in detail with specific embodiments.
An embodiment of the present application provides a detection apparatus for detecting an assembly state of a chuck of a semiconductor processing apparatus, where a schematic structural diagram of the detection apparatus is shown in fig. 1, and the detection apparatus includes: the carrying mechanism 1, the first detecting mechanism 2 and the first pointer mechanism 41; the carrying mechanism 1 can be mounted on a chuck (not shown in the figure) and does not rotate following the chuck; the first detection mechanism 2 is pivotally connected with the bearing mechanism 1 and extends along the radial direction of the bearing mechanism 1, and when the bearing mechanism 1 is installed on the chuck, the first detection mechanism 2 is always in contact with the upper surface of the chuck and rotates along with the fluctuation of the upper surface; the first pointer mechanism 41 is connected to the first detecting mechanism 2 for indicating the rotation amount of the first detecting mechanism 2.
As shown in fig. 1, the top of the carrying mechanism 1 may be used to mount the first detecting mechanism 2, and the bottom of the carrying mechanism 1 may be disposed on the chuck in a clamping manner, and not rotate along with the chuck, so that the first detecting mechanism 2 is fixed above the chuck. One end of the first detecting mechanism 2 may be pivotally disposed on the carrying mechanism 1, and the other end of the first detecting mechanism is disposed along a radial direction of the chuck and contacts with the upper surface of the chuck, and may specifically be located near a peripheral edge of the chuck, but the embodiment of the application is not limited thereto. When the chuck is subjected to surface runout, the first detection mechanism 2 can rotate along with the fluctuation of the upper surface of the chuck, so that the surface runout of the chuck is detected. The first pointer mechanism 41 may be connected to the first detecting mechanism 2, and the first pointer mechanism 41 may detect the surface runout range of the chuck according to the rotation amount of the first detecting mechanism 2, for example, may read a specific value of the surface runout, but the embodiment of the present application is not limited thereto.
According to the embodiment of the application, the bearing mechanism is arranged on the rotating shaft of the chuck in a clamping way, and the first detection mechanism is pivoted on the bearing mechanism and is contacted with the upper surface of the chuck. The surface runout range of the upper surface of the chuck can be tested by observing the first pointer mechanism through the contact of the first detection mechanism and the upper surface of the chuck, so that the detection accuracy and efficiency of the embodiment of the application to the chuck are higher, and the detection accuracy and the working efficiency of the chuck are greatly improved. Because the detection is quick and accurate, whether the chuck assembly meets the design standard can be judged quickly, and an accurate basis is provided for the chuck inspection and the later-stage problem analysis. Furthermore, the bearing mechanism is arranged on the rotating shaft of the chuck, so that the chuck can be automatically adapted according to different specifications, and the applicability and the application range of the embodiment of the application are greatly improved.
It should be noted that the embodiment of the present application is not limited to the position of the first pointer mechanism 41, for example, the first pointer mechanism 41 may be specifically disposed on the carrier 11, and the surface runout range of the chuck may be detected according to the rotation amount of the first detecting mechanism 2. Therefore, the embodiment of the application is not limited to this, and the person skilled in the art can adjust the setting according to the actual situation.
In one embodiment of the application: the detection device further includes: a second detection mechanism 3 and a second pointer mechanism 43; the second detection mechanism 3 is arranged in the bearing mechanism 1 in a sliding manner, extends along the radial direction of the bearing mechanism 1, can slide along the radial direction of the bearing mechanism 1, and is always in contact with the outer peripheral surface of the chuck and slides along with the fluctuation of the outer peripheral surface when the bearing mechanism 1 is arranged on the chuck; the second pointer mechanism 43 is connected to the second detecting mechanism 3, and is used for indicating the sliding amount of the second detecting mechanism 3.
As shown in fig. 1, one end portion of the second detecting mechanism 3 is slidably provided in the carrying mechanism 1 and is slidable in the radial direction of the carrying mechanism 1, and the other end portion is provided extending in the radial direction of the carrying mechanism 1 and is brought into contact with the chuck outer peripheral surface. When the chuck and the rotating shaft are not concentrically arranged, the second bearing mechanism 1 can slide along the fluctuation of the peripheral surface of the chuck when the chuck generates end runout, namely, the second detection mechanism 3 can slide and stretch relative to the bearing mechanism 1, so that the end runout of the chuck is detected. The second pointer mechanism 43 is connected to the second detecting mechanism 3, and the second pointer mechanism 43 can detect the end runout range of the chuck according to the sliding amount of the second detecting mechanism 3, for example, can read out the specific value of the end runout, but the embodiment of the application is not limited thereto. By adopting the design, the second detection mechanism 3 is arranged on the bearing mechanism 1 in a sliding manner and is in contact with the peripheral surface of the chuck, and the end runout range of the chuck can be tested by observing the second pointer mechanism 43, so that the detection of the assembling state of the chuck is expanded, and the dynamic stability of the chuck is improved.
It should be noted that, the embodiment of the present application is not limited to the position of the second pointer mechanism 43, for example, the second pointer mechanism 43 may be specifically disposed on the carrier 11, and the end runout range of the chuck may be detected according to the sliding amount of the second detecting mechanism 2. Therefore, the embodiment of the application is not limited to this, and the person skilled in the art can adjust the setting according to the actual situation.
In an embodiment of the present application, as shown in fig. 1, the carrying mechanism 1 includes a carrying member 11 and a connecting member 12, the carrying member 11 is disposed on top of the connecting member 12, the connecting member 12 is used for being inserted into a rotation shaft of the chuck, and the connecting member 12 is slidably engaged with the rotation shaft, so that the carrying mechanism 1 does not rotate along with the chuck. Specifically, the carrier 11 may be a cylindrical structure made of a metal material. The bearing member 11 is mounted on top of the connecting member 12 for mounting the first detecting mechanism 2 and the second detecting mechanism 3, and the first detecting mechanism 2 and the second detecting mechanism 3 are all extended along the radial direction of the bearing member 11. The connecting piece 12 may be a rod-shaped structure made of metal, and may be an integral structure or a split structure with the carrier 11, but the embodiment of the application is not limited thereto. When the chuck is measured, the connecting piece 12 can be specifically clamped in a rotating shaft (not shown in the figure) of the chuck and does not rotate along with the chuck, that is, the connecting piece 12 is in sliding fit with the rotating shaft, so that the bearing mechanism 1 does not rotate along with the chuck, and the first detection mechanism 2 and the second detection mechanism 3 do not rotate along with the chuck. By adopting the design, the bearing mechanism 1 can be realized by using a simpler structure without rotating along with the chuck, so that the assembly efficiency and the detection efficiency are greatly improved.
In an embodiment of the present application, as shown in fig. 1 and 2, the carrier 11 is sequentially provided with a first mounting portion 13 and a second mounting portion 14 from top to bottom, the first mounting portion 13 and the second mounting portion 14 extend in the same direction and are arranged in parallel, and the first detecting mechanism 2 and the second detecting mechanism 3 are sequentially arranged in the first mounting portion 13 and the second mounting portion 14.
As shown in fig. 1 and 2, a first mounting portion 13 is formed at a top middle position of the carrier 11, and the first mounting portion 13 may be, for example, a rectangular groove structure and extend along a radial direction of the carrier 11. The end of the first detection mechanism 2 may be disposed in the first mounting portion 13. The second mounting portion 14 is located at the bottom of the first mounting portion 13, and the second mounting portion 14 may be, for example, a rectangular groove-like structure extending along the radial direction of the carrier 11, and the second mounting portion 14 is disposed in the same direction as and in parallel with the extending direction of the first mounting portion 13. The second detection mechanism 3 may be provided to the second mounting portion 14. By adopting the design, the embodiment of the application realizes the detection of the surface runout and the end runout of the chuck, not only can the detection efficiency be greatly improved, but also the structure of the embodiment of the application is simple, thereby greatly reducing the failure rate and prolonging the service life.
The embodiment of the present application is not limited to the specific arrangement of the first detecting means 2 and the second detecting means 3, and for example, the positions of the first detecting means 2 and the second detecting means 3 may be interchanged. Therefore, the embodiment of the application is not limited to this, and the person skilled in the art can adjust the setting according to the actual situation.
In an embodiment of the present application, as shown in fig. 1 to 3, the first detecting mechanism 2 includes a detecting rod 21, a detecting post 22, a pre-tightening structure 23 and a pivot shaft 24, wherein a first end of the detecting rod 21 is located in the first mounting portion 13, and a second end of the detecting rod 21 is provided with the detecting post 22; the pre-tightening structure 23 is disposed on the bottom surface of the second mounting portion 14, and is used for applying a pre-tightening force to the end portion of the detection rod 21, so that the bottom end of the detection column 22 is always in contact with the upper surface of the chuck; the pivot shaft 24 is disposed on the detecting rod 21, and is located between the pre-tightening structure 23 and the detecting post 22, and the detecting rod 21 is pivotally connected to the carrier 11 through the pivot shaft 24.
As shown in fig. 1 to 3, the detecting rod 21 may be a square rod-shaped structure made of a metal material, and the shape of the first mounting portion 13 may be set corresponding to the shape of the detecting rod 21, where the first end of the detecting rod 21 is disposed in the first mounting portion 13 and can be pivoted with the carrier 11, that is, the left end of the detecting rod 21 is disposed in the first mounting portion 13. The second end of the detecting rod 21 is provided with a detecting column 22, and the detecting column 22 and the detecting rod 21 may be in an integral structure or a split structure, which is not limited to this embodiment of the present application, i.e. the right end of the detecting rod 21 is provided with the detecting column 22. The detection column 22 may specifically adopt a cylindrical structure, and the top end of the detection column 22 is connected to the detection rod 21, and the bottom end may be used to contact the upper surface of the chuck. The pre-tightening structure 23 may be disposed on the bottom surface of the second mounting portion 14, and the pre-tightening structure 23 may apply a pre-tightening force to the first end of the detection rod 21, that is, the pre-tightening structure 23 and the detection column 22 are disposed at two ends of the detection rod 21, respectively. In practice, the pretensioning structure 23 applies an upward pretensioning force, for example, to the first end of the detection bar 21, so that the bottom end of the detection column 22 is always in contact with the upper surface of the chuck. The pivot shaft 24 may sequentially pass through the carrier 11 and the detection rod 21 and then be connected to the carrier 11, so as to realize the pivot connection between the detection rod 21 and the carrier 11, and the pivot shaft 24 may specifically be located between the pre-tightening structure 23 and the detection post 22, for example, located on the detection rod 21 and relatively close to the pre-tightening structure 23. The surface runout of the chuck can be detected by adopting the simpler structure, so that the embodiment of the application has simple structure and is easy to use, thereby greatly reducing the application and maintenance cost and greatly reducing the failure rate.
It should be noted that the embodiment of the present application is not limited to a specific location of the pre-tightening structure 23, for example, the pre-tightening structure 23 is located between the pivot shaft 24 and the detecting post 22, so that the pre-tightening structure applies a downward pre-tightening force to the detecting rod 21 to achieve the above function. Therefore, the embodiment of the application is not limited to this, and the person skilled in the art can adjust the setting according to the actual situation.
In an embodiment of the present application, as shown in fig. 1 to 3, the first detecting mechanism 2 further includes a positioning pin 25, where the positioning pin 25 can be selectively inserted through the detecting rod 21 and the carrier 11 to limit the rotation of the detecting rod 21, and the positioning pin 25 is located between the pre-tightening structure 23 and the pivot shaft 24.
As shown in fig. 1 to 3, the positioning pin 25 may be selectively disposed through the carrier 11 and the detecting rod 21, and a specific position of the positioning pin 25 may be located on one side of the pivot shaft 24, that is, a position on the detecting rod 21 relatively far from the detecting post 22. When the surface runout of the chuck is detected, the positioning pin 25 is removed so that the detection rod 21 can rotate relative to the carrier 11, thereby realizing the detection of the surface runout of the chuck. When the end runout of the chuck is detected, the positioning pin 25 is arranged on the bearing piece 11 to position the detection rod 21, so that the detection rod 21 cannot rotate relative to the bearing piece 11, and at the moment, because the detection rod 21 is parallel to the extending direction of the second detection mechanism 3, namely the extending direction of the first detection mechanism 2 is parallel to the extending direction of the second detection mechanism 3, the mechanical interference between the second detection mechanism 3 and the first detection mechanism 2 during the detection of the chuck can be avoided, and the structural design of the embodiment of the application is reasonable, so that the failure rate is greatly reduced, and the service life is prolonged.
In an embodiment of the present application, as shown in fig. 1 to 3, the pre-tightening structure 23 includes an elastic member 232, a limiting hole 231 is disposed on a bottom surface of the second mounting portion 14, a bottom portion of the elastic member 232 is disposed in the limiting hole 231, and a top portion of the elastic member is connected to the first end of the detecting rod 21 for applying an upward pre-tightening force to the first end of the detecting rod 21.
As shown in fig. 1 and 3, the limiting hole 231 may be formed on the bottom surface of the second mounting portion 14, and the elastic member 232 may be a coil spring, the bottom of the elastic member 232 may be disposed in the limiting hole 231, and the top of the elastic member is used for propping against the bottom surface of the first end of the detecting rod 21, and specific connection manners of the two include, but are not limited to, welding or clamping. The elastic member 232 can always apply an upward pre-tightening force to the first end of the detection rod 21, and under the cooperation with the pivot shaft 24, the bottom end of the detection column 22 is always in contact with the upper surface of the chuck. By adopting the design, the embodiment of the application has simple and easy-to-use structure, and can greatly reduce the application and maintenance cost. It should be noted that the embodiment of the present application is not limited to the specific implementation of the pre-tightening structure 23, for example, one end of the pre-tightening structure 23 is connected between the pivot shaft 24 and the detecting post 22, and the other end is connected to the periphery of the carrier 11, so that the detecting rod 21 is provided with a downward pre-tightening force to achieve the above functions. Therefore, the embodiment of the application is not limited to this, and the person skilled in the art can adjust the setting according to the actual situation.
In an embodiment of the present application, as shown in fig. 1, 2 and 4, the second detecting mechanism 3 includes a detecting plate 31, a detecting assembly 32 and a pre-tightening assembly 33, a first end of the detecting plate 31 is slidably disposed in the second mounting portion 14, a position of the detecting plate 31 corresponding to the first detecting mechanism 2 is provided with a avoiding notch 311, and a second end of the detecting plate 31 is provided with the detecting assembly 32; one end of the pre-tightening assembly 33 is connected with the detection plate 31, and the other end is connected with the outer peripheral surface of the carrier 11, so as to apply a pre-tightening force to the detection plate 31, and make the detection assembly 32 always contact with the outer peripheral surface of the chuck.
As shown in fig. 1, 2 and 4, the detecting plate 31 may be a plate-shaped structure made of metal, and the detecting plate 31 is provided with a relief notch 311 extending along a length direction, so that a first end of the detecting plate 31 is in an open structure, a second end of the detecting plate 31 is in a closed structure, i.e. a left end of the detecting plate 31 is in an open structure, and a right end of the detecting plate is in a closed structure. The inner diameter of the avoidance gap 311 is larger than the outer diameter of the detection rod 21, so as to avoid mechanical interference during detection by the first detection mechanism 2, and the structural design of the embodiment of the application is more reasonable. The first end of the detection plate 31 is provided in the second mounting portion 14, and is slidably retractable with respect to the carrier 11. The sensing assembly 32 may be disposed at the bottom of the second end of the sensing plate 31, and the outer circumference of the sensing assembly 32 may be in contact with the outer circumference of the chuck. One end of the pre-tightening component 33 can be connected with the middle part of the detection plate 31, and is integrally positioned at the top of the detection plate 31, and the other end of the pre-tightening component is connected with the periphery of the bearing piece 11, so that the structure of the embodiment of the application is simpler and more reasonable. The pretension assembly 33 may apply a contracting pretension to the detection plate 31 so that the detection assembly 32 is always in contact with the outer circumferential surface of the chuck. Because the pre-tightening assembly 33 is adopted to apply the pre-tightening force of shrinkage to the detection plate 31, the detection assembly 32 can always contact with the outer peripheral surface of the chuck, so that the embodiment of the application has the advantages of simple structure and easy use, thereby improving the detection efficiency of the chuck, and greatly reducing the application and maintenance cost.
It should be noted that, the embodiment of the present application is not limited to the position of the pretensioning assembly 33, for example, the pretensioning assembly 33 may be disposed on the bottom of the detection plate 31 as a whole to achieve the above functions. Therefore, the embodiment of the application is not limited to this, and the person skilled in the art can adjust the setting according to the actual situation.
In an embodiment of the present application, as shown in fig. 1 and 4, the detecting assembly 32 includes a detecting member 321 and a central shaft 322, the detecting member 321 is mounted at the bottom of the second end of the detecting plate 31 through the central shaft 322, the detecting member 321 can rotate relative to the central shaft 322, and the outer periphery of the detecting member 321 is used for rolling contact with the outer peripheral surface of the chuck.
As shown in fig. 1 and fig. 4, the detecting element 321 may specifically adopt a cylindrical structure, the top end of the central shaft 322 is mounted at the bottom of the second end of the detecting plate 31, for example, in a threaded or clamping manner, and the detecting element 321 is mounted on the central shaft 322, for example, through a bearing, so that the detecting element 321 can self-rotate relative to the central shaft 322. In practical application, since the detecting element 321 contacts with the outer peripheral surface of the chuck, the detecting element 321 can slide along with the fluctuation of the outer peripheral surface of the chuck, so as to drive the detecting plate 31 to slide relatively with the bearing element 11, and the end runout of the chuck can be detected through the second pointer mechanism 43. Since the detecting member 321 can self-rotate relative to the central shaft 322, the friction between the chuck and the detecting member 321 is reduced, thereby greatly improving the accuracy of the chuck detection. It should be noted that the embodiment of the present application is not limited to the specific structure of the detecting assembly 32, for example, one end of the detecting member 321 may be directly mounted on the detecting plate 31 through a bearing. Therefore, the embodiment of the application is not limited to this, and the person skilled in the art can adjust the setting according to the actual situation.
In an embodiment of the application, as shown in fig. 1, 2 and 4, the pre-tightening assembly 33 includes a telescopic member 331 and a connecting post 332, the two telescopic members 331 are respectively disposed at two sides of the avoidance gap 311, and two ends of the telescopic member 331 are connected to the carrier 11 and the detection plate 31 through the connecting post 332.
As shown in fig. 1, 2 and 4, the pre-tightening assembly 33 may include two telescopic members 331, where the two telescopic members 331 are respectively disposed on two sides of the avoidance gap 311, that is, the two telescopic members 331 are respectively disposed on two sides of the detection rod 21 of the first detection mechanism 2, so that the detection plate 31 operates more smoothly, thereby improving the detection accuracy. The telescopic member 331 may be a coil spring, but embodiments of the present application are not limited to the specific type of telescopic member 331, and those skilled in the art can adjust the setting according to the actual situation. The two connecting posts 332 are respectively located at two ends of the telescopic member 331 and are respectively disposed on the detecting plate 31 and the carrying member 11, and the connecting posts 332 can be specifically connected to the detecting plate 31 and the carrying member 11 by a screw connection method, but the embodiment of the application is not limited thereto, for example, the connecting posts 332 can also be connected by a welding method. By adopting the arrangement, as the telescopic pieces 331 are arranged on the two sides of the avoidance notch 311, the stress of the detection plate 31 is more uniform, so that the detection assembly 32 is in contact with the outer peripheral surface of the chuck more tightly, and the detection accuracy is greatly improved. It should be noted that the embodiment of the present application is not limited to a specific position of the telescopic member 331, for example, the telescopic member 331 may be disposed at the bottom of the detection plate 31. Therefore, the embodiment of the application is not limited to this, and the person skilled in the art can adjust the setting according to the actual situation.
In an embodiment of the present application, as shown in fig. 1 to 5, the first pointer mechanism 41 includes a first mounting seat 411, a first dial 412, a first pointer 413 and a first shift fork 414, the first dial 412 is fixedly disposed on a side surface of the second detection mechanism 3 through the first mounting seat 411, a bottom end of the first pointer 413 is pivotally disposed on the first mounting seat 411, the first shift fork 414 is disposed at a bottom end of the first pointer 413 and extends towards one side of the first pointer 413, a first driving column 42 is disposed on a side surface of the first detection mechanism 2, the first driving column 42 is in transmission fit with the first shift fork 414, and when the first detection mechanism 2 rotates, the first driving column 42 drives the first pointer 413 to rotate through the first shift fork 414 and points to a scale on the first dial 412, thereby indicating a rotation amount of the first detection mechanism 2.
As shown in fig. 1 to 5, the first mounting seat 411 is disposed on the second detection mechanism 3, for example, by a bolt, and the side surface of the detection plate 31 of the second detection mechanism 3 may be provided with a mounting groove 312, so as to reduce the distance between the first mounting seat 411 and the first detection mechanism 2. The first dial 412 is disposed at the top of the first mounting seat 411 and is perpendicular to the top surface of the detection plate 31, but the specific height of the first dial 412 is not limited, and the height of the first dial 412 may specifically be set corresponding to the height of the first pointer 413, so the embodiment of the present application is not limited thereto. The first pointer 413 may be pivotally disposed on the first mounting seat 411 by a bolt, and the first pointer 413 is vertically disposed and rotatable within a range of the first dial 412 for detecting a specific value of the runout of the chuck. The first fork 414 may have a plate-shaped structure, one end of which is connected to the bottom end of the first pointer 413, and the other end of which is disposed toward one side of the first pointer 413, and the end may be provided with a "U" -shaped notch, which may be used to accommodate the first driving post 42. The first driving post 42 is disposed on a side surface of the detecting rod 21 of the first detecting mechanism 2 and is disposed near the detecting post 22, and the extending directions of the first driving post 42 and the detecting post 22 are perpendicular to each other, that is, the first driving post 42 is disposed on a side surface of the first detecting mechanism 2, so that the first driving post 42 can be in transmission fit with the first shifting fork 414. In practical application, the upper surface of the chuck is jumped, the detection column 22 drives the detection rod 21 to rotate relative to the bearing piece 11, and the first driving column 42 arranged on the detection rod 21 can drive the first pointer 413 to rotate through the first shifting fork 414 so as to point to the scale on the first dial 412, so that the rotation quantity of the first detection mechanism 2 is indicated, and the detection of the surface jumped range of the chuck is realized. With the above design, the first pointer mechanism 41 can detect the surface runout of the chuck according to the relative movement of the first detecting mechanism 2 and the second detecting mechanism 3, so that not only is the detection result accurate, but also the embodiment of the application has a simple structure, thereby greatly reducing the application and maintenance costs.
Optionally, the height of the first pointer 413 is a first preset value, a second preset value is provided between the first driving post 42 and the end of the first pointer 413, and the ratio between the first preset value and the second preset value is 50 to 100, so that the surface runout of the chuck drives the displacement generated by the first driving post 42 to be amplified by 50 to 100 times and then displayed through the swing of the first pointer 413, and then the specific value of the surface runout of the chuck can be read by matching with the scale designed on the first dial 412. By adopting the design, the detection accuracy of the embodiment of the application can be improved, and the stability and the service life of the embodiment of the application are greatly improved due to the simple structure.
It should be noted that, the embodiment of the present application is not limited to the specific type of the first pointer mechanism 41, and for example, the first pointer mechanism 41 may be an electronic instrument. Therefore, the embodiment of the application is not limited to this, and the person skilled in the art can adjust the setting according to the actual situation.
In an embodiment of the present application, as shown in fig. 1 to 6, the second pointer mechanism 43 further includes a second mounting seat 431, a second dial 432, a second pointer 433 and a second shift fork 434, the second dial 432 is fixedly disposed on the second detection mechanism 3 through the second mounting seat 431, the bottom end of the second pointer 433 is pivotally disposed on the first mounting seat 411, the second shift fork 434 is disposed at the bottom end of the second pointer 433 and extends along the direction of the second pointer 433, the side surface of the first detection mechanism 2 is provided with a second driving post 44, the second driving post 44 is in transmission fit with the second shift fork 434, and when the second detection mechanism 3 slides, the second driving post 44 drives the second pointer 433 to rotate through the second shift fork 434 and points to the scale on the second dial 432, thereby indicating the sliding amount of the second detection mechanism 3.
As shown in fig. 1 to 6, the second mounting seat 431 is disposed on the second detecting mechanism 3, for example, by a bolt, and the side surface of the detecting plate 31 of the second detecting mechanism 3 may be provided with a mounting groove 312 to reduce the distance between the second mounting seat 431 and the second driving post 44. The second dial 432 is disposed at the top of the first mounting seat 411 and is perpendicular to the top surface of the detection plate 31, but the specific height of the second dial 432 is not limited, and the height of the second dial 432 may specifically be set corresponding to the height of the second pointer 433, so the embodiment of the present application is not limited thereto. The second pointer 433 may be pivotally disposed on the second mount 431 by a bolt, and the second pointer 433 is vertically disposed and rotatable within the range of the second dial 432 for detecting a specific end runout value of the chuck. The second shifting fork 434 may specifically be a plate structure, one end of which is connected to the bottom end of the first pointer 413, and the other end extends toward the direction of the second pointer 433, that is, the second shifting fork 434 is located between the second pointer 433 and the second dial 432. The other end of the second fork 434 may be provided with a "U" -shaped notch that may be used to receive the second driving post 44. The second driving post 44 is disposed parallel to the extending direction of the first driving post 42, that is, the second driving post 44 is disposed on the side surface of the first detection mechanism 2. Specifically, the extending direction of the second shifting fork 434 is parallel to the direction of the second pointer 433, so that the second driving post 44 can drive the second pointer 433 to be in transmission fit. In practical application, the outer peripheral surface of the chuck is subject to end runout, the detection assembly 32 drives the detection plate 31 to slide and stretch relative to the bearing piece 11, and the second driving post 44 arranged on the detection rod 21 can drive the second pointer 433 to rotate so as to point to the scale on the second dial 432, thereby indicating the sliding quantity of the second detection mechanism 3 and realizing detection of the end runout range of the chuck. With the above design, the second pointer mechanism 43 can detect the end runout of the chuck according to the relative movement of the first detection mechanism 2 and the second detection mechanism 3, so that not only is the detection result accurate, but also the embodiment of the application has a simple structure, thereby greatly reducing the application and maintenance costs.
Optionally, the height of the second pointer 433 is a first preset value, a second preset value is provided between the second driving post 44 and the end of the second pointer 433, and the ratio between the first preset value and the second preset value is 50 to 100, but the embodiment of the present application is not limited thereto, and a person skilled in the art can adjust the setting according to the actual situation. By adopting the design, the end runout of the periphery of the chuck drives the displacement generated by the second driving column 44 to be amplified by 50 to 100 times and then displayed through the swing of the second pointer 433, and then the end runout value of the chuck can be read by matching with the scale designed on the second dial 432. By adopting the design, the detection accuracy of the embodiment of the application can be improved, and the stability and the service life of the embodiment of the application are greatly improved due to the simple structure.
It should be noted that, the embodiment of the present application is not limited to the specific type of the second pointer mechanism 43, and for example, the second pointer mechanism 43 may be an electronic instrument. Therefore, the embodiment of the application is not limited to this, and the person skilled in the art can adjust the setting according to the actual situation.
In order to further illustrate the specific implementation of the embodiments of the present application, the following describes the specific testing method of the embodiments of the present application with reference to the accompanying drawings.
As shown in fig. 1 to 9, the chuck 201 is screwed on the rotation shaft 202, the rotation shaft 202 can drive the chuck 201 to rotate, then the connector 12 of the detecting device is inserted into the inner hole of the rotation shaft 202 and is tightly matched, the detecting post 22 is contacted with the upper surface of the chuck 201, the detecting component 32 is contacted with the outer circumferential surface of the chuck 201, and the detecting device does not move along with the rotation of the chuck 201.
When it is necessary to detect the surface runout of the chuck 201, the positioning pin 25 is first pulled out, the detection post 22 of the first detection mechanism 2 is brought into close contact with the upper surface of the chuck 201 by the presence of the pivot shaft 24, and at this time, the chuck 201 is slowly rotated, the detection post 22 rotates as the upper surface of the chuck 201 is rolled up and down, and the first driving post 42 attached to the detection rod 21 of the first detection mechanism 2 moves up and down together. The first shifting fork 414 of the first pointer mechanism 41 is in transmission fit with the first driving column 42, and as the radius of the movement of the first shifting fork 414 is far smaller than the end swinging radius of the first dial 413, for example, the radius ratio of the first shifting fork 414 and the second dial 413 is set to 100 times (the ratio between the first preset value and the second preset value is 100), that is, the displacement generated by the first driving column 42 driven by the surface runout of the chuck 201 is amplified by one hundred times and then displayed by the first dial 413 in a swinging manner, and then the surface runout value of the chuck 201 can be read by matching with the scale designed on the first dial 412.
When the end runout of the chuck 201 needs to be detected, the positioning pin 25 is inserted first, at this time, the detecting rod 21 of the first detecting mechanism 2 and the detecting plate 31 of the second detecting mechanism 3 are parallel to each other, the detecting assembly 32 is tightly attached to the outer peripheral surface of the chuck 201 due to the action of the pre-tightening assembly 33, at this time, the chuck 201 is slowly rotated, the detecting assembly 32 is fluctuated along the radial direction of the chuck 201, and the second pointer mechanism 43 mounted on the second detecting mechanism 3 moves together with the chuck, that is, the second detecting mechanism 3 moves relative to the first detecting mechanism 2. The second driving post 44 mounted on the first detecting mechanism 2 is in transmission fit with the second pointer mechanism 43, and since the movement radius of the second shifting fork 434 is far smaller than the end swinging radius of the second pointer 433, for example, the radius ratio of the second shifting fork 434 to the second pointer 433 is set to 100 times (the ratio between the first preset value and the second preset value is 100), that is, the displacement generated by the second driving post 44 driven by the end jumping of the chuck 201 is amplified by one hundred times and displayed by the second pointer 433 swinging, and then the end jumping value of the chuck 201 can be read out by matching with the scale designed on the second dial 432.
By applying the embodiment of the application, at least the following beneficial effects can be realized:
According to the embodiment of the application, the bearing mechanism is arranged on the rotating shaft of the chuck in a clamping way, and the first detection mechanism is pivoted on the bearing mechanism and is contacted with the upper surface of the chuck. The surface runout range of the upper surface of the chuck can be tested by observing the first pointer mechanism through the contact of the first detection mechanism and the upper surface of the chuck, so that the detection accuracy and efficiency of the embodiment of the application to the chuck are higher, and the detection accuracy and the working efficiency of the chuck are greatly improved. Because the detection is quick and accurate, whether the chuck assembly meets the design standard can be judged quickly, and an accurate basis is provided for the chuck inspection and the later-stage problem analysis. Furthermore, the bearing mechanism is arranged on the rotating shaft of the chuck, so that the chuck can be automatically adapted according to different specifications, and the applicability and the application range of the embodiment of the application are greatly improved.
It is to be understood that the above embodiments are merely illustrative of the application of the principles of the present application, but not in limitation thereof. Various modifications and improvements may be made by those skilled in the art without departing from the spirit and substance of the application, and are also considered to be within the scope of the application.
In the description of the present application, it should be understood that the terms "center," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," and the like indicate orientations or positional relationships based on the orientation or positional relationships shown in the drawings, merely to facilitate describing the present application and simplify the description, and do not indicate or imply that the devices or elements referred to must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the present application.
The terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include one or more such feature. In the description of the present application, unless otherwise indicated, the meaning of "a plurality" is two or more.
In the description of the present application, it should be noted that, unless explicitly specified and limited otherwise, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be either fixedly connected, detachably connected, or integrally connected, for example; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present application will be understood in specific cases by those of ordinary skill in the art.
In the description of the present specification, a particular feature, structure, material, or characteristic may be combined in any suitable manner in one or more embodiments or examples.
The foregoing is only a partial embodiment of the present application, and it should be noted that it will be apparent to those skilled in the art that modifications and adaptations can be made without departing from the principles of the present application, and such modifications and adaptations are intended to be comprehended within the scope of the present application.
Claims (11)
1. A detecting apparatus for detecting an assembled state of a chuck of a semiconductor processing apparatus, comprising: the device comprises a bearing mechanism, a first detection mechanism and a first pointer mechanism;
the bearing mechanism comprises a bearing piece and a connecting piece, and the connecting piece is in sliding fit with the rotating shaft of the chuck, so that the bearing mechanism can be installed on the chuck and does not rotate along with the chuck;
the first detection mechanism comprises a detection rod and a pivot shaft, the detection rod is pivotally connected with the bearing piece through the pivot shaft and is arranged along the radial extension of the bearing mechanism, and when the bearing mechanism is arranged on the chuck, the first detection mechanism is always in contact with the upper surface of the chuck and rotates along with the fluctuation of the upper surface;
The first pointer mechanism is connected with the first detection mechanism and is used for indicating the rotation quantity of the first detection mechanism;
the detection device further includes: the second detection mechanism and the second pointer mechanism;
the second detection mechanism is arranged in the bearing mechanism in a sliding manner, extends along the radial direction of the bearing mechanism and can slide along the radial direction of the bearing mechanism, and when the bearing mechanism is arranged on the chuck, the second detection mechanism is always in contact with the outer peripheral surface of the chuck and slides along with the fluctuation of the outer peripheral surface;
the second pointer mechanism is connected with the second detection mechanism and is used for indicating the sliding quantity of the second detection mechanism.
2. The inspection device of claim 1, wherein the carrier is disposed on top of the connector for insertion into a rotating shaft of the chuck such that the carrier does not rotate with the chuck.
3. The detecting device according to claim 2, wherein the carrier is provided with a first mounting portion and a second mounting portion in sequence from top to bottom, the first mounting portion and the second mounting portion are provided in parallel in the same extending direction, and the first detecting mechanism and the second detecting mechanism are provided in the first mounting portion and the second mounting portion in sequence.
4. The device of claim 3, wherein the first detection mechanism further comprises a detection post and a pre-tightening structure, the first end of the detection rod is positioned in the first mounting portion, and the second end of the detection rod is provided with the detection post; the pre-tightening structure is arranged on the bottom surface of the second installation part and is used for applying pre-tightening force to the first end of the detection rod so that the detection column is always in contact with the upper surface of the chuck; the pivot shaft penetrates through the detection rod and is located between the pre-tightening structure and the detection column.
5. The inspection device of claim 4, wherein said first inspection mechanism further comprises a dowel pin selectively insertable through said inspection bar and said carrier to limit rotation of said inspection bar, said dowel pin being positioned between said pretensioning structure and said pivot axis.
6. The detecting device for detecting the rotation of a motor rotor as claimed in claim 4, wherein the pre-tightening structure includes an elastic member, a limiting hole is provided at a bottom surface of the second mounting portion, a bottom portion of the elastic member is disposed in the limiting hole, and a top portion thereof is connected to the first end of the detecting rod for applying an upward pre-tightening force thereto.
7. The detecting device according to claim 3, wherein the second detecting mechanism comprises a detecting plate, a detecting assembly and a pre-tightening assembly, a first end of the detecting plate is slidably arranged in the second mounting portion, a position of the detecting plate corresponding to the first detecting mechanism is provided with a avoidance gap, and a second end of the detecting plate is provided with the detecting assembly; one end of the pre-tightening assembly is connected with the detection plate, and the other end of the pre-tightening assembly is connected with the bearing piece and used for applying a pre-tightening force to the detection plate so that the detection assembly always contacts with the outer peripheral surface of the chuck.
8. The inspection device of claim 7, wherein the inspection assembly includes an inspection member and a central shaft, the inspection member being mounted to the bottom of the second end of the inspection plate via the central shaft, the inspection member being capable of self-rotation relative to the central shaft, the outer periphery of the inspection member being adapted for rolling contact with the outer peripheral surface of the chuck.
9. The test device of claim 8, wherein the pretension assembly comprises a telescoping member, wherein the carrier and the test plate are each provided with a connecting post, and wherein two ends of the telescoping member are connected to the connecting post on the carrier and the connecting post on the test plate, respectively.
10. The detecting device according to claim 1, wherein the first pointer mechanism includes a first mounting seat, a first dial, a first pointer and a first shift fork, the first dial is fixedly disposed on a side surface of the second detecting mechanism through the first mounting seat, a bottom end of the first pointer is pivotally disposed on the first mounting seat, the first shift fork is disposed at a bottom end of the first pointer and extends toward one side of the first pointer, a first driving column is disposed on a side surface of the first detecting mechanism, the first driving column is in transmission fit with the first shift fork, and when the first detecting mechanism rotates, the first driving column drives the first pointer to rotate through the first shift fork and points to scales on the first dial, thereby indicating a rotation amount of the first detecting mechanism.
11. The detecting device according to claim 1, wherein the second pointer mechanism comprises a second mounting seat, a second dial, a second pointer and a second shift fork, the second dial is fixedly arranged on the side surface of the second detecting mechanism through the second mounting seat, the bottom end of the second pointer is pivotally arranged on the second mounting seat, the second shift fork is arranged at the bottom end of the second pointer and is arranged along the pointing direction extension of the second pointer, a second driving column is arranged on the side surface of the first detecting mechanism, the second driving column is in transmission fit with the second shift fork, and when the second detecting mechanism slides, the second driving column drives the second pointer to rotate through the second shift fork and points to scales on the second dial, so that the sliding amount of the second detecting mechanism is indicated.
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| CN202110621566.6A CN113218274B (en) | 2021-06-03 | 2021-06-03 | Detection device of semiconductor process equipment |
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| CN202110621566.6A CN113218274B (en) | 2021-06-03 | 2021-06-03 | Detection device of semiconductor process equipment |
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