CN113066097B - Method and system for rapidly and accurately measuring width, period and metallization ratio of interdigital transducer finger - Google Patents
Method and system for rapidly and accurately measuring width, period and metallization ratio of interdigital transducer finger Download PDFInfo
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Abstract
The invention relates to a method and a system for rapidly and accurately measuring the width, the period and the metallization ratio of an interdigital transducer, wherein the method comprises the following steps: s1, inputting an interdigital transducer image with a scale; s2, acquiring the actual distance of a single pixel point according to the scale; s3, preprocessing an interdigital transducer image; and S4, identifying the sizes of the multiple interdigital transducers and averaging to obtain the size value, the period and the metallization ratio of the interdigital transducers. The invention effectively carries out complete extraction of the image scale of the interdigital transducer and good detection of the edge of the interdigital transducer, and realizes the rapid and accurate measurement of the size of the interdigital transducer.
Description
Technical Field
The invention relates to the technical field of interdigital transducers, in particular to a method and a system for quickly and accurately measuring the width, the period and the metallization ratio of an interdigital transducer.
Background
In the processing of saw filter wafers, various parameters of IDTs of interdigital transducers seriously affect the final performance, and must be accurately measured during the processing. Among them, the width, period and metallization ratio of the interdigital transducer are the most important factors influencing the working frequency of the device. The current common measuring method is to take pictures of interdigital transducers through various high-precision microscopes with a set function, then judge and select certain characteristic positions through machines or manpower, and compare the characteristic positions with a preset scale to obtain the required characteristic size. However, the method usually has a large error due to the fuzzy image boundary and the like, which is caused by insufficient accuracy of interpreting and selecting the feature position. For a structural device of the interdigital transducer, a measuring line covering a finger width in the vertical direction is drawn through analysis software, and the software can directly acquire the length of the measuring line, but the method has the defects that the starting and ending characteristic positions of the measuring line are not accurately selected, the measuring position is not completely vertical to a finger and the like, so that the measuring error is larger, and meanwhile, the method has the defects of troublesome operation, low operation speed and the like.
Therefore, a need exists for a fast and accurate method for measuring the dimensions of the interdigital transducer fingers.
Disclosure of Invention
In order to solve the technical problems in the prior art, the invention provides a method and a system for quickly and accurately measuring the width, the period and the metallization ratio of an interdigital transducer.
The method is realized by adopting the following technical scheme: a method for rapidly and accurately measuring the width, the period and the metallization ratio of an interdigital transducer mainly comprises the following steps:
s1, inputting an interdigital transducer image with a scale, wherein the scale in the image is green;
s2, obtaining the actual distance of a single pixel point according to the scale, filtering the image by extracting the green component of the scale, displaying the green scale, identifying the first green pixel point at the lower left and the last pixel point at the lower right to obtain the pixel length of the image scale, and obtaining the actual length of the single pixel point by dividing the actual length of the scale by the pixel length of the scale;
s3, preprocessing an interdigital transducer image, graying the original three-channel interdigital transducer image into a single-channel image with a pixel value between 0 and 255, performing edge detection by adopting an edge detection algorithm, and acquiring an interdigital transducer edge line by detecting the edge of the image;
s4, identifying the sizes of the interdigital transducers, taking an average value, marking connected components by using a morphological connected algorithm, starting counting from left to right, acquiring common pixel points of the connected components, and calculating each finger; the minimum rectangle of the image is used for surrounding the edge of the interdigital transducer, the length and width middle points of the minimum rectangle are taken as metering points or line segments, the multi-point mean value is taken, and the size value, the period and the metallization ratio of the interdigital transducer are obtained.
The system of the invention is realized by adopting the following technical scheme: a system for rapidly and accurately measuring the width, the period and the metallization ratio of an interdigital transducer finger strip comprises the following components:
the image input module of the interdigital transducer with the scale is used for inputting an image of the interdigital transducer with the scale;
the single pixel point actual distance acquisition module is used for filtering the image by extracting the scale component, displaying the scale, identifying the first green pixel point at the lower left and the last pixel point at the lower right so as to acquire the pixel length of the image scale, and acquiring the actual length of the single pixel point by dividing the actual length of the scale by the pixel length of the scale;
the interdigital transducer image preprocessing module is used for graying the original three-channel interdigital transducer image into a single-channel image with the pixel value between 0 and 255, adopting an edge detection algorithm to carry out edge detection, and obtaining an edge line of the interdigital transducer by detecting the edge of the image;
the interdigital transducer size identification module marks connected components by using a morphological connected algorithm, starts counting from left to right, acquires common pixel points of the connected components, and calculates each finger; the minimum rectangle of the image is used for surrounding the edge of the interdigital transducer, the length and width middle points of the minimum rectangle are taken as metering points or line segments, the multi-point mean value is taken, and the size value, the period and the metallization ratio of the interdigital transducer are obtained.
Compared with the prior art, the invention has the following advantages and beneficial effects:
the invention effectively carries out complete extraction of the image scale of the interdigital transducer and good detection of the edge of the interdigital transducer by acquiring the image of the interdigital transducer with the scale, acquiring the actual distance of a single pixel according to the scale and then carrying out image preprocessing on the interdigital transducer to identify the sizes of a plurality of interdigital transducers, thereby realizing the rapid and accurate measurement of the sizes of the interdigital transducers.
Drawings
FIG. 1 is a flow chart of a method of the present invention;
FIG. 2(a) is a schematic drawing of a scale bar image of an interdigital transducer;
FIG. 2(b) is a schematic diagram of an interdigital transducer image scale extraction;
FIG. 3 is a schematic diagram of an interdigital transducer image graying;
FIG. 4 is a schematic diagram of an interdigital transducer structure;
FIG. 5 is a parameter schematic of an interdigital transducer;
FIG. 6(a) is a diagram of the effect of edge detection of the Canny operator in the image of the interdigital transducer;
FIG. 6(b) is a graph showing the effect of measuring the image width, period and metallization ratio of the interdigital transducer.
Detailed Description
The present invention will be described in further detail with reference to examples and drawings, but the present invention is not limited thereto.
Examples
As shown in fig. 1, the method for rapidly and accurately measuring the width, the period, and the metallization ratio of the interdigital transducer mainly includes the following steps:
s1, inputting an interdigital transducer image with a scale, wherein the scale in the image is green;
s2, acquiring the actual distance of a single pixel point according to a scale, filtering an image by extracting the green component of the scale, displaying the green scale, identifying the first green pixel point at the lower left and the last pixel point at the lower right to acquire the pixel length of the image scale, and acquiring the actual length of the single pixel point by dividing the actual length of the scale by the pixel length of the scale;
s3, preprocessing an interdigital transducer image, graying the original three-channel interdigital transducer image into a single-channel image with a pixel value between 0 and 255, performing edge detection by adopting an edge detection algorithm, and acquiring an interdigital transducer edge line by detecting the edge of the image;
s4, identifying the sizes of the interdigital transducers, taking an average value, marking connected components by using a morphological connected algorithm, starting counting from left to right, acquiring common pixel points of the connected components, and calculating each finger; the minimum rectangle of the image is used for surrounding the edge of the interdigital transducer, the length and width middle points of the minimum rectangle are taken as metering points or line segments, the multi-point calculation mean value is taken, and the size value, the period and the metallization ratio of the interdigital transducer are obtained.
As shown in fig. 2, in the present embodiment, an image of an interdigital transducer with a scale is input, and after observation, only a portion of the scale in the image is green, which is a red, green and blue three-component matrix, and a green component of the scale is extracted to obtain the number of pixels of the scale. Specifically, the manner of extracting the green component of the image includes: using the RGB format and using the HSV format; the RGB format is utilized, the green component G is larger than other components, namely the green component minus the red component is larger than a threshold value, and the green component minus the blue component is larger than the threshold value, so that other non-green components can be separated; the HSV format is used for obtaining components belonging to the green part according to the image matrix by setting hue, saturation and brightness, and then the green scale can be extracted.
As shown in fig. 3, in this embodiment, image preprocessing is performed to eliminate or adjust image noise, red spots, exposure, and the like to appropriate sizes, so that the recognition accuracy can be greatly improved; assuming that 0 is black and 1 is white, the calculation amount is simplified, and the single-channel gray scale conversion formula is as follows:
Y＝0.299R+0.587G+0.114B
where R, G and B are components of the color image and Y is the image gray scale value.
As shown in fig. 4, the structure of the interdigital transducer shows a complete resonator structure, including left and right reflection grating arrays, bus bars, the interdigital transducer, and the like.
As shown in fig. 5, the interdigital transducer parameters include a finger width LW, a finger period pitch, and a metallization ratio MR; the relationship of each parameter is expressed as follows:
as shown in fig. 6(a), in the present embodiment, the edge detection algorithm includes: wavelet detection, Candy algorithm, sub-pixel detection and genetic algorithm and their improved algorithms.
The method comprises the following steps that the Candy operator carries out edge detection, and the method mainly comprises the following steps:
s31, smoothing the image with a gaussian filter: filtering with 3x3 or 5x5 gaussian filter to eliminate noise, the gaussian formula is as follows:
where (x, y) is the Gaussian filter coordinate, δ2Is the variance of the gaussian filter, G (x, y) is the value of the gaussian filter;
s32, calculating the amplitude and the direction of the gradient by using the finite difference of the first-order partial derivatives: for each pixel, calculating differential approximations in four directions of 0 degree, 45 degrees, 90 degrees and 135 degrees to obtain the gradient magnitude of the pixel, wherein gradient magnitude calculation formulas are respectively as follows:
f0°(i,j)＝[1(i-1,j+1)+2(i,j+1)+1(i+1,j+1)-1(i-1,j-1)-2(i,j-1)-1(i+1,j-1)]
f45°(i,j)＝[1(i+1,j)+2(i+1,j+1)+1(i,j+1)-1(i-1,j)-2(i-1,j-1)-1(i,j-1)]
f90°(i,j)＝[1(i+1,j+1)+2(i+1,j)+1(i+1,j-1)-1(i-1,j+1)-2(i-1,j)-1(i-1,j-1)]
f135°(i,j)＝[1(i,j-1)+2(i+1,j-1)+1(i+1,j)-1(i-1,j)-2(i-1,j+1)-1(i,j+1)]
wherein, (i, j) is a coordinate, f is a gradient in each direction, and M (i, j) is a bit gradient amplitude;
s33, suppressing by using a non-maximum value, wherein the edge has an accurate response, but the suppression of the non-maximum value can help to suppress all gradient values except the local maximum value to 0, comparing the gradient intensity of the current pixel with two pixels along the positive and negative gradient directions, if the gradient intensity of the current pixel is maximum compared with the other two pixels, the pixel point is reserved as an edge point, otherwise, the pixel point is suppressed;
s34, detecting and connecting edges by using a double-threshold algorithm; the general edge detection algorithm uses a threshold value to filter out small gradient values caused by noise or color change, and retains large gradient values; the edge detection algorithm of the present embodiment uses dual thresholds, i.e., a high threshold and a low threshold, to distinguish edge pixels; if the gradient value of the edge pixel point is greater than the high threshold value, the edge pixel point is considered to be a strong edge point; if the gradient value of the edge pixel point is smaller than the high threshold value and larger than the low threshold value, the edge pixel point is marked as a weak edge point, and the point smaller than the low threshold value is suppressed.
As shown in fig. 6(b), in this embodiment, the minimum image rectangle surrounds the edge of the interdigital transducer, and a large rectangle and a small rectangle are obtained, where the width of the small rectangle is the width LW of the interdigital transducer, and then the period formula is defined as:
wherein, WidthbigIs large rectangular Width, WidthsamllIs a small rectangle in width; the metallization ratio can be obtained by the same method:
based on the same inventive concept, the invention also provides a system for rapidly and accurately measuring the width, the period and the metallization ratio of the interdigital transducer, which comprises the following steps:
the image input module of the interdigital transducer with the scale is used for inputting an image of the interdigital transducer with the scale;
the single pixel point actual distance acquisition module is used for filtering the image by extracting the scale component, displaying the scale, identifying the first green pixel point at the lower left and the last pixel point at the lower right so as to acquire the pixel length of the image scale, and acquiring the actual length of the single pixel point by dividing the actual length of the scale by the pixel length of the scale;
the interdigital transducer image preprocessing module is used for graying the original three-channel interdigital transducer image into a single-channel image with the pixel value between 0 and 255, adopting an edge detection algorithm to carry out edge detection, and obtaining an edge line of the interdigital transducer by detecting the edge of the image;
the interdigital transducer size identification module marks connected components by using a morphological connected algorithm, starts counting from left to right, acquires common pixel points of the connected components, and calculates each finger; the minimum rectangle of the image is used for surrounding the edge of the interdigital transducer, the length and width middle points of the minimum rectangle are taken as metering points or line segments, the multi-point mean value is taken, and the size value, the period and the metallization ratio of the interdigital transducer are obtained.
The above embodiments are preferred embodiments of the present invention, but the present invention is not limited to the above embodiments, and any other changes, modifications, substitutions, combinations, and simplifications which do not depart from the spirit and principle of the present invention should be construed as equivalents thereof, and all such changes, modifications, substitutions, combinations, and simplifications are intended to be included in the scope of the present invention.
Claims (4)
1. A method for rapidly and accurately measuring the width, the period and the metallization ratio of an interdigital transducer is characterized by comprising the following steps:
s1, inputting an interdigital transducer image with a scale, wherein the scale in the image is green;
s2, obtaining the actual distance of a single pixel point according to the scale, filtering the image by extracting the green component of the scale, displaying the green scale, identifying the first green pixel point at the lower left and the last pixel point at the lower right to obtain the pixel length of the image scale, and obtaining the actual length of the single pixel point by dividing the actual length of the scale by the pixel length of the scale;
s3, preprocessing an interdigital transducer image, graying the original three-channel interdigital transducer image into a single-channel image with a pixel value between 0 and 255, performing edge detection by adopting an edge detection algorithm, and acquiring an interdigital transducer edge line by detecting the edge of the image;
s4, identifying the sizes of a plurality of interdigital transducers, averaging, marking connected components by using a morphological connected algorithm, counting from left to right, acquiring common pixel points, and calculating each finger; utilizing the minimum image rectangle to surround the edge of the interdigital transducer, taking the middle point of the length and the width of the minimum image rectangle as a metering point or a line segment, taking a multi-point mean value, and obtaining the size value, the period and the metallization ratio of the interdigital transducer;
the manner of extracting the scale green component in step S2 includes: using the RGB format and using the HSV format; the RGB format is utilized, wherein the green component G is set to be larger than other components, the red component subtracted from the green component is larger than a threshold value, the blue component subtracted from the green component is larger than the threshold value, and other non-green components are separated; the HSV format is utilized to obtain components belonging to a green part according to an image matrix by setting hue, saturation and brightness, and a green scale is extracted;
the relationship among the parameters of the interdigital transducer is as follows:
wherein LW is the finger width; pitch is the finger period and MR the metallization ratio.
2. The method of claim 1, wherein the edge detection algorithm in step S3 comprises: wavelet detection, Candy algorithm, sub-pixel detection and genetic algorithm and their improved algorithms.
3. The method of claim 2, wherein the candy operator performs edge detection by using the method of measuring the width, period and metallization ratio of interdigital transducer fingers, which mainly comprises the following steps:
s31, smoothing the image by a Gaussian filter: filtering is performed using a 3x3 or 5x5 gaussian filter, with the gaussian formula as follows:
where (x, y) is the Gaussian filter coordinate, δ2Is the variance of the gaussian filter, G (x, y) is the value of the gaussian filter;
s32, calculating the amplitude and the direction of the gradient by using the finite difference of the first-order partial derivatives: for each pixel, differential approximations in four directions of 0 degree, 45 degrees, 90 degrees and 135 degrees are calculated to obtain the gradient magnitude of the pixel, and gradient magnitude calculation formulas are respectively as follows:
f0°(i,j)＝[1(i-1,j+1)+2(i,j+1)+1(i+1,j+1)-1(i-1,j-1)-2(i,j-1)-1(i+1,j-1)]
f45°(i,j)＝[1(i+1,j)+2(i+1,j+1)+1(i,j+1)-1(i-1,j)-2(i-1,j-1)-1(i,j-1)]
f90°(i,j)＝[1(i+1,j+1)+2(i+1,j)+1(i+1,j-1)-1(i-1,j+1)-2(i-1,j)-1(i-1,j-1)]
f135°(i,j)＝[1(i,j-1)+2(i+1,j-1)+1(i+1,j)-1(i-1,j)-2(i-1,j+1)-1(i,j+1)]
wherein, (i, j) is a coordinate, f is a gradient in each direction, and M (i, j) is a bit gradient amplitude;
s33, inhibiting by using a non-maximum value, comparing the gradient intensity of the current pixel with two pixels along the positive and negative gradient directions, if the gradient intensity of the current pixel is maximum compared with the other two pixels, reserving the pixel point as an edge point, otherwise, inhibiting the pixel point;
and S34, detecting and connecting edges by using a double-threshold algorithm.
4. The system for rapidly and accurately measuring the width, the period and the metallization ratio of the interdigital transducer finger strip according to claim 1, is characterized by comprising:
the image input module of the interdigital transducer with the scale is used for inputting an image of the interdigital transducer with the scale;
the single pixel point actual distance acquisition module is used for filtering the image by extracting the component of the scale, displaying the scale, identifying the first green pixel point at the lower left and the last pixel point at the lower right so as to acquire the length of the image scale pixel, and acquiring the actual length of the single pixel point by dividing the actual length of the scale by the length of the scale pixel;
the interdigital transducer image preprocessing module is used for graying the original three-channel interdigital transducer image into a single-channel image with the pixel value between 0 and 255, adopting an edge detection algorithm to carry out edge detection, and obtaining an edge line of the interdigital transducer by detecting the edge of the image;
the interdigital transducer size identification module marks connected components by using a morphological connected algorithm, starts counting from left to right, acquires common pixel points of the connected components, and calculates each finger; the minimum rectangle of the image is used for surrounding the edge of the interdigital transducer, the length and width middle points of the minimum rectangle are taken as metering points or line segments, the multi-point mean value is taken, and the size value, the period and the metallization ratio of the interdigital transducer are obtained.
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