CN113203511A - Six-dimensional force sensor with double cross beam structure - Google Patents

Six-dimensional force sensor with double cross beam structure Download PDF

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Publication number
CN113203511A
CN113203511A CN202110484008.XA CN202110484008A CN113203511A CN 113203511 A CN113203511 A CN 113203511A CN 202110484008 A CN202110484008 A CN 202110484008A CN 113203511 A CN113203511 A CN 113203511A
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layer
measuring
beams
measuring single
fixed frame
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CN113203511B (en
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赵金海
黄浩
李向征
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China Academy of Aerospace Aerodynamics CAAA
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China Academy of Aerospace Aerodynamics CAAA
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L5/00Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
    • G01L5/16Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force
    • G01L5/161Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force using variations in ohmic resistance
    • G01L5/1627Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force using variations in ohmic resistance of strain gauges

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  • General Physics & Mathematics (AREA)
  • Force Measurement Appropriate To Specific Purposes (AREA)

Abstract

The invention provides a double-cross beam structure six-dimensional force sensor, which adopts two layers of orthogonally arranged measuring beams, designs a flexible beam between the measuring beams and a fixed frame, and transmits force between the two layers of measuring beams through a middle force transmission beam, thereby avoiding interference of friction force caused by crosstalk and slippage of two layers of structures, effectively reducing interference among components and obviously improving measuring precision; all strain gauge leads on this sensor make up into measuring circuit according to circuit design serial number on the terminal strip of terminal box, have effectively improved paster workman's bridging time, have increaseed production efficiency.

Description

Six-dimensional force sensor with double cross beam structure
Technical Field
A six-dimensional force sensor with a double cross beam structure is mainly used in scenes such as a wrist joint of a robot, an active constant force device, a cooperative robot integrated joint and the like, and serves as a force feedback element to realize force sense perception of the robot and an execution mechanism of the robot. The method can also be applied to the fields of wind tunnel tests, structural member mechanics detection and the like.
Background
A multi-dimensional force sensor refers to a class of force sensors that are capable of measuring force or moment components in two directions and above simultaneously. The six-dimensional force sensor is the most complete form of the multi-dimensional force sensor and can simultaneously detect all force information of a three-dimensional space, namely three force components and three moment components, so that the six-dimensional force sensor is also one of the most widely used force sensors.
In recent years, six-dimensional force sensors are applied to many industries, such as the fields of mechanical manufacturing, aerospace, transportation, medicine and the like, and particularly play an important role in the field of robots. Nowadays, an intelligent robot has become a main trend of development in the robot field, and a sensor is a key component for the robot to sense the external environment and is in a very important position in an intelligent robot system. The six-dimensional force sensor is used as a sensor for measuring force and moment when the robot interacts with an operation object, provides necessary force sensing information for force control and motion control of the robot, and plays a key role in completing complex' fine operation tasks, realizing flexibility and intelligent operation on the robot.
Research work on six-dimensional force sensors is carried out earlier in the United states, Europe, Japan and the like, and abundant technical capability and application experience are accumulated. Besides industrial mature products, the six-dimensional force sensor for the space manipulator and the deep sea manipulator is also successfully developed and is applied on site. However, in the key national defense fields, foreign countries always implement strict technical blockade and purchase limitation on China, at present, China already develops a six-dimensional force sensor for industrial robots and gradually forms a series of products, but the defects of poor measurement precision, low production efficiency and difficult maintenance exist, and commonly used sensors with three-beam and four-beam structures are large in structural coupling and large in crosstalk, so that the precision is low; the double-layer sensor with the sliding structure can be decoupled structurally, but when the elements slide, friction force can cause certain interference and is nonlinear.
Disclosure of Invention
The invention aims to overcome the defects and provides the double-cross beam structure six-dimensional force sensor, two layers of orthogonal measuring beams and flexible beams are adopted, so that the interference among all components is effectively reduced, and the measuring precision is obviously improved; all strain gauge leads on this sensor make up into measuring circuit according to circuit design serial number on the terminal strip of terminal box, have effectively improved paster workman's bridging time, have increaseed production efficiency.
In order to achieve the above purpose, the invention provides the following technical scheme:
a six-dimensional force sensor with a double cross beam structure comprises a body;
the body comprises a first layer of fixed frame, a second layer of fixed frame, a first layer of measuring beam, a first layer of flexible beam, a middle force transmission beam, a second layer of measuring beam and a second layer of flexible beam; the first layer of fixed frame and the second layer of fixed frame are annular structures;
the first layer of measuring beam is connected with the first layer of fixed frame through the first layer of flexible beam; the second layer of measuring beam is connected with the second layer of fixed frame through the second layer of flexible beam;
the middle force transfer beam is connected with the first layer of measuring beam and the second layer of measuring beam and penetrates through the circle centers of the first layer of fixing frame and the second layer of fixing frame.
Furthermore, the first layer of measuring beams comprise four first layer of measuring single beams which are arranged in a cross manner, one ends of the four first layer of measuring single beams are intersected at the first end of the middle force transmission beam, and the other ends of the four first layer of measuring single beams are connected with the first layer of fixing frame through four first layer of flexible beams; the second layer of measuring beam comprises four second layer measuring single beams which are arranged in a cross shape, one ends of the four second layer measuring single beams are intersected at the second end of the middle force transmission beam, and the other ends of the four second layer measuring single beams are connected with the second layer of fixing frame through four second layer flexible beams.
Further, defining an origin O as an intersection point of the four second-layer measuring single beams, pointing the second-layer fixing frame to the center of a circle of the first-layer fixing frame in the X-axis direction, pointing the origin O to a connecting point of one second-layer measuring single beam and the second-layer fixing frame through the second-layer flexible beam in the Y-axis direction, and determining the Z-axis direction according to a right-hand rule;
the first layer of measuring single beams are provided with first slotted holes, and each first layer of measuring single beam is divided into two single beams in the X direction by the first slotted holes;
the second layer of measuring single beam is provided with a second slotted hole, the second slotted hole divides the second layer of measuring single beam arranged along the Y-axis direction into two single beams in the Z direction, and divides the second layer of measuring single beam arranged along the Z-axis direction into two single beams in the Y direction.
Further, defining an origin O as an intersection point of the four second-layer measuring single beams, pointing the second-layer fixing frame to the center of a circle of the first-layer fixing frame in the X-axis direction, pointing the origin O to a connecting point of one second-layer measuring single beam and the second-layer fixing frame through the second-layer flexible beam in the Y-axis direction, and determining the Y-axis direction according to a right-hand rule;
the distance between the first layer of flexible beam and first layer of measuring single beam connection point A and the distance between the first layer of flexible beam and first layer of fixed frame connection point B are equal to the size of the first layer of measuring single beam in the X direction;
and the distance between the connecting point C of the second layer of flexible beam and the second layer of measuring single beam and the connecting point D of the second layer of flexible beam and the second layer of fixing frame is equal to the size of the second layer of measuring single beam in the Y direction or the Z direction.
Furthermore, the size of the connecting part of each first layer flexible beam and the first layer fixed frame in the direction perpendicular to the arrangement direction of each first layer measuring single beam is larger than the size of the connecting part of each first layer measuring single beam in the direction perpendicular to the arrangement direction, and the connecting parts are symmetrical about the central line of the first layer measuring single beams;
the size of the connecting part of each second layer flexible beam and the second layer fixed frame in the direction perpendicular to the arrangement direction of each second layer measuring single beam is larger than the size of the connecting part of each second layer measuring single beam in the direction perpendicular to the arrangement direction of the second layer measuring single beams, and the connecting parts are symmetrical about the central line of the second layer measuring single beams.
Further, six-dimensional force sensor still includes casing and end cover, casing and end cover are fixed in the outside of installing in the fixed frame of first layer and the fixed frame of second layer through welded mode.
Further, the shell comprises a cylindrical shell, one end of the shell is fixedly connected with the second layer of fixed frame, and a gap is formed between the other end of the shell and the first layer of fixed frame;
the mounting groove is arranged on the annular end face of the second-layer fixing frame and the annular end face of the first-layer fixing frame, and the end cover is fixed on the second-layer fixing frame and the first-layer fixing frame after being matched with the mounting groove.
Furthermore, strain gauges for measuring Fx are arranged on the four first-layer measuring single beams; strain gauges for measuring My are arranged on the 1# first-layer measuring single beam and the 3# first-layer measuring single beam in the four first-layer measuring single beams, and strain gauges for measuring Mz are arranged on the 2# first-layer measuring single beam and the 4# first-layer measuring single beam;
the position of the strain gauge for measuring Fx is closer to the center of the first layer of fixed frame than the position of the strain gauge for measuring My or the strain gauge for measuring Mz;
the 1# first-layer measuring single beam is perpendicular to the 2# first-layer measuring single beam and the 4# first-layer measuring single beam, and the 3# first-layer measuring single beam is perpendicular to the 2# first-layer measuring single beam and the 4# first-layer measuring single beam;
strain gauges for measuring Mx are arranged on the four second-layer measuring single beams; strain gauges for measuring Fy are arranged on the No. 5 second-layer measuring single beam and the No. 7 second-layer measuring single beam in the four first-layer measuring single beams, and strain gauges for measuring Fz are arranged on the No. 6 second-layer measuring single beam and the No. 8 second-layer measuring single beam;
the position of the strain gauge for measuring Mx is closer to the center of the second layer of fixed frame than the position of the strain gauge for measuring Fy or the position of the strain gauge for measuring Fz;
the No. 5 second-layer measuring single beam is perpendicular to the No. 6 second-layer measuring single beam and the No. 8 second-layer measuring single beam, and the No. 7 second-layer measuring single beam is perpendicular to the No. 6 second-layer measuring single beam in the No. 8 second-layer measuring single beam;
furthermore, the shell also comprises a junction box, a junction box end cover and a cable lock head;
the cable lock head is arranged on the end cover of the wire box and used for fixing the lead of each strain gauge; the wiring terminal and the wiring terminal end cover are arranged outside the shell, a wiring terminal block is fixedly installed in a cavity formed by the wiring terminal and the wiring terminal end cover, and each wiring terminal on the wiring terminal block corresponds to each strain gauge one by one and is identified through a serial number.
Further, the body is an integral processing part, and the distance between the circle centers of the first layer of fixed frame and the second layer of fixed frame is less than 5 mm; the first layer of flexible beam and the second layer of flexible beam are made of metal materials.
Compared with the prior art, the invention has the following beneficial effects:
(1) according to the double-cross beam structure six-dimensional force sensor, two layers of measuring beams are arranged in an orthogonal mode, the flexible beam is designed between the measuring beams and the fixing frame, force is transmitted between the two layers of measuring beams through the middle force transmission beam, interference of friction force caused by crosstalk and sliding of the two layers of structures is avoided, and the measuring accuracy of the sensor is effectively improved;
(2) according to the double-cross beam structure six-dimensional force sensor, the structure and the size of the flexible beam are specially designed, so that the flexible beam is stably deformed when being stressed, and the interference caused by various factors is avoided;
(3) according to the double-cross beam structure six-dimensional force sensor, due to the decoupling structure design, the unit calibration formula can meet the measurement precision requirement, the calibration efficiency is improved, and the production period is greatly shortened relative to other sensors;
(4) according to the double-cross beam structure six-dimensional force sensor, the production efficiency is effectively improved through the wiring method design and the circuit combination process method improvement; the measuring beams, the strain gauges and the wiring terminals are in one-to-one correspondence and are numbered, the wiring is carried out according to the number of the designed circuit, the circuit is combined, and each component is provided with the measuring beams, the strain gauges and the wiring terminals which are numbered correspondingly, so that the measuring circuit is clear in line, and fault diagnosis and maintenance are facilitated.
Drawings
FIG. 1 is a front elevational view, in full section, of a dual cross beam configuration six-dimensional force sensor in accordance with the present invention;
FIG. 2 is a left side view of a dual cross beam configuration six-dimensional force sensor of the present invention;
FIG. 3 is a full sectional view of a front view of a body of a double cross beam structure six-dimensional force sensor according to the present invention;
FIG. 4 is a left side view A of the body of the double-cross beam structure six-dimensional force sensor of the present invention;
FIG. 5 is a left side view B of the body of the double-cross beam structure six-dimensional force sensor according to the present invention;
FIG. 6 is a right side view A of the body of the double-cross beam structure six-dimensional force sensor of the present invention;
FIG. 7 is a right side view B of the body of the double-cross beam structure six-dimensional force sensor according to the present invention;
FIG. 8 is a cross-sectional view taken along line A-A of FIG. 6;
FIG. 9 is a left side view of a housing of a dual-cross beam structure six-dimensional force sensor according to the present invention;
fig. 10 is a front view of a housing in a double cross beam structure six-dimensional force sensor according to the present invention.
Detailed Description
The features and advantages of the present invention will become more apparent and appreciated from the following detailed description of the invention.
The word "exemplary" is used exclusively herein to mean "serving as an example, embodiment, or illustration. Any embodiment described herein as "exemplary" is not necessarily to be construed as preferred or advantageous over other embodiments. While the various aspects of the embodiments are presented in drawings, the drawings are not necessarily drawn to scale unless specifically indicated.
A six-dimensional force sensor with a double cross beam structure is characterized by comprising a body 1, wherein the body 1 is a core component of the sensor, and all measurement, force transmission and installation functions are borne by the body 1;
the body 1 comprises a first layer of fixed frame 13, a second layer of fixed frame 17, a first layer of measuring beam 11, a first layer of flexible beam 12, a middle force transfer beam 14, a second layer of measuring beam 15 and a second layer of flexible beam 16; the first layer of fixed frame 13 and the second layer of fixed frame 17 are annular structures;
the first layer measuring beam 11 is connected with a first layer fixing frame 13 through a first layer flexible beam 12; the second layer measuring beam 15 is connected with a second layer fixed frame 17 through a second layer flexible beam 16;
the middle transfer beam 14 is connected with the first layer of measuring beam 11 and the second layer of measuring beam 15 and penetrates through the circle centers of the first layer of fixed frame 13 and the second layer of fixed frame 17.
Further, the first layer measuring beam 11 comprises four first layer measuring single beams which are arranged in a cross shape, one ends of the four first layer measuring single beams are intersected at the first end of the middle force transmission beam 14, and the other ends of the four first layer measuring single beams are connected with the first layer fixing frame 13 through four first layer flexible beams 12; the second layer measuring beam 15 comprises four second layer measuring single beams which are arranged in a cross shape, one end of each of the four second layer measuring single beams is intersected at the second end of the middle force transfer beam 14, the other end of each of the four second layer measuring single beams is connected with the second layer fixing frame 17 through four second layer flexible beams 16, the double-layer cross beams can effectively avoid interference between measuring components, the four measuring beams are respectively connected with the fixing frame through the four flexible beams, and the four measuring beams are respectively connected with the middle force transfer beam 14.
Further, defining an origin O as an intersection point of four second-layer measuring single beams, pointing the center of a circle of the first-layer fixed frame 13 from the second-layer fixed frame 17 in the X-axis direction, pointing a certain second-layer measuring single beam from the origin O in the Y-axis direction through a connection point of the second-layer flexible beam and the second-layer fixed frame 17, and determining the Z-axis direction according to a right-hand rule;
the first layer of measuring single beams are provided with first slotted holes, and each first layer of measuring single beam is divided into two single beams in the X direction by the first slotted holes;
the second layer of measuring single beam is provided with a second slotted hole, the second slotted hole divides the second layer of measuring single beam arranged along the Y-axis direction into two single beams in the Z direction, and divides the second layer of measuring single beam arranged along the Z-axis direction into two single beams in the Y direction.
Further, defining an original point O as an intersection point of four second-layer measuring single beams, pointing the center of a circle of the first-layer fixed frame 13 by the second-layer fixed frame 17 in the X-axis direction, pointing a certain second-layer measuring single beam by the original point O in the Y-axis direction through a connection point of the second-layer flexible beam and the second-layer fixed frame 17, and determining the Y-axis direction according to a right-hand rule;
the distance between the connection point A of the first layer of flexible beams 12 and the first layer of measuring single beams and the connection point B of the first layer of flexible beams 12 and the first layer of fixed frames 13 is equal to the size of the first layer of measuring single beams in the X direction;
and the distance between the connection point C of the second layer flexible beam 16 and the second layer single measuring beam and the connection point D of the second layer flexible beam 16 and the second layer fixed frame 17 is equal to the size of the second layer single measuring beam in the Y direction or the Z direction.
Furthermore, the size of the connecting part of each first layer flexible beam 12 and the first layer fixed frame 13 in the direction perpendicular to the arrangement direction of each first layer measuring single beam is larger than that of the first layer measuring single beam in the direction perpendicular to the arrangement direction, and the connecting part is symmetrical about the center line of the first layer measuring single beam;
the size of the connecting part of each second layer flexible beam 16 and the second layer fixing frame 17 in the direction perpendicular to the arrangement direction of each second layer measuring single beam is larger than the size of the second layer measuring single beam in the direction perpendicular to the arrangement direction, the connecting parts are symmetrical about the central line of the second layer measuring single beam, the flexible beams on two sides are enabled to be deformed uniformly due to symmetrical distribution, and interference caused by nonuniform deformation is avoided.
Further, six-dimensional force sensor still includes casing 2 and end cover 3, casing 2 and end cover 3 are fixed in the outside of installing in the fixed frame 13 of first layer and the fixed frame 17 of second layer through the welding mode.
Further, the shell 2 comprises a cylindrical shell 21, one end of the shell 21 is fixedly connected with the second layer of fixed frame 17, and a gap is formed between the other end of the shell 21 and the first layer of fixed frame 13; the gap is less than or equal to 5 mm;
be equipped with the mounting groove on the ring end face of the fixed frame 17 of second floor and the fixed frame 13 of first floor, on the fixed frame 17 of second floor and the fixed frame 13 of first floor were fixed in to the end cover 3 after the mounting groove cooperation, the function of end cover 3 was sealed and protected inside components and parts.
Furthermore, strain gauges for measuring Fx are arranged on the four first-layer measuring single beams; strain gauges for measuring My are arranged on the 1# first-layer measuring single beam and the 3# first-layer measuring single beam in the four first-layer measuring single beams, and strain gauges for measuring Mz are arranged on the 2# first-layer measuring single beam and the 4# first-layer measuring single beam;
the position of the strain gauge for measuring Fx is closer to the center of the first layer of fixed frame 13 than the position of the strain gauge for measuring My or the strain gauge for measuring Mz;
the 1# first-layer measuring single beam is perpendicular to the 2# first-layer measuring single beam and the 4# first-layer measuring single beam, and the 3# first-layer measuring single beam is perpendicular to the 2# first-layer measuring single beam and the 4# first-layer measuring single beam;
strain gauges for measuring Mx are arranged on the four second-layer measuring single beams; strain gauges for measuring Fy are arranged on the No. 5 second-layer measuring single beam and the No. 7 second-layer measuring single beam in the four first-layer measuring single beams, and strain gauges for measuring Fz are arranged on the No. 6 second-layer measuring single beam and the No. 8 second-layer measuring single beam;
the position of the strain gauge for measuring Mx is closer to the center of the second layer of fixed frame 17 than the position of the strain gauge for measuring Fy or the position of the strain gauge for measuring Fz;
the No. 5 second-layer measuring single beam is perpendicular to the No. 6 second-layer measuring single beam and the No. 8 second-layer measuring single beam, and the No. 7 second-layer measuring single beam is perpendicular to the No. 6 second-layer measuring single beam in the No. 8 second-layer measuring single beam;
further, the housing 2 further comprises a junction box 22, a junction box end cover 23 and a cable lock head 24; the shell 2 plays a role in sealing and protecting internal components and is used for installing a wiring terminal;
the cable lock head 24 is arranged on the wire box end cover 23 and used for fixing the lead of each strain gauge; the junction box 22 and the junction box end cover 23 are arranged outside the shell 21, a junction terminal row is fixedly installed in a cavity formed by the junction box 22 and the junction box end cover 23, each terminal on the junction terminal row corresponds to each strain gauge one by one and is identified through a serial number, the strain gauges on the measuring beams are numbered according to the corresponding beams, the wiring terminals are also numbered, leads of the strain gauges are welded on the junction terminals with designed serial numbers according to circuit diagrams, and all circuit combinations are completed on the junction terminals.
Further, the body 1 is an integral processing part, and the distance between the circle centers of the first layer of fixed frame 13 and the second layer of fixed frame 17 is less than 5 mm.
Example 1
As shown in fig. 1, 2, 3 and 8, the six-dimensional force sensor with the double cross beam structure comprises a body 1, a shell 2 and an end cover 3.
The body 1 and the shell 2 are welded into a whole at the second layer of fixed frame 17 by laser welding, the positioning reference is a positioning step 172 of the lower layer of fixed frame 17, a gap is reserved between the shell 2 and the step 132 of the first layer of fixed frame 13, and the gap is sealed by flexible waterproof sealant, so that the waterproof and dustproof performances of the sensor are ensured; the end caps 3 are welded to the first-layer end cap mounting groove 133 of the first-layer fixing frame 13 and the second-layer end cap mounting groove 173 of the second-layer fixing frame 17, respectively. The end surfaces 131 and 171 are designed with pin holes for positioning and screw holes for mounting, for connecting with external components.
As shown in fig. 3, the body 1 is a one-piece machined part, and includes a first layer of the measuring beam 11, a first layer of the flexible beam 12, a first layer of the fixing frame 13, a middle transfer beam 14, a second layer of the measuring beam 15, a second layer of the flexible beam 16, and a second layer of the fixing frame 17. The first layer of measuring beam 11 and the second layer of measuring beam 15 are arranged in an orthogonal mode, and the first layer of flexible beam 12 and the second layer of flexible beam 16 are arranged in an orthogonal mode, so that interference among measuring components can be effectively avoided.
As shown in fig. 3, 4 and 5, the first-layer measuring beam 11 is composed of a 1# measuring beam 111, a 2# measuring beam 112, a 3# measuring beam 113 and a 4# measuring beam 114 which are uniformly distributed around the axis of the body 1 (i.e., a straight line passing through the center of the first-layer fixing frame 13 and the center of the second-layer fixing frame 17 at the same time), and each measuring beam is provided with a square groove hole (a 1 st groove hole) to divide the measuring beam into two pieces in the axial direction. The first layer of flexible beams 12 is composed of 1# flexible beams 121, 2# flexible beams 122, 3# flexible beams 123 and 4# flexible beams 124 which are uniformly distributed around the axis of the body 1. The measuring beams corresponding to the serial numbers are connected with the flexible beams, the four flexible beams are respectively connected with the first layer of fixed frames 13, and the four measuring beams are respectively connected with the middle force transfer beam 14.
As shown in fig. 3, 6 and 7, the second layer measuring beam 15 is composed of a 5# measuring beam 151, a 6# measuring beam 152, a 7# measuring beam 153 and a 8# measuring beam 154 which are uniformly distributed around the axis of the body 1, each measuring beam is provided with a square slot (second slot) to divide the measuring beam into a left piece and a right piece as shown in fig. 6 and 7. The second layer of flexible beams 16 is composed of 5# flexible beams 161, 6# flexible beams 162, 7# flexible beams 163 and 8# flexible beams 164 which are evenly distributed around the axis of the body 1. The measuring beams corresponding to the serial numbers are connected with the flexible beams, the four flexible beams are respectively connected with the second layer of fixed frame 17, the four measuring beams are respectively connected with the middle force transfer beam 14, and each flexible beam is divided into two parts which are symmetrically distributed on two sides of the corresponding measuring beam.
As shown in fig. 9 and 10, the housing 2 includes a casing 21, a junction box 22, a junction box end cover 23, and a cable lock head 24. The wiring terminal row is arranged in the junction box 22 in the shell 2, the strain gauges on the measuring beams are numbered according to corresponding beams, the wiring terminals are also numbered, the lead wires of the strain gauges are welded on the wiring terminals with designed numbers according to circuit diagrams, and all circuit combinations are completely completed on the wiring terminals.
Taking the axis of the sensor shown in the figure 1 as an X axis and a left direction as a positive direction, establishing a coordinate system according to a right-hand rule, specifically, defining an original point O as an intersection point of four second-layer measuring single beams, pointing the X axis direction to the center of a circle of a first-layer fixed frame 13 from a second-layer fixed frame 17, pointing the Y axis direction to a connecting point of a certain second-layer measuring single beam and the second-layer fixed frame 17 through the original point O, and determining the Z axis direction according to the right-hand rule;
the force and moment components on the various coordinate axes are defined as: fx, Fy, Fz, Mx, My, Mz.
One ends of the 1# measuring beam 111, the 2# measuring beam 112, the 3# measuring beam 113 and the 4# measuring beam 114, which are close to the circle center, are adhered with strain gauges for measuring Fx; strain gauges are pasted on one ends, far away from the circle center, of the 1# measuring beam 111 and the 3# measuring beam 113, and are used for measuring My; and strain gauges are adhered to the ends, away from the center of a circle, of the 2# measuring beam 112 and the 4# measuring beam 114 for measuring Mz.
Strain gauges are pasted at one ends, close to the circle center, of the 5# measuring beam 151, the 6# measuring beam 152, the 7# measuring beam 153 and the 8# measuring beam 154 and used for measuring Mx; strain gauges are adhered to one ends, far away from the circle center, of the 5# measuring beam 151 and the 7# measuring beam 153 and used for measuring Fy; and strain gauges are adhered to the ends, away from the center of a circle, of the 6# measuring beam 152 and the 8# measuring beam 154 for measuring Fz.
The sensor is calibrated by using a unit calibration method to form a use formula, and 15 groups of loads are used for carrying out comprehensive precision check and checking the measurement accuracy index of the sensor.
The invention has been described in detail with reference to specific embodiments and illustrative examples, but the description is not intended to be construed in a limiting sense. Those skilled in the art will appreciate that various equivalent substitutions, modifications or improvements may be made to the technical solution of the present invention and its embodiments without departing from the spirit and scope of the present invention, which fall within the scope of the present invention. The scope of the invention is defined by the appended claims.
Those skilled in the art will appreciate that those matters not described in detail in the present specification are well known in the art.

Claims (10)

1. A six-dimensional force sensor with a double cross beam structure is characterized by comprising a body (1);
the body (1) comprises a first layer of fixed frame (13), a second layer of fixed frame (17), a first layer of measuring beam (11), a first layer of flexible beam (12), a middle force transfer beam (14), a second layer of measuring beam (15) and a second layer of flexible beam (16); the first layer of fixed frame (13) and the second layer of fixed frame (17) are of annular structures;
the first layer of measuring beam (11) is connected with the first layer of fixed frame (13) through the first layer of flexible beam (12);
the second layer of measuring beam (15) is connected with the second layer of fixed frame (17) through the second layer of flexible beam (16);
the middle force transfer beam (14) is connected with the first layer of measuring beam (11) and the second layer of measuring beam (15) and penetrates through the circle centers of the first layer of fixed frame (13) and the second layer of fixed frame (17).
2. The double-cross beam structure six-dimensional force sensor as claimed in claim 1, wherein the first layer of measuring beams (11) comprises four first layer measuring single beams arranged in a cross shape, one end of each of the four first layer measuring single beams intersects with a first end of a middle force transmission beam (14), and the other end of each of the four first layer measuring single beams is connected with a first layer of fixing frame (13) through four first layer flexible beams (12); the second layer of measuring beams (15) comprise four second layer measuring single beams which are arranged in a cross shape, one ends of the four second layer measuring single beams are intersected at the second end of the middle force transmission beam (14), and the other ends of the four second layer measuring single beams are connected with a second layer of fixing frame (17) through four second layer flexible beams (16).
3. The six-dimensional force sensor with a double cross beam structure as claimed in claim 2, wherein an origin O is defined as an intersection point of four second-layer measuring single beams, the X-axis direction is directed from the second-layer fixed frame (17) to the center of the first-layer fixed frame (13), the Y-axis direction is directed from the origin O to a connecting point of a certain second-layer measuring single beam with the second-layer fixed frame (17) through the second-layer flexible beam, and the Z-axis direction is determined according to the right-hand rule;
the first layer of measuring single beams are provided with first slotted holes, and each first layer of measuring single beam is divided into two single beams in the X direction by the first slotted holes;
the second layer of measuring single beam is provided with a second slotted hole, the second slotted hole divides the second layer of measuring single beam arranged along the Y-axis direction into two single beams in the Z direction, and divides the second layer of measuring single beam arranged along the Z-axis direction into two single beams in the Y direction.
4. A dual cross beam structure six-dimensional force sensor according to claim 2,
defining an origin O as an intersection point of four second-layer measuring single beams, pointing a second-layer fixing frame (17) to the center of a circle of a first-layer fixing frame (13) in the X-axis direction, pointing a certain second-layer measuring single beam to a connection point of a second-layer flexible beam and the second-layer fixing frame (17) in the Y-axis direction by the origin O, and determining the Y-axis direction according to a right-hand rule;
the distance between the connection point A of the first layer of flexible beams (12) and the first layer of measuring single beams and the connection point B of the first layer of flexible beams (12) and the first layer of fixed frame (13) is equal to the size of the first layer of measuring single beams in the X direction;
and the distance between the connecting point C of the second layer of flexible beam (16) and the second layer of measuring single beam and the connecting point D of the second layer of flexible beam (16) and the second layer of fixing frame (17) is equal to the size of the second layer of measuring single beam in the Y direction or the Z direction.
5. A dual cross beam structure six-dimensional force sensor according to claim 2,
the size of the connecting part of each first layer flexible beam (12) and the first layer fixed frame (13) in the direction vertical to the arrangement direction of each first layer measuring single beam is larger than that of the first layer measuring single beam in the direction vertical to the arrangement direction, and the connecting parts are symmetrical about the central line of the first layer measuring single beam;
the size of the connecting part of each second layer flexible beam (16) and the second layer fixed frame (17) in the direction perpendicular to the arrangement direction of each second layer measuring single beam is larger than that of the second layer measuring single beam in the direction perpendicular to the arrangement direction, and the connecting part is symmetrical about the central line of the second layer measuring single beam.
6. The double-cross beam structure six-dimensional force sensor as claimed in claim 1, wherein the six-dimensional force sensor further comprises a shell (2) and an end cover (3), and the shell (2) and the end cover (3) are fixedly mounted on the outer sides of the first layer of fixed frame (13) and the second layer of fixed frame (17) through welding.
7. The double cross beam structure six-dimensional force sensor according to claim 6, characterized in that the housing (2) comprises a cylindrical shell (21), one end of the shell (21) is fixedly connected with the second layer of fixed frame (17), and the other end is provided with a gap with the first layer of fixed frame (13);
the mounting groove is formed in the annular end face of the second-layer fixing frame (17) and the annular end face of the first-layer fixing frame (13), and the end cover (3) is fixed to the second-layer fixing frame (17) and the first-layer fixing frame (13) after being matched with the mounting groove.
8. The double-cross beam structure six-dimensional force sensor as claimed in claim 2, wherein four first-layer measuring single beams are provided with strain gauges for measuring Fx; strain gauges for measuring My are arranged on the 1# first-layer measuring single beam and the 3# first-layer measuring single beam in the four first-layer measuring single beams, and strain gauges for measuring Mz are arranged on the 2# first-layer measuring single beam and the 4# first-layer measuring single beam;
the position of the strain gauge for measuring Fx is closer to the center of the first layer of fixed frame (13) than the position of the strain gauge for measuring My or the strain gauge for measuring Mz;
the 1# first-layer measuring single beam is perpendicular to the 2# first-layer measuring single beam and the 4# first-layer measuring single beam, and the 3# first-layer measuring single beam is perpendicular to the 2# first-layer measuring single beam and the 4# first-layer measuring single beam;
strain gauges for measuring Mx are arranged on the four second-layer measuring single beams; strain gauges for measuring Fy are arranged on the No. 5 second-layer measuring single beam and the No. 7 second-layer measuring single beam in the four first-layer measuring single beams, and strain gauges for measuring Fz are arranged on the No. 6 second-layer measuring single beam and the No. 8 second-layer measuring single beam;
the position of the strain gauge for measuring Mx is closer to the center of the second layer of fixed frame (17) than the position of the strain gauge for measuring Fy or the position of the strain gauge for measuring Fz;
the No. 5 second layer measuring single beam is perpendicular to the No. 6 second layer measuring single beam and the No. 8 second layer measuring single beam, and the No. 7 second layer measuring single beam is perpendicular to the No. 6 second layer measuring single beam in the No. 8 second layer measuring single beam.
9. A double cross beam structure six-dimensional force sensor according to claim 7, characterized in that the housing (2) further comprises a junction box (22), a junction box end cover (23) and a cable lock head (24);
the cable lock head (24) is arranged on the wire box end cover (23) and used for fixing the lead of each strain gauge; the wiring terminal (22) and the wiring terminal end cover (23) are arranged outside the shell (21), a wiring terminal row is fixedly installed in a cavity formed by the wiring terminal (22) and the wiring terminal end cover (23), and each wiring terminal on the wiring terminal row corresponds to each strain gauge one by one and is identified through a serial number.
10. The double cross beam structure six-dimensional force sensor according to claim 1, characterized in that the body (1) is an integral machined part, the distance between the centers of the first layer of fixed frame (13) and the second layer of fixed frame (17) is less than 5 mm; the first layer of flexible beam (12) and the second layer of flexible beam (16) are made of metal materials.
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