CN113203764A - Material tissue quantitative analysis system using scanning electron microscope and energy spectrometer - Google Patents
Material tissue quantitative analysis system using scanning electron microscope and energy spectrometer Download PDFInfo
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Abstract
The invention belongs to the technical field of material analysis, and discloses a material tissue quantitative analysis system using a scanning electron microscope and an energy spectrometer, which comprises: the device comprises a material preprocessing module, an energy spectrum image acquisition module, a quantitative measurement module, an image processing module, a central control module, an area defining module, a brightness threshold value selection module, a defined area determination module, a determination result analysis module and a display and storage module. The material tissue quantitative analysis system utilizing the scanning electron microscope and the energy spectrometer provided by the invention is used for preprocessing materials to realize the acquisition of material samples, so that the interference in measurement is reduced, and the measurement result is more accurate; the scanning electron microscope has high resolution, can display the organization details on a submicron scale, has obvious contrast and high measurement precision; the method has the advantages that the component contrast difference of the back scattering image of the scanning electron microscope is utilized, the quantitative analysis can be directly carried out on the phases of different components, the applicability is wide, the method is suitable for various metal materials, steel products, minerals and refractory materials, and the measurement operation is quick and convenient.
Description
Technical Field
The invention belongs to the technical field of material analysis, and particularly relates to a material tissue quantitative analysis system utilizing a scanning electron microscope and an energy spectrometer.
Background
At present: materials are generally composed of one or more phases, wherein the proportion of each constituent phase has been a fundamental concern in the materials community. There are many methods for microscopic quantitative analysis of constituent phases in materials, and for example, quantitative metallographic analysis, X-ray back-scattering diffraction analysis (EBSD), X-ray diffraction analysis (XRD), etc. are commonly used. The principle is that a certain geometric measurement is made on a two-dimensional plane (a polished plane or an analysis surface of a sample) for microstructures with different contrasts, and then the microstructure quantity value in a three-dimensional space is calculated. Because the equipment mainly used for metallographic quantitative analysis is an optical metallographic microscope, and the resolution limit of the optical microscope is about 200nm, the image quality is poor when the normally used optical metallographic microscope is magnified to 2000 times, and the details of a plurality of tissues are still not clear under the magnification, so that the defects still exist when the phases in the fine tissues are subjected to quantitative analysis.
The EBSD quantitative phase analysis method is to perform diffraction with spatial resolution of submicron level while keeping the conventional characteristics of a scanning electron microscope, has high EBSD resolution (the spatial resolution reaches 0.1 mu m), is an effective analysis means in material research, and is widely applied to materials such as metals, alloys, ceramics, semiconductors, superconductors, ores and the like in industrial production. However, EBSD analysis requires relatively high sample preparation requirements, and equipment users must also have relatively high knowledge of crystallographic theory, and poor resolution of phase-close materials, and thus has several disadvantages.
Phase analysis by X-ray diffraction analysis (XRD) is the most widely used X-ray diffraction among metals, and quantitative analysis is to determine the content of each phase in a material based on the intensity of the diffraction pattern. The defects are that the requirement on an analyst is high, the micro-area analysis capability is poor, and the XRD result is not visual enough compared with the metallographic quantitative analysis result.
The existing material quantitative analysis methods have respective applicability, but have the problems of insufficient resolution, difficult sample preparation or complex test process.
Through the above analysis, the problems and defects of the prior art are as follows: the existing material quantitative analysis methods have respective applicability, but have the problems of insufficient resolution, difficult sample preparation or complex test process.
Disclosure of Invention
Aiming at the problems in the prior art, the invention provides a material tissue quantitative analysis system utilizing a scanning electron microscope and an energy spectrometer.
The invention is realized in this way, a material tissue quantitative analysis system using a scanning electron microscope and an energy spectrometer, the material tissue quantitative analysis system using the scanning electron microscope and the energy spectrometer comprises:
the material pretreatment module is connected with the central control module and is used for pretreating the material to be measured through a material pretreatment program to obtain a material sample;
the energy spectrum image acquisition module is connected with the central control module and is used for acquiring an image of a material sample through an X-ray energy spectrometer arranged in an electron microscope sample chamber to obtain an energy spectrum image;
the acquisition of the image of the material sample is carried out through the X-ray energy spectrometer arranged in the electron microscope sample chamber, and an energy spectrum image is obtained, and the method comprises the following steps:
putting a material sample into an electron microscope sample chamber, selecting a low vacuum mode, automatically vacuumizing equipment, adding filament current, and dispersing medium astigmatism;
enabling the scanning electron microscope image to be in a clear state to obtain an electronic image with clear focus;
opening an X-ray energy spectrometer, and entering an energy spectrum analysis program after the current emitted by the filament is stable; the energy spectrum analysis comprises:
collecting X-ray spectral line intensity data by using an X-ray energy spectrometer;
preprocessing the obtained X-ray spectral line intensity data, wherein the preprocessing comprises background correction and abnormal data point removal, and the preprocessed X-ray spectral line intensity data is obtained;
acquiring data of a material sample, taking the acquired numerical value as an initial value, and performing numerical attenuation on the acquired non-attenuated X-ray intensity data after pretreatment by utilizing the beer law to obtain a fitting model; the numerical attenuation is performed on the obtained non-attenuated X-ray intensity data after the preprocessing by utilizing the beer law to obtain a fitting model, and the fitting model comprises the following steps:
intensity S of X-ray radiation received by the X-ray detectormDescribed by beer's law, the following fitted model was obtained:
wherein R ═ RjlFor the detector response matrix, the lower corner mark l represents the number of high-resolution energy grid points;
the intensity of the spectral line collected by the X-ray energy spectrometer and not subjected to material attenuation,
is background noise; the optical thickness τ is defined as a two-dimensional matrix τ (El, Z)k) Wherein E islRepresenting high resolution energy spectrum lattice points, and ZkRepresenting the tangent point height; s∞Representing position coordinates of the sun; s0Position coordinates representing a satellite; n isg(Z (s)) is the number density of the component gas g at a certain height in the sight line direction, and the number density is calculated through a material model; sigmagIs the absorption cross section of the component gas; normalization factor alpha and composite scalar factor betagIs a free parameter in the model;
tangential number density ng(Z (s)) and radial number density n0The relationship of (Z) is given by the integral of:
wherein n is0(Z) is the tangent point height material density, i.e. the radial number density;z represents a series of values of the tangent point height; z(s) represents the height of the tangent point of the sight line direction at the observation moment;
adjusting the contrast difference of the back scattering electron image, and capturing an electronic image by using an X-ray energy spectrometer;
the quantitative measurement module is connected with the central control module and is used for quantitatively measuring the energy spectrum image through a quantitative measurement range sequence;
the image processing module is connected with the central control module and is used for processing the energy spectrum image through an image processing program to obtain a processed image;
and the central control module is connected with the material preprocessing module, the energy spectrum image acquisition module, the quantitative measurement module and the image processing module and is used for controlling the operation of each connecting module through a main control computer so as to ensure the normal operation of each module.
Further, the material tissue quantitative analysis system using a scanning electron microscope and an energy spectrometer further comprises:
the region dividing module is connected with the central control module and used for dividing different regions of the processed image through a region dividing program to obtain a region to be measured;
the brightness threshold value selection module is connected with the central control module and used for selecting colors of the area to be measured through a brightness threshold value selection program and selecting a brightness threshold value;
the region defining determination module is connected with the central control module and is used for determining the region to be determined, which is obtained by defining through a region defining determination program, so as to obtain a determination result;
the measurement result analysis module is connected with the central control module and is used for analyzing the measurement result through a measurement result analysis program to obtain a measurement analysis result and outputting a measurement report;
and the display and storage module is connected with the central control module and is used for displaying the measurement report through the display and storing the measurement report.
Further, the method for preprocessing the material to be measured by the material preprocessing program to obtain the material sample comprises the following steps:
obtaining a material to be measured, and cleaning the surface of the material to be measured by using filter paper dipped with ethanol solution;
polishing the cleaned material to be measured by using sand paper;
polishing the surface of the material to be measured after polishing by using a polishing machine;
and chemically soaking the polished material to complete pretreatment, thereby obtaining a material sample.
Further, the enabling the scanning electron microscope image to be in a clear state includes: high voltage of 20KV is applied, light beam is selected to be phi 4.0, magnification is 100 times, and focal length, brightness and contrast are adjusted.
Further, the energy spectrum analysis further comprises:
carrying out nonlinear least square fitting on the obtained fitting model and the preprocessed attenuated X-ray spectral line intensity data to obtain fitting parameters;
and repeatedly iterating by using the obtained fitting parameters until an iteration termination condition is reached.
Further, the least squares fit utilizes the Levenberg-Marquardt algorithm as a solver.
Further, the performing nonlinear least square fitting on the obtained fitting model and the preprocessed attenuated X-ray spectral line intensity data to obtain fitting parameters includes:
using C statistics as maximum likelihood estimator:
wherein d isiX-ray line intensity data points, m, as attenuated by the materialiThe theoretical value of the model at the ith point is: m isi＝Sm(Ej,Zk)；
Wherein S ismIs energy EjAnd tangent point height ZkJ and k respectively correspond to the height of the detection channel and the tangent point, and are determined by the blinding sight line; i is defined as: i ≡ j + Nk；
Wherein N is the energy measurement channel number of the X-ray energy spectrometer;
the inversion solution of the tangent point height material density is realized by minimizing the C statistics; and simultaneously fitting the masked observation data points of all the energy channels and the tangent point heights in the solving process to obtain the material density values of all the energy channels and the tangent point heights.
Another objective of the present invention is to provide an information data processing terminal, wherein the information data processing terminal is configured to implement the material tissue quantitative analysis system using a scanning electron microscope and an energy spectrometer.
It is another object of the present invention to provide a computer program product stored on a computer readable medium, which comprises a computer readable program for providing a user input interface to apply the system for quantitative analysis of material tissue using a scanning electron microscope and an energy spectrometer when the computer program product is executed on an electronic device.
Another object of the present invention is to provide a computer-readable storage medium storing instructions which, when executed on a computer, cause the computer to apply the system for quantitative analysis of material tissue using a scanning electron microscope and an energy spectrometer.
By combining all the technical schemes, the invention has the advantages and positive effects that: the material tissue quantitative analysis system utilizing the scanning electron microscope and the energy spectrometer provided by the invention is used for preprocessing materials to realize the acquisition of material samples, so that the interference in measurement is reduced, and the measurement result is more accurate; the scanning electron microscope has high resolution, can display the organization details on a submicron scale, has obvious contrast and high measurement precision; the method has the advantages that the component contrast difference of the back scattering image of the scanning electron microscope is utilized, the quantitative analysis can be directly carried out on the phases of different components, the applicability is wide, the method is suitable for various metal materials, steel products, minerals and refractory materials, and the measurement operation is quick and convenient.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings needed to be used in the embodiments of the present application will be briefly described below, and it is obvious that the drawings described below are only some embodiments of the present application, and it is obvious for those skilled in the art that other drawings can be obtained from the drawings without creative efforts.
Fig. 1 is a block diagram of a material tissue quantitative analysis system using a scanning electron microscope and an energy spectrometer according to an embodiment of the present invention.
Fig. 2 is a flowchart of a method for quantitative analysis of a material structure using a scanning electron microscope and an energy spectrometer according to an embodiment of the present invention.
Fig. 3 is a flowchart of a method for preprocessing a material to be measured by a material preprocessing procedure to obtain a material sample according to an embodiment of the present invention.
Fig. 4 is a flowchart for obtaining an energy spectrum image by acquiring an image of a material sample through an X-ray energy spectrometer arranged in an electron microscope sample chamber according to an embodiment of the present invention.
Fig. 5 is a flowchart of energy spectrum analysis provided by the embodiment of the invention.
In the figure: 1. a material pre-treatment module; 2. a spectral image acquisition module; 3. a quantitative measurement module; 4. an image processing module; 5. a central control module; 6. a region delineation module; 7. a brightness threshold selecting module; 8. a demarcated area determination module; 9. a measurement result analysis module; 10. and a display and storage module.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention is further described in detail with reference to the following embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.
In view of the problems in the prior art, the present invention provides a material tissue quantitative analysis system using a scanning electron microscope and an energy spectrometer, and the present invention is described in detail below with reference to the accompanying drawings.
As shown in fig. 1, a material tissue quantitative analysis system using a scanning electron microscope and an energy spectrometer according to an embodiment of the present invention includes:
the material pretreatment module 1 is connected with the central control module 5 and is used for pretreating a material to be measured through a material pretreatment program to obtain a material sample;
the energy spectrum image acquisition module 2 is connected with the central control module 5 and is used for acquiring an image of a material sample through an X-ray energy spectrometer arranged in an electron microscope sample chamber to obtain an energy spectrum image;
the quantitative measurement module 3 is connected with the central control module 5 and is used for quantitatively measuring the energy spectrum image through a quantitative measurement range sequence;
the image processing module 4 is connected with the central control module 5 and is used for processing the energy spectrum image through an image processing program to obtain a processed image;
the central control module 5 is connected with the material preprocessing module 1, the energy spectrum image acquisition module 2, the quantitative measurement module 3, the image processing module 4, the region defining module 6, the brightness threshold value selection module 7, the defined region determination module 8, the determination result analysis module 9 and the display and storage module 10, and is used for controlling the operation of each connection module through a main control computer and ensuring the normal operation of each module;
the region demarcation module 6 is connected with the central control module 5 and is used for demarcating different regions of the processed image through a region demarcation program to obtain a region to be measured;
the brightness threshold value selection module 7 is connected with the central control module 5 and used for selecting colors of the area to be measured through a brightness threshold value selection program and selecting a brightness threshold value;
the demarcated area measuring module 8 is connected with the central control module 5 and is used for measuring the demarcated area to be measured through the demarcated area measuring program to obtain a measuring result;
a measurement result analysis module 9 connected to the central control module 5 for analyzing the measurement result by a measurement result analysis program to obtain a measurement analysis result and outputting a measurement report;
and a display and storage module 10 connected to the central control module 5 for displaying the measurement report and storing the measurement report on a display.
As shown in fig. 2, the method for quantitatively analyzing a material tissue by using a scanning electron microscope and an energy spectrometer according to the embodiment of the present invention includes the following steps:
s101, preprocessing a material to be measured by a material preprocessing module through a material preprocessing program to obtain a material sample; acquiring an image of a material sample by using an X-ray energy spectrometer arranged in an electron microscope sample chamber through an energy spectrum image acquisition module to obtain an energy spectrum image;
s102, carrying out quantitative measurement on the energy spectrum image by using a quantitative measurement range sequence through a quantitative measurement module; processing the energy spectrum image by using an image processing program through an image processing module to obtain a processed image;
s103, controlling the operation of each connecting module by using a main control computer through a central control module to ensure the normal operation of each module; carrying out region division on the processed image by using a region division program through a region division module to obtain a region to be measured;
s104, a brightness threshold value selection module is used for utilizing a brightness threshold value selection program to select colors of the area to be measured and selecting a brightness threshold value; the method comprises the steps that a defined area determination module utilizes a defined area determination program to determine a defined area to be determined, and a determination result is obtained;
s105, analyzing the measurement result by using a measurement result analysis program through a measurement result analysis module to obtain a measurement analysis result and output a measurement report; and displaying the measurement report by using the display through the display and storage module, and storing the measurement report.
As shown in fig. 3, the method for preprocessing a material to be measured by a material preprocessing procedure to obtain a material sample according to an embodiment of the present invention includes:
s201, obtaining a material to be measured, and cleaning the surface of the material to be measured by using filter paper dipped with ethanol solution;
s202, polishing the cleaned material to be measured by using sand paper;
s203, polishing the surface of the material to be measured after polishing by using a polishing machine;
and S204, chemically soaking the polished material to complete pretreatment, thereby obtaining a material sample.
As shown in fig. 4, the obtaining of the image of the material sample by the X-ray energy spectrometer disposed in the electron microscope sample chamber according to the embodiment of the present invention to obtain the energy spectrum image includes:
s301, placing a material sample into an electron microscope sample chamber, selecting a low vacuum mode, automatically vacuumizing equipment, adding filament current, and dispersing medium astigmatism;
s302, enabling the scanning electron microscope image to be in a clear state to obtain an electronic image with clear focus;
s303, turning on an X-ray energy spectrometer, and entering an energy spectrum analysis program after the current emitted by the filament is stable;
s304, contrast difference of the back scattering electron image is adjusted, and an X-ray energy spectrometer is used for capturing the electronic image.
The method for enabling the scanning electron microscope image to be in a clear state comprises the following steps: high voltage of 20KV is applied, light beam is selected to be phi 4.0, magnification is 100 times, and focal length, brightness and contrast are adjusted.
As shown in fig. 5, the energy spectrum analysis provided by the embodiment of the present invention includes:
s401, collecting X-ray spectral line intensity data by using an X-ray energy spectrometer;
s402, preprocessing the obtained X-ray spectral line intensity data, wherein the preprocessing comprises background correction and abnormal data point removal, and the preprocessed X-ray spectral line intensity data is obtained;
s403, obtaining data of the material sample, taking the obtained numerical value as an initial value, and performing numerical attenuation on the obtained non-attenuated X-ray intensity data after pretreatment by utilizing the beer law to obtain a fitting model;
s404, performing nonlinear least square fitting on the obtained fitting model and the preprocessed attenuated X-ray spectral line intensity data to obtain fitting parameters;
and S405, performing repeated iteration by using the obtained fitting parameters until an iteration termination condition is reached.
The method for obtaining the fitting model by numerically attenuating the obtained non-attenuated X-ray intensity data after the preprocessing by using the beer law comprises the following steps of:
intensity S of X-ray radiation received by the X-ray detectormDescribed by beer's law, the following fitted model was obtained:
wherein R ═ RjlFor the detector response matrix, the lower corner mark l represents the number of high-resolution energy grid points;
the intensity of the spectral line collected by the X-ray energy spectrometer and not subjected to material attenuation,
is background noise; the optical thickness τ is defined as a two-dimensional matrix τ (El, Z)k) Wherein E islRepresenting high resolution energy spectrum lattice points, and ZkRepresenting the tangent point height; s∞Representing position coordinates of the sun; s0Position coordinates representing a satellite; n isg(Z (s)) is the number density of the component gas g at a certain height in the sight line direction, and the number density is calculated through a material model; sigmagIs the absorption cross section of the component gas; normalization factor alpha and composite scalar factor betagIs a free parameter in the model;
tangential number density ng(Z (s)) and radial number density n0The relationship of (Z) is given by the integral of:
wherein n is0(Z) is the tangent point height material density, i.e. the radial number density; z represents a series of values of the tangent point height; z(s) represents the height of the tangent point of the sight line direction at the observation time.
The least square fitting provided by the embodiment of the invention utilizes a Levenberg-Marquardt algorithm as a solver.
The method for performing nonlinear least square fitting on the obtained fitting model and the preprocessed attenuated X-ray spectral line intensity data to obtain fitting parameters comprises the following steps:
using C statistics as maximum likelihood estimator:
wherein d isiX-ray line intensity data points, m, as attenuated by the materialiThe theoretical value of the model at the ith point is: m isi＝Sm(Ej,Zk)；
Wherein S ismIs energy EjAnd tangent point height ZkJ and k respectively correspond to the height of the detection channel and the tangent point, and are determined by the blinding sight line; i is defined as: i ≡ j + Nk；
Wherein N is the energy measurement channel number of the X-ray energy spectrometer;
the inversion solution of the tangent point height material density is realized by minimizing the C statistics; and simultaneously fitting the masked observation data points of all the energy channels and the tangent point heights in the solving process to obtain the material density values of all the energy channels and the tangent point heights.
The above description is only for the purpose of illustrating the preferred embodiments of the present invention, and the scope of the present invention is not limited thereto, and any modification, equivalent replacement, and improvement made by those skilled in the art within the technical scope of the present invention disclosed herein, which is within the spirit and principle of the present invention, should be covered by the present invention.
Claims (10)
1. The utility model provides an utilize scanning electron microscope and energy spectrometer's material tissue quantitative analysis system which characterized in that, utilize scanning electron microscope and energy spectrometer's material tissue quantitative analysis system includes:
the material pretreatment module is connected with the central control module and is used for pretreating the material to be measured through a material pretreatment program to obtain a material sample;
the energy spectrum image acquisition module is connected with the central control module and is used for acquiring an image of a material sample through an X-ray energy spectrometer arranged in an electron microscope sample chamber to obtain an energy spectrum image;
the acquisition of the image of the material sample is carried out through the X-ray energy spectrometer arranged in the electron microscope sample chamber, and an energy spectrum image is obtained, and the method comprises the following steps:
putting a material sample into an electron microscope sample chamber, selecting a low vacuum mode, automatically vacuumizing equipment, adding filament current, and dispersing medium astigmatism;
enabling the scanning electron microscope image to be in a clear state to obtain an electronic image with clear focus;
opening an X-ray energy spectrometer, and entering an energy spectrum analysis program after the current emitted by the filament is stable; the energy spectrum analysis comprises:
collecting X-ray spectral line intensity data by using an X-ray energy spectrometer;
preprocessing the obtained X-ray spectral line intensity data, wherein the preprocessing comprises background correction and abnormal data point removal, and the preprocessed X-ray spectral line intensity data is obtained;
acquiring data of a material sample, taking the acquired numerical value as an initial value, and performing numerical attenuation on the acquired non-attenuated X-ray intensity data after pretreatment by utilizing the beer law to obtain a fitting model; the numerical attenuation is performed on the obtained non-attenuated X-ray intensity data after the preprocessing by utilizing the beer law to obtain a fitting model, and the fitting model comprises the following steps:
intensity S of X-ray radiation received by the X-ray detectormDescribed by beer's law, the following fitted model was obtained:
wherein R ═ RjlFor the detector response matrix, the lower corner mark l represents the number of high-resolution energy grid points;
the intensity of the spectral line collected by the X-ray energy spectrometer and not subjected to material attenuation,
is background noise; the optical thickness τ is defined as a two-dimensional matrix τ (El, Z)k) Wherein E islRepresenting high resolution energy spectrum lattice points, and ZkRepresenting the tangent point height; s∞Representing position coordinates of the sun; s0Position coordinates representing a satellite; n isg(Z (s)) is the number density of the component gas g at a certain height in the sight line direction, and the number density is calculated through a material model; sigmagIs the absorption cross section of the component gas; normalization factor alpha and composite scalar factor betagIs a free parameter in the model;
tangential number density ng(Z (s)) and radial number density n0The relationship of (Z) is given by the integral of:
wherein n is0(Z) is the tangent point height material density, i.e. the radial number density; z represents a series of values of the tangent point height; z(s) represents the height of the tangent point of the sight line direction at the observation moment;
adjusting the contrast difference of the back scattering electron image, and capturing an electronic image by using an X-ray energy spectrometer;
the quantitative measurement module is connected with the central control module and is used for quantitatively measuring the energy spectrum image through a quantitative measurement range sequence;
the image processing module is connected with the central control module and is used for processing the energy spectrum image through an image processing program to obtain a processed image;
and the central control module is connected with the material preprocessing module, the energy spectrum image acquisition module, the quantitative measurement module and the image processing module and is used for controlling the operation of each connecting module through a main control computer so as to ensure the normal operation of each module.
2. The system for quantitative analysis of material texture using a scanning electron microscope and an energy spectrometer as claimed in claim 1, wherein the system for quantitative analysis of material texture using a scanning electron microscope and an energy spectrometer further comprises:
the region dividing module is connected with the central control module and used for dividing different regions of the processed image through a region dividing program to obtain a region to be measured;
the brightness threshold value selection module is connected with the central control module and used for selecting colors of the area to be measured through a brightness threshold value selection program and selecting a brightness threshold value;
the region defining determination module is connected with the central control module and is used for determining the region to be determined, which is obtained by defining through a region defining determination program, so as to obtain a determination result;
the measurement result analysis module is connected with the central control module and is used for analyzing the measurement result through a measurement result analysis program to obtain a measurement analysis result and outputting a measurement report;
and the display and storage module is connected with the central control module and is used for displaying the measurement report through the display and storing the measurement report.
3. The system for quantitative analysis of material texture using scanning electron microscope and energy spectrometer as claimed in claim 1, wherein the pretreatment of the material to be measured by the material pretreatment program to obtain the material sample comprises:
obtaining a material to be measured, and cleaning the surface of the material to be measured by using filter paper dipped with ethanol solution;
polishing the cleaned material to be measured by using sand paper;
polishing the surface of the material to be measured after polishing by using a polishing machine;
and chemically soaking the polished material to complete pretreatment, thereby obtaining a material sample.
4. The system for quantitative analysis of material texture by using a scanning electron microscope and an energy spectrometer as claimed in claim 1, wherein the making the scanning electron microscope image in a clear state comprises: high voltage of 20KV is applied, light beam is selected to be phi 4.0, magnification is 100 times, and focal length, brightness and contrast are adjusted.
5. The system for quantitative analysis of material texture using scanning electron microscopy and energy spectrometer as claimed in claim 1 wherein the energy spectrum analysis further comprises:
carrying out nonlinear least square fitting on the obtained fitting model and the preprocessed attenuated X-ray spectral line intensity data to obtain fitting parameters;
and repeatedly iterating by using the obtained fitting parameters until an iteration termination condition is reached.
6. The system for quantitative analysis of material tissue using scanning electron microscopy and energy spectroscopy of claim 5 wherein the least squares fit uses the Levenberg-Marquardt algorithm as a solver.
7. The system for quantitative analysis of material texture using scanning electron microscopy and energy spectroscopy of claim 5, wherein the fitting model obtained and the pre-processed attenuated X-ray spectral line intensity data are subjected to non-linear least squares fitting to obtain fitting parameters, comprising:
using C statistics as maximum likelihood estimator:
wherein d isiX-ray line intensity data points, m, as attenuated by the materialiThe theoretical value of the model at the ith point is: m isi＝Sm(Ej,Zk)；
Wherein S ismIs energy EjAnd tangent point height ZkJ, k respectively correspond toDetecting the height of the channel and the tangent point, which is determined by the sun-sheltered sight; i is defined as: i ≡ j + Nk；
Wherein N is the energy measurement channel number of the X-ray energy spectrometer;
the inversion solution of the tangent point height material density is realized by minimizing the C statistics; and simultaneously fitting the masked observation data points of all the energy channels and the tangent point heights in the solving process to obtain the material density values of all the energy channels and the tangent point heights.
8. An information data processing terminal, characterized in that the information data processing terminal is used for realizing the material tissue quantitative analysis system using a scanning electron microscope and an energy spectrometer according to any one of claims 1 to 7.
9. A computer program product stored on a computer readable medium, comprising a computer readable program for providing a user input interface for applying the system for quantitative analysis of material tissue using scanning electron microscopy and energy spectroscopy as claimed in any one of claims 1 to 7 when executed on an electronic device.
10. A computer-readable storage medium storing instructions which, when executed on a computer, cause the computer to apply the system for quantitative analysis of material tissue using a scanning electron microscope and an energy spectrometer as claimed in any one of claims 1 to 7.
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