CN113203554A - Optical device loss measurement method based on intercept method and micro-ring resonant cavity - Google Patents

Optical device loss measurement method based on intercept method and micro-ring resonant cavity Download PDF

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CN113203554A
CN113203554A CN202110472474.6A CN202110472474A CN113203554A CN 113203554 A CN113203554 A CN 113203554A CN 202110472474 A CN202110472474 A CN 202110472474A CN 113203554 A CN113203554 A CN 113203554A
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CN113203554B (en
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阮小可
唐伟杰
储涛
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Zhejiang Lab
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Abstract

The invention provides an optical device loss measuring method based on an intercept method and a micro-ring resonant cavity. Different numbers of devices to be tested are inserted into the micro-ring resonant cavity array, and the loss of a single device to be tested is obtained through the steps of spectral measurement, parameter extraction, linear fitting and the like. Compared with the traditional optical loss intercept measurement method, the method can reduce the area of the chip and improve the measurement precision.

Description

Optical device loss measurement method based on intercept method and micro-ring resonant cavity
Technical Field
The invention relates to the technical field of optical device loss measurement, in particular to an optical device loss measurement method based on an intercept method and a micro-ring resonant cavity.
Background
The loss of the optical device is one of the important indicators for the performance of the weighing device. The intercept method (cut-back method) is the most classical and convenient method for measuring optical loss, and the principle thereof is as follows: and calculating the optical loss of a single device to be tested by measuring the optical loss of a test array formed by cascading different numbers of devices to be tested. The intercept method has the advantages that the measuring steps are simple and convenient, but when the loss of the device to be measured is small, the number of cascaded devices of the test array required to be constructed is large, so that the occupied chip area is too large, otherwise, the measuring precision is influenced.
Disclosure of Invention
The invention aims to provide an optical device loss measuring method based on an intercept method and a micro-ring resonant cavity, so as to overcome the defects in the prior art.
In order to achieve the purpose, the invention provides the following technical scheme:
the application discloses an optical device loss measuring method based on an intercept method and a micro-ring resonant cavity, which comprises the following steps:
s1, constructing a test unit: constructing a series of micro-ring resonant cavities with the same parameters on an optical chip, and respectively inserting the device to be tested with n devices to be tested into waveguides of different micro-ring resonant cavities to form a series of test units; each test unit comprises a light incidence end and a light emergent end; the n is a natural number;
s2, measuring spectral characteristics: for each test unit, coupling incident spectrum-sweeping laser from a light incident end, receiving emergent light at a light emergent end, and recording the spectral characteristics of the test unit;
s3, calculating the loss of each to-be-tested group: for each test cell, extracting the transmission coefficient t and the amplitude loss coefficient alpha of each test cell by using the spectral characteristics obtained in S2;
s4, calculating the loss of a single device to be tested: decibel value loss (db) — 20log for each test unit loss10And (alpha) performing linear fitting, wherein the slope of the fitting straight line is the insertion loss of the single device to be tested.
Preferably, in step S1, the number of test units can be flexibly adjusted according to the chip area.
Preferably, in step S1, n of each test unit is different from each other.
Preferably, in step S2, the outgoing light is received at the light outgoing end by using an optical power meter or a spectrometer.
Preferably, the step S3 includes the following sub-steps:
s31, calculating the maximum transmittance T of the target wave band according to the spectral characteristicsmaxAnd a minimum transmittance TminFull width at half maximum Δ λ at resonance valleyFWHMAnd free spectral range Δ λFSR；
S32, calculating the transmission coefficient t and the amplitude loss coefficient alpha of each test unit;
s33, distinguishing the transmission coefficient t and the amplitude loss coefficient alpha of each test unit by a dot method, and calculating the loss of the group to be tested;
preferably, the calculation formula in step S32 is as follows:
Figure BDA0003045880170000021
Figure BDA0003045880170000022
Figure BDA0003045880170000023
Figure BDA0003045880170000024
Figure BDA0003045880170000025
preferably, the linear fitting in step S4 includes the following operations: and taking scatter diagrams with the number of the devices to be tested as the abscissa and the loss as the ordinate, and then performing linear fitting on the scatter diagrams.
The invention has the beneficial effects that:
1. the loss measurement results are more accurate: because the spectral characteristics of the micro-ring resonant cavity are extremely sensitive to the loss coefficient, the output spectral characteristics of the micro-ring resonant cavity can be greatly changed by the change of the number of the devices to be tested inserted into the micro-ring, and the accuracy of parameter extraction is further improved; the linear fit combined with the intercept method further avoids the effects of incidental measurement errors.
2. The occupied chip area is smaller than that of the traditional intercept method: the traditional intercept method needs to construct a large number of cascaded device arrays on a chip, because the loss change is negligible due to too few cascades, and the loss measurement precision is influenced. The scheme benefits from the high accuracy of micro-ring spectrum extraction loss, and does not need to cascade too many devices.
The features and advantages of the present invention will be described in detail by embodiments in conjunction with the accompanying drawings.
Drawings
FIG. 1 is a schematic diagram of a series of test cells on an optical chip in accordance with an embodiment of the present invention;
FIG. 2 is a diagram of the spectral characteristics of a test cell in accordance with an embodiment of the present invention;
FIG. 3 is a schematic diagram illustrating the difference between the transmission coefficient t and the amplitude loss coefficient α according to an embodiment of the present invention;
FIG. 4 is a schematic diagram of the present invention using linear fitting to find the insertion loss of a single device;
in the figure: 1-light incidence end, 2-light emergence end and 3-component to be tested.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention is further described in detail below with reference to the accompanying drawings and examples. It should be understood, however, that the description herein of specific embodiments is only intended to illustrate the invention and not to limit the scope of the invention. Moreover, in the following description, descriptions of well-known structures and techniques are omitted so as to not unnecessarily obscure the concepts of the present invention.
The application of the solution of the present invention in the measurement of optical loss of silicon-based crossed waveguides is described in detail below with reference to fig. 1 to 4.
Firstly, constructing a series of micro-ring resonant cavities with the same parameters as shown in figure 1 on a silicon-based chip, and respectively inserting a device group to be tested 3 with n devices to be tested into waveguides of different micro-ring resonant cavities to form a series of test units;
for each test cell, incident spectrum-swept laser light is coupled from the illustrated light-incident end 1, the outgoing light is received by a spectrometer at the light-outgoing end 2, and the spectral characteristics of each test cell are recorded, as shown in fig. 2.
For each test unit, the spectral characteristics measured in the above are needed to extract the transmission coefficient t and the amplitude loss coefficient α of the test unit. Are respectively provided withCalculating the maximum transmittance T of the target waveband in the spectrogrammaxAnd a minimum transmittance TminFull width at half maximum Δ λ at resonance valleyFWHMAnd free spectral range Δ λFSRThen, the overall solution of t and α is calculated using equations (1) to (5):
Figure BDA0003045880170000041
Figure BDA0003045880170000042
Figure BDA0003045880170000043
Figure BDA0003045880170000044
Figure BDA0003045880170000045
distinguishing the transmission coefficient t from the amplitude loss coefficient α: as shown in fig. 3, the number of the devices to be tested is taken as the abscissa, and the t and the α obtained in the above step are plotted into a line; in different test units constructed, the transmission coefficient t of the test unit is not changed theoretically, and the amplitude loss coefficient alpha is reduced along with the increase of the number of the inserted devices to be tested, so that the solid line is the amplitude loss coefficient alpha, and the dotted line is the transmission coefficient t in fig. 3;
calculate the insertion loss of the individual devices: firstly, calculating the loss decibel value loss (dB) — 20log of each test unit10(α), a scatter diagram with the number of devices to be measured as the abscissa and the loss as the ordinate as shown in fig. 4 is made, the scatter diagrams are subjected to linear fitting, and the slope k of the fitting straight line is calculated, that is, the insertion loss of the single crossed waveguide to be measured.
The above description is only for the purpose of illustrating the preferred embodiments of the present invention and is not to be construed as limiting the invention, and any modifications, equivalents or improvements made within the spirit and principle of the present invention should be included in the scope of the present invention.

Claims (7)

1. An optical device loss measurement method based on an intercept method and a micro-ring resonant cavity is characterized by comprising the following steps:
s1, constructing a test unit: constructing a series of micro-ring resonant cavities with the same parameters on an optical chip, and respectively inserting the device to be tested with n devices to be tested into waveguides of different micro-ring resonant cavities to form a series of test units; each test unit comprises a light incidence end and a light emergent end; the n is a natural number;
s2, measuring spectral characteristics: for each test unit, coupling incident spectrum-sweeping laser from a light incident end, receiving emergent light at a light emergent end, and recording the spectral characteristics of the test unit;
s3, calculating the loss of each to-be-tested group: for each test cell, extracting the transmission coefficient t and the amplitude loss coefficient alpha of each test cell by using the spectral characteristics obtained in S2;
s4, calculating the loss of a single device to be tested: decibel value loss (db) — 20log for each test unit loss10And (alpha) performing linear fitting, wherein the slope of the fitting straight line is the insertion loss of the single device to be tested.
2. The method for measuring the loss of an optical device based on an intercept method and a micro-ring resonator as claimed in claim 1, wherein: in step S1, the number of test units can be flexibly adjusted according to the chip area.
3. The method for measuring the loss of an optical device based on an intercept method and a micro-ring resonator as claimed in claim 1, wherein: in step S1, n of each test unit is different from each other.
4. The method for measuring the loss of an optical device based on an intercept method and a micro-ring resonator as claimed in claim 1, wherein: in step S2, the outgoing light is received at the light outgoing end using an optical power meter or a spectrometer.
5. The method for measuring the loss of an optical device based on the intercept method and the micro-ring resonator as claimed in claim 1, wherein the step S3 comprises the following sub-steps:
s31, calculating the maximum transmittance T of the target wave band according to the spectral characteristicsmaxAnd a minimum transmittance TminFull width at half maximum Δ λ at resonance valleyFWHMAnd free spectral range Δ λFSR；
S32, calculating the transmission coefficient t and the amplitude loss coefficient alpha of each test unit;
and S33, distinguishing the transmission coefficient t and the amplitude loss coefficient alpha of each test unit by a point tracing method, and taking the number of the devices to be tested as an abscissa, and forming a line by the t and the alpha points obtained in the step S32, thereby calculating the loss of the devices to be tested.
6. The method for measuring the loss of an optical device based on an intercept method and a micro-ring resonator as claimed in claim 5, wherein: the calculation formula in step S32 is as follows:
Figure FDA0003045880160000021
Figure FDA0003045880160000022
Figure FDA0003045880160000023
Figure FDA0003045880160000024
Figure FDA0003045880160000025
7. the method for measuring the loss of an optical device based on the intercept method and the micro-ring resonator of claim 6, wherein the linear fitting in the step S4 comprises the following operations: and taking scatter diagrams with the number of the devices to be tested as the abscissa and the loss as the ordinate, and then performing linear fitting on the scatter diagrams.
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