CN113181831A - Non-metallic material powder and preparation method thereof - Google Patents
Non-metallic material powder and preparation method thereof Download PDFInfo
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- CN113181831A CN113181831A CN202110486263.8A CN202110486263A CN113181831A CN 113181831 A CN113181831 A CN 113181831A CN 202110486263 A CN202110486263 A CN 202110486263A CN 113181831 A CN113181831 A CN 113181831A
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- 239000000843 powder Substances 0.000 title claims abstract description 135
- 238000002360 preparation method Methods 0.000 title claims abstract description 53
- 239000007769 metal material Substances 0.000 title claims abstract description 20
- 229910052755 nonmetal Inorganic materials 0.000 claims abstract description 73
- 238000007664 blowing Methods 0.000 claims abstract description 56
- 230000008018 melting Effects 0.000 claims abstract description 42
- 238000002844 melting Methods 0.000 claims abstract description 42
- 239000012768 molten material Substances 0.000 claims abstract description 37
- 238000000034 method Methods 0.000 claims abstract description 28
- 239000002245 particle Substances 0.000 claims abstract description 27
- 238000009833 condensation Methods 0.000 claims abstract description 16
- 230000005494 condensation Effects 0.000 claims abstract description 16
- 230000001681 protective effect Effects 0.000 claims abstract description 12
- 238000004880 explosion Methods 0.000 claims abstract description 8
- 238000004519 manufacturing process Methods 0.000 claims description 9
- 230000001788 irregular Effects 0.000 claims description 4
- 238000010894 electron beam technology Methods 0.000 claims description 3
- 239000007789 gas Substances 0.000 description 100
- 230000007246 mechanism Effects 0.000 description 15
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 7
- 230000008569 process Effects 0.000 description 7
- 230000009471 action Effects 0.000 description 6
- 238000001816 cooling Methods 0.000 description 6
- 239000002994 raw material Substances 0.000 description 6
- 238000003860 storage Methods 0.000 description 6
- 239000000463 material Substances 0.000 description 5
- 238000012545 processing Methods 0.000 description 5
- 239000011863 silicon-based powder Substances 0.000 description 5
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 4
- 239000007788 liquid Substances 0.000 description 4
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- 239000007787 solid Substances 0.000 description 4
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- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 230000002411 adverse Effects 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 2
- 238000000498 ball milling Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 2
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- 239000000615 nonconductor Substances 0.000 description 2
- 238000012216 screening Methods 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 1
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- 150000002500 ions Chemical class 0.000 description 1
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- 238000000465 moulding Methods 0.000 description 1
- 239000011858 nanopowder Substances 0.000 description 1
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- 238000007254 oxidation reaction Methods 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
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- 238000004321 preservation Methods 0.000 description 1
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- 238000004064 recycling Methods 0.000 description 1
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- 238000010008 shearing Methods 0.000 description 1
- 229910000077 silane Inorganic materials 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 239000002910 solid waste Substances 0.000 description 1
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J2/00—Processes or devices for granulating materials, e.g. fertilisers in general; Rendering particulate materials free flowing in general, e.g. making them hydrophobic
- B01J2/02—Processes or devices for granulating materials, e.g. fertilisers in general; Rendering particulate materials free flowing in general, e.g. making them hydrophobic by dividing the liquid material into drops, e.g. by spraying, and solidifying the drops
- B01J2/04—Processes or devices for granulating materials, e.g. fertilisers in general; Rendering particulate materials free flowing in general, e.g. making them hydrophobic by dividing the liquid material into drops, e.g. by spraying, and solidifying the drops in a gaseous medium
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B33/00—Silicon; Compounds thereof
- C01B33/02—Silicon
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- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Inorganic Chemistry (AREA)
- Manufacture Of Metal Powder And Suspensions Thereof (AREA)
Abstract
The invention relates to non-metallic material powder and a preparation method thereof. The preparation method of the powder comprises the following steps: under the atmosphere of protective gas, controlling the rotation of the non-metal workpiece, controlling the relative movement of the heat source and the non-metal workpiece, and enabling the heat source to act on the surface of the non-metal workpiece and form a melting zone on the surface; introducing pulse airflow and blowing airflow into the melting region, wherein the pulse airflow and the blowing airflow act on the melting region to explode the molten material, and the blowing airflow blows out the exploded molten material; the blown molten material forms a powder after condensation; and classifying and collecting the powder. Wherein the frequency of the pulse gas flow and the flow rate and pressure of the blowing gas flow are controlled to adjust the particle size of the molten material after explosion; the condensation rate was controlled to adjust the sphericity of the powder. The method can effectively improve the flexibility of the preparation of the non-metal powder and improve the accuracy of the particle size control of the non-metal powder.
Description
Technical Field
The invention relates to the field of powder material preparation, in particular to non-metallic material powder and a preparation method thereof.
Background
In the molding process of the material, the corresponding product prepared by taking the powder as the raw material has more advantages, such as high process controllability, high preparation precision and the like. When the powder is used as a raw material to prepare a corresponding product, the preparation of the powder becomes an important factor restricting the manufacture of the product. Taking silicon powder as an example, the current methods commonly used include mechanical ball milling, chemical vapor deposition, fluidized bed method, and evaporation condensation method.
Specifically, the mechanical ball milling method mainly utilizes mechanical milling force and shearing force generated by mechanical rotation and interaction between particles to mill a material with a large diameter into micron or even nano powder, which has the advantages of low cost and simple operation, but introduces impurities, has low purity, and has irregular particles and effectively uncontrollable particle size distribution. The chemical vapor deposition method and the fluidized bed method mainly pyrolyze silane to obtain corresponding silicon powder, and have the advantages of high purity, uniform particle size distribution and regular shape, but have the problems of complex process, high cost, high requirement on equipment and difficult preservation of raw materials. The evaporation condensation method ionizes the reaction raw material into gaseous atoms, molecules or parts of the gaseous atoms and molecules into ions through a heat source and quickly condenses the gaseous atoms, the molecules or the parts of the gaseous molecules into solid powder.
In these methods, although some satisfactory powders can be obtained, these methods require an overall uninterrupted operation of the raw materials, have low flexibility, complex equipment and high energy consumption, require an overall treatment of the materials, are difficult to perform on-site processing, and result in an increase in the production cost of the powders.
Disclosure of Invention
In view of the above, there is a need for a non-metallic material powder and a method for preparing the same, which can effectively improve the flexibility of processing raw materials and the accuracy of controlling particle size.
In order to solve the technical problems, the technical scheme of the invention is as follows:
a preparation method of non-metallic material powder comprises the following steps:
under the atmosphere of protective gas, controlling the rotation of the non-metal workpiece, controlling the relative motion of a heat source and the non-metal workpiece, and enabling the heat source to act on the surface of the non-metal workpiece and form a melting zone on the surface; introducing pulse airflow and blowing airflow into the melting area, wherein the pulse airflow and the blowing airflow act on the melting area to explode the molten material, and the blowing airflow blows out the exploded molten material; the blown molten material forms a powder after condensation; classifying and collecting the powder;
wherein the frequency of the pulse gas flow and the flow rate and pressure of the blowing gas flow are controlled to adjust the particle size of the molten material after explosion; the condensation rate was controlled to adjust the sphericity of the powder.
In one embodiment, the non-metallic workpiece is in the shape of a block, a rod, or a profile.
In one embodiment, the heat source is a plasma heat source, an electron beam heat source, or a laser heat source.
In one embodiment, the flow direction of the pulse gas flow is perpendicular to the flow direction of the blowing gas flow, the flow direction of the pulse gas flow is perpendicular to the melting zone, and the flow direction of the blowing gas flow is parallel to the melting zone.
In one embodiment, when the heat source and the non-metal workpiece move relatively, the heat source moves in the X-axis direction relative to the non-metal workpiece and/or the heat source moves in the Y-axis direction relative to the non-metal workpiece, and the non-metal workpiece moves in the Z-axis direction relative to the heat source.
In one embodiment, the relative movement of the heat source and the non-metal workpiece is controlled to form a melting zone with a preset size at a preset position on the surface of the non-metal workpiece.
In one embodiment, the size of the molten zone is in the range of 1 μm to 50 μm.
In one embodiment, the frequency of the pulsed gas flow is controlled and the flow rate and pressure of the blowing gas flow are controlled to simultaneously obtain powders of different particle sizes.
In one embodiment, the powder is collected in stages in an airflow field formed by the blowing airflow.
A non-metallic material powder obtained by the method of any one of the preceding examples.
The preparation method of the non-metallic material powder comprises the following steps: under the atmosphere of protective gas, controlling the rotation of the non-metal workpiece, controlling the relative movement of the heat source and the non-metal workpiece, and enabling the heat source to act on the surface of the non-metal workpiece and form a melting zone on the surface; introducing pulse airflow and blowing airflow into the melting region, wherein the pulse airflow and the blowing airflow act on the melting region to explode the molten material, and the blowing airflow blows out the exploded molten material; the blown molten material forms a powder after condensation; and classifying and collecting the powder. Wherein the frequency of the pulse gas flow and the flow rate and pressure of the blowing gas flow are controlled to adjust the particle size of the molten material after explosion; the condensation rate was controlled to adjust the sphericity of the powder. When the preparation method is adopted to prepare the non-metal material powder, the designated position on the non-metal workpiece can be processed by the action of the heat source, the pulse airflow and the blowing airflow and the relative motion of the heat source and the non-metal workpiece, so that the corresponding non-metal powder is obtained, and the flexibility of the preparation of the non-metal powder can be effectively improved. In addition, the particle size of the molten material after explosion is adjusted by controlling the frequency of the pulse airflow and controlling the flow rate and pressure of the blowing airflow; the condensation rate is controlled to adjust the sphericity of the powder, so that the accuracy of controlling the particle size of the non-metal powder can be effectively improved.
Drawings
FIG. 1 is a schematic structural diagram of an apparatus for preparing powder of a non-metallic material according to an embodiment of the present invention;
FIG. 2 is an enlarged view of a portion of FIG. 1 at A;
FIG. 3 is a schematic view of the powder preparation apparatus corresponding to FIG. 1 from another angle;
FIG. 4 is a schematic view of the powder preparation apparatus corresponding to FIG. 1 from another angle;
FIG. 5 is a schematic view of the structure of the powder prepared in example 1;
fig. 6 is a schematic view of the structure of the powder prepared in example 2.
The notation in the figure is:
100. a non-metallic material powder preparation device; 101. a box body; 102. a clamp; 103. a nozzle; 104. an airflow pulse member; 105. a heat source; 106. a circulation pump; 107. a clamp driving mechanism; 108. a multi-axis drive mechanism; 109. a filter member; 110. a pressure relief valve; 111. a condensing member; 112. a heat exchanger; 113. a shielding gas supply device; 114. a diverter valve; 115. a partition plate; 116. a box door; 1161. a transparent window; 117. a controller; 200. a non-metallic workpiece; 300. and (3) powder.
Detailed Description
In order that the invention may be more fully understood, reference will now be made to the accompanying examples. This invention may, however, be embodied in many different forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete.
In the description of the present invention, it should be understood that the terms used in the present invention are used in the description of the present invention, and it should be understood that the terms "central", "upper", "lower", "bottom", "inner", "outer", and the like, which are used in the present invention, indicate their orientations and positional relationships are merely used to facilitate the description of the present invention and to simplify the description, but do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore should not be considered as limiting the present invention.
It should be understood that the terms "first", "second", etc. are used herein to describe various information, but the information should not be limited to these terms, which are only used to distinguish one type of information from another. For example, "first" information may also be referred to as "second" information, and similarly, "second" information may also be referred to as "first" information, without departing from the scope of the present invention. Two elements will likewise be considered to be in a "joined" relationship when the two elements are of unitary construction.
It will be understood that when an element is referred to as being "secured to" another element, it can be directly on the other element or intervening elements may also be present. When an element is referred to as being "connected" to another element, it can be directly connected to the other element or intervening elements may also be present.
Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. The terminology used in the description of the invention herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. As used herein, the term "and/or" includes any and all combinations of one or more of the associated listed items.
An embodiment of the invention provides a preparation method of non-metallic material powder. The preparation method comprises the following steps: under the atmosphere of protective gas, controlling the rotation of the non-metal workpiece, controlling the relative movement of the heat source and the non-metal workpiece, and enabling the heat source to act on the surface of the non-metal workpiece and form a melting zone on the surface; introducing pulse airflow and blowing airflow into the melting region, wherein the pulse airflow and the blowing airflow act on the melting region to explode the molten material, and the blowing airflow blows out the exploded molten material; the blown molten material forms a powder after condensation; grading and collecting the powder; wherein the frequency of the pulse gas flow and the flow rate and pressure of the blowing gas flow are controlled to adjust the particle size of the molten material after explosion; the condensation rate was controlled to adjust the sphericity of the powder.
When the preparation method in the embodiment is adopted to prepare the non-metal material powder, the designated position on the non-metal workpiece can be processed by the action of the heat source, the pulse airflow and the blowing airflow and the relative motion of the heat source and the non-metal workpiece, so that the corresponding non-metal powder is obtained, and the flexibility of the preparation of the non-metal powder can be effectively improved. In addition, the particle size of the molten material after explosion is adjusted by controlling the frequency of the pulse airflow and controlling the flow rate and pressure of the blowing airflow; the condensation rate is controlled to adjust the sphericity of the powder, so that the accuracy of controlling the particle size of the non-metal powder can be effectively improved.
It is understood that the non-metallic workpiece is in the shape of a block, rod, or profile. The block shape indicates a shape having a plurality of ridges, such as a prism, a pyramid, and the like. Specifically, a triangular prism, a quadrangular prism, a pentagonal prism, a hexagonal prism, a triangular pyramid, a quadrangular pyramid, a pentagonal pyramid, a hexagonal pyramid, and the like. The rod shape means a cylindrical shape, a circular truncated cone shape, or the like. The irregular shape means a shape having an irregular shape such as a shape having no symmetry axis.
It is understood that the heat source is a plasma heat source, an electron beam heat source, or a laser heat source. In the preparation process, different heat sources 105 can be configured for the preparation device according to different customer requirements, material properties and particle size requirements of the powder 300, so as to improve the heating efficiency.
In a preferred embodiment, the direction of the pulsed gas flow is perpendicular to the direction of the blowing gas flow, the direction of the pulsed gas flow is perpendicular to the melting zone, and the direction of the blowing gas flow is parallel to the melting zone.
Specifically, when the heat source moves relative to the non-metal workpiece, the heat source moves in the X-axis direction relative to the non-metal workpiece and/or the heat source moves in the Y-axis direction relative to the non-metal workpiece, and the non-metal workpiece moves in the Z-axis direction relative to the heat source.
In one particular example, the relative motion of the heat source and the non-metallic workpiece is controlled to form a molten zone of a predetermined size at a predetermined location on the surface of the non-metallic workpiece.
Specifically, the size of the molten zone ranges from 1 μm to 50 μm. The size of the melting zone indicates the extent to which the non-metallic workpiece melts. In some specific examples, the size of the molten zone ranges from 1 μm, 5 μm, 8 μm, 10 μm, 15 μm, 20 μm, 25 μm, 30 μm, 35 μm, 40 μm, 45 μm.
In one particular example, the frequency of the pulsed gas flow is controlled and the flow rate and pressure of the blowing gas flow are controlled to simultaneously obtain powders of different particle sizes.
In a specific example, when the powder is collected in stages, the powder is collected in stages in an airflow field formed by a blowing airflow.
The rotation speed of the non-metal workpiece is preferably in a range of 100 to 4000 rpm. It is understood that the non-metallic workpiece rotation speed may be, but is not limited to, 100rpm, 200rpm, 300rpm, 400rpm, 500rpm, 600rpm, 700rpm, 800rpm, 900rpm, 1000rpm, 1200rpm, 1500rpm, 1800rpm, 2000rpm, 2500rpm, 3000rpm, 3500rpm, or 4000 rpm.
As a preferred range of the frequency of the pulsed gas flow, the frequency of the pulsed gas flow is 1 to 100 kHz. It is understood that the frequency of the pulsed gas flow may be, but is not limited to, 1kHz, 2kHz, 5kHz, 10kHz, 20kHz, 30kHz, 40kHz, 50kHz, 60kHz, 70kHz, 80kHz, 90 kHz.
As a preferable range of the flow rate of the blowing gas stream, the flow rate of the blowing gas stream is 2 to 50L/min. For example, the flow rate of the insufflation gas stream may be, but is not limited to, 5L/min, 10L/min, 15L/min, 20L/min, 25L/min, 30L/min, 40L/min, or 45L/min.
As a preferable range of the pressure of the blowing gas stream, the pressure of the blowing gas stream is 2 to 20 MPa. Alternatively, the pressure of the blowing gas stream may be, but is not limited to, 2MPa, 5MPa, 6MPa, 8MPa, 12MPa, 15MPa, 18MPa or 20 MPa.
As a preferable range of the cooling rate of the condensing member, the cooling rate of the condensing member is 1000-10000K/s. For example, the cooling rate of the condensation element is 1000K/s, 2000K/s, 3000K/s, 4000K/s, 5000K/s, 6000K/s, 7000K/s, 8000K/s, 9000K/s.
In still another embodiment of the present invention, a non-metallic material powder obtained by the above-mentioned preparation method is provided.
In yet another embodiment of the present invention, a nonconductive powder is provided, the nonconductive powder being prepared by any of the above-described methods of preparation.
In still another embodiment of the present invention, there is provided an insulator powder prepared by any one of the above-mentioned preparation methods.
In still another embodiment of the present invention, there is provided a semiconductor powder prepared by any one of the above-mentioned preparation methods.
In still another embodiment of the present invention, there is provided an aluminum oxide powder produced by any one of the above-mentioned production methods.
In still another embodiment of the present invention, there is provided a silica powder prepared by any one of the above-mentioned preparation methods.
In still another embodiment of the present invention, there is provided a silicon nitride powder prepared by any one of the above-mentioned preparation methods.
In a further embodiment of the present invention, there is provided a silicon carbide powder prepared by any one of the above-described preparation methods.
In yet another embodiment of the present invention, there is provided a silicon powder prepared by any one of the above-mentioned preparation methods.
Referring to fig. 1 to 4, another embodiment of the present invention provides a non-metal powder manufacturing apparatus 100 for manufacturing non-metal powder. The powder preparing apparatus 100 includes a case 101, a jig 102, a nozzle 103, an air flow pulse member 104, a heat source 105, a circulation pump 106, a jig driving mechanism 107, and a multi-axis driving mechanism 108. The clamp 102 is connected to the box 101 for clamping the non-metal workpiece 200, and the clamp driving mechanism 107 is connected to the clamp 102 for driving the clamp 102 to rotate to realize the rotation of the non-metal workpiece 200. The multi-axis drive mechanism 108 is coupled to the heat source 105 for driving the heat source 105 to move in a plurality of different directions, the heat source 105 being capable of moving into proximity with the non-metallic workpiece 200 and forming a melt zone on the surface of the non-metallic workpiece 200. A gas flow pulse 104 is connected to the tank 101 for forming a pulse gas flow and blowing the pulse gas flow to the melting zone, and a circulation pump 106 is connected to the gas flow pulse 104 for transferring the gas to the gas flow pulse 104. A nozzle 103 is connected to the box 101 for introducing a blowing gas flow in the melting zone and blowing out the molten material.
The relative motion of the heat source 105 and the non-metallic workpiece 200 is controlled by a multi-axis drive mechanism 108. The frequency at which the gas flow pulses 104 are formed into the pulse gas flow and the flow rate and pressure of the blowing gas flow introduced from the nozzle are controlled to adjust the particle diameter of the molten material after explosion.
When the powder 300 is prepared by using the preparation device in the embodiment, the non-metal workpiece 200 is mounted on the clamp 102, the clamp 102 is driven to rotate by the clamp driving mechanism 107 to realize the rotation of the non-metal workpiece 200, the position of the heat source 105 is adjusted by the multi-axis driving mechanism 108, the heat source 105 acts on the non-metal workpiece 200 and forms a melting zone on the surface of the non-metal workpiece 200, the airflow pulse piece 104 forms a pulse airflow and blows the pulse airflow to the melting zone, and meanwhile, the nozzle 103 introduces the airflow in the melting zone to blow out a molten material. The molten material in the molten zone is dispersed into droplets and blown out by the action of the pulsed air flow and the air flow introduced by the nozzle 103. The droplets are blown out and condensed to form the powder 300. Meanwhile, under the action of the clamp 102, the non-metal workpiece 200 is in a self-rotating state, so that the liquid drops can be thrown out through a centrifugal effect, the dispersion degree of the liquid drops is improved, the mutual influence among the liquid drops is reduced, and the improvement of the sphericity of the powder 300 is facilitated. In this process, the particle size of the powder 300 can be effectively controlled by controlling the rotation speed of the jig 102, the power of the heat source 105, the frequency of the air flow pulse member 104, the flow rate of the fluid medium, and the like. In addition, when the powder 300 preparation device is used, the relative motion of the heat source 105 and the nonmetal workpiece 200 can be realized by adjusting the position of the heat source 105, so that the processing stroke range of the heat source 105 to the nonmetal workpiece 200 can be ensured, the preparation flexibility is improved, and the powder preparation efficiency is improved.
Further, when the powder 300 is prepared by using the preparation apparatus of the present invention, the required powder 300 can be obtained by matching the jig 102, the heat source 105, the air pulse member 104 and the nozzle 103, without depending on severe reaction conditions, and the operation method is simple and suitable for industrial production. In addition, through the arrangement of the circulating pump 106, a circulating flow field can be formed inside the box body 101, so that the gas is recycled, the gas emission is effectively avoided, the gas consumption is reduced, and the preparation cost of the powder 300 is favorably reduced. In addition, due to the recycling of the gas, other impurities are not introduced in the process of preparing the powder 300, and the purity of the powder 300 can be effectively improved.
In a preferred example, the number of the nozzles 103 is plural, and the plural nozzles 103 are uniformly distributed on the outer edge of the jig 102 for blowing out the molten material at different positions when the non-metal workpiece 200 rotates on its own axis. Further preferably, the plurality of nozzles 103 are located on the same circumference. In this embodiment, the number of the nozzles 103 is 4, the 4 nozzles 103 are located on the same circumference, and in the rotation process of the non-metal workpiece 200, the 4 nozzles 103 can blow out the molten materials at different positions on the non-metal workpiece 200 in time, so that the molten materials are prevented from being condensed and solidified on the non-metal workpiece to affect the preparation of the powder. It is understood that the number of nozzles 103 may be, but is not limited to, 1, 2, 3, 4, or 5, etc.
It is understood that the non-metallic workpiece 200 is of a solid of revolution or a non-solid of revolution configuration. Preferably, the non-metallic workpiece 200 is of a revolving structure, in which the rotation is more stable, the heat source 105 and the gas are stabilized, and the molten material is blown out more easily. Preferably, the non-metallic workpiece 200 is a cylindrical solid of revolution structure.
It will also be appreciated that in this embodiment the gas flows in the gas duct, i.e. the transport of the gas is effected through the gas duct. The gas pipeline is a conventional gas pipeline.
Specifically, a further embodiment of the present invention provides a nonconductor powder manufacturing apparatus 100, the nonconductor powder manufacturing apparatus 100 including a tank 101, a jig 102, a nozzle 103, an air flow pulse member 104, a heat source 105, a circulation pump 106, a jig driving mechanism 107, and a multi-axis driving mechanism 108. The clamp 102 is connected to the box 101 for clamping the non-metal workpiece 200, and the clamp driving mechanism 107 is connected to the clamp 102 for driving the clamp 102 to rotate to realize the rotation of the non-metal workpiece 200. The multi-axis drive mechanism 108 is coupled to the heat source 105 for driving the heat source 105 to move in a plurality of different directions, the heat source 105 being capable of moving into proximity with the non-metallic workpiece 200 and forming a melt zone on the surface of the non-metallic workpiece 200. A gas flow pulse 104 is connected to the tank 101 for forming a pulse gas flow and blowing the pulse gas flow to the melting zone, and a circulation pump 106 is connected to the gas flow pulse 104 for transferring the gas to the gas flow pulse 104. A nozzle 103 is connected to the box 101 for introducing a gas flow in the melting zone and blowing out the molten material.
Preferably, the air flow pulse member 104 is selected to generate an air flow pulse having a sinusoidal waveform.
It will be appreciated that the multi-axis drive mechanism 108 is coupled to the heat source 105 for driving movement of the heat source 105 in a plurality of different directions, and in particular, the multi-axis drive mechanism 108 is coupled to the heat source 105 for driving movement of the heat source 105 in the X, Y and Z axes.
In a specific example, the direction of the gas flow from gas pulse member 104 is perpendicular to the direction of the gas flow from nozzle 103. By setting the direction of the gas outlet from nozzle 103 to be perpendicular to the direction of the gas outlet from gas flow pulse member 104, the gas ejected from nozzle 103 and the pulse gas flow formed by gas flow pulse member 104 can better interact with each other. Further, the air outlet direction of the nozzle 103 is parallel to the rotation axis of the non-metal workpiece 200, and the air outlet direction of the airflow pulse piece 104 is perpendicular to the rotation axis of the non-metal workpiece 200, so that the pulse airflow can more fully act on the melting area of the non-metal workpiece 200 to form a more uniform molten material, which is beneficial to improving the uniformity of the powder 300.
It is understood that one end of the circulation pump 106 is connected to the nozzle 103, and the other end is connected to the tank 101. The gas in the tank 101 can be circulated to the nozzles 103 by the circulation pump 106, and thus can be recycled. The process does not produce harmful substances such as waste gas, waste liquid, solid waste and the like, and is beneficial to promoting the green development of powder preparation.
Preferably, the powder preparation device 100 further comprises a filter element 109, the filter element 109 being arranged inside the tank 101 and in a position of through communication of the circulation pump 106 with the tank 101. The powder 300 can be effectively separated from the gas by the arrangement of the filtering member 109, and the adverse effect on the circulation line caused by the powder 300 flowing through the circulation line is effectively avoided. In the present embodiment, the number of the filter members 109 is 2, and the 2 filter members 109 are respectively located at an air inlet position and an air outlet position of the circulating air flow in the case 101 to prevent the powder 300 from flowing through the circulating line.
In a preferred embodiment, the powder preparation apparatus 100 further includes a pressure relief valve 110, and the pressure relief valve 110 is disposed outside the tank 101 and located at a position where the circulation pump 106 is in communication with the tank 101 to relieve pressure in the tank 101. In powder 300 preparation process, the inside great environment of pressure that probably forms of box 101, carry out the pressure release to box 101 through relief valve 110, can in time reduce the inside pressure of box 101 when box 101 internal pressure is too big, make powder 300 preparation go on smoothly, can also improve the stability of box 101, avoid higher pressure to bring adverse effect for the device.
In another preferred embodiment, the powder preparing apparatus 100 further includes a condensing member 111, and the condensing member 111 is disposed inside the tank 101 to condense the molten material. When the temperature of the molten material is high after the molten material is blown out by the gas, the cooling efficiency of the molten material can be improved by the arrangement of the condensing member 111, and the powder forming efficiency of the powder 300 can be improved. It is understood that when the powder 300 is attached to the condensing member 111, the powder 300 may be scraped off. Further, a storage plate, a storage cloth, or the like may be attached to the condensation member 111, and after the powder 300 is attached to the storage plate or the storage cloth, the powder 300 may be taken out by removing the storage plate or the storage cloth.
Further, the powder preparing apparatus 100 further includes a heat exchanger 112, and the heat exchanger 112 is connected to the condensing member 111 for reducing the temperature of the condensing member 111. The temperature of the condensing part 111 can be reduced by arranging the heat exchanger 112, and the condensing efficiency is improved. Meanwhile, the temperature in the box body 101 can be adjusted through the arrangement of the heat exchanger 112, so that the temperature condition suitable for preparing the powder is kept in the box body 101, the temperature in the box body 101 is convenient to adjust, the preparation efficiency of the powder 300 can be further improved, and the quality of the powder 300 is improved.
It is understood that the powder producing apparatus 100 further includes a shielding gas supply device 113, and the shielding gas supply device 113 is connected to the casing 101 for supplying shielding gas to the casing 101. The protective gas is provided for the box body 101 through the protective gas providing device 113, so that the powder 300 is prepared under the protective gas atmosphere, external impurities are prevented from entering the box body 101, and the purity of the powder 300 is improved.
Preferably, the shielding gas providing device 113 is located outside the box body 101, and the shielding gas providing device 113 is communicated with the box body 101 in a penetrating way to provide shielding gas for the inside of the box body 101. The shielding gas is provided for the inside of the box body 101 through the shielding gas providing device 113 so as to form a shielding gas atmosphere in the box body 101, the purity of the powder 300 can be further improved, and the problems of oxidation, corrosion and the like of the powder 300 in the preparation process are avoided. The shielding gas supplied from the shielding gas supply device 113 may be an inert gas such as nitrogen gas or a rare gas.
Further, the powder preparation apparatus 100 further includes a direction changing valve 114, the direction changing valve 114 is connected to the outside of the tank 101 for adjusting the direction of the gas flow, and the gas flow pulse member 104, the circulation pump 106, and the shielding gas supply device 113 are respectively connected to the direction changing valve 114. This facilitates control of the gas flow direction and improves the efficiency of the powder 300 preparation.
In one particular example, the powder preparation apparatus 100 further includes a baffle 115, the baffle 115 protruding from the bottom of the housing 101 and/or the baffle 115 protruding from the top of the housing 101 for separating powders 300 of different particle sizes. It can be understood that the powder 300 has a certain particle size range, and under the action of the airflow field, the flight time of the powder 300 with a larger particle size is shorter, and the flight time of the powder 300 with a smaller particle size is longer, so that the powder 300 can be primarily screened through the arrangement of the partition plate 115, and the workload of subsequent screening is reduced. In this embodiment, the number of the partition plates 115 is 2, and 2 partition plates 115 are respectively located at the top and bottom of the box 101 for performing the primary screening of the powder 300.
Referring again to fig. 4, it can be appreciated that the powder preparation apparatus 100 further includes a door 116, and the door 116 cooperates with the box 101 to form a sealed processing space in which the non-metallic workpiece 200 is processed to prepare the corresponding powder 300. Further, a transparent window 1161 is provided on the door 116 for observing the preparation inside the cabinet 101. Further, the powder preparing apparatus 100 further includes a controller 117, and the controller 117 is configured to control the rotation speed of the jig 102, the power of the heat source 105, the frequency of the air pulse member 104, the parameters of the circulation pump 106, and the like to achieve intelligent preparation of the powder 300.
Referring to fig. 1 and 2 again, when the powder 300 is prepared, the non-metal workpiece 200 is driven by the fixture 102 to rotate, the heat source 105 heats the non-metal workpiece 200 to form a melting zone, the pulse air flow is formed by the air flow pulse piece 104, and the pulse air flow acts on the melting zone and blows out the molten material in cooperation with the action of the nozzle 103. In the powder preparation, the heat source 105 can move in the three directions of the X axis, the Y axis and the Z axis, so that the processing stroke range of the heat source 105 to the non-metal workpiece 200 can be ensured, and the powder preparation efficiency is improved.
The following are specific examples.
Example 1
In this embodiment, the non-metal workpiece is a silicon rod of a revolving body, the diameter is 100mm, and the length is 300 mm. Silicon powder was prepared using the apparatus shown in FIG. 1. The heat source is a laser heat source. The protective gas is argon.
And cleaning and drying the workpiece, then installing the workpiece on a clamp, and closing the box door. A protective gas atmosphere is formed inside the case. The rotation speed of the workpiece was adjusted to 2000 rpm. And adjusting the relative position between the heat source and the workpiece, and acting on the surface of the non-metal workpiece through the heat source to form a melting zone on the surface, wherein the size of the melting zone is 10-30 mu m.
The airflow direction of the pulse airflow is vertical to that of the blowing airflow, the airflow direction of the pulse airflow is vertical to the melting area, and the airflow direction of the blowing airflow is parallel to the melting area. The frequency of the pulsed gas flow was 20 kHz. The flow rate of the blowing gas stream was 5L/min. The pressure of the blowing gas stream was 6 MPa. The cooling rate of the condensing element was 1000K/s. The collected powder structure is shown in fig. 5. As can be seen from fig. 5, the powder obtained in this example has a smaller particle size, a higher uniformity, and a higher sphericity.
Example 2
In this embodiment, the non-metal workpiece is a silicon rod of a revolving body, the diameter is 100mm, and the length is 300 mm. Silicon powder was prepared using the apparatus shown in FIG. 1. The heat source is a laser heat source. The protective gas is argon.
And cleaning and drying the workpiece, then installing the workpiece on a clamp, and closing the box door. A protective gas atmosphere is formed inside the case. The rotation speed of the workpiece was adjusted to 2000 rpm. And adjusting the relative position between the heat source and the workpiece, and acting on the surface of the non-metal workpiece through the heat source to form a melting zone on the surface, wherein the size of the melting zone is 10-30 mu m.
The airflow direction of the pulse airflow is vertical to that of the blowing airflow, the airflow direction of the pulse airflow is vertical to the melting area, and the airflow direction of the blowing airflow is parallel to the melting area. The frequency of the pulsed gas flow was 10 kHz. The flow rate of the blowing gas stream was 5L/min. The pressure of the blowing gas stream was 5 MPa. The cooling rate of the condensing element was 1000K/s. The collected powder structure is shown in fig. 6. As can be seen from fig. 6, the powder obtained in this example has a smaller particle size, a higher uniformity, and a higher sphericity.
The technical features of the embodiments described above may be arbitrarily combined, and for the sake of brevity, all possible combinations of the technical features in the embodiments described above are not described, but should be considered as being within the scope of the present specification as long as there is no contradiction between the combinations of the technical features.
The above-mentioned embodiments only express several embodiments of the present invention, and the description thereof is more specific and detailed, but not construed as limiting the scope of the invention. It should be noted that, for a person skilled in the art, several variations and modifications can be made without departing from the inventive concept, which falls within the scope of the present invention. Therefore, the protection scope of the present patent shall be subject to the appended claims.
Claims (10)
1. The preparation method of the non-metallic material powder is characterized by comprising the following steps:
under the atmosphere of protective gas, controlling the rotation of the non-metal workpiece, controlling the relative motion of a heat source and the non-metal workpiece, and enabling the heat source to act on the surface of the non-metal workpiece and form a melting zone on the surface; introducing pulse airflow and blowing airflow into the melting area, wherein the pulse airflow and the blowing airflow act on the melting area to explode the molten material, and the blowing airflow blows out the exploded molten material; the blown molten material forms a powder after condensation; classifying and collecting the powder;
wherein the frequency of the pulse gas flow and the flow rate and pressure of the blowing gas flow are controlled to adjust the particle size of the molten material after explosion; the condensation rate was controlled to adjust the sphericity of the powder.
2. A method for producing a powder of a non-metallic material according to claim 1, wherein the non-metallic workpiece has a block-like, rod-like or irregular shape.
3. The method of preparing a non-metallic material powder of claim 1, wherein the heat source is a plasma heat source, an electron beam heat source, or a laser heat source.
4. The method according to claim 1, wherein the direction of the pulsed air flow is perpendicular to the direction of the blowing air flow, the direction of the pulsed air flow is perpendicular to the melting zone, and the direction of the blowing air flow is parallel to the melting zone.
5. The method according to any one of claims 1 to 4, wherein the heat source moves in an X-axis direction relative to the non-metal workpiece and/or the heat source moves in a Y-axis direction relative to the non-metal workpiece and the non-metal workpiece moves in a Z-axis direction relative to the heat source when the heat source and the non-metal workpiece move relative to each other.
6. The method according to any one of claims 1 to 4, wherein a relative movement between a heat source and the non-metal workpiece is controlled to form a molten zone of a predetermined size at a predetermined position on the surface of the non-metal workpiece.
7. The method for preparing powder of a non-metallic material according to claim 6, wherein the size of the melting zone is in the range of 1 μm to 50 μm.
8. The method of producing a non-metallic material powder according to any one of claims 1 to 4, wherein the frequency of the pulse gas flow and the flow rate and pressure of the blowing gas flow are controlled to simultaneously obtain powders of different particle sizes.
9. The method according to any one of claims 1 to 4, wherein the powder is classified and collected in an airflow field formed by the blowing airflow.
10. A non-metallic material powder obtained by the production method according to any one of claims 1 to 9.
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