CN113201711A - Mask frame assembly - Google Patents

Mask frame assembly Download PDF

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Publication number
CN113201711A
CN113201711A CN202110489816.5A CN202110489816A CN113201711A CN 113201711 A CN113201711 A CN 113201711A CN 202110489816 A CN202110489816 A CN 202110489816A CN 113201711 A CN113201711 A CN 113201711A
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China
Prior art keywords
frame body
groove
welding
frame assembly
hole
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Granted
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CN202110489816.5A
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Chinese (zh)
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CN113201711B (en
Inventor
臧公正
李文星
李伟丽
韩冰
张继帅
沈亚南
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Hefei Visionox Technology Co Ltd
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Hefei Visionox Technology Co Ltd
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Priority to CN202110489816.5A priority Critical patent/CN113201711B/en
Publication of CN113201711A publication Critical patent/CN113201711A/en
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Publication of CN113201711B publication Critical patent/CN113201711B/en
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    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/04Coating on selected surface areas, e.g. using masks
    • C23C14/042Coating on selected surface areas, e.g. using masks using masks
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/12Organic material
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24Vacuum evaporation
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/10Deposition of organic active material
    • H10K71/16Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering
    • H10K71/164Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering using vacuum deposition
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/10Deposition of organic active material
    • H10K71/16Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering
    • H10K71/166Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering using selective deposition, e.g. using a mask
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50Manufacturing or production processes characterised by the final manufactured product

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

The embodiment of the invention relates to the technical field of display, and discloses a mask frame assembly which comprises a frame body and at least one pair of grooves positioned on the frame body; at least one pair of weldment for securing the support bar, each pair of weldment located within a pair of grooves and each weldment located within one groove; the two ends of each supporting strip are respectively fixed on the upper surfaces of the pair of welding parts facing the first surface, and when the welding parts are in contact with the bottom surface of the groove, the upper surfaces, close to the first surface, of the supporting strips are lower than the first surface or flush with the first surface; the locking piece extends into the groove and is used for fixing the welding piece at positions with different depths of the groove so as to adjust the height difference between the upper surface of the welding piece facing the first surface and the first surface. The support bars with different thicknesses can be arranged, the evaporation substrate can not be broken, the mask bar utilization rate can be improved, and the production cost is reduced.

Description

Mask frame assembly
Technical Field
The embodiment of the invention relates to the technical field of display, in particular to a mask frame assembly.
Background
The OLED display screen has the excellent characteristics of self-luminous organic electroluminescent diodes, such as high contrast, thin thickness, high reaction speed, flexibility and the like, and is considered as a new application technology of a next-generation flat panel display.
In the evaporation process section in the OLED process, a precision Mask (FMM) is mainly used for controlling organic materials to be deposited on a substrate so as to finish evaporation of each film layer. The precise mask plate comprises a frame body, a support bar and a mask bar, wherein the support bar plays a role in shielding and supporting, and the support bar is fixed on the frame body.
However, the inventor finds that the requirements for the thickness of the supporting bars in different chambers are different, and if the same mask frame assembly is used in different chambers, the thickness of the supporting bars is directly increased to enable the mask bars to protrude, so that fragments of the evaporation substrate are easily caused; if the mask frame assembly is redesigned and modified, the production cost is increased.
Disclosure of Invention
The mask frame assembly provided by the embodiment of the invention can be used for setting support bars with different thicknesses, does not cause fragment of an evaporation substrate, can improve the utilization rate of mask bars and reduces the production cost.
In order to solve the technical problem, an embodiment of the invention provides a mask frame assembly, which comprises a frame body, wherein the frame body comprises a first surface and an evaporation area which penetrates through the thickness of the frame body along a direction perpendicular to the first surface; the evaporation area is formed by a frame body and a first surface, the evaporation area is formed by a first surface and a second surface, the frame body is provided with at least one pair of grooves, two grooves in the same pair of grooves are respectively arranged on two opposite sides of the evaporation area, each groove comprises at least two openings, one opening penetrates through the first surface, the other opening penetrates through the inner side surface of the frame body to form the evaporation area, and the two openings are communicated; at least one pair of weldment, each pair of said weldments being located within a pair of said grooves and each said weldment being located within one of said grooves; the two ends of each support bar are respectively fixed on the upper surfaces, facing the first surfaces, of the pair of welding pieces, and the other opening is used for avoiding the support bars; wherein when the weldment is in contact with the bottom surface of the groove, the upper surface of the support bar near the first surface is lower than or flush with the first surface; the locking piece extends into the groove and is used for fixing the welding piece to positions with different depths of the groove so as to adjust the height difference between the upper surface of the first surface and the first surface of the welding piece.
In addition, the frame body further includes: the outer side surface is far away from the evaporation area; the retaining member is inserted into the frame body from the inner side face or the outer side face of the frame body, and the welding member is abutted against the side wall of the groove.
In addition, the mask frame assembly includes: a first through hole penetrating from the inner side surface or the outer side surface of the frame body and communicated with the groove, wherein an inner thread is arranged on the inner wall of the first through hole; the surface of retaining member is provided with the external screw thread, the retaining member is located in the through-hole, the internal thread with the external screw thread is mutually supported.
In addition, the frame body further comprises a first flow guide hole and a second surface opposite to the first surface; the first flow guide hole penetrates through the first surface and/or the second surface and is communicated with the first through hole.
In addition, the frame body further includes: a second surface opposite the first surface; the locking piece is inserted into the frame body from the second surface of the frame body, and partially extends into the welding piece.
In addition, the welding piece comprises a blind hole, the opening of the blind hole faces the second surface, and an internal thread is arranged on the inner wall of the blind hole; the retaining member surface is provided with the external screw thread, just the internal thread with the external screw thread is mutually supported.
Additionally, the weldment includes: the second through hole penetrates through the second surface of the frame body and is communicated with the groove; the locking member is located in the second through hole.
In addition, the frame body further includes: the outer side surface is far away from the evaporation area; the mask frame assembly further comprises a second flow guide hole, and the second flow guide hole penetrates through the inner side face or the outer side face of the frame body and is communicated with the second through hole.
In addition, the welding piece comprises a flat part and a positioning part which extends out of the flat part and extends towards the second surface; the groove comprises a supporting groove and a positioning groove which penetrates through the bottom surface of the supporting groove and is communicated with the supporting groove, at least part of the positioning part is positioned in the positioning groove, and the flat part is positioned in the supporting groove.
In addition, the mask frame assembly further comprises a gasket, the gasket is located on the bottom surface of the supporting groove, and the flat portion is located on the gasket.
Because the requirements for the thickness of the supporting bars in different cavities are different, if the same mask frame assembly is used in different cavities, the thickness of the supporting bars is directly increased to enable the mask bars to protrude, and fragments of the evaporation plating substrate are easily caused; if the mask frame assembly is redesigned and modified, the production cost is increased. In view of the above, the embodiment of the present invention provides a mask frame assembly, in which a locking member can fix a welding member at different depth positions of a groove to adjust a height difference between an upper surface of the welding member facing a first surface and the first surface of a frame body, so that after the height difference between the upper surface of the welding member facing the first surface and the first surface of the frame body is adjusted, the locking member can set support bars with different thicknesses on the welding member, the support bars can fill up the height difference between the upper surface of the welding member facing the first surface and the first surface of the frame body, and since the groove penetrates through another opening of an inner side surface of the frame body to avoid the support bars, it is possible to avoid the occurrence of substrate fragment deposition due to the protrusion of the mask bars above the support bars caused by the direct increase of the thickness of the support bars, and the mask frame assembly in this embodiment does not need to remove the original mask bars on the frame body, can directly add the support bar of certain thickness after the difference in height of the upper surface of adjustment welding piece orientation first surface and the first surface of frame body for the support bar of addding superposes back together with the support bar originally, fill up the difference in height of welding piece orientation first surface's upper surface and the first surface of frame body, not only can improve the utilization ratio of support bar, need not to revise the design again to the frame body moreover, reduction in production cost.
Drawings
One or more embodiments are illustrated by way of example in the accompanying drawings, which correspond to the figures in which like reference numerals refer to similar elements and which are not to scale unless otherwise specified.
Fig. 1 is a schematic structural view of a mask frame assembly according to a first embodiment of the present invention;
fig. 2 is another structural view of a mask frame assembly according to the first embodiment of the present invention;
FIG. 3 is a schematic cross-sectional view of the mask frame assembly shown in FIG. 1 along the Y-direction according to the first embodiment of the present invention;
FIG. 4 is a schematic cross-sectional view of a spacer being added to the mask frame assembly shown in FIG. 3 according to the first embodiment of the present invention;
FIG. 5 is another schematic cross-sectional view of the mask frame assembly shown in FIG. 1 along the Y-direction according to the first embodiment of the present invention;
FIG. 6 is a schematic cross-sectional view of still another mask frame assembly shown in FIG. 1 along the Y-direction according to the first embodiment of the present invention;
FIG. 7 is an enlarged view of area A shown in FIG. 1, in accordance with the first embodiment of the present invention;
FIG. 8 is a structural view of a mask frame assembly according to a second embodiment of the present invention;
FIG. 9 is an enlarged view of area B shown in FIG. 8, in accordance with the second embodiment of the present invention;
FIG. 10 is another structural view of a mask frame assembly according to a second embodiment of the present invention;
FIG. 11 is an enlarged view of area C shown in FIG. 10 in accordance with the second embodiment of the present invention;
FIG. 12 is a schematic cross-sectional view of a portion of a mask frame assembly shown in FIG. 8 along the X-direction according to a second embodiment of the present invention;
fig. 13 is another schematic cross-sectional view of a portion of a mask frame assembly in the X-direction shown in fig. 8 according to a second embodiment of the present invention.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present invention more apparent, the embodiments of the present invention will be described in detail below with reference to the accompanying drawings. However, it will be appreciated by those of ordinary skill in the art that numerous technical details are set forth in order to provide a better understanding of the present application in various embodiments of the present invention. However, the technical solution claimed in the present application can be implemented without these technical details and various changes and modifications based on the following embodiments.
Because the requirement to support bar thickness is different in the cavity of difference, same mask frame subassembly if want to use in the cavity of difference, directly increase support bar thickness and can make the mask strip protruding, easily lead to the coating by vaporization base plate fragment. For example: if the thickness of the original support bar is 50 micrometers, an additional support bar with the thickness of 50 micrometers can be added to ensure that the overall thickness of the support bar is 100 micrometers, but the depth of a welding groove on the frame body is designed according to the original thickness value (50 micrometers), so that new support bars cannot be welded, or the surfaces of mask bars arranged on the support bars after welding are jacked up and protruded, and the fragments of the evaporation plating substrate are easily caused; if the mask frame assembly is redesigned and modified, for example: replacing the original support bars having a thickness of 50 micrometers with the support bars having a thickness of 100 micrometers results in increased production costs.
In view of the above, a first embodiment of the present invention relates to a mask frame assembly, as shown in fig. 1, the core of the present embodiment is that the mask frame assembly includes a frame body 1, the frame body 1 includes a first surface 10, and an evaporation region 100 penetrating through the frame body 1 along a direction perpendicular to the first surface 10. Optionally, the frame body 1 is square and includes four frame arms, each two of the frame arms are disposed opposite to each other, and an area defined by the middle of the four frame arms is the evaporation area 100.
At least a pair of recess 20 that is located on frame body 1, two recesses 20 in the same pair of recess 20 are located the relative both sides in evaporation coating zone 100 respectively, and every recess 20 includes two at least openings, and an opening runs through first surface 10, and another opening runs through the medial surface that frame body 1 encloses into evaporation coating zone 100, and two openings are linked together.
In practice, the grooves 20 may be provided in a plurality of pairs, and two grooves 20 of each pair of grooves 20 of the plurality of pairs of grooves 20 are respectively fixed to two opposite frame arms.
At least one pair of weldment 2, each pair of weldment 2 being located within a pair of recesses 20 and each weldment 2 being located within one recess 20. The welding members 2 in this embodiment can be separated from the grooves 20 on the frame body 1, and the welding platform for fixing the supporting bars in the related art only designates a certain portion on the frame arm as the welding platform, which belongs to an inseparable portion on the frame arm. In order to prevent the weldment 2 from protruding from the first surface 10 of the frame body 1 after being placed in the groove 20 in the present embodiment, the thickness of each weldment 2 in the direction perpendicular to the first surface 10 needs to be smaller than the groove depth of the groove 20.
Two ends of each support bar are respectively fixed on the upper surfaces of the pair of welding parts 2 facing the first surface 10, and the other opening is used for avoiding the support bars; wherein the upper surface of the support strip facing away from the weldment 2 is lower than the first surface 10 or flush with the first surface 10 when the weldment 2 is in contact with the bottom surface of the recess 20. In this embodiment, when the welding member 2 contacts the bottom surface of the groove 20, the upper surface of the support strip fixed to the welding member 2 away from the welding member 2 is lower than the first surface 10 of the frame body 1 or flush with the first surface 10, and the groove penetrates through another opening of the inner side surface of the frame body to avoid the support strip. Thus, when the welding part 2 contacts with the bottom surface of the groove 20, the supporting bars cannot protrude out of the frame body 1, so that the situation that the mask bars arranged above the supporting bars are protruded to cause fragment of the evaporation substrate is avoided.
And the locking piece 4 extends into the groove 20, and the locking piece 4 is used for fixing the welding piece 2 at different depth positions of the groove 20 so as to adjust the height difference between the upper surface of the welding piece 2 facing the first surface 10 and the first surface 10.
The retaining member 4 of the present embodiment can fix the weldment 2 at different depth positions of the groove 20 to adjust the height difference between the upper surface of the weldment 2 facing the first surface 10 and the first surface 10 of the frame body 1, and thus, after adjusting the height difference between the upper surface of the weldment 2 facing the first surface 10 and the first surface 10 of the frame body 1, the retaining member 4 can provide support strips of different thicknesses on the weldment 2, and the support strips can fill up the height difference between the upper surface of the weldment 2 facing the first surface 10 and the first surface 10 of the frame body 1. Thereby avoid direct increase support bar thickness and make the mask strip that sets up above the support bar protruding, the condition that leads to the coating by vaporization base plate fragment takes place, utilize mask frame subassembly in this embodiment need not to remove the support bar originally on the frame body 1, can directly add the support bar of certain thickness after the adjustment welding 2 is towards the difference in height of the upper surface of first surface 10 and the first surface 10 of frame body 1, make the support bar of addding superpose together with the support bar originally after, fill and level the difference in height of the upper surface of welding 2 orientation first surface 10 and the first surface 10 of frame body 1, not only can improve the utilization ratio of support bar, and need not to revise the design again to frame body 1, and the production cost is reduced.
The implementation details of the mask frame assembly of the present embodiment are described in detail below, and the following description is provided only for the convenience of understanding and is not necessary for implementing the present embodiment.
The frame body 1 in this embodiment further includes: keep away from the lateral surface in coating by vaporization district 100, every frame arm of frame body 1 all includes two sides (medial surface and lateral surface) of relative setting, and wherein, the medial surface is close to coating by vaporization district 100, and coating by vaporization district 100 is kept away from to the lateral surface.
As shown in fig. 1, in the present embodiment, the locking member 4 is inserted into the frame body 1 from the inner side or the outer side of the frame body 1, and the welding member 2 is pressed against the sidewall of the groove 20.
Specifically, the welding member 2 is placed in the groove 20 of the frame body 1, the welding member 2 is designed as a slider that can move along the thickness direction (Z-axis direction) of the frame body 1, and the locking member 4 can be inserted into the frame body 1 from the inner side surface or the outer side surface of the frame body 1, and abuts against the welding member 2 on the side wall of the groove 20.
As shown in fig. 2 and 3, when the position of the welding member 2 in the depth direction of the groove 20 is to be adjusted, the locking member 4 is released, the welding member 2 is moved to a desired position in the thickness direction (Z-axis direction) of the frame body 1 by an external force, and then the locking member 4 is tightened to press the welding member 2 against the sidewall of the groove 20, so as to adjust the height difference between the upper surface of the welding member 2 facing the first surface 10 and the first surface 10 of the frame body 1.
In order to meet the welding requirement of the support bar in the present embodiment, assuming that the thickness of the support bar is d, the height difference L may be greater than or equal to 2 × d when the welding member 2 contacts the bottom surface of the groove 20 (as shown in fig. 2).
In order to prevent the welding part 2 from deforming under the action of welding heat or the tension of the supporting strip, the thickness of the welding part 2 in all directions in the embodiment needs to be more than 5 mm.
In one example, as shown in fig. 2 and 3, an opening extends through the first surface 10 to expose the upper surface of the weldment 2 facing the first surface 10 so that the support bar can be secured to the upper surface of the weldment 2. And another opening runs through the lateral wall that frame body 1 is close to evaporation zone 100, and two openings are linked together, that is to say, frame body 1 is close to evaporation zone 100's lateral wall, and recess 20 is close to evaporation zone 100's lateral wall all by the partial removal in order to dodge the support bar to avoid frame body 1 to be close to evaporation zone 100's lateral wall, or recess 20 is close to evaporation zone 100's lateral wall with the support bar jack-up, lead to the condition of evaporation substrate fragment to take place. For example, as shown in fig. 7, the recess 20 may be shaped in an inverted L-shaped configuration.
Since the support bars are required to be disposed on the upper surface of the welding member 2 facing the first surface 10 in the prior art, the sidewall of the frame body 1 away from the evaporation area 100 may hinder the support bars from being disposed when the support bars are disposed. Therefore, when the support bar is stretched, the welding part 2 needs to be moved first so that the upper surface of the welding part 2 facing the first surface 10 is flush with the first surface 10 of the frame body 1, and then the support bar is stretched, so that the frame body 1 is not obstructed. And can make its upper surface and the first surface 10 parallel and level of frame body 1 through the degree of depth of adjustment weldment 2 in recess 20 after setting up the support bar, just later can set up the mask strip above the support bar in order to avoid the protruding condition emergence of bursting mask strip or bursting the coating by vaporization base plate of support bar.
In another example, as shown in fig. 5 and 6, each groove 20 includes at least three openings, a first opening penetrates through the first surface 10, a second opening penetrates through the inner side surface of the frame body 1, a third opening penetrates through the outer side surface of the frame body 1, and the three openings are communicated with each other; wherein the second opening and the third opening are used for avoiding the support strip.
Wherein a first opening extends through the first surface 10 to expose the upper surface of the weldment 2 facing the first surface 10 so that the support bar can be secured to the upper surface of the weldment 2. The second opening penetrates through the inner side surface of the frame body 1, the third opening penetrates through the outer side surface of the frame body 1, and the three openings are communicated with each other. That is to say, the side wall of the groove 20 close to the evaporation area 100 and the side wall of the groove 20 far from the evaporation area 100 are both partially removed to avoid the support bar, so as to avoid the situation that the frame body 1 is close to the side wall of the evaporation area 100 or the side wall of the groove 20 close to the evaporation area 100 jacks up the support bar, which results in the fragment of the evaporation substrate. Meanwhile, the side walls of the grooves 20 close to the evaporation area 100 and the side walls of the grooves 20 far away from the evaporation area 100 are partially removed, so that the frame body 1 cannot be obstructed when the support bars are stretched, and the support bars can be stretched without moving the welding pieces 2. At this time, as shown in fig. 5 and 6, the groove 20 may also have a T-shaped configuration.
It should be noted that, in the present embodiment, the locking member 4 needs to support the welding member 2 against the side wall of the groove 20, so that the side wall of each groove 20 close to or far from the evaporation zone 100 needs to be partially retained and cannot be completely removed.
Further, in order to improve the welding firmness between the support strip and the welding member 2, as shown in fig. 6, the welding member 2 partially covers the side walls of the groove 20 in the present embodiment, that is, the welding member 2 is partially located in the groove 20, and the protruding portion is overlapped on the side walls of the groove 20, so that the area of the upper surface of the welding member 2 facing the first surface 10 can be increased, and the welding firmness between the support strip and the welding member 2 can be enhanced.
Optionally, as shown in fig. 1 and 2, the mask frame assembly includes: a first through hole 101 penetrating from the inner side surface or the outer side surface of the frame body 1 and communicated with the groove 20, wherein an inner thread is arranged on the inner wall of the first through hole 101; the surface of retaining member 4 is provided with the external screw thread, and retaining member 4 is located the through-hole, and the internal thread is mutually supported with the external screw thread.
In this embodiment, the first through hole 101 penetrates through the inner side surface or the outer side surface of the frame body 1 and is communicated with the groove 20, and the first through hole 101 is used for accommodating the locking member 4. The external thread of retaining member 4 and the internal thread of first through-hole 101 on frame body 1 mutually support to realize the locking of retaining member 4 and frame body 1.
Optionally, as shown in fig. 1 and 2, the frame body 1 further includes a first diversion hole 102, and a second surface opposite to the first surface 10; the first guiding hole 102 penetrates from the first surface 10 and/or the second surface and communicates with the first through hole 101. Therefore, when the mask frame assembly is cleaned, the cleaning liquid medicine accumulated in the first through hole 101 can flow out through the first flow guide hole 102 communicated with the first through hole 101, and the cleaning liquid medicine is prevented from remaining.
In some embodiments, as shown in fig. 2, the weldment 2 includes a flat portion 21 and a positioning portion 22 extending from the flat portion 21 and toward the second surface. The groove 20 comprises a support groove 201 and a positioning groove 202 which penetrates through the bottom surface of the support groove 201 and is communicated with the support groove 201, the positioning part 22 is at least partially positioned in the positioning groove 202, and the flat part 21 is positioned in the support groove 201.
In the present embodiment, the welding member 2 includes the positioning portion 22 at least partially located in the positioning groove 202, and the flat portion 21 located in the support groove 201, the positioning portion 22 can only move in the positioning groove 202 along the thickness direction of the frame body 1, and cannot move on any plane parallel to the first surface 10, and therefore, the flat portion 21 connected to the positioning portion 22 cannot move on any plane parallel to the first surface 10, so as to avoid the position deviation of the welding member 2 on the first surface 10 of the frame body 1, and to fix the position of the welding member 2.
The cross-sectional shape of the positioning portion 22 may be cross-shaped, rectangular or other shapes as long as the positioning portion can be matched with the positioning groove 202, and the cross-sectional shape of the positioning portion 22 is not particularly limited in this embodiment.
Optionally, as shown in fig. 3, the mask frame assembly further includes a spacer 3, the spacer 3 is located on the bottom surface of the support groove 201, and the flat portion 21 is located on the spacer 3. In order to avoid the movement of the welding member 2 at different depth positions of the groove 20, if the flat portion 21 of the welding member 2 does not contact the bottom surface of the supporting groove 201 in the present embodiment, the spacer 3 may be additionally arranged between the flat portion 21 and the bottom surface of the supporting groove 201, so as to avoid the deviation of the welding member 2 from the preset depth position caused by fixing the supporting strip on the welding member 2. It should be noted that, depending on the distance between the welding member 2 and the bottom surface of the groove 20, the shims 3 of different thicknesses are added.
A second embodiment of the present invention relates to a mask frame assembly, and a schematic structural view of the embodiment is shown in fig. 8 or 10, and the second embodiment is a modification of the first embodiment, except that another specific structural style of the mask frame assembly is given in this embodiment.
The frame body 1 in this embodiment further includes: a second surface opposite the first surface 10; the locking member 4 is inserted into the frame body 1 from the second surface of the frame body 1 and partially protrudes into the welding member 2.
Specifically, the frame body 1 includes a first surface 10 and a second surface opposite to the first surface 10. The welding members 2 are placed in the grooves 20 formed in the frame body 1, the welding members 2 are configured as sliders movable in the thickness direction (Z-axis direction) of the frame body 1, and the locking members 4 are inserted into the frame body 1 from the second surface of the frame body 1 and partially extend into the welding members 2. In use, the depth of the weldment 2 in the recess 20 can be adjusted by adjusting the length of the retaining member 4 extending into the weldment 2, thereby adjusting the difference in height between the upper surface of the weldment 2 facing the first surface 10 and the first surface 10 of the frame body 1.
In order to meet the welding requirement of the support bar in the present embodiment, assuming that the thickness of the support bar is d, the height difference L when the welding member 2 contacts the bottom surface of the groove 20 may be greater than or equal to 2 x d.
In order to prevent the welding part 2 from deforming under the action of welding heat or the tension of the supporting strip, the thickness of the welding part 2 in all directions in the embodiment needs to be more than 5 mm.
As shown in fig. 12 and 13, the weldment 2 of the present embodiment includes: a second through hole 103 penetrating from the second surface of the frame body 1 and communicating with the groove 20; the retaining member 4 is located in the second through hole 103. In order to avoid the movement of the welding part 2 at different depth positions of the groove 20, an internal thread matched with the external thread of the locking part 4 can be arranged on the inner wall of the second through hole 103, and the external thread of the locking part 4 is matched with the internal thread of the second through hole 103 on the frame body 1, so that the locking of the locking part 4 and the frame body 1 is realized.
Optionally, each groove 20 includes at least two openings, one opening penetrates through the first surface 10, the other opening penetrates through the inner side surface of the frame body 1, and the two openings are communicated with each other; the other opening is used for avoiding the supporting strip.
Wherein an opening extends through the first surface 10 to expose the upper surface of the weldment 2 facing the first surface 10 so that the support bar can be secured to the upper surface of the weldment 2. And another opening runs through the medial surface of frame body 1, and two openings are linked together, that is to say, the lateral wall that recess 20 is close to evaporation coating zone 100 is partly got rid of and is used for dodging the support bar to avoid recess 20 to be close to the lateral wall of evaporation coating zone 100 with the support bar jack-up and lead to the condition of evaporation coating substrate fragment to take place.
In this embodiment, since the locking member 4 can be locked without abutting against the sidewall of the groove 20, the groove 20 may be in a rectangular or square shape in this embodiment, and the sidewall of the groove 20 close to the evaporation region 100 or the sidewall far from the evaporation region 100 may be completely removed. For example, the side walls of the grooves 20 shown in fig. 8 near the evaporation zone 100 are completely removed; as shown in fig. 10, the side walls of the grooves 20 close to the evaporation zone 100 and the side walls far from the evaporation zone 100 are completely removed. In this manner, the weldment 2 is designed to match the configuration of the groove 20 to increase the area of the upper surface of the weldment 2 facing the first surface 10, thereby enhancing the weld integrity between the support bar and the weldment 2.
In some embodiments, the weldment 2 comprises a blind hole, the opening of which faces the second surface, the inner wall of the blind hole being provided with an internal thread; the surface of the locking part 4 is provided with external threads, and the internal threads are matched with the external threads. The external screw thread of retaining member 4 mutually supports with the internal thread of welding 2 blind hole to realize retaining member 4 and the locking of welding 2. Further, assuming that the difference in height between the upper surface of the support bar facing away from the welding member 2 and the first surface 10 is a when the welding member 2 is in contact with the bottom surface of the recess 20, the length of the external thread of the locking member 4 cooperating with the blind hole is b, wherein b should be greater than a, thereby ensuring that the locking member 4 can always be locked with the welding member 2 even if the thickness of the shim 3 is increased. Optionally, b ≧ a +2mm may be set in this embodiment.
As shown in fig. 8 to 11, in some embodiments, the welding member 2 includes a flat portion 21 and a positioning portion 22 extending from the flat portion 21 and extending toward the second surface. The groove 20 includes a supporting groove 201 and a positioning groove 202 penetrating the bottom surface of the supporting groove 201 and communicating with the supporting groove 201, the positioning portion 22 is located in the positioning groove 202, and the flat portion 21 is located in the supporting groove 201.
In the present embodiment, the welding member 2 includes the positioning portion 22 located in the positioning groove 202 and the flat portion 21 located in the support groove 201, the positioning portion 22 can only move in the positioning groove 202 along the thickness direction of the frame body 1, and cannot move on any plane parallel to the first surface 10, and therefore, the flat portion 21 connected to the positioning portion 22 cannot move on any plane parallel to the first surface 10, so that the position deviation of the welding member 2 on the first surface 10 of the frame body 1 is avoided, and the welding member 2 is fixed.
The cross-sectional shape of the positioning portion 22 may be cross-shaped, rectangular or other shapes as long as the positioning portion can be matched with the positioning groove 202, and the cross-sectional shape of the positioning portion 22 is not particularly limited in this embodiment.
Optionally, as shown in fig. 13, the mask frame assembly further includes a spacer 3, the spacer 3 is located on the bottom surface of the support groove 201, and the flat portion 21 is located on the spacer 3.
In order to avoid the movement of the welding member 2 at different depth positions of the groove 20, if the flat portion 21 of the welding member 2 does not contact the bottom surface of the supporting groove 201 in the present embodiment, the spacer 3 may be additionally arranged between the flat portion 21 and the bottom surface of the supporting groove 201, so as to avoid the deviation of the welding member 2 from the preset depth position caused by fixing the supporting strip on the welding member 2. It should be noted that, depending on the distance between the welding member 2 and the bottom surface of the groove 20, the shims 3 of different thicknesses are added.
Further, as shown in fig. 8 to 11, the frame body 1 further includes: the outer side surface far away from the evaporation region 100; the mask frame assembly further comprises a second flow guiding hole 104, and the second flow guiding hole 104 penetrates through the inner side surface or the outer side surface of the frame body 1 and is communicated with the second through hole 103. Thus, when the mask frame assembly is cleaned, the cleaning liquid medicine accumulated in the second through hole 103 can flow out through the second flow guide hole 104 communicated with the second through hole 103, and the cleaning liquid medicine is prevented from remaining.
It will be understood by those of ordinary skill in the art that the foregoing embodiments are specific examples for carrying out the invention, and that various changes in form and details may be made therein without departing from the spirit and scope of the invention in practice.

Claims (10)

1. A mask frame assembly is characterized by comprising a frame body, wherein the frame body comprises a first surface and an evaporation area which penetrates through the frame body along the direction vertical to the first surface;
the evaporation area is formed by a frame body and a first surface, the evaporation area is formed by a first surface and a second surface, the frame body is provided with at least one pair of grooves, two grooves in the same pair of grooves are respectively arranged on two opposite sides of the evaporation area, each groove comprises at least two openings, one opening penetrates through the first surface, the other opening penetrates through the inner side surface of the frame body to form the evaporation area, and the two openings are communicated;
at least one pair of weldment, each pair of said weldments being located within a pair of said grooves and each said weldment being located within one of said grooves;
the two ends of each support bar are respectively fixed on the upper surfaces, facing the first surfaces, of the pair of welding pieces, and the other opening is used for avoiding the support bars; wherein when the weldment is in contact with the bottom surface of the groove, the upper surface of the support bar facing away from the weldment is lower than or flush with the first surface;
the locking piece extends into the groove and is used for fixing the welding piece to positions with different depths of the groove so as to adjust the height difference between the upper surface of the first surface and the first surface of the welding piece.
2. The mask frame assembly of claim 1, wherein the frame body further comprises: the outer side surface is far away from the evaporation area;
the retaining member is inserted into the frame body from the inner side face or the outer side face of the frame body, and the welding member is abutted against the side wall of the groove.
3. The mask frame assembly of claim 2, wherein the mask frame assembly comprises: a first through hole penetrating from the inner side surface or the outer side surface of the frame body and communicated with the groove, wherein an inner thread is arranged on the inner wall of the first through hole;
the surface of retaining member is provided with the external screw thread, the retaining member is located in the through-hole, the internal thread with the external screw thread is mutually supported.
4. A mask frame assembly according to claim 3, wherein the frame body further comprises a first baffle hole, and a second surface opposite to the first surface; the first flow guide hole penetrates through the first surface and/or the second surface and is communicated with the first through hole.
5. The mask frame assembly of claim 1, wherein the frame body further comprises: a second surface opposite the first surface;
the locking piece is inserted into the frame body from the second surface of the frame body, and partially extends into the welding piece.
6. A mask frame assembly according to claim 5, wherein the welding member comprises a blind hole, the opening of the blind hole faces the second surface, and an inner wall of the blind hole is provided with an internal thread;
the retaining member surface is provided with the external screw thread, just the internal thread with the external screw thread is mutually supported.
7. The mask frame assembly of claim 5, wherein the weldment comprises: the second through hole penetrates through the second surface of the frame body and is communicated with the groove;
the locking member is located in the second through hole.
8. The mask frame assembly of claim 7, wherein the frame body further comprises: the outer side surface is far away from the evaporation area;
the mask frame assembly further comprises a second flow guide hole, and the second flow guide hole penetrates through the inner side face or the outer side face of the frame body and is communicated with the second through hole.
9. A mask frame assembly according to claim 2 or 5, wherein the weldment comprises a flat portion and a positioning portion extending from the flat portion and extending toward the second surface;
the groove comprises a supporting groove and a positioning groove which penetrates through the bottom surface of the supporting groove and is communicated with the supporting groove, at least part of the positioning part is positioned in the positioning groove, and the flat part is positioned in the supporting groove.
10. The mask frame assembly of claim 9, further comprising a spacer on the bottom surface of the support groove, the flat portion being on the spacer.
CN202110489816.5A 2021-04-30 2021-04-30 Mask frame assembly Active CN113201711B (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN116288148A (en) * 2023-03-30 2023-06-23 季华实验室 Mask assembly, evaporation equipment and evaporation method

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104169455A (en) * 2012-04-05 2014-11-26 索尼公司 Mask adjustment unit, mask device, and device and method for manufacturing mask
US20160348227A1 (en) * 2014-12-04 2016-12-01 Shenzhen China Star Optoelectronics Technology Co. Ltd. Oled material vacuum thermal evaporating mask plate
CN108611598A (en) * 2018-07-27 2018-10-02 京东方科技集团股份有限公司 a kind of frame structure
CN208949383U (en) * 2018-09-17 2019-06-07 苏州艾钛科纳米科技有限公司 A kind of formed punch vacuum coating loading frame
CN111778480A (en) * 2020-07-15 2020-10-16 京东方科技集团股份有限公司 Mask integrated frame and assembling method thereof

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104169455A (en) * 2012-04-05 2014-11-26 索尼公司 Mask adjustment unit, mask device, and device and method for manufacturing mask
US20160348227A1 (en) * 2014-12-04 2016-12-01 Shenzhen China Star Optoelectronics Technology Co. Ltd. Oled material vacuum thermal evaporating mask plate
CN108611598A (en) * 2018-07-27 2018-10-02 京东方科技集团股份有限公司 a kind of frame structure
CN208949383U (en) * 2018-09-17 2019-06-07 苏州艾钛科纳米科技有限公司 A kind of formed punch vacuum coating loading frame
CN111778480A (en) * 2020-07-15 2020-10-16 京东方科技集团股份有限公司 Mask integrated frame and assembling method thereof

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN116288148A (en) * 2023-03-30 2023-06-23 季华实验室 Mask assembly, evaporation equipment and evaporation method

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