CN113186493B - Preparation method of diamond/metal carbide composite wear-resistant coating - Google Patents

Preparation method of diamond/metal carbide composite wear-resistant coating Download PDF

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CN113186493B
CN113186493B CN202110493534.2A CN202110493534A CN113186493B CN 113186493 B CN113186493 B CN 113186493B CN 202110493534 A CN202110493534 A CN 202110493534A CN 113186493 B CN113186493 B CN 113186493B
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diamond
workpiece
metal
coating
diamond particles
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CN113186493A (en
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黑鸿君
于盛旺
高洁
申艳艳
马永
周兵
吴艳霞
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Taiyuan University of Technology
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    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
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    • C23C14/06Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
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    • C23C16/22Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
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Abstract

The invention discloses a method for preparing a diamond/metal carbide composite wear-resistant coating, which comprises the steps of uniformly adhering diamond particles to the surface of a workpiece by using an organic binder, then adopting a dual-glow plasma surface alloying method, selecting a metal capable of reacting with carbon to generate carbide as a target material, removing the binder, preparing a diamond/metal infiltration coating on the surface of the workpiece adhered with the diamond particles, then exposing the diamond particles on the surface of the infiltration coating by means of dual-glow ion bombardment treatment, finally growing the exposed diamond particles by using a chemical vapor deposition method, converting the metal in the infiltration coating into metal carbide, and finally forming the diamond/metal carbide composite wear-resistant coating. The interface between the composite wear-resistant coating and the workpiece is metallurgically bonded and the components are distributed in a gradient manner, so that the excellent performances of high hardness, good wear resistance, good oxidation resistance of metal carbide and the like of diamond are integrated, and the bonding strength and the wear resistance between the coating and the alloy workpiece are greatly improved.

Description

Preparation method of diamond/metal carbide composite wear-resistant coating
Technical Field
The invention relates to a preparation method of a diamond/metal carbide composite wear-resistant coating, belonging to the technical field of surface wear resistance strengthening.
Background
In industrial production, wear failure is one of the main failure modes of mechanical equipment and parts, which not only causes a great deal of material and part waste, but also is likely to directly cause serious economic loss and even casualties. The surface morphology and properties of the material have a significant impact on the wear resistance of the workpiece, and various surface strengthening techniques, such as applying a wear resistant coating and increasing the surface wear resistance of the workpiece, are commonly used.
The chemical vapor deposition technology is one of the hot methods for studying the wear resistance and the strengthening of the surface. However, because of the large thermal expansion coefficient between the diamond and the metal material for manufacturing the workpiece, the prepared diamond coating and the workpiece can generate high interface stress, and cracks and even peeling failure are easily generated along the interface in the using process; in addition, the diamond has the defects of poor toughness, easy oxidation and the like, and the service performance of the coating is also reduced. Chinese patent application No. 201610687650.7 proposes a diamond/metal carbide composite coating and a preparation method and application thereof, wherein a micron-crystal diamond coating and a nano-crystal diamond coating are sequentially deposited on the surface of a substrate (at least once), and then a metal layer is deposited on the surface of the diamond by a vacuum hot-dip method and is subjected to heat treatment to prepare the diamond/metal carbide composite coating; however, the problem of interfacial stress due to the difference in thermal expansion coefficient between the coating/workpiece materials in this invention still remains; the metal carbide layer is only present on the surface layer of the nanocrystalline diamond coating on the outermost side, and is easy to wear and lose efficacy preferentially in the use process. In addition, the process parameters of the vacuum hot-dip metal layer are required to be controlled with high precision, and if the prepared metal carbide layer is thin, the metal carbide layer is easy to wear and lose efficacy in the use process; on the contrary, if the prepared metal layer is thick, the metal is not completely carbonized after heat treatment, and a soft metal layer remains on the surface layer of the outermost side of the prepared coating, which affects the wear resistance of the coating.
In addition to the above methods, a layer of composite wear-resistant coating containing diamond particles is formed on the surface of a workpiece by using methods such as electroplating, chemical plating, brazing, plasma surfacing, laser cladding and the like, and the method is one of the surface wear-resistant strengthening methods which are widely applied in the industry at present. However, the electroplating and chemical plating methods only mechanically embed diamond particles in the bonding phase of the coating, the boundary limit between the diamond and the bonding phase is obvious, high-strength chemical bonding cannot be formed, and wear-resistant particles are easy to pull out and fall off in the using process, so that the coating fails; in the brazing method, diamond particles are mostly spread on the surface of a workpiece in a throwing mode, the uniformity is difficult to ensure, and the used diamond particles are generally large and cannot meet the requirement of high-precision processing; in the plasma surfacing and laser cladding methods, nickel-based, cobalt-based, copper-based or silver-based metal powder is mostly used as a binder phase, and the metal cannot react with diamond to form high-strength chemical bonding and easily forms non-wear-resistant soft particles in the prepared coating. The Chinese patent application number 201710104441.X provides a multilayer brazed diamond tool and a preparation method thereof, wherein the multilayer brazed diamond tool is prepared by compounding paste mixed by diamond particles, framework particles, alloy brazing filler metal powder and an adhesive on the surface of a substrate, heating and curing the paste, and then using a vacuum brazing method. However, the alloy solder adopted by the invention is one or more of silver-based, copper-based and nickel-based active solders, the main components of the alloy solder are metal (silver, copper or nickel), metal solid solution and a small amount of carbide, the metal in the solder has low hardness and poor thermal stability, and soft particles or oxidation failure is easily formed in the using process; in addition, the prepared multilayer diamond composite layer contains a large number of micro air holes, which are easy to become stress concentration points in the use process, so that the wear resistance of the coating is reduced.
In summary, the existing preparation methods for preparing diamond coatings or diamond composite wear-resistant coatings have one or more of the following problems: (1) interface stress concentration caused by the difference of thermal expansion coefficients of the coating and the substrate; (2) the diamond particles are only physically embedded in the metal phase and are easy to fall off; (3) a soft metallic phase is present.
Disclosure of Invention
The invention aims to provide a preparation method of a diamond/metal carbide composite wear-resistant coating with high bonding strength.
The principle of the invention is as follows: firstly, a vibrating screen is utilized to be thrown on the surface of a workpiece coated with an organic binder, so that the uniformity of diamond particle distribution in a coating can be ensured; then, a dual-glow plasma surface alloying method is utilized to make metal diffuse and permeate into the surface layer of the metal workpiece, and a metallurgically bonded metal gradient diffusion structure interface is formed between the coating and the surface of the workpiece, so that the stress problem caused by interface mutation can be avoided, and a diamond/metal diffusion coating with high bonding strength is obtained; then, removing the metal covering the surface of the diamond particles by using double glow ion bombardment treatment to expose the surface of the diamond particles to provide nucleation points for diamond deposition; finally, the chemical vapor deposition method is utilized to grow the exposed diamond particles, simultaneously, carbon element in the atmosphere diffuses and enters the diffusion layer, soft metal is converted into carbide with high hardness and good wear resistance, the metal gradient diffusion structure interface is converted into the metal carbide gradient diffusion structure interface, and high-strength metallurgical bonding is kept, so that the diamond/metal carbide composite wear-resistant coating with high bonding strength and high wear resistance is obtained. The composite wear-resistant coating prepared by the invention integrates the excellent performances of high hardness, good wear resistance, metal carbide oxidation resistance and the like of diamond, and meets the application requirement of wear resistance strengthening of the surface of a workpiece.
The invention provides a preparation method of a diamond/metal carbide composite wear-resistant coating, which comprises the following steps of firstly, uniformly adhering diamond particles on the surface of a workpiece material by using an organic binder; then adopting a dual-glow plasma surface alloying method, selecting metal capable of reacting with carbon to generate carbide as a target material, removing the binder and preparing a diamond/metal infiltration coating on the surface of the workpiece adhered with diamond powder; then exposing the diamond particles on the surface layer of the diffusion coating to the outside by means of double glow ion bombardment treatment; finally, the chemical vapor deposition method is utilized to grow the exposed diamond particles, and the metal in the diffusion coating is converted into metal carbide, and finally the diamond/metal carbide composite wear-resistant coating with high bonding strength and high wear resistance is formed on the surface of the workpiece.
The preparation method of the diamond/metal carbide composite wear-resistant coating provided by the invention specifically comprises the following steps:
(1) adhering diamond particles: cleaning the surface of a workpiece, removing dirt and an oxide film on the surface, uniformly coating an organic binder on the surface of the workpiece, then throwing diamond particles on the surface of the workpiece coated with the organic binder by using a vibrating screen to uniformly adhere the diamond particles on the surface of the workpiece, and finally drying in a drying oven at 80-200 ℃;
the grain size range of the diamond particles is 1 nm-100 mu m.
The material for manufacturing the workpiece comprises one of hard alloy, stainless steel, titanium or titanium alloy, magnesium or magnesium alloy, aluminum or aluminum alloy, copper or copper alloy and high-entropy alloy.
(2) Preparing a diamond/metal infiltration coating: placing a workpiece with diamond particles adhered on the surface on a sample table of a dual-glow plasma surface alloying device, selecting metal capable of reacting with carbon to generate carbide as a target material, controlling the distance between the upper surface of the workpiece and the lower surface of the target material to be 10-40 mm, introducing argon when the back bottom of the device is vacuumized to be below 0.01 Pa, adjusting the gas flow to be 20-150 sccm, adjusting the pressure value in the device to be 30-350 Pa, turning on a source electrode and a cathode power supply, adjusting the cathode voltage to be 200-600V, adjusting the source electrode voltage to be higher than the cathode voltage by 100-400V, maintaining the workpiece temperature at 600-1200 ℃, performing metal diffusion coating treatment on the surface of the workpiece for 0.5-3 h, cooling along with a furnace after the diffusion coating is completed, and obtaining a diamond/metal diffusion coating layer on the surface of the workpiece;
the metal capable of reacting with carbon to generate carbide comprises one or more of W, Mo, Ti, Ta, Cr, Hf, Nb, Zr, Re and V.
(3) And (3) double glow ion bombardment treatment: keeping the flow of introduced argon unchanged after the diffusion coating is finished, reversing the voltage values of the source electrode and the cathode electrode, namely adjusting the voltage of the source electrode to 200-600V, simultaneously adjusting the voltage of the cathode electrode to be higher than the voltage of the source electrode by 100-400V, controlling the temperature of a workpiece to be still kept at 600-1200 ℃, carrying out dual-glow ion bombardment treatment on the prepared diffusion coating for 1-60 min, removing metal covering the surface of the surface layer diamond particles, and cooling along with a furnace after the treatment is finished to obtain the diamond/metal diffusion coating with the surface layer diamond particles partially exposed outside;
(4) preparing the diamond/metal carbide composite wear-resistant coating: adopting a chemical vapor deposition method to take mixed gas consisting of hydrogen and carbon-containing gas or mixed gas consisting of hydrogen, argon and carbon-containing gas as a precursor, growing diamond particles exposed outside the surface of the diffusion coating, simultaneously converting metal in the diffusion coating into metal carbide, and obtaining a diamond/metal carbide composite wear-resistant coating on the surface of a workpiece;
the carbon-containing gas comprises CH4、C2H2、C3H8One kind of (1).
The chemical vapor deposition method comprises one of a hot wire chemical vapor deposition method, a direct current arc plasma jet chemical vapor deposition method and a microwave plasma chemical vapor deposition method.
The invention has the beneficial effects that:
(1) the diamond/metal infiltration coating prepared by the double-glow plasma surface alloying method forms a metal gradient diffusion structure interface with the surface of a workpiece, and is converted into a metal carbide gradient diffusion structure interface after chemical vapor deposition treatment, so that the interface stress caused by the difference of thermal expansion coefficients can be greatly reduced, and the bonding performance of the coating is improved.
(2) In the process of alloying the surface of the double-glow plasma, the surface of the diamond particles is contacted with metal and has diffusion reaction to form firm chemical bonding; in addition, the chemical vapor deposition treatment enables the exposed diamond particles to grow up to form a gourd-shaped mosaic structure, so that the diamond particles are firmly pinned in the friction process, and the phenomenon that the wear-resistant particles are pulled out and fall off in the abrasion process is greatly reduced.
(3) The metal is uniformly plated in the gaps among the diamond particles, and is converted into metal carbide with stable performance, difficult oxidation and strong wear resistance in the chemical vapor deposition process, so that the thermal stability and the wear resistance of the coating are improved.
(4) The surface of the wear-resistant coating prepared by the invention is provided with the convex and discontinuous diamond particles, and the structure can preferentially contact the diamond particles with good friction and wear resistance when in use, so that the coating is ensured to have better wear resistance and simultaneously the metal carbide is protected from being worn; in addition, for the wear-resistant strengthening coating applied to the surface of the machining tool, the protruding exposed diamond particles can play a role in increasing the cutting force, and the fluctuation of the diamond particles on the surface and the particle gaps can play a role in circulating cooling liquid for heat dissipation and chip removal, so that the improvement of the surface quality of the processed material is facilitated.
(5) The wear-resistant composite coating prepared by the invention has good process repeatability and simple operation, and can be widely applied to surface modification of workpieces such as hard alloy, titanium alloy, magnesium alloy, aluminum alloy, stainless steel and the like, so that the application range and the performance level of the wear-resistant composite coating are effectively improved.
Drawings
FIG. 1 is a cross-sectional view of a workpiece having diamond particles adhered to the surface thereof according to example 3 of the present invention;
FIG. 2 is a cross-sectional view of a workpiece after a diamond/W diffusion coating is formed on the surface of the workpiece in example 3 of the present invention;
FIG. 3 is a cross-sectional view of a diamond/W plated layer after a dual glow ion bombardment treatment in example 3 of the present invention;
FIG. 4 is a cross-sectional view of a workpiece with a diamond/WC composite wear-resistant coating prepared in example 3 of the present invention;
FIG. 5 is a photomicrograph of the surface of a workpiece with a diamond/WC composite wear-resistant coating prepared in example 3 of the invention.
In the figure: 1-workpiece, 2-diamond particles, 3-organic binder, 4-diamond/W diffusion layer, 4-1-W gradient diffusion structure interface, 5-diamond/W diffusion layer after double glow ion bombardment treatment, 6-diamond/WC composite wear-resistant coating, and 6-1-WC gradient diffusion structure interface.
Detailed Description
The present invention is further illustrated by, but is not limited to, the following examples.
Example 1
Diamond/TiC composite wear-resistant coating prepared on surface of titanium alloy workpiece
(1) Adhering diamond particles: cleaning the surface of a workpiece, removing dirt and an oxide film on the surface, then uniformly coating an organic binder on the surface of a titanium alloy workpiece, then throwing diamond particles with the grain size of 1 nm on the surface coated with the organic binder by using a vibrating screen to uniformly adhere the diamond particles on the surface of the workpiece, and finally drying in a drying oven at 80 ℃;
(2) preparing a diamond/Ti diffusion coating layer: placing a titanium alloy workpiece with diamond particles adhered on the surface on a sample table of a double-glow plasma surface alloying device, selecting metal Ti as a target material, controlling the distance between the upper surface of the workpiece and the lower surface of the target material to be 10 mm, introducing argon when the back bottom of the equipment is vacuumized to be below 0.01 Pa, controlling the gas flow to be 20 sccm, adjusting the internal gas pressure value of the equipment to be 30 Pa, turning on a source electrode and a cathode power supply, adjusting the cathode voltage to 200V, simultaneously adjusting the source electrode voltage to be higher than the cathode voltage by 400V, maintaining the workpiece temperature at 700 ℃, carrying out metal Ti diffusion coating treatment on the surface of the workpiece for 0.5 h, carrying out furnace cooling after diffusion coating is finished, and obtaining a diamond/Ti diffusion coating on the surface of the workpiece;
(3) and (3) double glow ion bombardment treatment: keeping the flow of introduced argon unchanged after the diffusion coating is finished, reversing the voltage values of the source electrode and the cathode electrode, namely adjusting the voltage of the source electrode to 200V, simultaneously adjusting the voltage of the cathode electrode to be higher than the voltage of the source electrode by 400V, controlling the temperature of a workpiece to be still kept at 700 ℃, carrying out double glow ion bombardment treatment on the workpiece with the diffusion coating for 5 min, removing metal Ti covering the surface of the diamond particles on the surface layer, and cooling the workpiece with a furnace after the treatment is finished to obtain the diamond/Ti diffusion coating with the diamond particle surface exposed outside;
(4) preparing a diamond/TiC composite wear-resistant coating: placing a titanium alloy workpiece containing a diamond/Ti diffusion coating on a base station of a microwave plasma chemical vapor deposition device, and carrying out hydrogen and CH treatment4The diamond is grown to the average grain size of about 100 nm, Ti in the diffusion coating is converted into TiC, and the diamond/TiC composite wear-resistant coating is obtained on the surface of the workpiece.
Example 2
Preparation of diamond/Ta on surface of 304 stainless steel workpiecexC composite wear-resistant coating
(1) Adhering diamond particles: cleaning the surface of a workpiece, removing dirt and an oxide film on the surface, then uniformly coating an organic binder on the surface of a 304 stainless steel workpiece, then throwing diamond particles with the grain size of 1 mu m on the surface coated with the organic binder by using a vibrating screen to uniformly adhere the diamond particles on the surface of the workpiece, and finally drying in a drying oven at 150 ℃;
(2) preparing a diamond/Ta diffusion coating layer: placing a 304 stainless steel workpiece with diamond particles adhered on the surface on a sample table of a dual-glow plasma surface alloying device, selecting metal Ta as a target material, controlling the distance between the upper surface of the workpiece and the lower surface of the target material to be 25 mm, introducing argon when the back bottom of the equipment is vacuumized to be below 0.01 Pa, controlling the gas flow to be 85 sccm, adjusting the internal pressure value of the equipment to 190 Pa, turning on a source electrode and a cathode power supply, adjusting the cathode voltage to 400V, simultaneously adjusting the source electrode voltage to be higher than the cathode voltage by 250V, maintaining the workpiece temperature at 900 ℃, performing Ta diffusion coating treatment on the surface of the workpiece for 1.5 h, cooling the workpiece along with a furnace after diffusion coating is completed, and obtaining a diamond/Ta diffusion coating on the surface of the workpiece;
(3) and (3) double glow ion bombardment treatment: and (3) keeping the flow of the introduced argon unchanged after the diffusion coating is finished, reversing the voltage values of the source electrode and the cathode electrode, namely adjusting the voltage of the source electrode to 400V, simultaneously adjusting the voltage of the cathode electrode to be higher than the voltage of the source electrode by 250V, controlling the temperature of the workpiece to be still maintained at 900 ℃, carrying out dual-glow ion bombardment treatment on the diffusion coating for 30 min, removing the metal Ta covering the surface layer of the diamond particles, and cooling along with the furnace after the treatment is finished to obtain the diamond/Ta diffusion coating with the surface of the diamond particles exposed outside.
(4) Preparation of Diamond/TaxC, compounding a wear-resistant coating: placing a 304 stainless steel workpiece containing a diamond/Ta diffusion coating on a base station of a hot wire chemical vapor deposition device, and carrying out hydrogen treatment and C treatment2H2The diamond grains are grown to an average grain size of about 20 mu m for a body, and the Ta in the diffusion coating is converted into TaxC, obtaining diamond/Ta on the surface of the workpiecexC, compounding a wear-resistant coating.
Example 3
Diamond/WC composite wear-resistant coating prepared on surface of hard alloy workpiece
(1) Adhering diamond particles: cleaning the surface of a workpiece, removing dirt and an oxide film on the surface, then uniformly coating an organic binder on the surface of a hard alloy workpiece, then throwing diamond particles with the grain size of 100 mu m on the surface coated with the organic binder by using a vibrating screen to uniformly adhere the diamond particles on the surface of the workpiece, and finally drying in a drying oven at 200 ℃;
(2) preparing a diamond/metal W diffusion coating layer: placing a hard alloy workpiece with diamond particles adhered on the surface on a sample table of a dual-glow plasma surface alloying device, selecting metal W as a target material, controlling the distance between the upper surface of the workpiece and the lower surface of the target material to be 40 mm, introducing argon when the back bottom of the equipment is vacuumized to be below 0.01 Pa, controlling the gas flow to be 150 sccm, adjusting the internal gas pressure value of the equipment to be 350 Pa, turning on a source electrode and a cathode power supply, adjusting the cathode voltage to 600V, adjusting the source electrode voltage to be higher than the cathode voltage by 100V, maintaining the workpiece temperature at 1200 ℃, carrying out metal W diffusion coating treatment on the surface of the workpiece for 3 h, carrying out furnace cooling after diffusion coating is finished, and obtaining a diamond/W diffusion coating on the surface of the workpiece;
(3) and (3) double glow ion bombardment treatment: and (3) keeping the flow of the introduced argon unchanged after the diffusion coating is finished, reversing the voltage values of the source electrode and the cathode electrode, namely adjusting the voltage of the source electrode to 600V, simultaneously adjusting the voltage of the cathode electrode to be higher than the voltage of the source electrode by 100V, controlling the temperature of the workpiece to be 1200 ℃, carrying out dual-glow ion bombardment treatment on the diffusion coating for 60 min, removing the metal W covering the surface of the surface layer diamond particles, and cooling along with the furnace after the treatment is finished to obtain the diamond/W diffusion coating with the surface of the diamond particles exposed outside.
(4) Preparing a diamond/WC composite wear-resistant coating: placing the hard alloy workpiece containing the diamond/W diffusion coating on a base station of a direct current arc plasma jet chemical vapor deposition device, and adding argon, hydrogen and C3H8The diamond is grown to an average grain size of about 500 mu m for a body, W in the diffusion coating is converted into WC, and the diamond/WC composite wear-resistant coating is obtained on the surface of a workpiece.
As can be seen from fig. 5, example 3 produced a diamond/WC composite wear-resistant coating. The structure is as follows: the diamond particles are uniformly distributed, and the protrusions are exposed on the surface of the coating, so that the fluctuation of the surface of the coating is obvious. The structure can preferentially contact diamond particles with better friction and wear resistance in the using process, so that the coating is ensured to have better wear resistance, and simultaneously, the metal carbide is protected from being worn; in addition, for the wear-resistant strengthening coating applied to the surface of a machining tool, the protruding exposed diamond particles can play a role in increasing the cutting force, and the fluctuation of the surface of the coating can play a role in circulating cooling liquid for heat dissipation and chip removal, so that the improvement of the surface quality of a processed material is facilitated.

Claims (7)

1. A preparation method of a diamond/metal carbide composite wear-resistant coating is characterized by comprising the following steps: firstly, uniformly adhering diamond particles on the surface of a workpiece material by using an organic binder; then adopting a dual-glow plasma surface alloying method, selecting metal capable of reacting with carbon to generate carbide as a target material, removing the binder and preparing a diamond/metal infiltration coating on the surface of the workpiece adhered with diamond powder; then exposing the diamond particles on the surface layer of the diffusion coating to the outside by means of double glow ion bombardment treatment; finally, the chemical vapor deposition method is utilized to grow the exposed diamond particles, and the metal in the diffusion coating is converted into metal carbide, and finally the diamond/metal carbide composite wear-resistant coating is obtained.
2. The method for preparing the diamond/metal carbide composite wear-resistant coating according to claim 1, which is characterized by comprising the following steps:
(1) adhering diamond particles: cleaning the surface of a workpiece, removing dirt and an oxide film on the surface, uniformly coating an organic binder on the surface of the workpiece, then throwing diamond particles on the surface of the workpiece coated with the organic binder by using a vibrating screen to uniformly adhere the diamond particles on the surface of the workpiece, and finally drying in a drying oven at 80-200 ℃;
(2) preparing a diamond/metal infiltration coating: placing a workpiece with diamond particles adhered to the surface on a sample table of a dual-glow plasma surface alloying device, selecting metal capable of reacting with carbon to generate carbide as a target material, controlling the distance between the upper surface of the workpiece and the lower surface of the target material to be 10-40 mm, introducing argon when the back bottom of the device is vacuumized to be below 0.01 Pa, adjusting the gas flow to be 20-150 sccm, adjusting the pressure value in the device to be 30-350 Pa, turning on a source electrode and a cathode power supply, adjusting the cathode voltage to be 200-600V, adjusting the source electrode voltage to be higher than the cathode voltage by 100-400V, maintaining the workpiece temperature at 600-1200 ℃, performing metal diffusion coating treatment on the surface of the workpiece for 0.5-3 h, cooling along with a furnace after the diffusion coating is completed, and obtaining a diamond/metal diffusion coating layer on the surface of the workpiece;
(3) and (3) double glow ion bombardment treatment: keeping the flow of introduced argon unchanged after the diffusion coating is finished, reversing the voltage values of the source electrode and the cathode electrode, namely adjusting the voltage of the source electrode to 200-600V, simultaneously adjusting the voltage of the cathode electrode to be higher than the voltage of the source electrode by 100-400V, controlling the temperature of a workpiece to be still kept at 600-1200 ℃, carrying out dual-glow ion bombardment treatment on the prepared diffusion coating for 1-60 min, removing metal covering the surface of the surface layer diamond particles, and cooling along with a furnace after the treatment is finished to obtain the diamond/metal diffusion coating with the surface layer diamond particles partially exposed outside;
(4) preparing the diamond/metal carbide composite wear-resistant coating: adopting chemical vapor deposition method to take mixed gas composed of hydrogen and carbon-containing gas or mixed gas composed of hydrogen, argon and carbon-containing gas as precursor, growing diamond particles exposed outside the surface of the diffusion coating, simultaneously converting metal in the diffusion coating into metal carbide, and obtaining the diamond/metal carbide composite wear-resistant coating on the surface of the workpiece.
3. The method of preparing a diamond/metal carbide composite wear resistant coating according to claim 2, wherein: the workpiece comprises one of hard alloy, stainless steel, titanium or titanium alloy, magnesium or magnesium alloy, aluminum or aluminum alloy, copper or copper alloy and high-entropy alloy.
4. The method of preparing a diamond/metal carbide composite wear resistant coating according to claim 2, wherein: the grain size range of the diamond particles is 1 nm-100 mu m.
5. The method of preparing a diamond/metal carbide composite wear resistant coating according to claim 2, wherein: the metal capable of reacting with carbon to generate carbide comprises one or more of W, Mo, Ti, Ta, Cr, Hf, Nb, Zr, Re and V.
6. The method of preparing a diamond/metal carbide composite wear resistant coating according to claim 2, wherein: the chemical vapor deposition method comprises one of a hot wire chemical vapor deposition method, a direct current arc plasma jet chemical vapor deposition method and a microwave plasma chemical vapor deposition method.
7. The method of preparing a diamond/metal carbide composite wear resistant coating according to claim 2, wherein: the carbon-containing gas comprises CH4、C2H2、C3H8One kind of (1).
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