CN113189467A - Automatic test system and test method for static parameters of GaN power device - Google Patents
Automatic test system and test method for static parameters of GaN power device Download PDFInfo
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- CN113189467A CN113189467A CN202110429972.2A CN202110429972A CN113189467A CN 113189467 A CN113189467 A CN 113189467A CN 202110429972 A CN202110429972 A CN 202110429972A CN 113189467 A CN113189467 A CN 113189467A
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- 238000012360 testing method Methods 0.000 title claims abstract description 285
- 230000003068 static effect Effects 0.000 title claims abstract description 24
- 238000010998 test method Methods 0.000 title claims abstract description 10
- 238000005259 measurement Methods 0.000 claims abstract description 7
- 238000012545 processing Methods 0.000 claims abstract description 4
- 238000013500 data storage Methods 0.000 claims description 11
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 description 10
- 229910002601 GaN Inorganic materials 0.000 description 9
- 235000012431 wafers Nutrition 0.000 description 5
- 238000010586 diagram Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 230000015556 catabolic process Effects 0.000 description 1
- 238000010835 comparative analysis Methods 0.000 description 1
- 238000007405 data analysis Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000007123 defense Effects 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 238000012795 verification Methods 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/26—Testing of individual semiconductor devices
- G01R31/2601—Apparatus or methods therefor
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/01—Subjecting similar articles in turn to test, e.g. "go/no-go" tests in mass production; Testing objects at points as they pass through a testing station
Abstract
The invention discloses an automatic test system and a test method of static parameters of a GaN power device, and the automatic test system comprises a test board, a test instrument, a serial port and an upper computer which are sequentially connected in series, wherein the test instrument receives signals transmitted by the serial port and provides corresponding voltage and current for the test board according to received signal information; simultaneously measuring output voltage and current signals of the test board, and transmitting the measurement result to the serial port; the test board works under the voltage and current provided by the test instrument, and the output result after the work is finished is measured by the test instrument; the upper computer controls the output voltage and current of the test instrument through the serial port, and reads the input voltage and current of the test instrument to perform data processing and display. The invention can avoid changing the parameter setting of the testing instrument one by one manually when testing a plurality of parameters, avoid recording the testing data manually, and simultaneously can visually display whether the testing result is correct or not, thereby greatly improving the testing efficiency and reducing the manual misoperation.
Description
Technical Field
The invention relates to an automatic test system and a test method for static parameters of a GaN power device, and belongs to the field of testing of GaN power devices.
Background
In recent years, third-generation semiconductors represented by gallium nitride (GaN) have been widely used in many fields such as energy, traffic, information, national defense, and the like, due to the performance advantages such as large forbidden bandwidth, high breakdown electric field strength, and strong radiation resistance. However, the existing domestic GaN semiconductor manufacturing process is not mature, the production process and the performance of the product are in continuous improvement and exploration stages, and the product may need to be tested and verified through multiple tape-out and function and characteristic tests before the product is produced in batches. And static parameters such as threshold voltage, gate leakage current, drain saturation current, drain-source resistance and the like are basic parameters for ensuring the functions of the power device product, and repeated test verification needs to be performed on batch sample wafers under different conditions, and test data is stored for comparative analysis.
At present, the common test methods mainly comprise a manual test and a machine test. The former tests batch samples by parameters completely and manually, and comprises the steps of manually setting up test equipment, manually changing test parameter configuration and manually recording test data, so that the whole test has long time consumption and low efficiency, and artificial operation errors are easily caused. The latter mainly uses the existing automatic testing machine in the market, but the purchase and the lease are expensive, and the testing hardware matched with the corresponding automatic testing machine needs to be prepared, so the testing cost is high.
Disclosure of Invention
Aiming at the problems in the prior art, the invention provides an automatic testing system and a testing method for static parameters of a GaN power device, which can avoid manually changing the parameter setting of a testing instrument one by one when testing a plurality of parameters when testing sample wafers in batches in a laboratory, avoid manually recording test data, and simultaneously can visually display whether the test result is correct or not, thereby improving the testing efficiency and reducing manual misoperation.
In order to achieve the purpose, the invention adopts the following technical scheme: an automatic test system for static parameters of a GaN power device, comprising:
the test instrument is connected with the test board and the serial port, receives signals transmitted by the serial port and provides corresponding voltage and current for the test board according to the received signal information; the test instrument measures output voltage and current signals of the test board and transmits the measurement result to the serial port;
the test board is connected with the test instrument, works under the voltage and current provided by the test instrument, and the output result after the work is finished is measured by the test instrument;
the serial port is connected with the test instrument and the upper computer and is connected with the measurement instrument and the upper computer in series;
and the upper computer controls the output voltage and current of the testing instrument through the serial port, and reads the input voltage and current of the testing instrument to perform data processing.
Preferably, the test instrument is a programmable digital source meter.
Preferably, the test board comprises a test board body, a load test seat fixedly mounted on the test board body and used for placing a chip to be tested, and a socket for connecting with the measuring instrument.
Preferably, the serial port is an RS232C serial port.
Preferably, the programming control software in the upper computer is developed based on labview, test programs of all conventional static parameter test contents are compiled in advance, a test item input box, a test enabling checkup button, a test parameter input box and a test threshold input box are set on an operation interface of the control software, one or more pre-programmed test item names are input in the test item input box, the test enabling checkup button is checked, and then required values are input in the corresponding test parameters and the test threshold input box.
Preferably, the operating interface of the upper computer programming control software is provided with a data storage checking button and a file path selection button, if the data storage button is checked, the file path selection button is clicked before the test to input a data storage path and a file name, and after the test is finished, the data can be stored in a corresponding file; and if the data storage button is not selected, the test data is not stored after the test is finished.
Preferably, the upper computer programming control software operation interface is provided with a test frequency input box, if the input box does not input numerical values and defaults to 0, the program is not executed; if the input value of the input box is 1, the selected test item is completely tested once; if the input value of the input box is n, and n is a natural number greater than 1, the selected test item is circularly executed for n times, and the test is finished.
Preferably, the upper computer programming control software operation interface is provided with a test result indicator light and a test data display frame, after the test is completed, if the test result is within a set test threshold range, the test result is correct, the indicator light displays green, otherwise, the indicator light displays gray, and the test data display frame displays the current test data.
A test method of an automatic test system based on the static parameters of the GaN power device comprises the following steps:
step S1, completing the connection of the test instrument with the test board, the serial port and the upper computer, and placing a chip to be tested on a test seat of the test board;
step S2, starting a switch of the test instrument, starting software in the upper computer, searching serial port numbers of the test instrument and connecting the serial port numbers;
s3, selecting whether data needs to be saved on the upper computer;
step S4, setting the cycle number of the test;
step S5, selecting the needed test item, and setting the test parameter and the test threshold of the selected test item;
step S6, clicking an operation button on the upper computer, observing the state of a test result indicator lamp after the operation is finished, and confirming whether the test result is correct or not; if the test result is incorrect, the current test data can be checked, the reason of the test failure is confirmed, and the test failure chip is marked to finish the test.
Compared with the prior art, the invention has the following advantages:
firstly, when sample wafers are tested in batches in a laboratory, the parameter setting of a testing instrument can be prevented from being changed manually one by one when a plurality of parameters are tested, the test data are prevented from being recorded manually, and whether the test result is correct or not can be visually displayed through an upper computer, so that the test efficiency can be greatly improved, and the problem of misoperation caused by human is reduced;
secondly, the system is built by utilizing a common source meter testing instrument in a laboratory and setting a control program through computer software, and a test operator only needs to operate according to a preset flow, so that the cost of test equipment and the capability requirement of the test operator are greatly reduced;
thirdly, the random selection of the static parameter items to be tested and the automatic storage of the test data can be realized according to the requirements, and the operation is very flexible and simple;
in conclusion, the invention can intuitively judge whether the test result is correct or not through the software operation interface signal display lamp and the data display frame of the upper computer, greatly improve the test efficiency when testing the sample wafers in batches in a laboratory, reduce the problem of misoperation or data recording error caused by human, reduce the capability requirement on test operators through a simple operation mode and facilitate the flexible arrangement of the test operators.
Drawings
FIG. 1 is a schematic diagram of an automatic test system according to the present invention;
FIG. 2 is a flow chart of an automatic test method of the present invention;
FIG. 3 is a diagram illustrating test results according to an embodiment of the present invention.
Detailed Description
The technical solutions in the implementation of the present invention will be made clear and fully described below with reference to the accompanying drawings, and the described embodiments are only a part of the embodiments of the present invention, but not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments of the present invention without making any creative effort, shall fall within the protection scope of the present invention.
As shown in fig. 1 and fig. 2, the present invention provides an automatic testing system for static parameters of a GaN power device, comprising:
the test instrument is connected with the test board and the serial port, receives signals transmitted by the serial port and provides corresponding voltage and current for the test board according to the received signal information; the test instrument measures output voltage and current signals of the test board and transmits the measurement result to the serial port;
the test board is connected with the test instrument, works under the voltage and current provided by the test instrument, and the output result after the work is finished is measured by the test instrument;
the serial port is connected with the test instrument and the upper computer and is connected with the measurement instrument and the upper computer in series;
and the upper computer controls the output voltage and current of the testing instrument through the serial port, and reads the input voltage and current of the testing instrument to perform data processing.
Preferably, the testing instrument is a programmable control digital source meter, a common source meter testing instrument in a laboratory is utilized, a control program is set through computer software, and a test operator only needs to operate according to a preset flow, so that the cost of the testing equipment and the capability requirement of the test operator are greatly reduced.
Preferably, the test board comprises a test board body, a load test seat fixedly mounted on the test board body and used for placing a chip to be tested, and a socket for connecting with the measuring instrument.
Preferably, the serial port is an RS232C serial port.
Preferably, the programming control software in the upper computer is developed based on labview, test programs of all conventional static parameter test contents are compiled in advance, a test item input box, a test enabling checkup button, a test parameter input box and a test threshold input box are set on an operation interface of the control software, the test item input box can be increased or decreased according to requirements in actual test, one or more pre-programmed test item names are input into the test item input box, the test enabling checkup button is checked, and then required values are input into the corresponding test parameters and test threshold input boxes.
Preferably, the operating interface of the upper computer programming control software is provided with a data storage checking button and a file path selection button, if the data storage button is checked, the file path selection button is clicked before the test to input a data storage path and a file name, and after the test is finished, the data can be stored in a corresponding file; and if the data storage button is not selected, the test data is not stored after the test is finished.
Preferably, the upper computer programming control software operation interface is provided with a test frequency input box, if the input box does not input numerical values and defaults to 0, the program is not executed; if the input value of the input box is 1, the selected test item is completely tested once; if the input value of the input box is n, and n is a natural number greater than 1, the selected test item is circularly executed for n times, and the test is finished.
Preferably, the upper computer programming control software operation interface is provided with a test result indicator light and a test data display frame, after the test is completed, if the test result is within a set test threshold range, the test result is correct, the indicator light displays green, otherwise, the indicator light displays gray, and the test data display frame displays the current test data.
A test method of an automatic test system based on the static parameters of the GaN power device comprises the following steps:
step S1, completing the connection of the test instrument with the test board, the serial port and the upper computer, and placing a chip to be tested on a test seat of the test board;
step S2, starting a switch of the test instrument, starting software in the upper computer, searching serial port numbers of the test instrument and connecting the serial port numbers;
step S3, checking a data storage icon on the upper computer software interface, selecting to store data, clicking a file path selection button, inputting a data storage path and a file name, and automatically storing test data into a corresponding file after the test is finished;
step S4, inputting 1 in the test frequency input box, and setting the test frequency as 1;
step S5, inputting the name of the static parameter test item to be tested by the upper computer software interface, checking the enabling icon of the corresponding test item, and setting the test parameter and the test threshold of the corresponding selected test item;
step S6, clicking an operation button on the upper computer software operation interface, observing the state of the test result indicator light after the program operation is finished, and if all the indicator lights are green, indicating that the test results of all the test items are within the test threshold range and the test result is correct; if the indicator light is gray, the test result of the corresponding test item is not in the test threshold range, and the test result is wrong; the current test data can be checked through the test data display frame, the reason of test failure is confirmed, and the chip with test failure is marked;
step S7, after the test is completed, the data file saved in the data file saving directory may be opened for data analysis, the first line of the file may display the name of the test item input by the software operation interface, each test item occupies one column, each chip starts from the second line or the data of each test may be saved line by line in sequence, in addition, a test state saving item is added after each test data, if all the test items of the test are tested correctly, the character P (abbreviation of PASS) may be saved, otherwise, the character F (abbreviation of FAI L) may be saved, as shown in fig. 3.
In conclusion, the invention can realize the arbitrary selection of the static parameter items to be tested and the automatic storage of the test data according to the requirements, and the operation is very flexible and simple; meanwhile, the software operation interface signal display lamp and the data display frame can be used for visually judging whether the test result is correct or not, so that the test efficiency can be greatly improved when the sample wafers are tested in batches in a laboratory, the problem of misoperation or data recording error caused by human factors is reduced, and meanwhile, the capability requirement on test operators is lowered due to a simple operation mode.
It will be evident to those skilled in the art that the invention is not limited to the details of the foregoing illustrative embodiments, and that the present invention may be embodied in other specific forms without departing from the spirit or essential attributes thereof. Furthermore, it should be understood that although the present description refers to embodiments, not every embodiment may contain only a single embodiment, and such description is for clarity only, and those skilled in the art should make the description as a whole, and the embodiments may be appropriately combined to form other embodiments understood by those skilled in the art.
Claims (9)
1. An automatic test system for static parameters of a GaN power device, comprising:
the test instrument is connected with the test board and the serial port, receives signals transmitted by the serial port and provides corresponding voltage and current for the test board according to the received signal information; the test instrument measures output voltage and current signals of the test board and transmits the measurement result to the serial port;
the test board is connected with the test instrument, works under the voltage and current provided by the test instrument, and the output result after the work is finished is measured by the test instrument;
the serial port is connected with the test instrument and the upper computer and is connected with the measurement instrument and the upper computer in series;
and the upper computer controls the output voltage and current of the testing instrument through the serial port, and reads the input voltage and current of the testing instrument to perform data processing.
2. The system of claim 1, wherein the testing instrument is a programmable digital source meter.
3. The system of claim 1, wherein the test board comprises a test board body, a load socket fixedly mounted on the test board body for placing a chip to be tested, and a socket for connecting with the measuring instrument.
4. The automatic test system for the static parameters of the GaN power device as recited in claim 1, wherein the serial port is an RS232C serial port.
5. The automatic testing system for the static parameters of the GaN power device according to claim 1, wherein the programming control software in the upper computer is developed based on labview, by pre-programming the testing programs of all the conventional static parameter testing contents, setting a test item input box, a test enable checkup button, a test parameter input box and a test threshold input box on the control software operation interface, inputting one or more pre-programmed test item names in the test item input box, and checkup the test enable checkup button, and then inputting the required values in the corresponding test parameters and test threshold input boxes.
6. The automatic testing system for the static parameters of the GaN power device, according to claim 5, wherein the operating interface of the upper computer programming control software is provided with a data saving check button and a file path selection button, if the data saving button is checked, the file path selection button is clicked before the test to input a data saving path and a file name, and after the test is completed, the data is saved in a corresponding file; and if the data storage button is not selected, the test data is not stored after the test is finished.
7. The automatic testing system for the static parameters of the GaN power device, as recited in claim 5, wherein the upper computer programming control software operation interface is provided with a test frequency input box, and if the input box does not input numerical values, and defaults to 0, the program is not executed; if the input value of the input box is 1, the selected test item is completely tested once; if the input value of the input box is n, and n is a natural number greater than 1, the selected test item is circularly executed for n times, and the test is finished.
8. The automatic testing system for the static parameters of the GaN power device, as set forth in claim 5, wherein the upper computer programming control software operation interface is provided with a test result indicator and a test data display frame, after the test is completed, if the test result is within the set test threshold range, the test result is correct, the indicator is green, otherwise, the indicator is gray, and the test data display frame displays the current test data.
9. A test method of an automatic test system for the static parameters of a GaN power device is characterized in that the automatic test system is the automatic test system for the static parameters of the GaN power device in any one of claims 1 to 8, and the whole test method comprises the following steps:
step S1, completing the connection of the test instrument with the test board, the serial port and the upper computer, and placing a chip to be tested on a test seat of the test board;
step S2, starting a switch of the test instrument, starting software in the upper computer, searching serial port numbers of the test instrument and connecting the serial port numbers;
s3, selecting whether data needs to be saved on the upper computer;
step S4, setting the cycle number of the test;
step S5, selecting the needed test item, and setting the test parameter and the test threshold of the selected test item;
step S6, clicking an operation button on the upper computer, observing the state of a test result indicator lamp after the operation is finished, and confirming whether the test result is correct or not; if the test result is incorrect, the current test data can be checked, the reason of the test failure is confirmed, and the chip with the test failure is marked to finish the test.
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| CN116577551A (en) * | 2023-04-03 | 2023-08-11 | 深圳市晶存科技有限公司 | SSD power consumption testing method and system and electronic equipment |
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