CN113177936A - Method and system for rapidly and accurately measuring number of fingers of interdigital transducer - Google Patents

Method and system for rapidly and accurately measuring number of fingers of interdigital transducer Download PDF

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CN113177936A
CN113177936A CN202110562705.2A CN202110562705A CN113177936A CN 113177936 A CN113177936 A CN 113177936A CN 202110562705 A CN202110562705 A CN 202110562705A CN 113177936 A CN113177936 A CN 113177936A
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interdigital transducer
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fingers
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CN113177936B (en
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卢旭
刘钊
李红浪
许欣
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Guangdong Polytechnic Normal University
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Guangdong Guangnaixin Technology Co ltd
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Abstract

The invention relates to a method and a system for rapidly and accurately measuring the number of fingers of an interdigital transducer, wherein the method comprises the following steps: s1, inputting an interdigital transducer image; s2, preprocessing the interdigital transducer image, if the image is a normal image, entering S3, and otherwise, entering S4; s3, identifying the number of interdigital transducers, marking connected components by using a morphological connected algorithm, surrounding common pixel points through an image matrix, and acquiring labels to acquire the number of the interdigital transducers; s4, processing black points in the problem image by using a morphological dilation algorithm, recovering the width by using a morphological erosion algorithm, marking connected components by using a morphological connected algorithm, surrounding common pixel points of the connected components by an image matrix, acquiring the number of the interdigital transducers. The invention solves the problem of black spots in the interdigital transducer problem image and calculates the number of the fingers by utilizing the morphological algorithm, thereby realizing the calculation of the number of the fingers of different microscope interdigital transducer images.

Description

Method and system for rapidly and accurately measuring number of fingers of interdigital transducer
Technical Field
The invention relates to the technical field of interdigital transducers, in particular to a method and a system for quickly and accurately measuring the number of fingers of an interdigital transducer.
Background
In the processing of saw filter wafers, various parameters of IDTs of interdigital transducers seriously affect the final performance, and must be accurately measured during the processing. Among them, the number of interdigital transducers is the most important factor affecting the operating frequency of the device. The current common measurement method is to shoot an interdigital transducer image through various high-precision microscopes, and then obtain the number of the interdigital transducer fingers through manual counting, wherein the image is clear and moderate in size under high power, but the whole interdigital transducer structure cannot be accommodated, and image splicing is needed; and the image is gathered and can be completely displayed under the low power, but the pixels are low and fuzzy. The method wastes manpower and material resources greatly, and large errors are generated in the calculation of the number of the interdigital transducers due to the excessive number of the images, the fatigue of human eyes and the like. A measuring line covering all the finger strips in the vertical direction is drawn through some analysis software, the quantity of acquired light and shade changes is calculated through the analysis software, the accuracy rate is high, and an auxiliary line still needs to be made.
Therefore, a need exists to find a fast and accurate method for measuring the number of interdigital transducer fingers.
Disclosure of Invention
In order to solve the technical problems in the prior art, the invention provides a method and a system for rapidly and accurately measuring the number of fingers of an interdigital transducer.
The method is realized by adopting the following technical scheme: a method for rapidly and accurately measuring the number of fingers of an interdigital transducer mainly comprises the following steps:
s1, inputting an interdigital transducer optical microscope or electron microscope image;
s2, preprocessing the interdigital transducer image, if the interdigital transducer image is a normal image, entering the step S3, and if the image is a problem image, entering the step S4;
s3, identifying the number of the interdigital transducers, counting from left to right by using a morphological communication algorithm, marking a communication component by using a red frame, surrounding a common pixel point of the communication component by rectangles through image matrixes 0 and 1, and measuring the same pixel point mark number of the interdigital transducers to obtain the number of the interdigital transducers;
s4, black points in the problem image are processed through a morphological dilation algorithm, the width of the problem image is recovered through a morphological erosion algorithm, counting is started from left to right through a morphological communication algorithm, connected components are marked through red frames, common pixel points of the connected components are surrounded by rectangles through image matrixes 0 and 1, the same pixel point marks of the interdigital transducers are obtained through measurement, and the number of the interdigital transducers is obtained.
The system of the invention is realized by adopting the following technical scheme: a system for rapidly and accurately measuring the number of fingers in an interdigital transducer, comprising:
the interdigital transducer image input module is used for inputting an image of an interdigital transducer optical microscope or an electron microscope;
the image preprocessing module of the interdigital transducer is used for preprocessing an image of the interdigital transducer and judging the image of the interdigital transducer to be a normal image or a problem image;
the normal image finger number identification module of the interdigital transducer is used for identifying the finger number of the interdigital transducer, counting is started from left to right by utilizing a morphological communication algorithm, a red frame is utilized to mark a communication component, a common pixel point of the image matrix is surrounded by a rectangle through image matrixes 0 and 1, the same pixel point mark number of the interdigital transducer is obtained through measurement, and the number of the interdigital transducer is obtained;
the identification module for the number of the interdigital transducers of the problem image processes black points in the problem image by utilizing a morphological expansion algorithm, recovers the width of the problem image by utilizing a morphological corrosion algorithm, starts counting from left to right by utilizing a morphological communication algorithm, marks a communication component by utilizing a red frame, surrounds a common pixel point by rectangles through image matrixes 0 and 1, and obtains the number of the interdigital transducers by measuring the same pixel point mark number of the interdigital transducers.
Compared with the prior art, the invention has the following advantages and beneficial effects:
the invention effectively solves the problem of black spots in the interdigital transducer problem image and calculates the number of the fingers by utilizing the morphological algorithm, thereby realizing the rapid and accurate calculation of the number of the fingers of different microscope interdigital transducer images.
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FIG. 1 is a flow chart of a method of the present invention;
FIG. 2(a) is a schematic diagram of a normal optical microscope image of an interdigital transducer;
FIG. 2(b) is a schematic diagram of the normal optical microscope image recognition finger number of the interdigital transducer;
FIG. 3(a) is a schematic illustration of a normal electron microscope image of an interdigital transducer;
FIG. 3(b) is a schematic diagram of the interdigital transducer identifying the number of fingers in a normal electron microscope image;
FIG. 4(a) is a schematic diagram of an interdigital transducer problem optical microscope image;
FIG. 4(b) is a schematic diagram of an interdigital transducer problem optical microscope image recognition finger count;
FIG. 5(a) is a schematic diagram of the morphological dilation principle;
FIG. 5(b) is a schematic diagram of the morphological etching principle;
FIG. 6(a) is a schematic of an image containing two connected components;
fig. 6(b) is a schematic diagram of a connected component labeling image.
Detailed Description
The present invention will be described in further detail with reference to examples and drawings, but the present invention is not limited thereto.
Examples
As shown in fig. 1, the method for rapidly and accurately measuring the number of fingers of an interdigital transducer in the present embodiment mainly includes the following steps:
s1, inputting an interdigital transducer optical microscope or electron microscope image;
s2, preprocessing the interdigital transducer image, if the interdigital transducer image is a normal image, entering the step S3, and if the image is a problem image, entering the step S4;
s3, identifying the number of the interdigital transducers, marking connected components by using a morphological connected algorithm, surrounding common pixel points of the interdigital transducers by rectangles through image matrixes 0 and 1, and obtaining the same pixel point labels of the interdigital transducers by measurement to obtain the number of the interdigital transducers;
s4, black points in the problem image are processed by using a morphological dilation algorithm, so that fingers are separated from each other without interconnected noise, the width of the fingers is recovered by using a morphological erosion algorithm, connected components are marked by using a morphological connection algorithm, common pixel points of the fingers are surrounded by rectangles through image matrixes 0 and 1, and the number of the interdigital transducers is obtained by measuring the same pixel point mark number of the interdigital transducer.
In this embodiment, the preprocessing process of the interdigital transducer image in step S2 is as follows: graying the original three-channel interdigital transducer image into a single-channel image with the pixel value between 0 and 255, setting an intermediate threshold value for the single-channel image, and obtaining a bright 1 and dark 0 image through binarization.
In this embodiment, the normal interdigital transducer images taken under the optical microscope are observed to be regular structures, counted from left to right by using a morphological communication algorithm, and marked by using a red frame, as shown in fig. 2(a) and 2 (b).
In this embodiment, the normal interdigital transducer image taken under the electron laser microscope is observed to be a regular structure, counting is started from left to right by using a morphological communication algorithm, and the image is marked by using a red frame, as shown in fig. 3(a) and 3 (b).
In the embodiment, in the process of processing the image of the problematic interdigital transducer shot under the optical microscope, the image is stained with the epoxy resin of the substrate due to careless operation, a large number of black points appear in the image, the number of the interdigital transducers is identified, the connection black points are firstly processed, the connection positions of the black points and the finger strips are processed by using a morphological expansion algorithm, the original image is restored by using a morphological corrosion algorithm, and the black points are effectively removed; further, using the morphological connection algorithm, counting is started from left to right, and marked with a red box, as shown in fig. 4(a) and 4 (b).
In this embodiment, a morphological connected component algorithm is used to extract a connected component and mark the connected component, a number uniquely representing the area is assigned to each connected area in the original image, and all pixel values in the connected area in the output image are assigned as the number of the area, as shown in fig. 6(a) and 6(b), and the output image is referred to as an annotated image. In the image of the interdigital transducer, 0 is a black pixel point, 1 is a white pixel point, counting is started from left to right, the white pixel point of each area is the same label, and the number of the labels is ended from 1 to the end of the number of the finger strips.
As shown in fig. 5(a) and 5(b), in this embodiment, the image morphological dilation algorithm and the image morphological erosion algorithm in step S4 are implemented as follows:
s41, expanding the original image matrix by using the structural element matrix S by adopting an image morphological expansion algorithm, reducing the width of the finger strips, processing black points, and identifying the number of the finger strips, wherein the specific expansion formula is as follows:
Figure BDA0003079580700000041
wherein, (x, y) is the position of the central point, (x ', y') is the position offset of the pixel with the structural element value of 1 relative to the central point, src represents the original image, dst represents the result graph;
s42, acting on the image by adopting an image morphological erosion algorithm, and eroding the expanded image by utilizing the structural element matrix S to recover the finger width, wherein the specific erosion formula is as follows:
Figure BDA0003079580700000042
where (x, y) is the position of the center point, (x ', y') is the positional deviation of the pixel with the structural element value of 1 from the center point, src represents the original image, and dst represents the result graph.
Based on the same inventive concept, the invention also provides a system for rapidly and accurately measuring the number of the fingers of the interdigital transducer, which comprises the following steps:
the interdigital transducer image input module is used for inputting an image of an interdigital transducer optical microscope or an electron microscope;
the image preprocessing module of the interdigital transducer is used for preprocessing an image of the interdigital transducer and judging the image of the interdigital transducer to be a normal image or a problem image;
the normal image finger number identification module of the interdigital transducer is used for identifying the finger number of the interdigital transducer, counting is started from left to right by utilizing a morphological communication algorithm, a red frame is utilized to mark a communication component, a common pixel point of the image matrix is surrounded by a rectangle through image matrixes 0 and 1, the same pixel point mark number of the interdigital transducer is obtained through measurement, and the number of the interdigital transducer is obtained;
the module for identifying the number of the interdigital transducer problem image fingers processes black points in a problem image by utilizing a morphological dilation algorithm, so that the fingers are not mutually connected and separated, recovers the width of the fingers by utilizing a morphological erosion algorithm, starts counting from left to right by utilizing a morphological communication algorithm, marks a communication component by utilizing a red frame, surrounds a common pixel point by utilizing rectangles through image matrixes 0 and 1, and obtains the number of the interdigital transducers by measuring the same pixel point mark of the interdigital transducer.
In this embodiment, the interdigital transducer image preprocessing module grays the original three-channel interdigital transducer image into a single-channel image with a pixel value between 0 and 255, sets an intermediate threshold value for the single-channel image, and obtains a bright-1-dark-0 image through binarization.
The above embodiments are preferred embodiments of the present invention, but the present invention is not limited to the above embodiments, and any other changes, modifications, substitutions, combinations, and simplifications which do not depart from the spirit and principle of the present invention should be construed as equivalents thereof, and all such changes, modifications, substitutions, combinations, and simplifications are intended to be included in the scope of the present invention.

Claims (6)

1.一种快速精确测量叉指换能器指条数量的方法，其特征在于，包括以下步骤：1. a method for quickly and accurately measuring the number of fingers of an interdigital transducer, it is characterized in that, comprises the following steps: S1、输入叉指换能器光学显微镜或电子显微镜图像；S1. Input the interdigital transducer optical microscope or electron microscope image; S2、对叉指换能器图像进行预处理，若叉指换能器图像为正常图像，则进入步骤S3，若为问题图像，则进入步骤S4；S2, preprocessing the interdigital transducer image, if the interdigital transducer image is a normal image, go to step S3, if it is a problem image, go to step S4; S3、进行叉指换能器指条数量识别，通过利用形态学连通算法，从左到右开始计数，利用红框标记连通分量，通过图像矩阵0与1，以矩形包围其共同像素点，通过测量获取叉指换能器的相同像素点标号，获取叉指换能器数量；S3. Identify the number of fingers of the interdigital transducer, start counting from left to right by using the morphological connectivity algorithm, use the red box to mark the connected components, pass through the image matrix 0 and 1, and enclose their common pixels with rectangles, pass Measure and obtain the same pixel label of the interdigital transducer, and obtain the number of the interdigital transducer; S4、利用形态学膨胀算法处理问题图像中的黑点，利用形态学腐蚀算法，恢复其宽度大小，再利用形态学连通算法，从左到右开始计数，利用红框标记连通分量，通过图像矩阵0与1，以矩形包围其共同像素点，通过测量获取叉指换能器的相同像素点标号，获取叉指换能器数量。S4. Use the morphological expansion algorithm to process the black dots in the problem image, use the morphological erosion algorithm to restore its width, and then use the morphological connectivity algorithm to count from left to right, use the red box to mark the connected components, and pass the image matrix. 0 and 1, the common pixels are surrounded by a rectangle, and the same pixel number of the interdigital transducer is obtained by measuring, and the number of the interdigital transducer is obtained. 2.根据权利要求1所述的一种快速精确测量叉指换能器指条数量的方法，其特征在于，步骤S2中叉指换能器图像的预处理过程为：将原三通道叉指换能器图像进行灰度化为像素值在0到255之间单通道图像，为单通道图像设置中间阈值，并通过二值化获得明1暗0图像。2. A method for quickly and accurately measuring the number of fingers of an interdigital transducer according to claim 1, wherein the preprocessing process of the interdigital transducer image in step S2 is: The transducer image is grayscaled into a single-channel image with pixel values between 0 and 255, an intermediate threshold is set for the single-channel image, and a light-1-dark-0 image is obtained by binarization. 3.根据权利要求1所述的一种快速精确测量叉指换能器指条数量的方法，其特征在于，形态学连通算法的具体应用过程为：提取并标记连通分量，为图像中的每个连通区分配一个唯一代表该区域的编号，在输出图像中该连通区内的所有像素值赋值为该区域的编号；在叉指换能器图像中，设0为黑色像素点，1为白色像素点，从左至右开始计数，每个区域的白色像素点为同一标号，从1开始，标记至指条数量结束。3. a kind of method for fast and accurate measurement of the number of fingers of an interdigital transducer according to claim 1, is characterized in that, the concrete application process of morphological connectivity algorithm is: extract and mark connected component, it is each image in the image. Each connected area is assigned a number that uniquely represents the area, and all the pixel values in the connected area in the output image are assigned the number of the area; in the interdigital transducer image, set 0 as a black pixel and 1 as a white pixel Pixels are counted from left to right. The white pixels in each area have the same number, starting from 1 and ending with the number of fingers. 4.根据权利要求1所述的一种快速精确测量叉指换能器指条数量的方法，其特征在于，步骤S4中图像形态学膨胀算法及图像形态学腐蚀算法的实现过程如下：4. the method for a kind of fast and accurate measurement of the number of fingers of the interdigital transducer according to claim 1, is characterized in that, in step S4, the realization process of image morphological expansion algorithm and image morphological erosion algorithm is as follows: S41、采用图像形态学膨胀算法，利用结构元矩阵S，膨胀原图像矩阵，缩小指条宽度，处理黑点，识别指条数量，具体的膨胀公式如下：S41 , using an image morphological expansion algorithm, using the structural element matrix S, to expand the original image matrix, reduce the width of the finger bars, process black spots, and identify the number of finger bars. The specific expansion formula is as follows:
Figure FDA0003079580690000011
Figure FDA0003079580690000011
 其中，(x,y)为中心点的位置，(x',y')为结构元值为1的像素相对中心点的位置偏移，src表示原图，dst表示结果图；Among them, (x, y) is the position of the center point, (x', y') is the position offset of the pixel whose structure element value is 1 relative to the center point, src represents the original image, and dst represents the result image; S42、采用图像形态学腐蚀算法作用于图像，利用结构元矩阵S，腐蚀膨胀后的图像，恢复指条宽度，具体的腐蚀公式如下：S42 , using the image morphological corrosion algorithm to act on the image, and using the structural element matrix S to corrode the expanded image and restore the finger width. The specific corrosion formula is as follows:
Figure FDA0003079580690000012
Figure FDA0003079580690000012
 其中，(x,y)为中心点的位置，(x',y')为结构元值为1的像素相对中心点的位置偏移，src表示原图，dst表示结果图。Among them, (x, y) is the position of the center point, (x', y') is the position offset of the pixel with the structure element value of 1 relative to the center point, src represents the original image, and dst represents the result image. 5.一种快速精确测量叉指换能器指条数量的系统，其特征在于，包括：5. A system for quickly and accurately measuring the number of fingers of an interdigital transducer, comprising: 叉指换能器图像输入模块，用于输入叉指换能器光学显微镜或电子显微镜图像；The interdigital transducer image input module is used to input the interdigital transducer optical microscope or electron microscope image; 叉指换能器图像预处理模块，用于对叉指换能器图像进行预处理，判断叉指换能器图像为正常图像或问题图像；The interdigital transducer image preprocessing module is used to preprocess the interdigital transducer image, and determine whether the interdigital transducer image is a normal image or a problem image; 叉指换能器正常图像指条数量识别模块，用于进行叉指换能器指条数量识别，通过利用形态学连通算法，从左到右开始计数，利用红框标记连通分量，通过图像矩阵0与1，以矩形包围其共同像素点，通过测量获取叉指换能器的相同像素点标号，获取叉指换能器数量；The identification module of the number of fingers in the normal image of the interdigital transducer is used to identify the number of fingers of the interdigital transducer. By using the morphological connectivity algorithm, counting from left to right, using the red box to mark the connected components, through the image matrix 0 and 1, the common pixels are surrounded by a rectangle, and the same pixel label of the interdigital transducer is obtained by measurement, and the number of the interdigital transducer is obtained; 叉指换能器问题图像指条数量识别模块，通过利用形态学膨胀算法处理问题图像中的黑点，利用形态学腐蚀算法，恢复其宽度大小，再利用形态学连通算法，从左到右开始计数，利用红框标记连通分量，通过图像矩阵0与1，以矩形包围其共同像素点，通过测量获取叉指换能器的相同像素点标号，获取叉指换能器数量。Interdigital transducer problem image finger number identification module, by using the morphological expansion algorithm to process the black spots in the problem image, using the morphological erosion algorithm to restore its width, and then using the morphological connectivity algorithm, starting from left to right Count, use the red box to mark the connected components, pass the image matrix 0 and 1, enclose their common pixel points with a rectangle, and obtain the same pixel point label of the interdigital transducer by measurement, and obtain the number of interdigital transducers. 6.根据权利要求5所述的一种快速精确测量叉指换能器指条数量的系统，其特征在于，叉指换能器图像预处理模块通过将原三通道叉指换能器图像进行灰度化为像素值在0到255之间单通道图像，为单通道图像设置中间阈值，并通过二值化获得明1暗0图像。6. A system for quickly and accurately measuring the number of IDT fingers according to claim 5, wherein the IDT image preprocessing module performs Grayscale into a single-channel image with pixel values between 0 and 255, set an intermediate threshold for the single-channel image, and obtain a light 1 dark 0 image through binarization.
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