CN113204076A - Photonic device, cross waveguide and waveguide layer thereof - Google Patents

Photonic device, cross waveguide and waveguide layer thereof Download PDF

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Publication number
CN113204076A
CN113204076A CN202110568168.2A CN202110568168A CN113204076A CN 113204076 A CN113204076 A CN 113204076A CN 202110568168 A CN202110568168 A CN 202110568168A CN 113204076 A CN113204076 A CN 113204076A
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CN
China
Prior art keywords
waveguide
layer
slab
sublayer
strip sections
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202110568168.2A
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Chinese (zh)
Inventor
梁寒潇
宋一品
周颖聪
巫海苍
毛文浩
宋时伟
孙维祺
俞清扬
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Nanjing Lycore Technologies Co Ltd
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Nanjing Lycore Technologies Co Ltd
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Publication date
Application filed by Nanjing Lycore Technologies Co Ltd filed Critical Nanjing Lycore Technologies Co Ltd
Priority to CN202110568168.2A priority Critical patent/CN113204076A/en
Publication of CN113204076A publication Critical patent/CN113204076A/en
Priority to EP22810142.4A priority patent/EP4350403A1/en
Priority to PCT/CN2022/081789 priority patent/WO2022247408A1/en
Priority to US18/516,998 priority patent/US20240085625A1/en
Pending legal-status Critical Current

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    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122Basic optical elements, e.g. light-guiding paths
    • G02B6/125Bends, branchings or intersections

Abstract

The application discloses a photonic device, a cross waveguide and a waveguide layer thereof. The waveguide layer includes: the waveguide structure comprises a slab sublayer, a first waveguide and a second waveguide intersecting the first waveguide, wherein the first waveguide and the second waveguide are ridge waveguides; the first waveguide and the second waveguide are disposed on the slab sublayer, and the slab sublayer, the first waveguide, and the second waveguide are of an integral construction. The ridge waveguide solves the technical problem that the ridge waveguide is fast in loss in the related art.

Description

Photonic device, cross waveguide and waveguide layer thereof
Technical Field
The application relates to the technical field of optical waveguides, in particular to a photonic device, a cross waveguide and a waveguide layer thereof.
Background
Ridge waveguides are used more and more frequently in photonic devices, and ridge waveguides have lower transmission loss than rectangular waveguides. And in some special applications, the ridge waveguide possesses much better performance than the rectangular waveguide. As in a lithium niobate modulator, the ridge waveguide preferably allows the electric field formed between the two electrodes to accumulate within the waveguide material and pass through the waveguide, thereby greatly enhancing the interaction between the material and the electric field generated by the electrodes. However, in the related art, when the ridge waveguide transmits light, energy is concentrated on the ridge waveguide, so that the ridge waveguide is lost quickly.
Aiming at the problem of fast ridge waveguide loss in the related art, no effective solution is provided at present.
Disclosure of Invention
The present disclosure provides a photonic device, a cross waveguide and a waveguide layer thereof, so as to solve the problem of fast ridge waveguide loss in the related art.
In order to achieve the above object, in a first aspect, the present application provides a waveguide layer.
The waveguide layer according to the present application comprises: the waveguide structure comprises a slab sublayer, a first waveguide and a second waveguide intersecting the first waveguide, wherein the first waveguide and the second waveguide are ridge waveguides;
the first waveguide and the second waveguide are disposed on the slab sublayer, and the slab sublayer, the first waveguide, and the second waveguide are of an integral construction.
Optionally, the first waveguide and the second waveguide are structurally identical.
Optionally, the first waveguide and the second waveguide are perpendicular.
Optionally, the ridge waveguide comprises a wide strip section, two tapered sections and two narrow strip sections;
the two gradual change sections and the two narrow strip sections are symmetrically arranged between the wide strip sections, the gradual change sections are positioned between the narrow strip sections and the wide strip sections, the transverse width of the wide strip sections is larger than that of the narrow strip sections, the width of one side of the gradual change section, which is used for connecting the narrow strip sections, is equal to that of the narrow strip sections, and the width of one side of the gradual change section, which is used for connecting the wide strip sections, is equal to that of the wide strip sections.
Optionally, on a cross section parallel to the flat sub-layer, the narrow strip section and the wide strip section are both rectangular in shape, and the width of the gradual change section gradually widens from the narrow strip section to the wide strip section.
Optionally, an angle between an outer surface of the slab sublayer and an edge of the slab of the ridge waveguide is greater than 20 degrees and less than 90 degrees.
Optionally, both ends of the first waveguide and both ends of the second waveguide extend to the edge of the slab sublayer.
In a second aspect, the present application also provides an intersecting waveguide comprising an isolation layer, a substrate layer and a waveguide layer as described above, said isolation layer having a lower refractive index than said waveguide layer.
Optionally, the optical waveguide further comprises a cladding layer, the waveguide layer is disposed between the isolation layer and the cladding layer, the cladding layer has a lower refractive index than the waveguide layer, and the first waveguide and the second waveguide are located between the slab sublayer and the cladding layer.
In a third aspect, the present application also provides a photonic device comprising the crossed waveguide described above.
In an embodiment of the present application, there is provided a waveguide layer, by providing: the waveguide structure comprises a slab sublayer, a first waveguide and a second waveguide intersecting the first waveguide, wherein the first waveguide and the second waveguide are ridge waveguides; the first waveguide and the second waveguide are disposed on the slab sublayer, and the slab sublayer, the first waveguide, and the second waveguide are of an integral construction. In this way, by arranging the slab sublayer below the first waveguide and the second waveguide intersecting the first waveguide, energy is mainly concentrated on the slab sublayer and loss is mainly concentrated on the slab sublayer in the transmission process of the waveguide layer, the first waveguide and the second waveguide are both ridge waveguides, the loss of the ridge waveguides is smaller, and the volume of the slab sublayer relative to the ridge waveguides is larger, so that the loss of the slab sublayer and the ridge waveguides is reduced. Thereby solving the problem of fast ridge waveguide loss in the related art.
Drawings
The accompanying drawings, which are incorporated in and constitute a part of this application, serve to provide a further understanding of the application and to enable other features, objects, and advantages of the application to be more apparent. The drawings and their description illustrate the embodiments of the invention and do not limit it. In the drawings:
fig. 1 is a schematic structural diagram of a waveguide layer provided in an embodiment of the present application;
FIG. 2 is a schematic cross-sectional view of a waveguide layer provided in embodiments of the present application;
FIG. 3 is a top view of a waveguide layer provided in embodiments of the present application;
FIG. 4 is a schematic diagram of energy distribution of crossed waveguides in the related art;
FIG. 5 is a schematic diagram of an energy distribution of a waveguide layer provided in an embodiment of the present application;
fig. 6 is a schematic structural diagram of an intersecting waveguide provided in an embodiment of the present application.
Detailed Description
In order to make the technical solutions better understood by those skilled in the art, the technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application, and it is obvious that the described embodiments are only partial embodiments of the present application, but not all embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present application.
It should be noted that the terms "first," "second," and the like in the description and claims of this application and in the drawings described above are used for distinguishing between similar elements and not necessarily for describing a particular sequential or chronological order. It should be understood that the data so used may be interchanged under appropriate circumstances such that embodiments of the application described herein may be used. Furthermore, the terms "comprises," "comprising," and "having," and any variations thereof, are intended to cover a non-exclusive inclusion, such that a process, method, system, article, or apparatus that comprises a list of steps or elements is not necessarily limited to those steps or elements expressly listed, but may include other steps or elements not expressly listed or inherent to such process, method, article, or apparatus.
In this application, the terms "upper", "lower", "left", "right", "front", "rear", "top", "bottom", "inner", "outer", "middle", "vertical", "horizontal", "lateral", "longitudinal", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings. These terms are used primarily to better describe the present application and its embodiments, and are not used to limit the indicated devices, elements or components to a particular orientation or to be constructed and operated in a particular orientation.
Moreover, some of the above terms may be used to indicate other meanings besides the orientation or positional relationship, for example, the term "on" may also be used to indicate some kind of attachment or connection relationship in some cases. The specific meaning of these terms in this application will be understood by those of ordinary skill in the art as appropriate.
Furthermore, the terms "mounted", "disposed", "provided", "connected", "slidably connected", "fixed", should be understood in a broad sense. For example, "connected" may be a fixed connection, a detachable connection, or a unitary construction; can be a mechanical connection, or an electrical connection; may be directly connected, or indirectly connected through intervening media, or may be in internal communication between two devices, elements or components. The specific meaning of the above terms in the present application can be understood by those of ordinary skill in the art as appropriate.
In addition, the term "plurality" shall mean two as well as more than two.
In view of the problem of fast ridge waveguide loss in the related art, as shown in fig. 1 to 6, the present embodiment provides a waveguide layer 1 including: the waveguide structure comprises a slab sublayer 11, a first waveguide 12 and a second waveguide 13 intersecting with the first waveguide 12, wherein the first waveguide 12 and the second waveguide 13 are ridge waveguides;
the first waveguide 12 and the second waveguide 13 are disposed on the slab sublayer 11, and the slab sublayer 11, the first waveguide 12 and the second waveguide 13 are integrally configured.
Specifically, in the related art, as shown in fig. 4, the energy distribution of the crossed waveguide in the related art is entirely concentrated on the ridge waveguide, whereas in this embodiment, by disposing the slab sublayer 11 under the first waveguide 12 and the second waveguide 13 intersecting with the first waveguide 12, and the slab sublayer 11, the first waveguide 12 and the second waveguide 13 are integrally configured, so that during the transmission of the waveguide layer 1, the energy is mainly concentrated on the slab sublayer 11, as shown in fig. 5, the loss is mainly on the slab sublayer 11, and the first waveguide 12 and the second waveguide 13 are ridge waveguides, and the loss of the ridge waveguide is smaller, while the volume of the slab sublayer 11 relative to the ridge waveguide is larger, so that the losses of the slab sublayer 11 and the ridge waveguide are reduced.
Optionally, the first waveguide 12 and the second waveguide 13 are identical in structure.
It should be noted that the structures of the first waveguide 12 and the second waveguide 13 may also be different, and the specific dimensions of the first waveguide 12 and the second waveguide 13 may be obtained according to finite element analysis in the prior art.
Specifically, the first waveguide 12 and the second waveguide 13 are perpendicular to each other.
Specifically, the ridge waveguide comprises a wide strip section 14, two gradual change sections 15 and two narrow strip sections 16;
the two transition sections 15 and the two narrow sections 16 are symmetrically arranged between the wide and wide sections 14, the transition section 15 is located between the narrow section 16 and the wide section 14, the transverse width of the wide section 14 is greater than the transverse width of the narrow section 16, the width of one side of the transition section 15 for connecting the narrow section 16 is equal to the transverse width of the narrow section 16, and the width of one side of the transition section 15 for connecting the wide section 14 is equal to the transverse width of the wide section 14.
Specifically, in a cross section parallel to the flat plate sublayer 11, the shape of each of the narrow strip section 16 and the wide strip section 14 is rectangular, and the width of the gradual change section 15 gradually widens from the narrow strip section 16 to the wide strip section 14, where the width change of the gradual change section 15 may be linear or non-linear.
Optionally, an angle between an outer surface of the slab edge of the ridge waveguide and the slab sublayer 11 is greater than 20 degrees and less than 90 degrees.
Specifically, because the rectangular edge of the ridge waveguide forms an included angle with the flat plate sublayer 11, on the basis of increasing the volume of the ridge waveguide, the service life of the ridge waveguide is prolonged, the ridge waveguide is more resistant to loss, and energy can be more concentrated on the flat plate sublayer 11 in the transmission process of the waveguide layer 1.
Specifically, both ends of the first waveguide 12 and both ends of the second waveguide 13 extend to the edge of the slab sublayer 11.
Based on the same technical concept, the application also provides a crossed waveguide, which comprises an isolation layer 2, a substrate layer 4 and the waveguide layer 1, wherein the isolation layer 2 is arranged between the substrate layer 4 and the waveguide layer 1, and the refractive index of the isolation layer 2 is lower than that of the waveguide layer 1.
Optionally, the waveguide layer 1 is disposed between the isolation layer 2 and the cladding layer 3, the cladding layer 3 has a lower refractive index than the waveguide layer 1, and the first waveguide 12 and the second waveguide 13 are located between the slab sublayer 11 and the cladding layer 3.
Wherein the refractive index of the isolation layer 2 and the refractive index of the cladding layer 3 are both lower than the refractive index of the waveguide layer 1, so that light does not pass through the isolation layer 2 and the cladding layer 3 and does not enter the substrate layer 4 during the transmission of the waveguide layer 1. The cladding layer 3 may also serve as a physical protection for the waveguide layer 1.
Based on the same technical concept, the application also provides a photonic device comprising the crossed waveguide.
In the embodiment of the present application, there is provided a waveguide layer 1, by providing: a slab sublayer 11, a first waveguide 12, and a second waveguide 13 intersecting the first waveguide 12; the first waveguide 12 and the second waveguide 13 are disposed on the slab sublayer 11, and the slab sublayer 11, the first waveguide 12 and the second waveguide 13 are integrally configured. In this way, by disposing the slab sub-layer 11 under the first waveguide 12 and the second waveguide 13 intersecting with the first waveguide, during the transmission of light through the waveguide layer 1, energy will be mainly concentrated on the slab sub-layer 11, loss is mainly on the slab sub-layer 11, and both the first waveguide 12 and the second waveguide 13 are ridge waveguides, and the loss of the ridge waveguides is smaller, while the volume of the slab sub-layer 11 relative to the ridge waveguides is larger, so that the loss of the slab sub-layer and the ridge waveguides is reduced. Thereby solving the problem of fast ridge waveguide loss in the related art.
The above description is only a preferred embodiment of the present application and is not intended to limit the present application, and various modifications and changes may be made by those skilled in the art. Any modification, equivalent replacement, improvement and the like made within the spirit and principle of the present application shall be included in the protection scope of the present application.

Claims (10)

1. A waveguide layer, comprising: the waveguide structure comprises a slab sublayer, a first waveguide and a second waveguide intersecting the first waveguide, wherein the first waveguide and the second waveguide are ridge waveguides;
the first waveguide and the second waveguide are disposed on the slab sublayer, and the slab sublayer, the first waveguide, and the second waveguide are of an integral construction.
2. The waveguide layer of claim 1, wherein the first waveguide and the second waveguide are perpendicular.
3. The waveguide layer of claim 1 wherein the ridge waveguide comprises a wide strip section, two tapered sections, and two narrow strip sections;
the two gradual change sections and the two narrow strip sections are symmetrically arranged between the wide strip sections, the gradual change sections are positioned between the narrow strip sections and the wide strip sections, the transverse width of the wide strip sections is larger than that of the narrow strip sections, the width of one side of the gradual change section, which is used for connecting the narrow strip sections, is equal to that of the narrow strip sections, and the width of one side of the gradual change section, which is used for connecting the wide strip sections, is equal to that of the wide strip sections.
4. The waveguide layer of claim 3, wherein the narrow stripe segments and the wide stripe segments are rectangular in shape in a cross section parallel to the slab sub-layer, and the tapered segment has a width gradually widening from the narrow stripe segments to the wide stripe segments.
5. The waveguide layer of claim 2 wherein the outer surface of the slab edge of the ridge waveguide is at an angle greater than 20 degrees and less than 90 degrees to the slab sublayer.
6. The waveguide layer of claim 1, wherein both ends of the first waveguide and both ends of the second waveguide extend to the edges of the slab sublayer.
7. The waveguide layer of claim 1, wherein the first waveguide and the second waveguide structure are identical.
8. An intersecting waveguide comprising a spacer layer, a substrate layer and a waveguide layer as claimed in any of claims 1-7, the spacer layer being between the substrate layer and the waveguide layer, the spacer layer having a lower refractive index than the waveguide layer.
9. The crossed waveguide of claim 1, further comprising a cladding layer, the waveguide layer being disposed between the isolation layer and the cladding layer, the cladding layer having a lower index of refraction than the waveguide layer, the first waveguide and the second waveguide being located between the slab sublayer and the cladding layer.
10. A photonic device comprising the crossed waveguide of claim 8.
CN202110568168.2A 2021-05-24 2021-05-24 Photonic device, cross waveguide and waveguide layer thereof Pending CN113204076A (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
CN202110568168.2A CN113204076A (en) 2021-05-24 2021-05-24 Photonic device, cross waveguide and waveguide layer thereof
EP22810142.4A EP4350403A1 (en) 2021-05-24 2022-03-18 Photonic device, crossed waveguide, waveguide layer and manufacturing method therefor
PCT/CN2022/081789 WO2022247408A1 (en) 2021-05-24 2022-03-18 Photonic device, crossed waveguide, waveguide layer and manufacturing method therefor
US18/516,998 US20240085625A1 (en) 2021-05-24 2023-11-22 Photonic Device, Crossed Waveguide, Waveguide Layer and Method for Manufacturing Same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202110568168.2A CN113204076A (en) 2021-05-24 2021-05-24 Photonic device, cross waveguide and waveguide layer thereof

Publications (1)

Publication Number Publication Date
CN113204076A true CN113204076A (en) 2021-08-03

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CN (1) CN113204076A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114047578A (en) * 2022-01-12 2022-02-15 季华实验室 Waveguide layer and cross waveguide
CN114815274A (en) * 2022-04-28 2022-07-29 厦门大学 Optical vortex generating system with locally controllable near field
WO2022247408A1 (en) * 2021-05-24 2022-12-01 南京刻得不错光电科技有限公司 Photonic device, crossed waveguide, waveguide layer and manufacturing method therefor
CN116774351A (en) * 2023-08-21 2023-09-19 之江实验室 Lithium niobate-based optical power distributor with arbitrary proportion and design method

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2022247408A1 (en) * 2021-05-24 2022-12-01 南京刻得不错光电科技有限公司 Photonic device, crossed waveguide, waveguide layer and manufacturing method therefor
CN114047578A (en) * 2022-01-12 2022-02-15 季华实验室 Waveguide layer and cross waveguide
CN114047578B (en) * 2022-01-12 2022-04-01 季华实验室 Waveguide layer and cross waveguide
CN114815274A (en) * 2022-04-28 2022-07-29 厦门大学 Optical vortex generating system with locally controllable near field
CN114815274B (en) * 2022-04-28 2023-02-14 厦门大学 Optical vortex generating system with locally controllable near field
CN116774351A (en) * 2023-08-21 2023-09-19 之江实验室 Lithium niobate-based optical power distributor with arbitrary proportion and design method

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