CN113188730A - Pressure sensor leakproofness testing arrangement - Google Patents

Pressure sensor leakproofness testing arrangement Download PDF

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Publication number
CN113188730A
CN113188730A CN202110488701.4A CN202110488701A CN113188730A CN 113188730 A CN113188730 A CN 113188730A CN 202110488701 A CN202110488701 A CN 202110488701A CN 113188730 A CN113188730 A CN 113188730A
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CN
China
Prior art keywords
pressure sensor
detection structure
testing
cylinder
rack
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CN202110488701.4A
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Chinese (zh)
Inventor
王小平
曹万
唐文
齐擎
陈列
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Wuhan Finemems Inc
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Wuhan Finemems Inc
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Priority to CN202110488701.4A priority Critical patent/CN113188730A/en
Publication of CN113188730A publication Critical patent/CN113188730A/en
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01MTESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00Investigating fluid-tightness of structures
    • G01M3/02Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/26Investigating fluid-tightness of structures by using fluid or vacuum by measuring rate of loss or gain of fluid, e.g. by pressure-responsive devices, by flow detectors
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L27/00Testing or calibrating of apparatus for measuring fluid pressure

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  • General Physics & Mathematics (AREA)
  • Examining Or Testing Airtightness (AREA)

Abstract

The invention discloses a pressure sensor tightness testing device, which comprises a leak detector and a detection structure group, wherein the detection structure group comprises a mounting seat and a joint seat which are arranged at intervals along the left-right direction, the upper end surface of the mounting seat is provided with a containing groove, the containing groove is used for placing a shell of the pressure sensor and enabling an air nozzle to protrude out of a detection side surface, the joint seat is provided with a gas channel, one port of the gas channel is formed on the side surface of the joint seat facing the detection side surface, and the other port is connected to a test interface of the leak detector; the connector base can move left and right to a position close to the mounting base so that the port of the gas channel is sleeved on the gas nozzle to communicate the gas nozzle with the test interface. According to the pressure sensor tightness testing device, the operation of sleeving the gas channel port of the joint seat outside the air tap is simpler, so that the operation efficiency is higher, and the testing efficiency can be improved; and the joint seat can avoid frequently using the test interface, thereby prolonging the service life of the test interface and reducing the test cost.

Description

Pressure sensor leakproofness testing arrangement
Technical Field
The invention relates to the technical field of pressure sensor tightness testing, in particular to a pressure sensor tightness testing device.
Background
Among the prior art, when carrying out pressure sensor's leakproofness test, generally adopt manual operation to be connected to pressure sensor's air cock with the test interface lug connection of leak detector, manual operation inefficiency on the one hand, on the other hand frequently with test interface and sensor suction nozzle butt joint, lead to test interface to damage very fast, the test cost increases.
Disclosure of Invention
The invention mainly aims to provide a pressure sensor tightness testing device, and aims to solve the problem that when the tightness of a pressure sensor is tested, a testing interface of a leak detector is directly connected to an air nozzle of the pressure sensor through manual operation, so that the testing efficiency is low due to low manual operation efficiency.
In order to achieve the above object, the present invention provides a device for testing the sealing performance of a pressure sensor, where the pressure sensor includes a housing and an air faucet disposed on a side surface of the housing and communicated with an inner cavity of the housing, and the device for testing the sealing performance of the pressure sensor includes:
a rack;
the leak detector is arranged on the rack; and the number of the first and second groups,
the detection structure group is arranged on the upper end face of the rack and comprises a mounting seat and a joint seat which are arranged at intervals in the left-right direction, the mounting seat is provided with a detection side face facing the joint seat, the upper end face of the mounting seat is provided with a containing groove, the containing groove is used for placing a shell of the pressure sensor and enabling the air tap to protrude out of the detection side face, the joint seat is provided with a gas channel, one port of the gas channel is formed on the side face, facing the detection side face, of the joint seat, and the other port of the gas channel is connected to a test interface of the leak detector;
the connector base is provided with a moving stroke which is close to or far away from the mounting base along the left-right direction, and can be close to the mounting base so that the port of the gas channel is sleeved on the gas nozzle to be communicated with the gas nozzle and the test interface.
Optionally, the detection structure group is provided with a plurality of detection structure groups, the plurality of detection structure groups at least include a first detection structure group and a second detection structure group, and the first detection structure group and the second detection structure group are switched to be used for detecting and loading the pressure sensor.
Optionally, in each detection structure group, the mount pad is provided with a plurality of along the preceding backward interval, the joint seat corresponds and is provided with a plurality ofly, and is a plurality of the joint seat all can be followed and controlled to the removal.
Optionally, the pressure sensor further comprises a pressing block, the pressing block is movably arranged on the rack in the up-down direction and is correspondingly located above the accommodating groove, and the pressing block is pressed downwards to be in press contact with the upper end face of the shell of the pressure sensor to be tested.
Optionally, a plurality of detection structure groups are provided;
the pressing block can be switched and moved above the accommodating grooves of the plurality of detection structure groups.
Optionally, two detection structure groups are arranged, and the two detection structure groups are arranged along the left-right direction;
pressure sensor leakproofness testing arrangement still includes briquetting drive assembly, briquetting drive assembly includes:
the guide rod of the first air cylinder can be arranged in a telescopic manner along the vertical direction, and one of the first cylinder body and the first guide rod of the first air cylinder is arranged on the pressing block;
the other one of the first cylinder body and the first guide rod of the first cylinder is arranged on the connecting frame;
the first linear guide rail structure comprises a first guide rail extending along the left-right direction and a first sliding table arranged on the first guide rail in a sliding manner, one of the first guide rail and the first sliding table is arranged on the upper end surface of the rack, and the other of the first guide rail and the first sliding table is arranged on the connecting rack; and the number of the first and second groups,
the guide rod of the second cylinder can be arranged in a telescopic mode in the left-right direction, one of the second cylinder body and the second guide rod of the second cylinder is arranged on the upper end face of the rack, and the other guide rod of the second cylinder is arranged on the connecting frame.
Optionally, the upper end surface of the rack is provided with first proximity switches corresponding to the left side and the right side of the connecting frame respectively, so as to limit the moving stroke of the connecting frame in the left-right direction.
Optionally, a joint drive assembly is further included, the joint drive assembly comprising:
the third linear guide rail structure comprises a third guide rail extending in the left-right direction and a third sliding table slidably arranged on the third guide rail, one of the third guide rail and the third sliding table is arranged on the upper end surface of the rack, and the other one of the third guide rail and the third sliding table is connected to the joint seat; and the number of the first and second groups,
and the guide rod of the third cylinder can move left and right, one of the third cylinder body and the third guide rod of the third cylinder is arranged on the joint seat, and the other is arranged on the upper end surface of the rack.
Optionally, the stage comprises a stage body and a substrate detachably arranged on the upper end surface of the stage body;
the leak detector is arranged on the rack body;
the detection structure is arranged on the substrate.
Optionally, the upper end surface of the rack body is further provided with a second proximity switch, and the second proximity switch is arranged corresponding to the substrate.
The technical scheme of the invention provides a device for testing the tightness of a pressure sensor, which comprises a mounting seat and a joint seat. The pressure sensor is arranged on the mounting seat, and the air nozzle protrudes out of the detection side face of the mounting seat; the connector base is formed with a gas channel, and one end of the gas channel is connected to the test interface of the detector. When the pressure sensor is tested, the joint seat is close to the mounting seat, the other port of the gas channel is sleeved outside the gas nozzle of the pressure sensor, so that the gas nozzle is communicated with the test interface, then the leak detector leads test gas into the gas nozzle, and the sealing data of the pressure sensor is measured according to the pressure change of the test gas. According to the tightness testing device for the pressure sensor, the joint seat is additionally arranged between the air nozzle and the testing interface, so that the testing joint is prevented from being frequently used, the service life of the testing interface can be prolonged, and the testing cost is reduced. And the operation of sleeving the gas channel of the joint seat outside the gas nozzle is simple, so that the operation efficiency is higher, and the test efficiency can be improved. In addition, compared with the method that the test interface is replaced or the adapter is added so that the size of the test interface can be matched with the air nozzle, the connector seat is lower in cost, and the size of the air channel port can be flexibly adjusted so as to take the assembling performance and the sealing performance into consideration, so that the test efficiency is improved, and the test cost is reduced.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the structures shown in the drawings without creative efforts.
Fig. 1 is a schematic structural diagram of an embodiment of a device for testing the tightness of a pressure sensor according to the present invention.
FIG. 2 is a schematic structural diagram of a substrate of the device for testing the sealing performance of a pressure sensor shown in FIG. 1;
FIG. 3 is a cross-sectional view of the substrate shown in FIG. 2 taken along line A-A;
fig. 4 is a schematic structural diagram of a detection structure group of the pressure sensor sealability testing apparatus shown in fig. 1.
The reference numbers illustrate:
Figure BDA0003050549030000041
the implementation, functional features and advantages of the objects of the present invention will be further explained with reference to the accompanying drawings.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
It should be noted that, if directional indications (such as up, down, left, right, front, and back … …) are involved in the embodiment of the present invention, the directional indications are only used to explain the relative positional relationship between the components, the movement situation, and the like in a specific posture (as shown in the drawing), and if the specific posture is changed, the directional indications are changed accordingly.
In addition, if there is a description of "first", "second", etc. in an embodiment of the present invention, the description of "first", "second", etc. is for descriptive purposes only and is not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one such feature. In addition, the meaning of "and/or" appearing throughout includes three juxtapositions, exemplified by "A and/or B" including either A or B or both A and B. In addition, technical solutions between various embodiments may be combined with each other, but must be realized by a person skilled in the art, and when the technical solutions are contradictory or cannot be realized, such a combination should not be considered to exist, and is not within the protection scope of the present invention.
The pressure sensor tightness test device 100 of the present invention is suitable for, but not limited to, a pressure sensor 200 having a structure in which the pressure sensor 200 includes a housing, an upper cover, a substrate 12, and a pressure sensitive element; the housing is formed with an inner cavity with an open top, and the substrate 12 is disposed in the inner cavity to divide the inner cavity into an upper chamber and a lower chamber which are independent; the side of the outer shell is provided with an air nozzle 201, the air nozzle 201 is communicated with the lower cavity, and the pressure sensitive element is arranged on one side of the substrate 12 positioned in the lower cavity; the upper cover is arranged at the opening at the top of the inner cavity.
When the tightness of the pressure sensor is tested, the air tap 201 of the pressure sensor 200 is manually connected with the test interface of the leak detector 2, so that the operation efficiency is low. In view of this, the present invention provides a device 100 for testing the sealing performance of a pressure sensor, referring to fig. 1, fig. 2 and fig. 4, the device 100 for testing the sealing performance of a pressure sensor includes a rack 1, a leak detector 2 and a detection structure group 3, the leak detector 2 is disposed on the rack 1, the detection structure group 3 is disposed on the upper end surface of the rack 1, the detection structure group 3 includes a mounting seat 31 and a joint seat 32 disposed at intervals in the left-right direction, the mounting seat 31 has a detection side surface 311 facing the joint seat 32, an accommodating groove 312 is formed on the upper end surface of the mounting seat 31, the accommodating groove 312 is used for placing the housing of the pressure sensor 200 and making the air nozzle 201 protrude from the detection side surface 311, the joint seat 32 forms a gas passage 321, one port of the gas passage 321 is formed on the side surface of the joint seat 32 facing the detection side surface 311, and the other port is connected to a test interface of the leak detector 2; the connector 32 can move toward or away from the mounting seat 31 in the left-right direction, and is used for making the port of the air passage 321 be sleeved on the air faucet 201 near the mounting seat 31 so as to communicate the air faucet 201 with the testing interface.
When the tightness test is performed by using the tightness test device 100 of the pressure sensor of the present invention, the pressure sensor 200 is placed on the mounting seat 31, and the air tap 201 protrudes from the detection side 311 of the mounting seat 31; the socket 32 is formed with a gas passage 321, and one end of the gas passage 321 is connected to a test interface of the tester. When the pressure sensor 200 is tested, the connector base 32 is close to the mounting base 31, the other port of the gas passage 321 is sleeved outside the gas nozzle 201 of the pressure sensor 200, so that the gas nozzle 201 is communicated with the test interface, then the leak detector 2 introduces test gas into the gas nozzle 201, and the sealing data of the pressure sensor 200 is measured according to the pressure change of the test gas. According to the tightness detection device of the pressure sensor 200, the joint seat 32 is additionally arranged between the air nozzle 201 and the test interface, so that the test interface is prevented from being frequently used, the service life of the test interface can be prolonged, and the test cost is reduced. And the operation of sleeving the gas passage 321 of the adapter 32 outside the gas nozzle 201 is simple, so that the operation efficiency is higher, and the test efficiency can be improved. In addition, compared with the method of replacing the testing interface or adding an adapter so that the size of the testing interface can be adapted to the air faucet 201, the connector seat 32 of the invention has lower cost, and can flexibly adjust the size of the port of the gas channel 321 so as to take the assembling performance and the sealing performance into consideration, thereby improving the testing efficiency and reducing the testing cost.
Further, a port of the gas passage 321 for connecting with the test interface is provided with a gas connector (not shown in the figure), and the gas connector and the test interface of the leak detector 2 are connected through a gas pipe (not shown in the figure) so as to communicate the port of the gas passage 321 with the test interface. The air passage 321 is used for sleeving one end of the air faucet and extends along the left-right direction.
In order to ensure that the pressure sensor 200 does not shake during testing, the device 100 for testing tightness of a pressure sensor of the present invention further includes a pressing block 4, wherein the pressing block 4 is movably disposed on the rack 1 in the up-down direction and is correspondingly disposed above the receiving groove 312, so as to press down on the upper end surface of the housing of the pressure sensor 200 to be tested, thereby stabilizing the pressure sensor 200 to be tested.
For improving efficiency of software testing, it is provided with a plurality ofly to detect structure group 3, and a plurality ofly detect structure group 3 and include first detection structure group and second detection structure group at least, and first detection structure group and second detection structure group switch and are used for detecting and loading pressure sensor 200. In a specific operation, when the first detection structure group is used for performing the tightness test of the pressure sensor 200, the second detection structure group is used for loading the pressure sensor 200, so that the detection is performed alternately, the standby time of the leak detector 2 can be shortened, and the test efficiency is improved.
The first detection structure group and the second detection structure group can be respectively arranged only one or more, and can be specifically adjusted according to the productivity of a production line, so that the utilization rate of the leak detector 2 is the highest. Preferably, in this embodiment, the first detection structure group and the second detection structure group are respectively provided with one, and the leak detector 2 is alternately matched with the first detection structure group or the second detection structure group, so as to improve the utilization rate of the detector, the first detection structure group, and the second detection structure group, and save the test cost.
In need of description, in an embodiment, when a plurality of detection structure groups 3 are provided, a plurality of pressing blocks 4 are provided corresponding to the accommodating grooves of the plurality of detection structure groups 3; in this embodiment, when the detection structure group 3 is provided with a plurality of detection structure groups, only one pressing block 4 is provided, and the pressing block 4 can be switched over and moved above the accommodating grooves 312 of the plurality of detection structure groups 3. Specifically, referring to fig. 2, the first detection structure group 3 and the second detection structure group 3 share the pressing block 4, and the pressing block 4 is switchable above the accommodating groove 312 of the first detection structure group 3 and the second detection structure group 3. Thus, when the pressing block 4 moves to the position above the first detection structure group 3, the position above the second detection structure group 3 is not shielded, so that the pressure sensor 200 can be conveniently loaded.
Note that, when the plurality of detection structure groups 3 are arranged in different ways, the movement paths of the pressure blocks 4 are provided correspondingly. In this embodiment, the first detection structure group 3 and the second detection structure group 3 are symmetrically arranged along the axis extending in the front-back direction, so that the mounting seat 31 in the first detection structure group 3 is disposed close to the mounting seat 31 in the second detection structure group 3, the moving stroke of the pressing block 4 is shortened, and the test efficiency is improved.
Further, the device 100 for testing the tightness of the pressure sensor further comprises a briquetting driving assembly to replace manual operation, so that the automation degree and the testing efficiency are improved. The present invention is not limited to the specific structure of the briquetting driving assembly, and in an embodiment, the briquetting 4 is moved up and down and left and right by the screw nut mechanism and the driving motor, in this embodiment, the briquetting driving assembly includes a first cylinder 62, a connecting frame 63, a first linear guide rail structure 64 and a second cylinder 65, a first guide rod of the first cylinder 62 is telescopically arranged up and down, one of a first cylinder body and a first guide rod of the first cylinder 62 is arranged on the briquetting 4, and the other is arranged on the connecting frame 63; the first linear guide rail structure 64 comprises a first guide rail extending in the left-right direction and a first sliding table slidably arranged on the first guide rail, one of the first guide rail and the first sliding table is arranged on the upper end surface of the rack 1, and the other one of the first guide rail and the first sliding table is arranged on the connecting frame 63; the guide rod of the second cylinder 65 can be arranged in a telescopic manner along the left-right direction, one of the second cylinder body and the second guide rod of the second cylinder 65 is arranged on the upper end surface of the rack 1, and the other is arranged on the connecting frame 63.
Preferably, referring to fig. 2, a first cylinder body of the first cylinder 62 is provided to the link frame 63, a first guide rod is connected to the pressing block 4, a first guide rail is provided to the upper end surface of the table frame 1, the first slide table is connected to the link frame 63, a second cylinder body of the second cylinder 65 is provided to the upper end surface of the table frame 1, and a second guide rod is connected to the link frame 63. The driving assembly of the invention has lower cost so as to reduce the testing cost.
In addition, the test efficiency is further improved, in each detection structure group 3 of the pressure sensor sealing performance test apparatus 100 of the present invention, a plurality of the mounting seats 31 are provided at intervals in the front-rear direction, a plurality of the joint seats 32 are provided correspondingly, and the plurality of the joint seats 32 can move in the left-right direction.
Correspondingly, a plurality of pressing blocks 4 are arranged, and the plurality of pressing blocks 4 are arranged on the first support frame 61 at intervals in the front-back direction. In another embodiment of the present invention, only one pressing block 4 is provided, and the pressing block 4 includes a connecting portion extending in the front-rear direction, and a plurality of crimping portions provided on a lower end surface of the connecting portion and spaced in the front-rear direction.
Correspondingly, in the present embodiment, the first guide rod of the first cylinder 62 is connected to the first support frame 61. Preferably, in order to drive the first support frame 61 to move in the left-right direction in a balanced manner, two first cylinders 62 are provided, two first cylinders 62 are respectively provided at two ends of the first support frame 61 in the front-back direction, two connecting frames 63 are provided corresponding to the two first cylinders 62, and two first linear guide structures 64 are provided corresponding to the two connecting frames 63. Preferably, the first cylinder bodies of the two first cylinders 62 are fixedly connected through a second supporting frame 66, and both ends of the second supporting frame 66 are mounted on the two connecting frames 63.
The second air cylinder 65 may be provided in two corresponding to the two connecting frames 63, or in this embodiment, the second air cylinder 65 may be provided in one, and the second guide rod of the second air cylinder 65 is connected to one of the connecting frames 63.
When the third cylinder 72 drives the connecting frame 63 to move in the left-right direction, the pressing block 4 can be positioned above the accommodating groove 312 in each detecting structure group 3. In the device 100 for testing the sealing performance of the pressure sensor of the present invention, the upper end surface of the rack 1 is provided with the first proximity switch 5 corresponding to the left and right sides of the connecting frame 63, respectively, so as to limit the moving stroke of the connecting frame 63 in the left and right directions. During specific operation, when the connecting frame 63 moves leftwards or rightwards until the pressing block 4 is positioned above the accommodating groove 312, the first proximity switch 5 controls the third air cylinder 72 to stop driving, so that the automatic positioning of the pressing block 4 is realized, and the automation degree of the testing device is improved.
In addition, the pressure sensor tightness testing device 100 of the present invention further includes a socket driving assembly to further improve the degree of automation. The present invention is not limited to the specific structure of the joint base driving assembly, and in an embodiment, the joint base 32 is moved by a screw-nut mechanism and a driving motor. In this embodiment, the joint seat driving assembly includes a second linear guide rail structure 71 and a third air cylinder 72, the second linear guide rail structure 71 includes a second guide rail extending in the left-right direction and a second sliding table slidably disposed on the second guide rail, one of the second guide rail and the second sliding table is disposed on the upper end surface of the table frame 1, and the other is connected to the joint seat 32; the third guide rod of the third air cylinder 72 is movably arranged along the left-right direction, one of the third cylinder body and the third guide rod of the third air cylinder 72 is arranged on the joint seat 32, and the other is arranged on the upper end surface of the stand 1.
When the plurality of joint seats 32 are provided corresponding to the mounting seat 31, in this embodiment, the pressure sensor tightness testing device 100 further includes a third supporting frame 73, and the plurality of joint seats 32 are provided at the third supporting frame 73 along the front-rear direction at intervals.
Correspondingly, in this embodiment, the second guide rail is disposed on the upper end surface of the table frame 1, the second sliding table is disposed on the third support frame 73, the third cylinder of the third cylinder 72 is disposed on the upper end surface of the table frame 1, and the third guide rod is disposed on the third support frame 73.
Preferably, the second linear guide structure 71 is provided in plurality, so as to drive the plurality of joint blocks 32 to move more evenly and stably. Specifically, a plurality of second linear guide structures 71 are provided on the upper end surface of the gantry 1 at intervals in the front-rear direction, and a plurality of third sliding tables are connected to the third support frame 73. In the present embodiment, two second linear guide structures 71 are provided.
In order to further reduce the testing cost, in the pressure sensor tightness testing device 100 of the present invention, the stage 1 includes a stage body 11 and a substrate 12 detachably disposed on the upper end surface of the stage body 11; the leak detector 2 is arranged on the rack body 11; the detection structure group 3 is provided on the substrate 12. The detection structure group 3 on different substrates 12 is adapted to the pressure sensors 200 with different shells and/or air nozzles 201, and the tightness of different pressure sensors 200 can be tested by the pressure sensor tightness testing device 100 of the invention by replacing the substrates 12, so that the comprehensive testing cost is reduced. Preferably, the base plate 12 is detachably mounted to the upper end surface of the stage body 11 by a screw fastener.
Specifically, in this embodiment, the detection structure group 3, the pressing block 4, the first support frame 61, the third support frame 73, the connecting frame 63, the first linear guide structure 64, the first cylinder 62, the second cylinder 65, the second linear guide structure 71, the third cylinder 72, and the first proximity switch 5 are all disposed on the substrate 12 and are adaptively adjusted according to the housing of the different pressure sensors 200 and the air faucet 201. The third cylinder 72 is disposed on the lower end surface of the substrate 12 to reduce the area of the substrate 12. Specifically, referring to fig. 3, the third cylinder of the third cylinder 72 is disposed on the lower end surface of the base plate 12, a guide hole is formed on the base plate 12 corresponding to the third support frame 73, and the pressure sensor tightness testing device 100 further includes a connecting plate 74 extending in the vertical direction, an upper end of the connecting plate 74 is detachably connected to the third support frame 73, and a lower end of the connecting plate is connected to the third guide rod. Preferably, the upper end of the link plate 74 is connected to the third support bracket 73 by a threaded fastener.
In the device 100 for testing the tightness of the pressure sensor of the present invention, the upper end surface of the rack body 11 is further provided with a second proximity switch 8, and the second proximity switch 8 is arranged corresponding to the substrate 12 to provide a signal to an operator that the substrate 12 is mounted in place. Preferably, the second proximity switch 8 is provided in plurality corresponding to the circumferential direction of the substrate 12 to control the substrate 12 to be horizontally mounted on the upper end surface of the stage body 11.
The above description is only a preferred embodiment of the present invention, and is not intended to limit the scope of the present invention, and all modifications and equivalents of the present invention, which are made by the contents of the present specification and the accompanying drawings, or directly/indirectly applied to other related technical fields, are included in the scope of the present invention.

Claims (10)

1. The utility model provides a pressure sensor leakproofness testing arrangement, pressure sensor include the shell and locate the shell side and communicate in the air cock of the inner chamber of shell, its characterized in that, pressure sensor leakproofness testing arrangement includes:
a rack;
the leak detector is arranged on the rack; and the number of the first and second groups,
the detection structure group is arranged on the upper end face of the rack and comprises a mounting seat and a joint seat which are arranged at intervals in the left-right direction, the mounting seat is provided with a detection side face facing the joint seat, the upper end face of the mounting seat is provided with a containing groove, the containing groove is used for placing a shell of the pressure sensor and enabling the air tap to protrude out of the detection side face, the joint seat is provided with a gas channel, one port of the gas channel is formed on the side face, facing the detection side face, of the joint seat, and the other port of the gas channel is connected to a test interface of the leak detector;
the connector base is provided with a moving stroke which is close to or far away from the mounting base along the left-right direction, and can be close to the mounting base so that the port of the gas channel is sleeved on the gas nozzle to be communicated with the gas nozzle and the test interface.
2. The apparatus for testing the sealability of a pressure sensor according to claim 1, wherein the detection structure sets are provided in plurality, and the plurality of detection structure sets include at least a first detection structure set and a second detection structure set, and the first detection structure set and the second detection structure set are switched to detect and load the pressure sensor.
3. The device for testing the tightness of a pressure sensor according to claim 2, wherein in each of the detection structure groups, a plurality of the mounting seats are arranged at intervals in the front-back direction, a plurality of the joint seats are correspondingly arranged, and the plurality of the joint seats can move in the left-right direction.
4. The device for testing the tightness of a pressure sensor according to claim 1, further comprising a pressing block, wherein the pressing block is movably disposed on the rack in an up-down direction and is correspondingly disposed above the accommodating groove, so as to be pressed down against an upper end surface of a housing of the pressure sensor to be tested.
5. The pressure sensor tightness testing device according to claim 4, wherein the detection structure group is provided in plurality;
the pressing block can be switched and moved above the accommodating grooves of the plurality of detection structure groups.
6. The device for testing the tightness of the pressure sensor according to claim 5, wherein two detection structure groups are arranged, and the two detection structure groups are arranged along the left-right direction;
pressure sensor leakproofness testing arrangement still includes briquetting drive assembly, briquetting drive assembly includes:
the guide rod of the first air cylinder can be arranged in a telescopic manner along the vertical direction, and one of the first cylinder body and the first guide rod of the first air cylinder is arranged on the pressing block;
the other one of the first cylinder body and the first guide rod of the first cylinder is arranged on the connecting frame;
the first linear guide rail structure comprises a first guide rail extending along the left-right direction and a first sliding table arranged on the first guide rail in a sliding manner, one of the first guide rail and the first sliding table is arranged on the upper end surface of the rack, and the other of the first guide rail and the first sliding table is arranged on the connecting rack; and the number of the first and second groups,
the guide rod of the second cylinder can be arranged in a telescopic mode in the left-right direction, one of the second cylinder body and the second guide rod of the second cylinder is arranged on the upper end face of the rack, and the other guide rod of the second cylinder is arranged on the connecting frame.
7. The apparatus for testing the sealability of a pressure sensor according to claim 6, wherein the upper end surface of the stand is provided with first proximity switches corresponding to the left and right sides of the connection frame, respectively, so as to limit the movement stroke of the connection frame in the left and right directions.
8. The pressure sensor leak tightness testing device of claim 1 further comprising a joint seat drive assembly, said joint seat drive assembly comprising:
the third linear guide rail structure comprises a third guide rail extending in the left-right direction and a third sliding table slidably arranged on the third guide rail, one of the third guide rail and the third sliding table is arranged on the upper end surface of the rack, and the other one of the third guide rail and the third sliding table is connected to the joint seat; and the number of the first and second groups,
and the guide rod of the third cylinder can move left and right, one of the third cylinder body and the third guide rod of the third cylinder is arranged on the joint seat, and the other is arranged on the upper end surface of the rack.
9. The pressure sensor tightness testing device according to claim 1, wherein the stage includes a stage body and a base plate detachably provided to an upper end surface of the stage body;
the leak detector is arranged on the rack body;
the detection structure is arranged on the substrate.
10. The apparatus for testing tightness of a pressure sensor according to claim 9, wherein the upper end surface of the stage body is further provided with a second proximity switch, and the second proximity switch is disposed corresponding to the substrate.
CN202110488701.4A 2021-04-30 2021-04-30 Pressure sensor leakproofness testing arrangement Pending CN113188730A (en)

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Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109029868A (en) * 2018-07-16 2018-12-18 苏州劲翔电子科技有限公司 Multistation air-tightness integral test system
CN212513507U (en) * 2020-03-14 2021-02-09 深圳聚德寿科技有限公司 Pressure sensor leakage testing device
CN212844168U (en) * 2020-08-20 2021-03-30 深圳安特医疗股份有限公司 Pressure sensor test fixture

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109029868A (en) * 2018-07-16 2018-12-18 苏州劲翔电子科技有限公司 Multistation air-tightness integral test system
CN212513507U (en) * 2020-03-14 2021-02-09 深圳聚德寿科技有限公司 Pressure sensor leakage testing device
CN212844168U (en) * 2020-08-20 2021-03-30 深圳安特医疗股份有限公司 Pressure sensor test fixture

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Application publication date: 20210730