CN113203503A - Touch sensor, sliding sensor, working methods of touch sensor and sliding sensor, and double integrated sensors - Google Patents
Touch sensor, sliding sensor, working methods of touch sensor and sliding sensor, and double integrated sensors Download PDFInfo
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- CN113203503A CN113203503A CN202110385005.0A CN202110385005A CN113203503A CN 113203503 A CN113203503 A CN 113203503A CN 202110385005 A CN202110385005 A CN 202110385005A CN 113203503 A CN113203503 A CN 113203503A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B27/00—Layered products comprising a layer of synthetic resin
- B32B27/06—Layered products comprising a layer of synthetic resin as the main or only constituent of a layer, which is next to another layer of the same or of a different material
- B32B27/08—Layered products comprising a layer of synthetic resin as the main or only constituent of a layer, which is next to another layer of the same or of a different material of synthetic resin
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B27/00—Layered products comprising a layer of synthetic resin
- B32B27/30—Layered products comprising a layer of synthetic resin comprising vinyl (co)polymers; comprising acrylic (co)polymers
- B32B27/308—Layered products comprising a layer of synthetic resin comprising vinyl (co)polymers; comprising acrylic (co)polymers comprising acrylic (co)polymers
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B33/00—Layered products characterised by particular properties or particular surface features, e.g. particular surface coatings; Layered products designed for particular purposes not covered by another single class
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P13/00—Indicating or recording presence, absence, or direction, of movement
- G01P13/02—Indicating direction only, e.g. by weather vane
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Force Measurement Appropriate To Specific Purposes (AREA)
Abstract
The application discloses touch sensor, smooth sense sensor and working method, two integrated sensor thereof, the design essential lies in, includes: a first layer: a polymethyl methacrylate plate; a second layer of copper, which has the functions of both an electrode and a friction layer; and a third layer: a polydimethylsiloxane friction layer; a fourth layer: a copper layer; and a fifth layer: a polymethyl methacrylate plate; a spring; the lower surface of the first layer is electroplated with a second layer; the upper surface of the fifth layer is electroplated with a fourth layer, and the upper surface of the fourth layer is coated with a third layer; the first layer and the fifth layer are connected together through a spring; under the initial condition, an air gap is formed between the second layer and the third layer, so that the second layer and the third layer can restore the deformation after contacting. The application aims to provide a touch sensor, a sliding sensor, a working method of the sliding sensor and a double-integrated sensor, which can provide control assistance for a transfer robot.
Description
Technical Field
The present disclosure relates to the field of sensors, and more particularly, to a tactile sensor, a sliding sensor, a method for operating the same, and a dual integrated sensor.
Background
The intellectualization of mechanical equipment (such as flexible wearable equipment, intelligent robots and medical rehabilitation robots) necessarily requires sensor equipment for support, and particularly the demand of touch sensors and slip sensors is increasing.
For a tactile sensor:
prior art 1: CN112284576A of the southwest university of transportation proposes a piezoelectric type flexible pressure sensor made of all-organic materials and a preparation method thereof, the sensor comprises an organic electrode fiber film and an organic piezoelectric fiber film, and the organic electrode fiber film and the organic piezoelectric fiber film are bonded through hot-melt non-woven fabrics to form an organic electrode fiber film-hot-melt non-woven fabrics-organic piezoelectric fiber film-hot-melt non-woven fabrics-organic electrode fiber film structure.
Prior art 2: CN112229553A proposes a flexible tactile sensor based on light attenuation, an array and a preparation method thereof, the flexible tactile sensor includes: the flexible dome is adhered to the surface of the soft object through the flexible optical fiber coupler, one ends of the first optical fiber and the second optical fiber are aligned to the flexible dome, the other ends of the first optical fiber and the second optical fiber are respectively connected with the laser light source and the photoelectric sensor, laser generated by the laser light source sequentially passes through the first optical fiber transmission, the flexible dome reflection and the second optical fiber transmission and then reaches the photoelectric sensor, the photoelectric sensor is used for calculating the light intensity of the received laser, and the light intensity is determined by the force borne on the surface of the soft object.
As described above, both of the above-described tactile sensors are developed for specific devices to be used, and are not suitable for a tactile sensor required for a transfer robot (particularly, a pole holding robot).
For a slip sensor:
prior art 3: china academy of sciences Chongqing Green Intelligence technology research institute has proposed a touch/slippery sensation sensor and its preparation method, electronic equipment, Braille identification equipment, robot at CN110031135A, it includes two electrode layers that set up relatively, and lie in the dielectric layer between two electrode layers, there is a micro-nano structure on one side corresponding to the dielectric layer on at least one electrode layer among them, and the dielectric layer forms the conformal integrative structure of dielectric layer/electrode with the conformal integration of electrode layer with the micro-nano structure, thus has improved the integration level and stability during the period, and because adopt the graphene nanometer wall with micro-nano structure on the electrode layer, thus has improved sensitivity and measuring range of the sensor.
However, the above-mentioned slide sensor cannot effectively sense the direction and magnitude of the slide.
Disclosure of Invention
The present application is directed to provide a tactile sensor, a sliding sensor, a method for operating the same, and a dual integrated sensor, which address the above-mentioned shortcomings of the prior art.
The technical scheme of the application is as follows:
a tactile sensor, comprising:
a first layer: a polymethyl methacrylate plate;
a second layer of copper, which has the functions of both an electrode and a friction layer;
and a third layer: a polydimethylsiloxane friction layer;
a fourth layer: a copper layer;
and a fifth layer: a polymethyl methacrylate plate;
a spring;
the lower surface of the first layer is electroplated with a second layer;
the upper surface of the fifth layer is electroplated with a fourth layer, and the upper surface of the fourth layer is coated with a third layer;
the first layer and the fifth layer are connected together through a spring;
under the initial condition, an air gap is formed between the second layer and the third layer, so that the second layer and the third layer can restore the deformation after contacting.
Further, the number of the springs is 4 or more.
Further, a fine structure is etched on the upper surface of the third layer.
A slip sensor, comprising:
a first layer: the negative friction electrode is made of a polydimethylsiloxane silica gel sliding module;
a second layer: a positive friction electrode as a sliding displacement vector detection electrode;
the first layer is slidably disposed on the upper side of the second layer.
Further, the second layer includes: the device comprises a base and four groups of electrode groups, wherein 1 group of electrode group is arranged on four positions at the lower part of the base;
each set of electrode sets includes: the first electrode, the second electrode and the third electrode correspond to three levels of slide detection, and the displacement of the slide can be judged according to three graded electric signals.
Further, the bottom of the first layer is bowl-shaped, and the base is also bowl-shaped.
A working method of a slip sensation sensor comprises the following steps: when the first layer deflects and is contacted with or separated from the second layer, a corresponding electric signal is generated.
A working method of a slip sensation sensor comprises the following steps: when sliding occurs, the first layer is firstly contacted with the first electrode of the second layer, and an electric signal is generated; and as the sliding displacement quantity is increased, the first electrode and the third electrode are sequentially contacted to generate corresponding electric signals.
Further, the slip sensation sensor can accurately judge the direction of the slip, wherein E1 represents north, E2 represents east, E3 represents south, and E4 represents west; the northeast direction is represented by E1+ E2, the southeast direction is represented by E1+ E3, the southwest direction is represented by E3+ E4, and the northwest direction is represented by E1+ E4; when the first layer slides in any direction, the corresponding electrode generates a corresponding electric signal.
A touch-slide double integrated sensor comprises a touch sensor and a slide sensor;
a part of the fifth layer of the touch sensor is electroplated with the fourth layer of the touch sensor, and the part of the fifth layer of the touch sensor is not electroplated with the fourth layer of the touch sensor;
the second layer of the tactile sensor is disposed on an area of the fifth layer of the tactile sensor that is not plated with the fourth layer of the tactile sensor.
The beneficial effect of this application lies in:
first, a first innovation of the present application is to provide a tactile sensor; when the third layer 1-3 is in contact with/separated from the second layer 1-2, a corresponding triboelectric signal is thereby generated.
Secondly, a second innovation of the present application is to provide a slip sensor; when the first layer 2-1 deflects and is in contact with or separated from the second layer 2-2 (namely, the positive electrode and the negative electrode are in contact with or separated from each other), a corresponding electric signal is generated; when the sliding occurs, the first layer 2-1 first contacts the first electrode 3-1 and generates an electrical signal; with the increase of the sliding displacement, the second electrode 8-2 and the third electrode 8-3 are sequentially contacted to generate corresponding electric signals. The bottom 2-1 of the first layer is bowl-shaped; the base is also bowl-shaped. The slip sensor 2 can accurately determine the direction in which the slip occurs, as shown in fig. 4, north is denoted by E1, east is denoted by E2, south is denoted by E3, and west is denoted by E4. The northeast direction is denoted by E1+ E2, the southeast direction by E1+ E3, the southwest direction by E3+ E4, and the northwest direction by E1+ E4. When the first layer 2-1 slides in all directions, the corresponding electrodes generate corresponding electric signals
Third, a third innovation of the present application is to provide a tactile-slippery dual integrated sensor, which solves the problem of how to integrate the two aforementioned sensors together.
Drawings
The present application will be described in further detail with reference to the following examples, which are not intended to limit the scope of the present application.
FIG. 1 is a schematic three-dimensional design of a haptic-slider dual integrated sensor.
Fig. 2 is a cross-sectional view of the structural design of the tactile-slippery dual integrated sensor.
Fig. 3 is a schematic diagram of the operation of the slip sensor.
FIG. 4 is a schematic diagram of an eight-orientation slip sensor.
Detailed Description
As shown in fig. 1-2:
the tactile sensor 1 includes:
first layer 1-1: a polymethyl methacrylate plate;
a second layer 1-2, a copper layer, which functions as both an electrode and a friction layer;
third layer 1-3: a polydimethylsiloxane friction layer;
fourth layer 1-4: a copper layer;
fifth layer 1-5: a polymethyl methacrylate plate;
1-6 of a spring;
the lower surface of the first layer 1-1 is electroplated with a second layer 1-2;
the upper surface of the fifth layer 1-5 is electroplated with a fourth layer 1-4, and the upper surface of the fourth layer 1-4 is coated with a third layer 1-3;
the first layer and the fifth layer are connected together through more than 4 springs 1-6;
under normal conditions, a layer of air gap is arranged between the second layer 1-2 and the third layer 1-3, so that the deformation is recovered after the contact;
in order to improve the signal output strength and increase the friction area at the time of contact, a fine structure is etched on the surface of the third layer 1-3.
The working method of the touch sensor is as follows:
when the third layer 1-3 is in contact with/separated from the second layer 1-2, a corresponding triboelectric signal is thereby generated.
The slip sensation sensor 2 includes:
first layer 2-1: a negative friction electrode (the material of the negative friction electrode adopts a polydimethylsiloxane silica gel sliding module);
second layer 2-2: positive friction electrode (sliding displacement vector detection electrode).
The first layer 2-1 is slidably arranged on the upper side of the second layer 2-2.
Wherein the second layer 2-2 comprises: the device comprises a base and four groups of electrode groups, wherein 1 group of electrode group is arranged on four positions at the lower part of the base;
each set of electrode sets includes: the first electrode 3-1, the second electrode 3-2 and the third electrode 3-3 correspond to three levels of slide detection, and the displacement of the slide can be judged according to three graded electric signals.
The slip sensation sensor 2 operates as follows:
when the first layer 2-1 deflects and is in contact with or separated from the second layer 2-2 (namely, the positive electrode and the negative electrode are in contact with or separated from each other), a corresponding electric signal is generated;
when the sliding occurs, the first layer 2-1 first contacts the first electrode 3-1 and generates an electrical signal; with the increase of the sliding displacement, the second electrode 8-2 and the third electrode 8-3 are sequentially contacted to generate corresponding electric signals.
The bottom 2-1 of the first layer is bowl-shaped; the base is also bowl-shaped.
The slip sensor 2 can accurately determine the direction in which the slip occurs, as shown in fig. 4, north is denoted by E1, east is denoted by E2, south is denoted by E3, and west is denoted by E4. The northeast direction is denoted by E1+ E2, the southeast direction by E1+ E3, the southwest direction by E3+ E4, and the northwest direction by E1+ E4. When the first layer 2-1 slides in all directions, the corresponding electrodes generate corresponding electrical signals.
A touch-slide double integrated sensor comprises a touch sensor 1, a slide sensor 2;
a part of the fifth layers 1-5 of the tactile sensor 1 is plated with the fourth layers 1-4 of the tactile sensor 1, and a part of the fifth layers 1-5 is not plated with the fourth layers 1-4 of the tactile sensor 1;
the second layer 2-2 of the tactile sensor 2 is arranged on the fifth layer 1-5 of the tactile sensor 1 in the area of the fourth layer 1-4 of the tactile sensor 1 that is not plated.
The above-mentioned embodiments are merely preferred embodiments of the present application, which are not intended to limit the present application in any way, and it will be understood by those skilled in the art that various changes and modifications can be made without departing from the spirit and scope of the present application.
Claims (10)
1. A tactile sensor, comprising:
a first layer: a polymethyl methacrylate plate;
a second layer of copper, which has the functions of both an electrode and a friction layer;
and a third layer: a polydimethylsiloxane friction layer;
a fourth layer: a copper layer;
and a fifth layer: a polymethyl methacrylate plate;
a spring;
the lower surface of the first layer is electroplated with a second layer;
the upper surface of the fifth layer is electroplated with a fourth layer, and the upper surface of the fourth layer is coated with a third layer;
the first layer and the fifth layer are connected together through a spring;
under the initial condition, an air gap is formed between the second layer and the third layer, so that the second layer and the third layer can restore the deformation after contacting.
2. A tactile sensor according to claim 1, wherein the number of springs is 4 or more.
3. A tactile sensor according to claim 1, wherein the fine structure is etched on the upper surface of the third layer.
4. A slip sensor, comprising:
a first layer: the negative friction electrode is made of a polydimethylsiloxane silica gel sliding module;
a second layer: a positive friction electrode as a sliding displacement vector detection electrode;
the first layer is slidably disposed on the upper side of the second layer.
5. A tactile sensor according to claim 4, wherein the second layer comprises: the device comprises a base and four groups of electrode groups, wherein 1 group of electrode group is arranged on four positions at the lower part of the base;
each set of electrode sets includes: the first electrode, the second electrode and the third electrode correspond to three levels of slide detection, and the displacement of the slide can be judged according to three graded electric signals.
6. A tactile sensor according to claim 5, wherein the base of the first layer is bowl-shaped and the base is bowl-shaped.
7. A working method of a slip sensation sensor is characterized by comprising the following steps: the slip sensation sensor is the slip sensation sensor according to claim 4; when the first layer deflects and is contacted with or separated from the second layer, a corresponding electric signal is generated.
8. A working method of a slip sensation sensor is characterized by comprising the following steps: the slip sensor is the slip sensor according to claim 5; when sliding occurs, the first layer is firstly contacted with the first electrode of the second layer, and an electric signal is generated; and as the sliding displacement quantity is increased, the first electrode and the third electrode are sequentially contacted to generate corresponding electric signals.
9. The method of operating a slip sensor according to claim 8, wherein: the sliding sense sensor can accurately judge the sliding direction, wherein E1 represents north, E2 represents east, E3 represents south and E4 represents west; the northeast direction is represented by E1+ E2, the southeast direction is represented by E1+ E3, the southwest direction is represented by E3+ E4, and the northwest direction is represented by E1+ E4; when the first layer slides in any direction, the corresponding electrode generates a corresponding electric signal.
10. A haptic-slip dual integrated sensor comprising the haptic sensor of any one of claims 1 to 3, the slip sensor of any one of claims 4 to 6;
a part of the fifth layer of the touch sensor is electroplated with the fourth layer of the touch sensor, and the part of the fifth layer of the touch sensor is not electroplated with the fourth layer of the touch sensor;
the second layer of the tactile sensor is disposed on an area of the fifth layer of the tactile sensor that is not plated with the fourth layer of the tactile sensor.
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| CN202110385005.0A CN113203503B (en) | 2021-04-09 | 2021-04-09 | Touch sensor, sliding sensor, working method of touch sensor and double-integrated sensor |
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| CN202110385005.0A CN113203503B (en) | 2021-04-09 | 2021-04-09 | Touch sensor, sliding sensor, working method of touch sensor and double-integrated sensor |
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| CN113203503B CN113203503B (en) | 2023-06-27 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2022213614A1 (en) * | 2021-04-09 | 2022-10-13 | 苏州大学 | Space-environment-oriented self-powered multi-mode sensing method |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE10334458A1 (en) * | 2003-07-29 | 2005-03-03 | Weiss, Karsten | Spatial force profile measurement unit for tactile gripping devices has slip resistant force transducer array in exchangeable mount |
| CN105865667A (en) * | 2016-05-19 | 2016-08-17 | 北京印刷学院 | Capacitive flexible pressure sensor based on microstructural dielectric layers and preparation method of capacitive flexible pressure sensor |
| CN108036879A (en) * | 2017-12-15 | 2018-05-15 | 广州智能装备研究院有限公司 | A kind of condenser type flexible touch sensation sensor and its manufacture method |
| CN109883584A (en) * | 2017-12-06 | 2019-06-14 | 中国科学院苏州纳米技术与纳米仿生研究所 | Flexible bionic touch sensor based on micro-structure and preparation method thereof |
| CN110031135A (en) * | 2019-05-20 | 2019-07-19 | 中国科学院重庆绿色智能技术研究院 | Tactile/sliding feeling sensor and preparation method thereof, electronic equipment, braille identify equipment, robot |
| CN110601586A (en) * | 2019-09-06 | 2019-12-20 | 华中科技大学 | Friction nanometer power generation sensor based on negative Poisson ratio performance |
| CN111006795A (en) * | 2019-11-11 | 2020-04-14 | 南京航空航天大学 | Triboelectric three-dimensional flexible touch sensor and sensing unit |
| CN112326074A (en) * | 2020-06-17 | 2021-02-05 | 中国科学院深圳先进技术研究院 | Touch sensor, preparation method and intelligent device comprising touch sensor |
-
2021
- 2021-04-09 CN CN202110385005.0A patent/CN113203503B/en active Active
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE10334458A1 (en) * | 2003-07-29 | 2005-03-03 | Weiss, Karsten | Spatial force profile measurement unit for tactile gripping devices has slip resistant force transducer array in exchangeable mount |
| CN105865667A (en) * | 2016-05-19 | 2016-08-17 | 北京印刷学院 | Capacitive flexible pressure sensor based on microstructural dielectric layers and preparation method of capacitive flexible pressure sensor |
| CN109883584A (en) * | 2017-12-06 | 2019-06-14 | 中国科学院苏州纳米技术与纳米仿生研究所 | Flexible bionic touch sensor based on micro-structure and preparation method thereof |
| CN108036879A (en) * | 2017-12-15 | 2018-05-15 | 广州智能装备研究院有限公司 | A kind of condenser type flexible touch sensation sensor and its manufacture method |
| CN110031135A (en) * | 2019-05-20 | 2019-07-19 | 中国科学院重庆绿色智能技术研究院 | Tactile/sliding feeling sensor and preparation method thereof, electronic equipment, braille identify equipment, robot |
| CN110601586A (en) * | 2019-09-06 | 2019-12-20 | 华中科技大学 | Friction nanometer power generation sensor based on negative Poisson ratio performance |
| CN111006795A (en) * | 2019-11-11 | 2020-04-14 | 南京航空航天大学 | Triboelectric three-dimensional flexible touch sensor and sensing unit |
| CN112326074A (en) * | 2020-06-17 | 2021-02-05 | 中国科学院深圳先进技术研究院 | Touch sensor, preparation method and intelligent device comprising touch sensor |
Non-Patent Citations (2)
| Title |
|---|
| 唐蓉城: "工业机器人的感觉传感器", 《机械设计》 * |
| 陈卫东等: "一种新型触滑觉传感器的试验研究", 《压电与声光》 * |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2022213614A1 (en) * | 2021-04-09 | 2022-10-13 | 苏州大学 | Space-environment-oriented self-powered multi-mode sensing method |
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